Polishing liquid replenishment method and device based on visual detection

Abstract

The present invention relates to the technical field of polishing liquid detection, and in particular to a polishing liquid replenishment method and device based on visual detection, which provides a comprehensive evaluation of the state of the polishing liquid and can more accurately judge the actual use of the polishing liquid and whether replenishment is needed; the method comprises: obtaining the real-time liquid level of a liquid storage tank in a polishing device; in response to the real-time liquid level being higher than a preset minimum liquid level of the liquid storage tank, obtaining the real-time turbidity and real-time cooling efficiency gap of the polishing liquid in the liquid storage tank; the real-time cooling efficiency gap indicates the reduction in cooling efficiency caused by the lack of polishing liquid; calculating the turbidity difference between the real-time turbidity and the initial turbidity of the polishing liquid; inputting the turbidity difference and the real-time cooling efficiency gap into a polishing liquid quantity analysis model to obtain a polishing liquid quantity characterization value in the current polishing operation; and comparing and judging the polishing liquid quantity characterization value according to a predetermined polishing liquid quantity threshold.

Description

Technical Field

[0001] The present invention relates to the technical field of polishing liquid detection, and in particular to a polishing liquid replenishing method and device based on visual detection. Background Art

[0002] In the field of industrial manufacturing and precision machining, polishing is one of the key processes to ensure the surface quality and performance of products. During the polishing process, the polishing fluid not only plays a grinding role, but also is responsible for cooling the workpiece to prevent overheating, while taking away the debris generated by polishing. In order to ensure the best polishing effect, the appropriate polishing fluid concentration, temperature and fluidity must be maintained. However, in actual operation, due to the natural consumption of the polishing fluid, evaporation or turbidity changes caused by impurities, the state of the polishing fluid will continue to change, affecting the polishing effect and efficiency.

[0003] Existing polishing fluid replenishment management methods mostly rely on liquid level sensor monitoring or timed replenishment, which often ignores the dynamic changes of the polishing fluid during actual use, such as changes in turbidity and cooling efficiency, resulting in inaccurate judgment of the timing of replenishment.

[0004] Therefore, there is an urgent need to provide a polishing liquid replenishment method and device based on visual detection to solve the above technical problems. Summary of the invention

[0005] To solve the above technical problems, the present invention provides a polishing liquid replenishment method and device based on visual detection, which can provide a comprehensive evaluation of the state of the polishing liquid and more accurately determine the actual usage of the polishing liquid and whether replenishment is needed.

[0006] In a first aspect, the present invention provides a polishing liquid replenishment method based on visual detection, comprising:

[0007] Get the real-time liquid level of the liquid storage tank in the polishing equipment;

[0008] In response to the real-time liquid level being higher than a preset minimum liquid level in the liquid storage tank, obtaining the real-time turbidity and the real-time cooling efficiency gap of the polishing liquid in the liquid storage tank; the real-time cooling efficiency gap indicates the extent of cooling efficiency reduction caused by the lack of polishing liquid;

[0009] Calculating the turbidity difference between the real-time turbidity and the initial turbidity of the polishing liquid;

[0010] Inputting the turbidity difference and the real-time cooling efficiency gap into a polishing liquid quantity analysis model to obtain a polishing liquid quantity characterization value in a current polishing operation;

[0011] According to the predetermined polishing liquid quantity threshold, the polishing liquid quantity characterization value is compared and judged: if the polishing liquid quantity characterization value is lower than the polishing liquid quantity threshold, it means that the polishing liquid for the current polishing operation is sufficient and no replenishment is needed; if the polishing liquid quantity characterization value is not lower than the polishing liquid quantity threshold, it means that the polishing liquid for the current polishing operation is insufficient and replenishment is needed, and the staff is prompted to replenish the liquid.

[0012] On the other hand, the present application also provides a polishing liquid replenishing device based on visual detection, the device comprising:

[0013] A real-time liquid level acquisition module is used to obtain the real-time liquid level information of the liquid storage tank in the polishing equipment;

[0014] The state detection module, in response to the real-time liquid level provided by the real-time liquid level acquisition module being higher than the preset minimum liquid level of the liquid storage tank, further acquires the real-time turbidity and the real-time cooling efficiency gap of the polishing liquid in the liquid storage tank;

[0015] A turbidity difference calculation module, used to calculate the turbidity difference between the real-time turbidity provided by the state detection module and the initial turbidity of the polishing liquid;

[0016] The polishing liquid quantity analysis module receives the turbidity difference value provided by the turbidity calculation module and the real-time cooling efficiency gap provided by the state detection module, inputs the turbidity difference value and the real-time cooling efficiency gap into the polishing liquid quantity analysis model, and obtains the polishing liquid quantity characterization value in the current polishing operation;

[0017] The judgment and prompt module compares and judges the polishing liquid quantity characterization value provided by the polishing liquid quantity analysis module according to a predetermined polishing liquid quantity threshold; if the polishing liquid quantity characterization value is lower than the polishing liquid quantity threshold, it is judged that the polishing liquid for the current polishing operation is sufficient and no liquid replenishment is required; if the polishing liquid quantity characterization value is not lower than the polishing liquid quantity threshold, it is judged that the polishing liquid for the current polishing operation is insufficient and liquid replenishment is required, and the staff is prompted to perform the liquid replenishment operation.

[0018] In a third aspect, the present application provides an electronic device, comprising a bus, a transceiver, a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the transceiver, the memory, and the processor are connected via the bus, and the computer program, when executed by the processor, implements the steps of any one of the above methods.

[0019] In a fourth aspect, the present application further provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program implements the steps in any one of the above-mentioned methods when executed by a processor.

[0020] Compared with the prior art, the present invention has the following beneficial effects: by acquiring the liquid level of the liquid storage tank, the turbidity of the polishing liquid and the cooling efficiency gap in real time, the present invention can dynamically reflect the actual state of the polishing liquid, more accurately capture the changing trend of the polishing liquid, and provide a basis for timely adjustment; by inputting the turbidity difference and the cooling efficiency gap into the analysis model to obtain the polishing liquid volume characterization value, and comparing this value with the preset threshold, it can be more accurately determined whether the polishing liquid needs to be replenished, which not only avoids the problem of replenishing the liquid too early or too late, but also optimizes resource utilization; comprehensively considering factors such as the composition characteristics of the polishing liquid and the composition characteristics of the polishing workpiece, when determining the polishing liquid volume threshold, it ensures adaptability to different polishing tasks, and can customize the management of the polishing liquid according to different processing requirements, thereby improving the flexibility and scope of application of the process; in summary, the present invention not only monitors the liquid level of the polishing liquid, but also detects the turbidity and cooling efficiency gap of the polishing liquid in real time, and provides a comprehensive evaluation of the state of the polishing liquid. Compared with the traditional method that only relies on the liquid level sensor or timed replenishment, it can more accurately judge the actual use of the polishing liquid and whether replenishment is needed. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 is a flow chart of a polishing liquid replenishment method based on visual detection provided by one embodiment of the present invention;

[0023] Figure 2 is a hardware architecture diagram of an electronic device provided by an embodiment of the present invention;

[0024] Figure 3 It is a structural diagram of a polishing liquid replenishing device based on visual detection provided by one embodiment of the present invention. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0026] Please refer to Figure 1, an embodiment of the present invention provides a polishing liquid replenishing method based on visual detection, the method comprising:

[0027] Step S1, obtaining the real-time liquid level of the liquid storage tank in the polishing equipment;

[0028] Step S2, in response to the real-time liquid level being higher than the preset minimum liquid level of the liquid storage tank, obtaining the real-time turbidity and the real-time cooling efficiency gap of the polishing liquid in the liquid storage tank; the real-time cooling efficiency gap indicates the extent of cooling efficiency reduction caused by the lack of polishing liquid;

[0029] Step S3, calculating the turbidity difference between the real-time turbidity and the initial turbidity of the polishing liquid;

[0030] Step S4, inputting the turbidity difference and the real-time cooling efficiency gap into a polishing liquid quantity analysis model to obtain a polishing liquid quantity characterization value in the current polishing operation;

[0031] Step S5: comparing and judging the polishing liquid quantity characterization value according to a predetermined polishing liquid quantity threshold value:

[0032] If the polishing liquid quantity characterization value is lower than the polishing liquid quantity threshold, it means that the polishing liquid is sufficient for the current polishing operation and no replenishment is needed; if the polishing liquid quantity characterization value is not lower than the polishing liquid quantity threshold, it means that the polishing liquid is insufficient for the current polishing operation and replenishment is needed, and the staff is prompted to replenish the liquid; the polishing liquid quantity threshold is determined based on the polishing liquid composition characteristics and the polishing workpiece composition characteristics in the current polishing operation.

[0033] In this embodiment, by acquiring the liquid level of the liquid storage tank, the turbidity of the polishing liquid and the cooling efficiency gap in real time, the actual state of the polishing liquid can be dynamically reflected, and the changing trend of the polishing liquid can be captured more accurately, providing a basis for timely adjustment; by inputting the turbidity difference and the cooling efficiency gap into the analysis model to obtain the polishing liquid volume characterization value, and comparing this value with the preset threshold, it can be more accurately determined whether the polishing liquid needs to be replenished, which not only avoids the problem of replenishing the liquid too early or too late, but also optimizes resource utilization; comprehensively considering factors such as the composition characteristics of the polishing liquid and the composition characteristics of the polishing workpiece, when determining the polishing liquid volume threshold, the adaptability to different polishing tasks is ensured, and the polishing liquid can be customized according to different processing requirements. Management, improve the flexibility and scope of application of the process; In summary, the present invention not only monitors the liquid level of the polishing liquid, but also detects the turbidity and cooling efficiency gap of the polishing liquid in real time, and provides a comprehensive evaluation of the state of the polishing liquid. Compared with the traditional method that only relies on the liquid level sensor or timed replenishment, it can more accurately judge the actual use of the polishing liquid and whether it needs to be replenished.

[0034] Described below Figure 1 How the various steps are performed.

[0035] For step S1:

[0036] During the polishing process, the polishing fluid is continuously pumped from the tank to the polishing area to complete the tasks of grinding, cooling and debris removal of the workpiece; with the continuous use of the polishing fluid, the polishing fluid level in the tank will change accordingly; in order to ensure that the polishing fluid always remains within the appropriate liquid level range, thereby maintaining a stable polishing effect and efficiency, it is necessary to monitor the polishing fluid level in the tank in real time.

[0037] Specifically, a liquid level sensor is installed at a suitable position inside or outside the liquid storage tank of the polishing equipment. It can be a float type, capacitor type, ultrasonic type or radar type, etc. The specific type is determined according to the actual situation and cost considerations of the polishing equipment; the task of the liquid level sensor is to monitor the polishing liquid level in the liquid storage tank in real time and convert it into an electrical signal or other form of signal output; the processed liquid level signal will be used to display the polishing liquid level in the liquid storage tank in real time on the control panel of the polishing equipment or the display screen of the monitoring system.

[0038] By implementing step S1, the real-time liquid level of the liquid storage tank in the polishing equipment can be accurately and reliably obtained, providing important basic data for subsequent steps (such as turbidity and cooling efficiency detection, liquid replenishment decision, etc.); at the same time, this also provides a strong guarantee for the continuity and stability of the polishing operation.

[0039] For step S2:

[0040] On the premise of ensuring that the real-time liquid level in the liquid storage tank is higher than the preset minimum liquid level, step S2 aims to further evaluate the quality status of the polishing liquid, especially its turbidity and cooling efficiency; this is to ensure that subsequent turbidity and cooling efficiency gap detection is only carried out when the liquid level is sufficient, so as to avoid unnecessary detection when the polishing liquid is insufficient, and at the same time, ensure the quality and efficiency of the polishing operation.

[0041] Among them, the method for obtaining the real-time turbidity of the polishing liquid is as follows:

[0042] Step S211, obtaining the composition characteristics of the polishing liquid; the composition characteristics of the polishing liquid include the type of solvent, the type of abrasive, the type of additives and their concentration, etc. of the polishing liquid, and the specific composition of the polishing liquid is determined through laboratory testing;

[0043] Step S212, determine the polishing liquid image acquisition strategy according to the characteristics of the polishing liquid composition; the polishing liquid image acquisition strategy includes the number of image acquisitions, as well as the light intensity and light source type during each image acquisition; determine a reasonable image acquisition frequency based on the characteristics of the polishing liquid composition; for example, for polishing liquids with finer particles and easy sedimentation, it may be necessary to acquire images more frequently; while for polishing liquids with relatively stable components, the acquisition frequency can be appropriately reduced; a fixed period plus random sampling method is used to determine the time point of each acquisition to ensure that the changing trend of the polishing liquid state can be captured without missing key moments; based on the characteristics of the polishing liquid composition, select an appropriate light source type (such as LED lamp, halogen lamp) according to factors such as the color and transparency of the polishing liquid. The light source should be able to provide uniform and stable lighting and minimize the impact of glare or shadows; adjust the brightness of the light source according to the optical properties of the polishing liquid (such as absorptivity, reflectivity), so that the particles or other opaque substances in the polishing liquid can be clearly visible in the image, but the image will not be overexposed due to excessive brightness;

[0044] Step S213, according to the polishing liquid image acquisition strategy, perform image acquisition in sequence to obtain a polishing liquid illumination image set; specifically, according to the pre-set image acquisition strategy, automatically control the camera or image sensor to perform image acquisition; ensure that the same parameter settings (such as focal length, shutter speed, ISO sensitivity) are followed each time the acquisition is performed to maintain consistency; in order to ensure image quality, try to keep the surrounding environmental conditions (such as temperature and humidity) constant during the acquisition process to avoid interference from external factors; each acquired image should be immediately saved to a local storage device or a cloud server for subsequent processing; at the same time, add a timestamp and other necessary metadata (such as light intensity, acquisition location) to each image;

[0045] Step S214, perform turbidity feature recognition on each illumination image in the polishing liquid illumination image set to obtain the turbidity corresponding to each illumination image; specifically: perform denoising and smoothing on the original image to remove unnecessary details and highlight the particles or impurities in the polishing liquid; this can be achieved through a filtering algorithm (such as Gaussian blur); appropriately increase the image contrast to make the turbidity feature more obvious for subsequent analysis; apply edge detection algorithms (such as Canny, Sobel) to identify boundaries in the image, especially those formed by particles or bubbles in the polishing liquid; analyze the texture features of the image through methods such as gray level co-occurrence matrix (GLCM) and local binary pattern (LBP), evaluate its complexity and regularity, and thus infer the degree of turbidity; based on the results of the above feature extraction, define a quantitative index to represent the turbidity; for example, the proportion of non-background areas in the image can be calculated, or the number and distribution of particles can be counted;

[0046] Step S215, comprehensively analyze the turbidity corresponding to each illumination image in the polishing liquid illumination image set to obtain the real-time turbidity of the polishing liquid; considering that some images are more representative of the overall situation, such as images collected under a certain illumination condition, these images can be given a higher weight, and the real-time turbidity of the polishing liquid is obtained by weighted calculation of the turbidity corresponding to multiple images under different illumination conditions.

[0047] The above-mentioned method for obtaining the real-time turbidity of the polishing liquid determines the composition of the polishing liquid through laboratory tests, ensures the targetedness of the image acquisition and processing strategy, and improves the accuracy of the turbidity measurement; adjusts the acquisition frequency and light source settings according to the characteristics of different polishing liquids, adapts to various types of polishing liquids, and enhances the flexibility and applicability of the system; adopts a fixed period plus random sampling acquisition method, combined with environmental condition control, to ensure the representativeness and stability of the data and reduce external interference; uses edge detection, texture analysis and other algorithms for feature recognition, and integrates multiple image data through weighted calculation to achieve intelligent evaluation of the polishing liquid state; automated image acquisition and real-time storage mechanism improves work efficiency, while metadata annotation facilitates traceability and subsequent analysis, improving overall management efficiency.

[0048] The method for obtaining the real-time cooling efficiency gap is as follows:

[0049] Step S221, collect the real-time temperature of the return pipe and the outlet pipe of the liquid storage tank to obtain the real-time return temperature and the real-time outlet temperature; install high-precision temperature sensors (such as PT100, NTC thermistor or infrared temperature sensor) on the return pipe and the outlet pipe of the liquid storage tank respectively to ensure that the inlet and outlet temperatures of the liquid can be accurately measured; in order to obtain the most realistic temperature reading, the sensor should be installed in a position where the fluid flows smoothly and is not affected by external heat; for example, avoid installing it near a heating source or radiator to prevent temperature reading distortion; set a reasonable data acquisition frequency (such as once per second or higher) to capture the trend of temperature changes, and transmit the temperature data to the control system through an industrial communication protocol (such as MODBUS, PROFIBUS); each collected temperature data should be saved in time and attached with a timestamp for subsequent analysis;

[0050] Step S222, calculating the real-time cooling efficiency according to the real-time liquid return temperature and the real-time liquid outlet temperature; the cooling efficiency can be calculated by the following formula: real-time cooling efficiency = (real-time liquid return temperature - real-time liquid outlet temperature) / real-time liquid return temperature;

[0051] Step S223, obtaining the operating status and real-time ambient temperature of the radiator in the polishing equipment; obtaining key operating parameters of the radiator, such as fan speed, water pump flow, etc., by connecting to the interface of the radiator control system; installing an ambient temperature sensor near the polishing equipment to ensure that the actual temperature conditions of the surrounding environment can be accurately reflected;

[0052] Step S224: perform a gap analysis on the real-time cooling efficiency according to the operating status of the radiator and the real-time ambient temperature to obtain the real-time cooling efficiency gap caused by the reduction in the amount of polishing liquid; establish a cooling efficiency baseline as a reference standard based on historical data and the ideal cooling efficiency under current conditions (including the operating status of the radiator and the ambient temperature); compare the real-time cooling efficiency with the baseline to identify any deviations; if it is found that the actual cooling efficiency is lower than expected, there may be a cooling efficiency gap; quantify the extent of this gap by comparing the current cooling efficiency with the cooling efficiency under known sufficient polishing liquid conditions.

[0053] The above-mentioned method for obtaining the real-time cooling efficiency gap ensures the accuracy of temperature data and reduces interference from external factors by adopting high-precision temperature sensors and reasonable installation positions; the high-frequency data acquisition frequency can timely capture temperature change trends, provide instant feedback, and facilitate rapid response; the various factors affecting the cooling efficiency are considered in combination with the radiator operating status and ambient temperature, thereby improving the reliability of the analysis results; by establishing a cooling efficiency baseline and comparing it with real-time data, the cooling efficiency gap is intelligently identified, the impact of the reduction in polishing liquid volume is quantified, and accurate fluid replenishment decisions are supported.

[0054] For step S3:

[0055] During the actual polishing process, the turbidity of the polishing liquid will gradually increase with the natural consumption and evaporation of the polishing liquid, as well as the accumulation of debris and impurities caused by grinding; therefore, by monitoring the turbidity of the polishing liquid and comparing it with the initial turbidity, the turbidity difference can be calculated. The turbidity difference intuitively reflects the change in turbidity of the polishing liquid during use, indicating the degree of contamination of the polishing liquid during the polishing process; before the start of the polishing operation or each time a new batch of polishing liquid is replaced, the initial turbidity of the polishing liquid is accurately measured and recorded by visual inspection or other reliable methods; the initial turbidity serves as the basis for all subsequent turbidity comparisons; the turbidity difference is obtained by subtracting the initial turbidity from the currently measured real-time turbidity.

[0056] For step S4:

[0057] Step S4 is to evaluate the polishing liquid quantity state in the current polishing operation by integrating the turbidity difference and the real-time cooling efficiency gap obtained from steps S2 and S3, and is specifically implemented as follows:

[0058] Step S41, obtaining the difference between the real-time turbidity calculated in step S3 and the initial turbidity, i.e., the turbidity difference; the turbidity difference reflects the change in turbidity of the polishing liquid due to the increase of impurities during use; obtaining the real-time cooling efficiency gap calculated in step S2; the real-time cooling efficiency gap indicates the reduction in cooling efficiency due to the lack of polishing liquid;

[0059] Step S42, determining a polishing liquid quantity analysis model according to the specific requirements and technical conditions of the polishing operation; the polishing liquid quantity analysis model adopts a machine learning algorithm, statistical regression analysis or other mathematical modeling techniques, and can accurately convert the turbidity difference and the cooling efficiency gap into a characterization value reflecting the state of the polishing liquid quantity; ensuring that the model parameters have been optimized according to the polishing liquid composition characteristics and the polishing workpiece composition characteristics in the current polishing operation;

[0060] Step S43: standardize the input data (turbidity difference and cooling efficiency gap) so that data in different ranges can be compared on the same scale; for example, map all values ​​between 0 and 1, or convert them into a standard normal distribution; and further extract useful information from the data through feature engineering; for example, create interaction terms or polynomial features to capture complex relationships between data;

[0061] Step S44, taking the standardized turbidity difference and cooling efficiency gap as input, and inputting them into the trained polishing liquid quantity analysis model, the polishing liquid quantity analysis model outputs a comprehensive polishing liquid quantity characterization value; the polishing liquid quantity characterization value can quantify the volume missing state of the polishing liquid in the current polishing operation.

[0062] In this step, through machine learning algorithms, statistical regression analysis or other mathematical modeling techniques, the turbidity difference and cooling efficiency gap can be accurately converted into characterization values ​​reflecting the state of the polishing liquid quantity; the state of the polishing liquid can be monitored in real time, and the polishing liquid quantity demand of the current polishing operation can be analyzed through the model, so as to replenish the polishing liquid in time to ensure the continuity and efficiency of the polishing operation; through accurate liquid quantity assessment, the excessive use and waste of polishing liquid can be reduced, and production costs can be reduced.

[0063] For step S5:

[0064] Step S5 is intended to determine whether the polishing liquid needs to be replenished by comparing the polishing liquid quantity characterization value obtained in step S4 with a preset threshold value; the determination of the polishing liquid quantity threshold value involves comprehensive consideration of multiple factors; specifically, the following factors need to be considered:

[0065] Polishing liquid composition characteristics: Different polishing liquid compositions have different grinding capabilities, cooling effects and stability; therefore, when determining the polishing liquid volume threshold, the composition characteristics of the polishing liquid need to be fully considered; among them, the type and particle size of the abrasive will affect the grinding effect of the polishing liquid; for example, some abrasives may have stronger grinding capabilities, but may also cause the polishing liquid to fail faster; additives in the polishing liquid, such as surfactants, stabilizers, etc., will also affect its performance, and the type and concentration of additives need to be determined according to the material and process requirements of the polishing workpiece;

[0066] Polishing workpiece composition characteristics: Different workpiece materials have different requirements for polishing fluids, so it is necessary to select a suitable polishing fluid based on the composition characteristics of the workpiece and determine the corresponding liquid volume threshold; the material type of the workpiece (such as different types of metals, alloys, etc.) will affect the selection and service life of the polishing fluid; for example, some metal workpieces may require the use of a polishing fluid with stronger grinding ability; the initial state of the workpiece surface (such as roughness, stains, etc.) will also affect the use of the polishing fluid; if there are more stains or impurities on the workpiece surface, more polishing fluid may be required to remove these stains.

[0067] The following methods can be used to determine the polishing liquid volume threshold:

[0068] a. Experiments are conducted to determine the service life and performance of different polishing fluids under different conditions, thereby determining the appropriate liquid volume threshold. This method requires more time and resources, but the results are more accurate and reliable.

[0069] b. Estimate the polishing liquid volume threshold based on previous usage experience and data. This method is simple and easy to implement, but there may be certain errors and uncertainties.

[0070] c. By establishing a mathematical model to predict the service life and performance of the polishing liquid, the liquid volume threshold is determined. This method requires a high level of mathematics and computer technology, but can more accurately reflect the actual use of the polishing liquid.

[0071] After the polishing liquid amount threshold is determined, it needs to be compared with the polishing liquid amount characterization value obtained in step S4:

[0072] If the polishing liquid quantity characterization value is lower than the threshold value, it means that the current polishing liquid quantity is sufficient to maintain normal polishing operation without replenishing the liquid;

[0073] If the polishing liquid quantity characterization value is not lower than the threshold, it indicates that the polishing liquid is insufficient, which may affect the polishing effect and efficiency and requires refilling. Once it is determined that refilling is required, a prompt message is immediately generated to notify the staff. The prompt can be implemented in a variety of ways, such as screen alarms, sound alarms or SMS notifications, to ensure that it is conveyed to relevant personnel in a timely manner. Specific refilling suggestions are provided, such as recommended refilling volume, refilling frequency and any matters that need attention, to help staff complete the refilling operation quickly and effectively.

[0074] Furthermore, an automatic refilling device may be provided. When refilling is required, the refilling program may be directly triggered, and the automatic refilling device may be controlled to automatically add an appropriate amount of polishing liquid according to a predetermined strategy, thereby reducing manual intervention.

[0075] like Figure 2 , Figure 3 As shown, an embodiment of the present invention provides a polishing liquid replenishing device based on visual detection. The device embodiment can be implemented by software, or by hardware or a combination of software and hardware. From the hardware level, Figure 2 As shown, it is a hardware architecture diagram of an electronic device in which a polishing liquid replenishing device based on visual detection provided by an embodiment of the present invention is located. Figure 2 In addition to the processor, memory, network interface, and non-volatile memory shown, the electronic device in the embodiment may also include other hardware, such as a forwarding chip responsible for processing messages, etc. Taking software implementation as an example, Figure 3 As shown, as a device in a logical sense, the CPU of the electronic device in which it is located reads the corresponding computer program in the non-volatile memory into the internal memory and runs it.

[0076] like Figure 3 As shown, this embodiment provides a polishing liquid replenishing device based on visual detection, comprising:

[0077] A real-time liquid level acquisition module is used to obtain the real-time liquid level information of the liquid storage tank in the polishing equipment;

[0078] The state detection module further acquires the real-time turbidity and the real-time cooling efficiency gap of the polishing liquid in the liquid storage tank in response to the real-time liquid level provided by the real-time liquid level acquisition module being higher than the preset minimum liquid level of the liquid storage tank; the real-time cooling efficiency gap indicates the reduction in cooling efficiency caused by the lack or performance degradation of the polishing liquid;

[0079] A turbidity difference calculation module, used to calculate the turbidity difference between the real-time turbidity provided by the state detection module and the initial turbidity of the polishing liquid;

[0080] The polishing liquid quantity analysis module receives the turbidity difference value provided by the turbidity calculation module and the real-time cooling efficiency gap provided by the state detection module, inputs the turbidity difference value and the real-time cooling efficiency gap into the polishing liquid quantity analysis model, and obtains the polishing liquid quantity characterization value in the current polishing operation;

[0081] The judgment and prompt module compares and judges the polishing liquid quantity characterization value provided by the polishing liquid quantity analysis module according to a predetermined polishing liquid quantity threshold; if the polishing liquid quantity characterization value is lower than the polishing liquid quantity threshold, it is judged that the polishing liquid for the current polishing operation is sufficient and no liquid replenishment is required; if the polishing liquid quantity characterization value is not lower than the polishing liquid quantity threshold, it is judged that the polishing liquid for the current polishing operation is insufficient and liquid replenishment is required, and the staff is prompted to perform the liquid replenishment operation.

[0082] It is understood that the structure illustrated in the embodiment of the present invention does not constitute a specific limitation on a polishing liquid replenishing device based on visual detection. In other embodiments of the present invention, a polishing liquid replenishing device based on visual detection may include more or fewer components than shown in the figure, or combine some components, or split some components, or arrange the components differently. The components shown in the figure may be implemented in hardware, software, or a combination of software and hardware.

[0083] The information interaction, execution process and other contents between the modules in the above-mentioned device are based on the same concept as the embodiment of the method of the present invention. For the specific contents, please refer to the description in the embodiment of the method of the present invention, and no further description is given here.

[0084] An embodiment of the present invention further provides an electronic device, including a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, a polishing liquid replenishment method based on visual detection in any embodiment of the present invention is implemented.

[0085] An embodiment of the present invention further provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the processor executes a polishing liquid replenishment method based on visual detection in any embodiment of the present invention.

[0086] Specifically, a system or device equipped with a storage medium can be provided, on which software program code that implements the functions of any of the above-mentioned embodiments is stored, and a computer (or CPU or MPU) of the system or device can be enabled to read and execute the program code stored in the storage medium.

[0087] In this case, the program code itself read from the storage medium can realize the function of any one of the above-mentioned embodiments, and thus the program code and the storage medium storing the program code constitute a part of the present invention.

[0088] The storage medium embodiments for providing the program code include a floppy disk, a hard disk, a magneto-optical disk, an optical disk (such as CD-ROM, CD-R, CD-RW, DVD-ROM, DVD-RAM, DVD-RW, DVD+RW), a magnetic tape, a non-volatile memory card, and a ROM. Alternatively, the program code can be downloaded from a server computer via a communication network.

[0089] In addition, it should be clear that the functions of any of the above embodiments can be implemented not only by executing the program code read by the computer, but also by enabling an operating system operating on the computer to complete part or all of the actual operations based on instructions from the program code.

[0090] In addition, it can be understood that the program code read from the storage medium is written to a memory provided in an expansion board inserted into the computer or to a memory provided in an expansion module connected to the computer, and then based on the instructions of the program code, a CPU installed on the expansion board or expansion module is enabled to perform part or all of the actual operations, thereby realizing the functions of any of the above-mentioned embodiments.

[0091] It should be noted that, in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0092] A person of ordinary skill in the art can understand that all or part of the steps of implementing the above method embodiments can be completed by hardware related to program instructions, and the aforementioned program can be stored in a computer-readable storage medium. When the program is executed, it executes the steps of the above method embodiments; and the aforementioned storage medium includes: ROM, RAM, magnetic disk or optical disk, etc., various media that can store program codes.

[0093] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A polishing liquid replenishing method based on visual detection, characterized in that: The method comprises: Get the real-time liquid level of the liquid storage tank in the polishing equipment; In response to the real-time liquid level being higher than a preset minimum liquid level in the liquid storage tank, obtaining the real-time turbidity and the real-time cooling efficiency gap of the polishing liquid in the liquid storage tank; Calculating the turbidity difference between the real-time turbidity and the initial turbidity of the polishing liquid; Inputting the turbidity difference and the real-time cooling efficiency gap into a polishing liquid quantity analysis model to obtain a polishing liquid quantity characterization value in a current polishing operation; According to a predetermined polishing liquid amount threshold, the polishing liquid amount characterization value is compared and judged: If the polishing liquid quantity characterization value is lower than the polishing liquid quantity threshold value, it indicates that the polishing liquid for the current polishing operation is sufficient and no replenishment is required; if the polishing liquid quantity characterization value is not lower than the polishing liquid quantity threshold value, it indicates that the polishing liquid for the current polishing operation is insufficient and replenishment is required, and the staff is prompted to replenish the liquid; The method for obtaining the real-time cooling efficiency gap comprises: Collect the real-time temperature of the liquid return pipe and the liquid outlet pipe of the liquid storage tank to obtain the real-time liquid return temperature and the real-time liquid outlet temperature; The real-time cooling efficiency is calculated based on the real-time return liquid temperature and the real-time outlet liquid temperature; Obtain the operating status and real-time ambient temperature of the radiator in the polishing equipment; The cooling efficiency baseline under current conditions is determined based on the radiator operating status, real-time ambient temperature, and historical data. The real-time cooling efficiency is compared with the cooling efficiency baseline. If the actual cooling efficiency is lower than the cooling efficiency baseline, the real-time cooling efficiency gap caused by the reduction in the amount of polishing liquid is calculated by comparing the real-time cooling efficiency with the cooling efficiency baseline.

2. The polishing liquid replenishing method based on visual detection according to claim 1, characterized in that: The real-time turbidity acquisition method comprises: Obtaining the composition characteristics of the polishing liquid; Determine the polishing liquid image acquisition strategy based on the polishing liquid component characteristics; According to the polishing liquid image acquisition strategy, image acquisition is performed in sequence to obtain a polishing liquid illumination image set; Performing turbidity feature recognition on each illumination image in the polishing liquid illumination image set to obtain turbidity corresponding to each illumination image; The turbidity corresponding to each illumination image in the polishing liquid illumination image set is comprehensively analyzed to obtain the real-time turbidity of the polishing liquid.

3. The polishing liquid replenishing method based on visual detection according to claim 2, characterized in that: The polishing liquid image acquisition strategy includes the number of image acquisitions, and the illumination intensity and light source type during each image acquisition.

4. The polishing liquid replenishing method based on visual detection according to claim 1, characterized in that: The polishing liquid amount threshold is determined according to the composition characteristics of the polishing liquid and the composition characteristics of the polishing workpiece in the current polishing operation.

5. The polishing liquid replenishing method based on visual detection according to claim 2, characterized in that: Performing turbidity feature recognition on each illumination image in the polishing liquid illumination image set to obtain turbidity corresponding to each illumination image includes: De-noise and smooth the original illumination image, and increase the image contrast to highlight the particles and impurities in the polishing liquid; Identify the boundaries of particles and impurities in the original illumination image; The number of particles and impurities in the illumination image is counted, and the number of particles and impurities per unit area is extracted as turbidity.

6. The polishing liquid replenishing method based on visual detection according to claim 5, characterized in that: Comprehensively analyzing the turbidity corresponding to each illumination image in the polishing liquid illumination image set, including: Determine the weight coefficient corresponding to each illumination image; Based on the weight coefficients corresponding to each illumination image, the turbidity corresponding to different illumination conditions is weightedly calculated to obtain the real-time turbidity of the polishing liquid.

7. A polishing liquid replenishing device based on visual detection, characterized in that: The device is applied to the polishing liquid replenishment method based on visual detection as claimed in claim 1, and the device comprises: A real-time liquid level acquisition module is used to obtain the real-time liquid level information of the liquid storage tank in the polishing equipment; The state detection module, in response to the real-time liquid level provided by the real-time liquid level acquisition module being higher than the preset minimum liquid level of the liquid storage tank, further acquires the real-time turbidity and the real-time cooling efficiency gap of the polishing liquid in the liquid storage tank; A turbidity difference calculation module, used to calculate the turbidity difference between the real-time turbidity provided by the state detection module and the initial turbidity of the polishing liquid; The polishing liquid quantity analysis module receives the turbidity difference value provided by the turbidity calculation module and the real-time cooling efficiency gap provided by the state detection module, inputs the turbidity difference value and the real-time cooling efficiency gap into the polishing liquid quantity analysis model, and obtains the polishing liquid quantity characterization value in the current polishing operation; The judgment and prompt module compares and judges the polishing liquid quantity characterization value provided by the polishing liquid quantity analysis module according to a predetermined polishing liquid quantity threshold; if the polishing liquid quantity characterization value is lower than the polishing liquid quantity threshold, it is judged that the polishing liquid for the current polishing operation is sufficient and no liquid replenishment is required; if the polishing liquid quantity characterization value is not lower than the polishing liquid quantity threshold, it is judged that the polishing liquid for the current polishing operation is insufficient and liquid replenishment is required, and the staff is prompted to perform the liquid replenishment operation.

8. An electronic device, characterized in that: The method comprises a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, the method according to any one of claims 1 to 6 is implemented.

9. A computer-readable storage medium, characterized in that: A computer program is stored thereon, and when the computer program is executed in a computer, the computer is caused to execute the method according to any one of claims 1 to 6.

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