A thin-film online heater and heating control system

Abstract

This invention discloses a thin-film online heater and a heating control system. The thin-film online heater includes at least two partition plates, a heating element, and a water pipe. The partition plates are disposed on the water pipe, and the heating element is a thin-film electric heating element, which is arranged in a spiral shape between the two partition plates. The thin-film online heater of this invention uses a spiral-shaped thin-film electric heating element, resulting in a large heating area, rapid temperature rise, and improved heating efficiency. Furthermore, the thin-film online heater of this invention uses a thin-film electric heating element instead of an inert plastic-coated resistance wire for heating, preventing the accumulation of resistance wire caused by liquid flow, avoiding localized high temperatures, and extending service life.

Description

Technical Field

[0001] This invention relates to heaters, and more particularly to a thin-film in-line heater and heating control system for semiconductor wet process equipment. Background Technology

[0002] Semiconductor wet processing equipment refers to equipment that employs wet processing methods in the manufacturing of semiconductor devices. Wet processing is a technology that involves chemical reactions in a liquid environment, primarily used in processes such as cleaning, etching, and post-etching cleaning. Heating is a key influencing factor in wet processing, offering numerous advantages:

[0003] (1) Improve the removal of chemical residues and particles

[0004] Heated liquids are more corrosive, making them more effective in rinsing applications than room-temperature liquids. Pre-diffused cleaning chemicals and photoresist in wafers are more soluble in the liquid, making them easier to remove. Heated liquid cleaning is a more efficient and economical method, while also reducing the use and emissions of hazardous chemicals.

[0005] (2) Reduce fluid consumption by up to 70%

[0006] Heated liquid molecules possess a higher level of energy than those at room temperature. When transferred to a wafer surface, the high translational velocity of the liquid rapidly dissolves and dilutes process chemicals on the wafer. This significantly reduces the amount of liquid required for effective wafer rinsing.

[0007] (3) Reduce bacterial contamination

[0008] Wet processes provide a favorable environment for bacterial growth. Common causes include low or intermittent liquid flow, and cross-contamination between airborne bacteria and filters. Heating the liquid can reduce bacterial growth. For example, by heating the liquid to 90°C, internal piping can be sterilized without disassembling system components or using potentially hazardous chemicals.

[0009] (4) Increase production capacity

[0010] By using heated liquid, wafer rinsing time can be reduced by up to 60-80%.

[0011] Existing heaters suitable for wet processing generally use an inert plastic (PFA or PTFE) to encapsulate the resistance wire, preventing metal ions or other contaminants from entering the liquid medium and ensuring the ultra-high purity of the liquid during the process. When heating strong acids or corrosive liquids, the inert plastic encapsulation process can also prevent damage to the metal heating alloy. However, the effective heating area of ​​the resistance wire is relatively small, the heating speed is slow, and the large cross-section results in high fluid resistance, which can easily push the resistance wire to shift, causing it to accumulate and leading to localized high temperatures. Since the upper limit of the operating temperature of inert plastic is only about 250°C, the inert plastic encapsulating the resistance wire may be damaged, exposing the resistance wire directly to the process fluid, contaminating the fluid pipelines during the process, and causing huge losses. Summary of the Invention

[0012] To address the shortcomings of existing technologies, this invention provides a thin-film online heater that uses a thin-film electric heating element instead of an inert plastic-coated resistance wire for heating. This prevents the accumulation of resistance wire caused by liquid flow, avoids localized high temperatures, overcomes the problem of small heating area, and improves the heating speed.

[0013] The present invention provides a thin-film online heater, comprising: at least two partition plates, a heating element, and a water pipe, wherein the partition plates are disposed on the water pipe, and the heating element is a thin-film electric heating element and is disposed in a spiral shape between the two partition plates.

[0014] Furthermore, the spiral central axis of the aforementioned thin-film electric heating element is set as an eccentric structure that is not a circular center.

[0015] Furthermore, the aforementioned thin-film electric heating element includes at least two insulating layers and a heating sheet or heating film pressed between the two insulating layers.

[0016] Furthermore, the aforementioned partition plate is circular or a near-circular polygon, with a through hole in the center of the partition plate, through which a water pipe passes and is fixedly connected to the partition plate.

[0017] Furthermore, the aforementioned partition plate is a cross-shaped, star-shaped, or wheel-shaped frame structure centered on the through hole.

[0018] Furthermore, the frame structure is provided with multiple spiral-shaped slots on the upper and lower sides, and the slots are positioned in the same way on the upper and lower sides. The thin film heating element is fixed between the partition plates in a spiral shape through the slots.

[0019] Furthermore, the periphery of the aforementioned partition plate is provided with multiple notches, and multiple support strips are accommodated in the multiple notches.

[0020] Furthermore, the aforementioned heating sheet or heating film consists of two layers, and the insulating layer consists of at least three layers. At least one insulating layer is provided between the two heating sheets or heating films, and insulating layers are provided on the outer sides of the heating sheets or heating films respectively.

[0021] Furthermore, the aforementioned insulating layer is made of fluoroplastic, silicone rubber, polyimide, or PET; the heating sheet or heating film is a metal heating film, heating element, or heating wire.

[0022] Furthermore, the plurality of partition plates and the electro-thermal heating element are in the form of multiple long cylindrical sections, and the electro-thermal heating element is spirally mounted on the partition plates in segments.

[0023] Preferably, there are multiple spiral-shaped thin-film electric heating elements.

[0024] Furthermore, the aforementioned thin-film in-line heater is a heater used in the in-line heating process of semiconductor wet process equipment.

[0025] On the other hand, the present invention provides a heating control system, including any of the above-described thin-film online heaters.

[0026] Preferably, the heating control system further includes: a logic control module for controlling the temperature of the heater; a power safety module for providing power and overcurrent protection for the heating system; a status detection module for detecting the temperature of the heater; and a data monitoring module for receiving and displaying the temperature information reported by the logic control module.

[0027] Preferably, the above-mentioned heating control system is a control system for the online heating process of semiconductor wet process equipment.

[0028] As can be seen from the above solutions, the advantages of the present invention are:

[0029] The thin-film online heater of this invention uses a spiral-shaped thin-film electric heating element, which has a large heating area, rapid heating, and improved heating efficiency. Furthermore, the thin-film online heater of this invention uses a thin-film electric heating element instead of an inert plastic-coated resistance wire, preventing the resistance wire from accumulating due to liquid flow, avoiding localized high temperatures, and extending service life.

[0030] The multi-segment elongated cylindrical heater of this invention can control heating at different gradients to prevent dry burning.

[0031] The heating control system of the present invention realizes heater temperature control through a logic control module, which has high temperature control accuracy, fast response speed and reduced delay. Attached Figure Description

[0032] Figure 1 This is a perspective view of a thin-film in-line heater according to an embodiment of the present invention;

[0033] Figure 2 This is a front view of a thin-film in-line heater according to an embodiment of the present invention;

[0034] Figure 3 This is a top view of a thin-film in-line heater according to an embodiment of the present invention;

[0035] Figure 4 This is a cross-sectional view of another embodiment of the heating element of the present invention;

[0036] Figure 5 This is a schematic diagram of a heating control system according to an embodiment of the present invention;

[0037] Figure 6 This is a schematic diagram of the heating control system structure according to another embodiment of the present invention;

[0038] Among them, the attached reference numerals

[0039] 1-Thin-film online heater;

[0040] 10-Separator;

[0041] 100 - Through hole;

[0042] 101 - Rice-shaped frame structure;

[0043] 1010 - Card Slot;

[0044] 102- Gap;

[0045] 11-Heating element;

[0046] 110 - Heating film;

[0047] 111-Insulation layer

[0048] 12-Water pipe;

[0049] 13-Supporting bar;

[0050] 2,2'-Heating control system;

[0051] 20' - Logic control module;

[0052] 21'-Power safety module;

[0053] 22' - Status detection module;

[0054] 23'-Data monitoring module;

[0055] 20-PLC logic controller;

[0056] 200 - Water volume;

[0057] 201-Water pressure;

[0058] 202 - Pressure relief valve;

[0059] 21-Bidirectional thyristor;

[0060] 22-Temperature switch;

[0061] 23-Temperature detection device;

[0062] 24-hour AC power supply;

[0063] 25-AC / DC power supply;

[0064] 26-Current detection device;

[0065] 27-Safety relay;

[0066] 28-HMI data monitoring;

[0067] 29-Contactor. Detailed Implementation

[0068] The technical solution of the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments to further understand the purpose, solution and effect of the present invention, but it is not intended to limit the scope of protection of the appended claims.

[0069] References to "embodiment," "another embodiment," "this embodiment," etc., in the specification refer to embodiments that may include specific features, structures, or characteristics, but not every embodiment must include these specific features, structures, or characteristics. Furthermore, such expressions do not refer to the same embodiment. Moreover, when describing specific features, structures, or characteristics in connection with embodiments, whether or not explicitly described, it is indicated that incorporating such features, structures, or characteristics into other embodiments is within the knowledge of those skilled in the art.

[0070] The specification and subsequent claims use certain terms to refer to specific components or parts. Those skilled in the art will understand that users or manufacturers may use different names or terms to refer to the same component or part. This specification and subsequent claims do not distinguish components or parts by differences in name, but rather by differences in function. The terms "comprising" and "including" used throughout the specification and subsequent claims are open-ended and should be interpreted as "including but not limited to". Furthermore, the term "connection" here includes any direct and indirect electrical connection means. Indirect electrical connection means include connections made through other means.

[0071] It should be noted that in the description of this invention, the terms "lateral", "longitudinal", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and "about", or "approximately", "substantially", "left and right", etc., indicating the orientation or positional relationship or parameters, are all based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, a specific size, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0072] like Figures 1 to 3 As shown, a thin-film online heater 1 (hereinafter referred to as heater 1) according to an embodiment of the present invention can be used in the online heating process of semiconductor wet process equipment. The heater 1 includes: a plurality of partition plates 10, a heating element 11, and a water pipe 12. The plurality of partition plates 10 are disposed on the water pipe 12, and the heating element 11 is a thin-film electric heating element, which is arranged in a coiled spiral shape between two partition plates 10.

[0073] Heater 1 uses a thin-film electric heating element in a spiral shape, which has a large heating area, heats up quickly, and improves heating efficiency.

[0074] In this embodiment, in order to better fix the heating element 11 on the partition plate 10, preferably, the spiral central axis of the thin film electric heating element is set as an eccentric structure that is not a circular center.

[0075] In this embodiment, the aforementioned thin-film electric heating element further includes at least two insulating layers and a heating sheet or heating film pressed between the two insulating layers. Preferably, the insulating layer is fluoroplastic, silicone rubber, polyimide, or PET, and the fluoroplastic may be, for example, polytetrafluoroethylene, tetrafluoroethylene, polyvinylidene fluoride, or fluorinated ethylene propylene; the heating sheet or heating film is a metal heating film, heating element, or heating wire.

[0076] Because existing heaters encase each heating wire in an inert plastic film, they occupy significantly more space in the same container than the thin-film online heater of this invention. Therefore, the heater of this invention is smaller in size and has a larger effective volume. Furthermore, compared to traditional heating methods, the heating film can transfer heat to the object being heated more quickly, achieving rapid heating. Simultaneously, the heating effect of the heating film is very uniform, avoiding localized overheating or underheating that occurs in traditional heating methods. In addition, the heating film has very low energy consumption, achieving energy conservation and environmental protection.

[0077] In this embodiment, the partition plate 10 is circular or other polygonal (not shown in the figure). A through hole 100 is provided in the middle of the partition plate 10. The water pipe 12 passes through the through hole 100 and is connected to the partition plate 10. The connection between the water pipe 12 and the partition plate 10 can be, for example, by welding, gluing, or screws. In order to correspond with the spiral center of the thin-film electric heating element, the through hole 100 is located at an off-center position on the partition plate 10.

[0078] In this embodiment, the partition plate 10 is configured as a star-shaped frame structure 101 with the through hole 100 as the center point, or it can be a cross-shaped or wheel-shaped frame structure (not shown in the figure).

[0079] In this embodiment, a plurality of spiral-shaped slots 1010 are provided on the upper and lower sides of the cross-shaped frame structure 101 of the partition plate 10, and the positions of the plurality of slots 1010 on the upper and lower sides are the same. The heating element 11 is fixed in a spiral shape between the partition plates 10 through the slots 1010. The spiral structure of the heating element 11 can make the heating element 11 more stable and increase the heating area of ​​the heater 1.

[0080] In this embodiment, preferably, the partition plate 10 has six notches 102 around its perimeter, and six support bars 13 are accommodated in the six notches 102 and fixed to the partition plate 10 with fasteners such as screws and clips. The number of notches 102 is not limited, but the number of support bars 13 should be the same as the number of notches 102. The support bars 13 and notches 102 work together to provide secondary fixation for the partition plate 10.

[0081] In this embodiment, the heater 1 has a multi-segment long cylindrical structure, with each segment corresponding to two partition plates 10. The heating element 11 is spirally arranged between the two partition plates 10. The spiral heating element 11 has multiple segments, and there are multiple partition plates 10; the specific number can be selected according to actual needs. This embodiment uses four partition plates 10 and three heating elements 11 as an example. The upper, middle, and lower segments can achieve segmented heating, thereby controlling different heating gradients and preventing dry burning.

[0082] In another embodiment, optionally, multiple heating elements 11 may be provided between the two partition plates 10, and these heating elements 11 are all spirally coiled and arranged parallel to each other between the two partition plates 10. The number of heating elements 11 can be selected according to the actual situation.

[0083] Figure 4This is a cross-sectional schematic diagram of another embodiment of the heating element 11. In this embodiment, the heating element 11 is composed of three insulating layers 111 and two heating films 110 or heating sheets (not shown), or other modified structures, and satisfies the following conditions: at least one insulating layer 111 is provided between the two heating sheets or heating films 110, and insulating layers 111 are respectively provided on the outer sides of the heating sheets or heating films 110. Preferably, the insulating layer is fluoroplastic, silicone rubber, polyimide, or PET. Fluoroplastics can be, for example, polytetrafluoroethylene, tetrafluoroethylene, polyvinylidene fluoride, or fluorinated ethylene propylene; the heating sheets or heating films are metal heating films, heating plates, or heating wires.

[0084] The following is a heating control system embodiment corresponding to the above-described thin-film online heater embodiment. This embodiment can be implemented in conjunction with the above embodiments. The relevant technical details mentioned in the above embodiments remain valid in this embodiment, and will not be repeated here to avoid repetition. Correspondingly, the relevant technical details mentioned in this embodiment can also be applied to the above embodiments.

[0085] During the heating process in semiconductor wet cleaning equipment, the liquid temperature can vary significantly due to seasonal and environmental factors. If the liquid temperature is not well controlled, it is difficult to achieve stable and repeatable cleaning results. Therefore, this invention also discloses a heating control system.

[0086] like Figure 5 The diagram shows a heating control system 2' (hereinafter referred to as system 2') according to an embodiment of the present invention, used for heating control in semiconductor wet process equipment. System 2' includes a heater 1, a logic control module 20', a power safety module 21', a status detection module 22', and a data monitoring module 23'. The logic control module 20' is used to control the temperature of the heater 1; the power safety module 21' provides power and overcurrent protection for system 2'; the status detection module 22' detects the temperature of the heater 1; and the data monitoring module 23' receives and displays the temperature information reported by the logic control module 20'.

[0087] Specifically, the logic control module 20' controls the operation of the heater 1, such as starting and stopping, through a contactor switch, etc. The status detection module 22' detects the temperature information of the heater 1 and feeds it back to the logic control module 20'. If the set value of the status information (e.g., temperature) is met, the heater 1 is started for heating; if the set value is not met (e.g., the temperature exceeds the set value), the heater 1 is turned off for heating. Additionally, the power safety module 21' provides power to the heating system 2' and is equipped with safety devices, such as relays, which automatically disconnect when excessive current occurs in the heater 1 circuit to protect the circuit. The data monitoring module 23' is bidirectionally connected to the logic control module 20' and can monitor the temperature information in the logic control module 20' in real time.

[0088] like Figure 6 The diagram shows a heating control system 2 (hereinafter referred to as System 2) according to another embodiment of the present invention, used for heating control in semiconductor wet process equipment. System 2 includes multiple heaters 1. Each heater 1 is controlled by a controller (e.g., a PLC logic controller 20) to control a contactor 29 and a bidirectional thyristor 21 to achieve constant temperature. Each heater 1 is equipped with a temperature switch 22, which automatically disconnects heating when the temperature of the heater 1 exceeds the set temperature of the temperature switch 22. The number of heaters 1 can be three or six, and is not limited to this. This embodiment uses three heaters 1 as an example for illustration.

[0089] Specifically, system 2 utilizes a PLC logic controller 20 to control the switch of contactor 29, thereby enabling the bidirectional thyristor 21 to conduct and control heater 1 for heating. Simultaneously, a temperature detection device 23 monitors the current temperature of heater 1 in real time and feeds this temperature back to the PLC logic controller 20, adjusting the output signal to achieve constant temperature control. The PLC logic controller 20 supports 3 or 6 control channel outputs, with one heater 1 installed on each channel. Each heater 1 is equipped with a temperature switch 22. When the temperature of heater 1 exceeds the set value, the temperature switch 22 automatically disconnects and sends a disconnection signal back to the PLC logic controller 20.

[0090] In this embodiment, when the liquid flow rate (e.g., water volume 200) and pressure (e.g., water pressure 201) in a specific usage scenario exceed the upper limit, the heater 1 will automatically stop heating, and the PLC logic controller 20 will open the pressure relief valve 202. After the water volume 200 and water pressure 201 return to normal, the heater 1 will automatically start heating.

[0091] Specifically, the PLC logic controller 20 is connected to external water volume and water pressure sensors (not shown in the figure). During operation, when the water volume 200 or water pressure 201 exceeds the set threshold, the PLC logic controller 20 automatically controls the pressure relief valve 202 to perform a pressure relief operation and stops heating. When the values ​​of water volume 200 and water pressure 201 return to the normal range, the PLC logic controller 20 automatically controls the heater 1 to start heating operation.

[0092] In this embodiment, the system 2 has a safety circuit and overcurrent protection function. Specifically, the main power supply (AC power supply 24) circuit includes a current detection device 26 and an AC / DC power supply 25. The current detection device 26 is connected to the PLC logic controller 20 and the safety relay 27. The safety relay 27 is connected to the bidirectional thyristor 21. When the heater 1 malfunctions or the current is abnormal, the safety relay 27 will automatically disconnect, thereby cutting off the main power supply and playing a protective role.

[0093] In this embodiment, the system 2 also includes a data monitoring module connected to the PLC logic controller 20, such as an HMI data monitoring module 28. Specifically, the HMI (Human Machine Interface) data monitoring module 28 can display information such as current temperature, pressure, flow rate, and current in real time. Simultaneously, the HMI data monitoring module 28 can be used to set relevant threshold parameters in the system 2.

[0094] In summary, the beneficial effects of the thin-film online heater disclosed in this invention are as follows: the use of a coiled spiral thin-film electric heating element results in a large heating area, rapid temperature rise, and improved heating efficiency; the use of a thin-film electric heating element instead of an inert plastic-wrapped resistance wire prevents the accumulation of resistance wire caused by liquid flow, avoids localized high temperatures, and extends service life; the multi-segment long cylindrical heater can control different gradient heating and prevent dry burning; and it has a small size and a large effective volume.

[0095] The heating control system of the present invention uses a PLC controller to control a thyristor to realize the automatic start and stop of the heater, which has high temperature control accuracy, fast response speed and reduced delay.

[0096] This invention is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other modifications under the guidance of this invention without departing from the spirit and scope of the claims, and all of these modifications are within the scope of protection of this invention.

Claims

1. A thin-film in-line heater, comprising: The device comprises at least two partition plates, a heating element, and a water pipe, characterized in that the partition plates are disposed on the water pipe, and the heating element is a thin-film electric heating element, which is disposed in a spiral shape between the two partition plates. The partition plate is circular or a near-circular polygon, and a through hole is provided in the middle of the partition plate. The water pipe passes through the through hole and is connected to the partition plate. The thin-film electric heating element is arranged around the water pipe; The partition plate is a cross-shaped, star-shaped, or wheel-shaped frame structure with the through hole as the center point; the center point is an off-center point that is not the center of a circle; The frame structure has multiple spiral-shaped slots on its upper and lower sides, and the slots are positioned in the same way on the upper and lower sides. The thin-film electric heating element is fixed between the partition plates in a spiral shape through the slots. The multiple partition plates and the thin-film electric heating element are in the form of multiple long cylindrical sections, and the thin-film electric heating element is spirally mounted on the partition plates in segments.

2. The heater according to claim 1, characterized in that, The spiral central axis of the thin-film electric heating element is set as an eccentric structure that is not a circular center.

3. The thin-film in-line heater according to claim 1 or 2, characterized in that, The thin-film electric heating element further includes at least two insulating layers and a heating sheet or heating film pressed between the two insulating layers.

4. The thin-film in-line heater according to claim 1, characterized in that, The partition plate has multiple notches around its perimeter, and multiple support strips are accommodated in the multiple notches.

5. The thin-film in-line heater according to claim 3, characterized in that, The heating sheet or heating film has two layers, and the insulating layer has at least three layers. At least one insulating layer is provided between the two heating sheets or heating films, and the insulating layer is provided on the outer side of the heating sheet or heating film.

6. The thin-film in-line heater according to claim 3, characterized in that, The insulating layer is made of fluoroplastic, silicone rubber, polyimide, or PET; the heating sheet or heating film is a metal heating film, heating element, or heating wire.

7. The thin-film in-line heater according to claim 1, characterized in that, There are multiple spiral-shaped thin-film electric heating elements.

8. The thin-film in-line heater according to claim 1, characterized in that, The thin-film online heater is a heater used in the online heating process of semiconductor wet process equipment.

9. A heating control system, characterized in that, Includes any one of the thin-film in-line heaters according to claims 1-8.

10. The heating control system according to claim 9, characterized in that, Also includes: The logic control module is used to implement the temperature control of the thin-film online heater; A power safety module is used to provide power and overcurrent protection for the heating control system. The status detection module is used to detect the temperature of the thin-film online heater; The data monitoring module is used to receive and display the temperature information reported by the logic control module.

11. The heating control system according to claim 9, characterized in that, The heating control system is a control system used for the online heating process of semiconductor wet process equipment.

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