A scanning micromass probe imaging technology

Abstract

The present invention discloses a scanning micromass probe imaging technology, comprising a probe, a probe movement module, an optical microscopy measurement module, an oscillation excitation module, a probe position measurement module, a quartz crystal oscillator, an oscillation signal acquisition module, a high-speed switch, an integrated test cell, a software processing module, and a sample. The probe is placed vertically and has a dual-electrode mode with electrodes S1 and S2 on its top, and the sample is coated on the quartz crystal oscillator. The probe performs multi-point, line, and surface scanning to detect properties such as the micromass and viscoelasticity of the sample, and can obtain the distribution of micromass and viscoelasticity changes in situ, and obtain the reaction mechanism of different regions. The technology can be used in combination with various technical means to obtain more reaction process information, and can be widely used in research in aspects such as film deposition monitoring, electrochemical electrode processes, surface electrochemistry and catalytic electrochemistry, environmental monitoring, and drug and biomolecule detection.

Description

Technical Field

[0001] The present invention relates to the field of probe imaging technology, and in particular to a scanning micro-mass probe imaging technology. Background Art

[0002] Probe microscopy is a type of surface analysis tool that uses the interaction between the probe and the sample to obtain surface information. For example, scanning tunneling microscopy (STM) uses the tunneling current between the probe and the sample to obtain images; atomic force microscopy (AFM) uses the van der Waals force between the probe and the sample to obtain images; Kelvin probe force microscopy (KPFM) uses the Kelvin contact potential difference between the probe and the sample to obtain images; magnetic force microscopy (MFM) uses the magnetic interaction between the probe and the sample to obtain images; near-field optical scanning microscopy (NSOM) uses the near-field optical effect to obtain images; scanning electrochemical microscopy (SEM) uses the electrochemical information between the probe and the sample to obtain images; and thermal field scanning microscopy (TFSM) uses the thermal interaction between the probe and the sample to obtain images, among other applications. These probe microscopes have a wide range of applications in physics, chemistry, biology, materials science, and microelectronics.

[0003] During physical or chemical processes, materials undergo mass changes. For example, solidification, evaporation, condensation, sublimation, desorption, adsorption, dissolution, synthesis, decomposition, displacement, and redox reactions can cause the surface micromass of the material to increase, decrease, or remain constant, and can also cause changes in the material's viscoelastic properties. By obtaining and analyzing these micromass and viscoelasticity changes, the mechanisms of the physical and chemical processes can be inferred.

[0004] Obtaining information on surface micromass and viscoelastic distribution can enrich analytical processes, further revealing underappreciated mechanisms in physical and chemical processes, and helping scientific research gain a deeper understanding of the complexity of material changes. However, a literature review indicates that no research or reports on this type of probe imaging technology have yet been conducted.

[0005] Quartz crystals exhibit piezoelectric properties. When mechanical pressure is applied to a quartz crystal, the charge centers within its lattice shift, resulting in polarization. Conversely, applying an electric field across its two electrodes causes mechanical deformation, a phenomenon known as the inverse piezoelectric effect. When an alternating electromagnetic field is applied to the surface of a quartz crystal, the crystal generates mechanical oscillations at a specific resonant frequency. When substances adsorb or desorb from the quartz crystal surface, this mass change causes the crystal's resonant frequency to shift. By measuring this resonant frequency shift, minute mass changes and viscoelasticity variations on the crystal surface can be precisely detected. Quartz crystal microbalance technology, based on this principle, boasts nanogram-level measurement accuracy, theoretically capable of measuring mass changes equivalent to fractions of a monomolecular or atomic layer. These micromass sensors, characterized by their simple structure, low cost, and high sensitivity, are widely used in chemistry and biology.

[0006] However, existing technologies can only obtain macroscopic, average surface quality change information, and cannot obtain multiple information such as regional quality changes and the distribution of unevenness, nor can they be intuitively expressed in an imaging manner.

[0007] The present invention proposes a scanning micromass probe imaging technology, which uses very small electrodes (probes) to perform multi-point excitation on the quartz crystal oscillator loaded with the sample to obtain the dot matrix micromass distribution, and obtains visual image information of the micromass change through other auxiliary equipment such as computers. Summary of the Invention

[0008] The purpose of the present invention is to solve the technical problems existing in the prior art and to provide a scanning micro-mass probe imaging technology.

[0009] To achieve the above objectives, the present invention provides a technical solution: a scanning micro-mass probe imaging technology, comprising a probe, a probe movement module, an optical microscopy measurement module, an oscillation excitation module, a probe position measurement module, a quartz crystal oscillator, an oscillation signal acquisition module, a high-speed switch, an integrated test cell, a software processing module, and a sample; the probe is placed vertically and has a dual-electrode mode with electrodes S1 and S2 at the top, and the sample is coated on the quartz crystal oscillator;

[0010] The probe is used to generate an electromagnetic field signal to excite the micro-area oscillation of the quartz crystal oscillator and receive the attenuated electromagnetic field signal of the quartz crystal oscillator;

[0011] The probe moving module can move in three directions: x, y, and z;

[0012] The optical microscopy measurement module is used to measure the vertical distance between the probe and the quartz crystal;

[0013] The oscillation excitation module is used to emit a high-frequency oscillation signal to excite the quartz crystal oscillator to generate micro-area oscillation via the probe;

[0014] The probe position measurement module is used to measure the probe position lattice coordinate information;

[0015] The high-speed switch is used to quickly cut off the excitation signal of the oscillation excitation module;

[0016] The oscillation signal acquisition module is used to collect the amplitude and oscillation frequency of the quartz crystal oscillator;

[0017] The integrated test cell is one of a gas phase test cell, a liquid phase test cell, an electrochemical test cell, and a photoelectrochemical test cell, and is used to provide a reaction environment for causing changes in the micro-mass Δm and viscoelasticity ΔQ of the sample;

[0018] The software processing module embeds the envelope fitting equation, underdamping fitting equation, and Sauerbrey equation operation to obtain the Δm of the i×j lattice respectively. xiyj and ΔQ xiyj Information, where i is the number of test points in the x-axis direction and j is the number of test rows in the y-axis direction; further processing is performed to obtain the distribution image of the micro-mass and dissipation factor of the quartz crystal surface sample.

[0019] Preferably, the oscillation excitation module sends a high-frequency oscillation signal to the probe that is the same as the fundamental frequency f0 of the quartz crystal oscillator; when the probe gradually approaches the quartz crystal oscillator along the Z axis, the optical microscopy measurement module displays and measures the relative position of the probe and the quartz crystal oscillator; when the probe contacts the quartz crystal oscillator, the probe movement module stops the probe approach; at this time, the probe top electrode S1 and electrode S2 convert the signal sent by the oscillation excitation module into an electromagnetic field signal that excites the micro-region oscillation of the quartz crystal oscillator, and the oscillation signal acquisition module collects the oscillation amplitude and frequency of the quartz crystal oscillator coated with the sample at this time; the probe position measurement module obtains the coordinate position (x i ,y j );

[0020] When the quartz crystal oscillator micro-area oscillation is stable, the high-speed switch quickly cuts off the oscillation excitation module signal. At this time, the quartz crystal oscillator process presents an underdamped attenuated electromagnetic field signal. The probe top electrode S1 and electrode S2 serve as the receiving electrodes of the electromagnetic field to receive the attenuated signal. The oscillation signal acquisition module collects the attenuated signal at a sampling rate of no less than 2 times the fundamental frequency f0. By moving the probe in the x and y planes, the above steps are repeated to obtain the Δm of the i×j lattice. xiyj and ΔQ xiyj The software processing module processes the information to obtain the distribution image of micro-mass and viscoelasticity of the quartz crystal surface sample.

[0021] Preferably, when the integrated test cell is a gas phase test cell, the quartz crystal oscillator coated with the sample is installed at the bottom of the gas phase test cell; a first joint and a second joint are provided on the gas phase test cell, and the research gas is introduced into the gas phase test cell through the first joint, and the research gas reacts with the sample to cause changes in micromass and viscoelasticity, and finally the gas is discharged through the second joint.

[0022] Preferably, when the integrated test cell is a liquid phase test cell, the quartz crystal oscillator coated with the sample is installed at the bottom of the liquid phase test cell, and a first joint and a second joint are provided on the liquid phase test cell. Liquid is introduced into the liquid phase test cell through the first joint, the liquid reacts with the sample to cause micro-mass changes, and finally the liquid is discharged from the second joint.

[0023] Preferably, when the integrated test cell is an electrochemical test cell, a transparent conductive oxide film is deposited on the surface of the quartz crystal oscillator, and the quartz crystal oscillator is installed at the bottom of the electrochemical test cell, and the sample is deposited on the quartz crystal oscillator in advance or deposited on the quartz crystal oscillator during the photoelectrochemical reaction process; a three-electrode system is provided in the electrochemical test cell, and the three-electrode system is connected to an external electrochemical workstation.

[0024] Preferably, when the integrated test cell is a photoelectrochemical test cell, a transparent conductive oxide film is deposited on the surface of the quartz crystal oscillator, and the quartz crystal oscillator is installed at the bottom of the photoelectrochemical test cell, and the sample is deposited on the quartz crystal oscillator in advance or deposited on the quartz crystal oscillator during the electrochemical reaction process; a three-electrode system is provided in the electrochemical test cell, and the three-electrode system is connected to an external electrochemical workstation; the external spectrometer emits a light beam to illuminate the sample, and at the same time receives and analyzes the light beam reflected / transmitted back by the sample.

[0025] Preferably, the working electrode in the three-electrode system is a quartz crystal oscillator or a sample deposited on the surface of the quartz crystal oscillator; the counter electrode in the three-electrode system is one of the precious metal electrodes of gold, silver, platinum, palladium, iridium and their alloys; the reference electrode in the three-electrode system is one of the reference electrodes selected from the group consisting of a hydrogen electrode, a calomel electrode, a silver-silver chloride electrode, a mercury-mercuric oxide electrode and a mercury-mercurous sulfate electrode; the transparent conductive oxide film is one of the group consisting of an indium tin oxide film, an aluminum-doped zinc oxide film, a fluorine-doped tin oxide film, an antimony-doped tin oxide film, a gallium-doped zinc oxide film, a zinc oxide film doped with other elements, and a titanium oxide-based film.

[0026] Preferably, the electrodes S1 and S2 are coils or metal sheets; the quartz crystal oscillator is a thin sheet of quartz material with piezoelectric properties.

[0027] Beneficial effects of the present invention:

[0028] The scanning micromass probe imaging technology in the present invention is a non-invasive, non-destructive testing technology that does not affect the reaction system. It can perform multi-point, line, and surface scanning to detect the micromass and viscoelastic properties of the sample. It can obtain the distribution of micromass changes and viscoelastic changes in situ, and obtain the reaction mechanisms of different regions. It can be combined with various technical means to obtain more reaction process information and can be widely used in film deposition monitoring, electrochemical electrode processes, surface electrochemistry and catalytic electrochemistry, environmental monitoring, drug and biomolecule detection and other research. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The drawings described herein are used to provide further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0030] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0031] Figure 2 This is a diagram showing the top structure of the probe of the present invention;

[0032] Figure 3 Schematic diagram of the electrochemical test cell of the present invention;

[0033] Figure 4 Schematic diagram of the photoelectrochemical test cell of the present invention;

[0034] Figure 5 It is the micro-mass and viscoelastic lattice image of the i×j lattice in the present invention.

[0035] Figure annotation:

[0036] 1-probe, 2-probe moving module, 3-optical microscopy measurement module, 4-oscillation excitation module, 5-probe position measurement module, 6-quartz crystal oscillator, 7-oscillation signal acquisition module, 8-high-speed switch, 9-integrated test cell, 10-software processing module, 11-sample, 12-inlet connector, 13-outlet connector, 14-electrochemical test cell, 15-transparent conductive oxide film, 16-counter electrode, 17-reference electrode, 18-electrochemical workstation, 19-spectrometer. DETAILED DESCRIPTION

[0037] This section will describe in detail the specific embodiments of the present invention. The preferred embodiments of the present invention are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present invention, but it should not be understood as a limitation on the scope of protection of the present invention.

[0038] The present invention proposes a scanning micromass probe imaging technology, which uses very small electrodes (probes) to perform multi-point excitation on the quartz crystal oscillator loaded with the sample to obtain the lattice micromass and viscoelastic distribution, and obtains visual image information of the micromass change and viscoelasticity through other auxiliary equipment such as computers.

[0039] Reference Figure 1-Figure 5 A preferred embodiment of the present invention is a scanning micro-mass probe imaging technology, including a probe 1, a probe moving module 2, an optical microscopy measurement module 3, an oscillation excitation module 4, a probe position measurement module 5, a quartz crystal oscillator 6, an oscillation signal acquisition module 7, a high-speed switch 8, an integrated test cell 9, a software processing module 10, and a sample 11; the probe 1 is placed vertically and has a dual-electrode mode with electrodes S1 and S2 at the top, and the sample 11 is coated on the quartz crystal oscillator 6; the electrodes S1 and S2 are coils or metal sheets; the quartz crystal oscillator 6 is a thin sheet of quartz material with piezoelectric properties.

[0040] The probe 1 is used to generate an electromagnetic field signal to excite the micro-area oscillation of the quartz crystal oscillator 6 and receive the oscillation attenuation electromagnetic field signal of the quartz crystal oscillator 6;

[0041] The probe moving module 2 can move in three directions: x, y, and z;

[0042] The optical microscopy measurement module 3 is used to measure the vertical distance between the probe 1 and the quartz crystal oscillator 6;

[0043] The oscillation excitation module 4 is used to emit a high-frequency oscillation signal to excite the quartz crystal oscillator 6 via the probe 1 to generate micro-area oscillation;

[0044] The probe position measurement module 5 is used to measure the position matrix coordinate information of the probe 1;

[0045] The high-speed switch 8 is used to quickly cut off the excitation signal of the oscillation excitation module 4;

[0046] The oscillation signal acquisition module 7 is used to collect the amplitude and oscillation frequency of the quartz crystal oscillator 6;

[0047] The integrated test cell 9 is one of a gas phase test cell, a liquid phase test cell, an electrochemical test cell 14, and a photoelectrochemical test cell, and is used to provide a reaction environment for causing changes in the micromass Δm and viscoelasticity ΔQ of the sample 11;

[0048] The software processing module 10 embeds the envelope fitting equation, the underdamping fitting equation, and the Sauerbrey equation operation to obtain the Δm of the i×j lattice respectively. xiyj and ΔQ xiyj Information, where i is the number of test points in the x-axis direction and j is the number of test rows in the y-axis direction; further processing is performed to obtain a distribution image of the micro-mass and dissipation factor of the surface sample 11 of the quartz crystal oscillator 6.

[0049] Example 1

[0050] When the integrated test cell 9 is a gas phase test cell, the quartz crystal oscillator 6 coated with the sample 11 is installed at the bottom of the gas phase test cell; a first joint 12 and a second joint 13 are provided on the gas phase test cell, and the research gas is introduced into the gas phase test cell through the first joint 12. The research gas reacts with the sample 11 to cause micro-mass changes, and finally the gas is discharged through the second joint 13.

[0051] In this embodiment, the oscillation excitation module 4 sends a high-frequency oscillation signal having the same fundamental frequency f0 as the quartz crystal oscillator 6 to the probe 1; when the probe 1 gradually approaches the quartz crystal oscillator 6 along the Z axis, the optical microscopy measurement module 3 displays and measures the relative position of the probe 1 and the quartz crystal oscillator 6; when the probe 1 contacts the quartz crystal oscillator 6, the probe movement module 2 stops the probe 1 from approaching; at this time, the top electrode S1 and the electrode S2 of the probe 1 convert the signal sent by the oscillation excitation module 4 into an electromagnetic field signal that excites the micro-region oscillation of the quartz crystal oscillator 6, and the oscillation signal acquisition module 7 collects the oscillation amplitude and frequency of the quartz crystal oscillator 6 coated with the sample 11 at this time; the probe position measurement module 5 obtains the coordinate position (x i ,y j );

[0052] When the micro-area oscillation of the quartz crystal oscillator 6 is stable, the high-speed switch 8 quickly cuts off the signal of the oscillation excitation module 4. At this time, the process of the quartz crystal oscillator 6 presents an underdamped attenuated electromagnetic field signal. The top electrode S1 and the electrode S2 of the probe 1 serve as the receiving electrodes of the electromagnetic field to receive the attenuated signal. The oscillation signal acquisition module 7 collects the attenuated signal at a sampling rate of not less than 2 times the fundamental frequency f0. The attenuation time constant t is obtained by the envelope fitting equation embedded in the software processing module 10. x1y1 , the frequency f is obtained by fitting the underdamped waveform equation x1y1 By Δf x1y1 =f0-f x1y1 , obtain the micro-area change frequency Δf x1y1 ; Then use the Sauerbrey equation to convert Δf x1y1 Transformed into a micro-mass change Δm of sample 11 x1y1 ; by ΔQ x1y1 =t x1y1 ×f x1y1 Obtain the dissipation factor ΔQ of the micro-region viscoelastic change x1y1 Move probe 1 to the next position (x2, y1) through probe moving module 2, and repeat the above steps to obtain Δm x2y1 .

[0053] And so on, we can get the Δm of row y1 respectively. xiy1 and ΔQ xiy1 , (i is the number of test points in the x-axis direction), change yj (j is the number of test rows in the y-axis direction), and finally we get Figure 5 Δm of the i×j lattice shown xiyj and ΔQ xiyj The information is used to form an i, j matrix. The software processing module 10 further processes the image to obtain the distribution of micro-mass and viscoelasticity of the sample 11 in the surface area of ​​the quartz crystal oscillator 6.

[0054] Example 2

[0055] When the integrated test cell 9 is a liquid phase test cell, the quartz crystal oscillator 6 coated with the sample 11 is installed at the bottom of the liquid phase test cell. A first joint 12 and a second joint 13 are provided on the liquid phase test cell. Liquid is introduced into the liquid phase test cell through the first joint 12. The liquid reacts with the sample 11 to cause micro-mass changes. Finally, the liquid is discharged from the second joint 13. The micro-mass imaging steps are the same as those in implementation 1.

[0056] Example 3

[0057] When the integrated test cell 9 is a photoelectrochemical test cell, a quartz crystal oscillator 6 with a transparent conductive oxide film 15 deposited on its surface is installed at the bottom of the photo / electrochemical test cell, and the sample 11 can be deposited on the quartz crystal oscillator 6 in advance or deposited on the quartz crystal oscillator 6 during the photo / electrochemical reaction process; a three-electrode system is provided in the photo / electrochemical test cell 14, and the three-electrode system is connected to an external electrochemical workstation 18. The external spectrometer 19 can emit a light beam to illuminate the sample 11, and at the same time receive and analyze the light beam reflected / transmitted back by the sample 11.

[0058] Example 4

[0059] When the integrated test cell 9 is an electrochemical test cell 14, a transparent conductive oxide film 15 is deposited on the surface of the quartz crystal oscillator 6 and installed at the bottom of the electrochemical test cell, and the sample 11 is deposited on the quartz crystal oscillator 6 in advance or deposited on the quartz crystal oscillator 6 during the electrochemical reaction process; a three-electrode system is provided in the electrochemical test cell 14, and the three-electrode system is connected to an external electrochemical workstation 18.

[0060] Furthermore, the working electrode in the three-electrode system is a quartz crystal oscillator 6 or a sample 11 deposited on the surface of the quartz crystal oscillator 6; the counter electrode 16 in the three-electrode system is one of the precious metal electrodes of gold, silver, platinum, palladium, iridium and their alloys; the reference electrode 17 in the three-electrode system is one of the reference electrodes selected from hydrogen electrode, calomel electrode, silver-silver chloride electrode, mercury-mercuric oxide electrode and mercury-mercurous sulfate electrode; the transparent conductive oxide film 15 is one of indium tin oxide (ITO) film, aluminum-doped zinc oxide (AZO) film, fluorine-doped tin oxide (FTO) film, antimony-doped tin oxide (ATO) film, gallium-doped zinc oxide (GZO) film, zinc oxide (ZnO) film doped with other elements, and titanium oxide (TiO2)-based film.

[0061] Furthermore, when the integrated test cell 9 is an electrochemical test cell 14 and a photoelectrochemical cell, the micromass imaging steps differ from those in implementation 2 in that the imaging process is synchronously imaged during the electrochemical process under the control of the electrochemical workstation 18, and the remaining principles and steps are the same as those in implementation 1.

[0062] The scanning micromass probe imaging technology in the present invention is a non-invasive, non-destructive testing technology that does not affect the reaction system. It can perform multi-point, line, and surface scanning to detect the micromass and viscoelastic properties of the sample. It can obtain the distribution of micromass changes and viscoelastic changes in situ, and obtain the reaction mechanisms of different regions. It can be combined with various technical means to obtain more reaction process information and can be widely used in film deposition monitoring, electrochemical electrode processes, surface electrochemistry and catalytic electrochemistry, environmental monitoring, drug and biomolecule detection and other research.

[0063] Under the premise that no conflict occurs, those skilled in the art may freely combine and superimpose the above-mentioned additional technical features.

[0064] The above descriptions are only preferred embodiments of the present invention. Any technical solution that achieves the purpose of the present invention by substantially the same means shall fall within the scope of protection of the present invention.

Claims

1. A scanning micro-mass probe imaging method, characterized in that: The apparatus comprises a probe (1), a probe moving module (2), an optical microscopy measurement module (3), an oscillation excitation module (4), a probe position measurement module (5), a quartz crystal oscillator (6), an oscillation signal acquisition module (7), a high-speed switch (8), an integrated test cell (9), a software processing module (10), and a sample (11); the probe (1) is placed vertically and has an electrode S1 and an electrode S2 at its top, and the sample (11) is coated on the quartz crystal oscillator (6); The probe (1) is used to generate an electromagnetic field signal for exciting the micro-region oscillation of the quartz crystal oscillator (6) and to receive the electromagnetic field signal of the oscillation attenuation of the quartz crystal oscillator (6); The probe moving module (2) can move in three directions: x, y, and z; The optical microscopy measurement module (3) is used to measure the vertical distance between the probe (1) and the quartz crystal oscillator (6); The oscillation excitation module (4) is used to emit a high-frequency oscillation signal to excite the quartz crystal oscillator (6) via the probe (1) to generate micro-area oscillation; The probe position measurement module (5) is used to measure the position matrix coordinate information of the probe (1); The high-speed switch (8) is used to quickly cut off the excitation signal of the oscillation excitation module (4); The oscillation signal acquisition module (7) is used to collect the amplitude and oscillation frequency of the quartz crystal oscillator (6); The integrated test cell (9) is one of a gas phase test cell, a liquid phase test cell, an electrochemical test cell (14), and a photoelectrochemical test cell, and is used to cause the sample (11) to have a micro-mass and viscoelasticity Providing a responsive environment for changes in The software processing module (10) obtains the following equations by operating the embedded envelope fitting equation, the underdamping fitting equation, the underdamping fitting equation and the Sauerbrey equation: Dot matrix and Information, including for Number of test points in the axis direction, for The number of test rows in the axial direction is further processed to obtain a distribution image of the micro-mass and dissipation factor of the surface sample (11) of the quartz crystal oscillator (6); The oscillation excitation module (4) sends a signal to the probe (1) that is in the same frequency range as the fundamental frequency of the quartz crystal oscillator (6). The same high-frequency oscillation signal; when the probe (1) gradually approaches the quartz crystal oscillator (6) along the Z axis, the optical microscopy measurement module (3) displays and measures the relative position of the probe (1) and the quartz crystal oscillator (6); when the probe (1) contacts the quartz crystal oscillator (6), the probe movement module (2) stops the probe (1) from approaching; at this time, the top electrode S1 and the electrode S2 of the probe (1) convert the signal emitted by the oscillation excitation module (4) into an electromagnetic field signal that excites the micro-region oscillation of the quartz crystal oscillator (6), and the oscillation signal acquisition module (7) acquires the oscillation amplitude and frequency of the quartz crystal oscillator (6) coated with the sample (11) at this time; the probe position measurement module (5) obtains the coordinate position at this time ; When the micro-area oscillation of the quartz crystal oscillator (6) is stable, the high-speed switch (8) quickly cuts off the signal of the oscillation excitation module (4). At this time, the quartz crystal oscillator (6) presents an underdamped attenuated electromagnetic field signal. The top electrode S1 and the electrode S2 of the probe (1) serve as receiving electrodes of the electromagnetic field to receive the attenuated signal. The oscillation signal acquisition module (7) receives the attenuated signal at a frequency not less than 2 times the fundamental frequency. The attenuated signal is collected at a sampling rate of Plane moving probe (1) repeats the above steps to obtain Dot matrix and The software processing module (10) processes the information to obtain a distribution image of the micro-mass and viscoelasticity of the surface sample (11) of the quartz crystal oscillator (6).

2. A scanning micro-mass probe imaging method according to claim 1, characterized in that: When the integrated test cell (9) is a gas phase test cell, the quartz crystal oscillator (6) coated with the sample (11) is installed at the bottom of the gas phase test cell; a first joint (12) and a second joint (13) are provided on the gas phase test cell, and the gas phase test cell is introduced with a research gas through the first joint (12), and the research gas reacts with the sample (11) to cause changes in micro-mass and viscoelasticity, and finally the gas is discharged through the second joint (13).

3. The scanning micro-mass probe imaging method according to claim 1, characterized in that: When the integrated test cell (9) is a liquid phase test cell, the quartz crystal oscillator (6) coated with the sample (11) is installed at the bottom of the liquid phase test cell. A first joint (12) and a second joint (13) are provided on the liquid phase test cell. Liquid is introduced into the liquid phase test cell through the first joint (12), and the liquid reacts with the sample (11) to cause a micro-mass change. Finally, the liquid is discharged from the second joint (13).

4. The scanning micro-mass probe imaging method according to claim 1, characterized in that: When the integrated test cell (9) is an electrochemical test cell (14), a transparent conductive oxide film (15) is deposited on the surface of the quartz crystal oscillator (6), and the quartz crystal oscillator (6) is installed at the bottom of the electrochemical test cell. The sample (11) is deposited on the quartz crystal oscillator (6) in advance or is deposited on the quartz crystal oscillator (6) during the photoelectrochemical reaction process. A three-electrode system is provided in the electrochemical test cell (14), and the three-electrode system is connected to an external electrochemical workstation (18).

5. The scanning micro-mass probe imaging method according to claim 1, characterized in that: When the integrated test cell (9) is a photoelectrochemical test cell, a transparent conductive oxide film (15) is deposited on the surface of the quartz crystal oscillator (6), and the quartz crystal oscillator (6) is installed at the bottom of the photoelectrochemical test cell, and the sample (11) is deposited on the quartz crystal oscillator (6) in advance or deposited on the quartz crystal oscillator (6) during the electrochemical reaction process; a three-electrode system is provided in the electrochemical test cell (14), and the three-electrode system is connected to an external electrochemical workstation (18); an external spectrometer (19) emits a light beam to illuminate the sample (11), and simultaneously receives and analyzes the light beam reflected / transmitted back by the sample (11).

6. A scanning micro-mass probe imaging method according to claim 4 or 5, characterized in that: The working electrode in the three-electrode system is a quartz crystal oscillator (6) or a sample (11) deposited on the surface of the quartz crystal oscillator (6); the counter electrode (16) in the three-electrode system is one of the precious metals gold, silver, platinum, palladium, iridium and their alloys; the reference electrode (17) in the three-electrode system is one of the hydrogen electrode, calomel electrode, silver / silver chloride electrode, mercury / mercuric oxide electrode, mercury / mercurous sulfate electrode; the transparent conductive oxide film (15) is one of the indium tin oxide film, aluminum-doped zinc oxide film, fluorine-doped tin oxide film, antimony-doped tin oxide film, gallium-doped zinc oxide film, and titanium oxide-based film.

7. The scanning micro-mass probe imaging method according to claim 1, characterized in that: The electrodes S1 and S2 are coils or metal sheets; the quartz crystal oscillator (6) is a thin sheet of quartz material with piezoelectric properties.

Images