Evaporation equipment and evaporation method

Abstract

The invention provides evaporation equipment and an evaporation method.The evaporation equipment comprises a mask plate, a supporting base and an adjusting device, the mask plate comprises a frame and a mask body, and the mask body is arranged on the frame; the supporting seat supports the frame; the adjusting device is connected with the frame and used for applying acting force to the frame to adjust the shape of the frame. According to the evaporation equipment, the adjusting device is connected with the frame, the adjusting device is used for applying the acting force to the frame to adjust the form of the frame so as to adjust the mask body when the mask body deviates or folds, the deviation or folds of the mask body can be improved, the pixel position precision of evaporation can be improved, poor color mixing can be reduced, and the quality of the mask body can be improved. The mask plate is prevented from being re-expanded, the cost is reduced, and the display yield of the display screen is improved.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to an evaporation device and an evaporation method. Background Art

[0002] Organic Light Emitting Diode (OLED) and flat panel display devices based on technologies such as Light Emitting Diode (LED) have been widely used in various consumer electronic products such as mobile phones, televisions, laptops, desktop computers, etc. due to their advantages such as high image quality, power saving, thin body and wide application range, becoming the mainstream in display devices.

[0003] In the process of manufacturing OLED display panels, it is necessary to form the desired pattern on the substrate by evaporation using FMM (Fine Metal Mask, also known as fine metal mask). However, in existing evaporation devices, the mask layer in the mask plate is prone to deviation or wrinkles. Summary of the invention

[0004] In view of this, the purpose of the present application is to propose a vapor deposition device that can improve the deviation or wrinkles of the mask body, enhance the pixel position accuracy of vapor deposition, and reduce poor color mixing.

[0005] Based on the above objectives, the present application provides an evaporation device, which includes:

[0006] The mask plate comprises a frame and a mask body, wherein the mask body is arranged on the frame;

[0007] A support base, the support base supporting the frame;

[0008] An adjusting device is connected to the frame and / or the supporting seat, and is used to apply a force to the frame to adjust the shape of the frame.

[0009] In one embodiment, the adjustment device includes a first adjustment mechanism, the support seat includes a plurality of support edges, the plurality of support edges include a first support edge, a second support edge, a third support edge and a fourth support edge connected end to end in sequence, the first support edge is arranged opposite to the third support edge, and the second support edge is arranged opposite to the fourth support edge, the frame includes a plurality of borders, the plurality of borders include a first border, a second border, a third border and a fourth border connected end to end in sequence, the first border is arranged opposite to the third border, and the second border is arranged opposite to the fourth border, the first adjustment mechanism is connected to at least one of the support edges and the corresponding border, and the first adjustment mechanism is used to apply a horizontal force to the frame to adjust the shape of the frame in the horizontal direction; wherein the horizontal direction is any direction parallel to the plane where the surface of the frame facing the support seat side is located;

[0010] Preferably, the first adjustment mechanism is connected between the first supporting edge and the first frame, and between the third supporting edge and the third frame, and the first adjustment mechanism applies a force to the first frame and the third frame to deform inwardly of the frame, so as to adjust the frame to retract;

[0011] And / or, the first adjustment mechanism is connected between the second supporting edge and the second frame, and between the fourth supporting edge and the fourth frame, and the first adjustment mechanism applies a force to the second frame and the fourth frame to deform inwardly of the frame, so as to adjust the frame to retract;

[0012] Preferably, the first adjustment mechanism is connected between the first supporting edge and the first frame, and between the third supporting edge and the third frame, and the first adjustment mechanism applies a force to the first frame and the third frame to deform outwards of the frame, so as to adjust the outward expansion of the frame;

[0013] And / or, the first adjustment mechanism is connected between the second supporting edge and the second frame, and between the fourth supporting edge and the fourth frame, and the first adjustment mechanism applies a force to the second frame and the fourth frame to deform outwards of the frame, so as to adjust the outward expansion of the frame;

[0014] Preferably, the first adjustment mechanism is connected between the first supporting edge and the first frame, and between the third supporting edge and the third frame, and the first adjustment mechanism applies a force in the same direction to the first frame and the third frame to adjust the translation of the frame;

[0015] And / or, the first adjustment mechanism is connected between the second supporting edge and the second frame, and between the fourth supporting edge and the fourth frame, and the first adjustment mechanism applies a force in the same direction to the second frame and the fourth frame to adjust the frame translation;

[0016] Preferably, the first adjustment mechanism is connected between the first supporting edge and the first frame, between the second supporting edge and the second frame, between the third supporting edge and the third frame, and between the fourth supporting edge and the fourth frame, and the first adjustment mechanism adjusts the frame to rotate in the horizontal direction.

[0017] In one embodiment, the first adjustment mechanism includes a plurality of first adjustment components, and the first adjustment components respectively cooperate with the corresponding frame and adjust the shape of the corresponding frame in the horizontal direction;

[0018] Preferably, each of the frames cooperates with a plurality of the first adjustment components, and the plurality of the first adjustment components corresponding to each of the frames are arranged along the length direction of the frame;

[0019] Preferably, among the plurality of first adjustment components corresponding to the same frame, at least two first adjustment components are included for applying forces in opposite directions to different positions of the same frame, so as to adjust the frame to rotate in the horizontal direction;

[0020] Preferably, the adjustment range of the first adjustment component in the horizontal direction is 1 micron to 10 microns;

[0021] Preferably, the first adjustment component includes a first electromagnetic unit and a second electromagnetic unit that are correspondingly arranged, one of the first electromagnetic unit and the second electromagnetic unit is connected to the frame, and the other of the first electromagnetic unit and the second electromagnetic unit is connected to the support seat; the evaporation device also includes:

[0022] a controller electrically connected to the first adjusting component, wherein the controller controls the first electromagnetic unit and the second electromagnetic unit in each of the first adjusting components to generate an attractive force or a repulsive force;

[0023] Preferably, the first adjustment assembly comprises a first cylinder, a cylinder body of the first cylinder is connected to the support seat, and a telescopic rod of the first cylinder is connected to the frame;

[0024] Preferably, the first adjustment assembly includes a first manipulator, a base of the first manipulator is connected to one of the supporting edge and the frame, and an actuator of the first manipulator is connected to the other of the supporting edge and the frame.

[0025] In one embodiment, the adjustment device includes a second adjustment mechanism, the second adjustment mechanism is connected between the frame and the support seat, and the second adjustment mechanism is used to apply a vertical force to the frame to adjust the shape of the frame in the vertical direction; wherein the vertical direction is perpendicular to the plane where the surface of the frame facing the support seat is located; preferably, the frame includes a plurality of frames, and the plurality of frames are connected end to end in sequence, and the second adjustment mechanism includes a plurality of second adjustment components, and the second adjustment components respectively cooperate with the corresponding frames and adjust the corresponding frames to rise and fall, so as to adjust the shape of the frame in the vertical direction;

[0026] Preferably, each of the frames cooperates with a plurality of the second adjustment components, and the plurality of the second adjustment components corresponding to each of the frames are arranged along the length direction of the frame;

[0027] Preferably, the adjustment range of the second adjustment component in the vertical direction is 1 micron to 10 microns.

[0028] In one embodiment, the second adjustment assembly includes a second cylinder, a cylinder body of the second cylinder is connected to the support seat, and a telescopic rod of the second cylinder is connected to the frame;

[0029] Preferably, the second adjustment component comprises a lifting motor, a housing of the lifting motor is connected to the support seat, and an output shaft of the lifting motor is connected to the frame;

[0030] Preferably, the second adjustment assembly includes a second manipulator, a base of the second manipulator is connected to one of the support base and the frame, and an actuator of the second manipulator is connected to the other of the support base and the frame.

[0031] In one embodiment, the adjusting device includes a first adjusting mechanism and a second adjusting mechanism, the first adjusting mechanism is connected between the support base and the frame, the second adjusting mechanism is connected between the support base and the frame, the first adjusting mechanism is used to apply a horizontal force to the frame to adjust the shape of the frame in the horizontal direction, and the second adjusting mechanism is used to apply a vertical force to the frame to adjust the shape of the frame in the vertical direction; wherein the horizontal direction is any direction parallel to the plane where the surface of the frame facing the support base side is located; and the vertical direction is perpendicular to the plane where the surface of the frame facing the support base side is located.

[0032] In one embodiment, the frame includes a plurality of frames, the plurality of frames are connected end to end in sequence, the first adjustment mechanism includes a plurality of first adjustment components, the first adjustment components respectively cooperate with the corresponding frames and adjust the shape of the corresponding frames in the horizontal direction; the second adjustment mechanism includes a plurality of second adjustment components, the second adjustment components respectively cooperate with the corresponding frames and adjust the shape of the corresponding frames in the vertical direction;

[0033] Preferably, each of the frames cooperates with a plurality of the first adjustment components, and the plurality of the first adjustment components corresponding to each of the frames are arranged along the length direction of the frame;

[0034] Preferably, each of the frames cooperates with a plurality of the second adjustment components, and the plurality of the second adjustment components corresponding to each of the frames are arranged along the length direction of the frame.

[0035] In one embodiment, the evaporation device further includes:

[0036] The substrate to be evaporated is arranged on one side of the mask plate;

[0037] The evaporation source is arranged on a side of the mask plate away from the substrate to be evaporated.

[0038] Based on the same inventive concept, the present application also discloses a vapor deposition method, which comprises:

[0039] When any of the above-mentioned evaporation devices is used to perform evaporation deposition on the mask plate, an adjustment device is used to apply a force to the frame of the mask plate to adjust the shape of the frame.

[0040] In one embodiment, applying a force to the frame of the mask plate by using an adjusting device to adjust the shape of the frame includes:

[0041] Using a first adjustment mechanism to apply a horizontal force to the frame to adjust the shape of the frame in the horizontal direction; and / or,

[0042] Using a second adjustment mechanism to apply a vertical force to the frame to adjust the shape of the frame in the vertical direction;

[0043] Preferably, the support seat includes a plurality of support edges, the plurality of support edges include a first support edge, a second support edge, a third support edge and a fourth support edge connected end to end in sequence, the first support edge is arranged opposite to the third support edge, and the second support edge is arranged opposite to the fourth support edge, the frame includes a plurality of frames, the plurality of frames include a first frame, a second frame, a third frame and a fourth frame connected end to end in sequence, the first frame is arranged opposite to the third frame, and the second frame is arranged opposite to the fourth frame, the first adjustment mechanism is connected to at least one of the support edges and the corresponding frame, the first adjustment mechanism is connected between the first support edge and the first frame, between the second support edge and the second frame, between the third support edge and the third frame, and between the fourth support edge and the fourth frame, the first adjustment mechanism is connected to at least one of the support edges and the corresponding frame; the evaporation method further includes:

[0044] When the frame needs to be adjusted to retract, a force is applied to the second frame and the fourth frame to deform the frame inwardly through the first adjustment mechanism; and / or the first adjustment mechanism applies a force to the second frame and the fourth frame to deform the frame inwardly;

[0045] When the outward expansion of the frame needs to be adjusted, a force is applied to the second frame and the fourth frame to deform outward of the frame through the first adjustment mechanism; and / or the first adjustment mechanism applies a force to the second frame and the fourth frame to deform outward of the frame;

[0046] When the frame translation needs to be adjusted, the first adjustment mechanism applies a force in the same direction to the first frame and the third frame; and / or the first adjustment mechanism applies a force in the same direction to the second frame and the fourth frame;

[0047] Preferably, the first adjustment mechanism includes a plurality of first adjustment components, and the same frame corresponds to a plurality of the first adjustment components; the evaporation method further includes:

[0048] When the rotation of the frame needs to be adjusted, forces in opposite directions are applied to different positions of the same frame through at least two of the first adjustment components.

[0049] Compared with the prior art, the evaporation equipment provided in the present application is connected to the frame through an adjusting device, and the adjusting device is used to apply force to the frame to adjust the shape of the frame, so as to adjust the mask body when the mask body is displaced or wrinkled. This can improve the displacement or wrinkling of the mask body, improve the pixel position accuracy of evaporation, reduce poor color mixing, avoid re-stretching of the mask plate, reduce costs, and improve the display yield of the display screen. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the technical solutions in the present application or related technologies, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0051] Figure 1 A schematic diagram of an evaporation device provided in one embodiment of the present application;

[0052] Figure 2 A schematic structural diagram of a mask plate and a support base provided in another embodiment of the present application;

[0053] Figure 3 A schematic diagram of the shape of a mask plate provided in another embodiment of the present application;

[0054] Figure 4 A schematic diagram of the shape of a mask plate provided in another embodiment of the present application;

[0055] Figure 5 A schematic diagram of the shape of a mask plate provided in another embodiment of the present application;

[0056] Figure 6 A schematic diagram of the shape of a mask plate provided in another embodiment of the present application;

[0057] Figure 7 A schematic diagram of the shape of a mask plate provided in another embodiment of the present application;

[0058] Figure 8 A schematic diagram of the shape of a mask plate provided in another embodiment of the present application;

[0059] Fig. 9 A schematic diagram of an evaporation device provided in another embodiment of the present application;

[0060] Fig.10 A schematic diagram of an evaporation device provided in another embodiment of the present application;

[0061] Fig.11 A schematic diagram of an evaporation device provided in another embodiment of the present application.

[0062] Marking Description:

[0063] 100. Evaporation equipment;

[0064] 1. mask plate; 11. frame; 111. first frame; 112. second frame; 113. third frame; 114. fourth frame; 12. mask body;

[0065] 2. Support seat; 21. First support edge; 22. Second support edge; 23. Third support edge; 24. Fourth support edge;

[0066] 31. First electromagnetic unit; 32. Second electromagnetic unit; 33. First cylinder;

[0067] 41. Second cylinder;

[0068] 5. Substrate to be evaporated;

[0069] 6. Evaporation source. DETAILED DESCRIPTION

[0070] In order to make the objectives, technical solutions and advantages of the present application more clearly understood, the present application is further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

[0071] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present application should be the usual meanings understood by people with ordinary skills in the field to which the present application belongs. The "first", "second" and similar words used in the embodiments of the present application do not represent any order, quantity or importance, but are only used to distinguish different components. "Including" or "comprising" and similar words mean that the elements or objects appearing in front of the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0072] Currently, active-matrix organic light emitting diode (ALED) display is the mainstream trend in the market. The market demand is huge, but the challenges are also huge, and there are still many problems to be solved. For example, low pixel position accuracy (PPA) leads to abnormal evaporation, resulting in abnormal pixels or defects on the display screen.

[0073] Among them, low pixel position accuracy is usually caused by deviations in the process of evaporating pixels. Generally, in evaporation production, a mask plate is used for evaporation. There are many process steps of stretching the mask plate. At present, when the pixel position accuracy of evaporation does not meet the requirements, the only way is to stretch the mask again or sacrifice the yield of the display screen.

[0074] Based on this, the present application provides a evaporation equipment solution, see the following embodiments for details.

[0075] Reference Figure 1-2 As shown, an embodiment of the present application discloses an evaporation device 100, which includes a mask plate 1, a support seat 2 and an adjusting device. The mask plate 1 includes a frame 11 and a mask body 12. The mask body 12 is arranged on the frame 11. The support seat 2 supports the frame 11. The adjusting device is connected to the frame 11 and / or the support seat 2. The adjusting device is used to apply a force to the frame 11 to adjust the shape of the frame 11.

[0076] The adjusting device may be a cylinder, the cylinder body of which is connected to one of the frame 11 and the support base 2, and the telescopic rod of which is connected to the other of the frame 11 and the support base 2. The adjusting device may also be a manipulator, the base of which is connected to one of the frame 11 and the support base 2, and the telescopic rod of which is connected to the other of the frame 11 and the support base 2. The adjusting device may also include two electromagnetic units, one of which is connected to one of the frame 11 and the support base 2, and the other of which is connected to the other of the frame 11 and the support base 2.

[0077] The evaporation equipment 100 provided in the present application is connected to the frame 11 through an adjusting device, and the adjusting device is used to apply a force to the frame 11 to adjust the shape of the frame 11, so as to adjust the mask body 12 when the mask body 12 is displaced or wrinkled. The displacement or wrinkling of the mask body 12 can be improved, the pixel position accuracy of the evaporation can be improved, the color mixing defects can be reduced, the mask plate 1 can be avoided from being re-stretched, the cost can be reduced, and the display yield of the display screen can be improved.

[0078] Specifically, after the mask body 12 is stretched onto the frame 11, if the mask body 12 is displaced or wrinkled, the adjustment device can be used to apply force to the frame 11 to adjust the shape of the frame 11, thereby improving the displacement or wrinkles of the mask body 12 and improving the pixel position accuracy of the evaporation.

[0079] The shape or size of the frame 11 can be selected according to the actual evaporation requirements. The frame 11 can be provided with grooves to carry multiple mask bodies 12 to be stretched, and the mask body 12 can be provided with multiple mask openings at intervals to form multiple mask blocks arranged at intervals. The mask body 12 can be understood as a mask strip for patterned etching.

[0080] Further, refer to Figure 1 As shown, the evaporation device 100 further includes a substrate to be evaporated 5 and an evaporation source 6. The substrate to be evaporated 5 is arranged on one side of the mask plate 1, and the evaporation source 6 is arranged on the side of the mask plate 1 away from the substrate to be evaporated 5. During evaporation, the material is evaporated by heating through the evaporation source 6. After the evaporated material passes through the mask opening on the mask body 12, it condenses on the substrate to be evaporated 5 to form a thin film.

[0081] In one embodiment, the adjustment device includes a first adjustment mechanism, the support seat 2 includes a plurality of support edges, the plurality of support edges include a first support edge 21, a second support edge 22, a third support edge 23 and a fourth support edge 24 connected end to end in sequence, the first support edge 21 and the third support edge 23 are arranged opposite to each other, the second support edge 22 and the fourth support edge 24 are arranged opposite to each other, the frame 11 includes a plurality of borders, the plurality of borders include a first border 111, a second border 112, a third border 113 and a fourth border 114 connected end to end in sequence, the first border 111 and the third border 113 are arranged opposite to each other, the second border 112 and the fourth border 114 are arranged opposite to each other, the first adjustment mechanism is connected to at least one support edge and the corresponding border, and the first adjustment mechanism is used to apply a horizontal force to the frame 11 to adjust the shape of the frame 11 in the horizontal direction. Among them, the horizontal direction is any direction parallel to the plane where the surface of the frame 11 facing the support seat 2 is located (XY plane in the figure). If the mask body 12 is displaced or wrinkled, the first adjustment mechanism is used to apply a horizontal force to the frame 11 to cause the frame 11 to deform or displace, thereby driving the mask body 12 to improve the displacement or wrinkles of the mask body 12.

[0082] Preferably, the first adjustment mechanism is used to adjust the frame 11 to retract, expand, translate, or rotate in the horizontal direction. Figure 3 and 5 As shown, the first adjustment mechanism adjusts the outward expansion of the frame 11. Specifically, the first adjustment mechanism is connected between the first supporting edge 21 and the first frame 111, and between the third supporting edge 23 and the third frame 113, and the first adjustment mechanism applies a force to the first frame 111 and the third frame 113 to deform the frame 11 outward, so as to adjust the outward expansion of the frame 11; and / or, the first adjustment mechanism is connected between the second supporting edge 22 and the second frame 112, and between the fourth supporting edge 24 and the fourth frame 114, and the first adjustment mechanism applies a force to the second frame 112 and the fourth frame 114 to deform the frame 11 outward, so as to adjust the outward expansion of the frame 11.

[0083] Reference Figure 4 and 6 As shown, the first adjustment mechanism adjusts the frame 11 to retract. Specifically, the first adjustment mechanism is connected between the first support edge 21 and the first frame 111, and between the third support edge 23 and the third frame 113, and the first adjustment mechanism applies a force to the first frame 111 and the third frame 113 to deform the frame 11 inwards, so as to adjust the frame 11 to retract; and / or, the first adjustment mechanism is connected between the second support edge 22 and the second frame 112, and between the fourth support edge 24 and the fourth frame 114, and the first adjustment mechanism applies a force to the second frame 112 and the fourth frame 114 to deform the frame 11 inwards, so as to adjust the frame 11 to retract.

[0084] Reference Figure 7 As shown, the first adjustment mechanism adjusts the translation of the frame 11. Specifically, the first adjustment mechanism is connected between the first support edge 21 and the first frame 111, and between the third support edge 23 and the third frame 113, and the first adjustment mechanism applies a force in the same direction to the first frame 111 and the third frame 113 to adjust the translation of the frame 11; and / or, the first adjustment mechanism is connected between the second support edge 22 and the second frame 112, and between the fourth support edge 24 and the fourth frame 114, and the first adjustment mechanism applies a force in the same direction to the second frame 112 and the fourth frame 114 to adjust the translation of the frame 11.

[0085] Reference Figure 8 As shown, the first adjustment mechanism adjusts the rotation of the frame 11. Specifically, the first adjustment mechanism is connected between the first support edge 21 and the first frame 111, between the second support edge 22 and the second frame 112, between the third support edge 23 and the third frame 113, and between the fourth support edge 24 and the fourth frame 114, and the first adjustment mechanism adjusts the frame 11 to rotate in the horizontal direction.

[0086] Optionally, when the mask body 12 is offset as a whole, the frame 11 can be adjusted to translate or rotate in the horizontal direction; when the mask body 12 is wrinkled, the frame 11 can be adjusted to retract or expand.

[0087] Preferably, the first adjustment mechanism is used to apply a horizontal force to the frame 11 to adjust the horizontal shape of a local area of ​​the frame 11, or to adjust the horizontal shape of the entire frame 11. Figure 3-6 As shown, the horizontal shape of the local area of ​​the adjustment frame 11; Figure 7 and 8 As shown, the shape of the entire frame 11 in the horizontal direction is adjusted.

[0088] Please continue to refer to Figure 3-7 As shown, in one embodiment, the first adjustment mechanism includes a plurality of first adjustment components, which respectively cooperate with corresponding frames and adjust the shape of the corresponding frames in the horizontal direction. Each frame is adjusted by the corresponding first adjustment component. When a local area of ​​the frame 11 needs to be adjusted, the first adjustment component corresponding to the area works. When the entire frame 11 needs to be adjusted, the first adjustment components corresponding to each frame work simultaneously.

[0089] Preferably, each frame cooperates with a plurality of first adjustment components, and the plurality of first adjustment components corresponding to each frame are arranged along the length direction of the frame. Thus, the target area of ​​the frame can be adjusted. When the target area of ​​the target frame is adjusted, the first adjustment component corresponding to the target area works, and other first adjustment components corresponding to the target frame do not work. Among them, the spacing and number of the plurality of first adjustment components corresponding to each frame can be set according to different product needs, and are not specifically limited.

[0090] Preferably, the first adjustment component adjusts the corresponding frame to shrink, expand, translate or rotate in the horizontal direction; specifically, refer to Figure 3 and 5 As shown, the first adjustment mechanism adjusts the corresponding frame expansion; refer to Figure 4 and 6 As shown, the first adjustment mechanism adjusts the corresponding frame to retract; Figure 7 As shown, the first adjustment mechanism adjusts the corresponding frame translation; refer to Figure 8 As shown, the first adjustment mechanism adjusts the corresponding frame rotation.

[0091] Preferably, among the multiple first adjustment components corresponding to the same frame, at least two first adjustment components are included that apply forces in opposite directions to different positions of the same frame to adjust the frame 11 to rotate in the horizontal direction. Figure 8 As shown, the two ends of each frame are subjected to forces in opposite directions, thereby achieving the horizontal rotation of the frame 11.

[0092] Preferably, the adjustment range of the first adjustment component in the horizontal direction is 1 micron to 10 microns. Considering that the mask body 12 is a very thin single piece, and the mask opening formed on the mask body 12 is also very small and fine, the adjustment range of the first adjustment component in the horizontal direction is 1 micron to 10 microns, which can effectively improve the deviation or wrinkles of the mask body 12 and improve the pixel position accuracy of the evaporation. Exemplarily, the adjustment range of the first adjustment component in the horizontal direction is 1 micron, 2 microns, 3 microns, 5 microns, 8 microns, 10 microns, etc., which is not specifically limited.

[0093] Reference Fig. 9 As shown, in one embodiment, the first adjustment component includes a first electromagnetic unit 31 and a second electromagnetic unit 32 that are correspondingly arranged, one of the first electromagnetic unit 31 and the second electromagnetic unit 32 is connected to the frame, and the other of the first electromagnetic unit 31 and the second electromagnetic unit 32 is connected to the support seat 2; the evaporation equipment 100 also includes a controller, which is electrically connected to the first adjustment component, and the controller controls the attraction or repulsion force between the first electromagnetic unit 31 and the second electromagnetic unit 32 in each first adjustment component to adjust the frame 11 to retract, expand, translate or rotate in the horizontal direction.

[0094] Reference Fig.10 As shown, in one embodiment, the first adjustment component includes a first cylinder 33, the cylinder body of the first cylinder 33 is connected to the support base 2, and the telescopic rod of the first cylinder 33 is connected to the frame to adjust the frame 11 to retract, expand, translate or rotate in the horizontal direction.

[0095] In another embodiment, the first adjustment assembly includes a first manipulator, a base of the first manipulator is connected to one of the supporting edge and the frame, and an actuator of the first manipulator is connected to the other of the edge and the frame. The first manipulator directly applies a horizontal force to the frame 11 to cause the frame 11 to deform or displace, and the frame 11 can also be retracted, expanded, translated, or rotated in the horizontal direction.

[0096] Reference Fig.11 As shown, in one embodiment, the adjustment device includes a second adjustment mechanism, which is connected between the frame 11 and the support seat 2, and is used to apply a vertical force to the frame 11 to adjust the shape of the frame 11 in the vertical direction. The vertical direction Z is perpendicular to the plane where the surface of the frame 11 facing the support seat 2 is located (the XY plane in the figure). If the mask body 12 is offset or wrinkled, the second adjustment mechanism is used to apply a vertical force to the frame 11 to achieve orthogonal adjustment, that is, to lift up a local area of ​​the frame 11, thereby improving the offset or wrinkles of the mask body 12.

[0097] Preferably, the frame 11 includes a plurality of frames, which are connected end to end in sequence, and the second adjustment mechanism includes a plurality of second adjustment components, which respectively cooperate with corresponding frames and adjust the corresponding frames to rise and fall, so as to adjust the vertical shape of the frame 11. Each frame is adjusted by the corresponding second adjustment component, and when a local area of ​​the frame 11 needs to be lifted, the second adjustment component corresponding to the area works.

[0098] Preferably, each frame is matched with a plurality of second adjustment components, and the plurality of second adjustment components corresponding to each frame are arranged along the length direction of the frame, so that the target area of ​​the frame can be adjusted. Among them, the spacing and number of the plurality of second adjustment components corresponding to each frame can be set according to different product needs, and are not specifically limited.

[0099] Preferably, the second adjustment component adjusts the corresponding frame to rise and fall, and realizes the rising and falling of the corresponding frame by applying a vertical force on the corresponding frame, thereby achieving orthogonal adjustment.

[0100] Preferably, the second adjustment component has an adjustment range of 1 micron to 10 microns in the vertical direction, which can effectively improve the deviation or wrinkles of the mask body 12 and improve the pixel position accuracy of the evaporation. Exemplarily, the second adjustment component has an adjustment range of 1 micron, 2 microns, 3 microns, 5 microns, 8 microns, 10 microns, etc., which is not specifically limited.

[0101] Reference Fig.11 As shown, in one embodiment, the second adjustment component includes a second cylinder 41, the cylinder body of the second cylinder 41 is connected to the support base 2, the telescopic rod of the second cylinder 41 is connected to the frame, and the second cylinder 41 adjusts the vertical lifting of the frame 11 by extending and retracting the telescopic rod.

[0102] In another embodiment, the second adjustment component includes a lifting motor, the housing of the lifting motor is connected to the support base 2, the output shaft of the lifting motor is connected to the frame, and the lifting motor adjusts the frame 11 to rise and fall in the vertical direction by lifting and lowering the output shaft.

[0103] In another embodiment, the second adjustment component includes a second manipulator, the base of the second manipulator is connected to the support base 2 and one of the frame, the actuator of the second manipulator is connected to the support base 2 and the other of the frame 11, and the second manipulator directly applies a vertical force to the frame 11 to make the frame 11 rise and fall.

[0104] In one embodiment, the adjustment device includes a first adjustment mechanism and a second adjustment mechanism, the first adjustment mechanism is connected between the support seat 2 and the frame 11, the second adjustment mechanism is connected between the support seat 2 and the frame 11, the first adjustment mechanism is used to apply a force in the horizontal direction to the frame 11 to adjust the shape of the frame 11 in the horizontal direction, and the second adjustment mechanism is used to apply a force in the vertical direction to the frame 11 to adjust the shape of the frame 11 in the vertical direction. When applying a force only in the horizontal direction or the vertical direction cannot well improve the deviation or wrinkles of the mask body 12, the first adjustment mechanism and the second adjustment mechanism are required to work simultaneously, apply a force to the frame 11 in the horizontal direction and the vertical direction, and adjust the shape of the frame 11 in the horizontal direction and the vertical direction at the same time, so as to improve the deviation or wrinkles of the mask body 12.

[0105] In one embodiment, the frame 11 includes a plurality of frames, which are connected end to end in sequence, and the first adjustment mechanism includes a plurality of first adjustment components, which respectively cooperate with the corresponding frames and adjust the shapes of the corresponding frames in the horizontal direction; the second adjustment mechanism includes a plurality of second adjustment components, which respectively cooperate with the corresponding frames and adjust the shapes of the corresponding frames in the vertical direction.

[0106] Preferably, each frame cooperates with a plurality of first adjustment components, and the plurality of first adjustment components corresponding to each frame are arranged along the length direction of the frame.

[0107] Preferably, each frame cooperates with a plurality of second adjustment components, and the plurality of second adjustment components corresponding to each frame are arranged along the length direction of the frame.

[0108] Another embodiment of the present application discloses an evaporation method, which comprises the following steps:

[0109] Step S10 , when the evaporation device 100 in the above embodiment is used to perform evaporation on the mask plate 1 , an adjusting device is used to apply a force to the frame 11 of the mask plate 1 to adjust the shape of the frame 11 .

[0110] The evaporation method provided in the present application applies a force to the frame 11 through an adjusting device to adjust the shape of the frame 11, so as to adjust the mask body 12 when the mask body 12 is displaced or wrinkled. The displacement or wrinkling of the mask body 12 can be improved, the pixel position accuracy of the evaporation can be improved, the poor color mixing can be reduced, the mask plate 1 can be avoided from being re-stretched, the cost can be reduced, and the display yield of the display screen can be improved.

[0111] In one embodiment, the step of using the adjusting device to apply a force to the frame 11 of the mask plate 1 to adjust the shape of the frame 11 includes:

[0112] Using the first adjustment mechanism to apply a horizontal force to the frame 11 to adjust the shape of the frame 11 in the horizontal direction; and / or,

[0113] The second adjustment mechanism is used to apply a vertical force to the frame 11 to adjust the shape of the frame 11 in the vertical direction.

[0114] Specifically, the first adjustment mechanism is used to adjust the shape of the frame 11 in the horizontal direction, and the second adjustment mechanism is used to adjust the shape of the frame 11 in the vertical direction. The first adjustment mechanism and the second adjustment mechanism can work separately or simultaneously.

[0115] Preferably, the support seat 2 includes a plurality of support edges, the plurality of support edges include a first support edge 21, a second support edge 22, a third support edge 23 and a fourth support edge 24 connected end to end in sequence, the first support edge 21 is disposed opposite to the third support edge 23, the second support edge 22 is disposed opposite to the fourth support edge 24, the frame 11 includes a plurality of frames, the plurality of frames include a first frame 111, a second frame 112, a third frame 113 and a fourth frame 114 connected end to end in sequence, the first frame 111 is disposed opposite to the third frame 113, the second frame 112 is disposed opposite to the fourth frame 114, and the first adjustment mechanism is connected to at least one support edge and the corresponding frame. The evaporation method further includes the following steps:

[0116] When the frame 11 needs to be adjusted to retract, the first adjustment mechanism applies a force to the second frame 112 and the fourth frame 114 to deform the frame 11 inward; and / or the first adjustment mechanism applies a force to the second frame 112 and the fourth frame 114 to deform the frame 11 inward; refer to Figure 4 and 6 shown.

[0117] When the frame 11 needs to be adjusted to expand outward, the first adjustment mechanism applies a force to the second frame 112 and the fourth frame 114 to deform the frame 11 outward; and / or the first adjustment mechanism applies a force to the second frame 112 and the fourth frame 114 to deform the frame 11 outward; refer to Figure 3 and 5 shown.

[0118] When the frame 11 needs to be adjusted to move in translation, the first adjustment mechanism applies a force in the same direction to the first frame 111 and the third frame 113; and / or the first adjustment mechanism applies a force in the same direction to the second frame 112 and the fourth frame 114; Figure 7 shown.

[0119] Preferably, the first adjustment mechanism includes a plurality of first adjustment components, and the same frame corresponds to the plurality of first adjustment components; the evaporation method further includes:

[0120] When the rotation of the frame 11 needs to be adjusted, at least two first adjustment components are used to apply forces in opposite directions to different positions of the same frame; Figure 8 shown.

[0121] The structure and working mechanism of the regulating device involved in the evaporation method in this embodiment can refer to the above embodiments and will not be described again here.

[0122] Although the present application has been described in conjunction with specific embodiments thereof, many alternatives, modifications and variations of these embodiments will be apparent to those skilled in the art in light of the foregoing description.

[0123] It should be noted that the above describes some embodiments of the present application. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the above embodiments and still achieve the desired results. In addition, the processes depicted in the accompanying drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0124] The embodiments of the present application are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present application should be included in the scope of protection of the present application.

Claims

1. A vapor deposition device, characterized in that: include: The mask plate comprises a frame and a mask body, wherein the mask body is arranged on the frame; A support base, the support base supporting the frame; An adjusting device is connected to the frame and / or the supporting seat, and is used to apply a force to the frame to adjust the shape of the frame.

2. The evaporation device according to claim 1, characterized in that: The adjusting device comprises a first adjusting mechanism, the supporting seat comprises a plurality of supporting edges, the plurality of supporting edges comprise a first supporting edge, a second supporting edge, a third supporting edge and a fourth supporting edge connected end to end in sequence, the first supporting edge is arranged opposite to the third supporting edge, the second supporting edge is arranged opposite to the fourth supporting edge, the frame comprises a plurality of borders, the plurality of borders comprise a first border, a second border, a third border and a fourth border connected end to end in sequence, the first border is arranged opposite to the third border, the second border is arranged opposite to the fourth border, the first adjusting mechanism is connected to at least one of the supporting edges and the corresponding border, the first adjusting mechanism is used to apply a horizontal force to the frame to adjust the shape of the frame in the horizontal direction; wherein the horizontal direction is any direction parallel to the plane where the surface of the frame facing the side of the supporting seat is located; Preferably, the first adjustment mechanism is connected between the first supporting edge and the first frame, and between the third supporting edge and the third frame, and the first adjustment mechanism applies a force to the first frame and the third frame to deform inwardly of the frame, so as to adjust the frame to retract; And / or, the first adjustment mechanism is connected between the second supporting edge and the second frame, and between the fourth supporting edge and the fourth frame, and the first adjustment mechanism applies a force to the second frame and the fourth frame to deform inwardly of the frame, so as to adjust the frame to retract; Preferably, the first adjustment mechanism is connected between the first supporting edge and the first frame, and between the third supporting edge and the third frame, and the first adjustment mechanism applies a force to the first frame and the third frame to deform outwards of the frame, so as to adjust the outward expansion of the frame; And / or, the first adjustment mechanism is connected between the second supporting edge and the second frame, and between the fourth supporting edge and the fourth frame, and the first adjustment mechanism applies a force to the second frame and the fourth frame to deform outwards of the frame, so as to adjust the outward expansion of the frame; Preferably, the first adjustment mechanism is connected between the first supporting edge and the first frame, and between the third supporting edge and the third frame, and the first adjustment mechanism applies a force in the same direction to the first frame and the third frame to adjust the translation of the frame; And / or, the first adjustment mechanism is connected between the second supporting edge and the second frame, and between the fourth supporting edge and the fourth frame, and the first adjustment mechanism applies a force in the same direction to the second frame and the fourth frame to adjust the frame translation; Preferably, the first adjustment mechanism is connected between the first supporting edge and the first frame, between the second supporting edge and the second frame, between the third supporting edge and the third frame, and between the fourth supporting edge and the fourth frame, and the first adjustment mechanism adjusts the frame to rotate in the horizontal direction.

3. The evaporation device according to claim 2, characterized in that: The first adjustment mechanism includes a plurality of first adjustment components, each of which cooperates with the corresponding frame and adjusts the shape of the corresponding frame in the horizontal direction; Preferably, each of the frames cooperates with a plurality of the first adjustment components, and the plurality of the first adjustment components corresponding to each of the frames are arranged along the length direction of the frame; Preferably, among the plurality of first adjustment components corresponding to the same frame, at least two first adjustment components are included for applying forces in opposite directions to different positions of the same frame, so as to adjust the frame to rotate in the horizontal direction; Preferably, the adjustment range of the first adjustment component in the horizontal direction is 1 micron to 10 microns; Preferably, the first adjustment assembly includes a first electromagnetic unit and a second electromagnetic unit that are correspondingly arranged, one of the first electromagnetic unit and the second electromagnetic unit is connected to the frame, and the other of the first electromagnetic unit and the second electromagnetic unit is connected to the support seat; The evaporation equipment also includes: a controller electrically connected to the first adjusting component, wherein the controller controls the first electromagnetic unit and the second electromagnetic unit in each of the first adjusting components to generate an attractive force or a repulsive force; Preferably, the first adjustment assembly comprises a first cylinder, a cylinder body of the first cylinder is connected to the support seat, and a telescopic rod of the first cylinder is connected to the frame; Preferably, the first adjustment assembly includes a first manipulator, a base of the first manipulator is connected to one of the supporting edge and the frame, and an actuator of the first manipulator is connected to the other of the supporting edge and the frame.

4. The evaporation device according to any one of claims 1 to 3, characterized in that: The adjusting device comprises a second adjusting mechanism, the second adjusting mechanism is connected between the frame and the support seat, and the second adjusting mechanism is used to apply a vertical force to the frame to adjust the shape of the frame in the vertical direction; wherein the vertical direction is perpendicular to the plane where the surface of the frame facing the support seat is located; preferably, the frame comprises a plurality of frames, and the plurality of frames are connected end to end in sequence, and the second adjusting mechanism comprises a plurality of second adjusting components, and the second adjusting components respectively cooperate with the corresponding frames and adjust the corresponding frames to rise and fall, so as to adjust the shape of the frame in the vertical direction; Preferably, each of the frames cooperates with a plurality of the second adjustment components, and the plurality of the second adjustment components corresponding to each of the frames are arranged along the length direction of the frame; Preferably, the adjustment range of the second adjustment component in the vertical direction is 1 micron to 10 microns.

5. The evaporation device according to claim 4, characterized in that: The second adjustment assembly includes a second cylinder, a cylinder body of the second cylinder is connected to the support seat, and a telescopic rod of the second cylinder is connected to the frame; Preferably, the second adjustment component comprises a lifting motor, a housing of the lifting motor is connected to the support seat, and an output shaft of the lifting motor is connected to the frame; Preferably, the second adjustment assembly includes a second manipulator, a base of the second manipulator is connected to one of the support base and the frame, and an actuator of the second manipulator is connected to the other of the support base and the frame.

6. The evaporation device according to claim 1, characterized in that: The adjusting device includes a first adjusting mechanism and a second adjusting mechanism, the first adjusting mechanism is connected between the support seat and the frame, the second adjusting mechanism is connected between the support seat and the frame, the first adjusting mechanism is used to apply a horizontal force to the frame to adjust the shape of the frame in the horizontal direction, and the second adjusting mechanism is used to apply a vertical force to the frame to adjust the shape of the frame in the vertical direction; wherein the horizontal direction is any direction parallel to the plane where the surface of the frame facing the support seat side is located; and the vertical direction is perpendicular to the plane where the surface of the frame facing the support seat side is located.

7. The evaporation device according to claim 6, characterized in that: The frame includes a plurality of frames, which are connected end to end in sequence; the first adjustment mechanism includes a plurality of first adjustment components, which are respectively matched with the corresponding frames and adjust the shape of the corresponding frames in the horizontal direction; the second adjustment mechanism includes a plurality of second adjustment components, which are respectively matched with the corresponding frames and adjust the shape of the corresponding frames in the vertical direction; Preferably, each of the frames cooperates with a plurality of the first adjustment components, and the plurality of the first adjustment components corresponding to each of the frames are arranged along the length direction of the frame; Preferably, each of the frames cooperates with a plurality of the second adjustment components, and the plurality of the second adjustment components corresponding to each of the frames are arranged along the length direction of the frame.

8. The evaporation device according to any one of claims 6 to 7, characterized in that: The evaporation equipment also includes: The substrate to be evaporated is arranged on one side of the mask plate; The evaporation source is arranged on a side of the mask plate away from the substrate to be evaporated.

9. A vapor deposition method, characterized in that: include: When the evaporation device according to any one of claims 1 to 8 is used to perform evaporation on the mask plate, an adjusting device is used to apply a force to the frame of the mask plate to adjust the shape of the frame.

10. The vapor deposition method according to claim 9, wherein: The step of applying a force to the frame of the mask plate by using an adjusting device to adjust the shape of the frame includes: Using a first adjustment mechanism to apply a horizontal force to the frame to adjust the shape of the frame in the horizontal direction; and / or, Using a second adjustment mechanism to apply a vertical force to the frame to adjust the shape of the frame in the vertical direction; Preferably, the support seat includes a plurality of support edges, the plurality of support edges include a first support edge, a second support edge, a third support edge and a fourth support edge connected end to end in sequence, the first support edge is arranged opposite to the third support edge, and the second support edge is arranged opposite to the fourth support edge, the frame includes a plurality of frames, the plurality of frames include a first frame, a second frame, a third frame and a fourth frame connected end to end in sequence, the first frame is arranged opposite to the third frame, and the second frame is arranged opposite to the fourth frame, the first adjustment mechanism is connected to at least one of the support edges and the corresponding frame, the first adjustment mechanism is connected between the first support edge and the first frame, between the second support edge and the second frame, between the third support edge and the third frame, and between the fourth support edge and the fourth frame, the first adjustment mechanism is connected to at least one of the support edges and the corresponding frame; the evaporation method further includes: When the frame needs to be adjusted to retract, a force is applied to the second frame and the fourth frame to deform the frame inwardly through the first adjustment mechanism; and / or the first adjustment mechanism applies a force to the second frame and the fourth frame to deform the frame inwardly; When the outward expansion of the frame needs to be adjusted, a force is applied to the second frame and the fourth frame to deform outward of the frame through the first adjustment mechanism; and / or the first adjustment mechanism applies a force to the second frame and the fourth frame to deform outward of the frame; When the frame translation needs to be adjusted, the first adjustment mechanism applies a force in the same direction to the first frame and the third frame; and / or the first adjustment mechanism applies a force in the same direction to the second frame and the fourth frame; Preferably, the first adjustment mechanism includes a plurality of first adjustment components, and the same frame corresponds to a plurality of the first adjustment components; the evaporation method further includes: When the rotation of the frame needs to be adjusted, forces in opposite directions are applied to different positions of the same frame through at least two of the first adjustment components.

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