Ultra-clean high-precision airflow control device and control method thereof

Abstract

The invention discloses an ultraclean high-precision airflow control device and a control method thereof.The ultraclean high-precision airflow control device comprises a support, an airflow conveying mechanism is arranged on the support and comprises two air inlet and outlet assemblies, one air inlet and outlet assembly is used for air inlet, the other air inlet and outlet assembly is used for air outlet, and each air inlet and outlet assembly comprises a valve shell; the upward and downward outer walls of the two valve shells fixedly communicate with connecting pipes. The invention relates to the technical field of airflow control. According to the ultra-clean high-precision airflow control device and the control method thereof, when the multi-stage filtering assembly needs to be replaced, an airflow channel can be conveniently changed, and airflow is changed to a pipeline in another detachable assembly to be conveyed. In the whole replacement process, operation of an airflow system does not need to be stopped, production interruption caused by shutdown is avoided, production continuity is maintained, working efficiency is remarkably improved, and losses such as equipment idle cost, manpower waste and product batch interruption caused by shutdown are reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of airflow control, and in particular to an ultra-clean and high-precision airflow control device and a control method thereof. Background Art

[0002] In modern industrial production, scientific research experiments and some fields with extremely high environmental requirements, such as biopharmaceuticals, semiconductor manufacturing, and high-precision optical instrument production, there are strict requirements for the purity and control accuracy of airflow. In these environments, tiny particle impurities or unstable airflow parameters may lead to serious problems such as product quality degradation and experimental result deviation.

[0003] During the operation of traditional airflow control devices, when the filter components need to be replaced, the entire airflow system often has to be stopped. However, some key production environments have almost stringent real-time requirements for air quality. Even a short shutdown may cause the ambient air quality to deteriorate instantly, causing sensitive production processes to be contaminated. For example, in the aseptic culture process in biopharmaceuticals, once the shutdown causes unclean air from the outside to enter, the entire batch of culture will be contaminated and discarded. In addition, shutdown means production interruption, which reduces work efficiency.

[0004] To this end, the present invention provides an ultra-clean and high-precision airflow control device and a control method thereof. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides an ultra-clean and high-precision airflow control device and a control method thereof, which solves the problem of production interruption and reduced efficiency caused by shutdown for replacement of filter components during operation of the airflow control device.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: an ultra-clean high-precision airflow control device, comprising a bracket, on which an airflow conveying mechanism is provided, and the airflow conveying mechanism comprises: There are two air inlet and outlet components, one for air inlet and the other for air outlet, the two air inlet and outlet components each include a valve housing, the upward and downward outer walls of the two valve housings are fixedly connected with a connecting pipe, and the outer walls of the two valve housings on opposite sides are fixedly connected with a main air pipe; A switching component, the switching component comprising: Two ball valves, the ball valves can rotate close to the inner wall of the valve housing, the ball valves are provided with an L-shaped air passage, and the ball valves are rotated to adjust the position of the L-shaped air passage inside the valve housing, so that the downward connecting pipe can be connected to the main air pipe, or the upward connecting pipe can be connected to the main air pipe. The outer surface of the ball valve is fixedly connected with a shaft rod, the shaft rod movably penetrates the inner wall of the valve housing and extends outward, and the end of the shaft rod is fixedly connected with a rotating handle, and a straight slot is penetrated and opened on the rotating handle; An electric push rod, the electric push rod is fixedly mounted on the top of the bracket, a connecting plate is mounted on the telescopic end of the electric push rod, a lifting plate is mounted on the outer surface of the connecting plate, a sliding block matching the straight slot is symmetrically mounted on the outer surface of the lifting plate, and the sliding block can slide freely inside the straight slot; The number of detachable components is set to two; The multi-stage filtering components are two in number and are placed inside the detachable component; Pressure measuring assembly, used to monitor air flow pressure difference.

[0007] Preferably, the two detachable components both include an intermediate tube, the inner wall of the intermediate tube is fixedly connected to a limiting plate, the outer wall of the limiting plate near the two ends is fixedly connected to a sleeve, both ends of the intermediate tube are connected to a bent pipe through a flange with bolts and nuts, and the bent pipe is connected to the connecting pipe through a flange with bolts and nuts.

[0008] Preferably, the multi-stage filter assembly includes two semicircular inner sleeves, both sides of which are symmetrically fixedly connected with connecting blocks, and the two semicircular inner sleeves are connected by respectively cooperating with bolts and nuts through the connecting blocks. After the two semicircular inner sleeves are connected, a cylinder is formed, which can be tightly attached to the inner wall of the intermediate tube and placed near the middle of the intermediate tube. One of the semicircular inner sleeves has a plurality of positioning pins fixedly connected to its outer surface, and the other semicircular inner sleeve has a plurality of positioning holes cooperating with the positioning pins on its outer surface.

[0009] Preferably, the inner wall of the semicircular inner sleeve is provided with three installation grooves, the first installation groove close to the airflow input direction is provided with a primary filter layer, the second installation groove close to the airflow output direction is provided with a high-level filter layer, and the third installation groove in the middle is provided with a medium-level filter layer.

[0010] Preferably, the primary filter layer is made of glass fiber filter paper, which can remove particles of 1-5 μm, the intermediate filter layer is a polytetrafluoroethylene membrane, which can filter tiny particles of 0.1-1 μm, and the advanced filter layer is made of nanofiber material, which can filter ultrafine particles with a particle size less than 0.1 μm.

[0011] Preferably, the pressure measuring assembly includes a support frame installed on the bracket, a differential pressure transmitter is installed on the support frame, two input pipes are provided on the differential pressure transmitter, the ends of the input pipes are fixedly connected with branch pipes, valves are symmetrically installed on the branch pipes, both ends of the branch pipes are fixedly connected with hoses, the ends of the hoses are fixedly connected with pressure transmission pipes, the pressure transmission pipe can be inserted into the interior of the intermediate pipe through a sleeve, and the pressure transmission pipe and the sleeve are connected by a flange with bolts and nuts, a tympanic membrane pressure difference sensor is provided at the end of the pressure transmission pipe, and the tympanic membrane pressure difference sensor is placed inside the intermediate pipe.

[0012] Preferably, two pipe clamps are installed on the bracket, and the main air pipe is fixedly installed on the bracket through the pipe clamps.

[0013] The present invention also discloses a control method for an ultra-clean and high-precision airflow control device, which specifically comprises the following steps: S1. Flow control: The electric push rod drives the lifting plate to rise or fall, and the slider on the lifting plate slides in the straight slot and pushes the handle to rotate. The handle drives the shaft and the ball valve to rotate. By changing the angle of the L-shaped airway on the ball valve, the upward connecting pipe can be connected to the main air pipe, or the downward connecting pipe can be connected to the main air pipe. When the airflow is transported, only one airflow channel is selected, and the airflow volume is adjusted by adjusting the flow cross-sectional area of ​​the L-shaped airway in the valve housing. When the cross-sectional area is enlarged, the airflow volume increases, and vice versa, the airflow volume decreases; S2. Operation monitoring: During the operation of the airflow, the airflow will pass through the pipe of a designated detachable component through the selected airflow channel, and the pressure measuring component will monitor the pressure difference on both sides of the multi-stage filter component in real time. When the pressure difference reaches the preset filter component replacement threshold, it indicates that the multi-stage filter component in the airflow channel is blocked and needs to be replaced; S3. Replacement of filter components: The airflow is redirected through the reversing component to pass through the pipe of another detachable component. Then, a detachable component corresponding to the multi-stage filter component that needs maintenance is removed from the air inlet and outlet components, and the multi-stage filter component is removed from the detachable component and replaced. Beneficial Effects

[0014] The present invention provides an ultra-clean and high-precision airflow control device and a control method thereof. Compared with the prior art, it has the following beneficial effects: (1) The ultra-clean high-precision airflow control device and its control method can conveniently change the airflow channel when the multi-stage filter component needs to be replaced, so that the airflow is diverted to the pipeline in another detachable component for transportation. During the entire replacement process, there is no need to stop the operation of the airflow system, avoiding production interruption caused by downtime, maintaining production continuity, significantly improving work efficiency, and reducing equipment idle costs, manpower waste, and product batch interruption losses caused by downtime.

[0015] (2) The ultra-clean high-precision airflow control device and its control method adopt a layered filtration design through a multi-stage filtration component. The primary, intermediate and advanced filtration layers are respectively for impurity particles of different particle sizes, which can effectively remove particles of 1-5μm, 0.1-1μm and less than 0.1μm, greatly improving the purity of the airflow, meeting the production and experimental environment requirements with strict requirements on air quality, effectively preventing impurities from causing adverse effects on product quality and process, and ensuring high precision and high stability of production.

[0016] (3) The ultra-clean high-precision airflow control device and its control method can monitor the pressure difference on both sides of the multi-stage filter assembly in real time through the pressure measuring component, and timely and accurately judge the blockage condition of the filter assembly according to the preset threshold value, providing a reliable basis for the replacement of the filter assembly. Through the precise monitoring and feedback of the airflow pressure difference, it can effectively ensure that the entire airflow control device is always in a good operating state, ensure the stability and reliability of the airflow transmission, and further improve the safety and controllability of the production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional diagram of the external structure of the present invention; Figure 2 A three-dimensional structural diagram of another viewing angle of the present invention; Figure 3 It is a three-dimensional structural diagram of the support of the present invention; Figure 4 It is a partial cross-sectional view of the present invention; Figure 5 It is a three-dimensional structural diagram of the reversing assembly of the present invention; Figure 6 It is a schematic diagram of the internal structure of the intermediate tube of the present invention; Figure 7 is an exploded view of the multi-stage filter assembly of the present invention; Figure 8 It is a three-dimensional structural diagram of the pressure measuring assembly of the present invention.

[0018] In the figure: 1. Bracket; 2. Inlet and outlet gas components; 21. Valve housing; 22. Connecting pipe; 23. Main gas pipe; 3. Reversing assembly; 31. Ball valve; 32. L-shaped airway; 33. Shaft; 34. Turning handle; 35. Straight notch; 36. Electric push rod; 37. Connecting plate; 38. Lifting plate; 39. Sliding block; 4. Removable components; 41. Intermediate pipe; 42. Limiting plate; 43. Casing; 44. Bend pipe; 5. Multi-stage filter assembly; 51. Semicircular inner sleeve; 52. Connecting block; 53. Positioning pin; 54. Positioning hole; 55. Mounting slot; 56. Primary filter layer; 57. Intermediate filter layer; 58. Advanced filter layer; 6. Pressure measuring assembly; 61. Support frame; 62. Differential pressure transmitter; 63. Input pipe; 64. Branch pipe; 65. Valve; 66. Hose; 67. Pressure transmission pipe; 68. Tympanic membrane differential pressure sensor; 7. Pipe clamp. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] See also Figure 1-8 The present invention provides a technical solution: an ultra-clean high-precision airflow control device, comprising a bracket 1, on which an airflow conveying mechanism is provided, and the airflow conveying mechanism comprises: The number of the inlet and outlet gas components 2 is set to two, one for air intake and the other for air outlet. The two inlet and outlet gas components 2 each include a valve housing 21. The upward and downward outer walls of the two valve housings 21 are fixedly connected with a connecting pipe 22. The outer walls of the two valve housings 21 on the opposite sides are fixedly connected with a main air pipe 23. The switching component 3 includes: Two ball valves 31, the ball valves 31 can rotate close to the inner wall of the valve housing 21, an L-shaped air passage 32 is opened on the ball valve 31, and the position of the L-shaped air passage 32 inside the valve housing 21 can be adjusted by rotating the ball valve 31, so that the downward connecting pipe 22 can be connected with the main air pipe 23, or the upward connecting pipe 22 can be connected with the main air pipe 23. The outer surface of the ball valve 31 is fixedly connected with a shaft 33, and the shaft 33 movably penetrates the inner wall of the valve housing 21 and extends outward. The end of the shaft 33 is fixedly connected with a rotating handle 34, and a straight slot 35 is opened on the rotating handle 34; The electric push rod 36 is fixedly mounted on the top of the bracket 1. A connecting plate 37 is mounted on the telescopic end of the electric push rod 36. A lifting plate 38 is mounted on the outer surface of the connecting plate 37. A slider 39 matching the straight slot 35 is symmetrically mounted on the outer surface of the lifting plate 38. The slider 39 can slide freely inside the straight slot 35. The number of detachable components 4 is set to two; The multi-stage filtering components 5, the number of which is set to two, are placed inside the detachable component 4; The pressure measuring component 6 is used to monitor the air flow pressure difference.

[0021] The electric push rod 36 drives the lifting plate 38 to rise or fall, and the slider 39 on the lifting plate 38 slides in the straight slot 35 and pushes the handle 34 to rotate. The handle 34 drives the shaft 33 and the ball valve 31 to rotate. By changing the angle of the L-shaped air channel 32 on the ball valve 31, the upward connecting pipe 22 can be connected to the main air pipe 23, or the downward connecting pipe 22 can be connected to the main air pipe 23. When the airflow is transported, only one airflow channel is selected, and the airflow volume is adjusted by adjusting the flow cross-sectional area of ​​the L-shaped air channel 32 in the valve housing 21. When the cross-sectional area is expanded, the airflow volume increases, and vice versa, the airflow volume decreases, which is convenient for accurate control of the airflow delivery.

[0022] The two detachable components 4 each include an intermediate tube 41, the inner wall of the intermediate tube 41 is fixedly connected to a limit plate 42, the outer wall of the limit plate 42 near the two ends is fixedly connected to a sleeve 43, both ends of the intermediate tube 41 are connected to a bent pipe 44 through a flange with bolts and nuts, and the bent pipe 44 is connected to the connecting pipe 22 through a flange with bolts and nuts.

[0023] See also Figure 7 The multi-stage filter assembly 5 includes two semicircular inner sleeves 51, both sides of which are symmetrically fixedly connected with connecting blocks 52, and the two semicircular inner sleeves 51 are connected by bolts and nuts respectively through the connecting blocks 52. After the two semicircular inner sleeves 51 are connected, a cylinder is formed, which can be close to the inner wall of the intermediate tube 41 and placed near the middle of the intermediate tube 41. A plurality of positioning pins 53 are fixedly connected to the outer surface of one of the semicircular inner sleeves 51, and a plurality of positioning holes 54 cooperating with the positioning pins 53 are opened on the outer surface of the other semicircular inner sleeve 51. Three mounting grooves 55 are opened on the inner wall of the semicircular inner sleeve 51, and a primary filter layer 56 is arranged inside the first mounting groove 55 close to the airflow input direction, and a high-grade filter layer 58 is arranged inside the second mounting groove 55 close to the airflow output direction, and a medium-grade filter layer 57 is arranged inside the third mounting groove 55 in the middle. The primary filter layer 56 is made of glass fiber filter paper, which can remove particles of 1-5μm. The intermediate filter layer 57 is a polytetrafluoroethylene membrane, which can filter tiny particles of 0.1-1μm. The advanced filter layer 58 is made of nanofiber material, which can filter ultrafine particles with a particle size less than 0.1μm. The positioning hole 54 matched with the positioning pin 53 can make the two semicircular inner sleeves 51 accurately docked. Through the primary filter layer 56, large particle impurities can be prevented from clogging the subsequent intermediate filter layer 57 and the advanced filter layer 58, thereby extending their service life; the intermediate filter layer can further purify the airflow; the advanced filter layer can intercept ultrafine particles with a particle size less than 0.1μm, ensuring the ultra-high purity of the airflow, meeting the process requirements of fields with extremely high requirements on air quality such as semiconductor manufacturing and biopharmaceuticals, and effectively preventing tiny particle impurities from adversely affecting product quality and production processes.

[0024] See also Figure 1-Figure 4 The pressure measuring assembly 6 includes a support frame 61 installed on the bracket 1, a differential pressure transmitter 62 is installed on the support frame 61, two input pipes 63 are arranged on the differential pressure transmitter 62, the ends of the input pipe 63 are fixedly connected with a branch pipe 64, valves 65 are symmetrically installed on the branch pipe 64, both ends of the branch pipe 64 are fixedly connected with a hose 66, and the ends of the hose 66 are fixedly connected with a pressure transmission pipe 67, the pressure transmission pipe 67 can be inserted into the interior of the intermediate pipe 41 through the sleeve 43, and the pressure transmission pipe 67 and the sleeve 43 are connected by a flange with bolts and nuts, and a tympanic membrane pressure difference sensor 68 is arranged at the end of the pressure transmission pipe 67, and the tympanic membrane pressure difference sensor 68 is placed inside the intermediate pipe 41, the airflow During transportation, the tympanic membrane pressure difference sensor 68 can sense the airflow pressure difference inside the intermediate tube 41 in real time, and transmit the pressure to the pressure difference transmitter 62. By monitoring the airflow pressure difference, the state of the filter layer in the multi-stage filter component 5 can be intuitively understood. When the pressure difference reaches the preset threshold for replacing the filter component, the filter layer in the multi-stage filter component 5 needs to be replaced or maintained. The valve 65 is used when removing the detachable component 4. When a detachable component 4 is removed, the corresponding valve 65 is in a closed state, and the valve 65 corresponding to the detachable component 4 that has not been removed is in an open state, so that the air pressure can enter the pressure difference transmitter 62.

[0025] See also Figure 1-Figure 3 Two pipe clamps 7 are installed on the bracket 1, and the main air pipe 23 is fixedly installed on the bracket 1 through the pipe clamps 7. The pipe clamps 7 can tightly fix the main air pipe 23 on the bracket 1 to prevent the main air pipe 23 from being displaced, shaken or falling off due to airflow impact, equipment vibration or external environmental interference.

[0026] See also Figure 1-Figure 8 The present invention also discloses a method for using an ultra-clean and high-precision airflow control device, which specifically comprises the following steps: S1. Flow control: The electric push rod 36 drives the lifting plate 38 to rise or fall, and the slider 39 on the lifting plate 38 slides in the straight slot 35 and pushes the handle 34 to rotate. The handle 34 drives the shaft 33 and the ball valve 31 to rotate. By changing the angle of the L-shaped air passage 32 on the ball valve 31, the upward connecting pipe 22 can be connected to the main air pipe 23, or the downward connecting pipe 22 can be connected to the main air pipe 23. When the air flow is transported, only one air flow channel is selected, and the air flow rate is adjusted by adjusting the flow cross-sectional area of ​​the L-shaped air passage 32 in the valve housing 21. When the cross-sectional area is enlarged, the air flow rate increases, and vice versa, the air flow rate decreases; S2, operation monitoring: during the operation of the airflow, the airflow will pass through the pipe of a designated detachable component 4 by selecting the airflow channel, and the pressure measuring component 6 will monitor the pressure difference on both sides of the multi-stage filter component 5 in real time. When the pressure difference reaches the preset filter component replacement threshold, it indicates that the multi-stage filter component 5 in the airflow channel is blocked and needs to be replaced; S3. Replacement of filter components: The airflow is redirected by the reversing component 3 and passes through the pipe of another detachable component 4. Then, a detachable component 4 corresponding to the multi-stage filter component 5 that needs maintenance is removed from the air inlet and outlet components 2. When removing, first remove the support frame 61 from the sleeve 43, and then remove the elbow 44 from the connecting pipe 22. The detachable component 4 can be directly removed from the air inlet and outlet components 2. After that, remove the elbow 44 on the intermediate pipe 41, and then directly take out the multi-stage filter component 5 from the inside of the intermediate pipe 41. Subsequently, remove the connecting bolts on the connecting block 52, separate the two semicircular inner sleeves 51, and then replace the internal filter layer.

[0027] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0028] When in use, the airflow is transported through the channel composed of the main air pipe 23, the L-shaped airway 32, the elbow 44 and the intermediate pipe 41. During the airflow transport process, the impurities in the airflow can be effectively filtered through the multi-stage filter component 5. The pressure measuring component 6 monitors the pressure difference on both sides of the multi-stage filter component 5 in real time. When the pressure difference reaches the preset threshold for replacing the filter component, it indicates that the multi-stage filter component 5 in the airflow channel is blocked and needs to be replaced. When the multi-stage filter component 5 is replaced, the airflow is diverted from another detachable airway 32 by changing the angle of the L-shaped airway 32 on the ball valve 31. The pipeline in the disassembly component 4 is transported, and then a detachable component 4 corresponding to the multi-stage filter component 5 that needs to be replaced is removed from the pipeline on the inlet and outlet gas components 2. After that, the elbow 44 on the intermediate pipe 41 is removed, and the multi-stage filter component 5 can be directly taken out from the inside of the intermediate pipe 41. Subsequently, the connecting bolts on the connecting block 52 are removed, and the two semicircular inner sleeves 51 are separated to replace the internal filter layer. During the replacement process, due to the diversion of the airflow, the normal transportation of the airflow will not be affected, thereby not affecting the production and improving the work efficiency.

[0029] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An ultra-clean and high-precision airflow control device, comprising a bracket (1), characterized in that: The support (1) is provided with an air flow conveying mechanism, and the air flow conveying mechanism comprises: The number of inlet and outlet air components (2) is set to be two, one for air intake and the other for air outlet, the two inlet and outlet air components (2) each comprising a valve housing (21), the upward and downward outer walls of the two valve housings (21) are both fixedly connected to a connecting pipe (22), and the outer walls of the two valve housings (21) on opposite sides are both fixedly connected to a main air pipe (23); A reversing component (3), wherein the reversing component (3) comprises: Two ball valves (31), the ball valves (31) being able to rotate closely against the inner wall of the valve housing (21), the ball valves (31) being provided with an L-shaped air passage (32), and the ball valves (31) being able to rotate to adjust the position of the L-shaped air passage (32) inside the valve housing (21), so that the downward connecting pipe (22) can be connected to the main air pipe (23), or the upward connecting pipe (22) can be connected to the main air pipe (23), the outer surface of the ball valve (31) being fixedly connected with a shaft (33), the shaft (33) being able to movably penetrate the inner wall of the valve housing (21) and extend outward, the end of the shaft (33) being fixedly connected with a rotating handle (34), the rotating handle (34) being provided with a straight slot (35); An electric push rod (36), the electric push rod (36) being fixedly mounted on the top of the bracket (1), a connecting plate (37) being mounted on the telescopic end of the electric push rod (36), a lifting plate (38) being mounted on the outer surface of the connecting plate (37), a sliding block (39) cooperating with the straight slot (35) being symmetrically mounted on the outer surface of the lifting plate (38), and the sliding block (39) being able to slide freely inside the straight slot (35); The number of detachable components (4) is set to two; The multi-stage filtering components (5) are two in number and are placed inside the detachable component (4); The pressure measuring assembly (6) is used to monitor the air flow pressure difference.

2. The ultra-clean and high-precision airflow control device according to claim 1, characterized in that: The two detachable components (4) each comprise an intermediate tube (41), the inner wall of the intermediate tube (41) being fixedly connected to a limit plate (42), the outer wall of the limit plate (42) being fixedly connected to a sleeve (43) at positions near both ends, both ends of the intermediate tube (41) being connected to a bent tube (44) via a flange in combination with bolts and nuts, and the bent tube (44) being connected to the connecting tube (22) via a flange in combination with bolts and nuts.

3. The ultra-clean and high-precision airflow control device according to claim 2, characterized in that: The multi-stage filter assembly (5) comprises two semicircular inner sleeves (51), both sides of which are symmetrically fixedly connected with connection blocks (52), and the two semicircular inner sleeves (51) are connected by respectively engaging bolts and nuts with the connection blocks (52). After the two semicircular inner sleeves (51) are connected, a cylinder is formed, which can be closely attached to the inner wall of the intermediate tube (41) and placed near the middle of the intermediate tube (41). A plurality of positioning pins (53) are fixedly connected to the outer surface of one of the semicircular inner sleeves (51), and a plurality of positioning holes (54) that cooperate with the positioning pins (53) are opened on the outer surface of the other semicircular inner sleeve (51).

4. The ultra-clean and high-precision airflow control device according to claim 3, characterized in that: The inner wall of the semicircular inner liner (51) is provided with three installation grooves (55), the first installation groove (55) close to the airflow input direction is provided with a primary filter layer (56), the second installation groove (55) close to the airflow output direction is provided with a high-grade filter layer (58), and the third installation groove (55) in the middle is provided with a medium-grade filter layer (57).

5. The ultra-clean and high-precision airflow control device according to claim 4, characterized in that: The primary filter layer (56) is made of glass fiber filter paper and can remove particles of 1-5 μm. The intermediate filter layer (57) is a polytetrafluoroethylene membrane and can filter tiny particles of 0.1-1 μm. The advanced filter layer (58) is made of nanofiber material and can filter ultrafine particles with a particle size less than 0.1 μm.

6. The ultra-clean and high-precision airflow control device according to claim 2, characterized in that: The pressure measuring assembly (6) comprises a support frame (61) mounted on a bracket (1); a differential pressure transmitter (62) is mounted on the support frame (61); two input pipes (63) are arranged on the differential pressure transmitter (62); the ends of the input pipes (63) are fixedly connected to branch pipes (64); valves (65) are symmetrically mounted on the branch pipes (64); both ends of the branch pipes (64) are fixedly connected to hoses (66); the ends of the hoses (66) are fixedly connected to pressure transmission pipes (67); the pressure transmission pipes (67) can be inserted into the interior of the intermediate pipe (41) through the sleeve (43); the pressure transmission pipes (67) and the sleeve (43) are connected by means of flanges and bolts and nuts; a tympanic membrane differential pressure sensor (68) is arranged at the end of the pressure transmission pipe (67); the tympanic membrane differential pressure sensor (68) is placed inside the intermediate pipe (41).

7. The ultra-clean and high-precision airflow control device according to claim 1, characterized in that: Two pipe hoops (7) are installed on the bracket (1), and the main air pipe (23) is fixedly installed on the bracket (1) via the pipe hoops (7).

8. A control method for an ultra-clean and high-precision airflow control device according to any one of claims 1 to 7, characterized in that: The specific steps include: S1. Flow control: The lifting plate (38) is raised or lowered by the electric push rod (36). The slider (39) on the lifting plate (38) slides in the straight slot (35) and pushes the handle (34) to rotate. The handle (34) drives the shaft (33) and the ball valve (31) to rotate. By changing the angle of the L-shaped air passage (32) on the ball valve (31), the upward connecting pipe (22) can be connected to the main air pipe (23), or the downward connecting pipe (22) can be connected to the main air pipe (23). When the air flow is transported, only one air flow channel is selected, and the air flow rate is adjusted by adjusting the flow cross-sectional area of ​​the L-shaped air passage (32) in the valve housing (21). When the cross-sectional area is enlarged, the air flow rate increases, and vice versa, the air flow rate decreases; S2, operation monitoring: during the operation of the airflow, the airflow will pass through the pipe of a designated detachable component (4) through the selected airflow channel, and the pressure measuring component (6) will monitor the pressure difference on both sides of the multi-stage filter component (5) in real time. When the pressure difference reaches a preset filter component replacement threshold, it indicates that the multi-stage filter component (5) in the airflow channel is blocked and needs to be replaced; S3, filter component replacement: The airflow is redirected by the reversing component (3) to pass through the pipeline of another detachable component (4), and then the corresponding detachable component (4) of the multi-stage filter component (5) that needs maintenance is removed from the air inlet and outlet components (2), and then the multi-stage filter component (5) is removed from the detachable component (4) and replaced.

Images