An external reaction force measuring device based on a stepping motion mechanism

Abstract

The present invention provides an external reaction force measurement device based on a stepping motion mechanism, which relates to the technical field of semiconductor manufacturing equipment. The external reaction force measurement device based on the stepping motion mechanism includes a stepping motion mechanism, a marble platform, and a two-dimensional force sensor mechanism. The stepping motion mechanism includes a support frame, a load, a Y-axis actuator, and an X-axis actuator. The load is arranged on the Y-axis actuator, the Y-axis actuator is arranged on the X-axis actuator, the X-axis actuator is arranged on the support frame, and the two-dimensional force sensor mechanism is arranged between the support frame and the marble platform. A plurality of first air flotation holes are evenly distributed on the marble platform. Compared with the existing technology, the external reaction force measurement device based on the stepping motion mechanism of the present invention can accurately measure the reaction force generated by the stepping motion mechanism on the mechanical mounting interface of the base frame during operation, and can further ensure the motion and measurement accuracy of the stepping motion mechanism through calculation.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing equipment, and in particular to an external reaction force measuring device based on a stepping motion mechanism. Background Art

[0002] The continuous development of the integrated circuit (IC) field has provided a solid foundation for technological advancement in the information age. Photolithography equipment, the core high-end equipment in IC manufacturing, has continuously challenged the limits of human ultra-precision manufacturing over its 60-year history, driving the continued advancement of Moore's Law and the rapid development of the information age. The research and development of IC manufacturing equipment has far-reaching strategic significance for a country's scientific and technological strength and industrial competitiveness.

[0003] As the most core and technically challenging piece of IC manufacturing equipment, photolithography machines have evolved from contact and proximity types to the mainstream stepper-scan type. Stepper-scan photolithography machines consist of an optical projection lens system, a motion stage system, and an alignment system. The high-acceleration, high-precision motion stage system is a key subsystem for completing silicon wafer exposure, and its trajectory tracking performance and stability directly impact the production efficiency of the integrated circuit industry. However, the impact of the motion mechanism on the base frame during high-speed movement can degrade motion measurement results, affecting the motion and measurement accuracy of the motion mechanism. Therefore, accurately measuring the reaction force exerted by the motion mechanism on the mechanical mounting interface of the base frame during operation has become a pressing issue. Summary of the Invention

[0004] The problem to be solved by the present invention is: how to accurately measure the reaction force generated by the stepping motion mechanism on the mechanical installation interface of the base frame during operation.

[0005] The present invention provides an external reaction force measurement device based on a stepping motion mechanism, comprising: a stepping motion mechanism, a marble platform and a two-dimensional force sensor mechanism, wherein the stepping motion mechanism comprises a support frame, a load, a Y-direction actuator and an X-direction actuator, wherein the load is arranged on the Y-direction actuator, the Y-direction actuator is arranged on the X-direction actuator, the X-direction actuator is arranged on the support frame, and the support frame is arranged on the marble platform, a plurality of the two-dimensional force sensor mechanisms are arranged at intervals between the support frame and the marble platform, and a plurality of first air flotation holes are evenly distributed on the end surface of the marble platform facing the support frame, wherein the first air flotation holes are used to form an air film between the support frame and the marble platform to float the support frame and the stepping motion mechanism.

[0006] The external reaction force measurement device based on a stepping motion mechanism provided by the present invention has, but is not limited to, the following beneficial effects compared to the prior art:

[0007] The external reaction force measurement device based on the stepping motion mechanism described in the present invention can be connected to the mechanical installation interface of the base frame at the four corners of the support frame respectively. The Y-axis actuator and the X-axis actuator can drive the load to achieve two-dimensional planar motion in the Y and X directions. The load is usually equipped with relevant sensor devices. The Y-axis actuator and the X-axis actuator are used to drive the load to move to perform related work. In the initial state, the central axes of the load, the Y-axis actuator and the X-axis actuator coincide. When the load moves along the X-axis direction, the X-axis actuator needs to drive the load and the Y-axis actuator to move simultaneously to achieve movement of the load along the X-axis direction. The stepping motion mechanism can adopt a stacked arrangement to achieve a compact structure of the stepping motion mechanism. When the X-axis actuator and the Y-axis actuator drive the load to move, according to the law of conservation of momentum of the closed system, it can be seen that at this time, the support frame will generate a reaction force on the mechanical installation interface of the base frame, thereby affecting the movement and measurement accuracy of the stepping motion mechanism. When the load moves, causing a reaction force to be generated on the mechanical mounting interface of the base frame, the multiple two-dimensional force sensor mechanisms located between the support frame and the marble platform will detect the change in force, thereby obtaining the reaction force generated on the mechanical mounting interface of the base frame during the operation of the stepping motion mechanism through the force detected by the multiple two-dimensional force sensor mechanisms. In addition, since the marble platform has multiple first air flotation holes evenly distributed on the end surface facing the support frame, the first air flotation holes are used to form an air film between the support frame and the marble platform to float the stepping motion mechanism. At this time, on the one hand, there is no contact between the support frame and the marble platform under the action of the air flotation force, and no friction is generated between the two. This can avoid affecting the measurement accuracy of the two-dimensional force sensor mechanism due to the friction between the two. On the other hand, it can avoid that the entire gravity of the stepping motion mechanism falls on the two-dimensional force sensor mechanism, and can reduce the influence of the overall gravity of the stepping motion mechanism on the detection accuracy of the multiple two-dimensional force sensor mechanisms. The force change detected by the multiple two-dimensional force sensor mechanisms is closer to the force generated by the support frame on the mechanical mounting interface of the base frame, thereby accurately measuring the reaction force generated on the mechanical mounting interface of the base frame during the operation of the stepping motion mechanism. Compared with the existing technology, the external reaction force measuring device based on the stepping motion mechanism of the present invention can accurately measure the reaction force generated by the stepping motion mechanism on the mechanical installation interface of the basic frame during operation, and can further ensure the movement and measurement accuracy of the stepping motion mechanism through calculation.

[0008] Optionally, the two X-direction actuators are relatively arranged on both sides of the support frame, and the X-direction actuator includes an X-layer frame, an X-direction linear motor, an X-direction linear guide and a first slider, the X-direction linear guide is arranged on the support frame, the first slider is slidably connected to the X-direction linear guide, the X-layer frame is connected to the first slider, the X-layer frame is located above the marble platform, the X-direction linear motor includes a first U-shaped magnet and a first coil, the first U-shaped magnet is connected to the support frame, and the first coil is connected to the X-layer frame.

[0009] Optionally, the X-axis actuator also includes a first connecting frame, a second connecting frame, an X-axis grating scale and a first reading head, one end of the first connecting frame is connected to the first coil, and the other end is connected to the X-layer frame, the second connecting frame is connected to the support frame, the first reading head is arranged on the first connecting frame, the X-axis grating scale is arranged on the second connecting frame, and the first reading head is used to read the scale on the X-axis grating scale.

[0010] Optionally, the two Y-axis actuators are relatively arranged on both sides of the support frame, and the Y-axis actuator includes a Y-axis linear motor, a Y-axis linear guide and a second slider, the Y-axis linear guide is arranged on the X-layer frame, the second slider is slidably connected to the Y-axis linear guide, the load is connected to the second slider, the Y-axis linear motor includes a second U-shaped magnet and a second coil, the second U-shaped magnet is connected to the load, and the second coil is connected to the X-layer frame.

[0011] Optionally, the Y-axis actuator also includes a third connecting frame, a fourth connecting frame, a Y-axis grating scale and a second reading head, the third connecting frame is connected between the load and the second slider, the second U-shaped magnet is connected to the third connecting frame, the fourth connecting frame is connected to the X-layer frame, the Y-axis grating scale is arranged on the third connecting frame, the second reading head is arranged on the fourth connecting frame, and the second reading head is used to read the scale on the Y-axis grating scale.

[0012] Optionally, the two-dimensional force sensor mechanism includes a two-dimensional force sensor, a height adjustment member and a flange connection plate, the two ends of the two-dimensional force sensor are respectively connected to the height adjustment member and the marble platform, one end of the flange connection plate is connected to the height adjustment member, and the other end is connected to the support frame.

[0013] Optionally, the two-dimensional force sensor mechanism also includes a bearing, the height adjustment member includes a threaded protrusion and a nut structure threadedly connected to the threaded protrusion, the threaded protrusion is connected to the two-dimensional force sensor, the bearing is mounted on the flange connecting plate, the flange connecting plate is connected to the outer ring of the bearing, and the nut structure is connected to the inner ring of the bearing.

[0014] Optionally, a plurality of second air flotation holes are evenly distributed on the end surface of the load facing the marble platform, and the second air flotation holes are used to form an air film between the load and the marble platform.

[0015] Optionally, a plurality of third air flotation holes are evenly distributed on the end surface of the X-layer frame facing the marble platform, and the third air flotation holes are used to form an air film between the X-layer frame and the marble platform.

[0016] Optionally, the marble platform has a rectangular structure, and grooves are respectively provided at the four corners of the marble platform, and the two-dimensional force sensor mechanism is correspondingly provided at each groove. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A three-dimensional diagram of an external reaction force measuring device based on a stepping motion mechanism according to an embodiment of the present invention;

[0018] Figure 2 A side view of the external reaction force measuring device based on the stepping motion mechanism according to an embodiment of the present invention Figure 1 ;

[0019] Figure 3 for Figure 2 A partial enlarged view of the middle A;

[0020] Figure 4 A side view of the external reaction force measuring device based on the stepping motion mechanism according to an embodiment of the present invention Figure 2 ;

[0021] Figure 5 for Figure 4 A partial enlarged view of point B in the middle;

[0022] Figure 6 Schematic diagram of the structure of a two-dimensional force sensor mechanism according to an embodiment of the present invention;

[0023] Figure 7 for Figure 6 Middle CC section view;

[0024] Figure 8 A schematic diagram of the structure of an X-layer framework according to an embodiment of the present invention;

[0025] Figure 9 is a schematic structural diagram of a load according to an embodiment of the present invention;

[0026] Figure 10 Schematic diagram of the structure of the marble platform according to an embodiment of the present invention.

[0027] Description of reference numerals:

[0028] 1. Support frame; 2. Marble platform; 21. First air flotation hole; 3. 2D force sensor mechanism; 31. 2D force sensor; 32. Height adjustment member; 321. Threaded protrusion; 322. Nut structure; 33. Flange connection plate; 34. Bearing; 4. Load; 41. Second air flotation hole; 5. X-axis actuator; 51. X-layer frame; 511. Third air flotation hole; 52. X-axis linear motor; 521. First U-shaped magnet; 522 , first coil; 53, X-axis linear guide; 54, first slider; 55, first connecting frame; 56, second connecting frame; 57, X-axis grating scale; 58, first reading head; 6, Y-axis actuator; 61, Y-axis linear motor; 611, second U-shaped magnet; 612, second coil; 62, Y-axis linear guide; 63, second slider; 64, third connecting frame; 65, fourth connecting frame; 66, Y-axis grating scale; 67, second reading head. DETAILED DESCRIPTION

[0029] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0030] In the description of the present invention, the directions or positional relationships indicated by “up”, “down”, “left”, “right”, “top”, “bottom”, “front”, “back”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention. They do not indicate or imply that the device referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the scope of protection of the present invention.

[0031] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical connections; direct connections or indirect connections via an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0032] Throughout this specification, references to terms such as "an embodiment," "one embodiment," and "an implementation" indicate that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or implementation are included in at least one embodiment or implementation of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or implementation. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or implementations.

[0033] Moreover, the Z-axis in the accompanying drawings represents the vertical direction, that is, the up and down position, and the positive direction of the Z-axis (that is, the direction of the arrow of the Z-axis) represents the top, and the negative direction of the Z-axis (that is, the direction opposite to the positive direction of the Z-axis) represents the bottom; the X-axis in the accompanying drawings represents the horizontal direction, that is, the left and right position, and the positive direction of the X-axis (that is, the direction of the arrow of the X-axis) represents the right, and the negative direction of the X-axis (that is, the direction opposite to the positive direction of the X-axis) represents the left; the Y-axis in the accompanying drawings represents the longitudinal direction, that is, the front and back position, and the positive direction of the Y-axis (that is, the direction of the arrow of the Y-axis) represents the front, and the negative direction of the Y-axis (that is, the direction opposite to the positive direction of the Y-axis) represents the back.

[0034] It should also be noted that the aforementioned Z-axis, X-axis, and Y-axis are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, it should not be understood as a limitation on the present invention.

[0035] like Figures 1 to 2 As shown, the external reaction force measurement device based on the stepping motion mechanism of an embodiment of the present invention includes: a stepping motion mechanism, a marble platform 2 and a two-dimensional force sensor mechanism 3, the stepping motion mechanism includes a support frame 1, a load 4, a Y-axis actuator 6 and an X-axis actuator 5, the load 4 is arranged on the Y-axis actuator 6, the Y-axis actuator 6 is arranged on the X-axis actuator 5, the X-axis actuator 5 is arranged on the support frame 1, and the support frame 1 is arranged on the marble platform 2, a plurality of the two-dimensional force sensor mechanisms 3 are arranged at intervals between the support frame 1 and the marble platform 2, and a plurality of first flotation holes 21 are evenly distributed on the end surface of the marble platform 2 facing the support frame 1, and the first flotation holes 21 are used to form an air film between the support frame 1 and the marble platform 2 to float the support frame 1 and the stepping motion mechanism.

[0036] In this embodiment, combined with the Figure 1 As shown, the four corners of the support frame 1 can be connected to the mechanical installation interface of the base frame respectively, and the load 4 can be driven to realize the Y direction (attached) through the Y direction actuator 6 and the X direction actuator 5. Figure 1 Y-axis direction) and X-axis direction (attached Figure 1 The two-dimensional plane (with X axis direction) Figure 1 The load 4 is usually equipped with related sensors. The Y-axis actuator 6 and the X-axis actuator 5 are used to drive the load 4 to move to perform related work. In the initial state, the central axes of the load 4, the Y-axis actuator 6 and the X-axis actuator 5 coincide. When the load moves along the X-axis, the X-axis actuator 5 needs to drive the load 4 and the Y-axis actuator 6 to move at the same time to realize the movement of the load 4 along the X-axis. The stepping motion mechanism can adopt a stacked arrangement to achieve a compact structure of the stepping motion mechanism. When the X-axis actuator 3 and the Y-axis actuator 2 drive the load 1 to move, according to the law of conservation of momentum of the closed system, it can be seen that at this time, the support frame 1 will generate a reaction force on the mechanical installation interface of the base frame, thereby affecting the movement and measurement accuracy of the stepping motion mechanism.

[0037] In the external reaction force measuring device of this embodiment, when the load 1 moves and causes a reaction force to be generated on the mechanical installation interface of the base frame, the multiple two-dimensional force sensor mechanisms 3 located between the support frame 1 and the marble platform 2 will detect the change in force, so that the reaction force generated on the mechanical installation interface of the base frame during the operation of the stepping motion mechanism can be obtained by the force detected by the multiple two-dimensional force sensor mechanisms 3; and, since the marble platform 2 has multiple first flotation holes 21 evenly distributed on the end face facing the support frame 1, the first flotation holes 21 are used to form an air film between the support frame 1 and the marble platform 2 to float the stepping motion mechanism. At this time, on the one hand, the support frame 1 Under the action of air buoyancy, there is no contact between the marble platform 2 and the two, and no friction is generated between the two, thereby avoiding the influence of friction between the two on the measurement accuracy of the two-dimensional force sensor mechanism 3. On the other hand, it can avoid that the entire gravity of the stepping motion mechanism falls on the two-dimensional force sensor mechanism 3, and can reduce the influence of the overall gravity of the stepping motion mechanism on the detection accuracy of multiple two-dimensional force sensor mechanisms 3, so that the force change detected by multiple two-dimensional force sensor mechanisms 3 is closer to the force generated by the support frame 1 on the mechanical installation interface of the base frame, thereby accurately measuring the reaction force generated on the mechanical installation interface of the base frame during the operation of the stepping motion mechanism. Compared with the existing technology, the external reaction force measurement device based on the stepping motion mechanism of the present invention can accurately measure the reaction force generated on the mechanical installation interface of the base frame during the operation of the stepping motion mechanism, and can further ensure the movement and measurement accuracy of the stepping motion mechanism through calculation.

[0038] In addition, combined with the Figure 9As shown, the marble platform 2 as a whole can be a rectangular two-level stepped structure, wherein a first air duct is opened on the marble platform 2, and a plurality of first air flotation holes 21 connected to the first air duct are evenly distributed on the first step surface of the marble platform 2. The second step surface of the marble platform 2 is the upper end surface of the marble platform 2, and the support frame 1 is a rectangular frame structure. The support frame 1 can be mounted on the marble platform 2, and the first step surface of the marble platform 2 is in contact with the support frame 1.

[0039] In addition, the external reaction force measurement device based on the stepping motion mechanism of this embodiment also includes an air supply device for providing compressed air. A gas channel connected to multiple first air flotation holes 21 is provided on the marble platform 2, and the air supply device is used to transport compressed air into the gas channel.

[0040] Optionally, the two X-axis actuators 5 are relatively arranged on both sides of the support frame 1, and the X-axis actuator 5 includes an X-layer frame 51, an X-axis linear motor 52, an X-axis linear guide 53 and a first slider 54. The X-axis linear guide 53 is arranged on the support frame 1, and the first slider 54 is slidably connected to the X-axis linear guide 53. The X-layer frame 51 is connected to the first slider 54. The X-layer frame 51 is located above the marble platform 2. The X-axis linear motor 52 includes a first U-shaped magnet 521 and a first coil 522. The first U-shaped magnet 521 is connected to the support frame 1, and the first coil 522 is connected to the X-layer frame 51.

[0041] In this embodiment, combined with the Figure 2 and attached Figure 3 As shown, the two X-direction actuators 5 are arranged relative to each other (see Figure 2 The Y-axis direction is on both sides of the support frame 1, the X-layer frame 51 is placed on the upper end surface of the marble platform 2, and the X-direction linear guide rail 53 is along the attached Figure 1 The middle X-axis direction is laid on the support frame 1, the X-layer frame 51 is slidably connected to the X-direction linear guide 53 through the first slider 54, the first U-shaped magnetic steel 521 of the X-direction linear motor 52 is fixedly connected to the support frame 1, and the first coil 522 is fixedly connected to the X-layer frame 51. When the X-direction linear motor 52 is powered on, the first coil 522 will move relative to the first U-shaped magnetic steel 521 along the attached Figure 1 The X-axis moves, thereby driving the X-layer frame 51 to move.

[0042] Optionally, the X-axis actuator 5 also includes a first connecting frame 55, a second connecting frame 56, an X-axis grating scale 57 and a first reading head 58, one end of the first connecting frame 55 is connected to the first coil 522, and the other end is connected to the X-layer frame 51, the second connecting frame 56 is connected to the support frame 1, the first reading head 58 is arranged on the first connecting frame 55, the X-axis grating scale 57 is arranged on the second connecting frame 56, and the first reading head 58 is used to read the scale on the X-axis grating scale 57.

[0043] In this embodiment, combined with the Figure 3 As shown, the cross-section of the first connecting frame 55 is a Z-shaped structure, one end of which can be connected to the X-layer frame 51 by bolts, and the other end can be connected to the first coil 522 by bolts. The cross-section of the second connecting frame 56 is a C-shaped structure, and the second connecting frame 56 can be connected to the supporting frame 1 by bolts. The first reading head 58 can be connected to the first connecting frame 55 by bolts, and the X-axis grating scale 57 can be connected to the second connecting frame 56 by bolts. The first reading head 58 is used to read the scale on the X-axis grating scale 57 to facilitate the measurement of the displacement distance.

[0044] Optionally, the two Y-axis actuators 6 are relatively arranged on both sides of the support frame 1, and the Y-axis actuator 6 includes a Y-axis linear motor 61, a Y-axis linear guide 62 and a second slider 63. The Y-axis linear guide 62 is arranged on the X-layer frame 51, and the second slider 63 is slidably connected to the Y-axis linear guide 62. The load 4 is connected to the second slider 63. The Y-axis linear motor 61 includes a second U-shaped magnet 611 and a second coil 612. The second U-shaped magnet 611 is connected to the load 4, and the second coil 612 is connected to the X-layer frame 51.

[0045] In this embodiment, combined with the Figure 4 and attached Figure 5 As shown, the two Y-direction actuators 6 are arranged relative to each other (see Figure 4 In the X-axis direction) on both sides of the support frame 1, the Y-axis linear guide rails 62 are arranged along the attached Figure 1 The Y-axis direction is laid on the X-layer frame 51, and the load 4 is slidably connected to the Y-direction linear guide 62 through the second slider 63. The second U-shaped magnetic steel 611 of the Y-direction linear motor 61 is fixedly connected to the load 4, and the second coil 612 is fixedly connected to the X-layer frame 51. When the Y-direction linear motor 61 is powered on, the second U-shaped magnetic steel 611 will move relative to the second coil 612 along the attached direction. Figure 1 The middle Y-axis moves, thereby driving the load 4 to move.

[0046] Optionally, the Y-axis actuator 6 also includes a third connecting frame 64, a fourth connecting frame 65, a Y-axis grating scale 66 and a second reading head 67, the third connecting frame 64 is connected between the load 4 and the second slider 63, the second U-shaped magnet 611 is connected to the third connecting frame 64, the fourth connecting frame 65 is connected to the X-layer frame 51, the Y-axis grating scale 66 is arranged on the third connecting frame 64, the second reading head 67 is arranged on the fourth connecting frame 65, and the second reading head 67 is used to read the scale on the Y-axis grating scale 66.

[0047] In this embodiment, combined with the Figure 5 As shown, the cross-section of the third connecting frame 64 is a Z-shaped structure, one end of which can be connected to the load 4 by bolts, and the other end can be connected to the second slider 63 by bolts. The cross-section of the fourth connecting frame 65 is an L-shaped structure, and the fourth connecting frame 65 can be connected to the X-layer frame 51 by bolts. The second reading head 67 can be connected to the fourth connecting frame 65 by bolts, and the Y-axis grating scale 66 can be connected to the third connecting frame 64 by bolts. The second reading head 67 is used to read the scale on the Y-axis grating scale 66 to facilitate the measurement of the displacement distance.

[0048] Optionally, the two-dimensional force sensor mechanism 3 includes a two-dimensional force sensor 31, a height adjustment member 32 and a flange connection plate 33, the two ends of the two-dimensional force sensor 31 are respectively connected to the height adjustment member 32 and the marble platform 2, one end of the flange connection plate 33 is connected to the height adjustment member 32, and the other end is connected to the support frame 1.

[0049] In this embodiment, combined with the Figure 1 and attached Figure 9 As shown, the marble platform 2 is a rectangular structure, and grooves are respectively provided at the four corners of the marble platform 2, and each groove is correspondingly provided with the two-dimensional force sensor mechanism 3. Figure 6 As shown, the two-dimensional force sensor mechanism 3 includes a two-dimensional force sensor 31, a height adjustment member 32 and a flange connection plate 33. The upper and lower ends of the two-dimensional force sensor 31 (attached Figure 6 The stepper mechanism (in the Z-axis direction) can be connected to the height adjustment member 32 and the marble platform 2 via screws. The height adjustment member 32 is connected above the flange connection plate 33, which is screwed to the support frame 1. When the stepper mechanism generates a reaction force on the marble platform 2, the reaction force acts on the two-dimensional force sensor 31, causing the resistance strain gauge inside the sensor to deform, thereby measuring the magnitude and direction of the force.

[0050] Optionally, the two-dimensional force sensor mechanism 3 also includes a bearing 34, the height adjustment member 32 includes a threaded protrusion 321 and a nut structure 322 threadedly connected to the threaded protrusion 321, the threaded protrusion 321 is connected to the two-dimensional force sensor 31, the bearing 34 is installed on the flange connection plate 33, the flange connection plate 33 is connected to the outer ring of the bearing 34, and the nut structure 322 is connected to the inner ring of the bearing 34.

[0051] In this embodiment, combined with the Figure 7 As shown, a flange can be installed at the upper end of the two-dimensional force sensor 31, wherein the threaded protrusion 321 can be connected to the upper end surface of the flange by screws, and the bearing 34 installed on the flange connecting plate 33 can be a cylindrical roller bearing, and the nut structure 322 is interference-connected with the inner ring of the cylindrical roller bearing, and the nut structure 322 is threadedly connected to the threaded protrusion 321 to facilitate adjustment of the distance between the flange connecting plate 33 and the two-dimensional force sensor 31. Moreover, under the action of the bearing 34, when the nut structure 322 is rotated, the flange connecting plate 33 does not rotate with the nut structure 322, which can ensure that the connecting hole on the flange connecting plate 33 and the connecting hole on the support frame 1 remain coaxial, and do not affect the docking between the two.

[0052] Optionally, a plurality of second air flotation holes 41 are evenly distributed on the end surface of the load 4 facing the marble platform 2 , and the second air flotation holes 41 are used to form an air film between the load 4 and the marble platform 2 .

[0053] In this embodiment, combined with the Figure 8 As shown, the load 4 includes a flat plate structure and a cylindrical structure connected to each other, wherein the flat plate structure is used to connect to the mechanical installation interface of the base frame, the cylindrical structure is provided with a second air channel, and a plurality of second air flotation holes 41 connected to the second air channel are evenly distributed on the end surface of the cylindrical structure facing the marble platform 2. The second air flotation holes 41 are used to form an air film between the load 4 and the marble platform 2, thereby performing gravity unloading on the load 4 and eliminating the deformation of the load 4 caused by the gravity of the load 4. Specifically, in combination with the attached Figure 8 As shown, four connecting plates are protruding outward from the flat plate structure of the load 4, and the connecting plates are used to connect to the Y-axis actuator 6. Except for these four connecting plates, the other parts are in a suspended state and are not supported. Therefore, the connecting plates are subjected to concentrated force and are prone to deformation. By gravity unloading the load 4, the deformation of the connecting plates caused by the gravity of the load 4 can be eliminated.

[0054] Optionally, a plurality of third air flotation holes 511 are evenly distributed on the end surface of the X-layer frame 51 facing the marble platform 2 , and the third air flotation holes 511 are used to form an air film between the X-layer frame 51 and the marble platform 2 .

[0055] In this embodiment, combined with the Figure 7 As shown, the X-layer frame 51 is a rectangular frame structure as a whole, and a third air channel is opened on the X-layer frame 51. A plurality of third air flotation holes 511 connected to the third air channel are evenly distributed on the end surface of the X-layer frame 51 facing the marble platform 2. The third air flotation holes 511 are used to form an air film between the X-layer frame 51 and the marble platform 2 to reduce the influence of external vibration on the stepping motion mechanism, avoid contact between the X-layer frame 51 and the marble platform 2 due to external vibration, prevent friction between the X-layer frame 51 and the marble platform 2, ensure the stability of the load movement driven by the X-layer frame 51, and further ensure the measurement accuracy of the external reaction force measuring device.

[0056] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features.

[0057] Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the protection scope of the present invention.

Claims

1. An external reaction force measuring device based on a stepping motion mechanism, characterized in that: include: A stepping motion mechanism, a marble platform (2) and a two-dimensional force sensor mechanism (3), wherein the stepping motion mechanism comprises a support frame (1), a load (4), a Y-direction actuator (6) and an X-direction actuator (5), wherein the load (4) is arranged on the Y-direction actuator (6), the Y-direction actuator (6) is arranged on the X-direction actuator (5), the X-direction actuator (5) is arranged on the support frame (1), and the support frame (1) is arranged on the marble platform (2); a plurality of the two-dimensional force sensor mechanisms (3) are arranged at intervals between the support frame (1) and the marble platform (2); a plurality of first air flotation holes (21) are evenly distributed on the end surface of the marble platform (2) facing the support frame (1), and the first air flotation holes (21) are used to form an air film between the support frame (1) and the marble platform (2) to float the support frame (1) and the stepping motion mechanism; the two-dimensional force sensor mechanism (3) comprises a two-dimensional force sensor (31), A height adjustment member (32) and a flange connection plate (33), the two ends of the two-dimensional force sensor (31) are respectively connected to the height adjustment member (32) and the marble platform (2), one end of the flange connection plate (33) is connected to the height adjustment member (32), and the other end is connected to the support frame (1); the two-dimensional force sensor mechanism (3) also includes a bearing (34), the height adjustment member (32) includes a threaded protrusion (321) and a nut structure (322) threadedly connected to the threaded protrusion (321), the threaded protrusion (321) is connected to the two-dimensional force sensor (31), the bearing (34) is mounted on the flange connection plate (33), the flange connection plate (33) is connected to the outer ring of the bearing (34), and the nut structure (322) is connected to the inner ring of the bearing (34); the marble platform (2) is a rectangular structure, and grooves are respectively provided at the four corners of the marble platform (2), and the two-dimensional force sensor mechanism (3) is correspondingly provided at each of the grooves.

2. The external reaction force measuring device based on the stepping motion mechanism according to claim 1 is characterized in that: The two X-direction actuators (5) are relatively arranged on both sides of the support frame (1), and the X-direction actuator (5) includes an X-layer frame (51), an X-direction linear motor (52), an X-direction linear guide (53) and a first slider (54). The X-direction linear guide (53) is arranged on the support frame (1), and the first slider (54) is slidably connected to the X-direction linear guide (53). The X-layer frame (51) is connected to the first slider (54). The X-layer frame (51) is located above the marble platform (2). The X-direction linear motor (52) includes a first U-shaped magnetic steel (521) and a first coil (522). The first U-shaped magnetic steel (521) is connected to the support frame (1), and the first coil (522) is connected to the X-layer frame (51).

3. The external reaction force measuring device based on the stepping motion mechanism according to claim 2 is characterized in that: The X-axis actuator (5) further includes a first connecting frame (55), a second connecting frame (56), an X-axis grating ruler (57) and a first reading head (58), wherein one end of the first connecting frame (55) is connected to the first coil (522), and the other end is connected to the X-layer frame (51), the second connecting frame (56) is connected to the supporting frame (1), the first reading head (58) is arranged on the first connecting frame (55), the X-axis grating ruler (57) is arranged on the second connecting frame (56), and the first reading head (58) is used to read the scale on the X-axis grating ruler (57).

4. The external reaction force measuring device based on a stepping motion mechanism according to claim 2, characterized in that: The two Y-direction actuators (6) are arranged on both sides of the support frame (1) relative to each other. The Y-direction actuator (6) includes a Y-direction linear motor (61), a Y-direction linear guide (62) and a second slider (63). The Y-direction linear guide (62) is arranged on the X-layer frame (51). The second slider (63) is slidably connected to the Y-direction linear guide (62). The load (4) is connected to the second slider (63). The Y-direction linear motor (61) includes a second U-shaped magnet (611) and a second coil (612). The second U-shaped magnet (611) is connected to the load (4). The second coil (612) is connected to the X-layer frame (51).

5. The external reaction force measuring device based on the stepping motion mechanism according to claim 4 is characterized in that: The Y-axis actuator (6) further includes a third connecting frame (64), a fourth connecting frame (65), a Y-axis grating ruler (66) and a second reading head (67), wherein the third connecting frame (64) is connected between the load (4) and the second slider (63), the second U-shaped magnetic steel (611) is connected to the third connecting frame (64), the fourth connecting frame (65) is connected to the X-layer frame (51), the Y-axis grating ruler (66) is arranged on the third connecting frame (64), the second reading head (67) is arranged on the fourth connecting frame (65), and the second reading head (67) is used to read the scale on the Y-axis grating ruler (66).

6. The external reaction force measuring device based on a stepping motion mechanism according to claim 1, characterized in that: A plurality of second air flotation holes (41) are evenly distributed on the end surface of the load (4) facing the marble platform (2), and the second air flotation holes (41) are used to form an air film between the load (4) and the marble platform (2).

7. The external reaction force measuring device based on a stepping motion mechanism according to claim 2, characterized in that: A plurality of third air flotation holes (511) are evenly distributed on the end surface of the X-layer frame (51) facing the marble platform (2), and the third air flotation holes (511) are used to form an air film between the X-layer frame (51) and the marble platform (2).

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