Infinity correction microscope objective lens and microscope

Abstract

The invention provides an infinite correction microscope objective lens and a microscope. The infinite correction microscope objective lens comprises a first lens, a first lens group, a second lens group and a sixth lens which are sequentially arranged on the same optical axis from an object side to an image side. According to the scheme, the specific parameters and structures of all the lenses are set, so that the amplification factor of the objective lens of the infinite correction microscope is five times, the object space view field is 8 mm, a tube lens with the focal length of 200 mm can be used in a matched mode, the working distance is 30.12 mm, the corresponding numerical aperture is 0.12, the object space view field and the working distance of the objective lens of the infinite correction microscope can be improved, and the objective lens of the infinite correction microscope can be used in a matched mode. The overall performance of the microscope is improved; while the field of view is improved, the infinite effective clear aperture is optimized, vignetting can be reduced to a great extent, and the imaging effect is improved; the resolution ratio at a large field of view is high; and moreover, the independent design is completely realized, and the problem that the existing five-time objective lens cannot meet many use requirements in optical detection is solved.

Description

Technical Field

[0001] The invention relates to the field of microscopes, and in particular to an infinity correction microscope objective lens and a microscope. Background Art

[0002] With the development of the semiconductor industry, the requirements for detection systems are getting higher and higher, and optical detection systems are indispensable in semiconductor detection. In optical detection systems, visual detection is a commonly used detection method, and the main optical parameters may include: resolution, depth of field, field of view, numerical aperture, frame rate, working distance, etc. In the detection process, different optical parameters are often mutually restricted. For example, if the resolution needs to be improved, the depth of field and frame rate often need to be reduced.

[0003] At present, in order to maintain a certain clarity of the image while improving the resolution, an autofocus module is often added to the optical system, so the infinity correction system is a very good choice. However, infinity correction also has a distance limit, and the larger the field of view, the more likely it is to cause vignetting. Summary of the invention

[0004] One object of the present invention is to effectively reduce the vignetting of an infinity-corrected microscope objective lens and improve the imaging effect.

[0005] A further object of the present invention is to increase the object field of view and working distance of the infinity-corrected microscope objective, thereby improving the overall performance of the microscope.

[0006] In particular, the present invention provides an infinity-corrected microscope objective lens, comprising: a first lens, a first lens group, a second lens group and a sixth lens, which are arranged on the same optical axis in sequence from the object side to the image side; the first lens has a concave surface facing the object side and a concave surface facing the image side; the sixth lens has a convex surface facing the object side and a concave surface facing the image side; the first lens group and the second lens group respectively include at least two lenses, and the refractive index of at least two lenses in each lens group is different; the first lens group has a convex surface facing the object side and a convex surface facing the image side; the second lens group has a convex surface facing the object side and a flat surface facing the image side.

[0007] Optionally, the first lens is a double concave negative lens; the sixth lens is a negative meniscus lens; the first lens group is a double cemented lens, including a second lens and a third lens starting from the object side; the second lens is a negative meniscus lens, whose surface facing the object side is convex and whose surface facing the image side is concave; the third lens is a double convex positive lens, whose surface facing the object side is convex and whose surface facing the image side is convex; the second lens group is a double cemented lens, including a fourth lens and a fifth lens starting from the object side; the fourth lens is a double convex positive lens, whose surface facing the object side is convex and whose surface facing the image side is convex; the fifth lens is a plano-concave negative lens, whose surface facing the object side is concave and whose surface facing the image side is flat.

[0008] Optionally, the first lens is made of H-TF5 material; the second lens is made of D-ZK3 material; the third lens is made of H-ZPK7 material; the fourth lens is made of H-ZPK7 material; the fifth lens is made of H-LAK7A material; and the sixth lens is made of H-ZF13 material.

[0009] Optionally, the surface of the first lens facing the object side is the first mirror plane, and the surface of the first lens facing the image side is the second mirror plane; the surface of the second lens facing the object side is the third mirror plane, the glued surface of the second lens and the third lens is the fourth mirror plane, and the surface of the third lens facing the image side is the fifth mirror plane; the surface of the fourth lens facing the object side is the sixth mirror plane, the glued surface of the fourth lens and the fifth lens is the seventh mirror plane, and the surface of the fifth lens facing the image side is the eighth mirror plane; the surface of the sixth lens facing the object side is the ninth mirror plane, and the surface of the sixth lens facing the image side is the tenth mirror plane. The curvature radii of the first mirror plane, the fifth mirror plane, and the seventh mirror plane are negative numbers; the curvature radii of the second mirror plane, the third mirror plane, the fourth mirror plane, the sixth mirror plane, the ninth mirror plane, and the tenth mirror plane are positive numbers; and the curvature radius of the eighth mirror plane is infinite.

[0010] Optionally, the radius of curvature of the first mirror surface is -161.28 to -161.26 mm; the radius of curvature of the second mirror surface is 17.68 to 17.7 mm; the radius of curvature of the third mirror surface is 23.21 to 23.23 mm; the radius of curvature of the fourth mirror surface is 19.96 to 19.98 mm; the radius of curvature of the fifth mirror surface is -21.77 to -21.75 mm; the radius of curvature of the sixth mirror surface is 70.36 to 70.38 mm; the radius of curvature of the seventh mirror surface is -12.51 to -12.49 mm; the radius of curvature of the ninth mirror surface is 25.22 to 25.24 mm; and the radius of curvature of the tenth mirror surface is 18.51 to 18.53 mm.

[0011] Optionally, the clear aperture of the first mirror is 4.2mm; the clear aperture of the second mirror is 4.34mm; the clear aperture of the third mirror is 6.37mm; the clear aperture of the fourth mirror is 7.2mm; the clear aperture of the fifth mirror is 7.56mm; the clear aperture of the sixth mirror is 7.34mm; the clear aperture of the seventh mirror is 7.06mm; the clear aperture of the eighth mirror is 6.82mm; the clear aperture of the ninth mirror is 6.34mm; and the clear aperture of the tenth mirror is 4.85mm.

[0012] Optionally, the mirror distance between the first mirror plane and the second mirror plane is 1.19 to 1.23 mm; the mirror distance between the second mirror plane and the third mirror plane is 5.78 to 5.82 mm; the mirror distance between the third mirror plane and the fourth mirror plane is 9.86 to 9.9 mm; the mirror distance between the fourth mirror plane and the fifth mirror plane is 6.8 to 6.84 mm; the mirror distance between the fifth mirror plane and the sixth mirror plane is 1.03 to 1.07 mm; the mirror distance between the sixth mirror plane and the seventh mirror plane is 5.84 to 5.88 mm; the mirror distance between the seventh mirror plane and the eighth mirror plane is 11.95 to 11.99 mm; the mirror distance between the eighth mirror plane and the ninth mirror plane is 15.07 to 15.11 mm; the mirror distance between the ninth mirror plane and the tenth mirror plane is 11.29 to 11.33 mm.

[0013] Optionally, the infinity-corrected microscope objective can be used with a tube lens having a focal length of 200 mm.

[0014] Optionally, the edge or the outer frame of the tenth mirror serves as an aperture stop.

[0015] According to another aspect of the present invention, there is also provided a microscope comprising any one of the above-mentioned infinity-corrected microscope objective lenses.

[0016] The infinity-corrected microscope objective lens of the present invention optimizes the effective aperture at infinity while improving the field of view, which can greatly reduce vignetting and improve imaging effects; the resolution at a large field of view is high; and the objective lens is completely independently designed, solving the problem that the existing 5x objective lens cannot meet many usage requirements in optical detection.

[0017] Furthermore, the infinity-corrected microscope objective lens of the present invention, by setting the specific parameters and structures of each lens, makes the magnification of the infinity-corrected microscope objective lens be 5 times, the object field of view be 8 mm, and have a field of view higher than that of a conventional 5-times microscope objective lens. It can be used with a tube lens with a focal length of 200 mm, and the working distance is 30.12 mm, which is larger than that of a conventional objective lens. The corresponding numerical aperture is 0.12, which can improve the object field of view and working distance of the infinity-corrected microscope objective lens, thereby improving the overall performance of the microscope.

[0018] Based on the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will become more aware of the above and other objects, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0020] Figure 1 is a schematic structural diagram of an infinity-corrected microscope objective according to an embodiment of the present invention;

[0021] Figure 2 is a spot diagram of different fields of view of an infinity-corrected microscope objective according to one embodiment of the present invention; and

[0022] Figure 3 is a modulation transfer function graph of an infinity-corrected microscope objective according to an embodiment of the present invention. DETAILED DESCRIPTION

[0023] This embodiment provides an infinity-corrected microscope objective lens, which can effectively reduce the vignetting of the infinity-corrected microscope objective lens and improve the imaging effect. Figure 1 Schematic diagram of the structure of an infinity-corrected microscope objective according to an embodiment of the present invention. Figure 1 As shown, the microscope objective lens of this embodiment includes: a first lens L1, a first lens group G1, a second lens group G2 and a sixth lens L6 which are arranged on the same optical axis in sequence from the object side to the image side.

[0024] The first lens L1 is concave facing the object side and concave facing the image side; the sixth lens L6 is convex facing the object side and concave facing the image side. The first lens group G1 and the second lens group G2 each include at least two lenses, and the refractive index of at least two lenses in each lens group is different. The first lens group G1 is convex facing the object side and convex facing the image side; the second lens group G2 is convex facing the object side and flat facing the image side.

[0025] In a specific embodiment, the first lens L1 is a double concave negative lens; the sixth lens L6 is a negative meniscus lens. Among them, the negative meniscus lens refers to a lens composed of two curved surfaces with similar curvature radii, and has a negative focal length. The negative meniscus lens can generally be used for related applications such as beam expansion, increasing focal length and reducing numerical aperture. When expanding or diverging collimated light, the light beam can be incident on the convex surface of the negative meniscus lens, thereby reducing spherical aberration. When used for converging light collimation, the light beam can be incident on the concave surface.

[0026] The first lens group G1 is a double cemented lens, including the second lens L2 and the third lens L3 starting from the object side; the second lens L2 is a negative meniscus lens, which is convex facing the object side and concave facing the image side; the third lens L3 is a double convex positive lens, which is convex facing the object side and convex facing the image side. The second lens group G2 is a double cemented lens, including the fourth lens L4 and the fifth lens L5 starting from the object side; the fourth lens L4 is a double convex positive lens, which is convex facing the object side and convex facing the image side; the fifth lens L5 is a plano-concave negative lens, which is concave facing the object side and flat facing the image side.

[0027] In a preferred embodiment, the specific materials of the first lens L1 to the sixth lens L6 can refer to Table 1. As shown in Table 1, the first lens L1 is made of H-TF5 material. The second lens L2 is made of D-ZK3 material. The third lens L3 is made of H-ZPK7 material. The fourth lens L4 is made of H-ZPK7 material. The fifth lens L5 is made of H-LAK7A material. The sixth lens L6 is made of H-ZF13 material.

[0028] In summary, all lenses used in the infinity-corrected microscope objective of this embodiment are made of optical glass, but the composition is different. The curvature radius of the mirror surface of all lenses does not appear to be a super-hemispherical surface, and no aspherical surface is used, which is very easy to process, can effectively reduce the difficulty of processing, and improve processing efficiency and processing quality.

[0029] Table 1

[0030] Lens Name Material First lens L1 H-TF5 Second lens L2 D-ZK3 The third lens L3 H-ZPK7 The fourth lens L4 H-ZPK7 Fifth lens L5 H-LAK7A Sixth lens L6 H-ZF13

[0031] In a specific embodiment, the surface of the first lens L1 facing the object is the first mirror surface S1, and the surface of the first lens L1 facing the image is the second mirror surface S2. The surface of the second lens L2 facing the object is the third mirror surface S3, the cemented surface of the second lens L2 and the third lens L3 is the fourth mirror surface S4, and the surface of the third lens L3 facing the image is the fifth mirror surface S5. The surface of the fourth lens L4 facing the object is the sixth mirror surface S6, the cemented surface of the fourth lens L4 and the fifth lens L5 is the seventh mirror surface S7, and the surface of the fifth lens L5 facing the image is the eighth mirror surface S8. The surface of the sixth lens L6 facing the object is the ninth mirror surface S9, and the surface of the sixth lens L6 facing the image is the tenth mirror surface S10.

[0032] Moreover, the curvature radius of the first mirror surface S1, the fifth mirror surface S5, and the seventh mirror surface S7 are negative numbers; the curvature radius of the second mirror surface S2, the third mirror surface S3, the fourth mirror surface S4, the sixth mirror surface S6, the ninth mirror surface S9, and the tenth mirror surface S10 are positive numbers. Since the eighth mirror surface S8 is a plane, the curvature radius of the eighth mirror surface S8 is infinite.

[0033] In a preferred embodiment, the specific values ​​of the curvature radius, the clear aperture and the mirror distance between two adjacent mirrors of the first mirror S1 to the tenth mirror S10 can be referred to Table 2. As shown in Table 2, the curvature radius of the first mirror S1 is -161.28 to -161.26 mm, the clear aperture is 4.2 mm, and the mirror distance between the first mirror S1 and the second mirror S2 is 1.19 to 1.23 mm. The curvature radius of the second mirror S2 is 17.68 to 17.7 mm, the clear aperture is 4.34 mm, and the mirror distance between the second mirror S2 and the third mirror S3 is 5.78 to 5.82 mm. The curvature radius of the third mirror S3 is 23.21 to 23.23 mm, the clear aperture is 6.37 mm, and the mirror distance between the third mirror S3 and the fourth mirror S4 is 9.86 to 9.9 mm.

[0034] The radius of curvature of the fourth mirror S4 is 19.96 to 19.98 mm, the aperture is 7.2 mm, and the mirror distance between the fourth mirror S4 and the fifth mirror S5 is 6.8 to 6.84 mm. The radius of curvature of the fifth mirror S5 is -21.77 to -21.75 mm, the aperture is 7.56 mm, and the mirror distance between the fifth mirror S5 and the sixth mirror S6 is 1.03 to 1.07 mm. The radius of curvature of the sixth mirror S6 is 70.36 to 70.38 mm, the aperture is 7.34 mm, and the mirror distance between the sixth mirror S6 and the seventh mirror S7 is 5.84 to 5.88 mm.

[0035] The curvature radius of the seventh mirror S7 is -12.51 to -12.49 mm, the light aperture is 7.06 mm, and the mirror distance between the seventh mirror S7 and the eighth mirror S8 is 11.95 to 11.99 mm. The curvature radius of the eighth mirror S8 is infinite, the light aperture is 6.82 mm, and the mirror distance between the eighth mirror S8 and the ninth mirror S9 is 15.07 to 15.11 mm. The curvature radius of the ninth mirror S9 is 25.22 to 25.24 mm, the light aperture is 6.34 mm, and the mirror distance between the ninth mirror S9 and the tenth mirror S10 is 11.29 to 11.33 mm. The curvature radius of the tenth mirror S10 is 18.51 to 18.53 mm, and the light aperture is 4.85 mm.

[0036] Table 2

[0037]

[0038]

[0039] By setting the specific parameters and structures of each lens in Tables 1 and 2 above, the magnification of the infinity-corrected microscope objective can be 5 times, and the object field of view is 8 mm, which has a higher field of view than the conventional 5-times microscope objective. It can be used with a tube lens with a focal length of 200 mm, and the working distance is 30.12 mm, which is larger than the conventional objective. The corresponding numerical aperture is 0.12, which can improve the object field of view and working distance of the infinity-corrected microscope objective, thereby improving the overall performance of the microscope.

[0040] In addition, while improving the field of view of the infinity-corrected microscope objective, the effective aperture at infinity is optimized, which can greatly reduce vignetting and improve imaging effects; the resolution is high at a large field of view, and at an 8mm field of view, the MTF value is still close to that of an ideal lens; and a completely independent design is achieved, solving the problem that the existing 5x objective cannot meet many usage requirements in optical detection.

[0041] In a preferred embodiment, the edge or outer frame of the tenth mirror S10 can be used as an aperture stop. The function of the aperture stop is to limit the aperture of the light beam. In addition, it should be noted that the mirror distance from the object plane to the first mirror S1 can be 30.12 mm. The mirror distance between the tenth mirror S10 and the image plane is infinite.

[0042] Figure 2 is a spot diagram of different fields of view of an infinity-corrected microscope objective according to one embodiment of the present invention. Figure 2 The focusing conditions of light with wavelengths of 0.486133, 0.587562, 0.656273, and 0.42 at different object plane fields of view are shown. The object plane field of view of field (1) is 8mm, the object plane field of view of field (2) is 4mm, and the object plane half field of view of field (3) is 0mm. The test data are as follows: the RMS radius (root mean square) when the field of view is (1) is 1.773μm, and the GEO radius (maximum) is 11.796μm, the RMS radius when the field of view is (2) is 0.722μm, and the GEO radius is 2.674μm, and the RMS radius when the field of view is (3) is 0.180μm, and the GEO radius is 0.421μm.

[0043] The RMS radius is also called the root mean square spot radius. It is an indicator used to describe the size of the light beam. It is obtained by taking the square root of the light intensity distribution after quadratic averaging. The GEO radius (Geometric Optical Radius) represents the radius of the smallest center circle that contains all the light rays. Specifically, the GEO radius is the smallest center circle radius that can satisfy all the light rays falling within its range. Figure 2It can be seen that the focused spots of light of different wavelengths in different fields of view are all within a relatively small range, indicating that the infinity-corrected microscope objective of this embodiment has an excellent focusing effect. It can be seen that the aberration of the infinity-corrected microscope objective of this embodiment is well controlled.

[0044] Figure 3 is a modulation transfer function graph of an infinity-corrected microscope objective according to an embodiment of the present invention. Figure 3 The vertical axis is the modulus of the normalized transfer function, and the horizontal axis is the spatial frequency, in units of lp / mm. The outermost line is the transfer function curve of the system under the diffraction limit. Figure 3 As shown, for the infinity-corrected microscope objective of this embodiment, when the object plane field of view is 8mm, 6mm and 0mm, the transfer function curves of light of different wavelengths in the meridian plane and the sagittal plane show that the on-axis field of view transfer function curve and the off-axis field of view transfer function curve are both close to the diffraction limit, indicating that the imaging contrast of the optical system's full field of view is very high and the imaging layering is clear.

[0045] This embodiment also provides a microscope, which includes the infinity-corrected microscope objective lens of any of the above embodiments. In a specific embodiment, by setting the specific parameters and structures of each lens, the magnification of the infinity-corrected microscope objective lens can be 5 times, the object field of view is 8 mm, and it has a field of view higher than that of a conventional 5-times microscope objective lens, and can be used with a tube lens with a focal length of 200 mm, and the working distance is 30.12 mm, which is larger than that of a conventional objective lens, and the corresponding numerical aperture is 0.12, which can improve the object field of view and working distance of the infinity-corrected microscope objective lens, thereby improving the overall performance of the microscope.

[0046] In addition, while improving the field of view of the infinity-corrected microscope objective, the effective aperture at infinity is optimized, which can greatly reduce vignetting and improve imaging effects; the resolution is high at a large field of view, and at an 8mm field of view, the MTF value is still close to that of an ideal lens; and a completely independent design is achieved, solving the problem that the existing 5x objective cannot meet many usage requirements in optical detection.

[0047] Those skilled in the art should understand that, unless otherwise specified, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", "clockwise", "counterclockwise", etc. in the embodiments of the present invention used to indicate orientation or positional relationships are merely for the convenience of describing and understanding the technical solutions of the present invention, and do not indicate or imply that the referred device or component must have a specific orientation, and therefore should not be understood as limiting the present invention.

[0048] The terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined as "first", "second", etc. may explicitly or implicitly include at least one of the features, that is, include one or more of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. When a feature "includes or contains" one or some of the features it covers, unless otherwise specifically described, this indicates that other features are not excluded and may further include other features.

[0049] Unless otherwise clearly defined and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. A person skilled in the art should be able to understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0050] In addition, in the description of this embodiment, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them. That is, in the description of this embodiment, the first feature being "above", "above", and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature being "below", "below", or "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0051] In the description of the present embodiment, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0052] At this point, those skilled in the art should recognize that, although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present invention can still be directly determined or derived based on the content disclosed in the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all these other variations or modifications.

Claims

1. An infinity-corrected microscope objective lens, characterized in that: include: A first lens, a first lens group, a second lens group and a sixth lens are arranged in sequence from the object side to the image side on the same optical axis; The first lens has a concave surface facing the object side and a concave surface facing the image side; The sixth lens has a convex surface facing the object side and a concave surface facing the image side; The first lens group and the second lens group each include at least two lenses, and the refractive index of at least two lenses in each lens group is different; The first lens group has a convex surface facing the object side and a convex surface facing the image side; the second lens group has a convex surface facing the object side and a flat surface facing the image side.

2. The infinity-corrected microscope objective according to claim 1, characterized in that: The first lens is a double concave negative lens; the sixth lens is a negative meniscus lens; The first lens group is a double cemented lens, including a second lens and a third lens starting from the object side; the second lens is a negative meniscus lens, whose surface facing the object side is convex and whose surface facing the image side is concave; the third lens is a double convex positive lens, whose surface facing the object side is convex and whose surface facing the image side is convex; The second lens group is a double cemented lens, including a fourth lens and a fifth lens starting from the object side; the fourth lens is a double convex positive lens, whose convex surface facing the object side and the convex surface facing the image side are both convex; the fifth lens is a plano-concave negative lens, whose concave surface facing the object side and the flat surface facing the image side are both concave.

3. The infinity-corrected microscope objective according to claim 2, characterized in that: The first lens is made of H-TF5 material; The second lens is made of D-ZK3 material; The third lens is made of H-ZPK7 material; The fourth lens is made of H-ZPK7 material; The fifth lens is made of H-LAK7A material; The sixth lens is made of H-ZF13 material.

4. The infinity-corrected microscope objective according to claim 3, characterized in that: The surface of the first lens facing the object side is a first mirror surface, and the surface of the first lens facing the image side is a second mirror surface; The surface of the second lens facing the object side is the third mirror surface, the cemented surface of the second lens and the third lens is the fourth mirror surface, and the surface of the third lens facing the image side is the fifth mirror surface; The surface of the fourth lens facing the object side is the sixth mirror surface, the cemented surface of the fourth lens and the fifth lens is the seventh mirror surface, and the surface of the fifth lens facing the image side is the eighth mirror surface; The surface of the sixth lens facing the object side is the ninth mirror surface, and the surface of the sixth lens facing the image side is the tenth mirror surface. The curvature radii of the first mirror surface, the fifth mirror surface, and the seventh mirror surface are negative numbers; the curvature radii of the second mirror surface, the third mirror surface, the fourth mirror surface, the sixth mirror surface, the ninth mirror surface, and the tenth mirror surface are positive numbers; and the curvature radius of the eighth mirror surface is infinite.

5. The infinity-corrected microscope objective according to claim 4, characterized in that: The radius of curvature of the first mirror surface is -161.28 to -161.26 mm; The radius of curvature of the second mirror surface is 17.68 to 17.7 mm; The radius of curvature of the third mirror surface is 23.21 to 23.23 mm; The radius of curvature of the fourth mirror surface is 19.96 to 19.98 mm; The curvature radius of the fifth mirror surface is -21.77 to -21.75 mm; The curvature radius of the sixth mirror surface is 70.36 to 70.38 mm; The curvature radius of the seventh mirror surface is -12.51 to -12.49 mm; The curvature radius of the ninth mirror surface is 25.22 to 25.24 mm; The curvature radius of the tenth mirror surface is 18.51 to 18.53 mm.

6. The infinity-corrected microscope objective according to claim 5, characterized in that: The clear aperture of the first mirror is 4.2 mm; The clear aperture of the second mirror is 4.34 mm; The clear aperture of the third mirror is 6.37 mm; The clear aperture of the fourth mirror is 7.2 mm; The light aperture of the fifth mirror is 7.56 mm; The clear aperture of the sixth mirror is 7.34 mm; The light aperture of the seventh mirror is 7.06 mm; The clear aperture of the eighth mirror is 6.82 mm; The clear aperture of the ninth mirror surface is 6.34 mm; The light aperture of the tenth mirror surface is 4.85 mm.

7. The infinity-corrected microscope objective according to claim 6, characterized in that: The mirror distance between the first mirror surface and the second mirror surface is 1.19 to 1.23 mm; The mirror distance between the second mirror surface and the third mirror surface is 5.78 to 5.82 mm; The mirror distance between the third mirror surface and the fourth mirror surface is 9.86 to 9.9 mm; The mirror distance between the fourth mirror surface and the fifth mirror surface is 6.8 to 6.84 mm; The mirror distance between the fifth mirror surface and the sixth mirror surface is 1.03 to 1.07 mm; The mirror distance between the sixth mirror surface and the seventh mirror surface is 5.84 to 5.88 mm; The mirror distance between the seventh mirror surface and the eighth mirror surface is 11.95 to 11.99 mm; The mirror distance between the eighth mirror surface and the ninth mirror surface is 15.07 to 15.11 mm; The mirror distance between the ninth mirror surface and the tenth mirror surface is 11.29 to 11.33 mm.

8. The infinity-corrected microscope objective according to claim 7, characterized in that: The focal length of the tube lens that can be used with the infinity-corrected microscope objective is 200 mm.

9. The infinity-corrected microscope objective according to claim 4, characterized in that: The edge or outer frame of the tenth mirror serves as an aperture stop.

10. A microscope comprising the infinity-corrected microscope objective according to any one of claims 1 to 9.

Images