Transduction device

Abstract

The energy conversion device comprises a transmission mechanism, the transmission mechanism comprises an amplitude-change pole and a mounting cover, the mounting cover is connected with the end of the amplitude-change pole, a mounting hole used for mounting a chopper is formed in the end, away from the mounting cover, of the amplitude-change pole, and the side face, arranged around the axis of the amplitude-change pole, of the mounting cover comprises a first plane and a second plane; the first plane and the second plane are arranged at an interval along the extension direction of the mounting hole; and the transduction mechanism comprises a fixing cover, a fastener and a transduction assembly, the transduction assembly is located between the fixing cover and the mounting cover, and the fastener is arranged in the fixing cover and the transduction assembly in a penetrating mode and fixedly connected with the mounting cover. In view of the fact that the first bearing surface and the second bearing surface are planes, unnecessary interference generated by the bearing head during ultrasonic welding can be avoided in the process of welding the lead by the transduction device, so that the welding area of the lead is increased, the transduction device has a relatively wide working area, the connection strength of the lead is improved, and the service life of the lead is prolonged. And finally, the bonding strength of the lead is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a transducer device. Background Art

[0002] The semiconductor chip industry is the foundation of 5G, driverless, new energy, 3C and other industries. Wire bonding is an indispensable part of chip manufacturing process and packaging, which directly affects the quality and reliability of the chip. Therefore, it is of great significance to improve and develop the wire bonding technology level and its corresponding key modules.

[0003] Wire bonding technology generally uses the mutual fusion of ultrasonic vibration and pressure and other energies to promote the softening of the lead and substrate metal, promote the mutual diffusion of atoms between metals, and form a high-strength connection interface layer, thereby realizing the communication and interaction of electrical signals between chips. In terms of material system, the lead material generally uses gold, aluminum or copper wire with a purity of 99.999% and a diameter of 20-500μm. It uses leads of different materials and diameters for different devices. For example, IGBT power devices generally use aluminum wire and copper wire with a diameter of 100-500μm. In recent years, the rapid development of new energy vehicles has led to a great demand for IGBT power devices. Compared with devices such as IC or LED, the difficulty of wire bonding of IGBT power devices lies in the high stability and consistency of solder joints, which poses severe challenges to their actuators and control systems.

[0004] The ultrasonic system with the transducer as the core is a device that generates ultrasonic energy, which becomes the key to the wire bonding equipment and process. The working principle of the transducer is to generate high-frequency mechanical vibration under a certain voltage drive through the inverse piezoelectric effect of the piezoelectric ceramic group, and transmit the ultrasonic displacement to the end of the splitter through the displacement amplification of the horn, thereby providing the high-frequency ultrasonic energy required for wire bonding. In general, the transducer needs to be installed in the whole equipment, so it needs to be designed with a flange mounting structure. The flange mounting structure will consider how to maximize the obstruction and insulation of the energy transmission and interference with the whole equipment. The current design method is limited to using the node position obtained by the modal analysis of the traditional finite element method as the basis for the flange structure design, but this method still has the transmission and interference of vibration energy between the two, so it is extremely unfavorable to the ultrasonic energy output of the transducer, thereby affecting the bonding strength of the wire. In terms of splitter installation, there is no unified operating specification and standard in the market. Operators generally install the length of the splitter based on their personal feelings and experience. As we all know, different splitter lengths will produce different ultrasonic vibration energies, which is fatal to the quality and consistency of wire bonding. Therefore, the development of industrial products and the defects of the current level require higher requirements on the design level of transducer devices. Summary of the invention

[0005] A technical problem solved by the present application is how to improve the bonding strength of the lead wire.

[0006] A transducer device, comprising:

[0007] The transmission mechanism comprises a horn and a mounting cover, wherein the mounting cover is connected to the end of the horn, a mounting hole for mounting a riving knife is provided at one end of the horn away from the mounting cover, and a side surface of the mounting cover arranged around the axis of the horn comprises a first plane and a second plane, wherein the first plane and the second plane are arranged at intervals along the extending direction of the mounting hole; and

[0008] The transducer mechanism comprises a fixed cover, a fastener and a transducer assembly, wherein the transducer assembly is located between the fixed cover and the mounting cover, and the fastener is passed through the fixed cover and the transducer assembly and is fixedly connected to the mounting cover.

[0009] In one embodiment, the first plane and the second plane are equidistant from the axis of the horn.

[0010] In one embodiment, the amplitude changing rod includes an amplitude changing section and a bearing head, the amplitude changing section is connected between the mounting cover and the bearing head, the bearing head has a first bearing surface and a second bearing surface, both of which are planes, the first bearing surface and the second bearing surface are spaced apart along the extension direction of the mounting hole, and both ends of the mounting hole pass through the first bearing surface and the second bearing surface.

[0011] In one embodiment, the supporting head includes a limiting convex strip, the limiting convex strip is protrudingly arranged on the first supporting surface, the mounting hole has a mounting opening on the first supporting surface, the limiting convex strip includes a limiting portion extending into the mounting opening, and the limiting portion is used to abut against the end of the riving knife.

[0012] In one embodiment, the carrier head is also provided with a fixing hole and an adjustment gap, and the carrier head also has a third bearing surface and a fourth bearing surface, the third bearing surface is connected to one end of the first bearing surface and the second bearing surface, and the fourth bearing surface is connected to the other end of the first bearing surface and the second bearing surface; the adjustment gap passes through the first bearing surface and the second bearing surface and is interconnected with the mounting hole, the fixing hole passes through the third bearing surface and the fourth bearing surface and is connected with the adjustment gap, and the fixing hole is used to install a fixing part.

[0013] In one embodiment, both the third bearing surface and the fourth bearing surface are planes.

[0014] In one embodiment, the bearing head also has a fifth bearing surface and a sixth bearing surface, both of which are planes. The fifth bearing surface and the sixth bearing surface are arranged at intervals along the axial direction of the amplitude change rod and are connected between the first bearing surface and the second bearing surface. The fifth bearing surface is connected to the end of the amplitude change rod, and the adjustment gap runs through the fifth bearing surface and the sixth bearing surface.

[0015] In one embodiment, the distances from the adjustment gap to the third bearing surface and the fourth bearing surface are equal.

[0016] In one embodiment, the amplitude transformer includes a cylindrical section, a conical section and a bearing head, the mounting hole is arranged on the bearing head, the cylindrical section is connected to the mounting cover, the conical section is connected between the cylindrical section and the bearing head, the cross-sectional dimension of the cylindrical section is larger than the cross-sectional dimension of the conical section, and along the axial direction of the amplitude transformer from the cylindrical section to the conical section, the cross-sectional dimension of the cylindrical section is constant, and the cross-sectional dimension of the conical section decreases.

[0017] In one embodiment, the energy conversion component includes a plurality of mutually stacked piezoelectric ceramic sheets, and any two adjacent piezoelectric ceramic sheets have opposite polarization directions.

[0018] A technical effect of an embodiment of the present application is: given that the first bearing surface and the second bearing surface are planes, and the splitting knife is installed in the mounting hole, in the process of the transducer device welding the lead by the splitting knife using an ultrasonic welding process, unnecessary interference caused by the mounting cover during ultrasonic welding can be avoided, thereby increasing the welding area of ​​the lead. It can be understood that the transducer device has a relatively wide working area, which maximizes the working stroke and area of ​​the transducer device, and at the same time eliminates the energy loss caused by interference, thereby improving the connection strength between the lead and the welding body such as the substrate or chip, and ultimately improving the bonding strength of the lead. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the exploded structure of a transducer device provided in an embodiment.

[0020] Figure 2 for Figure 1 Schematic diagram of the three-dimensional assembly structure of the transducer device shown.

[0021] Figure 3 for Figure 1 Schematic diagram of the planar structure of the transducer device shown.

[0022] Figure 4 for Figure 1 The schematic diagram of the three-dimensional cross-sectional structure of the energy conversion device shown in one position.

[0023] Figure 5 for Figure 1 The three-dimensional cross-sectional structural schematic diagram of the energy conversion device shown in another position.

[0024] Figure numerals: transducer device 10, chopping knife 20, transmission mechanism 100, amplitude transformer 110, amplitude transformer section 111, cylindrical section 1111, conical section 1112, bearing head 112, first bearing surface 1121, second bearing surface 1122, third bearing surface 1123, fourth bearing surface 1124, fifth bearing surface 1125, sixth bearing surface 1126, mounting hole 1127, mounting opening 1127a, adjustment gap 1128, fixing hole 1129, limiting convex strip 1130, limiting portion 1130a, mounting cover 120, first plane 121, second plane 122, transducer mechanism 300, fixing cover 310, fastener 320, transducer assembly 330, piezoelectric ceramic sheet 331. DETAILED DESCRIPTION

[0025] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0026] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0027] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0028] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0029] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0030] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0031] See also Figure 1 , Figure 2 and Figure 3In one embodiment of the present application, a transducer device 10 is provided for use with a splitter 20, that is, the splitter 20 is installed on the transducer device 10, and the lead wire is inserted into the splitter 20, and the lead wire is used to be welded and connected with the substrate or chip through an ultrasonic welding process. The transducer device 10 includes a transmission mechanism 100 and a transducer mechanism 200, and the transmission mechanism 100 includes a horn 110 and a mounting cover 120, and the mounting cover 120 is connected to the end of the horn 110, and the end of the horn 110 away from the mounting cover 120 is provided with a mounting hole 1127, and the mounting hole 1127 is used to mount the splitter 20. The transducer mechanism 200 includes a fixed cover 210, a fastener 220 and a transducer assembly 230. The transducer assembly 230 is located between the fixed cover 210 and the mounting cover 120. The fastener 220 is inserted into the fixed cover 210 and the transducer assembly 230 and is fixedly connected to the mounting cover 120. The fastener 220 may be a bolt, etc., that is, the rod of the fastener 220 is inserted into the fixed cover 210 and the transducer assembly 230 and is fixedly connected to the mounting cover 120 by threaded connection. The cap of the fastener 220 abuts against the fixed cover 210, so that the fastener 220 fixes the fixed cover 210 and the transducer assembly 230 on the mounting cover 120. The fixed cover 210 may be made of a tungsten steel material with high impedance characteristics, and the fastener 220 may be made of a high-strength steel material, for example, a high-speed steel material with a strength grade of 12.9 may be used. The fastener 220 can load a certain torque to the energy conversion component 230 to achieve the maximum energy generation of the energy conversion component 230.

[0032] When the energy conversion component 230 is excited by an alternating voltage, the energy conversion component 230 converts electrical energy into high-frequency vibration mechanical energy, which is transmitted to the splitter 20 through the horn 110, thereby causing the splitter 20 to drive the lead to generate high-frequency friction relative to the substrate or chip and generate heat, so that the molten liquid generated under the action of the heat solidifies to form a weld, that is, the lead is fixed on the chip or substrate through the weld, thereby welding (i.e. bonding) the lead to the chip or substrate, so that the energy conversion device 10 uses an ultrasonic welding process to bond the lead.

[0033] See also Figure 1 , Figure 2 and Figure 3In some embodiments, the side of the mounting cover 120 is connected between two surfaces in the thickness direction of the mounting cover 120, the two surfaces in the thickness direction of the mounting cover 120 are arranged at intervals along the axial direction of the horn 110, one of the surfaces in the thickness direction of the mounting cover 120 contacts the transducer assembly 230, the other surface in the thickness direction of the mounting cover 120 is connected to the horn 110, and the side of the mounting cover 120 is arranged around the axis of the horn 110. The side of the mounting cover 120 may include a first plane 121 and a second plane 122. Obviously, both the first plane 121 and the second plane 122 are planes, and the first plane 121 and the second plane 122 are arranged at intervals along the extension direction of the mounting hole 1127. The first plane 121 and the second plane 122 are located on opposite sides of the axis of the horn 110, so that the distances from the first plane 121 and the second plane 122 to the axis of the horn 110 are equal. The mounting cover 120 may be provided with a through hole, which extends along the axial direction of the horn 110, so that the through hole passes through the entire mounting cover 120 along the thickness direction, so the through hole has openings on both surfaces of the mounting cover 120 in the thickness direction, and bolts may be passed through the through hole, so that the mounting cover 120 is fixed to the support member by the bolts, thereby fixing the entire transducer device 10 to the support member. The cross section of the mounting cover 120 may be roughly rectangular, for example, the cross section of the mounting cover 120 may be rectangular or square.

[0034] In view of the fact that the side of the mounting cover 120 has a first plane 121 and a second plane 122, when the transducer device 10 is welded to the lead by the ultrasonic welding process through the splitter 20, unnecessary interference caused by the mounting cover 120 during ultrasonic welding can be avoided, thereby increasing the welding area of ​​the lead and maximizing the working stroke and area of ​​the transducer device 10. It can be understood that the transducer device 10 has a relatively wide working area, and at the same time, the energy loss caused by interference can be eliminated, thereby improving the connection strength between the lead and the welding body such as the substrate or chip, and finally improving the bonding strength of the lead. At the same time, the setting of the first plane 121 and the second plane 122 also makes the transducer device 10 compact, thereby reducing the volume and weight of the transducer device 10, and realizing the miniaturization and lightweight design of the transducer device 10. In some embodiments, the roughness of the surface of the mounting cover 120 in the thickness direction that contacts the transducer component 230 is about 0.04 mm, and the flatness is about 0.005 mm. In this way, the friction between the transducer assembly 230 and the mounting cover 120 can be reduced, thereby reducing the loss of vibration energy, ensuring that more vibration energy of the transducer assembly 230 is transmitted to the cleaver 20 through the horn 110, that is, the cleaver 20 can receive more vibration energy, thereby improving the energy utilization rate. Of course, the surface of the mounting cover 120 can be concave to form a groove, the groove can be arranged around the transducer assembly 230, and the groove can be filled with a rubber material, so as to achieve insulation and obstruction of the transducer device 10 from the external vibration energy.

[0035] See also Figure 1 , Figure 2 and Figure 3In some embodiments, the transducer assembly 230 includes a plurality of piezoelectric ceramic sheets 231, and the piezoelectric ceramic sheets 231 may be in a circular shape or the like. The plurality of piezoelectric ceramic sheets 231 are stacked one on another along the axial direction of the horn 110, and the polarization directions of any two adjacent piezoelectric ceramic sheets 231 are opposite. When an alternating voltage is applied to the piezoelectric ceramic sheet 231 for excitation, the piezoelectric ceramic sheet 231 converts the electrical energy into mechanical energy of high-frequency vibration, and the mechanical energy of high-frequency vibration is transmitted to the splitter 20 through the horn 110, thereby causing the splitter 20 to drive the lead wire to generate high-frequency friction relative to the substrate or chip and generate heat, and finally realize the bonding of the lead wire. Therefore, the piezoelectric ceramic sheet 231 is the source of high-frequency ultrasonic vibration energy, and the piezoelectric ceramic sheet 231 may be made of materials such as lead zirconium oxide. The outer diameter of the piezoelectric ceramic sheet 231 may be 15 mm to 30 mm, the inner diameter of the piezoelectric ceramic sheet 231 may be 5 mm to 10 mm, and the thickness of the piezoelectric ceramic sheet 231 may be 5 mm to 10 mm. The number of piezoelectric ceramic sheets 231 is 4 to 8, the center position of the piezoelectric ceramic sheet 231 is the node of the vibration source, and a beryllium copper sheet with high conductivity is used to load voltage between the two piezoelectric ceramic sheets 231. The thickness of the beryllium copper sheet is 0.005 mm to 0.02 mm, and defects such as burrs or notches are not allowed on the edges of the beryllium copper sheet.

[0036] See also Figure 2 , Figure 3 and Figure 4In some embodiments, the amplitude changer 110 can be made of materials such as stainless steel. The amplitude changer 110 includes an amplitude change section 111 and a bearing head 112. One end of the amplitude change section 111 is connected to the mounting cover 120, and the other end of the amplitude change section 111 is connected to the bearing head 112, so that the amplitude change section 111 is connected between the mounting cover 120 and the bearing head 112. The mounting hole 1127 is opened on the bearing head 112, so the bearing head 112 is used to install the wedge 20, and the roundness tolerance of the mounting hole can be controlled at about 0.003 μm. The amplitude change section 111 can include a cylindrical section 1111 and a conical section 1112. The cylindrical section 1111 is connected to the mounting cover 120, one end of the conical section 1112 is connected to the cylindrical section 1111, and the other end of the conical section 1112 is connected to the bearing head 112, that is, the conical section 1112 is connected between the cylindrical section 1111 and the bearing head 112. The cross-sectional dimension of the columnar section 1111 is greater than the cross-sectional dimension of the conical section 1112. Along the axial direction of the amplitude changer 110, from the columnar section 1111 to the conical section 1112, the cross-sectional dimension of the columnar section 1111 is constant, and the cross-sectional dimension of the conical section 1112 is reduced. The columnar section 1111 may be cylindrical or prism-shaped, and the conical section 1112 may be truncated cone-shaped or prism-shaped. The entire transmission mechanism 100 may be integrally formed, or the amplitude changer 110 may be integrally formed, the amplitude changer 110 and the mounting cover 120 are separately provided, and the amplitude changer 110 and the mounting cover 120 are assembled separately to form the transmission mechanism 100. In view of the fact that the amplitude changer section 111 includes the columnar section 1111 and the conical section 1112, the loss of vibration energy of the transmission mechanism 100 may also be reduced, thereby improving the energy utilization of the riving knife 20 and the lead wire. In other embodiments, the cross section of the amplitude changing section 111 may remain constant along the axial direction, that is, the amplitude changing section 111 may be substantially cylindrical or prismatic. Figure 2 , Figure 3 and Figure 4In some embodiments, the carrier head 112 has a first carrier surface 1121 and a second carrier surface 1122, both of which are planes, and the first carrier surface 1121 and the second carrier surface 1122 are spaced apart along the extension direction of the mounting hole 1127, and both ends of the mounting hole 1127 pass through the first carrier surface 1121 and the second carrier surface 1122, so the mounting hole 1127 has openings on the first carrier surface 1121 and the second carrier surface 1122, and the roundness tolerance of the mounting hole 1127 can be controlled within 0.003um. In view of the fact that the first bearing surface 1121 and the second bearing surface 1122 are planes, and the splitting knife 20 is installed in the mounting hole 1127, when the transducer device 10 welds the lead wire through the splitting knife 20 using an ultrasonic welding process, unnecessary interference caused by the bearing head 112 during ultrasonic welding can be avoided, thereby increasing the welding area of ​​the lead wire. It can be understood that the transducer device 10 has a relatively wide working area, and at the same time can eliminate the energy loss caused by interference, thereby improving the connection strength between the lead wire and the welding body such as the substrate or chip, and finally improving the bonding strength of the lead wire.

[0037] See also Figure 3 , Figure 4 and Figure 5In some embodiments, the bearing head 112 includes a limiting convex strip 1130, which is protrudingly arranged on the first bearing surface 1121, and the mounting hole 1127 has a mounting opening 1127a on the first bearing surface 1121. The limiting convex strip 1130 includes a limiting portion 1230a, and the limiting convex strip 1130 includes a portion extending into the mounting opening 1127a, so that the limiting portion 1230a has a certain covering effect on the mounting hole 1127. The number of the limiting convex strips 1130 can be two, and the two limiting convex strips 1130 can extend along the same diameter of the mounting opening 1127a, so that the two limiting convex strips 1130 are spaced 180° along the circumference of the mounting hole 1127. Of course, the number of the limiting bosses can be more than two, and each limiting boss can extend along the diameter of the mounting opening 1127a, and multiple limiting bosses are spaced along the circumference of the mounting opening 1127a. The limiting portion 1230a is used to abut against the end of the splitting knife 20, so as to limit the installation of the splitting knife 20. During the installation process of the splitting knife 20, the splitting knife 20 is inserted into the installation hole 1127 on the side where the second bearing surface 1122 is located. When the end of the splitting knife 20 abuts against the limiting portion 1230a, it means that the splitting knife 20 has been installed in place. Therefore, by setting the limiting convex strip 1130, the splitting knife 20 can be automatically positioned during the installation process, and the installation accuracy of the splitting knife 20 can be improved, thereby ensuring that the length of the splitting knife 20 protruding from the second bearing surface 1122 remains consistent, that is, the working requirement of the consistency of the installation length of the splitting knife 20 is met, thereby improving the stability of the ultrasonic vibration energy output, and finally improving the bonding strength of the lead wire. At the same time, by positioning the splitting knife 20 through the limiting convex strip 1130, the installation efficiency and installation accuracy of the splitting knife 20 during the automatic installation process can also be improved. It can be understood that it is convenient to automatically install the splitting knife 20 and achieve the consistency of the installation length of the splitting knife 20.

[0038] See also Figure 3 , Figure 4 and Figure 5In some embodiments, the bearing head 112 is further provided with a fixing hole 1129 and an adjustment gap 1128. The width of the adjustment gap 1128 may be about 0.03 mm. The bearing head 112 also has a third bearing surface 1123 and a fourth bearing surface 1124. The third bearing surface 1123 is connected to one end of the first bearing surface 1121 and the second bearing surface 1122, and the fourth bearing surface 1124 is connected to the other end of the first bearing surface 1121 and the second bearing surface 1122. Both the third bearing surface 1123 and the fourth bearing surface 1124 may be planes. The adjustment gap 1128 runs through the first bearing surface 1121 and the second bearing surface 1122, and the adjustment gap 1128 is communicated with the mounting hole 1127. The fixing hole 1129 runs through the third bearing surface 1123 and the fourth bearing surface 1124, and the fixing hole 1129 is communicated with the adjustment gap 1128. The fixing hole 1129 is used to install a fixing member 300 such as a bolt. The adjustment gap 1128 extends along a straight line, and the mounting hole 1127 can be symmetrically arranged relative to the adjustment gap 1128. For example, the adjustment gap 1128 can be divided by the mounting hole 1127 to form two semicircular holes, and the two semicircular holes can be symmetrically arranged relative to the adjustment gap 1128. Of course, the two limiting ridges 1130 can also be symmetrically arranged relative to the adjustment gap 1128. The distances from the adjustment gap 1128 to the third bearing surface 1123 and the fourth bearing surface 1124 are equal, so that the entire bearing head 112 can be symmetrically arranged relative to the adjustment gap 1128. Through the symmetrical arrangement of the bearing head 112, the loss of vibration energy by the transmission mechanism 100 can be reduced, thereby improving the energy utilization rate of the splitter 20 and the lead. It can also reduce the processing difficulty of the bearing head 112, thereby improving the processing efficiency of the bearing head 112, and ultimately reducing the manufacturing cost of the transducer device 10.

[0039] See also Figure 3 , Figure 4 and Figure 5 In the process of installing the riving knife 20, the riving knife 20 can be gradually inserted into the mounting hole 1127, and the width of the adjustment gap 1128 is increased by the squeezing effect of the riving knife 20, thereby reasonably increasing the diameter of the mounting hole 1127, thereby reducing the matching resistance between the riving knife 20 and the mounting hole 1127, improving the installation efficiency of the riving knife 20, and reducing the wear of the riving knife 20. When the riving knife 20 is in contact with the limiting portion 1230a of the limiting convex strip 1130 and installed in place, the fixing member 300 such as a bolt can be inserted into the fixing hole 1129, thereby reducing the width of the adjustment gap 1128 and the diameter of the mounting hole 1127, thereby improving the matching force between the riving knife 20 and the mounting hole 1127, and finally improving the stability and reliability of the installation of the riving knife 20.

[0040] See also Figure 3 , Figure 4 and Figure 5In view of the fact that the third bearing surface 1123 and the fourth bearing surface 1124 are planes and the splitter 20 is installed in the mounting hole 1127, when the transducer device 10 welds the lead wire through the splitter 20 using an ultrasonic welding process, unnecessary interference caused by the bearing head 112 during ultrasonic welding can be avoided, thereby increasing the welding area of ​​the lead wire, and then improving the connection strength between the lead wire and the welding body such as the substrate or chip, and finally improving the bonding strength of the lead wire.

[0041] See also Figure 3 , Figure 4 and Figure 5 In some embodiments, the bearing head 112 further has a fifth bearing surface 1125 and a sixth bearing surface 1126, both of which are planes, and the fifth bearing surface 1125 and the sixth bearing surface 1126 are arranged at intervals along the axial direction of the amplitude transformer 110, and the fifth bearing surface 1125 and the sixth bearing surface 1126 are connected between the first bearing surface 1121 and the second bearing surface 1122, and the fifth bearing surface 1125 and the sixth bearing surface 1126 are also connected between the third bearing surface 1123 and the fourth bearing surface 1124. At this time, the entire bearing head 112 can be a rectangular parallelepiped or a cube structure, so that the first bearing surface 1121, the second bearing surface 1122, the third bearing surface 1123, the fourth bearing surface 1124, the fifth bearing surface 1125 and the sixth bearing surface 1126 are six faces of a rectangular parallelepiped or a cube. The adjustment gap 1128 can penetrate the fifth bearing surface 1125 and the sixth bearing surface 1126 at the same time, thereby reducing the resistance to the increase in the width of the adjustment gap 1128 during the installation of the riving knife 20, thereby further reducing the matching resistance between the riving knife 20 and the installation hole 1127, improving the installation efficiency of the riving knife 20, and reducing the wear of the riving knife 20.

[0042] Since the fifth bearing surface 1125 and the sixth bearing surface 1126 are both planes, and the splitting knife 20 is installed in the mounting hole 1127, when the transducer device 10 welds the lead wire through the splitting knife 20 using an ultrasonic welding process, unnecessary interference caused by the bearing head 112 during ultrasonic welding can be avoided, thereby increasing the welding area of ​​the lead wire, and then improving the connection strength between the lead wire and the welding body such as the substrate or chip, and finally improving the bonding strength of the lead wire.

[0043] When working, the operating frequency of the transducer device 10 can be 60 kHz to 64 kHz, the length of the transducer device 10 can be about 2.5 times the wavelength of the ultrasonic wave, the amplification factor of the end of the cleaver 20 relative to the amplitude of the transducer component 230 can be 2 to 4 times, the power of the transducer component 230 can be 20 Watt to 100 Watt, and the output displacement amplitude of the end of the cleaver 20 can be 0 μm to 5 μm.

[0044] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A transducer device, characterized in that: include: The transmission mechanism comprises a horn and a mounting cover, wherein the mounting cover is connected to the end of the horn, an end of the horn away from the mounting cover is provided with a mounting hole for mounting a riving knife, and a side surface of the mounting cover arranged around the axis of the horn comprises a first plane and a second plane, wherein the first plane and the second plane are arranged at intervals along the extension direction of the mounting hole; and The transducer mechanism comprises a fixed cover, a fastener and a transducer assembly, wherein the transducer assembly is located between the fixed cover and the mounting cover, and the fastener is passed through the fixed cover and the transducer assembly and is fixedly connected to the mounting cover.

2. The transducer device according to claim 1, characterized in that: The first plane and the second plane are both equidistant from the axis of the horn.

3. The transducer device according to claim 1, characterized in that: The amplitude changing rod includes an amplitude changing section and a bearing head, the amplitude changing section is connected between the mounting cover and the bearing head, the bearing head has a first bearing surface and a second bearing surface, both of which are planes, the first bearing surface and the second bearing surface are spaced apart along the extension direction of the mounting hole, and both ends of the mounting hole pass through the first bearing surface and the second bearing surface.

4. The transducer device according to claim 3, characterized in that: The bearing head includes a limiting convex strip, which is protrudingly arranged on the first bearing surface. The mounting hole has a mounting opening on the first bearing surface. The limiting convex strip includes a limiting portion extending into the mounting opening, and the limiting portion is used to abut against the end of the riving knife.

5. The transducer device according to claim 3, characterized in that: The bearing head is also provided with a fixing hole and an adjusting gap, and the bearing head also has a third bearing surface and a fourth bearing surface, the third bearing surface is connected to one end of the first bearing surface and the second bearing surface, and the fourth bearing surface is connected to the other end of the first bearing surface and the second bearing surface; the adjusting gap runs through the first bearing surface and the second bearing surface and is interconnected with the mounting hole, the fixing hole runs through the third bearing surface and the fourth bearing surface and is connected with the adjusting gap, and the fixing hole is used for installing a fixing part.

6. The transducer device according to claim 5, characterized in that: Both the third bearing surface and the fourth bearing surface are planes.

7. The transducer device according to claim 5, characterized in that: The bearing head also has a fifth bearing surface and a sixth bearing surface, both of which are planes. The fifth bearing surface and the sixth bearing surface are arranged at intervals along the axial direction of the variable amplitude rod and connected between the first bearing surface and the second bearing surface. The fifth bearing surface is connected to the end of the variable amplitude rod, and the adjustment gap runs through the fifth bearing surface and the sixth bearing surface.

8. The transducer device according to claim 5, characterized in that: The distances from the adjustment gap to the third bearing surface and the fourth bearing surface are equal.

9. The transducer device according to claim 1, characterized in that: The amplitude transformer includes a cylindrical section, a conical section and a bearing head, the mounting hole is arranged on the bearing head, the cylindrical section is connected to the mounting cover, the conical section is connected between the cylindrical section and the bearing head, the cross-sectional dimension of the cylindrical section is larger than the cross-sectional dimension of the conical section, and along the axial direction of the amplitude transformer from the cylindrical section to the conical section, the cross-sectional dimension of the cylindrical section is constant, and the cross-sectional dimension of the conical section decreases.

10. The energy conversion device according to claim 1, characterized in that: The energy conversion component includes a plurality of mutually stacked piezoelectric ceramic sheets, and any two adjacently arranged piezoelectric ceramic sheets have opposite polarization directions.

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