Epitaxial layer transfer method and manufacturing method of light-emitting chip

By etching and thinning and aligning the etching glue layer transferred from the epitaxial layer during the production of the light emitting chip, the problem of large bonding glue layer thickness is solved, and the light output effect and bonding yield of the light emitting chip are improved.

CN119653932AActive Publication Date: 2025-03-18CHONGQING KONKA PHOTOELECTRIC TECH RES INST CO LTD
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Patent Information

Application Number
CN202311176291.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-09-12
Publication Date
2025-03-18
Estimated Expiration
2043-09-12

AI Technical Summary

Technical Problem

During the production process of the light emitting chip, the bonding adhesive layer is thicker when the epitaxial layer is transferred, which affects the light-emitting effect of the light emitting chip.

Method used

By forming a semi-solid etched glue layer on the carrier substrate and the epitaxial layer, and thinning the thickness of these glue layers by etching, the thinned glue layer is aligned and pressed to remove the substrate, thereby reducing the thickness of the bonded layer and improving the bonding strength.

Benefits of technology

The thickness of the bonding layer is reduced, the residual of the glue layer on the light-emitting surface of the light-emitting chip is reduced, the light-emitting effect of the light-emitting chip is optimized, and the bonding yield is improved.

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Abstract

The invention relates to an epitaxial layer transfer method and a manufacturing method of a light-emitting chip, and the epitaxial layer transfer method of the light-emitting chip comprises the steps: forming a semi-solid first etching type glue layer on a bearing substrate, and forming a semi-solid second etching type glue layer on an epitaxial layer borne by a substrate; the thickness of at least one of the first etching type adhesive layer and the second etching type adhesive layer is reduced through etching; the first etching type adhesive layer and the second etching type adhesive layer which are subjected to the thinning treatment are subjected to alignment press fit; and removing the substrate. The etching type adhesive layer can be etched to any required thickness by controlling the etching rate and the etching time, so that the etching type adhesive layer which is thin enough can be manufactured. Bonding is carried out after the etching type adhesive layer is thinned, the overall thickness of a bonding layer formed after the first etching type adhesive layer and the second etching type adhesive layer are pressed can be reduced, laser stripping in the follow-up manufacturing process is facilitated, residues of the adhesive layers on the light-emitting face of the light-emitting chip can be reduced, and the light-emitting effect of the light-emitting chip is optimized.
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