Semiconductor thin-wall stainless steel cavity welding process

Abstract

The invention relates to the technical field of welding, and discloses a semiconductor thin-wall stainless steel cavity welding process which comprises the following steps: step 1, expanding size quantity of prepared products, reserving welding shrinkage quantity, and carrying out quantity quantity on a side plate, a bottom plate and an upper opening flange part of a cavity; 2, tailor welding and spot welding are conducted on the side plates and the bottom plate, the bottom plate and the upper opening flange and the cooling water channel and the side plates, and a blank is obtained; 3, rigidly supporting the blank body obtained in the step 2; 4, welding parameters are set, and the side plate, the bottom plate, the upper opening flange and the cooling water channel obtained in the step 3 are welded to obtain a cavity; and 5, carrying out tempering heat treatment on the cavity in the step 4. According to the welding process, the influence of welding shrinkage deformation is reduced, the welding quality is improved, rigid support is added before welding, the strength is improved, welding deformation is reduced, tempering heat treatment is adopted after welding, the welding residual stress of a cavity welding seam is eliminated, and the machining precision of a product after welding is improved.

Description

Technical Field

[0001] The invention relates to the field of welding, and in particular to a semiconductor thin-wall stainless steel cavity welding process. Background Art

[0002] With the rapid development of the domestic semiconductor industry, semiconductor equipment is also constantly being updated. As the core component of semiconductors, the vacuum chamber has a complex structure and manufacturing process. Especially for thin-walled stainless steel welded chambers, the welding of cooling water channels on the chamber is particularly critical. Therefore, a new technical solution is urgently needed to solve at least one of the above technical problems. Summary of the invention

[0003] The purpose of the present invention is to provide a semiconductor thin-walled stainless steel cavity welding process, in which the product preparation reserves welding shrinkage, reduces the influence of welding shrinkage deformation, improves welding quality, increases rigid support before welding, increases strength, reduces welding deformation of side plates, bottom plates, flanges, and cooling water channels, and adopts tempering heat treatment after welding to eliminate residual stress of cavity welds and improve the processing accuracy of products after welding.

[0004] In order to achieve the above technical objectives and meet the above technical requirements, the technical solution adopted by the present invention is: a semiconductor thin-walled stainless steel cavity welding process, characterized in that it includes the following steps: Step 1: Prepare the product and expand the size. By calculating the deformation trend of the cavity after welding and reserving the welding shrinkage, the side plate, bottom plate and upper flange parts of the cavity are expanded; Step 2, performing spot welding on the side plate and the bottom plate, the bottom plate and the upper flange, the cooling water channel and the side plate to obtain an embryonic body; Step 3, providing rigid support to the embryo obtained in step 2; Step 4, setting welding parameters, welding the side plate, bottom plate, upper flange and cooling water channel obtained in step 3 to obtain the cavity; Step 5: Perform tempering heat treatment on the cavity of step 4.

[0005] As a preferred technical solution, the welding shrinkage in step 1 includes the lateral shrinkage of the double-sided V-shaped groove without gap and the lateral shrinkage of the double-sided fillet weld. The lateral shrinkage of the double-sided V-shaped groove without gap is 0.5mm-0.7mm, and the lateral shrinkage of the double-sided fillet weld is 0.3mm-0.5mm.

[0006] As a preferred technical solution, in step 1, when the upper flange is enlarged, the length, width and height are each increased by 1.5mm, when the bottom plate is enlarged, the length and width are each increased by 1.5mm, and when the side panel is enlarged, the length direction increases by 2-3.5mm, the width direction increases by 2-3mm, and the height direction increases by 2-2.5mm.

[0007] As a preferred technical solution, the spot welding length in step 2 is 15-20 mm and the spacing is 120-150 mm.

[0008] As a preferred technical solution, the rigid support adopts a support frame, and the support frame includes a plurality of support tubes.

[0009] As a preferred technical solution, the welding method of the square tube and the side plate and bottom plate joint surface is symmetrical intermittent welding, the weld length is 40mm, and the spacing is 100mm.

[0010] As a preferred technical solution, the welds welded in step 4 include intermittent welds between the bottom plate and the outside of the side plate, intermittent welds between the upper flange and the outside of the side plate, butt welds between the cooling water channel, corner welds between the cooling water channel and the side plate, welds between the bottom plate and the inside of the side plate, and welds between the side plate and the inside of the upper flange.

[0011] As a preferred technical solution, the welding parameters in step 4 are specifically as follows: the bottom welding current of the intermittent weld between the bottom plate and the outer side of the side plate is 110-140A, the voltage is 9-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ1.6, the tungsten electrode type size is WC-20φ2.4mm, and the bottom welding heat input is 0.53 (KJ / mm), the cover current of the intermittent weld between the bottom plate and the outer side of the side plate is 110-140A, the voltage is 9-15V, the welding speed is 6.5-10.8cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0, the tungsten electrode type size is WC-20φ2.4mm, and the cover welding heat input is 0.63 (KJ / mm); The welding current of the intermittent weld between the upper flange and the outer side of the side plate, the butt weld of the cooling water channel, the weld between the bottom plate and the inner side of the side plate, and the weld between the side plate and the inner side of the upper flange is 130-170A, the voltage is 10-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0, the tungsten electrode type size is WC-20φ2.4mm, and the welding heat input is 0.66 (KJ / mm); The welding current of the cooling water channel butt weld and the cooling water channel and side plate fillet weld is 80-110V, the voltage is 9-13V, the welding speed is 6-9cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0, the tungsten electrode type size is WC-20φ1.6mm, and the welding heat input is 0.50 (KJ / mm).

[0012] As a preferred technical solution, the welding sequence in step 4 is: intermittent welds between the bottom plate and the outside of the side plate, symmetrical welding of the intermittent welds between the upper flange and the outside of the side plate and the intermittent welds of the cooling water channel butt welds, welding of the W5 fillet welds of the cooling water channel on the outside of the cavity side plate, and symmetrical welding of the W5 transverse cooling water channel welds on four surfaces from the middle to both sides (the symmetrical position is first front, back, then left and right), with a single-side welding weld length of <200mm, and then welding the vertical cooling water channel in sequence as above, and finally welding the butt welds of the W4 cooling water channel and the welds of the transition R angle at the bend.

[0013] As a preferred technical solution, the stainless steel cavity and support frame are subjected to stabilized tempering heat treatment together. The furnace heating rate is 100±2℃ / h, the parts heating temperature is 860±2℃, the insulation time is 1.5-2.5 hours, and the cooling rate is furnace cooling. After the cavity and support frame are cooled to 300±2℃, they are cooled by aeration and then opened for furnace cooling.

[0014] The beneficial effects of the present invention are: 1) Reserve welding shrinkage in product preparation to reduce the impact of welding shrinkage deformation and improve welding quality. Add rigid support before welding to increase strength and reduce welding deformation of side panels, bottom plates, flanges and cooling water channels. Use tempering heat treatment after welding to eliminate residual stress in the cavity weld and improve the processing accuracy of the product after welding. 2) Strictly control welding shrinkage according to the weld structure to improve welding quality; 3) Optimize the welding sequence to prevent serious local deformation caused by incorrect welding sequence; 4) Strictly control welding parameters to significantly reduce welding deformation and improve welding quality; 5) Stabilization tempering heat treatment can release welding internal stress, reduce welding deformation, prevent cracking at the weld, and provide better dimensional stability after welding. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a three-dimensional diagram of a cavity provided by one embodiment of the present invention; Figure 2 yes Figure 1 A view from another direction; Figure 3 yes Figure 1 A view from another direction; Figure 4 yes Figure 1 of views in one direction.

[0016] exist Figure 1-Figure 41. first side plate; 2. second side plate; 3. bottom plate; 4. upper flange; 5. cooling water channel; 6. first supporting tube; 7. second supporting tube; 8. third supporting tube; 9. fourth supporting tube; 10. fifth supporting tube; 11. sixth supporting tube; 12. seventh supporting tube; 13. eighth supporting tube; 14. ninth supporting tube; 15. tenth supporting tube; 16. eleventh supporting tube; 17. twelfth supporting tube; 18. thirteenth supporting tube; 19. reinforcing ribs. DETAILED DESCRIPTION

[0017] The present invention is further described below in conjunction with the accompanying drawings.

[0018] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "head", "tail", "top", "bottom", "left", "right", "front", "back", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as a limitation on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0019] See also Figure 1-Figure 4 An embodiment of the present invention provides a semiconductor thin-wall stainless steel cavity welding process, comprising the following steps: Step 1: Prepare the product and expand the size. By calculating the deformation trend of the cavity after welding and reserving the welding shrinkage, the side plate, bottom plate 3, and upper flange 4 of the cavity are expanded; Step 2, performing spot welding on the side plate and the bottom plate 3, the bottom plate 3 and the upper flange 4, the cooling water channel 5 and the side plate to obtain an embryonic body; Step 3, providing rigid support to the embryo obtained in step 2; Step 4, setting welding parameters, welding the side plate, bottom plate 3, upper flange 4 and cooling water channel 5 obtained in step 3 to obtain a cavity; Step 5: Perform tempering heat treatment on the cavity of step 4.

[0020] The product preparation reserves welding shrinkage to reduce the impact of welding shrinkage deformation and improve welding quality. Rigid support is added before welding to increase strength and reduce welding deformation of the side panels, bottom plate 3, upper flange 4 and cooling water channel 5. After welding, tempering heat treatment is used to eliminate residual stress of the cavity weld and improve the processing accuracy of the product after welding.

[0021] like Figure 1-Figure 4As shown, the welding shrinkage in step 1 includes the double-sided V-shaped groove gapless lateral shrinkage and the double-sided fillet weld lateral shrinkage. The double-sided V-shaped groove gapless lateral shrinkage is 0.5mm-0.7mm, and the double-sided fillet weld lateral shrinkage is 0.3mm-0.5mm. The product part size is increased and prepared for processing. The deformation of the weldment during welding needs to be considered. The welding residual deformation includes longitudinal shrinkage deformation, transverse shrinkage deformation, angular deformation, bending deformation, twisting deformation and wave deformation, a total of six deformation modes, among which the longitudinal shrinkage deformation and transverse shrinkage deformation of the weld are the basic deformation forms. The shrinkage deformation of the butt weld is related to the groove form of the butt weld, butt gap, welding line energy, thickness of the steel plate and cross-sectional area of ​​the weld. The deformation size of other factors is proportional to the filler metal and heat input of the weld. The lateral shrinkage increases with the increase of weld angle height K and decreases with the increase of plate thickness S. The welding shrinkage allowance calculation formula △L=a△TL0+KE△λl0 and empirical values ​​show that the gapless lateral shrinkage of 6mm double-sided V-shaped groove is 0.5mm-0.7mm, and the lateral shrinkage of double-sided fillet weld is 0.3mm-0.5mm. The product preparation reserves welding shrinkage to reduce the influence of welding shrinkage deformation and improve welding quality. Rigid support is added before welding to increase strength and reduce welding deformation of side panels, bottom plate 3, upper flange 4, and cooling water channel 5. After welding, tempering heat treatment is used to eliminate the residual stress of cavity weld welding and improve the processing accuracy of the product after welding.

[0022] like Figure 1-Figure 4 As shown, in step 1, when the upper flange 4 is enlarged, the length, width and height are each increased by 1.5 mm on one side, and when the bottom plate 3 is enlarged, the length, width and height are each increased by 1.5 mm on one side. When the side plate is enlarged, the length, width and height of the unfolded side plate are 676﹢(2-3.5) mm, 530﹢(2-3.0) mm, and 238﹢(2-2.5) mm, respectively.

[0023] like Figure 1-Figure 4As shown, the spot welding length in step 2 is 15-20mm, and the spacing is 120-150mm. Specifically, there are two side panels, namely the first side panel 1 and the second side panel 2. When the side panels are welded and spot welded, the side panels are assembled with the bottom panel 3 and the upper flange 4 using a T-type step structure. The assembly steps are machined by mechanical processing. The assembly clearance between the bottom panel 3, the upper flange 4 and the side panels is required to be controlled to be less than 0.3mm. The spot welding weld position is assembled, the spot welding length is 15-20mm, and the spacing is 120-150mm. The cooling water channels 5 on the outside of the first side panel 1 and the second side panel 2 are assembled, and the assembly spot welding is performed according to the laser marking position. The assembly clearance of the fillet weld of the cooling water channel 5 is required to be less than 0.3mm, and the splicing clearance of the butt and R fillet welds is required to be less than 0.5mm. The spot welding is required to be symmetrical spot welding, the spot welding length is 5-10mm, and the spacing is 30-50mm. By controlling the assembly clearance and spot welding length of the parts, it is avoided that the parts are excessively deformed due to excessive local heat input during welding due to excessive assembly clearance.

[0024] like Figure 1-Figure 4 As shown, the rigid support adopts a support frame, which includes multiple support tubes. The support tubes adopt 40*40*5mm square tubes. Due to the serious welding deformation between the side plate and the cooling water channel 5 and the difficulty in shape correction, after the process optimization, the cavity is spot welded as a whole and fixed with square tube rigid support, and then welding is carried out.

[0025] The support frame includes a first support tube 6, a second support tube 7, a third support tube 8, and a fourth support tube 9 which are sequentially arranged along the inner upper part of the side plate. The first support tube 6 and the third support tube 8 are arranged in parallel, and the second support tube 7 and the fourth support tube 9 are arranged in parallel. A fifth support tube 10 is vertically welded between the second support tube 7 and the fourth support tube 9, a sixth support tube 11 and a seventh support tube 12 are vertically welded between the first support tube 6 and the fifth support tube 10, an eighth support tube 13 and a ninth support tube 14 are vertically welded between the third support tube 8 and the fifth support tube 10, a tenth support tube 15 is welded on the upper side of the bottom plate 3, and an eleventh support tube 16, a twelfth support tube 17 and a thirteenth support tube 18 are vertically equidistantly welded between the fifth support tube 10 and the tenth support tube 15. The support frame has a stable structure and high rigidity.

[0026] like Figure 1-Figure 4 As shown, the spot welding requirement of the support pipe is that the weld of the upper flange 4 is 15-20mm lower, the welding method of the support pipe and the side plate and the bottom plate 3 is symmetrical intermittent welding, the weld length is 40mm, the spacing is 100mm, the butt weld size of the supporting square tube and the supporting square tube must meet the cavity assembly size requirements, the support tube assembly gap is less than 0.2mm, and the upper and lower symmetrical welds are fully welded. This support frame ensures rigid support during welding, increases strength, and reduces the deformation of the cavity caused by the welds of the cavity bottom plate 3, the upper flange 4, and the cooling water channel 5.

[0027] like Figure 1-Figure 4 As shown, the welds welded in step 4 include butt welds of the side panels, intermittent welds between the bottom plate 3 and the outside of the side panels, intermittent welds between the upper flange 4 and the outside of the side panels, butt welds of the cooling water channel 5, fillet welds between the cooling water channel 5 and the side panels, welds between the bottom plate 3 and the inside of the side panels, and welds between the side panels and the inside of the upper flange 4. The butt welds of the side panels are double-sided V-shaped grooves, intermittent welds between the bottom plate 3 and the outside of the side panels, intermittent welds between the upper flange 4 and the outside of the side panels, welds between the bottom plate 3 and the inside of the side panels, and welds between the side panels and the inside of the upper flange 4 are double-sided fillet welds. After the first side panel 1 and the second side panel 2 are welded together, they are a rectangular structure with four outer sides, wherein two corners on the same side are provided with chamfers, and the length of the single-sided weld is controlled to increase the cooling time of the weld and reduce welding deformation. The welding sequence is: 1) welding the butt weld of the cavity side panel W1; 2) symmetrically welding the intermittent welds between the bottom plate 3 and the outer side of the side panel, and the intermittent welds between the upper flange 4 and the outer side of the side panel, with a length of 50mm and a spacing of 120mm; 3) cooling water channel 5 and side panel fillet welds; 4) symmetrically welding the transverse cooling water channel 5 and side panel fillet welds on the four outer sides in sequence from the middle to both sides (the symmetrical position is first front and back and then left and right), and the length of the single-side welding weld is less than 200mm; 5) welding the butt weld of the cooling water channel 5 and the corner (R corner) weld of the cooling water channel 5 at the bend; 6) welding the inner side welds between the bottom plate 3 and the side panel, and the inner side welds between the side panel and the upper flange 4.

[0028] like Figure 1-Figure 4As shown, the welding parameters in step 4 are as follows: the bottom welding current of the side plate butt weld is 110-140A, the voltage is 9-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ1.6, the tungsten electrode type size is WC-20φ2.4mm, and the bottom welding heat input is 0.53 (KJ / mm). The cover current of the side plate butt weld is 110-140A, the voltage is 9-15V, the welding speed is 6.5-10.8cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0, the tungsten electrode type size is WC-20φ2.4mm, and the cover welding heat input is 0.63 (KJ / mm), the welding current of the intermittent weld between the bottom plate 3 and the outside of the side plate, the intermittent weld between the upper flange 4 and the outside of the side plate, the weld between the bottom plate 3 and the inside of the side plate, and the weld between the side plate and the inside of the upper flange 4 is 130-170A, the voltage is 10-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire ER316L φ2.0 tungsten electrode type size WC-20φ2.4mm, the welding heat input is 0.66 (KJ / mm), the welding current of the butt weld of the cooling water channel 5, the welding current of the fillet weld of the cooling water channel 5 and the side plate is 80-110V, the voltage is 9-13V, the welding speed is 6-9cm / min, the gas flow rate is 6-12L / min, the welding wire ER316L φ2.0 tungsten electrode type size WC-20φ1.6mm, welding heat input 0.50 (KJ / mm), strictly control welding parameters, and significantly reduce welding deformation and improve welding quality by controlling welding parameters.

[0029] like Figure 1-Figure 4 As shown, the stainless steel cavity and the support frame are stabilized and tempered together. The furnace heating rate is 100±2℃ / h, the parts heating temperature is 860±2℃, the holding time is 1.5-2.5 hours, and the cooling rate is furnace cooling. After the workpiece is cooled to 300±2℃, it is cooled by gas inflation and then the furnace is opened for cooling. This can completely release the welding internal stress, accurately control the heating and cooling cycles, ensure the best material properties and the surface is not oxidized and the necessary smoothness, and more thoroughly release the welding internal stress to ensure the cavity processing accuracy.

[0030] In order to strengthen the bottom plate 3, a plurality of reinforcing ribs 19 need to be welded on the bottom plate 3. The welding requirements of the reinforcing ribs 19 are as follows: the weld length is 50 mm, the spacing is 150 mm, and the end of the reinforcing rib 1 is filled with fillet welding.

[0031] Example 1: Please refer to Figure 1-Figure 4 , a semiconductor thin-wall stainless steel cavity welding process, comprising the following steps: Step 1: Prepare the product and expand the size. By calculating the deformation trend of the cavity after welding and reserving the welding shrinkage, the side plate, bottom plate 3, and upper flange 4 of the cavity are expanded; Step 2, performing spot welding on the side plate and the bottom plate 3, the bottom plate 3 and the upper flange 4, the cooling water channel 5 and the side plate to obtain an embryonic body; Step 3, providing rigid support to the embryo obtained in step 2; Step 4, setting welding parameters, welding the side plate, bottom plate 3, upper flange 4 and cooling water channel 5 obtained in step 3 to obtain a cavity; Step 5: Perform tempering heat treatment on the cavity of step 4.

[0032] The welding shrinkage in step 1 includes the lateral shrinkage of the double-sided V-shaped groove without gap and the lateral shrinkage of the double-sided fillet weld. The lateral shrinkage of the double-sided V-shaped groove without gap is 0.5mm, and the lateral shrinkage of the double-sided fillet weld is 0.3mm. The lateral shrinkage of the 6mm double-sided V-shaped groove without gap is 0.5mm, and the lateral shrinkage of the double-sided fillet weld is 0.3mm.

[0033] The length, width and height of the upper flange 4 are each increased by 1.5mm on one side, and the length and width of the bottom plate 3 are each increased by 1.5mm on one side. When the upper flange 4 is enlarged, the length, width and height of the upper flange 4 are each increased by 1.5mm on one side, and the length and width of the bottom plate 3 are each increased by 1.5mm on one side.

[0034] The spot welding length in step 2 is 15mm, and the spacing is 120mm. Specifically, there are two side panels, namely the first side panel 1 and the second side panel 2. During the spot welding, the side panel and the bottom panel 3 and the upper flange 4 are assembled using a T-type step structure. The T-type step structure is assembled by mechanical processing. The assembly gap between the bottom panel 3, the upper flange 4 and the side panel is required to be controlled at 0.2mm. The spot welding weld position is assembled, the spot welding length is 15mm, and the spacing is 120mm. The cooling water channel 5 outside the first side panel 1 and the second side panel 2 is assembled, and the assembly spot welding is performed according to the laser marking position. The assembly gap of the corner weld of the cooling water channel 5 is required to be 0.2mm, and the gap between the butt joint and the corner weld splicing is required to be 0.4mm. The spot welding is required to be symmetrical spot welding, and the spot welding length is 5mm and the spacing is 30mm.

[0035] The rigid support adopts a support frame, which includes multiple support tubes. The support tubes adopt 40*40*5mm square tubes. The support frame includes a first support tube 6, a second support tube 7, a third support tube 8, and a fourth support tube 9 which are arranged in sequence along the inner upper part of the side plate. The first support tube 6 and the third support tube 8 are arranged in parallel, and the second support tube 7 and the fourth support tube 9 are arranged in parallel. A fifth support tube 10 is vertically welded between the second support tube 7 and the fourth support tube 9, a sixth support tube 11 and a seventh support tube 12 are vertically welded between the first support tube 6 and the fifth support tube 10, an eighth support tube 13 and a ninth support tube 14 are vertically welded between the third support tube 8 and the fifth support tube 10, a tenth support tube 15 is welded on the upper side of the bottom plate 3, and an eleventh support tube 16, a twelfth support tube 17 and a thirteenth support tube 18 are vertically equidistantly welded between the fifth support tube 10 and the tenth support tube 15.

[0036] The spot welding requirements for the support pipe are that the weld of the upper flange 4 is 15mm lower, the welding method of the support pipe and the side plate and bottom plate 3 is symmetrical intermittent welding, the weld length is 40mm, the spacing is 100mm, the support pipe assembly gap is 0.1mm, and the upper and lower symmetrical welds are fully welded.

[0037] The welds welded in step 4 include side panel butt welds, intermittent welds between the bottom plate 3 and the outside of the side panel, intermittent welds between the upper flange 4 and the outside of the side panel, butt welds between the cooling water channel 5, fillet welds between the cooling water channel 5 and the side panel, welds between the bottom plate 3 and the inside of the side panel, and welds between the side panel and the inside of the upper flange 4. The side panel butt welds are double-sided V-shaped grooves, intermittent welds between the bottom plate 3 and the outside of the side panel, intermittent welds between the upper flange 4 and the outside of the side panel, welds between the bottom plate 3 and the inside of the side panel, and welds between the side panel and the inside of the upper flange 4 are double-sided fillet welds. After the first side panel 1 and the second side panel 2 are welded together, they are a rectangular structure with 4 outer sides, of which 2 corners on the same side are chamfered. The welding sequence is: 1) welding the butt weld of the cavity side panel W1; 2) symmetrically welding the intermittent welds between the bottom plate 3 and the outer side of the side panel, and the intermittent welds between the upper flange 4 and the outer side of the side panel, with a length of 50mm and a spacing of 120mm; 3) cooling water channel 5 and side panel fillet welds; 4) symmetrically welding the transverse cooling water channel 5 and side panel fillet welds on the four outer sides in sequence from the middle to both sides (the symmetrical position is first front and back and then left and right), and the length of the single-side welding weld is less than 200mm; 5) welding the butt weld of the cooling water channel 5 and the corner (R corner) weld of the cooling water channel 5 at the bend; 6) welding the inner side welds between the bottom plate 3 and the side panel, and the inner side welds between the side panel and the upper flange 4.

[0038] The specific welding parameters in step 4 are: the bottom welding current of the side plate butt weld is 110A, the voltage is 9V, the welding speed is 8cm / min, the gas flow rate is 6L / min, the welding wire is ER316L φ1.6, the tungsten electrode type size is WC-20φ2.4mm, and the bottom welding heat input is 0.53 (KJ / mm); the cover welding current of the side plate butt weld is 110A, the voltage is 9V, the welding speed is 6.5cm / min, the gas flow rate is 6L / min, the welding wire is ER316L φ2.0, the tungsten electrode type size is WC-20φ2.4mm, and the cover welding heat input is 0.63 (KJ / mm), the welding current of the intermittent weld between the bottom plate 3 and the outside of the side plate, the intermittent weld between the upper flange 4 and the outside of the side plate, the weld between the bottom plate 3 and the inside of the side plate, and the weld between the side plate and the inside of the upper flange 4 is 130A, the voltage is 10V, the welding speed is 8cm / min, the gas flow rate is 6L / min, the welding wire ER316L φ2.0 tungsten electrode type size WC-20φ2.4mm, and the welding heat input is 0.66 (KJ / mm). The welding current of the butt weld of the cooling water channel 5 and the fillet weld of the cooling water channel 5 and the side plate is 80V, the voltage is 9V, the welding speed is 6cm / min, the gas flow rate is 6L / min, the welding wire ER316L φ2.0 tungsten electrode type size WC-20φ1.6mm, and the welding heat input is 0.50 (KJ / mm). Strictly control the welding parameters, and significantly reduce the welding deformation and improve the welding quality by controlling the welding parameters.

[0039] The stainless steel cavity and support frame are stabilized and tempered together. The furnace heating rate is 98℃ / h, the parts heating temperature is 858℃, the holding time is 1.8 hours, and the cooling rate is furnace cooling. After the cavity and support frame are cooled to 298℃, the furnace is opened for cooling after inflation and the support frame is removed.

[0040] Example 2: Please refer to Figure 1-Figure 4 , a semiconductor thin-wall stainless steel cavity welding process, comprising the following steps: Step 1: Prepare the product and expand the size. By calculating the deformation trend of the cavity after welding and reserving the welding shrinkage, the side plate, bottom plate 3, and upper flange 4 of the cavity are expanded; Step 2, performing spot welding on the side plate and the bottom plate 3, the bottom plate 3 and the upper flange 4, the cooling water channel 5 and the side plate to obtain an embryonic body; Step 3, providing rigid support to the embryo obtained in step 2; Step 4, setting welding parameters, welding the side plate, bottom plate 3, upper flange 4 and cooling water channel 5 obtained in step 3 to obtain a cavity; Step 5: Perform tempering heat treatment on the cavity of step 4.

[0041] The welding shrinkage in step 1 includes the lateral shrinkage of the double-sided V-shaped groove without gap and the lateral shrinkage of the double-sided fillet weld. The lateral shrinkage of the double-sided V-shaped groove without gap is 0.7mm, and the lateral shrinkage of the double-sided fillet weld is 0.5mm. The lateral shrinkage of the 6mm double-sided V-shaped groove without gap is 0.7mm, and the lateral shrinkage of the double-sided fillet weld is 0.5mm.

[0042] The length, width and height of the upper flange 4 are each increased by 1.5mm on one side, and the length and width of the bottom plate 3 are each increased by 1.5mm on one side. When the upper flange 4 is enlarged, the length, width and height of the upper flange 4 are each increased by 1.5mm on one side, and the length and width of the bottom plate 3 are each increased by 1.5mm on one side.

[0043] Specifically, there are two side panels, namely the first side panel 1 and the second side panel 2. When spot welding, the side panel, the bottom panel 3 and the upper flange 4 are assembled using a T-shaped step structure, and the assembly steps are processed by mechanical processing. The assembly gap between the bottom panel 3, the upper flange 4 and the side panel is required to be controlled at 0.2mm, and the spot welding weld position is assembled. The spot welding length is 20mm and the spacing is 150mm. The cooling water channels 5 on the outer sides of the first side panel 1 and the second side panel 2 are assembled and spot welded according to the laser marking position. The assembly gap of the corner weld of the cooling water channel 5 is required to be 0.2mm, and the gap between the butt joint and the corner weld is required to be 0.4mm. The spot welding is required to be symmetrical spot welding, with a spot welding length of 10mm and a spacing of 50mm.

[0044] The rigid support adopts a support frame, which includes multiple support tubes. The support tubes adopt 40*40*5mm square tubes. The support frame includes a first support tube 6, a second support tube 7, a third support tube 8, and a fourth support tube 9 which are arranged in sequence along the inner upper part of the side plate. The first support tube 6 and the third support tube 8 are arranged in parallel, and the second support tube 7 and the fourth support tube 9 are arranged in parallel. A fifth support tube 10 is vertically welded between the second support tube 7 and the fourth support tube 9, a sixth support tube 11 and a seventh support tube 12 are vertically welded between the first support tube 6 and the fifth support tube 10, an eighth support tube 13 and a ninth support tube 14 are vertically welded between the third support tube 8 and the fifth support tube 10, a tenth support tube 15 is welded on the upper side of the bottom plate 3, and an eleventh support tube 16, a twelfth support tube 17 and a thirteenth support tube 18 are vertically equidistantly welded between the fifth support tube 10 and the tenth support tube 15.

[0045] The spot welding requirements for the support pipe are that the weld of the upper flange 4 is 20mm lower, the welding method of the support pipe and the side plate and bottom plate 3 is symmetrical intermittent welding, the weld length is 40mm, the spacing is 100mm, the support pipe assembly gap is 0.1mm, and the upper and lower symmetrical welds are fully welded.

[0046] The welds welded in step 4 include side panel butt welds, intermittent welds between the bottom plate 3 and the outside of the side panel, intermittent welds between the upper flange 4 and the outside of the side panel, butt welds between the cooling water channel 5, fillet welds between the cooling water channel 5 and the side panel, welds between the bottom plate 3 and the inside of the side panel, and welds between the side panel and the inside of the upper flange 4. The side panel butt welds are double-sided V-shaped grooves, intermittent welds between the bottom plate 3 and the outside of the side panel, intermittent welds between the upper flange 4 and the outside of the side panel, welds between the bottom plate 3 and the inside of the side panel, and welds between the side panel and the inside of the upper flange 4 are double-sided fillet welds. After the first side panel 1 and the second side panel 2 are welded together, they are a rectangular structure with 4 outer sides, of which 2 corners on the same side are chamfered. The welding sequence is: 1) welding the butt weld of the cavity side panel W1; 2) symmetrically welding the intermittent welds between the bottom plate 3 and the outer side of the side panel, and the intermittent welds between the upper flange 4 and the outer side of the side panel, with a length of 50mm and a spacing of 120mm; 3) cooling water channel 5 and side panel fillet welds; 4) symmetrically welding the transverse cooling water channel 5 and side panel fillet welds on the four outer sides in sequence from the middle to both sides (the symmetrical position is first front and back and then left and right), and the length of the single-side welding weld is less than 200mm; 5) welding the butt weld of the cooling water channel 5 and the corner (R corner) weld of the cooling water channel 5 at the bend; 6) welding the inner side welds between the bottom plate 3 and the side panel, and the inner side welds between the side panel and the upper flange 4.

[0047] The specific welding parameters in step 4 are: the bottom welding current of the side plate butt weld is 140A, the voltage is 15V, the welding speed is 12cm / min, the gas flow rate is 12L / min, the welding wire is ER316L φ1.6, the tungsten electrode type size is WC-20φ2.4mm, and the bottom welding heat input is 0.53 (KJ / mm). The cover current of the side plate butt weld is 140A, the voltage is 15V, the welding speed is 10.8cm / min, the gas flow rate is 12L / min, the welding wire is ER316L φ2.0, the tungsten electrode type size is WC-20φ2.4mm, and the cover welding heat input is 0.63 (KJ / mm), the welding current of the intermittent weld between the bottom plate 3 and the outside of the side plate, the intermittent weld between the upper flange 4 and the outside of the side plate, the weld between the bottom plate 3 and the inside of the side plate, and the weld between the side plate and the inside of the upper flange 4 is 170A, the voltage is 15V, the welding speed is 12cm / min, the gas flow rate is 12L / min, the welding wire ER316L φ2.0 tungsten electrode type size WC-20φ2.4mm, and the welding heat input is 0.66 (KJ / mm). The welding current of the butt weld of the cooling water channel 5 and the fillet weld of the cooling water channel 5 and the side plate is 110V, the voltage is 13V, the welding speed is 9cm / min, the gas flow rate is 12L / min, the welding wire ER316L φ2.0 tungsten electrode type size WC-20φ1.6mm, and the welding heat input is 0.50 (KJ / mm). Strictly control the welding parameters, and significantly reduce the welding deformation and improve the welding quality by controlling the welding parameters.

[0048] The stainless steel cavity and support frame are subjected to stabilized tempering heat treatment together. The furnace heating rate is 100℃ / h, the parts heating temperature is 860℃, the insulation time is 2 hours, and the cooling rate is furnace cooling. After the cavity and support frame are cooled to 300℃, the furnace is opened for cooling after inflation and the support frame is removed.

[0049] Three points are selected at random in the cavities of Example 1 and Example 2, and the dimensions of the three points are measured. The measurement results are shown in Table 1.

[0050] Table 1

[0051] As can be seen from Table 1, the dimensional change of the cavity before and after welding is within 2 mm, and the welding deformation is small, which meets the welding dimensional requirements of semiconductor equipment for parts.

[0052] The above embodiments are merely descriptions for the purpose of clearly illustrating the present invention, and are not limitations on the implementation methods. For those skilled in the art, other different forms of changes or modifications may be made based on the above descriptions. It is not necessary and impossible to enumerate all the implementation methods here, and the obvious changes or modifications derived therefrom are still within the scope of protection of the present invention.

Claims

1. A semiconductor thin-wall stainless steel cavity welding process, characterized in that , including the following steps: Step 1: Prepare the product and expand the size. By calculating the deformation trend of the cavity after welding and reserving the welding shrinkage, the side plate, bottom plate and upper flange parts of the cavity are expanded; Step 2, performing spot welding on the side plate and the bottom plate, the bottom plate and the upper flange, the cooling water channel and the side plate to obtain an embryonic body; Step 3, providing rigid support to the embryo obtained in step 2; Step 4, setting welding parameters, welding the side plate, bottom plate, upper flange and cooling water channel obtained in step 3 to obtain the cavity; Step 5: Perform tempering heat treatment on the cavity of step 4.

2. The semiconductor thin-wall stainless steel cavity welding process according to claim 1 is characterized in that: The welding shrinkage in step 1 includes the transverse shrinkage of the double-sided V-shaped groove without gap and the transverse shrinkage of the double-sided fillet weld. The transverse shrinkage of the double-sided V-shaped groove without gap is 0.5mm-0.7mm, and the transverse shrinkage of the double-sided fillet weld is 0.3mm-0.5mm.

3. The semiconductor thin-wall stainless steel cavity welding process according to claim 1 is characterized in that: In step 1, when the upper flange is enlarged, the length, width and height are each increased by 1.5mm. When the bottom plate is enlarged, the length and width are each increased by 1.5mm. When the side panel is enlarged, the length direction increases by 2-3.5mm, the width direction increases by 2-3mm, and the height direction increases by 2-2.5mm.

4. The semiconductor thin-wall stainless steel cavity welding process according to claim 1 is characterized in that: The spot welds in step 2 are 15-20mm long and 120-150mm apart.

5. The semiconductor thin-wall stainless steel cavity welding process according to claim 1, characterized in that: The rigid support adopts a support frame, which includes a plurality of support pipes.

6. The semiconductor thin-wall stainless steel cavity welding process according to claim 5, characterized in that: The welding method of the supporting tube to the side plate and the bottom plate is symmetrical intermittent welding, with a weld length of 40mm and a spacing of 100mm.

7. The semiconductor thin-wall stainless steel cavity welding process according to claim 1, characterized in that: The welds welded in step 4 include the intermittent welds between the bottom plate and the outside of the side plate, the intermittent welds between the upper flange and the outside of the side plate, the butt welds of the cooling water channel, the fillet welds of the cooling water channel and the side plate, the welds between the bottom plate and the inside of the side plate, and the welds between the side plate and the inside of the upper flange.

8. The semiconductor thin-wall stainless steel cavity welding process according to claim 1, characterized in that: The welding parameters in step 4 are as follows: the bottom welding current of the intermittent weld between the bottom plate and the outer side plate is 110-140A, the voltage is 9-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ1.6, the tungsten electrode type size is WC-20φ2.4mm, and the bottom welding heat input is 0.53 (KJ / mm); the cover current of the intermittent weld between the bottom plate and the outer side plate is 110-140A, the voltage is 9-15V, the welding speed is 6.5-10.8cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0, the tungsten electrode type size is WC-20φ2.4mm, and the cover welding heat input is 0.63 (KJ / mm); The welding current of the intermittent weld between the upper flange and the outer side of the side plate, the butt weld of the cooling water channel, the weld between the bottom plate and the inner side of the side plate, and the weld between the side plate and the inner side of the upper flange is 130-170A, the voltage is 10-15V, the welding speed is 8-12cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0, the tungsten electrode type size is WC-20φ2.4mm, and the welding heat input is 0.66 (KJ / mm); The welding current of the cooling water channel butt weld and the cooling water channel and side plate fillet weld is 80-110V, the voltage is 9-13V, the welding speed is 6-9cm / min, the gas flow rate is 6-12L / min, the welding wire is ER316L φ2.0, the tungsten electrode type size is WC-20φ1.6mm, and the welding heat input is 0.50 (KJ / mm).

9. The semiconductor thin-wall stainless steel cavity welding process according to claim 7, characterized in that: The welding sequence in step 4 is: intermittent welds between the bottom plate and the outside of the side plate, symmetrical welding of the intermittent welds between the upper flange and the outside of the side plate and the intermittent welds of the cooling water channel, welding of the W5 fillet weld of the cooling water channel on the outside of the cavity side plate, and symmetrical welding of the W5 transverse cooling water channel welds on four surfaces from the middle to both sides (the symmetrical position is first front, back, then left and right), the length of the single-side welding weld is less than 200mm, and then the vertical cooling water channel is welded in sequence as above, and finally the butt weld of the W4 cooling water channel and the weld of the transition R angle at the bend are welded.

10. The semiconductor thin-wall stainless steel cavity welding process according to claim 1, characterized in that: The stainless steel cavity and support frame are subjected to stabilized tempering heat treatment together. The furnace heating rate is 100±2℃ / h, the parts heating temperature is 860±2℃, the insulation time is 1.5-2.5 hours, and the cooling rate is furnace cooling. After the cavity and support frame are cooled to 300±2℃, they are cooled by aeration and then the furnace is opened for cooling.

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