Epitaxial layer transfer method and manufacturing method of light-emitting chip
By etching and thinning and aligning the etching glue layer transferred from the epitaxial layer during the production of the light emitting chip, the problem of large bonding glue layer thickness is solved, and the light output effect and bonding yield of the light emitting chip are improved.
Patent Information
- Application Number
- CN202311176291.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-09-12
- Publication Date
- 2025-03-18
- Estimated Expiration
- 2043-09-12
AI Technical Summary
During the production process of the light emitting chip, the bonding adhesive layer is thicker when the epitaxial layer is transferred, which affects the light-emitting effect of the light emitting chip.
By forming a semi-solid etched glue layer on the carrier substrate and the epitaxial layer, and thinning the thickness of these glue layers by etching, the thinned glue layer is aligned and pressed to remove the substrate, thereby reducing the thickness of the bonded layer and improving the bonding strength.
The thickness of the bonding layer is reduced, the residual of the glue layer on the light-emitting surface of the light-emitting chip is reduced, the light-emitting effect of the light-emitting chip is optimized, and the bonding yield is improved.