An efficient self-regulating precision grinding and polishing system

Abstract

An efficient self-regulating precision grinding and polishing system belongs to the field of material processing technology. The present invention solves the problem that existing grinding and polishing equipment is difficult to maintain consistent processing conditions during long-term operation, and cannot monitor and adjust processing parameters in real time, resulting in unstable processing quality. It includes a support platform, a control center, a rotating grinding wheel assembly, a cooling and adjustment assembly, a three-axis collaborative positioning assembly installed on the support platform, and a precision adjustment fixture assembly installed at the end of the three-axis collaborative positioning assembly. The rotating grinding wheel assembly, the cooling and adjustment assembly, the three-axis collaborative positioning assembly, and the precision adjustment fixture assembly are all electrically connected to the control center. By setting an infrared temperature sensor, an inertial measurement unit, a cooling and adjustment assembly, a three-axis collaborative positioning assembly, and a precision adjustment fixture assembly, the grinding and polishing system can monitor and automatically adjust processing parameters, grinding wheel type, and coolant characteristics in real time during the processing process, ensuring the stability and controllability of the processing process.

Description

Technical Field

[0001] The present invention relates to a high-performance self-regulating precision grinding and polishing system, belonging to the technical field of material processing. Background Art

[0002] Traditional grinding and polishing equipment is difficult to maintain consistent processing conditions during long-term operation. Especially when processing different materials (such as silicon carbide mirrors, optical glass, aluminum alloy, stainless steel structural parts, etc.), due to the lack of effective monitoring and self-regulating capabilities, the control of key parameters such as pressure, displacement, and temperature is not precise enough, thus affecting product quality and consistency. In addition, when quality problems occur, it is difficult to trace the root cause of the problem due to the lack of detailed records of the entire processing process. Therefore, there is an urgent need for a grinding and polishing equipment suitable for products of different materials, which can monitor and adjust processing parameters in real time, ensure processing quality, and can record the processing process for easy analysis and optimization of process parameters. Summary of the Invention

[0003] The present invention is to solve the above technical problems, and further provides a high-performance self-regulating precision grinding and polishing system.

[0004] The technical solution adopted by the present invention to solve the above technical problems is:

[0005] A high-performance self-regulating precision grinding and polishing system includes a support platform, a control center, a rotating grinding wheel assembly, a cooling and regulating assembly, and a three-axis collaborative positioning assembly installed on the support platform, and a precision regulating fixture assembly installed at the end of the three-axis collaborative positioning assembly. Among them, the rotating grinding wheel assembly, the cooling and regulating assembly, the three-axis collaborative positioning assembly, and the precision regulating fixture assembly are all electrically connected to the control center.

[0006] An inertial measurement unit is arranged between the precision regulating fixture assembly and the end of the three-axis collaborative positioning assembly, which is used to monitor the attitude of the end of the three-axis collaborative positioning assembly and feedback the monitoring results to the three-axis collaborative positioning assembly in real time, and realize the position and angle adjustment of the precision regulating fixture assembly through the three-axis collaborative positioning assembly.

[0007] The workpiece to be processed is installed at the end of the precision regulating fixture assembly and above the rotating grinding wheel assembly, and the precise adjustment of the position of the workpiece to be processed is realized through the precision regulating fixture assembly.

[0008] An infrared temperature sensor is arranged on the upper part of the precision regulating fixture assembly, which is used to monitor the temperature of the rotating grinding wheel assembly in real time and transmit the temperature signal to the cooling and regulating assembly.

[0009] The rotating grinding wheel assembly is cooled through the cooling and regulating assembly.

[0010] Further, the three-axis collaborative positioning assembly includes a fixture fixing base, a guide rail, and three sets of adjusting assemblies. Each set of adjusting assemblies includes a slider mechanism, a servo drive unit, an angle sensing device, a linear drive motor, and a piezoelectric actuator. The guide rail is arranged in a ring shape on the support platform and is located outside the rotary grinding wheel assembly. The slider mechanism is slidably mounted on the guide rail. The servo drive unit is fixedly installed on the slider mechanism, and the angle sensing device is installed on the servo drive unit. The linear drive motor is fixedly installed at the output end of the servo drive unit, and the piezoelectric actuator is fixedly installed at the output end of the linear drive motor. The fixture fixing base is installed at the output ends of the three piezoelectric actuators.

[0011] Further, a displacement or pressure sensor module is provided between the output end of each piezoelectric actuator and the fixture fixing base.

[0012] Further, the three sets of adjusting assemblies are evenly distributed along the circumferential direction.

[0013] Further, the precision adjusting fixture assembly includes a connecting plate installed at the bottom of the inertial measurement unit and one or more precision adjusting arm assemblies installed below the connecting plate. The precision adjusting arm assembly includes a first servo adjusting mechanism, a second servo adjusting mechanism, a first adjusting arm, a second adjusting arm, a precision displacement sensor, a precision pressure sensor, a nanoscale piezoelectric controller, and a quick-change fixture head. The first adjusting arm is connected to the connecting plate through the first servo adjusting mechanism. The first adjusting arm and the second adjusting arm are connected through the second servo adjusting mechanism. The quick-change fixture head is installed at the bottom end of the second adjusting arm through the nanoscale piezoelectric controller. The precision pressure sensor and the precision displacement sensor are both arranged between the quick-change fixture head and the second adjusting arm.

[0014] Further, the number of the precision adjusting arm assemblies is three and they are evenly distributed along the circumferential direction.

[0015] Further, the cooling adjusting assembly includes a coolant storage tank, a temperature control unit installed on the coolant storage tank, a liquid outlet pipe connected and installed on the temperature control unit, and a flow regulating valve arranged at the inlet end of the liquid outlet pipe.

[0016] Further, the number of the cooling adjusting assemblies is the same as or more than the number of the quick-change fixture heads.

[0017] Further, a baffle is arranged around the outside of the rotary grinding wheel assembly, and there is a gap between the baffle and the outer wall of the rotary grinding wheel assembly.

[0018] Further, the support platform includes a vibration isolation base and a plurality of shock absorption support frames fixedly installed at the bottom of the vibration isolation base.

[0019] The present invention has the following effects compared with the prior art:

[0020] By adding an inertial measurement unit to the grinding and polishing system to monitor the attitude of the end of the three-axis collaborative positioning component, the accuracy of position control is enhanced.

[0021] By setting an infrared temperature sensor, an inertial measurement unit, a cooling adjustment component, a three-axis collaborative positioning component, and a precision adjustment fixture component, the grinding and polishing system can monitor and automatically adjust the processing parameters, grinding wheel type, and coolant characteristics in real time during the processing, ensuring the stability and controllability of the processing process, and being applicable to diverse materials, effectively expanding the application range of the grinding and polishing system.

[0022] The position and angle of the precision adjustment fixture component are adjusted through the three-axis collaborative positioning component, and then the rough adjustment of the position and angle of the workpiece to be processed is realized; the precise adjustment of the position of the workpiece to be processed is realized through the precision adjustment fixture component. The double-stage adjustment greatly improves the surface treatment accuracy of the workpiece to be processed and ensures the high-quality output of the workpiece.

[0023] The control center records the processing status in detail, facilitating the analysis and optimization of process parameters to find the root cause of accuracy loss. The grinding and polishing system of the present invention is particularly suitable for fields such as semiconductor manufacturing, optical glass processing, and precision structural parts, which have extremely high requirements for processing accuracy. The system has the ability to dynamically adjust processing parameters according to material properties and monitor and adjust in real time during the processing to ensure the consistency and stability of processing conditions. In addition, the system supports simultaneous processing of multiple workpieces, improving production efficiency and providing comprehensive monitoring of the processing status, which helps to identify and reduce the causes of accuracy loss. Description of the Drawings

[0024] Figure 1 It is the first three-dimensional structural schematic diagram of the high-performance self-adjusting precision grinding and polishing system of the present invention;

[0025] Figure 2 It is the second three-dimensional structural schematic diagram of the high-performance self-adjusting precision grinding and polishing system of the present invention;

[0026] Figure 3 It is the front view schematic diagram of the high-performance self-adjusting precision grinding and polishing system of the present invention.

[0027] In the figure:

[0028] 1. Support platform; 11. Vibration isolation base; 12. Shock absorption support frame; 2. Rotary grinding wheel assembly; 3. Cooling adjustment assembly; 31. Coolant storage tank; 32. Temperature control unit; 33. Liquid outlet pipe; 4. Three-axis collaborative positioning assembly; 41. Fixture fixing seat; 42. Guide rail; 43. Slide block mechanism; 44. Servo drive unit; 45. Angle sensing device; 46. Linear drive motor; 47. Piezoelectric actuator; 48. Displacement or pressure sensor module; 5. Precision adjustment fixture assembly; 51. Connection plate; 52. First servo adjustment mechanism; 53. Second servo adjustment mechanism; 54. First adjustment arm; 55. Second adjustment arm; 56. Nanoscale piezoelectric controller; 57. Quick-change fixture head; 6. Inertial measurement unit; 7. Infrared temperature measurement sensor; 8. Baffle plate. Detailed implementation manners

[0029] Detailed implementation manner one: In combination with Figures 1 to 3 Describe this implementation manner, and clearly and completely describe the technical solutions in the implementation manners of the present invention. Obviously, the described implementation manners are only a part of the implementation manners of the present invention, rather than all the implementation manners. Based on the implementation manners in the present invention, all other implementation manners obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0030] It should be noted that the descriptions of the present invention regarding directions such as "front", "rear", "left", "right", "inside", "outside", "left side", "right side", "upper part", "lower part", "top", "bottom", etc. are all defined based on the orientation or position relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the described structure must be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation to the present invention. In the description of the present invention, the meaning of "a plurality" is more than two, unless otherwise specifically defined.

[0031] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0032] An efficient self-regulating precision grinding and polishing system, comprising a support platform 1, a control center, a rotary grinding wheel assembly 2 mounted on the support platform 1, a cooling and regulating assembly 3, a three-axis collaborative positioning assembly 4, and a precision regulating fixture assembly 5 mounted at the end of the three-axis collaborative positioning assembly 4. Among them, the rotary grinding wheel assembly 2, the cooling and regulating assembly 3, the three-axis collaborative positioning assembly 4, and the precision regulating fixture assembly 5 are all electrically connected to the control center.

[0033] An inertial measurement unit 6 is provided between the precision regulating fixture assembly 5 and the end of the three-axis collaborative positioning assembly 4, which is used to monitor the attitude of the end of the three-axis collaborative positioning assembly 4 and feedback the monitoring results to the three-axis collaborative positioning assembly 4 in real time, and the position and angle of the precision regulating fixture assembly 5 are adjusted through the three-axis collaborative positioning assembly 4.

[0034] The workpiece to be processed is installed at the end of the precision regulating fixture assembly 5 and above the rotary grinding wheel assembly 2, and the position of the workpiece to be processed is accurately adjusted through the precision regulating fixture assembly 5.

[0035] An infrared temperature sensor 7 is provided on the upper part of the precision regulating fixture assembly 5, which is used to monitor the temperature of the rotary grinding wheel assembly 2 in real time and transmit the temperature signal to the cooling and regulating assembly 3.

[0036] The rotary grinding wheel assembly 2 is cooled by the cooling and regulating assembly 3.

[0037] After the infrared temperature sensor monitors the temperature, the temperature of the friction surface between the rotary grinding wheel assembly and the workpiece is controlled by adjusting the on-off and flow rate of the coolant. Keep the appropriate processing temperature to prevent the rotary grinding wheel assembly 2 from overheating. The temperature and flow rate of the coolant in the cooling and regulating assembly 3 are determined before processing. For different workpieces to be processed, coolants with different temperatures and flow rates are used. The flow rate and temperature of the coolant can also be adjusted in real time during the processing according to the actual situation.

[0038] The specific structure of the rotary grinding wheel assembly 2 is prior art and will not be described in detail here. The rotary grinding wheel assembly 2 can be replaced according to the processing requirements, and different types of sandpapers can also be attached according to the processing requirements, and the angular velocity of the rotary grinding wheel assembly 2 can be adjusted to match different processing stages.

[0039] By adding an inertial measurement unit 6 in the grinding and polishing system to monitor the attitude of the end of the three-axis collaborative positioning assembly 4, the accuracy of position control is further enhanced.

[0040] By setting up the infrared temperature measurement sensor 7, inertial measurement unit 6, cooling adjustment component 3, three-axis collaborative positioning component 4 and precision adjustment fixture component 5, the grinding and polishing system can monitor in real time and automatically adjust the processing parameters, grinding wheel type and coolant characteristics during the processing, ensuring the stability and controllability of the processing process, and can be applicable to diverse materials, effectively expanding the application range of the grinding and polishing system.

[0041] The position and angle of the precision adjustment fixture component 5 are adjusted through the three-axis collaborative positioning component 4, thereby realizing the rough adjustment of the position and angle of the workpiece to be processed; the precise adjustment of the position of the workpiece to be processed is realized through the precision adjustment fixture component 5. The two-stage adjustment greatly improves the surface treatment accuracy of the workpiece to be processed and ensures the high-quality output of the workpiece.

[0042] The number of the precision adjustment fixture components 5 can be one or more, thereby realizing the grinding and polishing operation of one or more workpieces to be processed by one device, improving the processing efficiency. Each fixture in the precision adjustment fixture component 5 can realize independent position adjustment, so as to accurately adjust the position of each workpiece to be processed according to actual needs.

[0043] The system can perform self-calibration before startup or regularly, determine the error mode by executing a series of test actions, and automatically update the internal parameters to correct the deviation.

[0044] The processing status is recorded in detail by the control center, which is convenient for analyzing and optimizing the process parameters and finding the root cause of accuracy loss. The grinding and polishing system of the present invention is particularly suitable for fields such as semiconductor manufacturing, optical glass processing, and precision structural parts, which have extremely high requirements for processing accuracy. The system has the ability to dynamically adjust the processing parameters according to the material properties, and monitors and adjusts in real time during the processing to ensure the consistency and stability of the processing conditions. In addition, the system supports simultaneous processing of multiple workpieces, improves the production efficiency, and provides comprehensive monitoring of the processing status, which helps to identify the reasons for accuracy loss and thus facilitates avoidance in subsequent processing.

[0045] The three-axis collaborative positioning assembly 4 includes a fixture fixing base 41, a guide rail 42 and three groups of adjusting components. Each group of adjusting components includes a slider mechanism 43, a servo drive unit 44, an angle sensing device 45, a linear drive motor 46 and a piezoelectric actuator 47. The guide rail 42 is arranged in a ring on the support platform 1 and is located outside the rotary grinding wheel assembly 2. The slider mechanism 43 is slidably mounted on the guide rail 42. The servo drive unit 44 is fixedly installed on the slider mechanism 43, and the angle sensing device 45 is installed on the servo drive unit 44. The linear drive motor 46 is fixedly installed at the output end of the servo drive unit 44, and the piezoelectric actuator 47 is fixedly installed at the output end of the linear drive motor 46. The fixture fixing base 41 is installed at the output ends of the three piezoelectric actuators 47. The guide rail 42 can be a complete ring structure or multiple arc segments distributed along the circumferential direction, as long as it can realize the circumferential position adjustment of the adjusting component around the rotary grinding wheel assembly 2. By setting the slider mechanism 43, the servo drive unit 44 and the angle sensing device 45, precise rotation control is achieved; large-stroke displacement adjustment is realized through the linear drive motor 46, and small-stroke displacement adjustment is realized through the piezoelectric actuator 47. The linear drive motor 46 and the piezoelectric actuator 47 cooperate to realize two-stage adjustment of the linear displacement, effectively improving the processing speed and processing accuracy of the grinding and polishing system.

[0046] A displacement or pressure sensor module 48 is provided between the output end of each piezoelectric actuator 47 and the fixture fixing base 41. With such a design, it is more convenient to adjust the parameters of the linear drive motor 46 and the piezoelectric actuator 47. The displacement or pressure sensor module 48 is a functional module, that is, it has both a displacement sensor and a pressure sensor.

[0047] The three groups of adjusting components are evenly distributed in the circumferential direction. With such a design, the space utilization is optimized and the load balance is achieved.

[0048] The precision adjustment fixture assembly 5 includes a connecting plate 51 installed at the bottom of the inertial measurement unit 6 and one or more precision adjustment arm assemblies installed below the connecting plate 51. The precision adjustment arm assembly includes a first servo adjustment mechanism 52, a second servo adjustment mechanism 53, a first adjustment arm 54, a second adjustment arm 55, a precision displacement sensor, a precision pressure sensor, a nanoscale piezoelectric controller 56, and a quick-change fixture head 57. The first adjustment arm 54 is connected to the connecting plate 51 through the first servo adjustment mechanism 52, and the first adjustment arm 54 and the second adjustment arm 55 are connected through the second servo adjustment mechanism 53. The quick-change fixture head 57 is installed at the bottom end of the second adjustment arm 55 through the nanoscale piezoelectric controller 56. The precision pressure sensor and the precision displacement sensor are both arranged between the quick-change fixture head 57 and the second adjustment arm 55. With such a design, by using the quick-change fixture head 57, it is used to adapt to workpieces of different shapes and sizes, thereby effectively improving the processing flexibility and processing efficiency. By using two servo adjustment mechanisms and two adjustment arms, the position of the quick-change fixture head 57 is accurately adjusted. Through the nanoscale piezoelectric controller 56, the precision displacement sensor, and the precision pressure sensor, the force on the workpiece to be processed is ensured to be uniform, achieving nanoscale processing accuracy. The number of precision adjustment arm assemblies is one or more, and it can realize the processing of one or more workpieces to be processed through one grinding and polishing system, greatly improving the processing efficiency. Multiple precision adjustment arm assemblies are preferably evenly distributed circumferentially. Each precision adjustment arm assembly can achieve independent position adjustment. The infrared temperature sensor 7 is arranged below the connecting plate 51 to facilitate directly and accurately monitoring the surface temperature of the rotating grinding wheel assembly 2.

[0049] The number of precision adjustment arm assemblies is three and they are evenly distributed circumferentially.

[0050] The cooling adjustment assembly 3 includes a coolant storage tank 31, a temperature control unit 32 installed on the coolant storage tank 31, a liquid outlet pipe 33 connected and installed on the temperature control unit 32, and a flow regulating valve arranged at the inlet end of the liquid outlet pipe 33. With such a design, the temperature of the coolant is adjusted through the temperature control unit 32, and the on / off and flow rate of the coolant are adjusted through the flow regulating valve. The infrared temperature sensor 7 transmits the monitored temperature signal to the temperature control unit 32 and the flow regulating valve to enable the coolant to flow out at a suitable temperature and a suitable flow rate.

[0051] The number of cooling adjustment assemblies 3 is the same as or more than the number of quick-change fixture heads 57. With such a design, it further ensures the best cooling effect and prevents overheating. The liquid outlet pipes 33 of the coolant are preferably arranged in a staggered manner with the three groups of adjustment assemblies.

[0052] A baffle 8 is provided around the outer side of the rotating grinding wheel assembly 2, and there is a gap between the baffle 8 and the outer wall of the rotating grinding wheel assembly 2. With such a design, by providing the baffle 8 around the outer side of the rotating grinding wheel assembly 2, most of the grinding debris is blocked, thereby keeping the system tabletop clean; by leaving a gap between the baffle 8 and the rotating grinding wheel assembly 2, the rotation of the rotating grinding wheel assembly 2 is prevented from being affected.

[0053] The support platform 1 includes a vibration isolation base 11 and a plurality of shock absorption support frames 12 fixedly installed at the bottom of the vibration isolation base 11. With such a design, the working platform is ensured to be stable, and the influence of external vibration on the processing process is reduced. The number of the shock absorption support frames 12 is preferably four and is evenly distributed along the circumferential direction of the vibration isolation base 11.

[0054] As described above, only the preferred specific embodiments of the present invention are given, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A high-efficiency self-adjusting precision grinding and polishing system, characterized by: The invention comprises a support platform (1), a control center, a rotating grinding wheel assembly (2), a cooling adjustment assembly (3) and a three-axis coordinated positioning assembly (4) installed on the support platform (1), and a precision adjustment fixture assembly (5) installed at the end of the three-axis coordinated positioning assembly (4), wherein the rotating grinding wheel assembly (2), the cooling adjustment assembly (3), the three-axis coordinated positioning assembly (4) and the precision adjustment fixture assembly (5) are all electrically connected to the control center. An inertial measurement unit (6) is provided between the precision adjustment fixture component (5) and the end of the three-axis collaborative positioning component (4), and is used to monitor the posture of the end of the three-axis collaborative positioning component (4), and to feed back the monitoring result to the three-axis collaborative positioning component (4) in real time, so as to achieve position and angle adjustment of the precision adjustment fixture component (5) through the three-axis collaborative positioning component (4). The workpiece to be processed is mounted at the end of a precision adjustment fixture assembly (5) and is located above a rotating grinding wheel assembly (2). The position of the workpiece to be processed is precisely adjusted by the precision adjustment fixture assembly (5). The precision adjustment fixture assembly (5) comprises a connecting plate (51) mounted at the bottom of an inertial measurement unit (6) and one or more precision adjustment arm assemblies mounted below the connecting plate (51). The precision adjustment arm assemblies comprise a first servo adjustment mechanism (52), a second servo adjustment mechanism (53), a first adjustment arm (54), a second adjustment arm (55), a precision A displacement sensor, a precision pressure sensor, a nanometer-level piezoelectric controller (56) and a quick-change fixture head (57); the first adjustment arm (54) and the connecting plate (51) are connected via a first servo adjustment mechanism (52); the first adjustment arm (54) and the second adjustment arm (55) are connected via a second servo adjustment mechanism (53); the quick-change fixture head (57) is mounted on the bottom end of the second adjustment arm (55) via the nanometer-level piezoelectric controller (56); the precision pressure sensor and the precision displacement sensor are both arranged between the quick-change fixture head (57) and the second adjustment arm (55); An infrared temperature sensor (7) is disposed on the upper portion of the precision adjustment fixture assembly (5). The infrared temperature sensor (7) monitors the temperature of the rotating grinding wheel assembly (2) in real time and transmits the temperature signal to the cooling adjustment assembly (3). Cooling the rotating grinding wheel assembly (2) by means of a cooling adjustment assembly (3); The three-axis collaborative positioning component (4) comprises a fixture fixing seat (41), a guide rail (42) and three groups of adjustment components, each group of adjustment components comprising a slider mechanism (43), a servo drive unit (44), an angle sensor device (45), a linear drive motor (46) and a piezoelectric actuator (47), the guide rail (42) being arranged in a ring shape on the support platform (1) and being located outside the rotating grinding wheel component (2), the slider mechanism (43) being slidably mounted on the guide rail (42), the servo drive unit (44) being fixedly mounted on the slider mechanism (43), and the angle sensor device (45) being mounted on the servo drive unit (44), the linear drive motor (46) being fixedly mounted on the output end of the servo drive unit (44), the piezoelectric actuator (47) being fixedly mounted on the output end of the linear drive motor (46), and the fixture fixing seat (41) being mounted on the output ends of the three piezoelectric actuators (47).

2. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: A displacement or pressure sensor module (48) is provided between the output end of each piezoelectric actuator (47) and the fixture fixing seat (41).

3. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: The three groups of adjustment components are evenly distributed along the circumference.

4. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: The number of the precision adjustment arm assemblies is three and they are evenly distributed along the circumferential direction.

5. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: The cooling regulating assembly (3) comprises a cooling liquid storage tank (31), a temperature control unit (32) mounted on the cooling liquid storage tank (31), a liquid outlet pipe (33) connected to and mounted on the temperature control unit (32), and a flow regulating valve arranged at the inlet end of the liquid outlet pipe (33).

6. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: The number of cooling adjustment components (3) is the same as or greater than the number of quick-change clamp heads (57).

7. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: A baffle plate (8) is provided on the outer periphery of the rotating grinding wheel assembly (2), and a gap exists between the baffle plate (8) and the outer wall of the rotating grinding wheel assembly (2).

8. A high-efficiency self-adjusting precision grinding and polishing system as claimed in claim 1, characterized in that: The support platform (1) comprises a vibration isolation base (11) and a plurality of shock-absorbing support frames (12) fixedly mounted on the bottom of the vibration isolation base (11).

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