Radio frequency drive device and radio frequency power supply system

Abstract

This application provides a radio frequency (RF) driving device and an RF power supply system. The RF driving device includes an input terminal, an output terminal, and N RF driving circuits connected between the input terminal and the output terminal. The input terminal and the output terminal are respectively connected to a DC power supply and an RF generator. Each RF driving circuit has a driving state and a stopped driving state. Each RF driving circuit is used to convert DC power into target power when in the driving state, and to stop receiving DC power from the DC power supply when in the stopped driving state. The driving output terminals of the N RF driving circuits are connected in sequence and connected to the output terminal through the driving output terminal of the last RF driving circuit to form an output path, so that the target power output by the RF driving circuit in the driving state is transmitted to the output terminal through the output path and then output to the RF generator. This application can protect the RF generator.

Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and in particular to a radio frequency driving device and a radio frequency power supply system. Background Technology

[0002] Currently, with the rapid development of radio frequency (RF) technology, RF power supply systems are increasingly used in high-power scenarios to provide the required RF power to the load. This often involves using an RF generator to produce RF power and transmit it to the load. However, RF generators are easily affected by reflected power; large reflected power can destroy an RF generator in a short time. Therefore, how to protect RF generators has become a crucial issue. Summary of the Invention

[0003] This application provides a radio frequency (RF) driving device and an RF power supply system, which can quickly and effectively protect the RF generator and prevent it from being destroyed.

[0004] In a first aspect, a radio frequency (RF) driving device is provided. The RF driving device includes an input terminal, an output terminal, and N RF driving circuits connected between the input terminal and the output terminal. The input terminal and the output terminal are respectively connected to a DC power supply and an RF generator. Each RF driving circuit has a driving state and a stopped driving state. When in the driving state, each RF driving circuit receives DC power output from the DC power supply through the input terminal and converts the DC power into target power. When in the stopped driving state, it stops receiving DC power output from the DC power supply. The voltage values ​​of the target power obtained by the N RF driving circuits are all different. The driving output terminals of the N RF driving circuits are sequentially connected and connected to the output terminal through the driving output terminal of the last RF driving circuit to form an output path. This allows the target power output by the RF driving circuit in the driving state to be transmitted to the output terminal through the output path and then output to the RF generator through the output terminal. Where N ≥ 2.

[0005] In one possible implementation, the output terminal includes a positive output terminal and a negative output terminal, and the drive output terminal of each radio frequency drive circuit includes a positive drive output terminal and a negative drive output terminal. The positive drive output terminals and negative drive output terminals of the N radio frequency drive circuits are alternately connected between the positive output terminal and the negative output terminal.

[0006] In one possible implementation, each RF driving circuit includes an inverter unit, a coupling unit, and a rectifier unit, which are sequentially connected between the input terminal and the positive output terminal. The inverter unit receives DC power and inverts it into AC power when in the driving state, and stops receiving DC power when in the stopped driving state. The coupling unit receives AC power and couples it to the rectifier unit. The rectifier unit rectifies the AC power coupled by the coupling unit into the target DC power. Each rectifier unit has a positive drive output terminal and a negative drive output terminal, and the positive and negative drive output terminals of N rectifier units are alternately connected.

[0007] In one possible implementation, the inverter unit includes an inverter bridge. When the inverter bridge alternately turns on and off with a certain duty cycle, the inverter unit is in the driving state; and when the inverter bridge remains off, the inverter unit is in the stopped driving state. The coupling unit includes a transformer, and the rectifier unit includes a rectifier bridge. The primary winding of the transformer is connected to the inverter bridge, and the secondary winding of the transformer is connected to the rectifier bridge. The primary and secondary windings of the transformer are coupled to couple the AC power from the first winding side of the transformer to the secondary winding side, and to transmit the coupled AC power to the rectifier bridge.

[0008] In one possible implementation, the radio frequency driving device further includes a control unit connected to each radio frequency driving circuit, the control unit being used to control each radio frequency driving circuit to be in the driving state or the stopped driving state.

[0009] In one possible implementation, the radio frequency (RF) driving device further includes a discharge circuit connected between the drive output terminal of the RF driving circuit at the end and the output terminal, and connected to ground. The discharge circuit is configured to, in a first connection state, continuously transmit the target electrical energy output by the RF driving circuit in the driving state to the RF generating device, and, in a second connection state, stop transmitting the target electrical energy output by the RF driving circuit in the driving state to the RF generating device, and discharge the electrical energy of the RF generating device to ground.

[0010] In one possible implementation, the radio frequency driving device further includes a parameter acquisition unit, which is connected to the radio frequency generating device to acquire a first parameter of the radio frequency generating device. The control unit is also connected to the parameter acquisition unit and the bleeder circuit, and is configured to receive the first parameter, control the bleeder circuit to be in a first connection state when the first parameter does not meet a first preset condition, and control the bleeder circuit to be in a second connection state when the first parameter meets the first preset condition.

[0011] In one possible implementation, the discharge circuit includes a switch module, a first discharge module, and a second discharge module. The switch module is connected between the drive output terminal and the output terminal of the RF drive circuit located at the end. The switch module is configured to be in a first ON state or a first OFF state to respectively connect or disconnect the connection path between the drive output terminal and the output terminal of the RF drive circuit located at the end, thereby correspondingly causing the target electrical energy output by the RF drive circuit in the drive state to continuously transmit or stop transmitting to the RF generator. The first discharge module is connected in parallel with the switch module between the drive output terminal and the output terminal of the RF drive circuit located at the end. The first discharge module is configured to be in a second ON state or a second OFF state to correspondingly discharge or stop discharging electrical energy from the RF generator. The second discharge module is connected between the connection point between the switch module and the output terminal and ground. The second discharge module is configured to be in a third ON state or a third OFF state to correspondingly discharge or stop discharging electrical energy from the RF generator. Specifically, when the switch module is in the first conducting state, the first discharge module is in the second disconnected state, and the second discharge module is in the third disconnected state, the discharge circuit is in the first connected state; when the switch module is in the first disconnected state, the first discharge module is in the second conducting state, and / or the second discharge module is in the third conducting state, the discharge circuit is in the second connected state.

[0012] In one possible implementation, the voltage values ​​of the target electrical energy obtained by the N radio frequency driving circuits decrease sequentially, and the voltage value of the target electrical energy obtained by the (N-1)th radio frequency driving circuit is 1 / 2 of the voltage value of the target electrical energy obtained by the Nth radio frequency driving circuit.

[0013] Secondly, a radio frequency (RF) power supply system is also provided, comprising a DC power supply, an RF generator, and an RF driving device. The RF driving device includes an input terminal, an output terminal, and N RF driving circuits connected between the input terminal and the output terminal. The input terminal and the output terminal are respectively connected to the DC power supply and the RF generator. Each RF driving circuit has a driving state and a stopped driving state. When in the driving state, each RF driving circuit receives DC power output from the DC power supply through its input terminal and converts the DC power into target power. When in the stopped driving state, it stops receiving DC power output from the DC power supply. The voltage values ​​of the target power obtained by the N RF driving circuits are all different. The driving output terminals of the N RF driving circuits are sequentially connected and connected to the output terminal through the driving output terminal of the last RF driving circuit to form an output path. This allows the target power output by the RF driving circuit in the driving state to be transmitted to the output terminal through the output path and then output to the RF generator through the output terminal, where N ≥ 2.

[0014] The radio frequency (RF) driving device and RF power supply system of this application are configured such that each RF driving circuit connected between the DC power supply and the RF generator has a driving state and a stopped driving state, and converts DC power into target power and outputs it to the RF generator to drive the RF generator. Furthermore, in the driving state, it receives DC power output from the DC power supply through its input terminal and converts the DC power into target power; in the stopped driving state, it stops receiving DC power output from the DC power supply. An output path is formed by sequentially connecting the drive output terminals of N RF driving circuits and connecting the drive output terminal of the last RF driving circuit to the output terminal. This allows the target power output by the RF driving circuit in the driving state to be transmitted to the RF generator through the output path. Therefore, when the RF generator does not require protection, it can output one or more target powers with higher voltage values ​​to generate RF power; and when the RF generator requires protection, it can output one or more target powers with lower voltage values, or even not output any target power to the RF generator. This rapidly reduces reflected power and provides rapid and effective protection for the RF generator, preventing it from being destroyed. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0016] Figure 1This is a block diagram of a radio frequency driving device according to an embodiment of this application.

[0017] Figure 2 This is a block diagram of a radio frequency driving device in another embodiment of this application.

[0018] Figure 3 This is a circuit diagram of a radio frequency driving device in one embodiment of this application.

[0019] Figure 4 This is a block diagram of a discharge circuit in one embodiment of this application.

[0020] Figure 5 This is a circuit diagram of the discharge circuit in one embodiment of this application.

[0021] Figure 6 This is a schematic diagram of a radio frequency power supply system in one embodiment of this application.

[0022] Explanation of reference numerals in the attached diagram: 1000, RF power supply system; DC, DC power supply; DC1, DC power; PA, RF generator; 10, RF drive device; In, input terminal; In+, positive input terminal; In-, negative input terminal; Out, output terminal; Out+, positive output terminal; Out-, negative output terminal; 100, RF drive circuit; Id+, positive drive input terminal; Id-, negative drive input terminal; Od, drive output terminal; Od+, positive drive output terminal; Od-, negative drive output terminal; D C2, Target Power; 110, Inverter Unit; 111, Inverter Bridge; 120, Coupling Unit; 121, Transformer; 130, Rectifier Unit; 131, Rectifier Bridge; 200, Control Unit; 300, Discharge Circuit; 310, Switch Module; S3, Third Switch; 320, First Discharge Module; D1, First Diode; L1, First Inductor; S1, First Switch; 330, Second Discharge Module; R1, First Resistor; S2, Second Switch; 400, Parameter Acquisition Unit; P1, First Parameter; GND, Ground. Detailed Implementation

[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0024] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0025] Hereinafter, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this application, unless otherwise stated, "a plurality of" means two or more.

[0026] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0027] Please see Figure 1 , Figure 1 This is a block diagram of a radio frequency driving device according to an embodiment of this application. Figure 1 As shown, this application provides a radio frequency (RF) driving device 10, which includes an input terminal In, an output terminal Out, and N RF driving circuits 100. The N RF driving circuits 100 are connected between the input terminal In and the output terminal Out. The input terminal In and the output terminal Out are respectively connected to a DC power supply DC and an RF generator PA. Each RF driving circuit 100 has a driving state and a stopped driving state. When in the driving state, each RF driving circuit 100 is used to receive DC power DC1 output by the DC power supply DC through the input terminal In and convert the DC power DC1 into target power DC2. When in the stopped driving state, it stops receiving DC power DC1 output by the DC power supply DC. In this circuit, the voltage values ​​of the target electrical energy DC2 obtained by the N radio frequency driving circuits 100 are different from each other, and the driving output terminals Od of the N radio frequency driving circuits 100 are connected in sequence and connected to the output terminal Out through the driving output terminal Od of the end radio frequency driving circuit 100 to form an output path, so that the target electrical energy DC2 output by the radio frequency driving circuit 100 in the driving state is transmitted to the output terminal Out through the output path and output to the radio frequency generator PA through the output terminal Out, wherein N≥2.

[0028] In one or more embodiments, when there is only one RF drive circuit 100 in the driving state, the target electrical energy DC2 output by the RF drive circuit 100 is transmitted to the output terminal Out through the output path. At this time, the electrical energy output to the RF generator PA is the target electrical energy DC2 output by the one RF drive circuit 100.

[0029] In one or more embodiments, when two or more radio frequency driving circuits 100 are in a driving state, the target electrical energy DC2 output by the two or more radio frequency driving circuits 100 in the driving state is transmitted to the radio frequency generator PA through the output path. At this time, the electrical energy output to the radio frequency generator PA is the sum of the target electrical energy DC2 output by the two or more radio frequency driving circuits 100.

[0030] Therefore, the radio frequency driving device 10 described above in this application, by configuring each of the connections between the DC power supply DC and the radio frequency generator PA to have a driving state and a stopped driving state, and converting DC power DC1 into target power DC2 and outputting it to the radio frequency generator PA, realizes the driving of the radio frequency generator PA. Furthermore, it is configured to receive DC power DC1 output from the DC power supply DC through the input terminal In when in the driving state, and convert DC power DC1 into target power DC2, and to stop receiving DC power DC1 output from the DC power supply DC when in the stopped driving state. It is also configured to connect the driving output terminals Od of N radio frequency driving circuits 100 sequentially and to the radio frequency driving circuit 10 located at the end. The drive output terminal Od of 0 is connected to the output terminal Out to form an output path, so that the target power DC2 output by the RF drive circuit 100 in the drive state is transmitted to the RF generator PA through the output path. This allows the RF generator PA to output one or more target power DC2 with a higher voltage value to generate RF power when the RF generator PA does not need protection, and to output one or more target power DC2 with a lower voltage value to the RF generator PA when the RF generator PA needs protection, or even not output any target power DC2 to the RF generator PA, so as to quickly reduce the reflected power and provide fast and effective protection for the RF generator PA, and prevent the RF generator PA from being destroyed.

[0031] Specifically, the magnitude of the reflected power is related to the voltage value of the radio frequency power generated by the radio frequency generator PA. In high-power scenarios, the voltage value of the radio frequency power is very high, and the sum of the voltage values ​​of one or more target power DC2 output to the radio frequency generator PA also needs to be very high. Therefore, the reflected power generated when there is impedance mismatch is very large, and the radio frequency generator PA will be destroyed in a very short time. Therefore, through the above structure, this application can freely select one or more radio frequency drive circuits 100 to be in the driving state. And due to the existence of the output path, one or more radio frequency drive circuits 100 in the driving state can all output through the output path. Thus, different or different numbers of radio frequency drive circuits 100 can be selected to be in the driving state as needed, thereby increasing or decreasing the voltage value output to the radio frequency generator PA. When protection is required, fewer radio frequency drive circuits 100 or radio frequency drive circuits 100 with lower output voltage can be selected to be in the driving state, thereby quickly reducing the sum of the voltage values ​​of one or more target power DC2 output to the radio frequency generator PA, which also quickly reduces the reflected power and effectively prevents the radio frequency generator PA from being destroyed.

[0032] In one or more embodiments, the DC power supply DC may include a DC source that outputs DC power DC1, or an AC source that outputs AC power and a rectifier device, the rectifier device being used to rectify the AC power into DC power DC1, so that the DC power supply DC outputs DC power DC1.

[0033] In one or more embodiments, each radio frequency drive circuit 100 may convert DC power DC1 into DC target power DC2 or convert DC power DC1 into AC target power DC2 as needed by the radio frequency generator PA to drive the radio frequency generator PA.

[0034] In one or more embodiments, the radio frequency generator PA can be used to generate radio frequency power based on one or more target electrical powers DC2, and to transmit the radio frequency power to a load. The radio frequency generator PA may include a radio frequency power amplifier.

[0035] In one or more embodiments, the voltage value of the target electrical energy DC2 generated by at least one radio frequency drive circuit 100 is less than a second preset value, thereby ensuring that the radio frequency generator PA is not destroyed.

[0036] In one or more embodiments, the drive input terminals (not shown in the figure) of N radio frequency drive circuits 100 are all connected to the input terminal In.

[0037] Please refer to the following: Figure 2 , Figure 2 This is a block diagram of a radio frequency driving device according to another embodiment of this application. Figure 1 , Figure 2 As shown, the output terminal Out includes a positive output terminal Out+ and a negative output terminal Out-. The drive output terminal Od of each RF drive circuit 100 includes a positive drive output terminal Od+ and a negative drive output terminal Od-. The positive drive output terminals Od+ and negative drive output terminals Od- of N RF drive circuits 100 are connected alternately and are connected between the positive output terminal Out+ and the negative output terminal Out-.

[0038] Therefore, in the above-mentioned radio frequency driving device 10 of this application, the positive driving output terminal Od+ or the negative driving output terminal Od- of each radio frequency driving circuit 100 is connected to the negative driving output terminal Od- or the positive driving output terminal Od+ of the adjacent radio frequency driving circuit 100, so that the driving output terminals Od of N radio frequency driving circuits 100 are connected in sequence and connected to the output terminal Out through the driving output terminal Od of the radio frequency driving circuit 100 located at the end to form an output path.

[0039] like Figure 1 , Figure 2 As shown, each RF drive circuit 100 includes an inverter unit 110, a coupling unit 120, and a rectifier unit 130, which are sequentially connected between the input terminal In and the positive output terminal Out+. The inverter unit 110 receives DC power DC1 in the drive state and inverts it into AC power, and stops receiving DC power DC1 in the stop drive state. The coupling unit 120 receives AC power and couples it to the rectifier unit 130. The rectifier unit 130 rectifies the AC power coupled by the coupling unit 120 into the target DC power DC2. Each rectifier unit 130 has a positive drive output terminal Od+ and a negative drive output terminal Od-, and the positive drive output terminals Od+ and negative drive output terminals Od- of N rectifier units 130 are alternately connected.

[0040] Therefore, the radio frequency driving device 10 described above in this application, by setting each radio frequency driving circuit 100 to include an inverter unit 110, a coupling unit 120 and a rectifier unit 130 in cooperation, can realize the transmission of the target electrical energy DC2 output by the radio frequency driving circuit 100 in the driving state to the output terminal Out through the output path, and output to the radio frequency generator PA through the output terminal Out.

[0041] Please refer to the following: Figure 3 , Figure 3 This is a circuit diagram of a radio frequency driving device according to an embodiment of this application. Figure 1 , Figure 2 , Figure 3As shown, the inverter unit 110 includes an inverter bridge 111. When the inverter bridge 111 is alternately turned on or off with a certain duty cycle, the inverter unit 110 is in a driving state, and when the inverter bridge 111 is kept off, the inverter unit 110 is in a stopped driving state. The coupling unit 120 includes a transformer 121, and the rectifier unit 130 includes a rectifier bridge 131. The primary winding of the transformer 121 is connected to the inverter bridge 111, and the secondary winding of the transformer 121 is connected to the rectifier bridge 131. The primary winding and the secondary winding of the transformer 121 are coupled to couple the AC power from the first winding side of the transformer 121 to the secondary winding side of the transformer 121, and transmit the coupled AC power to the rectifier bridge 131.

[0042] In one or more embodiments, the inverter bridge 111 can be a full-bridge inverter or a half-bridge inverter. This application is not limited to this, as long as it includes at least one switch that can be turned on or off.

[0043] like Figure 3 As shown, each RF driving circuit 100 may include a positive driving input terminal Id+ and a negative driving input terminal Id-.

[0044] like Figure 3 As shown, the input terminal In includes a positive input terminal In+ and a negative input terminal In-. Each inverter bridge 111 has a positive drive input terminal Id+ and a negative drive input terminal Id-. The positive drive input terminal Id+ of each inverter bridge 111 is connected to the positive input terminal In+, and the negative drive input terminal Id- of each inverter bridge 111 is grounded to GND.

[0045] In one or more embodiments, the rectifier bridge 131 can be a half-wave rectifier bridge or a full-wave rectifier bridge. This application is not limited to this, as long as it includes at least one diode and can rectify the coupled AC power into the target DC power DC2.

[0046] like Figure 3 As shown, each rectifier bridge 131 has a positive drive output terminal Od+ and a negative drive output terminal Od-, and the positive drive output terminals Od+ and negative drive output terminals Od- of N rectifier bridges 131 are connected alternately. The positive drive output terminal Od+ of the rectifier bridge 131 at the end is connected to the positive output terminal Out+, and the negative drive output terminal Od- of the rectifier bridge 131 at the beginning can be grounded to GND through the negative output terminal Out-.

[0047] In one or more embodiments, each inverter bridge 111 may include two sets of switches, each set of switches including two switches connected in series, the two sets of switches being connected in parallel between the connection point between the positive drive input terminal Id+ and one end of the primary winding of the transformer 121 and the connection point between the negative drive input terminal Id- and the other end of the primary winding of the transformer 121, and the connection point between the two switches of one set of switches being connected to the connection point between the two switches of the other set of switches, so as to form an inverter full bridge.

[0048] In one or more embodiments, each rectifier bridge 131 may include two diodes, the negative terminal of one diode being connected to one end of the secondary winding of transformer 121, the positive terminal of one diode being connected to the positive drive output terminal Od+, the other end of the secondary winding of transformer 121 being connected to the negative drive output terminal Od-, the negative terminal of the other diode being connected to the connection point between the negative terminal of one diode and one end of the secondary winding of transformer 121, and the positive terminal of the other diode being connected to the connection point between the other end of the secondary winding of transformer 121 and the negative drive output terminal Od-, to form a full-wave rectifier bridge.

[0049] In one or more embodiments, each RF driving circuit 100 may further include an energy storage capacitor connected between the positive drive output terminal Od+ and the negative drive output terminal Od- of the corresponding rectifier bridge 131.

[0050] Please refer to it again. Figure 2 .like Figure 1 , Figure 2 As shown, the radio frequency driving device 10 also includes a control unit 200, which is connected to each radio frequency driving circuit 100. The control unit 200 is used to control each radio frequency driving circuit 100 to be in a driving state or a stopped driving state.

[0051] Therefore, the radio frequency driving device 10 described above in this application can control each radio frequency driving circuit 100 by setting a control unit 200.

[0052] Furthermore, the control unit 200 can control each radio frequency drive circuit 100 to be in a driving state or a stopped driving state by controlling the inverter bridge 111 of each radio frequency drive circuit 100 to be turned on or off with a certain duty cycle, or to be continuously turned off.

[0053] like Figure 1 , Figure 2As shown, the RF driving device 10 also includes a discharge circuit 300. The discharge circuit 300 is connected between the drive output terminal Od and the output terminal Out of the RF driving circuit 100 located at the end, and is connected to ground GND. Specifically, the discharge circuit 300 is used to ensure that, in a first connection state, the target electrical energy DC2 output by the RF driving circuit 100 in the driving state is continuously transmitted to the RF generator PA through the drive output terminal Od of the RF driving circuit 100 located at the end; and in a second connection state, to stop the transmission of the target electrical energy DC2 output by the RF driving circuit 100 in the driving state to the RF generator PA, and to discharge the electrical energy of the RF generator PA to ground GND.

[0054] Therefore, the radio frequency driving device 10 described above in this application, by providing a discharge circuit 300 connected to the corresponding position, can discharge the power of the radio frequency generator PA to ground GND when needed.

[0055] like Figure 1 , Figure 2 As shown, the RF driving device 10 further includes a parameter acquisition unit 400, which is connected to the RF generator PA to acquire a first parameter P1 of the RF generator PA. The control unit 200 is also connected to the parameter acquisition unit 400 and the discharge circuit 300. The control unit 200 receives the first parameter P1, controls the discharge circuit 300 to be in a first connection state when the first parameter P1 does not meet a first preset condition, and controls the discharge circuit 300 to be in a second connection state when the first parameter P1 meets the first preset condition.

[0056] Therefore, the radio frequency driving device 10 described above in this application can obtain the first parameter P1 of the radio frequency generator PA through the parameter acquisition unit 400, so that the control unit 200 can control the connection state of the bleeder circuit 300 according to the first parameter P1, and specifically configured to control the bleeder circuit 300 to be in the first connection state when the first parameter P1 does not meet the first preset condition, and to control the bleeder circuit 300 to be in the second connection state when the first parameter P1 meets the first preset condition.

[0057] Please refer to the following: Figure 4 , Figure 4 This is a block diagram of a discharge circuit according to one embodiment of this application. Figure 1 , Figure 2 , Figure 4As shown, the discharge circuit 300 includes a switch module 310, a first discharge module 320, and a second discharge module 330. The switch module 310 is connected between the drive output terminal Id and the output terminal Out of the RF drive circuit 100 located at the end. The switch module 310 is configured to be in a first on state or a first off state to respectively connect or disconnect the connection path between the drive output terminal Id and the output terminal Out of the RF drive circuit 100 located at the end, thereby correspondingly causing the target electrical energy DC2 output by the RF drive circuit 100 in the drive state to be continuously or stopped being transmitted to the RF generator PA through the drive output terminal Id of the RF drive circuit 100 located at the end. The first discharge module 320 is connected in parallel with the switch module 310 between the drive output terminal Id and the output terminal Out of the RF drive circuit 100 located at the end. The first discharge module 320 is configured to be in a second on state or a second off state to correspondingly discharge or stop discharging the electrical energy of the RF generator PA. The second discharge module 330 is connected between the connection point between the switch module 310 and the output terminal Out and ground GND. The second discharge module 330 is used to be in a third on state or a third off state to discharge or stop the discharge of electrical energy from the radio frequency generator PA. Specifically, when the switch module 310 is in the first on state, the first discharge module 320 is in the second off state, and the second discharge module 330 is in the third off state, the discharge circuit 300 is in the first connected state; when the switch module 310 is in the first off state, the first discharge module 320 is in the second on state and / or the second discharge module 330 is in the third on state, the discharge circuit 300 is in the second connected state.

[0058] Specifically, such as Figure 2 As shown, the drive output terminal Id of the RF drive circuit 100 located at the end is the positive drive output terminal Id+ of the RF drive circuit 100 located at the end, and the output terminal Out can be the positive output terminal Out+.

[0059] In one or more embodiments, the first parameter P1 includes a reflection power value, and the first preset condition is that the reflection power value is greater than or equal to a first preset value.

[0060] Therefore, the radio frequency driving device 10 described above in this application, by configuring the first parameter P1 including the reflected power value, and the first preset condition being that the reflected power value is greater than or equal to the first preset value, enables the control unit 200 to control the discharge circuit 300 to be in the second connection state when the reflected power value is too large, that is, when the reflected power value is greater than or equal to the first preset value, thereby protecting the radio frequency generator PA.

[0061] In one or more embodiments, the first parameter P1 may also include one or more parameters such as voltage standing wave ratio, reflection coefficient, and transmission power ratio, and the first preset condition is the relationship between the corresponding parameter and the first preset value.

[0062] In one or more embodiments, the second connection state includes a first discharge connection state, a second discharge connection state, and a third discharge connection state. When the first discharge module 320 is in a second conduction state and the second discharge module 330 is in a third conduction state, the discharge circuit 300 is in the first discharge connection state; when the first discharge module 320 is in the second conduction state and the second discharge module 330 is in a third disconnection state, the discharge circuit 300 is in the second discharge connection state; when the first discharge module 320 is in the second disconnection state and the second discharge module 330 is in the third conduction state, the discharge circuit 300 is in the third discharge connection state. The discharge rate of the discharge circuit 300 to the RF generator PA decreases sequentially when it is in the first discharge connection state, the second discharge connection state, and the third discharge connection state, respectively.

[0063] In one or more embodiments, the parameter acquisition unit 400 may also be connected to the output terminal Out to acquire the voltage value at the output terminal Out. The control unit 200 is also configured to receive the voltage value at the output terminal Out, and when the discharge circuit 300 is in the second connection state, control the discharge circuit 300 to be in any one of the first discharge connection state, the second discharge connection state, and the third discharge connection state according to the voltage value at the output terminal Out.

[0064] Specifically, such as Figure 2 As shown, the parameter acquisition unit 400 can also be connected to the positive output terminal Out+ of the output terminal Out.

[0065] Furthermore, the control unit 200 controls the discharge circuit 300 to be in any one of the first discharge connection state, the second discharge connection state, and the third discharge connection state according to the relationship between the voltage value at the output terminal Out and the first voltage threshold, the second voltage threshold, and the third voltage threshold. The first voltage threshold, the second voltage threshold, and the third voltage threshold decrease sequentially.

[0066] Therefore, the radio frequency driving device 10 and the control unit 200 in this application determine whether the radio frequency generator PA needs protection by the relationship between the reflected power value and the first preset value, and determine the required protection level of the radio frequency generator PA by the relationship between the voltage value at the output terminal Out and the first voltage threshold, the second voltage threshold and the third voltage threshold, thereby effectively preventing the radio frequency generator PA from being destroyed.

[0067] Please refer to the following: Figure 5, Figure 5 This is a circuit diagram of a discharge circuit according to one embodiment of this application. Figure 2 , Figure 5 As shown, the first discharge module 320 includes a first diode D1, a first inductor L1, and a first switch S1. The cathode of the first diode D1 is connected to the connection point between the drive output terminal Id of the RF drive circuit 100 at the end and the switch module 310. The anode of the first diode D1 is connected to one end of the first inductor L1. The other end of the first inductor L1 is connected to the connection point between the switch module 310 and the output terminal Out. One end of the first switch S1 is connected to the connection point between the anode of the first diode D1 and one end of the first inductor L1. The other end of the first switch S1 is grounded to GND. The first switch S1 can be turned on or off to correspondingly put the first discharge module 320 into a second on state or a second off state.

[0068] Therefore, the RF driving device 10 described above in this application, by setting a first discharge module 320 in cooperation with a first diode D1, a first inductor L1 and a first switch S1, can, when the first switch S1 is open, utilize the unidirectional conduction characteristic of the first diode D1 to prevent the first inductor L1 from charging and discharging, and when the first switch S1 is on, according to the voltage difference across the first inductor L1, allow the electrical energy of the RF generator PA to enter the first inductor L1 through the other end of the first inductor L1 to charge the first inductor L1, and continuously discharge the electrical energy to ground GND through the first switch S1.

[0069] like Figure 2 , Figure 5 As shown, the second discharge module 330 includes a first resistor R1 and a second switch S2. One end of the first resistor R1 is connected to the connection point between the switch module 310 and the output terminal Out. The other end of the first resistor R1 is selectively grounded to GND through the second switch S2. The second switch S2 is turned on or off to correspondingly put the second discharge module 330 into a third on state or a third off state.

[0070] Therefore, the radio frequency driving device 10 described above in this application, by setting a second discharge module 330 in cooperation with the first resistor R1 and the second switch S2, can make the first resistor R1 not consume power when the second switch S2 is off, and can make the first resistor R1 consume power when the second switch S2 is on, and continuously discharge power to ground GND through the second switch S2.

[0071] It should be noted that the energy consumption rate of the first resistor R1 is lower than the energy discharge rate of the first inductor L1, thus the energy discharge rate of the second discharge module 330 is lower than the energy discharge rate of the first discharge module 320. Consequently, when the first discharge module 320 is in the second conducting state and the second discharge module 330 is in the third conducting state, the discharge circuit 300 can be in the first discharge connection state; when the first discharge module 320 is in the second conducting state and the second discharge module 330 is in the third disconnected state, the discharge circuit 300 can be in the second discharge connection state; and when the first discharge module 320 is in the second disconnected state and the second discharge module 330 is in the third conducting state, the discharge circuit 300 can be in the third discharge connection state.

[0072] like Figure 2 , Figure 5 As shown, the switch module 310 includes a third switch S3, which is connected between the drive output terminal Id and the output terminal Out of the radio frequency drive circuit 100 located at the end. The third switch S3 has a first on state and a first off state.

[0073] Similarly, such as Figure 2 As shown, the drive output terminal Id of the RF drive circuit 100 located at the end is the positive drive output terminal Id+ of the RF drive circuit 100 located at the end, and the output terminal Out can be the positive output terminal Out+.

[0074] In one or more embodiments, the control unit 200 can control the discharge circuit 300 to be in a first connection state or a second connection state by controlling the on or off states of the first switch S1, the second switch S2 and the third switch S3 respectively. That is, the discharge circuit 300 can be controlled to be in any one of the first connection state, the first discharge connection state, the second discharge connection state and the third discharge connection state.

[0075] In one or more embodiments, the control unit 200 may be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), application-specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, or other logic control devices. It may also be a microprocessor such as a micro control unit (MCU).

[0076] In one or more embodiments, the voltage values ​​of the target power DC2 obtained by the N radio frequency driving circuits 100 decrease sequentially, and the voltage value of the target power DC2 obtained by the (N-1)th radio frequency driving circuit 100 is 1 / 2 of the voltage value of the target power DC2 obtained by the Nth radio frequency driving circuit 100.

[0077] Therefore, the radio frequency drive device 10 described above in this application can also programmatically set the sum of the voltage values ​​of one or more target electrical energy DC2 outputs.

[0078] Furthermore, when N=4, the ratio of the voltage values ​​of the target electrical energy DC2 obtained by the four radio frequency drive circuits 100 is 8:4:2:1.

[0079] Therefore, the radio frequency drive device 10 described above in this application can provide a sum of voltage values ​​of one or more different target electrical energy DC2 to meet the actual needs of the load.

[0080] The radio frequency drive device 10 of this application, through the above structure, can select one or more target power DC2 outputs to the radio frequency generator PA according to the specific situation of the radio frequency generator PA, and cooperate with the discharge circuit 300 with multiple discharge connection states to quickly and effectively protect the radio frequency generator PA and prevent the radio frequency generator PA from being destroyed. It can also switch one or more target power DC2 outputs to meet the actual needs of the load.

[0081] Please see Figure 6 , Figure 6 This is a schematic diagram of a radio frequency power supply system according to an embodiment of this application. Figure 6 As shown, this application also provides an RF power supply system 1000, which includes a DC power supply DC, an RF generator PA, and an RF drive device 10 in any of the foregoing embodiments.

[0082] Please refer to it again. Figure 1 .like Figure 1As shown, the radio frequency driving device 10 includes an input terminal In, an output terminal Out, and N radio frequency driving circuits 100. The N radio frequency driving circuits 100 are connected between the input terminal In and the output terminal Out. The input terminal In and the output terminal Out are used to connect to a DC power supply DC and a radio frequency generator PA, respectively. Each radio frequency driving circuit 100 has a driving state and a stopped driving state. When in the driving state, each radio frequency driving circuit 100 is used to receive DC power DC1 output by the DC power supply DC through the input terminal In and convert the DC power DC1 into target power DC2. When in the stopped driving state, it stops receiving DC power DC1 output by the DC power supply DC. In this circuit, the voltage values ​​of the target electrical energy DC2 obtained by the N radio frequency driving circuits 100 are different from each other, and the driving output terminals Od of the N radio frequency driving circuits 100 are connected in sequence and connected to the output terminal Out through the driving output terminal Od of the end radio frequency driving circuit 100 to form an output path, so that the target electrical energy DC2 output by the radio frequency driving circuit 100 in the driving state is transmitted to the output terminal Out through the output path and output to the radio frequency generator PA through the output terminal Out, wherein N≥2.

[0083] For a more specific description of the structure of the radio frequency driving device 10, please refer to the relevant content of the radio frequency driving device 10 in any of the foregoing embodiments, which will not be repeated here.

[0084] The radio frequency drive device 10 and radio frequency power supply system 1000 of this application, through the above structure, can select one or more target power DC2 outputs to the radio frequency generator PA according to the specific situation of the radio frequency generator PA, and cooperate with the discharge circuit 300 with multiple discharge connection states to quickly and effectively protect the radio frequency generator PA and prevent the radio frequency generator PA from being destroyed. It can also switch one or more target power DC2 outputs to meet the actual needs of the load.

[0085] In the various embodiments provided in this application, it should be understood that the disclosed apparatus and devices can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for example, the division of units is merely a logical functional division, and there may be other division methods in actual implementation; for example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces, and the indirect coupling or communication connection between devices or units may be electrical, mechanical, or other forms.

[0086] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0087] Furthermore, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can be physically comprised separately, or two or more units can be integrated into one unit. The integrated unit described above can be implemented in hardware or in the form of hardware plus software functional units.

[0088] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A radio frequency drive device, characterized by, The radio frequency driving device comprises an input end, an output end and N radio frequency driving circuits connected between the input end and the output end, the input end and the output end being used for connecting a direct current power supply and a radio frequency generating device respectively, wherein each radio frequency driving circuit has a driving state and a stop driving state, and is used for receiving direct current power output by the direct current power supply through the input end and converting the direct current power into target power when in the driving state, and stopping receiving the direct current power output by the direct current power supply when in the stop driving state; wherein the voltage values of the target power obtained by the N radio frequency driving circuits are different from each other, and the driving output ends of the N radio frequency driving circuits are connected in sequence and connected with the output end through the driving output end of the radio frequency driving circuit at the end to form an output path, so that the target power output by the radio frequency driving circuit in the driving state is transmitted to the output end through the output path and output to the radio frequency generating device through the output end, wherein N≥2; The radio frequency driving device further comprises a bleeding circuit connected between the driving output end of the radio frequency driving circuit at the end and the output end and connected with the ground; the bleeding circuit comprises a switch module, a first bleeding module and a second bleeding module, the switch module is connected between the driving output end of the radio frequency driving circuit at the end and the output end, the first bleeding module is connected in parallel with the switch module between the driving output end of the radio frequency driving circuit at the end and the output end, and the second bleeding module is connected between the connection point between the switch module and the output end and the ground. The first bleeding module comprises a first diode, a first inductor and a first switch, the negative electrode of the first diode is connected to the connection point between the driving output end of the radio frequency driving circuit at the end and the switch module, the positive electrode of the first diode is connected with one end of the first inductor, the other end of the first inductor is connected to the connection point between the switch module and the output end, one end of the first switch is connected to the connection point between the positive electrode of the first diode and one end of the first inductor, and the other end of the first switch is grounded. The second bleeding module comprises a first resistor and a second switch, one end of the first resistor is connected to the connection point between the switch module and the output end, and the other end of the first resistor is selectively grounded through the second switch.

2. The radio frequency drive device of claim 1, wherein, The output end comprises a positive output end and a negative output end, the driving output end of each radio frequency driving circuit comprises a positive driving output end and a negative driving output end, and the positive driving output ends and the negative driving output ends of the N radio frequency driving circuits are connected in alternation and connected between the positive output end and the negative output end.

3. The radio frequency drive device of claim 2, wherein, Each radio frequency driving circuit comprises an inverter unit, a coupling unit and a rectifier unit, which are connected in sequence between the input end and the positive output end. The inverter unit is configured to receive the direct current electric energy when in the driving state, and invert the direct current electric energy into alternating current electric energy, and stop receiving the direct current electric energy when in the stop driving state; The coupling unit is configured to receive the alternating current electric energy, and couple the alternating current electric energy to the rectifier unit; The rectifier unit is configured to rectify the alternating current electric energy coupled by the coupling unit into the target direct current electric energy; Each rectifier unit has the positive driving output end and the negative driving output end, and the positive driving output ends and the negative driving output ends of the N rectifier units are connected alternately.

4. The radio frequency drive apparatus of claim 3, wherein, The inverter unit includes an inverter bridge, when the inverter bridge is alternately turned on or turned off at a certain conduction duty cycle, the inverter unit is in the driving state, and when the inverter bridge is kept off, the inverter unit is in the stop driving state; The coupling unit includes a transformer, and the rectifier unit includes a rectifier bridge, a primary winding of the transformer is connected with the inverter bridge, a secondary winding of the transformer is connected with the rectifier bridge, the primary winding and the secondary winding of the transformer are coupled to couple the alternating current electric energy on one side of the primary winding of the transformer to the secondary winding of the transformer, and transmit the coupled alternating current electric energy to the rectifier bridge.

5. The radio frequency drive apparatus of claim 1, wherein, The radio frequency driving device further includes a control unit, the control unit is connected with each radio frequency driving circuit, and the control unit is configured to control each radio frequency driving circuit to be in the driving state or the stop driving state.

6. The radio frequency drive device of claim 5, wherein, The bleeding circuit is configured to, when in a first connection state, make the target electric energy output by the radio frequency driving circuit in the driving state continuously transmitted to the radio frequency generating device through the driving output end of the radio frequency driving circuit at the terminal end, and when in a second connection state, stop the target electric energy output by the radio frequency driving circuit in the driving state from being transmitted to the radio frequency generating device, and bleed the electric energy of the radio frequency generating device to the ground.

7. The radio frequency drive device of claim 6, wherein, The radio frequency driving device further includes a parameter acquisition unit, the parameter acquisition unit is configured to be connected with the radio frequency generating device to acquire a first parameter of the radio frequency generating device; The control unit is further connected with the parameter acquisition unit and the bleeding circuit, the control unit is configured to receive the first parameter, when the first parameter does not satisfy a first preset condition, control the bleeding circuit to be in the first connection state, and when the first parameter satisfies the first preset condition, control the bleeding circuit to be in the second connection state.

8. The radio frequency drive device of claim 6, wherein, The switch module is configured to be in a first conduction state or a first off state to turn on or turn off a connection path between the driving output end of the radio frequency driving circuit at the terminal end and the output end, so as to correspondingly make the target electric energy output by the radio frequency driving circuit in the driving state continuously transmitted or stopped from being transmitted to the radio frequency generating device through the driving output end of the radio frequency driving circuit at the terminal end; The first bleeding module is configured to be in a second conduction state or a second off state to correspondingly bleed or stop bleeding the electric energy of the radio frequency generating device; The second discharge module is used to be in a third conducting state or a third disconnecting state to correspondingly discharge or stop discharging the electric energy of the radio frequency generating device; Wherein, when the switch module is in the first conducting state, the first discharge module is in a second disconnecting state, and the second discharge module is in a third disconnecting state, the discharge circuit is in the first connection state; when the switch module is in the first disconnecting state, the first discharge module is in a second conducting state and / or the second discharge module is in a third conducting state, the discharge circuit is in the second connection state.

9. The radio frequency drive device of claim 1, wherein, The voltage value of the target electric energy obtained by the N radio frequency drive circuits decreases in turn, and the voltage value of the target electric energy obtained by the N-1 radio frequency drive circuit is 1 / 2 of the voltage value of the target electric energy obtained by the N radio frequency drive circuit.

10. A radio frequency power supply system characterized by, The radio frequency drive device comprises a direct current power supply, a radio frequency generating device and the radio frequency drive device as claimed in any one of claims 1-9.

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