Seed crystal transition chuck for single crystal furnace

Abstract

The invention relates to a seed crystal transition chuck for a single crystal furnace. The seed crystal transition chuck for the single crystal furnace comprises a transition chuck body with a cylindrical upper part and a truncated cone-shaped lower part; the via hole, the conical placing hole and the positioning hole are sequentially formed in the transition chuck body from top to bottom; wherein the outside of the transition chuck body is matched with the hollow inside of the single crystal chuck; the aperture of the via hole is consistent with the aperture of the upper end of the conical placing hole, the aperture of the lower end of the conical placing hole is consistent with the aperture of the positioning hole, the conical placing hole is matched with the large end of the conical seed crystal, and the positioning hole is matched with the small end of the conical seed crystal. The conical seed crystal is placed in the transition chuck body, then the transition chuck body is placed in the single crystal chuck, and then the single crystal chuck is assembled and connected with the heavy punch. Therefore, when the conical seed crystal is mounted and dismounted, only the seed crystal needs to be taken out from the interior of the transition chuck body, the dismounting and mounting are convenient, and the maintenance difficulty is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of preparing single crystals by Czochralski method, and in particular to a seed crystal transition chuck for a single crystal furnace. Background Art

[0002] The Czochralski method (CZ method), also known as the Czochralski method, is a widely used method for preparing single crystals. The principle of preparing single crystals by the Czochralski method is based on the effect of tensile stress. By heating a certain material to the melting point and then rapidly stretching it under specific conditions, the material becomes a single crystal structure. During the stretching process, the raw material molecules are arranged in an orderly manner under the action of the tensile force, forming a single crystal structure.

[0003] In the conventional technology, the conical seed crystal and the single crystal chuck are connected and fixed by cutting grooves on the conical seed crystal and the single crystal chuck and inserting a graphite rod into the grooves. However, this connection method is inconvenient to disassemble and assemble, resulting in great difficulty in maintenance. Summary of the invention

[0004] In order to solve or partially solve the problems existing in the related art, the present application provides a seed crystal transition chuck for a single crystal furnace.

[0005] To achieve the above objectives, this application is implemented through the following technical solutions:

[0006] A seed crystal transition chuck for a single crystal furnace, the seed crystal transition chuck for a single crystal furnace comprising:

[0007] The transition chuck body has a cylindrical upper portion and a frustum-shaped lower portion;

[0008] A through hole, a tapered placement hole and a positioning hole are sequentially opened in the transition chuck body from top to bottom;

[0009] Wherein, the exterior of the transition chuck body matches the interior hollowing of the single crystal chuck;

[0010] The aperture of the via hole is consistent with the upper aperture of the conical placement hole, the lower aperture of the conical placement hole is consistent with the aperture of the positioning hole, and the conical placement hole matches the large end of the conical seed crystal, and the positioning hole matches the small end of the conical seed crystal.

[0011] Optionally, a vent hole is provided on the transition chuck body, and the vent hole is located above the conical placement hole;

[0012] The axis of the vent hole and the axis of the via hole are perpendicular to each other.

[0013] Optionally, the angle between the conical surface of the conical placement hole and the horizontal plane ranges from 30° to 80°.

[0014] Optionally, the length of the tapered placement hole is shorter than the length of the positioning hole, and the length of the positioning hole is shorter than the length of the via hole.

[0015] Optionally, the transition chuck body is integrally formed.

[0016] Optionally, the transition chuck body is made of high temperature resistant material.

[0017] Optionally, two ventilation holes are provided.

[0018] The beneficial effects of the present application are as follows: when in use, the conical seed crystal is placed in the transition chuck body, the large head of the conical seed crystal is fitted into the conical placement hole, and the small head of the conical seed crystal is fitted into the positioning hole, and then the transition chuck body is placed in the single crystal chuck, and then the single crystal chuck is assembled and connected with the heavy hammer. In this way, the installation of the conical seed crystal is realized, and when disassembling, the seed crystal only needs to be taken out from the inside of the transition chuck body, which is convenient for disassembly and assembly and reduces the difficulty of maintenance.

[0019] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above and other objects, features and advantages of the present application will become more apparent through a more detailed description of exemplary embodiments of the present application in conjunction with the accompanying drawings, wherein the same reference numerals generally represent the same components in the exemplary embodiments of the present application.

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of a seed crystal transition chuck for a single crystal furnace shown in an embodiment of the present application;

[0022] Figure 2 It is a front view of a seed crystal transition chuck for a single crystal furnace shown in an embodiment of the present application;

[0023] Figure 3 It is a cross-sectional view of a seed crystal transition chuck for a single crystal furnace shown in an embodiment of the present application.

[0024] Reference numerals: 1 transition chuck body, 2 through hole, 3 conical placement hole, 4 positioning hole, 5 air vent. DETAILED DESCRIPTION

[0025] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0026] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0027] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific situation.

[0028] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0029] In the present invention, the terms "one embodiment", "some embodiments", "examples", "specific examples" or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0030] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

[0031] The above description is only an optional embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

[0032] In order to make the purpose, technical solutions and beneficial effects of the present application clearer, the preferred embodiments of the present application will be described in detail below in conjunction with the accompanying drawings to facilitate understanding by technical personnel.

[0033] Embodiment 1:

[0034] See also Figures 1 to 3 , a seed crystal transition chuck for a single crystal furnace, the seed crystal transition chuck for a single crystal furnace comprising:

[0035] The transition chuck body 1 has a cylindrical upper portion and a truncated cone lower portion;

[0036] A through hole 2, a tapered placement hole 3 and a positioning hole 4 are sequentially provided in the transition chuck body 1 from top to bottom;

[0037] The exterior of the transition chuck body 1 matches the interior hollowing of the single crystal chuck;

[0038] The aperture of the via hole 2 is consistent with the upper aperture of the conical placement hole 3, the lower aperture of the conical placement hole 3 is consistent with the aperture of the positioning hole 4, and the conical placement hole 3 matches the large end of the conical seed crystal, and the positioning hole 4 matches the small end of the conical seed crystal.

[0039] Specifically, the transition chuck body 1 is designed to be cylindrical at the top and truncated at the bottom, so as to be convenient for adapting to the internal hollow shape of the existing single crystal chuck. The aperture of the through hole 2 matches the diameter of the large head of the conical seed crystal to facilitate the entry and exit of the conical seed crystal. The conical placement hole 3 matches the large head of the conical seed crystal, and the positioning hole 4 matches the small head of the conical seed crystal, which can improve the stability of the conical seed crystal when it is fixed.

[0040] When in use, the conical seed crystal is placed in the transition chuck body 1, the large end of the conical seed crystal is fitted into the conical placement hole 3, and the small end of the conical seed crystal is fitted into the positioning hole 4, and then the transition chuck body 1 is placed in the single crystal chuck, and then the single crystal chuck is assembled and connected with the heavy hammer. In this way, the installation of the conical seed crystal is realized, and when disassembling, the seed crystal only needs to be taken out from the inside of the transition chuck body 1, which is convenient for disassembly and assembly, and reduces the difficulty of maintenance.

[0041] In addition, the seed crystal transition chuck of the present application is small and light, easy to process, and has sufficient adaptability when changing processes.

[0042] Embodiment 2:

[0043] See also Figures 2 to 3 , based on the first embodiment, optionally, a vent hole 5 is provided on the transition chuck body 1, and the vent hole 5 is located above the conical placement hole 3;

[0044] The axis of the air hole 5 and the axis of the through hole 2 are perpendicular to each other.

[0045] Specifically, the air holes 5 are arranged above the conical placement hole 3 to guide the flow of gas in the single crystal furnace, so that the gas flow around the seed crystal is more uniform and stable. The air holes 5 can affect the cold zone position of the seed crystal, so that the oxidation area is reduced and moved upward, thereby reducing the risk of the seed crystal breaking due to oxidation. The air holes 5 can also serve as a channel to remove the air inside the transition chuck body 1, ensuring that the seed crystal grows in a purer environment. By providing the air holes 5, the growth environment of the seed crystal is optimized, and the growth quality and life of the seed crystal are improved.

[0046] Optionally, the angle between the conical surface of the conical placement hole 3 and the horizontal plane ranges from 30° to 80°.

[0047] Specifically, the large end of the conical seed crystal is conical, and the angles between the conical surface and the horizontal plane are different for seed crystals of different specifications. The angle between the conical surface of the conical placement hole 3 and the horizontal plane is set to 30° to 80° to meet the needs of conical seed crystals of different specifications, thereby effectively expanding the application of the CZ single crystal furnace.

[0048] Optionally, the length of the tapered placement hole 3 is smaller than the length of the positioning hole 4 , and the length of the positioning hole 4 is smaller than the length of the through hole 2 .

[0049] Specifically, the lengths of the conical placement hole 3 and the positioning hole 4 are designed according to the size of the conical seed crystal. Since the length of the large end of the seed crystal is smaller than the length of the small end, the length of the conical placement hole 3 is set to be smaller than the length of the positioning hole 4, so as to improve the compatibility of the conical seed crystal with the conical placement hole 3 and the positioning hole 4. At the same time, in order to facilitate the opening and diversion of the vent hole 5, the length of the via hole 2 is designed to be larger.

[0050] Optionally, the transition chuck body 1 is integrally formed.

[0051] Specifically, the transition chuck body 1 is integrally formed to reduce stress concentration, enhance structural strength, and thereby increase the service life of the transition chuck.

[0052] Optionally, the transition chuck body 1 is made of high temperature resistant material.

[0053] Specifically, considering the high temperature in the single crystal furnace, in order to ensure the performance and service life of the transition chuck, the transition chuck body 1 is made of high temperature resistant material, which can be molybdenum material or graphite material.

[0054] Optionally, two air holes 5 are provided.

[0055] Specifically, the two air holes 5 are provided to further enhance the air permeability and flow guiding effect, further optimize the growth environment of the seed crystal, and improve the growth quality and life of the seed crystal.

[0056] It should be noted that structures and / or installation methods not described in detail in this application are known to those skilled in the art in combination with common knowledge and / or prior art, and are not the focus of disclosure in this application and will not be further elaborated herein.

[0057] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solution of the present application rather than to limit it. Although the present application has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present application; the dimensions of the drawings are not related to the specific objects, and the dimensions of the objects can be changed arbitrarily.

Claims

1. A seed crystal transition chuck for a single crystal furnace, characterized in that: The seed crystal transition chuck for the single crystal furnace comprises: The transition chuck body (1) has a cylindrical upper portion and a truncated cone lower portion; A through hole (2), a tapered placement hole (3) and a positioning hole (4) are sequentially provided in the transition chuck body (1) from top to bottom; The exterior of the transition chuck body (1) matches the interior hollowing of the single crystal chuck; The aperture of the through hole (2) is consistent with the aperture of the upper end of the conical placement hole (3), the aperture of the lower end of the conical placement hole (3) is consistent with the aperture of the positioning hole (4), and the conical placement hole (3) matches the large end of the conical seed crystal, and the positioning hole (4) matches the small end of the conical seed crystal.

2. The seed crystal transition chuck for a single crystal furnace according to claim 1, characterized in that: The transition chuck body (1) is provided with an air vent (5), and the air vent (5) is located above the conical placement hole (3); The axis of the air hole (5) and the axis of the through hole (2) are perpendicular to each other.

3. The seed crystal transition chuck for a single crystal furnace according to claim 1, characterized in that: The angle between the conical surface of the conical placement hole (3) and the horizontal plane ranges from 30° to 80°.

4. The seed crystal transition chuck for a single crystal furnace according to claim 1 or 3, characterized in that: The length of the tapered placement hole (3) is smaller than the length of the positioning hole (4), and the length of the positioning hole (4) is smaller than the length of the through hole (2).

5. The seed crystal transition chuck for a single crystal furnace according to claim 1, characterized in that: The transition chuck body (1) is integrally formed.

6. The seed crystal transition chuck for a single crystal furnace according to claim 5, characterized in that: The transition chuck body (1) is made of high temperature resistant material.

7. The seed crystal transition chuck for a single crystal furnace according to claim 2, characterized in that: The air holes (5) are provided with two.

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