A scatterometer calibration device

Abstract

The invention relates to the technical field of measuring instrument calibration devices, and discloses a scatterometer calibration device, comprising a measuring cabinet and an adjusting component arranged inside the measuring cabinet, wherein the adjusting component comprises a forward and reverse motor fixedly connected to the inner wall of the measuring cabinet, a screw rod fixedly connected to the output end of the forward and reverse motor, the other end of the screw rod is rotatably connected to the inner wall of the measuring cabinet, an L-shaped sleeve block is threadedly connected to the outer wall of the screw rod, the top of the L-shaped sleeve block is slidably connected to the top of the inner wall of the measuring cabinet, the bottom of the L-shaped sleeve block is movably connected to a rotating block through a hinge, the other end bottom of the rotating block is fixedly connected to a scatterometer body, the side wall of the rotating block is fixedly connected to a connecting column, and by arranging the adjusting component and rotating the rotating block during movement, the measuring range of the scatterometer body for the measured object is effectively improved, and the measuring effect is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of measuring instrument calibration devices, in particular to a scatterometer calibration device. Background Art

[0002] A scatterometer is an instrument used to measure and analyze surface roughness, optical properties and other surface parameters. Its working principle is that a beam of light is incident on the surface of the object to be measured, and the photoresist pattern on the surface of the object scatters and diffracts the incident light. These lights containing surface structure information are received by the detector. By analyzing the signals received by the detection instrument, the three-dimensional size and optical properties of the surface of the object to be measured can be obtained.

[0003] According to a length measuring instrument metrology calibration device proposed in Chinese patent CN213579233U, the object to be measured can be fixed by a fixing unit in the device to prevent inaccurate calibration caused by shaking of the object to be measured during the measurement process.

[0004] However, there are still some shortcomings in this patent. Although the device can clamp and fix the object to be measured through the fixing unit, it is not convenient to adjust the measuring position of the measuring instrument on the object to be measured during the measurement of the object to be measured, so that the measurement effect of the measuring instrument is not wide. Therefore, in the process of measuring the object to be measured, the measuring instrument needs to be adjusted and calibrated multiple times so that the measuring instrument can measure different positions of the object to be measured. For this reason, we propose a scatterometer calibration device. Summary of the invention

[0005] The object of the present invention is to provide a scatterometer calibration device to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a scatterometer calibration device, comprising a measuring cabinet and an adjustment component arranged inside the measuring cabinet, the adjustment component comprising a forward and reverse motor fixedly connected to the inner wall of the measuring cabinet, the output end of the forward and reverse motor is fixedly connected to a screw rod, the other end of the screw rod is rotatably connected to the inner wall of the measuring cabinet, the outer wall of the screw rod is threadedly connected to an L-shaped sleeve block, the top of the L-shaped sleeve block is slidably connected to the top of the inner wall of the measuring cabinet, the bottom of the L-shaped sleeve block is movably connected to a rotating block through a hinge, the bottom of the other end of the rotating block is fixedly connected to the scatterometer body, the side wall of the rotating block is fixedly connected to a connecting column, the other end outer wall of the connecting column is slidably connected to a limit frame, and the side wall of the limit frame is fixedly connected to the inner wall of the measuring cabinet. Then, by setting the adjustment component, when it is necessary to measure the object to be measured inside the measuring cabinet, the existing scatterometer body is usually fixedly installed inside the measuring cabinet, so it is difficult to perform all-round measurement on the surface of the object to be measured. At this time, the operator turns on the forward and reverse motors to cause the screw to rotate. During the rotation of the screw, the L-shaped sleeve block will move, and during the movement of the L-shaped sleeve block, the rotating block at the bottom will move. Since the connecting column on the side wall of the rotating block is slidably connected to the inside of the limit frame, the connecting column will cause the rotating block to tilt during the movement, and the rotating block will rotate, and the scatterometer body will rotate, so that during the movement of the L-shaped sleeve block, the surface of the object to be measured can be evenly measured, thereby achieving a calibration effect.

[0007] Preferably, the adjusting assembly also includes a limit block movably connected to the other end of the rotating block through a hinge, the inner wall of the limit block is slidably connected to the limit rod, the top of the limit rod is fixedly connected with a connecting block, the side wall of the connecting block is fixedly connected to the bottom side wall of the L-shaped sleeve block, the bottom of the connecting block is fixedly connected with a first spring, the other end of the first spring is fixedly connected to the top of the limit block, during the rotation of the rotating block, the limit block will be forced to slide along the outer wall of the limit rod and be limited by the first spring and the limit block, thereby realizing the limiting of the rotating block during the rotation process.

[0008] Preferably, the adjustment assembly also includes a side panel fixedly connected to the other side of the rotating block, the bottom of the side panel is fixedly connected to a fixing frame, the inner wall of the fixing frame is fixedly connected to a driving motor, the output end of the driving motor is fixedly connected to an output shaft, the bottom outer wall of the output shaft is fixedly connected to a cooling blade, and a cooling groove is provided on the inner wall of the measuring cabinet, which will cause the side panel to tilt during the rotation of the rotating block. At this time, the operator turns on the driving motor to cause the output shaft to rotate, and the cooling blades will rotate during the rotation of the output shaft, causing the cooling blades to blow air to the interior of the measuring cabinet and discharge the heat through the cooling groove, thereby blowing air and dissipating heat to the interior of the measuring cabinet.

[0009] Preferably, a rotating assembly is provided inside the measuring cabinet, and the rotating assembly includes a cylinder fixedly connected to the inner wall of the measuring cabinet, the output end of the cylinder is fixedly connected to a rack, the side wall of the rack is meshed with a gear, the inner wall of the gear is fixedly connected to a rotating rod, the bottom outer wall of the rotating rod is rotatably connected to the bottom inner wall of the measuring cabinet through a bearing, the top of the rotating rod is fixedly connected to a circular plate, the center top of the circular plate is fixedly connected to a rectangular column, the top of the rectangular column is fixedly connected to a reflector, the side top of the circular plate is fixedly connected to a positioning ring, the side inner wall of the positioning ring is threadedly connected to a screw, the outer wall of one end of the screw is fixedly connected to an adjusting block, and the other end of the screw is rotatably connected to an arc clamping plate, through A rotating component is set up. Before the object to be measured needs to be measured, in order to improve the stability of the object to be measured during the measurement process, the object to be measured needs to be clamped and fixed. At this time, the operator places the object to be measured inside the positioning ring, and then rotates the adjusting block to cause the screw to rotate. During the rotation of the screw, the arc-shaped clamping plate will move, so that the arc-shaped clamping plate can clamp and fix the object to be measured inside the positioning ring. When other objects to be measured need to be measured, the operator turns on the cylinder, causing the output end of the cylinder to push the rack to move, causing the rack to mesh with the gear, and causing the rotating rod to rotate, thereby realizing the rotation of the circular plate, thereby facilitating the measurement of other objects to be measured on the top of the circular plate.

[0010] Preferably, the rotating assembly also includes a fixed sleeve fixedly connected to the inner wall of the side surface of the measuring cabinet, the inner wall of the fixed sleeve is fixedly connected to a second spring, the other end of the second spring is fixedly connected to an extrusion rod, the outer wall of one end of the extrusion rod is slidably connected to the inner wall of the fixed sleeve, and the extrusion rod will be squeezed during the movement of the rack to compress the second spring, so that the fixed sleeve, the second spring and the extrusion rod can be used to buffer the rack during the movement.

[0011] Preferably, the bottom of the measuring cabinet is fixedly connected with a supporting leg, and there are four supporting legs. The four supporting legs are equal in size and fixedly connected to the four corners of the bottom of the measuring cabinet at equal distances. By setting four supporting legs, a stable supporting effect on the measuring cabinet can be achieved.

[0012] Preferably, the front of the measuring cabinet is movably connected to a cabinet door via a hinge, the inner wall of the cabinet door is fixedly connected to an observation window, the outer wall of the measuring cabinet is movably connected to a planting tray, the outer wall of the measuring cabinet is fixedly connected to a display screen, and the display screen is located above the planting tray.

[0013] Preferably, the limit frame is in an inclined state, and the inner wall of the limit frame is adapted to the outer wall of one end of the connecting column. By setting the limit frame and the connecting column, it is convenient for the connecting column to slide inside the limit frame, thereby realizing the limitation of the rotating block during the rotation process.

[0014] The present invention provides a scatterometer calibration device. The scatterometer calibration device has the following beneficial effects:

[0015] The scatterometer calibration device is provided with an adjustment component. When it is necessary to measure the object to be measured inside the measuring cabinet, the existing scatterometer body is usually fixedly installed inside the measuring cabinet, so it is difficult to measure the surface of the object to be measured in all directions. At this time, the operator turns on the forward and reverse motors to cause the screw to rotate. During the rotation of the screw, the L-shaped sleeve block is moved. During the movement of the L-shaped sleeve block, the rotating block at the bottom thereof is moved. Since the connecting column on the side wall of the rotating block is slidably connected to the inside of the limit frame, the connecting column causes the rotating block to tilt during the movement, and the rotating block is rotated, and the scatterometer body is caused to rotate. The rotation is generated, so that the surface of the measured object can be evenly measured during the movement of the L-shaped sleeve block, thereby achieving a calibration effect. During the rotation of the rotating block, the limit block will be prompted to slide along the outer wall of the limit rod, and the first spring and the limit block will be limited, thereby realizing the limitation of the rotating block during the rotation process. During the rotation of the rotating block, the side plate will also be tilted. At this time, the operator turns on the drive motor to cause the output shaft to rotate. During the rotation of the output shaft, the heat dissipation blades will be rotated, causing the heat dissipation blades to blow air to the inside of the measuring cabinet, and the heat is discharged through the heat dissipation slot, thereby realizing the blowing and heat dissipation of the inside of the measuring cabinet;

[0016] The scatterometer calibration device is provided with a rotating assembly. Before measuring the measured object, in order to improve the stability of the measured object during the measurement process, the measured object needs to be clamped and fixed. At this time, the operator places the measured object inside the positioning ring, and then rotates the adjustment block to cause the screw to rotate. During the rotation of the screw, the arc clamping plate is moved, so that the arc clamping plate can clamp and fix the measured object inside the positioning ring. When other measured objects need to be measured, the operator turns on the cylinder to cause the output end of the cylinder to push the rack to move, so that the rack and the gear are meshed, and the rotating rod is rotated, thereby realizing the rotation of the circular plate, so as to facilitate the measurement of other measured objects on the top of the circular plate. During the movement of the rack, the extrusion rod is squeezed to compress the second spring, and the fixing sleeve, the second spring and the extrusion rod are used to facilitate the buffering of the rack during the movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0018] Figure 2 It is a partial cross-sectional view of the present invention;

[0019] Figure 3 It is a structural schematic diagram of the regulating component in the present invention;

[0020] Figure 4 It is a schematic diagram of the local structure of the regulating component in the present invention;

[0021] Figure 5 It is a schematic diagram of the structure of the rotating assembly in the present invention;

[0022] Figure 6 It is a schematic diagram of the partial structure of the rotating assembly in the present invention;

[0023] Figure 7 for Figure 6 A partial enlarged view of point A in the middle.

[0024] In the figure: 1, measuring cabinet; 2, supporting legs; 3, cabinet door; 4, observation window; 5, planting tray; 6, display screen; 71, adjustment component; 711, forward and reverse motor; 712, lead screw; 713, L-shaped sleeve block; 714, rotating block; 715, scatterometer body; 716, limit block; 717, limit rod; 718, connecting block; 719, first spring; 7110, connecting column; 7111, limit frame; 7112, side plate; 7113, fixing frame ; 7114, driving motor; 7115, output shaft; 7116, cooling blades; 7117, cooling slot; 72, rotating assembly; 721, cylinder; 722, rack; 723, gear; 724, rotating rod; 725, circular plate; 726, rectangular column; 727, reflector; 728, positioning ring; 729, screw; 7210, adjusting block; 7211, arc-shaped clamping plate; 7212, fixing sleeve; 7213, second spring; 7214, extrusion rod. DETAILED DESCRIPTION

[0025] In order to have a clearer understanding of the technical features, purposes and effects of the present invention, specific embodiments of the present invention are now described with reference to the accompanying drawings.

[0026] A preferred embodiment of a scatterometer calibration device provided by the present invention is as follows: Figures 1 to 7As shown: a scatterometer calibration device, including a measuring cabinet 1, and an adjustment component 71 arranged inside the measuring cabinet 1, the adjustment component 71 includes a forward and reverse motor 711 fixedly connected to the inner wall of the measuring cabinet 1, the output end of the forward and reverse motor 711 is fixedly connected to a screw rod 712, the other end of the screw rod 712 is rotatably connected to the inner wall of the measuring cabinet 1, the outer wall of the screw rod 712 is threadedly connected to an L-shaped sleeve block 713, the top of the L-shaped sleeve block 713 is slidably connected to the top of the inner wall of the measuring cabinet 1, the bottom of the L-shaped sleeve block 713 is movably connected to a rotating block 714 through a hinge, the bottom of the other end of the rotating block 714 is fixedly connected to a scatterometer body 715, the side wall of the rotating block 714 is fixedly connected to a connecting column 7110, the outer wall of the other end of the connecting column 7110 is slidably connected to a limit frame 7111, the side wall of the limit frame 7111 is fixedly connected to the inner wall of the measuring cabinet 1, and by setting the adjustment component 71, when required When measuring the object to be measured inside the measuring cabinet 1, the existing scatterometer body 715 is usually fixedly installed inside the measuring cabinet 1, so it is difficult to perform all-round measurement on the surface of the object to be measured. At this time, the operator turns on the forward and reverse motor 711 to cause the screw rod 712 to rotate. During the rotation of the screw rod 712, the L-shaped sleeve 713 will move. During the movement of the L-shaped sleeve 713, the rotating block 714 at the bottom will move. Since the connecting column 7110 on the side wall of the rotating block 714 is slidably connected to the inside of the limit frame 7111, the connecting column 7110 will cause the rotating block 714 to tilt during the movement, and the rotating block 714 will rotate, and the scatterometer body 715 will rotate, so that during the movement of the L-shaped sleeve 713, the surface of the object to be measured can be evenly measured, thereby achieving a calibration effect.

[0027] The adjustment component 71 also includes a limit block 716 movably connected to the other end of the rotating block 714 through a hinge, the inner wall of the limit block 716 is slidably connected to the limit rod 717, the top of the limit rod 717 is fixedly connected with a connecting block 718, the side wall of the connecting block 718 is fixedly connected to the bottom side wall of the L-shaped sleeve block 713, the bottom of the connecting block 718 is fixedly connected with a first spring 719, the other end of the first spring 719 is fixedly connected to the top of the limit block 716, during the rotation of the rotating block 714, the limit block 716 will be prompted to slide along the outer wall of the limit rod 717, and limited by the first spring 719 and the limit block 716, thereby realizing the limitation of the rotating block 714 during the rotation process.

[0028] The adjusting component 71 also includes a side plate 7112 fixedly connected to the other side of the rotating block 714, the bottom of the side plate 7112 is fixedly connected to a fixing frame 7113, the inner wall of the fixing frame 7113 is fixedly connected to a driving motor 7114, the output end of the driving motor 7114 is fixedly connected to an output shaft 7115, the bottom outer wall of the output shaft 7115 is fixedly connected to a heat dissipation blade 7116, and the inner wall of the measuring cabinet 1 is provided with a heat dissipation groove 7117, and the side plate 7112 will be tilted during the rotation of the rotating block 714. At this time, the operator turns on the driving motor 7114 to cause the output shaft 7115 to rotate, and the heat dissipation blade 7116 will be rotated during the rotation of the output shaft 7115, so as to cause the heat dissipation blade 7116 to blow air to the interior of the measuring cabinet 1 and discharge the heat through the heat dissipation groove 7117, so as to achieve the heat dissipation of the interior of the measuring cabinet 1 by blowing air.

[0029] A preferred embodiment of a scatterometer calibration device provided by the present invention is as follows: Figures 1 to 7 As shown: the measuring cabinet 1 is provided with a rotating assembly 72 inside, and the rotating assembly 72 includes a cylinder 721 fixedly connected to the inner wall of the measuring cabinet 1, the output end of the cylinder 721 is fixedly connected to a rack 722, the side wall of the rack 722 is meshed with a gear 723, the inner wall of the gear 723 is fixedly connected to a rotating rod 724, the bottom outer wall of the rotating rod 724 is rotatably connected to the bottom inner wall of the measuring cabinet 1 through a bearing, the top of the rotating rod 724 is fixedly connected to a circular plate 725, the center top of the circular plate 725 is fixedly connected to a rectangular column 726, the top of the rectangular column 726 is fixedly connected to a reflector 727, the side top of the circular plate 725 is fixedly connected to a positioning ring 728, the side inner wall of the positioning ring 728 is threadedly connected to a screw 729, the outer wall of one end of the screw 729 is fixedly connected to an adjusting block 7210, and the other end of the screw 729 is rotatably connected to an arc clamping plate 7211. The rotating assembly 72 is arranged. Before the object to be measured needs to be measured, in order to improve the stability of the object to be measured during the measurement process, the object to be measured needs to be clamped and fixed. At this time, the operator places the object to be measured inside the positioning ring 728, and then rotates the adjustment block 7210 to cause the screw 729 to rotate. During the rotation of the screw 729, the arc clamping plate 7211 will move, so that the arc clamping plate 7211 can clamp and fix the object to be measured inside the positioning ring 728. When other objects to be measured need to be measured, the operator turns on the cylinder 721 to cause the output end of the cylinder 721 to push the rack 722 to move, so that the rack 722 is engaged with the gear 723, and the rotating rod 724 is rotated, so that the circular plate 725 will rotate, so as to facilitate the measurement of other objects to be measured on the top of the circular plate 725.

[0030] The rotating assembly 72 also includes a fixed sleeve 7212 fixedly connected to the inner wall of the side of the measuring cabinet 1, the inner wall of the fixed sleeve 7212 is fixedly connected to the second spring 7213, the other end of the second spring 7213 is fixedly connected to the extrusion rod 7214, the outer wall of one end of the extrusion rod 7214 is slidably connected to the inner wall of the fixed sleeve 7212, and the extrusion rod 7214 will be squeezed during the movement of the rack 722, so that the second spring 7213 is compressed, and the fixed sleeve 7212, the second spring 7213 and the extrusion rod 7214 can be used to buffer the rack 722 during the movement.

[0031] Furthermore, the bottom of the measuring cabinet 1 is fixedly connected with a support leg 2, there are four support legs 2, the four support legs 2 are equal in size, and the four support legs 2 are equidistantly fixedly connected to the four corners of the bottom of the measuring cabinet 1. By setting four support legs 2, a stable support effect can be achieved for the measuring cabinet 1.

[0032] Furthermore, the front of the measuring cabinet 1 is movably connected to a cabinet door 3 via a hinge, the inner wall of the cabinet door 3 is fixedly connected to an observation window 4, the outer wall of the measuring cabinet 1 is movably connected to a planting tray 5, the outer wall of the measuring cabinet 1 is fixedly connected to a display screen 6, and the display screen 6 is located above the planting tray 5.

[0033] In addition, the limit frame 7111 is in an inclined state, and the inner wall of the limit frame 7111 is adapted to the outer wall of one end of the connecting column 7110. By setting the limit frame 7111 and the connecting column 7110, it is convenient for the connecting column 7110 to slide inside the limit frame 7111, thereby realizing the limitation of the rotating block 714 during the rotation process.

[0034] Working principle: before measuring the object to be measured, in order to improve the stability of the object to be measured during the measurement process, the object to be measured needs to be clamped and fixed. At this time, the operator places the object to be measured inside the positioning ring 728, and then rotates the adjustment block 7210 to cause the screw 729 to rotate. During the rotation of the screw 729, the arc clamping plate 7211 will move, so that the arc clamping plate 7211 can clamp and fix the object to be measured inside the positioning ring 728. When other objects to be measured need to be measured, the operator turns on the cylinder 721, causing the output end of the cylinder 721 to push the rack 722 to move, causing the rack 722 to mesh with the gear 723, and causing the rotating rod 724 to rotate, thereby realizing the rotation of the circular plate 725, so as to facilitate the measurement of other objects to be measured on the top of the circular plate 725;

[0035] During the movement of the rack 722, the extrusion rod 7214 is squeezed to compress the second spring 7213. The fixing sleeve 7212, the second spring 7213 and the extrusion rod 7214 can be used to buffer the rack 722 during the movement.

[0036] When it is necessary to measure the object to be measured inside the measuring cabinet 1, the existing scatterometer body 715 is usually fixedly installed inside the measuring cabinet 1, so it is difficult to measure the surface of the object to be measured in an all-round manner. At this time, the operator turns on the forward and reverse motor 711 to cause the screw rod 712 to rotate. During the rotation of the screw rod 712, the L-shaped sleeve 713 will move. During the movement of the L-shaped sleeve 713, the rotating block 714 at the bottom will move. Since the connecting column 7110 on the side wall of the rotating block 714 is slidably connected to the inside of the limit frame 7111, the connecting column 7110 will cause the rotating block 714 to tilt during the movement, and the rotating block 714 will rotate, and the scatterometer body 715 will rotate, so that during the movement of the L-shaped sleeve 713, the surface of the object to be measured can be evenly measured, thereby achieving a calibration effect.

[0037] During the rotation of the rotating block 714, the limiting block 716 is forced to slide along the outer wall of the limiting rod 717, and the first spring 719 and the limiting block 716 are limited, thereby limiting the rotating block 714 during the rotation process;

[0038] A first spring 719 is fixedly connected to the bottom of the connecting block 718, and the other end of the first spring 719 is fixedly connected to the top of the limit block 716. During the rotation of the rotating block 714, the limit block 716 is prompted to slide along the outer wall of the limit rod 717, and is limited by the first spring 719 and the limit block 716, thereby limiting the rotating block 714 during the rotation process.

[0039] The above description is only an illustrative specific implementation mode of the present invention and is not intended to limit the scope of the present invention. Any equivalent changes and modifications made by any technician in the field without departing from the concept and principle of the present invention should fall within the scope of protection of the present invention. It should also be noted that the various components of the present invention are not limited to the above-mentioned overall application. The various technical features described in the specification of the present invention can be selected one by one or multiple ones can be selected and used in combination according to actual needs. Therefore, the present invention should naturally cover other combinations and specific applications related to the invention point of this case.

Claims

1. A scatterometer calibration device, comprising a measuring cabinet (1), and an adjustment component (71) arranged inside the measuring cabinet (1), characterized in that: The adjustment component (71) comprises a forward and reverse motor (711) fixedly connected to the inner wall of the measuring cabinet (1); the output end of the forward and reverse motor (711) is fixedly connected to a screw rod (712); the other end of the screw rod (712) is rotatably connected to the inner wall of the measuring cabinet (1); the outer wall of the screw rod (712) is threadedly connected to an L-shaped sleeve block (713); the top of the L-shaped sleeve block (713) is slidably connected to the top of the inner wall of the measuring cabinet (1); and the bottom of the L-shaped sleeve block (713) is hinged. A rotating block (714) is movably connected, the bottom of the other end of the rotating block (714) is fixedly connected to a scatterometer body (715), the side wall of the rotating block (714) is fixedly connected to a connecting column (7110), the outer wall of the other end of the connecting column (7110) is slidably connected to a limit frame (7111), the side wall of the limit frame (7111) is fixedly connected to the inner wall of the measuring cabinet (1), and the adjusting component (71) also includes a hinge movably connected to the other end of the rotating block (714). The limiting block (716) is provided with a limiting rod (717) in a sliding manner on the inner wall of the limiting block (716); the top of the limiting rod (717) is fixedly connected with a connecting block (718); the side wall of the connecting block (718) is fixedly connected with the bottom side wall of the L-shaped sleeve block (713); the bottom of the connecting block (718) is fixedly connected with a first spring (719); the other end of the first spring (719) is fixedly connected with the top of the limiting block (716); the adjusting component (71) further comprises: A side plate (7112) is fixedly connected to the other side of the rotating block (714); the bottom of the side plate (7112) is fixedly connected to a fixing frame (7113); the inner wall of the fixing frame (7113) is fixedly connected to a driving motor (7114); the output end of the driving motor (7114) is fixedly connected to an output shaft (7115); the bottom outer wall of the output shaft (7115) is fixedly connected to a heat dissipation blade (7116); and the inner wall of the measuring cabinet (1) is provided with a heat dissipation groove (7117).

2. A scatterometer calibration device according to claim 1, characterized in that: A rotating assembly (72) is arranged inside the measuring cabinet (1), and the rotating assembly (72) comprises a cylinder (721) fixedly connected to the left inner wall of the measuring cabinet (1), the output end of the cylinder (721) is fixedly connected to a rack (722), the side wall of the rack (722) is meshed with a gear (723), the inner wall of the gear (723) is fixedly connected to a rotating rod (724), the bottom outer wall of the rotating rod (724) is rotatably connected to the bottom inner wall of the measuring cabinet (1) via a bearing, and the top of the rotating rod (724) is A circular plate (725) is fixedly connected, a rectangular column (726) is fixedly connected to the center top of the circular plate (725), a reflector (727) is fixedly connected to the top of the rectangular column (726), a positioning ring (728) is fixedly connected to the top of the side of the circular plate (725), a screw (729) is threadedly connected to the inner wall of the side of the positioning ring (728), an adjustment block (7210) is fixedly connected to the outer wall of one end of the screw (729), and an arc-shaped clamping plate (7211) is rotatably connected to the other end of the screw (729).

3. A scatterometer calibration device according to claim 2, characterized in that: The rotating assembly (72) further comprises a fixing sleeve (7212) fixedly connected to the inner wall of the side of the measuring cabinet (1); the inner wall of the fixing sleeve (7212) is fixedly connected to a second spring (7213); the other end of the second spring (7213) is fixedly connected to an extrusion rod (7214); the outer wall of one end of the extrusion rod (7214) is slidably connected to the inner wall of the fixing sleeve (7212).

4. A scatterometer calibration device according to claim 1, characterized in that: The bottom of the measuring cabinet (1) is fixedly connected with a support leg (2), the number of the support legs (2) is four, the four support legs (2) are equal in size, and the four support legs (2) are equidistantly fixedly connected to the four corners of the bottom of the measuring cabinet (1).

5. The scatterometer calibration device according to claim 1, characterized in that: The front of the measuring cabinet (1) is movably connected to a cabinet door (3) via a hinge, the inner wall of the cabinet door (3) is fixedly connected to an observation window (4), the outer wall of the measuring cabinet (1) is movably connected to a planting tray (5), the outer wall of the measuring cabinet (1) is fixedly connected to a display screen (6), and the display screen (6) is located above the planting tray (5).

6. A scatterometer calibration device according to claim 1, characterized in that: The limiting frame (7111) is in an inclined state, and the inner wall of the limiting frame (7111) is adapted to the outer wall of one end of the connecting column (7110).

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