A method and device for measuring and adjusting a multi-station swing arm nozzle mechanism

Abstract

The present invention discloses a method for measuring and adjusting a multi-station swing arm nozzle mechanism, relates to the technical field of force measurement of semiconductor sorting nozzles, and discloses a device for implementing a method for measuring and adjusting a multi-station swing arm nozzle mechanism, wherein a method for measuring and adjusting a multi-station swing arm nozzle mechanism includes the following steps: measuring the first nozzle, adjusting the second screw and the second nut to meet the requirements; collecting data and obtaining the nozzle thrust when the second screw and the swing arm are separated by calculation, adjusting the first screw and the first nut to meet the requirements; using a camera to observe the center coordinates of the first nozzle, and adjusting the nozzle position to make the center coordinates meet the requirements. The method for measuring and adjusting a multi-station swing arm nozzle mechanism of the present invention can reduce the differences between the various swing arm nozzle components in the multi-station swing arm nozzle mechanism, and ensure stable sorting quality.

Description

Technical Field

[0001] The present invention relates to the technical field of force measurement of semiconductor sorting nozzles, and in particular to a method and device for measuring and adjusting a multi-station swing arm nozzle mechanism. Background Art

[0002] On semiconductor sorting equipment, the sorting machine uses a swing arm nozzle mechanism to transfer wafer core particles during the sorting process. In order to increase the transfer speed of wafer core particles, a multi-station swing arm nozzle mechanism is used for operation.

[0003] In the related art, a multi-station swing arm nozzle mechanism includes a base, at least two swing arm nozzle assemblies equidistantly arranged along the central circumference of the base, the swing arm nozzle assembly includes a swing arm and a nozzle, the swing arm is arranged upright, the bottom end of the swing arm is connected to the base through a spring sheet, the nozzle is installed at the top end of the swing arm, a spring is arranged between the swing arm and the base, the spring is used to drive the swing arm to swing in a direction away from the base, a first screw and a first nut are also arranged on the base, the first screw and the first nut cooperate to adjust the elastic force of the spring, a second screw and a second nut are also arranged between the swing arm and the base, the second screw and the second nut are located below the spring, the second screw is used to limit the maximum swing position of the swing arm in a direction away from the base, and the second nut is used to adjust the limit position of the swing arm by the second screw.

[0004] When the nozzle is sucking the wafer core, the wafer core exerts a force on the nozzle, which also drives the nozzle to move in the opposite direction, so that the swing arm and the second screw are separated. The nozzle thrust P when the second screw and the swing arm are separated is the combined force of the spring and the spring. Since the spring is in a free state vertically, the force is the smallest when it is vertical, and the proportion of the spring force in the thrust P is also small (unless the spring is deformed), so the size and range of the thrust P can be adjusted by adjusting the spring.

[0005] However, there are differences in design, processing and assembly of the various swing arm nozzle components of the multi-station swing arm nozzle mechanism, resulting in differences in the thrust of the nozzles of each swing arm nozzle component as well as the height, left and right and symmetry of the nozzles, which will affect the sorting quality. Summary of the invention

[0006] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a method for measuring and adjusting a multi-station swing arm suction nozzle mechanism, which can measure and adjust the thrust of the suction nozzle and the height, left and right and symmetry of the suction nozzle in advance, reduce the difference between the various swing arm suction nozzle components in the multi-station swing arm suction nozzle mechanism, and ensure stable sorting quality.

[0007] The present invention also proposes a device for implementing the above-mentioned method for measuring and adjusting the multi-station swing arm suction nozzle mechanism.

[0008] A method for measuring and adjusting a multi-station swing arm nozzle mechanism according to a first aspect of an embodiment of the present invention comprises the following steps:

[0009] Install the standard swing arm on the measuring station and measure the standard swing arm to define the nozzle center coordinates ;

[0010] Install the multi-station swing arm nozzle mechanism to be measured and adjusted on the measuring station, and use the displacement sensor to measure the first nozzle , adjust the second screw and the second nut to make meet the requirements;

[0011] Use the first motor to drive the pressure sensor to approach the nozzle and squeeze the nozzle, collect data and calculate the nozzle thrust when the second screw and the swing arm are separated. , adjust the first screw and the first nut so that meet the requirements;

[0012] Rotate the multi-station swing arm nozzle mechanism to measure and adjust other nozzles in turn. and ;

[0013] Use the camera to observe the center coordinates of the first nozzle , adjust the nozzle position so that the center coordinates meet the requirements;

[0014] Rotate the multi-station swing arm nozzle mechanism to measure and adjust the center coordinates of other nozzles in turn .

[0015] A method for measuring and adjusting a multi-station swing arm nozzle mechanism according to an embodiment of the present invention has at least the following beneficial effects:

[0016] 1. The present invention installs the standard swing arm on the measuring station before measuring the multi-station swing arm mechanism, and measures the standard swing arm to define the center coordinates of the nozzle. Therefore, it is convenient to provide qualified standards for the subsequent measurement data of the multi-station swing arm mechanism, and further, it is convenient to judge whether the measurement data of the multi-station swing arm mechanism is qualified, so as to adjust the multi-station swing arm mechanism according to the judgment result.

[0017] 2. The present invention uses a displacement sensor to measure the suction nozzle of the multi-station swing arm suction nozzle mechanism. , then and Compare and judge the nozzle of the multi-station swing arm nozzle mechanism If it is not qualified, adjust the second screw and the second nut and repeat the measurement of the nozzle of the multi-station swing arm nozzle mechanism. , until Meet the requirements, thereby ensuring the nozzles of each swing arm nozzle assembly of the multi-station swing arm nozzle mechanism The symmetry of the swing arm nozzle assembly is reduced. to ensure stable sorting quality.

[0018] 3. The present invention uses the first motor to drive the pressure sensor to approach the nozzle and squeeze the nozzle, and then collects data and calculates the nozzle thrust when the second screw and the swing arm are separated. ,like If it is unqualified, adjust the first screw and the first nut, and then repeat the data collection and calculate the nozzle thrust when the second screw and the swing arm are separated. , until Meet the requirements, so as to facilitate the measurement and adjustment of the nozzle thrust of each swing arm nozzle assembly of the multi-station swing arm nozzle mechanism , thereby reducing the suction nozzle thrust of each swing arm suction nozzle assembly in the multi-station swing arm suction nozzle mechanism to ensure stable sorting quality.

[0019] 4. The present invention uses a camera to observe the center coordinates of the nozzle , so that the center coordinates of the nozzle are measured With predefined standard swing arms Compare and then adjust the center coordinates of the nozzle by adjusting the screws that fix the spring Position, thus, the center coordinate of the nozzle The position meets the requirements, thereby reducing the nozzle center coordinates of each swing arm nozzle assembly in the multi-station swing arm nozzle mechanism to ensure stable sorting quality.

[0020] 5. The present invention measures and adjusts the thrust of the suction nozzle and the height, left and right and symmetry of the suction nozzle in advance, thereby reducing the difference between each swing arm suction nozzle assembly in the multi-station swing arm suction nozzle mechanism and ensuring stable sorting quality. At the same time, it solves the problem that the multi-station swing arm suction nozzle mechanism is difficult to adjust on the sorting machine, which is beneficial to improving the overall adjustment efficiency of the sorting machine.

[0021] According to some embodiments of the present invention, the first motor is used to drive the pressure sensor to approach the nozzle and squeeze the nozzle, collect data and obtain the nozzle thrust when the second screw and the swing arm are separated by calculation. , including the following steps:

[0022] Data collection steps: Set a starting force value as the data collection start judgment value. The first motor drives the pressure sensor to approach the nozzle and squeeze the nozzle. When the pressure measured by the pressure sensor is greater than the data collection start judgment value, start recording the nozzle displacement data. Measuring force with pressure sensors , and obtain a series of , Data and plot Curve, build Curve formula ,in, is the slope, is the nozzle displacement error before and after the second screw and the swing arm are separated. and Different, thus, the curve before the second screw and the swing arm are separated is obtained The formula is , the curve after the second screw and the swing arm are separated The formula is .

[0023] According to some embodiments of the present invention, the first motor is used to drive the pressure sensor to approach the nozzle and squeeze the nozzle, collect data and obtain the nozzle thrust when the second screw and the swing arm are separated by calculation. , including the following steps:

[0024] Data processing steps: From Set 2 segmented line segments in the curve , , the number of sampling points contained in the segmented line is , two segmented line segments are set as one group, and the number of groups is the same as the sampling points. , the count within the group is , for any point of The number of samples included is , The number of samples included is ;

[0025] calculate Pointed The slope for:

[0026] ,in, for Within group The average value of , for Within group The average value of ;

[0027] calculate Pointed The slope for:

[0028] ,in, for Within group The average value of , for Within group The average value of ;

[0029] calculate and The slope difference for: ;

[0030] When the slope difference is maximum, The measured value of the pressure sensor corresponding to the point is the nozzle thrust when the second screw and the swing arm are separated. .

[0031] According to some embodiments of the present invention, the first motor is used to drive the pressure sensor to approach the nozzle and squeeze the nozzle, collect data and obtain the nozzle thrust when the second screw and the swing arm are separated by calculation. , including the following steps:

[0032] Sampling end judgment steps: According to the product's characteristic parameters and actual measurement and , by judging and Is it in or Range and In which interval, To set the tolerance range, and All in When the curve is sampled Curve and After the inflection point of the curve Point, sampled by curve Curve and After the inflection point of the curve Point is the end point of the test sampling.

[0033] According to some embodiments of the present invention, the first motor is used to drive the pressure sensor to approach the nozzle and squeeze the nozzle, collect data and obtain the nozzle thrust when the second screw and the swing arm are separated by calculation. , including the following steps:

[0034] Sampling end judgment steps: According to the product characteristic parameters and actual measurement and , by judging and Is it in or Range and In which interval, To set the tolerance range, and All in When the curve is sampled Curve and After the inflection point of the curve Point, sampled by curve Curve and After the inflection point of the curve Point is the end point of the test sampling, where .

[0035] According to some embodiments of the present invention, the measuring standard swing arm is used to define the center coordinates of the nozzle. , including the following steps:

[0036] Use a displacement sensor to detect the distance between the displacement sensor and the standard swing arm ,by Definition instead , use the camera to move the center coordinates of the nozzle of the standard swing arm Mark it.

[0037] According to some embodiments of the present invention, the displacement sensor measures the distance between the displacement sensor and the nozzle. To judge Whether the requirements are met.

[0038] According to some embodiments of the present invention, the camera observes the center coordinates of the nozzle of the multi-station swing arm nozzle mechanism to be measured and adjusted by photographing. , the center coordinates of the nozzle of the multi-station swing arm nozzle mechanism to be measured and adjusted The center coordinates of the nozzle of the standard swing arm with the record mark Compare to determine the center coordinates of the nozzle of the multi-station swing arm nozzle mechanism to be measured and adjusted Whether the requirements are met.

[0039] A multi-station swing arm nozzle mechanism measuring and adjusting device according to the second aspect of the present invention is used to implement a multi-station swing arm nozzle mechanism measuring and adjusting device method according to the first aspect of the present invention, and the multi-station swing arm nozzle mechanism measuring and adjusting device comprises:

[0040] The clamping mechanism comprises a frame, a clamping seat and a rotating motor, wherein the clamping seat is used to clamp and fix the multi-station swing arm nozzle mechanism, and the rotating motor is fixed on the frame, and the rotating motor is used to drive the clamping seat to rotate;

[0041] A displacement measuring mechanism, comprising a displacement sensor, wherein the displacement sensor is used to measure the position of the suction nozzle;

[0042] The force measuring mechanism comprises a pressure sensor and a first motor driving the pressure sensor to approach and move away from the nozzle, wherein the pressure sensor is used to squeeze the nozzle and measure the thrust of the nozzle;

[0043] The image measuring mechanism includes a camera, wherein the camera is used to measure the center coordinates of the nozzle. ;

[0044] The data processing module is used to collect data from the displacement sensor, the pressure sensor and the camera and perform calculation processing.

[0045] A multi-station swing arm nozzle mechanism measuring and adjusting device according to an embodiment of the present invention has at least the following beneficial effects:

[0046] 1. The present invention can accurately measure the thrust of the nozzle when the limit screw and the swing arm are separated by arranging a clamping mechanism, a displacement measuring mechanism, a force measuring mechanism, an image measuring mechanism and a data processing module, and can measure and adjust the thrust of the nozzle and the height, left and right and symmetry of the nozzle in advance, thereby reducing the difference between each swing arm nozzle assembly in the multi-station swing arm nozzle mechanism and ensuring stable sorting quality. At the same time, the multi-station swing arm nozzle mechanism is adjusted on the device, which can reduce the difficulty of adjusting the multi-station swing arm nozzle mechanism on the sorting machine, or the multi-station swing arm nozzle mechanism does not need to be adjusted on the sorting machine, which is beneficial to improving the adjustment efficiency of the whole sorting machine.

[0047] According to some embodiments of the present invention, the displacement measuring mechanism further comprises a first three-dimensional seat, the first three-dimensional seat comprising a first translation seat, a second translation seat and a first lifting seat, the first translation seat being slidably arranged on the frame along one of an X direction and a Y direction, the second translation seat being slidably arranged on the first translation seat along the other of the X direction and the Y direction, the first lifting seat being slidably arranged on the second translation seat up and down, and the displacement sensor being mounted on the first lifting seat.

[0048] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0050] Figure 1 This is a schematic structural diagram of a multi-station swing arm nozzle mechanism according to an embodiment of the present invention;

[0051] Figure 2 A multi-station swing arm nozzle mechanism according to an embodiment of the present invention Schematic diagram of size symmetry;

[0052] Figure 3 A multi-station swing arm nozzle mechanism according to an embodiment of the present invention and Schematic diagram of size symmetry;

[0053] Figure 4 A schematic diagram of the force of a suction nozzle of a multi-station swing arm suction nozzle mechanism in an unstressed state according to an embodiment of the present invention;

[0054] Figure 5 It is a schematic diagram of the force on the suction nozzle of a multi-station swing arm suction nozzle mechanism in an embodiment of the present invention when the suction nozzle is in a force-bearing state and before the swing arm is separated from the second screw;

[0055] Figure 6 It is a schematic diagram of the force after the swing arm is separated from the second screw when the nozzle of a multi-station swing arm nozzle mechanism is in a force-bearing state according to an embodiment of the present invention;

[0056] Figure 7 A multi-station swing arm nozzle mechanism according to an embodiment of the present invention Schematic diagram of the curve;

[0057] Figure 8 A flow chart of a method for measuring and adjusting a multi-station swing arm nozzle mechanism according to an embodiment of the present invention;

[0058] Fig. 9 For the embodiment of the present invention Set 2 segmented line segments in the curve , Schematic diagram of ; where Fig. 9 (a) in the equation is , Distributed in Schematic diagram of the curve; Fig. 9 (b) in the equation is , Distributed in , Schematic diagram of the curve; Fig. 9 (c) in the equation is , Distributed in Schematic diagram of the curve;

[0059] Fig.10 It is a structural schematic diagram of a multi-station swing arm nozzle mechanism measuring and adjusting device according to an embodiment of the present invention;

[0060] Fig.11 for Fig.10 A schematic diagram of the structure of the first three-dimensional seat is shown.

[0061] Reference numerals: 100-base, 110-swing arm, 120-nozzle, 130-spring, 140-spring, 150-first screw, 160-first nut, 170-second screw, 180-second nut, 190-clamping mechanism, 200-frame, 210-clamping seat, 220-rotating motor, 230-displacement measuring mechanism, 240-displacement sensor, 250-first three-dimensional seat, 260-first translation seat, 270-second translation seat, 280-first lifting seat, 290-first adjusting component, 300-first spring, 310-first screw, 320-second adjusting component, 330-second spring, 340-second screw, 350-third adjusting component, 360-third spring, 370-third screw, 380-force measuring mechanism, 390-pressure sensor, 400-first motor, 410-position adjusting component, 420-sliding seat, 430-image measuring mechanism, 440-camera, 450-second three-dimensional seat, 460-backlight source. DETAILED DESCRIPTION

[0062] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0063] In the description of the present invention, it is necessary to understand that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0064] In the description of the present invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of first and second, this is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0065] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation, connection and connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0066] The following is combined with Figure 1-Figure 11 A method and device for measuring and adjusting a multi-station swing arm nozzle mechanism according to an embodiment of the present invention is described.

[0067] The present invention aims to provide an embodiment of a method and device for measuring and adjusting a multi-station swing arm suction nozzle mechanism.

[0068] Example 1

[0069] This embodiment provides a method for measuring and adjusting a multi-station swing arm suction nozzle mechanism.

[0070] Reference Figure 1 , Figure 2 and Figure 3For the multi-station swing arm suction nozzle mechanism, the multi-station swing arm suction nozzle mechanism includes a base 100, at least two swing arm suction nozzle assemblies equidistantly arranged along the central circumference of the base 100, the swing arm suction nozzle assembly includes a swing arm 110 and a suction nozzle 120, the swing arm 110 is vertically arranged, the bottom end of the swing arm 110 is connected to the base 100 through a spring 130, the suction nozzle 120 is installed at the top of the swing arm 110, a spring 140 is arranged between the swing arm 110 and the base 100, the spring 140 is used to drive the swing arm 110 to swing away from the base 100, and the base 100 is also provided with a first screw 15 0 and the first nut 160, the first screw 150 and the first nut 160 cooperate to adjust the elastic force of the spring 140, and a second screw 170 and a second nut 180 are also arranged between the swing arm 110 and the base 100, the second screw 170 and the second nut 180 are located below the spring 140, and the second screw 170 is used to limit the maximum swing position of the swing arm 110 in the direction away from the base 100, and the second nut 180 is used to adjust the limiting position of the second screw 170 on the swing arm 110, thereby adjusting the symmetry of the nozzles 120 of each swing arm nozzle assembly of the multi-station swing arm nozzle mechanism.

[0071] The spring piece 130 is fixedly connected to the swing arm 110 and the base 100 by screws. The height and left and right position of the suction nozzle 120 can be adjusted by adjusting the screws, so that the suction nozzles 120 of each swing arm suction nozzle assembly of the multi-station swing arm suction nozzle mechanism meet the consistency of height and left and right position.

[0072] When the nozzle 120 is sucking the wafer core, the wafer core exerts a force on the nozzle 120, which also drives the nozzle 120 to move in the opposite direction, so that the swing arm 110 and the second screw 170 are separated. The thrust P of the nozzle 120 when the second screw 170 and the swing arm 110 are separated is the resultant force of the spring 130 and the spring 140. Since the spring 130 is in a free state in a vertical position, the force is the smallest when it is vertical, and the proportion of the force of the spring 130 in the thrust P is also small, so the size and range of the thrust P can be adjusted by adjusting the spring 140.

[0073] For the force analysis of the swing arm nozzle assembly, three equilibrium formulas can be obtained:

[0074] Reference Figure 4 , when the nozzle 120 is not under force, the force balance formula can be obtained: .

[0075] Reference Figure 5 , when the suction nozzle 120 is under force, before the swing arm 110 is separated from the second screw 170, the force balance formula can be obtained: .

[0076] Reference Figure 6, when the suction nozzle 120 is under force, after the swing arm 110 is separated from the second screw 170, the force balance formula can be obtained: .

[0077] Reference Figure 7 , before and after the swing arm 110 and the second screw 170 are separated, the displacement of the suction nozzle 120 is different. Before the swing arm 110 and the second screw 170 are separated, the swing arm 110 rotates around the limit point of the second screw 170, and the limit point does not move. After the swing arm 110 and the second screw 170 are separated, the swing arm 110 rotates around the position of the spring 130. According to the linear elastic characteristics, the force P and the displacement (deflection) of the suction nozzle 120 can be constructed into an equation: ,in, is the slope, is the displacement error of the suction nozzle 120. Before and after the second screw 170 and the swing arm 110 are separated, and Different, thus, the curve before the second screw 170 and the swing arm 110 are separated is obtained. The formula is , the curve after the second screw 170 and the swing arm 110 are separated The formula is .

[0078] Reference Figure 8 , a method for measuring and adjusting a multi-station swing arm nozzle mechanism according to an embodiment of the present invention comprises the following steps:

[0079] S100: Install the standard swing arm 110 on the measuring station and measure the standard swing arm 110 to define the center coordinates of the suction nozzle 120 .

[0080] In this embodiment, the standard swing arm 110 is installed on the measuring station before measuring the multi-station swing arm 110 mechanism, and the standard swing arm 110 is measured to define the center coordinates of the nozzle 120. Therefore, it is convenient to provide a qualified standard for the subsequent measurement data of the multi-station swing arm 110 mechanism, and further, it is convenient to judge whether the measurement data of the multi-station swing arm 110 mechanism is qualified, so as to adjust the multi-station swing arm 110 mechanism according to the judgment result.

[0081] S200: Install the multi-station swing arm nozzle mechanism to be measured and adjusted on the measuring station, and use the displacement sensor 240 to measure the first nozzle 120 , adjust the second screw 170 and the second nut 180 so that Meet the requirements.

[0082] In this embodiment, the displacement sensor 240 is used to measure the displacement of the nozzle 120 of the multi-station swing arm nozzle mechanism. , then and Compare and judge the nozzle 120 of the multi-station swing arm nozzle mechanism If it is unqualified, adjust the second screw 170 and the second nut 180, and then repeat the measurement of the nozzle 120 of the multi-station swing arm nozzle mechanism. , until Meet the requirements, thereby ensuring that the nozzles 120 of each swing arm nozzle assembly of the multi-station swing arm nozzle mechanism The symmetry of the swing arm nozzle assembly is reduced. to ensure stable sorting quality.

[0083] S300: Use the first motor 400 to drive the pressure sensor 390 to approach the suction nozzle 120 and squeeze the suction nozzle 120, collect data and calculate and obtain the thrust of the suction nozzle 120 when the second screw 170 and the swing arm 110 are separated , adjust the first screw 150 and the first nut 160 so that Meet the requirements.

[0084] In this embodiment, the first motor 400 is used to drive the pressure sensor 390 to approach the nozzle 120 and squeeze the nozzle 120, and then collect data and calculate the thrust of the nozzle 120 when the second screw 170 and the swing arm 110 are separated. ,like If it is unqualified, the first screw 150 and the first nut 160 are adjusted, and the data is collected again and the thrust of the suction nozzle 120 when the second screw 170 and the swing arm 110 are separated is calculated. , until Meet the requirements, so as to facilitate the measurement and adjustment of the suction nozzle 120 thrust of each swing arm suction nozzle assembly of the multi-station swing arm suction nozzle mechanism , thereby reducing the suction nozzle 120 thrust of each swing arm suction nozzle assembly in the multi-station swing arm suction nozzle mechanism to ensure stable sorting quality.

[0085] S400: Rotate the multi-station swing arm nozzle mechanism to measure and adjust the other nozzles 120 in turn and .

[0086] S500: Use camera 440 to observe the center coordinates of the first suction nozzle 120 , adjust the nozzle 120 position so that the center coordinates Meet the requirements.

[0087] In this embodiment, the center coordinates of the nozzle 120 are observed by using the camera 440 , so that the center coordinates of the nozzle 120 are measured With predefined standard swing arm 110 Compare and then adjust the center coordinates of the nozzle 120 by adjusting the screws that fix the spring 130 position, so that the center coordinate of the nozzle 120 The position meets the requirements, thereby reducing the center coordinates of the nozzle 120 of each swing arm nozzle assembly in the multi-station swing arm nozzle mechanism to ensure stable sorting quality.

[0088] S600: Rotate the multi-station swing arm nozzle mechanism to measure and adjust the center coordinates of other nozzles 120 in sequence .

[0089] This embodiment measures and adjusts the thrust of the suction nozzle 120 and the height, left and right and symmetry of the suction nozzle 120 in advance, thereby reducing the differences between the various swing arm suction nozzle components in the multi-station swing arm suction nozzle mechanism and ensuring stable sorting quality. At the same time, it solves the problem that the multi-station swing arm suction nozzle mechanism is difficult to adjust on the sorting machine, which is beneficial to improving the overall adjustment efficiency of the sorting machine.

[0090] In some specific embodiments, the first motor 400 is used to drive the pressure sensor 390 to approach the nozzle 120 and squeeze the nozzle 120, collect data, and calculate and obtain the thrust of the nozzle 120 when the second screw 170 and the swing arm 110 are separated. , including the following steps:

[0091] Data collection step: set a starting force value as the data collection start judgment value, the first motor 400 drives the pressure sensor 390 to approach the nozzle 120 and squeeze the nozzle 120, and when the pressure measured by the pressure sensor 390 is greater than the data collection start judgment value, start recording the displacement data of the nozzle 120 Measuring force with pressure sensor 390 , and obtain a series of , Data and plot Curve, build Curve formula ,in, is the slope, is the displacement error of the suction nozzle 120 before and after the second screw 170 and the swing arm 110 are separated. and Different, thus, the curve before the second screw 170 and the swing arm 110 are separated is obtained. The formula is , the curve after the second screw 170 and the swing arm 110 are separated The formula is .

[0092] This embodiment collects data from the pressure sensor 390 and the displacement sensor 240 to obtain a series of , Data, plotting Curve, build Curve formula , before and after the second screw 170 and the swing arm 110 are separated, and Different, thus, the curve before the second screw 170 and the swing arm 110 are separated is obtained. The formula is , the curve after the second screw 170 and the swing arm 110 are separated The formula is , thus, it is easy to analyze and obtain the second screw 170 and the swing arm 110 before and after separation. The curve difference makes it easier to distinguish the second screw 170 from the swing arm 110 before and after separation. The thrust of the suction nozzle 120 when the second screw 170 and the swing arm 110 are separated is obtained by calculating the curve difference , which is beneficial to improve the thrust of the suction nozzle 120 when the second screw 170 and the swing arm 110 are separated. accuracy.

[0093] Reference Fig. 9 In (a), (b), and (c), in some specific embodiments, the first motor 400 is used to drive the pressure sensor 390 to approach the suction nozzle 120 and squeeze the suction nozzle 120, collect data, and calculate and obtain the thrust of the suction nozzle 120 when the second screw 170 and the swing arm 110 are separated. , including the following steps:

[0094] Data processing steps: From Set 2 segmented line segments in the curve , , the number of sampling points contained in the segmented line is , two segmented line segments are set as one group, and the number of groups is the same as the sampling points. , the count within the group is , for any point of The number of samples included is , The number of samples included is ;

[0095] calculate Pointed The slope for:

[0096] ,in, for Within group The average value of , for Within group The average value of ;

[0097] calculate Pointed The slope for:

[0098] ,in, for Within group The average value of , for Within group The average value of ;

[0099] calculate and The slope difference for: ;

[0100] When the slope difference is maximum, The measured value of the pressure sensor 390 corresponding to the point is the thrust of the suction nozzle 120 when the second screw 170 and the swing arm 110 are separated. .

[0101] This embodiment uses Set 2 segmented line segments in the curve , , using two segmented line segments , The slope difference To determine the thrust of the suction nozzle 120 when the second screw 170 and the swing arm 110 are separated Thus, the thrust of the suction nozzle 120 when the second screw 170 and the swing arm 110 are separated can be obtained more accurately. At the same time, it is convenient to calculate and analyze in real time to obtain the thrust of the suction nozzle 120 when the second screw 170 and the swing arm 110 are separated .

[0102] In some specific embodiments, the first motor 400 is used to drive the pressure sensor 390 to approach the nozzle 120 and squeeze the nozzle 120, collect data, and calculate and obtain the thrust of the nozzle 120 when the second screw 170 and the swing arm 110 are separated. , including the following steps:

[0103] Sampling end judgment steps: According to the product characteristic parameters and actual measurement and , by judging and Is it in or Range and In which interval, To set the tolerance range, and All in When the curve is sampled to Curve and After the inflection point of the curve Point, sampled by curve Curve and After the inflection point of the curve Point is the end point of the test sampling.

[0104] This embodiment sets a sampling end judgment step so that data collection can be terminated according to the termination conditions, thereby preventing the pressure sensor 390 from exerting excessive pressure on the suction nozzle 120 and damaging the multi-station swing arm suction nozzle mechanism.

[0105] In other embodiments, the first motor is used to drive the pressure sensor 390 to approach the nozzle 120 and squeeze the nozzle 120, collect data, and calculate and obtain the thrust of the nozzle 120 when the second screw 170 and the swing arm 110 are separated. , including the following steps:

[0106] Sampling end judgment steps: According to the product characteristic parameters and actual measurement and , by judging and Is it in or Range and In which interval, To set the tolerance range, and All in When the curve is sampled to Curve and After the inflection point of the curve Point, sampled by curve Curve and After the inflection point of the curve Point is the end point of the test sampling, where .

[0107] In this embodiment, the end point of the test sampling is set to Curve and After the inflection point of the curve Point, where ,Therefore, it is convenient to judge the termination conditions multiple times and prevent judgment errors.

[0108] In some specific embodiments, the standard swing arm 110 is measured to define the center coordinates of the nozzle 120 , including the following steps:

[0109] The displacement sensor 240 is used to detect the distance between the displacement sensor 240 and the standard swing arm 110 ,by Definition instead , use the camera 440 to locate the center coordinate of the nozzle 120 of the standard swing arm 110 Mark it.

[0110] In this embodiment, the distance between the displacement sensor 240 and the standard swing arm 110 is detected by using the displacement sensor 240 ,by Definition instead , use the camera 440 to locate the center coordinate of the nozzle 120 of the standard swing arm 110 It is understood that the displacement sensor 240 is located outside the standard swing arm 110 to measure the standard swing arm 110, so that the displacement sensor 240 cannot directly measure , by using Definition instead , it is possible to define the symmetry standard of the standard swing arm 110 to meet measurement requirements.

[0111] In some specific embodiments, the displacement sensor 240 measures the distance between the displacement sensor 240 and the nozzle 120. To judge Whether the requirements are met.

[0112] In this embodiment, the distance between the displacement sensor 240 and the suction nozzle 120 is detected by using the displacement sensor 240 ,by replace It is understandable that the displacement sensor 240 is located outside the multi-station swing arm suction nozzle mechanism to measure the multi-station swing arm suction nozzle mechanism, so that the displacement sensor 240 cannot directly measure , by using replace , can determine the symmetry of the multi-station swing arm nozzle mechanism to meet measurement needs.

[0113] In some specific embodiments, the camera 440 observes the center coordinates of the nozzle 120 of the multi-station swing arm nozzle mechanism to be measured and adjusted by photographing. , the center coordinate of the nozzle 120 of the multi-station swing arm nozzle mechanism to be measured and adjusted The center coordinates of the nozzle 120 of the standard swing arm 110 with the record mark Compare to determine the center coordinates of the nozzle 120 of the multi-station swing arm nozzle mechanism to be measured and adjusted Whether the requirements are met.

[0114] In this embodiment, the camera 440 is used to photograph and observe the center coordinates of the nozzle 120 of the multi-station swing arm nozzle mechanism to be measured and adjusted. , the center coordinate of the nozzle 120 of the multi-station swing arm nozzle mechanism to be measured and adjusted The center coordinates of the nozzle 120 of the standard swing arm 110 with the record mark Compare to determine the center coordinates of the nozzle 120 of the multi-station swing arm nozzle mechanism to be measured and adjusted Whether the requirements are met, thereby facilitating rapid measurement and adjustment of the center coordinates of the nozzle 120 of the multi-station swing arm nozzle mechanism .

[0115] Example 2

[0116] Reference Fig.10 , a multi-station swing arm suction nozzle mechanism measuring and adjusting device according to an embodiment of the present invention, which is used to implement a multi-station swing arm suction nozzle mechanism measuring and adjusting device method according to an embodiment of the present invention, the multi-station swing arm suction nozzle mechanism measuring and adjusting device includes a clamping mechanism 190, a displacement measuring mechanism 230, a force measuring mechanism 380, an image measuring mechanism 430 and a data processing module.

[0117] This embodiment, by providing a clamping mechanism 190, a displacement measuring mechanism 230, a force measuring mechanism 380, an image measuring mechanism 430 and a data processing module, can accurately measure the thrust of the suction nozzle 120 when the limit screw and the swing arm 110 are separated, and can measure and adjust the thrust of the suction nozzle 120 and the height, left and right and symmetry of the suction nozzle 120 in advance, thereby reducing the difference between each swing arm suction nozzle component in the multi-station swing arm suction nozzle mechanism and ensuring stable sorting quality. At the same time, the multi-station swing arm suction nozzle mechanism is adjusted on the device, which can reduce the difficulty of adjusting the multi-station swing arm suction nozzle mechanism on the sorting machine, or the multi-station swing arm suction nozzle mechanism can be adjusted on the sorting machine, which is beneficial to improving the adjustment efficiency of the whole sorting machine.

[0118] The clamping mechanism 190 includes a frame 200, a clamping seat 210 and a rotating motor 220. The clamping seat 210 is used to clamp and fix the multi-station swing arm nozzle mechanism. The rotating motor 220 is fixed on the frame 200 and is used to drive the clamping seat 210 to rotate.

[0119] As for the displacement measuring mechanism 230 , the displacement measuring mechanism 230 includes a displacement sensor 240 , and the displacement sensor 240 is used to measure the position of the suction nozzle 120 .

[0120] It is understandable that by measuring the distance between the displacement sensor 240 and the suction nozzle 120 to determine the position of the suction nozzle 120 , it is possible to conveniently determine whether the position of the suction nozzle 120 meets the requirements.

[0121] Reference Fig.11 In some specific embodiments, the displacement measuring mechanism 230 also includes a first three-dimensional seat 250, the first three-dimensional seat 250 includes a first translation seat 260, a second translation seat 270 and a first lifting seat 280, the first translation seat 260 is slidably set on the frame 200 along one of the X direction and the Y direction, the second translation seat 270 is slidably set on the first translation seat 260 along the other of the X direction and the Y direction, the first lifting seat 280 is slidably set on the second translation seat 270 up and down, and the displacement sensor 240 is installed on the first lifting seat 280.

[0122] In this embodiment, a first three-dimensional seat 250 is set on the displacement measuring mechanism 230, so that the first three-dimensional seat 250 can install and fix the displacement sensor 240 and allow the position of the displacement sensor 240 in the X direction, Y direction and Z direction to be adjusted, thereby facilitating adjustment of the displacement sensor 240's measurement position of the multi-station swing arm nozzle mechanism, and further, facilitating the displacement sensor 240 to avoid the pressure sensor 390.

[0123] Furthermore, a first adjustment component 290 is arranged between the first translation seat 260 and the frame 200, and the first adjustment component 290 includes a first spring 300 and a first screw 310. The two ends of the first spring 300 are respectively connected to the first translation seat 260 and the frame 200. The first screw 310 is threadedly connected to the frame 200. One end of the first screw 310 abuts against the first translation seat 260. The first screw 310 is used to drive the first translation seat 260 to translate and make the first translation seat 260 and the frame 200 cooperate to stretch the first spring 300. The first spring 300 is used to drive the first translation seat 260 to translate and reset, so as to facilitate the adjustment of the position of the first translation seat 260 by the first screw 310.

[0124] Furthermore, a second adjustment component 320 is arranged between the second translation seat 270 and the first translation seat 260, and the second adjustment component 320 includes a second spring 330 and a second screw 340, both ends of the second spring 330 are respectively connected to the second translation seat 270 and the first translation seat 260, the second screw 340 is threadedly connected to the first translation seat 260, and one end of the second screw 340 abuts against the second translation seat 270, the second screw 340 is used to drive the second translation seat 270 to translate and make the second translation seat 270 and the first translation seat 260 cooperate to stretch the second spring 330, and the second spring 330 is used to drive the second translation seat 270 to translate and reset, so as to facilitate the adjustment of the position of the second translation seat 270 by the second screw 340.

[0125] Furthermore, a third adjustment component 350 is arranged between the first lifting seat 280 and the second translation seat 270. The third adjustment component 350 includes a third spring 360 and a third screw 370. The two ends of the third spring 360 are respectively connected to the second translation seat 270 and the first lifting seat 280. The third screw 370 is threadedly connected to the second translation seat 270. One end of the third screw 370 abuts against the first lifting seat 280. The third screw 370 is used to drive the first lifting seat 280 to rise and fall and to make the second translation seat 270 and the first lifting seat 280 cooperate to stretch the third spring 360. The third spring 360 is used to drive the first lifting seat 280 to reset, so as to facilitate the adjustment of the height position of the first lifting seat 280 by the third screw 370.

[0126] The force measuring mechanism 380 includes a pressure sensor 390 and a first motor 400 that drives the pressure sensor 390 to approach and move away from the suction nozzle 120 . The pressure sensor 390 is used to squeeze the suction nozzle 120 and measure the thrust of the suction nozzle 120 .

[0127] In some specific embodiments, the force measuring mechanism 380 also includes a position adjustment component 410, which is used to adjust the height of the pressure sensor 390 and the position of the pressure sensor 390 in a direction perpendicular to the translation direction of the pressure sensor 390, thereby facilitating the adjustment of the position of the pressure sensor 390 so that the pressure sensor 390 can be aligned with the suction nozzle 120, making the force measurement of the pressure sensor 390 more accurate.

[0128] Furthermore, a slide 420 and a fourth screw threadedly connected to the slide 420 are slidably provided on the position adjustment component 410, the pressure sensor 390 is installed on the slide 420, the fourth screw is rotatably connected to the position adjustment component 410, and the first motor 400 drives the fourth screw to rotate, so that the first motor 400 can drive the pressure sensor 390 to approach and move away from the suction nozzle 120 through the cooperation of the slide 420 and the fourth screw.

[0129] The image measuring mechanism 430 includes a camera 440 , which is used to measure the center coordinates of the nozzle 120 . .

[0130] In some specific embodiments, the image measurement mechanism 430 further includes a second three-dimensional stand 450 , and the second three-dimensional stand 450 is used to install the camera 440 and adjust the position of the camera 440 along the X direction, the Y direction, and the Z direction.

[0131] Specifically, the structure of the second three-dimensional seat 450 may refer to the structure of the first three-dimensional seat 250 .

[0132] In some specific embodiments, the image measurement mechanism 430 further includes a backlight source 460, which is located on the side of the nozzle 120 facing away from the camera 440, and the lens of the camera 440 is coaxially arranged with the backlight source 460, so that the background is clear when the camera 440 photographs the nozzle 120.

[0133] As for the data processing module, the data processing module is used to collect data from the displacement sensor 240, the pressure sensor 390 and the camera 440 and perform calculation processing.

[0134] In some specific embodiments, a data storage unit is also included, and the data storage unit is used to store data, so as to facilitate the storage of adjusted data, and then to facilitate the next process and related personnel to review and trace.

[0135] In the description of this specification, the description with reference to the terms "one embodiment, some embodiments, illustrative embodiments, examples, specific examples or some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0136] The terms "first, second, third, fourth", etc. (if any) in the specification and claims of this application and the above drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments described herein can be implemented in an order other than that shown or described herein.

[0137] It should also be noted that in the description of this specification, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0138] In addition, the terms "comprises" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or apparatus that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may also include other steps or units not explicitly listed or inherent to these processes, methods, products or apparatuses.

[0139] Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0140] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A method for measuring and adjusting a multi-station swing arm nozzle mechanism, characterized in that: The steps include: Install the standard swing arm on the measuring station and measure the standard swing arm to define the nozzle center coordinates ; Install the multi-station swing arm nozzle mechanism to be measured and adjusted on the measuring station, and use the displacement sensor to measure the first nozzle , adjust the second screw and the second nut to make meet the requirements; Use the first motor to drive the pressure sensor to approach the nozzle and squeeze the nozzle, collect data and calculate the nozzle thrust when the second screw and the swing arm are separated. , adjust the first screw and the first nut so that meet the requirements; Rotate the multi-station swing arm nozzle mechanism to measure and adjust other nozzles in turn. and ; Use the camera to observe the center coordinates of the first nozzle , adjust the nozzle position so that the center coordinates meet the requirements; Rotate the multi-station swing arm nozzle mechanism to measure and adjust the center coordinates of other nozzles in turn ; The first motor is used to drive the pressure sensor to approach the nozzle and squeeze the nozzle, collect data and obtain the nozzle thrust when the second screw and the swing arm are separated through calculation. , including the following steps: Data collection steps: Set a starting force value as the data collection start judgment value. The first motor drives the pressure sensor to approach the nozzle and squeeze the nozzle. When the pressure measured by the pressure sensor is greater than the data collection start judgment value, start recording the nozzle displacement data. Measuring force with pressure sensors , and obtain a series of , Data and plot Curve, build Curve formula ,in, is the slope, is the nozzle displacement error before and after the second screw and the swing arm are separated. and Different, thus, the curve before the second screw and the swing arm are separated is obtained The formula is , the curve after the second screw and the swing arm are separated The formula is ; Data processing steps: From Set 2 segmented lines in the curve , , the number of sampling points contained in the segmented line is , two segmented line segments are set as one group, and the number of groups is the same as the sampling points. , the count within the group is , for any point of The number of samples included is , The number of samples included is ; calculate Pointed The slope for: ,in, for Within group The average value of , for Within group The average value of ; calculate Pointed The slope for: ,in, for Within group The average value of , for Within group The average value of ; calculate and The slope difference for: ; When the slope difference is maximum, The measured value of the pressure sensor corresponding to the point is the nozzle thrust when the second screw and the swing arm are separated. .

2. A method for measuring and adjusting a multi-station swing arm nozzle mechanism according to claim 1, characterized in that: The first motor is used to drive the pressure sensor to approach the nozzle and squeeze the nozzle, collect data and obtain the nozzle thrust when the second screw and the swing arm are separated through calculation. , including the following steps: Sampling end judgment steps: According to the product characteristic parameters and actual measurement and , by judging and Is it in or Range and In which interval, To set the tolerance range, and All in When the curve is sampled Curve and After the inflection point of the curve Point, sampled by curve Curve and After the inflection point of the curve Point is the end point of the test sampling.

3. A method for measuring and adjusting a multi-station swing arm nozzle mechanism according to claim 1, characterized in that: The first motor is used to drive the pressure sensor to approach the nozzle and squeeze the nozzle, collect data and obtain the nozzle thrust when the second screw and the swing arm are separated through calculation. , including the following steps: Sampling end judgment steps: According to the product characteristic parameters and actual measurement and , by judging and Is it in or Range and In which interval, To set the tolerance range, and All in When the curve is sampled Curve and After the inflection point of the curve Point, sampled by curve Curve and After the inflection point of the curve Point is the end point of the test sampling, where .

4. A method for measuring and adjusting a multi-station swing arm nozzle mechanism according to claim 1, characterized in that: The measuring standard swing arm is used to define the center coordinates of the nozzle , including the following steps: Use a displacement sensor to detect the distance between the displacement sensor and the standard swing arm ,by Definition instead , use the camera to move the center coordinates of the nozzle of the standard swing arm Mark it.

5. A method for measuring and adjusting a multi-station swing arm nozzle mechanism according to claim 4, characterized in that: The displacement sensor measures the distance between the displacement sensor and the nozzle. To judge Whether the requirements are met.

6. A method for measuring and adjusting a multi-station swing arm nozzle mechanism according to claim 1, characterized in that: The camera observes the center coordinates of the nozzle of the multi-station swing arm nozzle mechanism to be measured and adjusted by shooting. , the center coordinates of the nozzle of the multi-station swing arm nozzle mechanism to be measured and adjusted The center coordinates of the nozzle of the standard swing arm with the record mark Compare to determine the center coordinates of the nozzle of the multi-station swing arm nozzle mechanism to be measured and adjusted Whether the requirements are met.

7. A multi-station swing arm nozzle mechanism measuring and adjusting device, characterized in that: Used to implement a method for measuring and adjusting a multi-station swing arm suction nozzle mechanism according to any one of claims 1 to 6, the multi-station swing arm suction nozzle mechanism measuring and adjusting device comprising: The clamping mechanism comprises a frame, a clamping seat and a rotating motor, wherein the clamping seat is used to clamp and fix the multi-station swing arm nozzle mechanism, and the rotating motor is fixed on the frame, and the rotating motor is used to drive the clamping seat to rotate; A displacement measuring mechanism, comprising a displacement sensor, wherein the displacement sensor is used to measure the position of the suction nozzle; The force measuring mechanism comprises a pressure sensor and a first motor driving the pressure sensor to approach and move away from the nozzle, wherein the pressure sensor is used to squeeze the nozzle and measure the thrust of the nozzle; The image measuring mechanism includes a camera, wherein the camera is used to measure the center coordinates of the nozzle. ; The data processing module is used to collect data from the displacement sensor, the pressure sensor and the camera and perform calculation processing.

8. The multi-station swing arm nozzle mechanism measuring and adjusting device according to claim 7, characterized in that: The displacement measuring mechanism also includes a first three-dimensional seat, which includes a first translation seat, a second translation seat and a first lifting seat. The first translation seat is slidably arranged on the frame along one of the X direction and the Y direction, and the second translation seat is slidably arranged on the first translation seat along the other of the X direction and the Y direction. The first lifting seat is slidably arranged on the second translation seat up and down, and the displacement sensor is installed on the first lifting seat.

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