Ultra-precise five-axis prism milling machine

Abstract

The invention discloses an ultra-precise five-axis prism milling machine which comprises an operation table, an electrical cabinet and a machine tool body. The machine tool body comprises a shock isolation system, an X-axis component, a Z-axis component, a main shaft component, a B-axis component and an A-axis component. The X-axis and the Z-axis are installed on the granite platform in a T-shaped layout mode, the X-axis can move front and back, and the Z-axis can move left and right. A spindle is mounted on a slide carriage of the X-axis, a fly-cutter disc is mounted at the front end of the spindle, a cutter is mounted on the fly-cutter disc, a B-axis is mounted on the Z-axis, an A-axis is mounted on the B-axis, and a part is mounted at the front end of the A-axis. A precision machining scheme of single-point diamond fly cutter turning is provided, a special tool is designed to guarantee one-time clamping machining forming, and the angle error of the reflecting prism obtained through final machining is 12 ''; according to the ultra-precise five-axis prism milling machine, the machining precision and the production efficiency of parts are effectively guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of ultra-precision milling machine processing, in particular to a five-axis milling machine for processing multifaceted pyramidal prisms. Background Art

[0002] In recent years, with the continuous improvement of the manufacturing level of optical prisms, more and more second-level precision multifaceted pyramidal prisms and right-angle prisms are used in optical systems. To achieve the technical requirements of the prism, ultra-precision machine tool processing technology is required to be controlled within 7″; the existing equipment cannot meet the precision requirements and the processing efficiency is low. Summary of the invention

[0003] In order to solve the above technical problems, the present invention provides an ultra-precision five-axis prism milling machine, comprising an operating table, an electrical cabinet and a machine tool body; the machine tool body comprises a seismic isolation system, an X-axis component, a Z-axis component, a spindle component, a B-axis component, and an A-axis component;

[0004] The X-axis and Z-axis are installed on the granite platform in a T-shaped layout. The X-axis can move forward and backward, and the Z-axis can move left and right. The spindle is installed on the slide of the X-axis, and a flying cutter disk is installed at the front end of the spindle. The tool is installed on the flying cutter disk. The B-axis is installed on the Z-axis, and the A-axis is installed on the B-axis. Parts are installed at the front end of the A-axis.

[0005] The electrical cabinet is located on the top of the machine tool body, and the operating table is located in front of the machine tool body.

[0006] Preferably, the spindle components include a spindle, a spindle sleeve, a graphite sleeve, a rear end cover, a gap ring, a front end cover, a motor, a circular grating, a suction cup seat and a flying cutter assembly.

[0007] A spindle sleeve is provided on the outside of the spindle, a graphite sleeve is installed in the inner hole of the spindle sleeve, a rear end cover, a gap ring and a front end cover are installed at the front end of the spindle sleeve, a motor is installed at the rear end of the spindle, a circular grating is installed at the tail end, a suction cup seat is installed at the front end of the spindle, and a flying cutter disc assembly is installed on the suction cup seat.

[0008] Preferably, the X-axis and Z-axis components include a slide, a guide rail body, a side guide rail, a hydraulic valve block, a linear motor, a pneumatic brake, a motor protection component and a linear motor;

[0009] The guide rail base is fixed on a granite platform, on which a linear motor and two side guide rails (23) are fixed; an oil circuit is arranged inside the slide plate and is connected to a hydraulic valve block; the hydraulic valve block is connected to the oil circuits of the guide rail body and the side guide rails; the linear motor is installed horizontally, and the motor protection part is electrically connected to the linear motor; and retractable protective leather chambers are arranged at both ends of the Z axis.

[0010] Preferably, the B-axis component includes a rotor mounting shaft, a motor rotor, a floating plate, a circular grating, a rotor mounting shaft, a liquid floating main shaft, a brake pad assembly, a liquid floating upper cover, a liquid floating middle ring, a liquid floating turntable base, and a pneumatic brake; the motor rotor is assembled on the outer circle of the rotor mounting shaft; the floating plate is installed on the upper end of the rotor mounting shaft, and the circular grating is installed on the lower end; the rotor mounting shaft is fixed at the center position of the floating plate, the middle position is fixed to the liquid floating main shaft, and the brake pad assembly is fixed at the edge position; the liquid floating upper cover, the liquid floating middle ring, and the liquid floating turntable base are combined into a C-shaped structure; the motor stator is heat-mounted on the stator mounting sleeve, and the stator mounting sleeve is fixed to the liquid floating turntable base, two pneumatic brakes are symmetrically installed at both ends of the B-axis, and the pneumatic brakes are fixed on the liquid floating turntable base.

[0011] Preferably, the A-axis components include angular contact bearings, built-in motors, circular gratings, brake pads, cylinders, cylinder pistons and disc springs. A pair of angular contact bearings are installed at the front end of the spindle, an built-in motor is installed in the middle of the spindle, a circular grating is installed at the rear end of the spindle, brake pads and cylinders are installed at the tail of the spindle, the cylinder piston is connected to the brake pads, the middle position of the brake pads is installed at the tail end of the spindle, the edge of the brake pads is close to the brake stop, the cylinder is installed on the end face of the brake stop, and the disc spring is close to the tail end of the cylinder.

[0012] Preferably, the seismic isolation system includes an air-floating pad, an air-floating pad support frame, a granite support frame, a granite support member, and a granite platform. The fixed side of the air-floating pad is installed on the air-floating pad support frame, and the free side of the air-floating pad is fixed to the granite support frame. The granite support frame is fixed to the lower side of the granite platform through three granite support members.

[0013] Preferably, the part is a multifaceted pyramidal prism.

[0014] The multifaceted pyramidal prism is an important component of the optical system, and its precision directly affects the imaging quality of the optical system. In view of the structural characteristics of the multifaceted prism, the present invention proposes a precision machining scheme of single-point diamond fly turning, and designs a special tooling to ensure one-time clamping and machining. The angle error of the reflective prism obtained by the final machining is 12", which meets the design requirements.

[0015] The ultra-precision five-axis prism milling machine of the present invention effectively ensures the processing accuracy and production efficiency of parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings:

[0017] Figure 1 This is an isometric drawing of the overall structure of the machine tool.

[0018] Figure 2 Schematic diagram of the main structure of the ultra-precision five-axis prism milling machine.

[0019] Figure 3Isometric drawing of X and Z axis components.

[0020] Figure 4 for Figure 3 AA view of the .

[0021] Figure 5 A cross-sectional view of the spindle assembly.

[0022] Figure 6 This is a cross-sectional view of the B-axis component.

[0023] Figure 7 A top view of the turntable.

[0024] Figure 8 A side view of the turntable.

[0025] Fig. 9 This is a side view of the A-axis component.

[0026] Fig.10 This is a cross-sectional view of the A-axis component.

[0027] Fig.11 Isometric view of seismic isolation system components.

[0028] In the figure: 1, electrical cabinet, 2, spindle, 3, X-axis, 4, operating table, 5, Z-axis, 6, B-axis, 7, A-axis, 8, granite platform, 9, flying cutter disc, 10, tool, 11, parts, 12, protective leather cavity, 13, pneumatic brake, 14, brake pad, 15, motor protection part, 16, hydraulic valve block, 17, slide, 18, linear motor, 19, grating ruler, 20, return to zero switch, 21, guide rail body, 22, auxiliary guide rail, 23, side guide rail, 24, grating protection box, 25, circular grating, 26, motor cover, 27, motor sleeve, 28, motor, 29, spindle sleeve, 30, gap ring, 31, suction cup seat, 32, flying cutter disc assembly, 33, front end cover, 34, rear end Cover, 35, graphite sleeve, 37, floating plate, 38, liquid floating main shaft, 39, motor, 40, rotor mounting shaft, 41, brake pad assembly, 42, brake fixing parts, 43, stator mounting sleeve, 44, motor stator, 45, liquid floating turntable base, 46, liquid floating cover, 47, liquid floating middle ring, 48, cylinder vent, 49, bearing pressure cover, 50, main shaft seat, 51, angular contact bearing, 52, built-in motor, 53, cylinder piston, 54, cylinder, 55, disc spring, 56, brake stop, 57, motor stator pressure cover, 58, motor stator sleeve, 59, bearing spacer, 60, granite support, 61, granite support frame, 62, air floating pad iron support frame, 63, air floating pad iron. DETAILED DESCRIPTION

[0029] The technical scheme of the present invention will be clearly and completely described below in conjunction with specific embodiments, but those skilled in the art should understand that the embodiments described below are only used to illustrate the present invention and should not be regarded as limiting the scope of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] like Figure 1 As shown, the ultra-precision five-axis prism milling machine of the present invention is mainly composed of five parts, namely, an operating table 4, an electrical cabinet 1, a software numerical control system, a hydraulic system and a machine tool body. The machine tool body is composed of six parts, namely, a main body seismic isolation system, an X-axis unit, a Z-axis unit, a spindle unit, a B-axis unit and an A-axis unit.

[0031] like Figure 2 As shown, the main structure of the five-axis multifaceted cone prism processing milling machine consists of the following parts: the X-axis 3 and the Z-axis 5 are installed on the granite platform 8 in a T-shaped layout, the X-axis 3 moves forward and backward, and the Z-axis 5 moves left and right; the main axis 2 is installed on the X-axis slide 17, the front end of the main axis 2 is installed with a flying cutter disk 9, the flying cutter disk 9 is installed with a tool, the Z-axis 5 is installed with a B-axis (turntable) 6, the turntable is installed with an A-axis 7, the front end of the A-axis 7 is installed with a part 11, and the part 11 can be a multifaceted cone prism; the B-axis is the turntable.

[0032] Working principle: A multifaceted cone prism can be installed at the front end of the A-axis. After the A-axis is enabled and rotates to the specified angle required for processing, the A-axis brake is locked, and the A-axis enable is disconnected. After the turntable is enabled and rotates to the specified angle required for processing, the turntable brake is locked, and the turntable enable is disconnected. After the A-axis and turntable are in place, the spindle starts to rotate, and after the Z-axis moves to the specified position, the X-axis moves the tool back and forth to process the part surface. After processing the current surface, the Z-axis retreats to a safe position, and the A-axis and turntable rotate to the A-axis angle and turntable angle required for the next surface processing. The A-axis brake is locked, the turntable brake is locked, the spindle rotates, and the X-axis and Z-axis cooperate to move to process the part surface.

[0033] like Figure 3 , 4As shown, the X-axis 3 and Z-axis 5 use liquid-floating guide rails with an accuracy within the range of 0.1μ, and are equipped with self-made small-hole throttling hydraulic valve block 16, linear motor 18, optical ruler 19, zero switch 20, brake, motor protection and other components to form a closed-loop controlled nano-level linear axis with high precision, high stability and high rigidity; the guide rail base is fixed on the marble bed, on which the linear motor 18 and two side guide rails 23 are fixed, and the anti-wear hydraulic oil is filtered and pressurized and passed to the slide 17. The slide 17 has a designed pipeline inside to distribute the oil to the four hydraulic valve blocks 16, and then through the throttle to the guide rail body 21 and the side guide rail 23, so that an oil film is formed between the slide 17 and the guide rail body 21 and the side guide rail 23, forming a liquid static pressure state to ensure the frictionless movement of the slide 17. The brake adopts a normally closed type to ensure that the linear axis is locked and protected in the case of power failure and air failure. The horizontal installation of the linear motor 18 can greatly reduce the overall height of the feed shaft and facilitate the convenience of mechanical assembly. The linear axis is installed with a motor protection component to prevent destructive damage to high-precision components such as the motor grating guide rail under harsh conditions such as collision and flying during use. The linear axis is installed with a retractable protective leather cavity 12 to protect the liquid-floating guide rail, and a protective design is made for precision parts such as the grating scale 19. During installation, the mounting surface is sealed with sealant to ensure the cleanliness of the internal moving parts of the linear axis. The maximum stroke of the X-axis and Z-axis linear axes is 200mm, the straightness is 0.1μm, the displacement accuracy is 0.1μm, and the resolution is 1nm. The maximum stroke of the Z-axis linear axis is 200mm, the straightness is 0.1μm, the displacement accuracy is 0.1μm, and the resolution is 1nm.

[0034] like Figure 5 As shown, the maximum speed of the spindle 2 is 6000rpm, a built-in motor 28 is used, a circular grating 25 is installed with a C-axis function, a flying cutter disc is installed at the front end of the spindle 2, and the rotation accuracy of the spindle 2 is 0.05μm.

[0035] A graphite sleeve 35 is installed in the inner hole of the main shaft sleeve 29, and a rear end cover 34, a gap ring 30 and a front end cover 33 are installed at the front end of the main shaft sleeve 29. After the main shaft 2 is ventilated, an air film is formed on the surfaces of the graphite sleeve 35, the front end cover 33 and the rear end cover 34, and the main shaft 2 is suspended in the formed air film and can rotate freely; a motor 28 is installed at the rear end of the main shaft 2, a circular grating 25 is installed at the tail end, a suction cup seat 31 is installed at the front end of the main shaft 2, and a flying cutter disc assembly 32 is installed on the suction cup seat 31. After the main shaft 2 is ventilated, the motor 28 and the circular grating 25 are fully closed-loop controlled, which can provide a high-precision and high-positioning speed;

[0036] like Figure 6As shown, the B axis is a liquid floating turntable. The servo turntable is a liquid hydrostatic guide support structure, torque motor drive, circular grating full closed loop control, and has the function of brake locking and releasing after angle positioning. The servo turntable has the characteristics of high rotation accuracy, high rigidity, large load capacity, stable operation, wide applicable speed range, and long service life.

[0037] Hydraulic oil is introduced into the C-shaped structure of the ultra-precision liquid-floating servo turntable from the hydraulic station. The hydraulic oil flows out from the oil return hole of the liquid-floating turntable base 45 and returns to the hydraulic oil tank. At this time, the rotating parts of the ultra-precision liquid-floating turntable, including the liquid-floating main shaft 38, the floating plate 37, the brake pad assembly 41, and the rotor mounting shaft 43, are suspended and can maintain high-precision free rotation. The servo turntable is driven by the torque motor 39 to rotate, and the servo turntable is fully closed-loop controlled through the feedback of the torque motor 39 and the circular grating 25.

[0038] The outer circle of the rotor mounting shaft 40 is assembled with the motor rotor 44, the upper end is installed with the upper floating plate 37, and the lower end is installed with the circular grating 25. The rotor mounting shaft 43 is fixed at the center of the upper floating plate 37, the middle position is fixed with the liquid floating main shaft 38, and the edge position is fixed with the brake pad assembly 41; the liquid floating upper cover 46, the liquid floating middle ring 47, and the liquid floating turntable base 45 are combined into a C-shaped structure. After the oil cavity of the C-shaped structure is passed through oil, the liquid floating main shaft 38 is suspended axially and radially by oil pressure; the motor stator 44 is heat-mounted on the stator mounting sleeve 43, and the stator mounting sleeve 43 is fixed on the base 45 of the liquid floating turntable. After power and oil are supplied, the liquid floating main shaft 38, the floating plate 37, the rotor mounting shaft 40, the brake pad assembly 41, the circular grating 25 and other parts suspended by the motor can maintain high precision, high rigidity and free rotation; the torque motor 39 and the circular grating 25 are fully closed-loop controlled, and can provide high-precision positioning of the rotation angle; two pneumatic brakes 13 are symmetrically installed at both ends of the turntable, and the pneumatic brakes 13 are fixed on the base 45 of the liquid floating turntable. The pneumatic brakes 13 are loosened by ventilation and locked by air cut-off.

[0039] Working principle: A multi-faceted prism can be installed at the front end of A-axis 7. After A-axis 7 is enabled and rotated to the specified angle required for processing, the cylinder is ventilated, and the cylinder piston extends to press the brake pad against the brake stop. A-axis is installed on the turntable. After the turntable is enabled and rotated to the specified angle required for processing, the brake cylinder is de-energized, and the pneumatic brake 13 is pressed against the brake pad. After the turntable is fixed at the required specified angle, the turntable is disconnected and processing begins; processing after power is off can eliminate the subtle influence of motor vibration on the surface of parts when power is on;

[0040] like Fig. 9 , Fig.10The A-axis component is shown. The axis is supported by an angular contact bearing, driven by a torque motor, and fully closed-loop controlled by a circular grating. After the angle is positioned, it has the function of brake locking and releasing. The axis has the characteristics of compact structure, light weight, low noise, low vibration and small moment of inertia, high rotation accuracy, high rigidity, large load capacity and long service life.

[0041] A pair of angular contact bearings 51 are installed at the front end of the spindle 2. The angular contact bearings 51 support the high-precision, high-rigidity, and low-noise rotation of the spindle 2. An internal motor 52 is installed in the middle of the spindle 2 to drive the spindle 2 to rotate. A high-precision circular grating 25 is installed at the rear end of the spindle 2. The internal motor 52 and the circular grating 25 are fully closed-loop controlled, which can provide high-precision positioning of the rotation angle. A brake pad 14 and a cylinder 54 are installed at the tail end of the spindle 2. The middle position of the brake pad 14 is installed at the tail end of the spindle 2 to rotate with the spindle 2. The edge position of the brake pad 14 is close to the brake stop 56. The cylinder 54 is installed at the brake On the end surface of the brake stopper 56, when the cylinder 54 is ventilated, the cylinder piston 53 extends out, and when the cylinder 54 is de-energized, the cylinder piston 53 is pulled back by the disc spring 55 at the tail end of the cylinder 54; Working principle: a multi-faceted prism can be installed at the front end of the spindle 2, and after the spindle 2 is enabled and rotated to the specified angle required for processing, the cylinder 54 is ventilated, and the cylinder piston 53 extends to press the brake pad 14 on the brake stopper 56, and after the spindle 2 is fixed at the required specified angle, the spindle 2 is de-enabled and processing begins; processing after power is off can eliminate the subtle influence of motor vibration on the surface of the parts when power is on;

[0042] like Fig.11 As shown, the seismic isolation system is supported by six-dimensional air-floating pads 63. The fixed side of the air-floating pads 63 is installed on the air-floating pad support frame 62. The free side of the air-floating pads 63 is fixed to the granite support frame 61. The granite support frame 62 is floated by four air-floating pads 63. The granite support frame 62 is fixed to the lower side of the granite platform 8 by three granite support members 60. In this way, the granite platform can be isolated from the six-dimensional vibration from the outside world through the six-dimensional air-floating pads 63, thereby ensuring the basic accuracy of the machine tool stability.

[0043] In the description of the present invention, it should be noted that the orientations or positional relationships indicated by terms such as “upper”, “lower”, “left”, “right”, “top”, “bottom”, “side” and “end” are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0044] In addition, in the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "set", "provided with", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An ultra-precision five-axis prism milling machine, characterized in that: It comprises an operating table (4), an electrical cabinet (1) and a machine tool body; the machine tool body comprises a seismic isolation system, an X-axis component, a Z-axis component, a spindle component, a B-axis component and an A-axis component; The X-axis (3) and the Z-axis (5) are installed on a granite platform (8) in a T-shaped layout. The X-axis (3) can move forward and backward, and the Z-axis (5) can move left and right. The spindle (2) is installed on a slide plate (17) of the X-axis (3). A flying cutter disc (9) is installed at the front end of the spindle (2). A tool is installed on the flying cutter disc (9). A B-axis (6) is installed on the Z-axis (5). An A-axis (7) is installed on the B-axis (6). A part (11) is installed at the front end of the A-axis (7). The electrical cabinet (1) is located on the top of the machine tool body, and the operating table (4) is located in front of the machine tool body.

2. The ultra-precision five-axis prism milling machine according to claim 1, characterized in that: The spindle components include a spindle (2), a spindle sleeve (29), a graphite sleeve (35), a rear end cover (34), a gap ring (30), a front end cover (33), a motor (28), a circular grating (25), a suction cup seat (31) and a flying cutter disc assembly (32). A main shaft sleeve (29) is arranged on the outside of the main shaft (2), a graphite sleeve (35) is installed in the inner hole of the main shaft sleeve (29), a rear end cover (34), a gap ring (30) and a front end cover (33) are installed at the front end of the main shaft sleeve (29), a motor (28) is installed at the rear end of the main shaft (2), a circular grating (25) is installed at the tail end, a suction cup seat (31) is installed at the front end of the main shaft (2), and a flying cutter disc assembly (32) is installed on the suction cup seat (31).

3. The ultra-precision five-axis prism milling machine according to claim 1, characterized in that: The X-axis and Z-axis components include a slide plate (17), a guide rail body (21), a side guide rail (23), a hydraulic valve block (16), a linear motor (18), a pneumatic brake (13), a motor protection component (15) and a linear motor (18); The guide rail base is fixed on a granite platform (8), on which a linear motor (18) and two side guide rails (23) are fixed; an oil circuit is provided inside the slide plate (17) and is connected to a hydraulic valve block (16); the hydraulic valve block (16) is connected to the oil circuits of the guide rail body (21) and the side guide rails (23); the linear motor (18) is installed horizontally, and a motor protection component (15) is electrically connected to the linear motor (18); and retractable protective leather chambers (12) are provided at both ends of the Z axis (5).

4. The ultra-precision five-axis prism milling machine according to claim 1, characterized in that: The B-axis component comprises a rotor mounting shaft (40), a motor rotor (44), a floating plate (37), a circular grating (25), a rotor mounting shaft (43), a liquid floating main shaft (38), a brake pad assembly (41), a liquid floating upper cover (46), a liquid floating middle ring (47), a liquid floating turntable base (45), and a pneumatic brake (13). The outer circle of the rotor mounting shaft (40) is assembled with the motor rotor (44); the floating plate (37) is installed at the upper end of the rotor mounting shaft (40), and the circular grating (25) is installed at the lower end; the center of the floating plate (37) is located at the bottom of the rotor mounting shaft (40). A rotor mounting shaft (43) is fixed, the middle position is fixed to the liquid floating main shaft (38), and the edge position is fixed to the brake pad assembly (41); the liquid floating upper cover (46), the liquid floating middle ring (47), and the liquid floating turntable base (45) are combined into a C-shaped structure; the motor stator (44) is heat-mounted on the stator mounting sleeve (43), and the stator mounting sleeve (43) is fixed to the liquid floating turntable base (45); two pneumatic brakes (13) are symmetrically installed at both ends of the B axis (6), and the pneumatic brakes (13) are fixed on the liquid floating turntable base (45).

5. The ultra-precision five-axis prism milling machine according to claim 1, characterized in that: The A-axis component comprises an angular contact bearing (51), an internal motor (52), a circular grating (25), a brake pad (14), a cylinder (54), a cylinder piston (53) and a disc spring (55). A pair of angular contact bearings (51) are installed at the front end of the main shaft (2), an internal motor (52) is installed in the middle of the main shaft (2), a circular grating (25) is installed at the rear end of the main shaft (2), a brake pad (14) and a cylinder (54) are installed at the tail end of the main shaft (2), the cylinder piston (53) is connected to the brake pad (14), the middle position of the brake pad (14) is installed at the tail end of the main shaft (2), the edge position of the brake pad (14) is close to the brake stopper (56), the cylinder (54) is installed on the end surface of the brake stopper (56), and the disc spring (55) is close to the tail end of the cylinder (54).

6. The ultra-precision five-axis prism milling machine according to claim 1, characterized in that: The seismic isolation system comprises an air-floating pad iron (63), an air-floating pad iron support frame (62), a granite support frame (61), a granite support member (60), and a granite platform (8). The fixed side of the air-floating pad iron (63) is installed on the air-floating pad iron support frame (62), the free side of the air-floating pad iron (63) is fixed to the granite support frame (61), and the granite support frame (61) is fixed to the lower side of the granite platform (8) through three granite support members (60).

7. The ultra-precision five-axis prism milling machine according to claim 1, characterized in that: The component (11) is a multifaceted pyramidal prism.

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