Single crystal furnace thermal field heater assembly

Abstract

The invention discloses a single crystal furnace thermal field heater assembly which comprises a heat preservation cover. The heat preservation cover is of a rectangular open structure, supporting feet are installed at the front root foot position and the rear root foot position of the heat preservation cover, a plurality of inserting grooves are formed in the left inner wall and the right inner wall of the heat preservation cover, sheet-shaped heaters are vertically inserted into the inserting grooves, and cooling flat pipes are installed between every two adjacent sheet-shaped heaters in the front-back direction. The left end and the right end of the cooling flat pipe are in liquid supply butt joint with branch pipelines through pipelines, the branch pipelines are in liquid supply butt joint with the cooling main pipe through a four-way valve body, and a cooling valve body is installed at the tail end of the cooling main pipe. The invention provides a single crystal furnace thermal field heater assembly. According to the invention, a heating thermal field structure formed by longitudinal insertion plates is adopted, a plurality of groups of sheet-shaped heaters are combined, then the sheet-shaped heaters are matched with a built-in heat dissipation system to complete a temperature control procedure, and cooling flat tube structures are inserted among the sheet-shaped heaters in groups, so that the temperature of a thermal field can be uniformly controlled.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal furnace heating equipment, and in particular relates to a single crystal furnace thermal field heater component. Background Art

[0002] The thermal field of a single crystal furnace refers to the spatial distribution of temperature in a single crystal furnace, also known as the thermal field. During the growth of a single crystal, the solid phase latent heat is continuously released due to the continuous transformation of the physical phase (liquid phase to solid phase). At the same time, the crystal is getting longer and longer, the melt level is constantly dropping, and the heat conduction and radiation are changing. Therefore, the thermal field is changing, which is called a dynamic thermal field. The thermal field of a single crystal furnace has a vital influence on the growth of single crystals. Its stability and uniformity are directly related to the quality and yield of single crystals.

[0003] The heating system of the single crystal furnace thermal field is usually composed of heaters, thermal insulation layers and other components. The heater is the core component of the thermal field, responsible for converting electrical energy into thermal energy to melt silicon materials and maintain the temperature environment required for single crystal growth. The thermal insulation layer is used to reduce heat loss and improve the stability and efficiency of the thermal field.

[0004] During the heating process, the heater achieves high-quality growth of silicon carbide single crystals by precisely controlling the temperature gradient. The temperature gradient refers to the rate of change from the temperature of a point A in the thermal field to the temperature of a nearby point B, that is, the rate of change of temperature per unit distance. During the single crystal growth process, it is necessary to maintain an appropriate temperature gradient to ensure that the crystal grows in a single direction and obtain high-quality single crystal materials.

[0005] Therefore, the present application proposes a single crystal furnace thermal field heater assembly. The present application adopts a heating thermal field structure with a longitudinal plug plate, a combination of multiple groups of sheet heaters, and then uses the sheet heaters in conjunction with a built-in heat dissipation system to complete the temperature control process, while the cooling flat tube structure is grouped and inserted between the sheet heaters to evenly control the temperature of the thermal field. Summary of the invention

[0006] To achieve the above object, the technical solution of the present invention is as follows: A single crystal furnace thermal field heater assembly comprises a heat preservation cover; the heat preservation cover is a rectangular open structure, support feet are installed at the front and rear root positions of the heat preservation cover, a plurality of slots are opened along the left and right inner walls of the heat preservation cover, sheet heaters are vertically inserted in the slots, a cooling flat tube is installed between two adjacent groups of sheet heaters, the left and right ends of the cooling flat tube are connected to the branch pipeline liquid supply through pipelines, the branch pipeline is connected to the cooling main pipeline liquid supply through a four-way valve body, and a cooling valve body is installed at the end of the cooling main pipeline.

[0007] Furthermore, each group of sheet heaters is composed of three groups of combined plates, and the left and right ends of the three groups of combined plates are integrally connected with plug-in ends, and the plug-in ends are in limited contact with slots opened along the left and right inner walls of the insulation cover.

[0008] Furthermore, claw plates are fixedly installed on the top of the cover bodies on the left and right sides of the heat preservation cover, and claws evenly distributed on the bottom of the claw plates are in limiting contact with the top end surface of the insertion end head.

[0009] Furthermore, the inner end of the four-way valve body is connected to the cooling flat column feeder, the inner end of the four-way valve body serves as an overflow supplementary end structure, and the cooling flat column is vertically installed at the center of the heat preservation cover; A support foot is horizontally installed at the root of the cooling flat column, and the bottom of the support foot is in supporting contact with the bottom end surface of the heat preservation cover.

[0010] Furthermore, the front and rear end surfaces of the cooling flat tube are integrally connected with thermal conductive patches, and the thermal conductive patches and the cooling flat tube are in a heat conduction contact structure.

[0011] Furthermore, the sheet heater has a plurality of groups of heating attachment protrusions evenly distributed along the side, and the heating attachment protrusions are of aluminum structure; Furthermore, the heating attachment protrusion is thermally connected to the sheet heater through the combination plate.

[0012] Furthermore, a flow-stabilizing heat-conducting base is vertically installed in the gap of the sheet heater; Furthermore, the left and right outer end surfaces of the heat preservation cover are fixedly mounted with lifting ears; An air pressure valve is installed on the outer side of the supporting foot, and the air flow end of the air pressure valve extends into the inner side of the heat preservation cover.

[0013] The beneficial effects of the present invention are as follows: the present application provides a single crystal furnace thermal field heater assembly. The present application adopts a heating thermal field structure with a longitudinal plug plate, a combination of multiple groups of sheet heaters, and then uses the sheet heaters in conjunction with a built-in heat dissipation system to complete the temperature control process, while the cooling flat tube structure is grouped and inserted between the sheet heaters, which can evenly control the temperature of the thermal field.

[0014] Compared with the existing technology, BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The figure is a top view of a single crystal furnace thermal field heater assembly of the present invention.

[0016] Figure 2 The present invention is a top view of a cooling mechanism of a single crystal furnace thermal field heater assembly.

[0017] Figure 3 The present invention is a top view of a sheet heater of a single crystal furnace thermal field heater assembly.

[0018] List of Figure Symbols: 1 is a supporting foot, 2 is a heat preservation cover, 3 is a plug-in end, 4 is a lifting ear, 5 is a cooling valve body, 7 is a sheet heater, 9 is a four-way valve body, 10 is a cooling main pipe, 11 is a heating attachment protrusion, 12 is an air pressure valve, 13 is a thermal conductive patch, 14 is a branch pipeline, 15 is a supporting foot, 16 is a cooling flat tube, 17 is a flow-stabilizing heat-conducting base, and 18 is a combination plate. DETAILED DESCRIPTION

[0019] The present invention will be further explained below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the following specific embodiments are only used to illustrate the present invention and are not used to limit the scope of the present invention.

[0020] like Figure 1 , Figure 2 and Figure 3 As shown, a single crystal furnace thermal field heater assembly includes a heat preservation cover; the heat preservation cover 2 is a rectangular open structure, and support feet 1 are installed at the front and rear root positions of the heat preservation cover 2. The heat preservation cover 2 is provided with a plurality of slots along the left and right inner walls, and sheet heaters 7 are vertically inserted in the slots. A cooling flat tube 6 is installed between the two adjacent groups of sheet heaters 7 in front and back, and the left and right ends of the cooling flat tube 6 are connected to the branch pipeline 14 for liquid supply through pipelines, and the branch pipeline 14 is connected to the cooling main pipe 10 for liquid supply through a four-way valve body 9, and a cooling valve body 5 is installed at the end of the cooling main pipe 10. Among them, the present application adopts a heating thermal field structure with a longitudinal plug plate, a combination of multiple groups of sheet heaters, and then uses the sheet heaters to cooperate with the built-in heat dissipation system to complete the temperature control process, and the cooling flat tube structure is inserted in groups between the sheet heaters, which can evenly control the temperature of the thermal field.

[0021] like Figure 1 , Figure 2 and Figure 3 As shown, each group of sheet heaters 7 is composed of three groups of combined plates arranged in an arrangement, and the left and right ends of the three groups of combined plates are integrally connected with plug-in terminals 3, and the plug-in terminals 3 are in limited contact with the slots opened along the left and right inner walls of the heat preservation cover 2. The structure of the slots can further improve the installation stability of the sheet heater 7. The plug-in terminals 3 are made of resistant edge structure material, which can improve the structural strength of the ends on both sides of the sheet heater 7.

[0022] like Figure 1 , Figure 2 and Figure 3 As shown, claw plates 19 are fixedly installed on the top of the left and right sides of the heat preservation cover 2, and claws evenly distributed at the bottom of the claw plates 19 are in limited contact with the top end surface of the plug-in terminal 3. Among them, the claw plates 19 can further improve the installation stability of the plug-in terminal 3.

[0023] like Figure 1 , Figure 2 and Figure 3 As shown, the inner end of the four-way valve body 9 is connected to the cooling flat column 16 for material supply, and the inner end of the four-way valve body 9 serves as an overflow supplementary end structure, and the cooling flat column 16 is vertically installed at the center of the insulation cover 2; wherein, the structure of the four-way valve body 9 can distribute the coolant to complete local diversion, and the electric control structure adopted by the four-way valve body 9 completes regional temperature control through a built-in operating system, such as a PLC or other control systems.

[0024] The base of the cooling flat column 16 is horizontally provided with a support foot 15, and the bottom of the support foot 15 is in supporting contact with the bottom end surface of the heat preservation cover 2. The support foot 15 can improve the installation stability of the cooling flat column 16.

[0025] like Figure 1 , Figure 2 and Figure 3 As shown, the front and rear end surfaces of the cooling flat tube 6 are integrally connected with a thermal conductive patch 13 , and the thermal conductive patch 13 and the cooling flat tube 6 are in a heat conduction contact structure.

[0026] like Figure 1 , Figure 2 and Figure 3 As shown, the sheet heater 7 has a plurality of groups of heating attachment protrusions 11 evenly distributed along the side, and the heating attachment protrusions 11 are of aluminum structure; like Figure 1 , Figure 2 and Figure 3 As shown, the heating attachment protrusion 11 is thermally connected to the sheet heater 7 through the combination plate 18.

[0027] like Figure 1 , Figure 2 and Figure 3 As shown, a flow-stabilizing heat-conducting base 17 is vertically installed in the gap of the sheet heater 7; like Figure 1 , Figure 2 and Figure 3 As shown, the left and right outer end surfaces of the heat preservation cover 2 are fixedly mounted with lifting ears 4; An air pressure valve 12 is installed on the outer side of the supporting foot 1 , and the air flow end of the air pressure valve 12 extends into the inner side of the heat preservation cover 2 .

[0028] It should be noted that the above content only illustrates the technical idea of ​​the present invention and cannot be used to limit the protection scope of the present invention. For ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications all fall within the protection scope of the claims of the present invention.

Claims

1. A single crystal furnace thermal field heater assembly, comprising a heat preservation cover; wherein: The heat-insulating cover (2) is of a rectangular open structure. Support feet (1) are installed at the front and rear foot positions of the heat-insulating cover (2). The heat-insulating cover (2) is provided with a plurality of slots along the left and right inner walls. Sheet heaters (7) are vertically inserted into the slots. A cooling flat tube (6) is installed between two adjacent front and rear sheet heaters (7). The left and right ends of the cooling flat tube (6) are connected to the branch pipeline (14) for liquid supply through pipelines. The branch pipeline (14) is connected to the cooling main pipe (10) for liquid supply through a four-way valve body (9). A cooling valve body (5) is installed at the end of the cooling main pipe (10).

2. The single crystal furnace thermal field heater assembly according to claim 1, characterized in that: Each group of sheet heaters (7) is composed of three groups of combined plates arranged in an arranged manner, and the left and right ends of the three groups of combined plates are integrally connected with plug-in ends (3), and the plug-in ends (3) are in limited contact with slots provided along the left and right inner walls of the heat preservation cover (2).

3. The single crystal furnace thermal field heater assembly according to claim 2, characterized in that: Claw plates (19) are fixedly mounted on the top of the cover bodies on the left and right sides of the heat-insulating cover (2), and claws evenly distributed on the bottom of the claw plates (19) are in position-limiting contact with the top end surface of the insertion end (3).

4. The single crystal furnace thermal field heater assembly according to claim 1, characterized in that: The inner end of the four-way valve body (9) is connected to the cooling flat column (16) for material supply, the inner end of the four-way valve body (9) serves as an overflow supplementary end structure, and the cooling flat column (16) is vertically installed at the center of the heat preservation cover (2); A support foot (15) is horizontally mounted at the root of the cooling flat column (16), and the bottom of the support foot (15) is in supporting contact with the bottom end surface of the heat insulation cover (2).

5. The single crystal furnace thermal field heater assembly according to claim 1, characterized in that: The front and rear end surfaces of the cooling flat tube (6) are integrally connected with a thermal conductive patch (13), and the thermal conductive patch (13) and the cooling flat tube (6) are in a heat conduction contact structure.

6. The single crystal furnace thermal field heater assembly according to claim 1, characterized in that: The sheet-shaped heater (7) has a plurality of groups of heating attachment protrusions (11) evenly distributed along the side edge, and the heating attachment protrusions (11) are of an aluminum structure.

7. The single crystal furnace thermal field heater assembly according to claim 6, characterized in that: The heating attachment protrusion (11) is thermally connected to the sheet heater (7) via a combination plate (18).

8. The single crystal furnace thermal field heater assembly according to claim 1, characterized in that: A flow-stabilizing heat-conducting base (17) is vertically mounted in the gap of the sheet-shaped heater (7).

9. The single crystal furnace thermal field heater assembly according to claim 1, characterized in that: Lifting ears (4) are fixedly mounted on the left and right outer end surfaces of the heat-insulating cover (2); An air pressure valve (12) is installed on the outside of the supporting foot (1), and the air flow end of the air pressure valve (12) extends into the inside of the heat insulation cover (2).

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