High-efficiency self-adjusting precise grinding and polishing system

Abstract

The invention discloses a high-efficiency self-adjusting precise grinding and polishing system, and belongs to the technical field of material processing. The problem that the machining quality is unstable due to the fact that an existing grinding and polishing device is difficult to maintain consistent machining conditions during long-time operation and cannot monitor and adjust machining parameters in real time is solved. Comprising a supporting platform, a control center, a rotary grinding wheel assembly, a cooling adjusting assembly, a three-axis cooperative positioning assembly and a precise adjusting clamp assembly, wherein the rotary grinding wheel assembly, the cooling adjusting assembly and the three-axis cooperative positioning assembly are installed on the supporting platform; the rotary grinding wheel assembly, the cooling adjusting assembly, the three-axis cooperative positioning assembly and the precise adjusting clamp assembly are all electrically connected with the control center. By arranging the infrared temperature measuring sensor, the inertia measuring unit, the cooling adjusting assembly, the three-axis cooperative positioning assembly and the precise adjusting clamp assembly, the grinding and polishing system can monitor and automatically adjust machining parameters, the type of a grinding wheel and the characteristics of cooling liquid in real time in the machining process, and the stability and controllability of the machining process are ensured.

Description

Technical Field

[0001] The invention relates to a high-efficiency self-adjusting precision grinding and polishing system, belonging to the technical field of material processing. Background Art

[0002] Traditional grinding and polishing equipment has difficulty maintaining consistent processing conditions during long-term operation, especially when processing different materials (such as silicon carbide reflectors, optical glass, aluminum alloys, stainless steel structural parts, etc.). Due to the lack of effective monitoring and self-adjustment capabilities, key parameters such as pressure, displacement and temperature are not accurately controlled, which in turn affects product quality and consistency. In addition, when quality problems arise, it becomes difficult to trace the root cause of the problem due to the lack of detailed records of the entire processing process. Therefore, there is an urgent need for a grinding and polishing equipment suitable for products of different materials that can monitor and adjust processing parameters in real time to ensure processing quality, and can record the processing process to facilitate analysis and optimization of process parameters. Summary of the invention

[0003] The present invention is to solve the above technical problems and further provide a high-efficiency self-adjusting precision grinding and polishing system.

[0004] The technical solution adopted by the present invention to solve the above technical problems is: A high-efficiency self-adjusting precision grinding and polishing system comprises a supporting platform, a control center, a rotating grinding wheel assembly, a cooling adjustment assembly and a three-axis coordinated positioning assembly installed on the supporting platform, and a precision adjustment fixture assembly installed at the end of the three-axis coordinated positioning assembly, wherein the rotating grinding wheel assembly, the cooling adjustment assembly, the three-axis coordinated positioning assembly and the precision adjustment fixture assembly are all electrically connected to the control center. An inertial measurement unit is arranged between the precision adjustment fixture assembly and the end of the three-axis collaborative positioning assembly to monitor the posture of the end of the three-axis collaborative positioning assembly and feed back the monitoring results to the three-axis collaborative positioning assembly in real time. The position and angle adjustment of the precision adjustment fixture assembly is realized through the three-axis collaborative positioning assembly. The workpiece is mounted at the end of the precision adjustment fixture assembly and located above the rotating grinding wheel assembly. The position of the workpiece is precisely adjusted through the precision adjustment fixture assembly. An infrared temperature sensor is installed on the upper part of the precision adjustment fixture assembly, which monitors the temperature of the rotating grinding wheel assembly in real time and transmits the temperature signal to the cooling adjustment assembly. The rotating grinding wheel assembly is cooled by a cooling regulating assembly.

[0005] Furthermore, the three-axis collaborative positioning assembly includes a fixture fixing seat, a guide rail and three groups of adjustment components, each group of adjustment components includes a slider mechanism, a servo drive unit, an angle sensor device, a linear drive motor and a piezoelectric actuator, the guide rail is arranged in a ring shape on the support platform and is located on the outside of the rotating grinding wheel assembly, the slider mechanism is slidably installed on the guide rail, the servo drive unit is fixed on the slider mechanism, and the angle sensor device is installed on the servo drive unit, the linear drive motor is fixed at the output end of the servo drive unit, the piezoelectric actuator is fixed at the output end of the linear drive motor, and the fixture fixing seat is installed at the output ends of the three piezoelectric actuators.

[0006] Furthermore, a displacement or pressure sensor module is provided between the output end of each piezoelectric actuator and the fixture fixing seat.

[0007] Furthermore, the three groups of adjustment components are evenly distributed along the circumferential direction.

[0008] Furthermore, the precision adjustment fixture assembly includes a connecting plate installed at the bottom of the inertial measurement unit and one or more precision adjustment arm assemblies installed below the connecting plate, wherein the precision adjustment arm assembly includes a first servo adjustment mechanism, a second servo adjustment mechanism, a first adjustment arm, a second adjustment arm, a precision displacement sensor, a precision pressure sensor, a nanoscale piezoelectric controller and a quick-change fixture head, the first adjustment arm and the connecting plate are connected by a first servo adjustment mechanism, the first adjustment arm and the second adjustment arm are connected by a second servo adjustment mechanism, the quick-change fixture head is installed at the bottom end of the second adjustment arm through a nanoscale piezoelectric controller, and the precision pressure sensor and the precision displacement sensor are both arranged between the quick-change fixture head and the second adjustment arm.

[0009] Furthermore, the number of the precision adjustment arm assemblies is three and they are evenly distributed along the circumferential direction.

[0010] Furthermore, the cooling and regulating component includes a cooling liquid storage tank, a temperature control unit installed on the cooling liquid storage tank, a liquid outlet pipe connected to the temperature control unit, and a flow regulating valve arranged at the inlet end of the liquid outlet pipe.

[0011] Furthermore, the number of cooling adjustment assemblies is the same as or greater than the number of quick-change fixture heads.

[0012] Furthermore, a baffle is provided on the outer side of the rotating grinding wheel assembly, and a gap exists between the baffle and the outer wall of the rotating grinding wheel assembly.

[0013] Furthermore, the support platform includes a vibration isolation base and a plurality of shock-absorbing support frames fixedly mounted on the bottom of the vibration isolation base.

[0014] Compared with the prior art, the present invention has the following effects: By adding an inertial measurement unit to the grinding and polishing system to monitor the posture of the end of the three-axis collaborative positioning component, the accuracy of position control is enhanced.

[0015] By setting up infrared temperature sensors, inertial measurement units, cooling adjustment components, three-axis collaborative positioning components and precision adjustment fixture components, the grinding and polishing system can monitor and automatically adjust the processing parameters, grinding wheel type and coolant characteristics in real time during the processing, ensuring the stability and controllability of the processing process. It can also be applied to a variety of materials, effectively expanding the application scope of the grinding and polishing system.

[0016] The position and angle of the precision adjustment fixture assembly can be adjusted through the three-axis collaborative positioning assembly, thereby achieving rough adjustment of the position and angle of the workpiece to be processed; the position of the workpiece to be processed can be accurately adjusted through the precision adjustment fixture assembly. The two-stage adjustment greatly improves the surface treatment accuracy of the workpiece to be processed and ensures high-quality output of the workpiece.

[0017] The control center records the processing status in detail, which facilitates the analysis and optimization of process parameters and finds the root cause of precision loss. The grinding and polishing system of the present invention is particularly suitable for fields such as semiconductor manufacturing, optical glass processing, and precision structural parts, which have extremely high requirements for processing accuracy. The system has the ability to dynamically adjust processing parameters according to material properties, and monitor and adjust in real time during the processing process to ensure the consistency and stability of processing conditions. In addition, the system supports simultaneous processing of multiple workpieces, improves production efficiency, and provides comprehensive processing status monitoring, which helps to identify and reduce the causes of precision loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a first three-dimensional structural schematic diagram of the high-efficiency self-adjusting precision grinding and polishing system of the present invention; Figure 2 A second three-dimensional structural schematic diagram of the high-efficiency self-adjusting precision grinding and polishing system of the present invention; Figure 3 It is a front view schematic diagram of the high-efficiency self-adjusting precision grinding and polishing system of the present invention.

[0019] In the figure: 1. Support platform; 11. Vibration isolation base; 12. Shock-absorbing support frame; 2. Rotating grinding wheel assembly; 3. Cooling adjustment assembly; 31. Coolant storage tank; 32. Temperature control unit; 33. Liquid outlet pipe; 4. Three-axis collaborative positioning assembly; 41. Fixture fixing seat; 42. Guide rail; 43. Slider mechanism; 44. Servo drive unit; 45. Angle sensor device; 46. Linear drive motor; 47. Piezoelectric actuator; 48. Displacement or pressure sensor module; 5. Precision adjustment fixture assembly; 51. Connecting plate; 52. First servo adjustment mechanism; 53. Second servo adjustment mechanism; 54. First adjustment arm; 55. Second adjustment arm; 56. Nano-level piezoelectric controller; 57. Quick-change fixture head; 6. Inertial measurement unit; 7. Infrared temperature sensor; 8. Baffle. DETAILED DESCRIPTION

[0020] Specific implementation method 1: Combination Figures 1 to 3 This embodiment is explained, and the technical scheme in the embodiment of the present invention is clearly and completely described. Obviously, the described embodiment is only a part of the embodiment of the present invention, rather than all the embodiments. Based on the embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0021] It should be noted that the descriptions of the present invention regarding directions such as "front", "back", "left", "right", "inside", "outside", "left side", "right side", "upper", "lower", "top", "bottom", etc. are all defined based on the relationship between the orientations or positions shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the structure must be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention. In the description of the present invention, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0022] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] A high-efficiency self-adjusting precision grinding and polishing system comprises a supporting platform 1, a control center, a rotating grinding wheel assembly 2, a cooling adjustment assembly 3 and a three-axis coordinated positioning assembly 4 installed on the supporting platform 1, and a precision adjustment fixture assembly 5 installed at the end of the three-axis coordinated positioning assembly 4, wherein the rotating grinding wheel assembly 2, the cooling adjustment assembly 3, the three-axis coordinated positioning assembly 4 and the precision adjustment fixture assembly 5 are all electrically connected to the control center. An inertial measurement unit 6 is provided between the precision adjustment fixture assembly 5 and the end of the three-axis collaborative positioning assembly 4, which is used to monitor the posture of the end of the three-axis collaborative positioning assembly 4 and feed back the monitoring results to the three-axis collaborative positioning assembly 4 in real time, so as to adjust the position and angle of the precision adjustment fixture assembly 5 through the three-axis collaborative positioning assembly 4. The workpiece to be processed is mounted at the end of the precision adjustment fixture assembly 5 and is located above the rotating grinding wheel assembly 2. The position of the workpiece to be processed is precisely adjusted by the precision adjustment fixture assembly 5. An infrared temperature sensor 7 is provided on the upper part of the precision adjustment fixture assembly 5, which monitors the temperature of the rotating grinding wheel assembly 2 in real time and transmits the temperature signal to the cooling adjustment assembly 3. The rotating grinding wheel assembly 2 is cooled by the cooling adjustment assembly 3 .

[0024] After the infrared temperature sensor detects the temperature, the temperature of the friction surface between the rotating grinding wheel assembly and the workpiece is controlled by adjusting the on / off and flow rate of the coolant. Maintaining a suitable processing temperature prevents the rotating grinding wheel assembly 2 from overheating. The coolant temperature and flow rate in the cooling adjustment assembly 3 are determined before processing, and coolants with different temperatures and flows are used for different workpieces to be processed. The flow rate and temperature of the coolant can also be adjusted in real time during the processing according to actual conditions.

[0025] The specific structure of the rotating grinding wheel assembly 2 is prior art and will not be described in detail here. The rotating grinding wheel assembly 2 can be replaced according to processing requirements, and different types of sandpaper can be attached according to processing requirements, and the angular velocity of the rotating grinding wheel assembly 2 can be adjusted to match different processing stages.

[0026] By adding an inertial measurement unit 6 to the grinding and polishing system to monitor the posture of the end of the three-axis collaborative positioning assembly 4, the accuracy of position control is further enhanced.

[0027] By arranging an infrared temperature sensor 7, an inertial measurement unit 6, a cooling adjustment component 3, a three-axis collaborative positioning component 4 and a precision adjustment fixture component 5, the grinding and polishing system can monitor and automatically adjust the processing parameters, grinding wheel type and coolant characteristics in real time during the processing, thereby ensuring the stability and controllability of the processing process, and can be applied to a variety of materials, effectively expanding the application scope of the grinding and polishing system.

[0028] The position and angle of the precision adjustment fixture assembly 5 are adjusted by the three-axis coordinated positioning assembly 4, thereby achieving rough adjustment of the position and angle of the workpiece to be processed; the position of the workpiece to be processed is precisely adjusted by the precision adjustment fixture assembly 5. The two-stage adjustment greatly improves the surface treatment accuracy of the workpiece to be processed and ensures high-quality output of the workpiece.

[0029] The number of precision adjustment fixture assemblies 5 can be one or more, so as to realize the grinding and polishing operation of one or more workpieces to be processed by one device, thereby improving the processing efficiency. Each fixture in the precision adjustment fixture assembly 5 can realize independent position adjustment, so as to accurately adjust the position of each workpiece to be processed according to actual needs.

[0030] The system can calibrate itself before startup or at regular intervals by performing a series of test actions to determine the error pattern and automatically updating internal parameters to correct the deviation.

[0031] The control center records the processing status in detail, which facilitates the analysis and optimization of process parameters and the identification of the root cause of precision loss. The grinding and polishing system of the present invention is particularly suitable for fields such as semiconductor manufacturing, optical glass processing, and precision structural parts, which have extremely high requirements for processing accuracy. The system has the ability to dynamically adjust processing parameters according to material properties, and monitor and adjust in real time during the processing process to ensure the consistency and stability of processing conditions. In addition, the system supports simultaneous processing of multiple workpieces, improves production efficiency, and provides comprehensive processing status monitoring, which helps to identify the causes of precision loss and facilitates avoidance in subsequent processing.

[0032] The three-axis cooperative positioning assembly 4 includes a fixture fixing seat 41, a guide rail 42 and three groups of adjustment components, each group of adjustment components includes a slider mechanism 43, a servo drive unit 44, an angle sensor device 45, a linear drive motor 46 and a piezoelectric actuator 47. The guide rail 42 is arranged in an annular shape on the support platform 1 and is located outside the rotating grinding wheel assembly 2. The slider mechanism 43 is slidably mounted on the guide rail 42, the servo drive unit 44 is fixed on the slider mechanism 43, and the angle sensor device 45 is mounted on the servo drive unit 44. The linear drive motor 46 is fixed at the output end of the servo drive unit 44, the piezoelectric actuator 47 is fixed at the output end of the linear drive motor 46, and the fixture fixing seat 41 is mounted at the output ends of the three piezoelectric actuators 47. The guide rail 42 can be a complete annular structure or a plurality of arc segments distributed along the circumferential direction, as long as the circumferential position adjustment of the adjustment assembly around the rotating grinding wheel assembly 2 can be achieved. By setting up a slider mechanism 43, a servo drive unit 44 and an angle sensor device 45, precise rotation control is achieved; large-stroke displacement adjustment is achieved through a linear drive motor 46, and small-stroke displacement adjustment is achieved through a piezoelectric actuator 47. The linear drive motor 46 and the piezoelectric actuator 47 cooperate to achieve two-stage adjustment of linear displacement, which effectively improves the processing speed and processing accuracy of the grinding and polishing system.

[0033] A displacement or pressure sensor module 48 is provided between the output end of each piezoelectric actuator 47 and the fixture fixing seat 41. Such a design makes it easier to adjust the parameters of the linear drive motor 46 and the piezoelectric actuator 47. The displacement or pressure sensor module 48 is a functional module, that is, it has both a displacement sensor and a pressure sensor.

[0034] The three groups of adjustment components are evenly distributed along the circumference. This design optimizes space utilization and load balance.

[0035] The precision adjustment fixture assembly 5 includes a connecting plate 51 installed at the bottom of the inertial measurement unit 6 and one or more precision adjustment arm assemblies installed below the connecting plate 51, wherein the precision adjustment arm assembly includes a first servo adjustment mechanism 52, a second servo adjustment mechanism 53, a first adjustment arm 54, a second adjustment arm 55, a precision displacement sensor, a precision pressure sensor, a nano-level piezoelectric controller 56 and a quick-change fixture head 57, the first adjustment arm 54 and the connecting plate 51 are connected through the first servo adjustment mechanism 52, the first adjustment arm 54 and the second adjustment arm 55 are connected through the second servo adjustment mechanism 53, the quick-change fixture head 57 is installed at the bottom end of the second adjustment arm 55 through the nano-level piezoelectric controller 56, and the precision pressure sensor and the precision displacement sensor are both arranged between the quick-change fixture head 57 and the second adjustment arm 55. With such a design, by adopting the quick-change fixture head 57, it is used to adapt to workpieces of different shapes and sizes, thereby effectively improving processing flexibility and processing efficiency. Two servo adjustment mechanisms and two adjustment arms are used to accurately adjust the position of the quick-change fixture head 57. The nano-level piezoelectric controller 56, precision displacement sensor and precision pressure sensor are used to ensure that the workpiece is evenly stressed, achieving nano-level processing accuracy. The number of precision adjustment arm assemblies is one or more, and one or more workpieces can be processed through a grinding and polishing system, greatly improving the processing efficiency. The multiple precision adjustment arm assemblies are preferably evenly distributed along the circumference. Each precision adjustment arm assembly can achieve independent position adjustment. The infrared temperature sensor 7 is arranged below the connecting plate 51 to facilitate direct and accurate monitoring of the surface temperature of the rotating grinding wheel assembly 2.

[0036] The number of the precision adjustment arm assemblies is three and they are evenly distributed along the circumferential direction.

[0037] The cooling and regulating assembly 3 includes a cooling liquid storage tank 31, a temperature control unit 32 installed on the cooling liquid storage tank 31, a liquid outlet pipe 33 connected to and installed on the temperature control unit 32, and a flow regulating valve arranged at the inlet end of the liquid outlet pipe 33. In this design, the temperature of the cooling liquid is regulated by the temperature control unit 32, and the on-off and flow rate of the cooling liquid are regulated by the flow regulating valve. The infrared temperature sensor 7 transmits the monitored temperature signal to the temperature control unit 32 and the flow regulating valve, so that the cooling liquid can flow out at a suitable temperature and a suitable flow rate.

[0038] The number of cooling adjustment components 3 is the same as or greater than the number of quick-change clamp heads 57. Such a design further ensures the best cooling effect and prevents overheating. The coolant outlet pipe 33 and the three groups of adjustment components are preferably arranged in a staggered manner.

[0039] The outer side of the rotating grinding wheel assembly 2 is surrounded by a baffle 8, and there is a gap between the baffle 8 and the outer wall of the rotating grinding wheel assembly 2. In this design, by surrounding the baffle 8 on the outer side of the rotating grinding wheel assembly 2, most of the grinding and polishing debris are blocked, thereby keeping the system table clean; by leaving a gap between the baffle 8 and the rotating grinding wheel assembly 2, the rotation of the rotating grinding wheel assembly 2 is not affected.

[0040] The support platform 1 includes a vibration isolation base 11 and a plurality of shock-absorbing support frames 12 fixed to the bottom of the vibration isolation base 11. Such a design ensures the stability of the working platform and reduces the impact of external vibration on the processing process. The number of shock-absorbing support frames 12 is preferably four, which are evenly distributed along the circumference of the vibration isolation base 11.

[0041] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A high-efficiency self-adjusting precision grinding and polishing system, characterized by: The invention comprises a support platform (1), a control center, a rotating grinding wheel assembly (2), a cooling adjustment assembly (3) and a three-axis coordinated positioning assembly (4) installed on the support platform (1), and a precision adjustment fixture assembly (5) installed at the end of the three-axis coordinated positioning assembly (4), wherein the rotating grinding wheel assembly (2), the cooling adjustment assembly (3), the three-axis coordinated positioning assembly (4) and the precision adjustment fixture assembly (5) are all electrically connected to the control center. An inertial measurement unit (6) is provided between the precision adjustment fixture component (5) and the end of the three-axis collaborative positioning component (4), and is used to monitor the posture of the end of the three-axis collaborative positioning component (4), and to feed back the monitoring result to the three-axis collaborative positioning component (4) in real time, so as to achieve position and angle adjustment of the precision adjustment fixture component (5) through the three-axis collaborative positioning component (4). The workpiece to be processed is mounted at the end of the precision adjustment fixture assembly (5) and is located above the rotating grinding wheel assembly (2). The position of the workpiece to be processed is precisely adjusted by the precision adjustment fixture assembly (5). An infrared temperature sensor (7) is disposed on the upper portion of the precision adjustment fixture assembly (5). The infrared temperature sensor (7) monitors the temperature of the rotating grinding wheel assembly (2) in real time and transmits the temperature signal to the cooling adjustment assembly (3). The rotating grinding wheel assembly (2) is cooled by a cooling regulating assembly (3).

2. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: The three-axis collaborative positioning component (4) comprises a fixture fixing seat (41), a guide rail (42) and three groups of adjustment components, each group of adjustment components comprising a slider mechanism (43), a servo drive unit (44), an angle sensor device (45), a linear drive motor (46) and a piezoelectric actuator (47), the guide rail (42) being arranged in a ring shape on the support platform (1) and being located outside the rotating grinding wheel component (2), the slider mechanism (43) being slidably mounted on the guide rail (42), the servo drive unit (44) being fixedly mounted on the slider mechanism (43), and the angle sensor device (45) being mounted on the servo drive unit (44), the linear drive motor (46) being fixedly mounted on the output end of the servo drive unit (44), the piezoelectric actuator (47) being fixedly mounted on the output end of the linear drive motor (46), and the fixture fixing seat (41) being mounted on the output ends of the three piezoelectric actuators (47).

3. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 2, characterized in that: A displacement or pressure sensor module (48) is provided between the output end of each piezoelectric actuator (47) and the fixture fixing seat (41).

4. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 2, characterized in that: The three groups of adjustment components are evenly distributed along the circumference.

5. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: The precision adjustment fixture assembly (5) comprises a connecting plate (51) mounted on the bottom of the inertial measurement unit (6) and one or more precision adjustment arm assemblies mounted below the connecting plate (51), wherein the precision adjustment arm assembly comprises a first servo adjustment mechanism (52), a second servo adjustment mechanism (53), a first adjustment arm (54), a second adjustment arm (55), a precision displacement sensor, a precision pressure sensor, a nanometer-level piezoelectric controller (56) and a quick-change fixture head (57); the first adjustment arm (54) and the connecting plate (51) are connected via the first servo adjustment mechanism (52); the first adjustment arm (54) and the second adjustment arm (55) are connected via the second servo adjustment mechanism (53); the quick-change fixture head (57) is mounted on the bottom end of the second adjustment arm (55) via the nanometer-level piezoelectric controller (56); and the precision pressure sensor and the precision displacement sensor are both arranged between the quick-change fixture head (57) and the second adjustment arm (55).

6. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 5, characterized in that: The number of the precision adjustment arm assemblies is three and they are evenly distributed along the circumferential direction.

7. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: The cooling regulating assembly (3) comprises a cooling liquid storage tank (31), a temperature control unit (32) mounted on the cooling liquid storage tank (31), a liquid outlet pipe (33) connected to and mounted on the temperature control unit (32), and a flow regulating valve arranged at the inlet end of the liquid outlet pipe (33).

8. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 5, characterized in that: The number of cooling adjustment components (3) is the same as or greater than the number of quick-change clamp heads (57).

9. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: A baffle plate (8) is provided on the outer periphery of the rotating grinding wheel assembly (2), and a gap exists between the baffle plate (8) and the outer wall of the rotating grinding wheel assembly (2).

10. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: The support platform (1) comprises a vibration isolation base (11) and a plurality of shock-absorbing support frames (12) fixedly mounted on the bottom of the vibration isolation base (11).

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