Multi-surface lead bonding clamping mechanism

Abstract

The invention relates to a multi-surface lead bonding clamping mechanism, which relates to the technical field of semiconductor packaging, and comprises a bottom plate and a support fixed on the bottom plate, the sliding block is connected to the support in a sliding mode and slides along the Z axis; the first rotating base is rotationally connected to the sliding block and rotates with the X axis as the axis at the initial station; the second rotating base is rotationally connected to the first rotating base and rotates with the Y axis as the axis at the initial station; and the carrier is rotationally connected to the second rotating base, rotates by taking the Z axis as the axis at the initial station, and is used for carrying the optical module. The application has the effect of meeting the requirement of full-automatic lead bonding of the optical module.

Description

Technical Field

[0001] The present application relates to the field of semiconductor packaging technology, and in particular to a multi-sided wire bonding clamping mechanism. Background Art

[0002] The fully automatic wire bonding machine is a device that uses ultrasound, pressure and temperature to electrically connect metal wires to semiconductor chips and pins. It uses a transducer and a splitter to apply ultrasonic vibrations to the metal wires, forming a fusion on the chip or pin that contacts the metal wire, thereby achieving a firm electrical connection. With the development of the optical communication industry, there are more and more occasions where wire bonding is used to electrically connect chips and chips, and chips and pins on optical modules. Figure 2 In order to achieve high-speed wire bonding, the Z-direction movement (as shown by the arrow) is generally achieved by rotational movement. To ensure the bonding quality, the bonding is required to be performed when the splitter and the bonding plane are in a vertical relationship. Optical module packaging is a type of semiconductor chip packaging, and the packaging form of the chip and the tube shell is relatively special. In order to achieve the packaging of various tube shells and chips, there are various clamping methods. This aspect is a complex polyhedron wire bonding clamping mechanism.

[0003] Figure 1 It is a type of optical module, which requires wire bonding on planes 01, 02, 03, 04 and 05. There are also several metal pillars 06 on the optical module. There are wire bonding between the top plane 01 and the side planes 02, 03, 04 and 05, and there is also a need to connect two adjacent planes on the side. In addition, wire bonding is also required between the metal pillar 06 and the planes it is close to, and they are connected to the pads on planes 02, 03, 04 and 05 respectively.

[0004] For fully automatic high-speed wire bonding equipment, the Z-direction movement of the bonding head is provided by a rotating motor to achieve the effect of light inertia and high acceleration. To ensure the bonding quality, the splitter and the bonding surface must be perpendicular during bonding, which determines that the height of the wire bonding is basically fixed. This requires that the mechanism for clamping the optical module must not only be adjusted in height, but also in angle to adapt to the purpose of automatic wire bonding. The patent of this invention designs a special clamping mechanism to meet the special needs of this optical module to achieve the purpose of fully automatic wire bonding. Summary of the invention

[0005] In order to meet the demand for fully automatic wire bonding of optical modules, the present application provides a multi-sided wire bonding clamping mechanism.

[0006] The multi-sided wire bonding clamping mechanism provided in the present application adopts the following technical solution: A multi-sided wire bonding clamping mechanism includes a base plate, a support fixed to the base plate; a slider, Slidingly connected to the support and sliding along the Z axis; the first rotating base, rotationally connected to the slider, and rotating with the X axis as the axis at the initial position; the second rotating base, rotationally connected to the first rotating base, and rotating with the Y axis as the axis at the initial position; the carrier, rotationally connected to the second rotating base, and rotating with the Z axis as the axis at the initial position, for carrying the optical module.

[0007] By adopting the above technical solution, the slider can drive the entire processing area to rise and fall so as to adjust the height. The first rotating base and the second rotating base enable the carrier to flip around the X-axis or Y-axis, so that the bonding surface of the optical module is perpendicular to the bonding head, which is convenient for bonding. The carrier can drive the optical module to rotate around the Z-axis, so that the surface that cannot be bonded only by the rotation of the first rotating base and the second rotating base is rotated to an angle that can be bonded, thereby realizing fully automatic adjustment of the height and angle of the optical module and performing fully automatic wire bonding.

[0008] Optionally, it includes a first motor base fixed to the base plate, a second motor base installed on the first motor base A motor; a connecting piece fixed to the side of the slider away from the first rotating base; a lead screw threadedly connected to the connecting piece and rotatably connected to the support, and the axial direction is parallel to the Z-axis direction; the lead screw is driven by the first motor, thereby driving the slider to slide along the Z-axis.

[0009] By adopting the above technical solution, the first motor drives the lead screw to rotate, so that the slider can slide on the support, thereby automatically adjusting the height of the bonding processing area.

[0010] Optionally, it includes a second motor base fixed to the slider and a second motor installed on the second motor base, the second motor base is located on the side of the slider away from the first rotating base, and the output shaft of the second motor base passes through the slider and is connected to the first rotating base.

[0011] By adopting the above technical solution, the rotation of the second motor can drive the first rotating base to rotate, so that the optical module is flipped around the output shaft of the second motor as the axis, so that the bonding surface is perpendicular to the bonding head during bonding.

[0012] Optionally, it includes a third motor base fixed to the first rotating base, and a third motor installed on the third motor base, and the output shaft of the third motor passes through the side wall of the first rotating base and is connected to the second rotating base.

[0013] By adopting the above technical solution, the rotation of the third motor can drive the second rotating base to rotate, so that the optical module is flipped around the output shaft of the third motor as the axis, so that the bonding surface is perpendicular to the bonding head during bonding.

[0014] Optionally, it includes a fourth motor base fixed to the base plate, and a fourth motor installed on the fourth motor base, the first rotating base and the second rotating base are both provided with a through hole on the side facing the fourth motor for the fourth motor output shaft to pass through, a connecting column is installed on the end of the fourth motor output shaft, and a matching groove matching the connecting column is provided on the side of the carrier facing the fourth motor.

[0015] By adopting the above technical solution, the slider drives the carrier to move along the Z-axis direction. When the connecting column is inserted into the matching slot, the rotation of the fourth motor can drive the carrier to rotate with the Z-axis as the axis, so that the optical module rotates with the Z-axis as the axis, and the angle of the optical module is adjusted so that the surface that has not been bonded can be perpendicular to the bonding head.

[0016] Optionally, the second rotating base is provided with a mounting groove, the carrier is located in the mounting groove, the second rotating base is provided with an elastic top screw, and the side wall of the carrier is provided with a corresponding slot.

[0017] By adopting the above technical solution, the carrier needs to remain stable during bonding, and the pressure of the elastic top screw and the cooperation of the slot can make the carrier be fixed after rotating a certain angle, thereby maintaining the stability of the carrier. When it needs to be rotated again, the carrier overcomes the pressure of the elastic top screw and rotates until the elastic top screw enters the next slot.

[0018] Optionally, the second rotating base is provided with a convex arc surface with its own rotation axis as the axis, and the first rotating base is provided with a corresponding concave arc surface, and the arc surfaces of the two match.

[0019] By adopting the above technical solution, the convex arc surface of the second rotating base matches the concave arc surface of the first rotating base, thereby improving the stability of the second rotating base during rotation.

[0020] Optionally, the first rotating base or the second rotating base is provided with a connecting shaft, a coupling and a locking assembly, the locking assembly includes a shaft clamping member and a locking screw for clamping the connecting shaft, and the connecting shaft is connected to the output shaft of the second motor or the third motor through the coupling.

[0021] By adopting the above technical solution, the connecting shaft is connected to the output main phase of the corresponding motor through a coupling, the shaft clamping member clamps the connecting shaft, and then locks it through a locking screw, so that the rotating base is fixed to the corresponding connecting shaft, so that the motor can drive the corresponding rotating base to rotate, and the rotating base can be removed by loosening the locking screw for easy maintenance.

[0022] Optionally, the carrier fixes the optical module by vacuum adsorption or an elastic pressing plate.

[0023] By adopting the above technical solution, the stability of the optical module is maintained during bonding.

[0024] Optionally, the support is installed with a linear guide rail, and the slider is slidably connected to the linear guide rail.

[0025] By adopting the above technical solution, the linear guide rail makes the sliding process of the slider smoother and more stable.

[0026] In summary, the present application includes at least one of the following beneficial technical effects: The optical module is flipped by driving the second motor, the third motor, and the fourth motor to achieve wire bonding between pads and pads, and between pads and metal pillars on multiple planes to ensure that the wedge and the bonded surface are perpendicular during wire bonding; The first rotating base and the second rotating base are mounted on a slide block with adjustable height, so that the height of the bonded surface and the shortening height of the wedge are kept consistent during bonding; The fourth motor adjusts the angle of the carrier through the connecting column and the matching groove on the carrier that matches the connecting column, and cooperates with the sliding of the slider to make the connecting column insert or disengage from the matching groove. After the angle of the carrier is adjusted, it rises again for bonding. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the structure of an optical module.

[0028] Figure 2 It is a schematic diagram of the positional relationship between the bonding head and the optical module during bonding.

[0029] Figure 3 It is a schematic diagram of the overall structure of this application.

[0030] Figure 4 It is a schematic diagram of the back structure of this application.

[0031] Figure 5 It is a schematic cross-sectional structure diagram of the connection portion between the fourth motor and the carrier in the present application.

[0032] Figure 6 It is a structural schematic diagram of the carrier and the elastic top screw in this application.

[0033] Explanation of the accompanying drawings: 1. Base plate; 2. Support; 3. Slider; 4. First rotating base; 5. Second rotating base; 6. Carrier; 7. Second motor; 8. Third motor; 9. First motor seat; 10. First motor; 11. Driving wheel; 12. Connecting piece; 121. Fixing block; 122. Screw nut; 13. Screw; 14. Driven wheel; 15. Synchronous toothed belt; 16. Linear guide; 17. Second motor seat; 18. Third motor seat; 19. Connecting shaft; 20. Coupling; 21. Locking assembly; 211. Shaft clamp; 212. Locking screw; 22. Fourth motor seat; 23. Fourth motor; 24. Through hole; 25. Mounting groove; 26. Connecting column; 27. Matching groove; 28. Elastic top screw; 29. ​​Slot. DETAILED DESCRIPTION

[0034] The following is combined with Figure 3-6 This application is described in further detail.

[0035] The embodiment of the present application discloses a multi-sided wire bonding clamping mechanism, referring to FIG. 3, comprising a base plate 1, a support 2 vertically mounted on the base plate 1 by screws, a slider 3, a first rotating base 4, a second rotating base 5, a carrier 6 for carrying an optical module, a second motor 7, and a third motor 8. In this embodiment, the length direction of the support 2 is the Z axis (i.e., the vertical direction), the axial direction of the output shaft of the second motor 7 is the X axis, and the axial direction of the output shaft of the third motor 8 located at the initial position is the Y axis.

[0036] Reference Figure 4 , further comprising a first motor seat 9 fixed to the bottom plate 1 by screws, a first motor 10 installed on the first motor seat 9 by screws, a connecting member 12 fixed to the side of the slider 3 away from the first rotating base 4, a lead screw 13 threadedly connected to the connecting member 12 and rotatably connected to the support 2 through a bearing; further comprising a driving wheel 11 coaxially fixed to the output shaft of the first motor 10, a driven wheel 14 coaxially installed at the lower end of the lead screw 13, and a synchronous toothed belt 15 meshed with the driving wheel 11 and the driven wheel 14. The connecting member 12 comprises a fixing block 121 fixed to the side wall of the slider 3 by screws and a lead screw nut 122 fixed to the fixing block 121 by screws, and the lead screw 13 is threadedly penetrated through the lead screw nut 122. The support 2 is vertically mounted with linear guides 16 on both sides of the slider 3, and the slider 3 is slidably connected to the linear guides 16. The first motor 10 is arranged vertically downward, and the first motor 10 drives the lead screw 13 to rotate through the transmission of the driving wheel 11, the synchronous toothed belt 15 and the driven wheel 14, so that the slider 3 slides along the linear guide 16, so that the processing area is adjusted along the Z-axis direction. The first motor 10 can also be arranged vertically upward, and then connected to the lead screw 13 through a coupling, thereby driving the lead screw 13 to rotate. The method adopted in this embodiment can reduce the overall height of the device.

[0037] Reference Figure 3 and Figure 4 The first rotating base 4 is rotatably connected to the side of the slider 3 away from the first motor 10 through a bearing. The slider 3 is located on the side away from the first rotating base 4 and is installed with a second motor seat 17 through screws. The second motor 7 is installed on the second motor seat 17 through screws. The second motor 7 is used to drive the first rotating base 4 to rotate around the X-axis, so that the optical module to be processed can be flipped around the X-axis.

[0038] The third motor base 18 is also included, which is fixed to the side of the first rotating base 4 by screws, and the third motor 8 is installed to the third motor base 18 by screws. The second rotating base 5 is rotatably connected to the upper surface of the first rotating base 4 by a bearing, and the second rotating base 5 is driven by the third motor 8 and rotates around the Y axis, so that the optical module can be flipped around the Y axis.

[0039] The first rotating base 4 and the second rotating base 5 are both provided with a connecting shaft 19, a coupling 20 and a locking assembly 21. The first rotating base 4 is connected to the output shaft of the second motor 7 through the connecting shaft 19 and the coupling 20, and the second rotating base 5 is connected to the output shaft of the third motor 8 through the connecting shaft 19 and the coupling 20. The locking assembly 21 includes a shaft clamp 211 and a locking screw 212 for clamping the connecting shaft 19. The connecting shaft 19 is clamped by the shaft clamp 211, and then the connecting shaft 19 is clamped by tightening the locking screw 212, so that the motor is connected to the corresponding rotating base, which is also convenient for subsequent installation and disassembly.

[0040] The lower surface of the second rotating base 5 is a convex arc surface with its own rotation axis as the axis, and the upper surface of the first rotating base 4 is provided with a corresponding concave arc surface, and the arc surfaces of the two match, thereby improving the stability of the second rotating base 5 during rotation.

[0041] Reference Figure 3 , Figure 5 and Figure 6, further comprising a fourth motor seat 22 fixed to the bottom plate 1 by screws, a fourth motor 23 installed on the fourth motor seat 22 by screws, and the output shaft of the fourth motor 23 is arranged vertically upward. The first rotating base 4 and the second rotating base 5 are located above the fourth motor 23, and a through hole 24 for the output shaft of the fourth motor 23 to pass through is provided on the side facing the fourth motor 23, and a mounting groove 25 is provided on the side of the second rotating base 5 away from the fourth motor 23, and the carrier 6 is installed in the mounting groove 25. A connecting column 26 is installed at the end of the output shaft of the fourth motor 23, and the connecting column 26 is a hexagonal column. A matching groove 27 matching the connecting column 26 is provided on the side of the carrier 6 facing the fourth motor 23, and the cross section of the matching groove 27 is also a regular hexagon. After the through holes 24 of the first rotating base 4 and the second rotating base 5 are aligned with the fourth motor 23, the first motor 10 drives the slider 3 to descend, so that the connecting column 26 is inserted into the matching groove 27, and then the fourth motor 23 drives the carrier 6 to rotate with the Z axis as the axis, thereby rotating the optical module, which is convenient for subsequent processing of different surfaces of the optical module, and the optical module is fixed by vacuum adsorption of the side wall of the optical module, or by a single or multiple elastic pressure plates against the side wall of the optical module to clamp and fix the optical module. After the rotation of the optical module is completed, the slider 3 rises to make the connecting column 26 disengage from the matching groove 27, and then the first rotating base 4 and the second rotating base 5 rotate according to the processing needs.

[0042] The second rotating base 5 is provided with an elastic top screw 28, which includes a compression spring and a steel ball. A matching slot is provided on the side wall of the carrier 6. The steel ball is pushed into the slot by the elastic force of the compression spring to fix the carrier 6. There are four slots evenly distributed on the side wall of the carrier 6. The fourth motor 23 drives the carrier 6 to rotate to overcome the pressure of the elastic top screw 28. After rotating 90°, the fourth motor 23 stops rotating, and the slider 3 rises so that the bonding surface is perpendicular to the splitting knife for the next bonding step.

[0043] The implementation principle of the embodiment of the present application is: the first rotating base 4 and the second rotating base 5 are used to drive the optical module to rotate around the X, Y, and Z axes, so as to adjust the angle so that the bonding surface is perpendicular to the bonding head, and the height is adjusted by the slider 3. However, the rotation of the first rotating base 4 and the second rotating base 5 alone cannot make all the bonding surfaces to be bonded. Therefore, the optical module is rotated around the Z axis through the fourth motor 23. After the rotation is completed, the slider 3 drives the optical module to rise to continue wire bonding.

[0044] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A multi-sided wire bonding clamping mechanism, characterized in that: The optical module comprises a base plate (1), a support (2) fixed to the base plate (1); a slider (3) slidably connected to the support (2) and sliding along the Z axis; a first rotating base (4) rotatably connected to the slider (3) and rotating around the X axis at the initial position; a second rotating base (5) rotatably connected to the first rotating base (4) and rotating around the Y axis at the initial position; and a carrier (6) rotatably connected to the second rotating base (5) and rotating around the Z axis at the initial position, for carrying an optical module.

2. A multi-sided wire bonding clamping mechanism according to claim 1, characterized in that: The invention comprises a first motor seat (9) fixed to the base plate (1), and a first motor (10) installed on the first motor seat (9); a connecting member (12) fixed to the side of the slider (3) away from the first rotating base (4); a lead screw (13) threadedly connected to the connecting member (12) and rotatably connected to the support (2), and the axial direction of the lead screw (13) is parallel to the Z axis direction; the lead screw (13) is driven by the first motor (10), thereby driving the slider (3) to slide along the Z axis.

3. The multi-sided wire bonding clamping mechanism according to claim 1, characterized in that: The invention comprises a second motor seat (17) fixed to the slider (3) and a second motor (7) mounted on the second motor seat (17); the second motor seat (17) is located on a side of the slider (3) away from the first rotating base (4); and an output shaft of the second motor (7) passes through the slider (3) and is connected to the first rotating base (4).

4. The multi-sided wire bonding clamping mechanism according to claim 1, characterized in that: It comprises a third motor base (18) fixed to the first rotating base (4), and a third motor (8) installed on the third motor base (18); the output shaft of the third motor (8) passes through the side wall of the first rotating base (4) and is connected to the second rotating base (5).

5. The multi-sided wire bonding clamping mechanism according to claim 1, characterized in that: The invention comprises a fourth motor seat (22) fixed to a bottom plate (1), and a fourth motor (23) mounted on the fourth motor seat (22); a through hole (24) for the output shaft of the fourth motor (23) to pass through is provided on the first rotating base (4) and the second rotating base (5) on the side facing the fourth motor (23); a connecting column (26) is installed at the end of the output shaft of the fourth motor (23); and a matching groove (27) matching the connecting column (26) is provided on the side facing the fourth motor (23).

6. The multi-sided wire bonding clamping mechanism according to claim 5, characterized in that: The second rotating base (5) is provided with a mounting groove (25), the carrier (6) is located in the mounting groove (25), the second rotating base (5) is provided with an elastic top screw (28), and the side wall of the carrier (6) is provided with a corresponding clamping groove (29).

7. The multi-sided wire bonding clamping mechanism according to claim 1, characterized in that: The second rotating base (5) is provided with a convex arc surface with its own rotation axis as the axis, and the first rotating base (4) is provided with a corresponding concave arc surface, and the arc surfaces of the two are matched.

8. A multi-sided wire bonding clamping mechanism according to claim 3 or 4, characterized in that: The first rotating base (4) or the second rotating base (5) is provided with a connecting shaft (19), a coupling (20) and a locking assembly (21); the locking assembly (21) comprises a shaft clamp (211) and a locking screw (212) for clamping the connecting shaft (19); the connecting shaft (19) is connected to the output shaft of the second motor (7) or the third motor (8) through the coupling (20).

9. A multi-sided wire bonding clamping mechanism according to any one of claims 1 to 7, characterized in that: The carrier (6) fixes the optical module by vacuum adsorption or elastic pressing plate.

10. A multi-sided wire bonding clamping mechanism according to any one of claims 1 to 7, characterized in that: The support (2) is installed with a linear guide rail (16), and the slider (3) is slidably connected to the linear guide rail (16).

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