Linear rotation actuator and wafer processing device

Abstract

The invention relates to the technical field of industrial robots, in particular to a linear rotation actuator and a wafer processing device. Comprising a rotating module, a linear motion module and a connecting piece, a rotating assembly comprises a first rotating driving piece and a rotating assembly, the outer ring of the rotating assembly is sleeved with the first rotating driving piece, the rotating assembly is in transmission connection with the first rotating driving piece, and one end of the rotating assembly is sleeved with a first bearing; the linear motion module comprises a second rotary driving part and a linear motion assembly, the second rotary driving part is arranged on the outer ring of the linear motion assembly in a sleeving mode, the linear motion assembly comprises a transmission nut and a lead screw, the transmission nut is in transmission connection with the second rotary driving part, and one end of the lead screw is sleeved with a second bearing; the connecting piece is connected with an outer ring of the first bearing and an outer ring of the second bearing, and the first bearing and the second bearing are arranged in the connecting piece in a layered mode. The problem that in the prior art, a linkage assembly of a linear rotation actuator is not high in linkage efficiency and precision is solved.

Description

Technical Field

[0001] The invention relates to the technical field of industrial robots, in particular to a linear rotary actuator and a wafer processing device. Background Art

[0002] As a result of the development of computer technology, the versatility and flexibility of industrial robots have greatly increased. Especially in the process of precision product manufacturing, such as chip manufacturing and PCB board manufacturing, the task of picking and placing small parts is usually completed by linear rotary actuators.

[0003] A linear-rotary actuator generally refers to an actuator or transmission device that integrates linear motion and rotary motion functions. This type of actuator can achieve both linear motion and rotary motion at the same time, has versatility and flexibility, and is suitable for some applications that require complex motion control. Therefore, linear-rotary actuators meet some special usage scenarios, which can meet both linear motion and rotary motion situations.

[0004] Existing linear rotary actuators usually use rotating gear transmission or synchronous belt transmission to achieve the linkage between the rotating component and the linear motion component to ensure the synchronization of the rotating motion and the linear motion. However, this linkage method has a large energy loss, resulting in low linkage efficiency and poor precision between the rotating component and the linear motion component, which cannot meet the precision requirements in wafer processing. Summary of the invention

[0005] The technical problem to be solved by the embodiments of the present invention is to provide a linear rotary actuator and a wafer processing device to solve the problem of low linkage efficiency and precision caused by the linkage components of the linear rotary actuator in the prior art.

[0006] In the first aspect, the present invention discloses a linear rotary actuator, comprising: a rotating module, a linear motion module and a connecting member, the rotating assembly comprising a first rotating driving member and a rotating assembly, the first rotating driving member being sleeved on the outer ring of the rotating assembly, the rotating assembly being transmission-connected to the first rotating driving member to drive the rotating assembly to rotate, and one end of the rotating assembly being sleeved with a first bearing; the linear motion module comprising a second rotating driving member and a linear motion assembly, the second rotating driving member being sleeved on the outer ring of the linear motion assembly, the linear motion assembly comprising a threaded transmission nut and a screw rod, the transmission nut being transmission-connected to the second rotating driving member to drive the screw rod to move linearly, and one end of the screw rod being sleeved with a second bearing; the inner ring of one end of the connecting member is connected to the outer ring of the first bearing, and the inner ring of the other end is connected to the outer ring of the second bearing, and the first bearing and the second bearing are layered in the connecting member.

[0007] Optionally, the rotating assembly includes a spline sleeve and a spline shaft, the first rotor of the first rotary driving member is fixedly connected to the spline sleeve, and the spline sleeve is sleeved on the spline shaft.

[0008] Optionally, the second rotor of the second rotary drive member is fixedly connected to the transmission nut, and a guide hole is provided on the screw rod, and a guide shaft corresponding to the guide hole is provided on the second rotary drive member.

[0009] Optionally, the first rotating driving member further includes a first magnet, a first coil and a first shell, the first coil is arranged on the outer ring of the first rotor, the first magnet is arranged around the inner wall of the first shell, and the spline sleeve is fixed to the inner ring of the first rotor.

[0010] Optionally, the second rotating driving member includes a second magnet, a second coil and a second shell, the second coil is arranged on the outer ring of the second rotor, the second magnet is arranged around the inner wall of the second shell, and the transmission nut is fixed to the inner ring of the second rotor.

[0011] Optionally, the guide shaft is connected to the second housing via a retaining frame, and the guide shaft has a movement distance greater than that of the screw rod.

[0012] Optionally, the connecting piece is a connecting sleeve.

[0013] In a second aspect, the present invention further discloses a wafer processing device, comprising the linear rotary actuator of any one of the above items.

[0014] Optionally, a wafer disk is provided at one end of the rotating assembly away from the first bearing.

[0015] Optionally, a robot for taking and placing wafers is provided at one end of the rotating assembly away from the first bearing.

[0016] Compared with the prior art, the linear rotary actuator provided by the embodiment of the present invention has the following beneficial effects: the linear rotary actuator includes a rotating module and a linear motion module, the rotating motion of the rotating module is relatively isolated from the linear motion of the linear motion module, so that the rotating motion of the rotating module does not affect the linear motion of the linear motion module, and the linear motion of the linear motion module can be transmitted to the rotating module through a connecting member, so that the linear motion module compensates for the height of the rotating plane of the rotating module, thereby realizing precise control and high-precision positioning of the linear rotary actuator, and reducing the movement error of the linear rotary actuator through compensation. The linear motion assembly in the linear motion module includes a transmission nut and a screw, a second bearing is provided at one end of the screw, a first bearing is provided at one end of the rotating assembly, and a connecting member is provided on the outer ring of the first bearing and the second bearing, so that the linear motion module can transmit the linear motion to the rotating module through the connecting member. The rotating module is provided with a first rotating drive member and a rotating assembly, the first rotating drive member is sleeved on the rotating assembly, and the first rotating drive member can drive the rotating assembly to rotate, so that the rotating module can realize its own rotational motion while being driven by the linear motion module to perform linear motion. Among them, the second rotating drive member in the linear motion module drives the transmission nut to rotate. Because of the threaded connection between the transmission nut and the screw rod, the screw rod can move linearly relative to the transmission nut, thereby converting the rotational motion of the second rotating drive member into linear motion relative to the second rotating drive member, so as to promote the rotation module to achieve axial adjustment while rotating. In this way, through the drive of the second rotating drive member, the linear motion module can compensate and offset the height of the rotation plane of the rotation module, ensuring that the linear rotary actuator remains stable and balanced during operation. The linear rotary actuator of the above structure can achieve precise motion control, and can achieve the effect of flexible movement and adjustment according to different application requirements, making the linear rotary actuator more applicable. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments, in which:

[0018] Figure 1 is a schematic diagram of a linear rotary actuator provided by an embodiment of the present invention;

[0019] Figure 2 4 is a cross-sectional schematic diagram of a linear rotary actuator provided by an embodiment of the present invention.

[0020] The reference numerals in the figures are:

[0021] 1000, linear rotary actuator; 100, rotating module; 101, rotating assembly; 1011, spline sleeve; 1012, spline shaft; 102, first bearing; 103, first rotary drive member; 1031, first magnet; 1033, first housing; 200, linear motion module; 201, linear motion assembly; 2011, transmission nut; 2012, lead screw; 20121, guide hole; 202, second bearing; 203, second rotary drive member; 2031, second magnet, 2033, second housing; 300, connecting member. DETAILED DESCRIPTION

[0022] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. Now, in conjunction with the accompanying drawings, the preferred embodiments of the present invention are described in detail.

[0023] The embodiment of the present invention provides a linear rotary actuator 1000, such as Figure 1-2 As shown, the linear rotary actuator 1000 includes: a rotating module 100, a linear motion module 200 and a connecting member 300, the rotating assembly 101 includes a first rotating driving member 103 and the rotating assembly 101, the first rotating driving member 103 is sleeved on the outer ring of the rotating assembly 101, the rotating assembly 101 is transmission-connected with the first rotating driving member 103 to drive the rotating assembly 101 to rotate, and one end of the rotating assembly 101 is sleeved with a first bearing 102; the linear motion module 200 includes a second rotating driving member 203 and the linear motion assembly 201, the second The rotary drive member 203 is sleeved on the outer ring of the linear motion component 201. The linear motion component 201 includes a threaded transmission nut 2011 and a screw rod 2012. The transmission nut 2011 is transmission-connected to the second rotary drive member 203 to drive the screw rod 2012 to move linearly. One end of the screw rod 2012 is sleeved with a second bearing 202. The inner ring of one end of the connecting member 300 is connected to the outer ring of the first bearing 102, and the inner ring of the other end is connected to the outer ring of the second bearing 202. The first bearing 102 and the second bearing 202 are layered in the connecting member 300.

[0024] The linear rotary actuator 1000 includes a rotating module 100 and a linear motion module 200. The rotational motion of the rotating module 100 is relatively isolated from the linear motion of the linear motion module 200, so that the rotational motion of the rotating module 100 will not affect the linear motion of the linear motion module 200. The linear motion of the linear motion module 200 can be transmitted to the rotating module 100 through the connecting member, so that the linear motion module 200 compensates for the height of the rotating plane of the rotating module 100, thereby realizing precise control and high-precision positioning of the linear rotary actuator 1000, and reducing the movement error of the linear rotary actuator 1000 through compensation. The linear motion assembly 201 in the linear motion module 200 includes a transmission nut 2011 and a screw 2012. A second bearing 202 is provided at one end of the screw 2012. A first bearing 102 is provided at one end of the rotating assembly 101. A connecting member 300 is provided on the outer rings of the first bearing 102 and the second bearing 202, so that the linear motion module 200 can transmit the linear motion to the rotating module 100 through the connecting member 300. The rotating module 100 is provided with a first rotating driving member 103 and a rotating assembly 101. The first rotating driving member 103 is sleeved on the rotating assembly 101, and the first rotating driving member 103 can drive the rotating assembly 101 to rotate, so that the rotating module 100 can realize its own rotational motion while being driven by the linear motion module 200 to perform linear motion. Among them, the second rotary drive member 203 in the linear motion module 200 drives the transmission nut 2011 to rotate. Because of the threaded connection between the transmission nut 2011 and the screw rod 2012, the screw rod 2012 can move linearly relative to the transmission nut 2011, thereby converting the rotational motion of the second rotary drive member 203 into linear motion relative to the second rotary drive member 203, so as to promote the rotation module 100 to achieve axial adjustment while rotating. In this way, through the drive of the second rotary drive member 203, the linear motion module 200 can compensate and offset the height of the rotation plane of the rotation module 100, ensuring that the linear rotary actuator 1000 remains stable and balanced during operation. The linear rotary actuator 1000 of the above structure can achieve precise motion control, and can achieve the effect of flexible movement and adjustment according to different application requirements, so that the linear rotary actuator 1000 has better applicability.

[0025] Specifically, the linear motion assembly 201 includes a transmission nut 2011 and a screw rod 2012, and the transmission nut 2011 is threadedly connected to the screw rod 2012. Therefore, when the second rotary drive member 203 drives the transmission nut 2011 to rotate, the screw rod 2012 can move linearly relative to the transmission nut 2011, thereby converting the rotational motion of the second rotary drive member 203 into linear movement of the screw rod 2012, thereby offsetting and compensating the height of the rotation plane of the overall linear rotary actuator 1000, thereby ensuring the balance and stability of the linear rotary actuator 1000 during operation.

[0026] It is easy to understand that the linear motion module 200 and the rotation module 100 are compactly installed together through the connector 300, which can reduce the overall volume of the linear rotary actuator 1000 and is suitable for scenarios with limited space.

[0027] Further, refer to Figure 1 and Figure 2 The rotating module 100 is disposed on the top of the linear motion module 200 .

[0028] Placing the rotating module 100 on top of the linear motion module 200 can save space for the linear rotary actuator 1000, make the overall design more compact, and improve the applicability of the linear rotary actuator 1000. By placing the rotating module 100 on top of the linear motion module 200, multi-axis motion control can be achieved, so that the linear motion module 200 transmits the linear motion to the rotating module 100 through the second bearing 202, the connecting member 300 and the first bearing 102, so that the entire linear rotary actuator 1000 can perform linear motion. At the same time, the linear motion module 200 arranged at the bottom can make the screw rod 2012 perform linear sliding motion relative to the second rotary drive member 203 due to the rotation of the second rotary drive member 203, so as to compensate and offset the height of the rotation plane of the linear rotary actuator 1000.

[0029] Specifically, the rotating module 100 is arranged on the top of the linear motion module 200, and through the first bearing 102 on the rotating component 101, the second bearing 202 on the linear motion component 201, and the connecting piece 300 arranged on the outer ring of the first bearing 102 and the second bearing 202, the rotating module 100 and the linear motion module 200 are kept in linkage, so that the linear rotary actuator 1000 with this structure can smoothly transmit force and motion, and also play a role in stabilizing the whole.

[0030] Specifically, the integration of the rotating module 100 and the linear motion module 200 can simplify the structure of the linear rotary actuator 1000 , reduce the complexity of the linear rotary actuator 1000 , and improve the convenience of operation of the linear rotary actuator 1000 .

[0031] Furthermore, the connecting piece 300 is a connecting sleeve.

[0032] The connecting member 300 is a connecting sleeve, which can play a certain sealing effect to ensure that the first bearing 102 and the second bearing 202 in the connecting sleeve are less likely to be disturbed and affected by the external environment. The connecting sleeve can improve the strength and stability of the connection between the rotating module 100 and the linear motion module 200, so that the motion transmission of the linear rotary actuator 1000 can proceed smoothly.

[0033] refer to Figure 1 and Figure 2 The rotating assembly 101 includes a spline sleeve 1011 and a spline shaft 1012 . The first rotor of the first rotating driving member 103 is fixedly connected to the spline sleeve 1011 , and the spline sleeve 1011 is sleeved on the spline shaft 1012 .

[0034] A first rotor is provided in the first rotating driving member 103, and the first rotor is fixedly connected to the spline sleeve 1011. The spline sleeve 1011 is slidably connected to the spline shaft 1012, so that when the first rotating driving member 103 drives the spline sleeve 1011 to rotate, the spline shaft 1012 can be driven to rotate, thereby achieving the effect of the spline shaft 1012 rotating movement.

[0035] It should be noted that the spline shaft 1012 and the spline sleeve 1011 are slidably connected via a keyway, so the spline shaft 1012 can rotate along with the spline sleeve 1011 when the spline sleeve 1011 rotates, and the spline shaft 1012 can slide relative to the spline sleeve 1011.

[0036] Among them, the spline connection is a commonly used transmission method, which can provide higher transmission efficiency, reduce energy loss, and help improve the energy efficiency of the linear rotary actuator 1000. The rotational connection between the spline sleeve 1011 and the spline shaft 1012 can effectively transmit torque and rotational force, improve the transmission stability of the linear rotary actuator 1000, and help maintain the accuracy and stability of the movement.

[0037] refer to Figure 1 and Figure 2 The second rotor of the second rotating driving member 203 is fixedly connected to the driving nut 2011 , and a guide hole 20121 is provided on the screw rod 2012 , and a guide shaft corresponding to the guide hole 20121 is provided on the second rotating driving member 203 .

[0038] A second rotor is provided in the second rotary driving member 203, and the second rotor is fixedly connected to the transmission nut 2011, and the transmission nut 2011 is threadedly connected to the screw rod 2012, so that when the transmission nut 2011 rotates, the screw rod 2012 can move linearly relative to the transmission nut 2011 to convert the rotational motion into linear motion, thereby achieving the offset and compensation of the height of the rotation plane of the overall linear rotary actuator 1000, so as to ensure the balance and stability of the linear rotary actuator 1000 during operation.

[0039] Specifically, in the present embodiment, there is a certain friction force between the screw rod 2012 and the transmission nut 2011, so in order to prevent the screw rod 2012 from rotating synchronously with the transmission nut 2011 when the second rotary drive member 203 drives the transmission nut 2011 to rotate, the screw rod 2012 needs to be fixed so that the screw rod 2012 can only move linearly in the vertical direction due to the rotation of the transmission nut 2011. Therefore, a guide shaft is provided at the fixed part of the second rotary drive member 203, and a guide hole 20121 is provided at the inner ring of the screw rod 2012, and the guide shaft is slidably connected with the guide hole 20121. Therefore, when the transmission nut 2011 rotates, the screw rod 2012 will not rotate with the transmission nut 2011 due to the limit of the guide shaft, thereby realizing the linear movement of the screw rod 2012. It should be noted that, in the present embodiment, the guide shaft and the guide hole 20121 can only slide relative to each other, and cannot rotate relative to each other.

[0040] refer to Figure 1 and Figure 2 The first rotating driving member 103 further includes a first magnetic steel 1031, a first coil and a first shell 1033. The first coil is arranged on the outer ring of the first rotor, the first magnetic steel 1031 is arranged around the inner wall of the first shell 1033, and the spline sleeve 1011 is fixed to the inner ring of the first rotor.

[0041] The fixed connection between the first rotor and the spline sleeve 1011 can provide stable support and fixation, ensuring the stability and reliability of the first rotary drive member 103. The first coil is arranged on the outer ring of the first rotor, and the first magnetic steel 1031 is arranged around the inner wall of the first housing 1033 to realize the normal rotation movement function of the first rotary drive member 103.

[0042] The first housing 1033 can protect the internal structure of the first rotary drive member 103 , which helps to improve the reliability of the linear rotary actuator 1000 , reduce the possibility of failure, and extend the service life of the linear rotary actuator 1000 .

[0043] The fixed connection between the first rotor and the spline sleeve 1011 can ensure that when the first rotary drive member 103 drives the spline shaft 1012 to rotate, the spline sleeve 1011 and the first rotor remain relatively fixed, thereby ensuring the accuracy and stability of the linear rotary actuator 1000.

[0044] refer to Figure 1 and Figure 2 The second rotating driving member 203 includes a second magnetic steel 2031, a second coil and a second shell 2033. The second coil is arranged on the outer ring of the second rotor. The second magnetic steel 2031 is arranged around the inner wall of the second shell 2033. The transmission nut 2011 is fixed to the inner ring of the second rotor.

[0045] The fixed connection between the second rotor and the transmission nut 2011 can provide stable support and fixation for the rotating module 100, ensuring the stability and reliability of the second rotating drive member 203. The second housing 2033 provides a certain support and protection effect for the second rotating drive member 203, ensuring the stability of the linear motion module 200.

[0046] The fixed connection between the rotor and the transmission nut 2011 can ensure that when the second rotary drive member 203 drives the transmission nut 2011 to rotate, the transmission nut 2011 and the second rotor remain relatively fixed, thereby ensuring the accuracy and stability of the linear rotary actuator 1000.

[0047] refer to Figure 1 and Figure 2 The guide shaft is connected to the second housing 2033 through a retaining frame, and the length of the guide shaft is greater than the moving distance of the screw rod 2012.

[0048] A holder is provided outside the linear rotary actuator 1000 to ensure the stability and normal operation of the linear rotary actuator 1000. The holder needs to fix the first rotary drive member 103 and the second rotary drive member 203, so the guide shaft on the second rotary drive member 203 for sliding connection with the guide hole 20121 of the screw rod 2012 is provided on the holder.

[0049] Among them, the length of the guide shaft is greater than the moving distance of the screw rod 2012. The guide shaft needs to limit the rotation of the screw rod 2012, so the length of the guide shaft should be greater than the moving distance of the screw rod 2012 to ensure that the screw rod 2012 can be limited by the guide shaft at all times when moving in the vertical direction.

[0050] An embodiment of the present invention further provides a wafer processing device, which includes the linear rotary actuator 1000 in the above embodiment.

[0051] The wafer processing device includes the same structure and beneficial effects as the linear rotary actuator 1000 in the aforementioned embodiment. The structure and beneficial effects of the linear rotary actuator 1000 have been described in detail in the aforementioned embodiment and will not be repeated here.

[0052] Furthermore, a wafer disk is disposed at one end of the rotating assembly 101 away from the first bearing 102 , or a robot for taking and placing wafers is disposed at one end of the rotating assembly 101 away from the first bearing 102 .

[0053] The end of the rotating assembly 101 away from the first bearing 102 can be used to connect the wafer disk, so that the wafer disk can achieve linear motion and rotational motion. Or a robot is set at the end of the rotating assembly 101 away from the first bearing 102, and the robot is used to take and place the wafer in the wafer processing device, so that the robot can achieve linear motion and rotational motion.

[0054] It should be understood that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. For those skilled in the art, the technical solutions described in the above embodiments can be modified, or some of the technical features therein can be replaced by equivalents; and all these modifications and replacements should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A linear rotary actuator, characterized in that: include: A rotating module, wherein the rotating assembly comprises a first rotating driving member and a rotating assembly, wherein the first rotating driving member is sleeved on an outer ring of the rotating assembly, the rotating assembly is transmission-connected with the first rotating driving member to drive the rotating assembly to rotate, and a first bearing is sleeved on one end of the rotating assembly; A linear motion module, the linear motion module comprising a second rotary drive member and a linear motion assembly, the second rotary drive member being sleeved on an outer ring of the linear motion assembly, the linear motion assembly comprising a threaded transmission nut and a lead screw, the transmission nut being transmission-connected to the second rotary drive member to drive the lead screw to move linearly, one end of the lead screw being sleeved with a second bearing; A connecting piece, wherein the inner ring at one end of the connecting piece is connected to the outer ring of the first bearing, and the inner ring at the other end of the connecting piece is connected to the outer ring of the second bearing, and the first bearing and the second bearing are arranged in layers in the connecting piece.

2. The linear rotary actuator according to claim 1, characterized in that: The rotating assembly includes a spline sleeve and a spline shaft. The first rotor of the first rotating driving member is fixedly connected to the spline sleeve, and the spline sleeve is sleeved on the spline shaft.

3. The linear rotary actuator according to claim 2, characterized in that: The second rotor of the second rotary driving member is fixedly connected to the driving nut, and a guide hole is provided on the screw rod, and a guide shaft corresponding to the guide hole is provided on the second rotary driving member.

4. The linear rotary actuator according to claim 3, characterized in that: The first rotating driving member further includes a first magnetic steel, a first coil and a first shell. The first coil is arranged on the outer ring of the first rotor. The first magnetic steel is arranged around the inner wall of the first shell. The spline sleeve is fixed to the inner ring of the first rotor.

5. The linear rotary actuator according to claim 3, characterized in that: The second rotating driving member includes a second magnetic steel, a second coil and a second shell. The second coil is arranged on the outer ring of the second rotor. The second magnetic steel is arranged around the inner wall of the second shell. The transmission nut is fixed to the inner ring of the second rotor.

6. The linear rotary actuator according to claim 1, characterized in that: The guide shaft is connected to the second housing through a retaining frame, and the guide shaft has a movement distance greater than that of the lead screw.

7. The linear rotary actuator according to claim 3, characterized in that: The connecting piece is a connecting sleeve.

8. A wafer processing device, characterized in that: A linear rotary actuator comprising any one of claims 1-7.

9. The linear rotary actuator according to claim 8, characterized in that: A wafer disk is disposed at one end of the rotating assembly away from the first bearing.

10. The linear-rotary actuator according to claim 8, characterized in that: A robot for taking and placing wafers is arranged at one end of the rotating assembly away from the first bearing.

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