Optical measurement device and optical measurement method
By designing an optical measuring device containing a polarization device, the problem of multiple cross images in the measurement of folded optical path optical equipment is solved, and high-precision eccentric measurement is achieved.
Patent Information
- Application Number
- CN202411513960.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-28
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2044-10-28
AI Technical Summary
In optical measurement, an optical device with a folding optical path has the same curvature or bonding of adjacent surfaces, resulting in multiple cross images appearing during the measurement process, affecting the eccentric measurement result and reducing the measurement accuracy.
An optical measuring device is designed, including a carrier bracket, a light transmitting and receiving mechanism and a polarization device. The polarization direction of the polarization device is perpendicular to the linear polarization film in the product to be tested. By adjusting the positions of the light emission and receiving mechanism and the polarization device, the influence of the excess reflected image is eliminated.
Accurate eccentricity measurement of the products to be tested with folded optical paths is achieved, which improves the accuracy and accuracy of the measurement results and eliminates interference from multiple cross images.
Smart Images

Figure CN119688251A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of optical measurement technology, and more specifically, to an optical measurement device and an optical measurement method. Background Art
[0002] In optical testing, it is often necessary to measure the reflected image of each surface of the optical lens to detect the eccentricity of the optical axis according to the position of the reflected image. For conventional products, there is usually only one reflected image on each surface; but for some optical devices, such as the folded optical path (pancake) products in virtual reality devices, since the curvature radius of two adjacent surfaces is the same, or two adjacent surfaces are attached together, there may be multiple cross images in the image plane during the measurement process, such as Figure 1 As shown; the presence of multiple cross images will obviously affect the results of eccentricity measurement, thereby greatly reducing the measurement accuracy.
[0003] In view of this, it is necessary to provide a new technical solution to solve the above technical problems. Summary of the invention
[0004] One object of the present application is to provide a new technical solution for an optical measuring device and an optical measuring method.
[0005] According to a first aspect of the present application, an optical measuring device is provided, the optical measuring device being used to measure the eccentricity of a product to be measured;
[0006] The optical measuring device comprises:
[0007] A load-bearing bracket, the load-bearing bracket is used to bear the product to be tested;
[0008] A light emitting and receiving mechanism, wherein the light emitting and receiving mechanism is arranged above the supporting bracket;
[0009] A polarizing device, wherein the polarizing device is arranged between the supporting bracket and the light emitting and receiving mechanism; the polarization direction of the polarizing device is perpendicular to the polarization direction of the linear polarizing film in the product to be tested.
[0010] Optionally, the optical measuring device further comprises a rotating table, the supporting bracket and the polarizing device are both mounted on the rotating table, and the rotating table can rotate around a first direction.
[0011] Optionally, the optical measuring device further comprises a four-position adjustment table, the four-position adjustment table is mounted on the rotating table, the supporting bracket and the polarizing device are mounted on the four-position adjustment table; the four-position adjustment table can translate along the second direction and the third direction, and the four-position adjustment table can rotate around the second direction and the third direction; the first direction, the second direction and the third direction are perpendicular to each other.
[0012] Optionally, the optical measuring device also includes a first switching mechanism, the polarization device is installed on the first switching mechanism, and the first switching mechanism is provided with a first light-through hole; the polarization device and the first light-through hole can be moved in the first switching mechanism to switch the positions of the polarization device and the first light-through hole so that the polarization device or the first light-through hole corresponds to the light emitting and receiving mechanism.
[0013] Optionally, the optical measuring device further comprises a second switching mechanism, and the second switching mechanism is connected to the light emitting and receiving mechanism;
[0014] The second switching mechanism is provided with a second light-through hole and at least one lens. The second light-through hole and any one of the lenses can be moved in the second switching mechanism to switch the positions of the second light-through hole and the lens so that the second light-through hole or any one of the lenses corresponds to the light emitting and receiving mechanism.
[0015] Optionally, the optical measuring device further comprises a moving axis, the light emitting and receiving mechanism is mounted on the moving axis, and the moving axis can drive the light emitting and receiving mechanism to perform translational movement along the first direction.
[0016] Optionally, the light emitting and receiving mechanism is an autocollimator.
[0017] According to a second aspect of the present application, an optical measurement method is provided, using the optical measurement device as described in the first aspect, the product to be measured comprises at least a first lens and a second lens, the first lens has a first surface, the second lens has a second surface, the first surface and the second surface are arranged adjacent to each other and have the same curvature; the first surface is provided with a linear polarization film;
[0018] The optical measurement method comprises:
[0019] The product to be tested is carried on the carrying bracket, and the first lens is arranged closer to the light emitting and receiving mechanism than the second lens;
[0020] Controlling the light emitting and receiving mechanism to emit outgoing light, wherein the outgoing light is reflected by the product to be tested after passing through the polarizing device and generates reflected light, and the reflected light is received by the light emitting and receiving mechanism;
[0021] A first reflected image of the first surface is acquired according to the reflected light, and a first eccentricity of the first surface is obtained according to the first reflected image.
[0022] Optionally, the optical measuring device further comprises a first switching mechanism, the polarization device is mounted on the first switching mechanism, and the first switching mechanism is provided with a first light-through hole;
[0023] The optical measurement method further comprises:
[0024] Switching the positions of the polarization device and the first light-through hole in the first switching mechanism so that the first light-through hole corresponds to the light emitting and receiving mechanism;
[0025] Controlling the light emitting and receiving mechanism to emit an outgoing light, the outgoing light is reflected by the product to be tested and generates a reflected light, and the reflected light is received by the light emitting and receiving mechanism;
[0026] Acquire a total reflection image of the first surface and the second surface according to the reflected light;
[0027] A second reflected image of the second surface is acquired according to the total reflected image and the first reflected image, and a second eccentricity of the second surface is obtained according to the second reflected image.
[0028] Optionally, acquiring a second reflected image of the second surface according to the total reflected image and the first reflected image includes:
[0029] The second reflected image is obtained by removing the first reflected image from the total reflected image.
[0030] The optical measuring device provided in the embodiment of the present application can realize eccentricity measurement of a product to be measured with a folded optical path, and the measurement result has high accuracy.
[0031] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0032] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the application and, together with the description, serve to explain the principles of the application.
[0033] Figure 1 The figure shows the ghosting phenomenon that occurs in eccentricity measurement;
[0034] Figure 2 The following is a schematic diagram of the structure of the product to be tested. Figure 1 ;
[0035] Figure 3 The following is a schematic diagram of the structure of the product to be tested. Figure 2 ;
[0036] Figure 4 Shown is a schematic structural diagram of an optical measuring device of the present application.
[0037] Description of reference numerals:
[0038] 11. Support bracket; 12. Light emitting and receiving mechanism; 13. Polarization device; 14. Rotating table; 15. Four-position adjustment table; 16. First switching mechanism; 17. Second switching mechanism; 170. Second light hole; 171. Lens; 18. Moving axis;
[0039] 01, first lens; 02, second lens; 011, first surface; 021, second surface; 012, third surface; 022, fourth surface; 03, linear polarizing film; 04, semi-transparent and semi-reflective film; 05, quarter glass; 06, reflective polarizing film. DETAILED DESCRIPTION
[0040] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangement of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present application.
[0041] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present application, its application, or uses.
[0042] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.
[0043] In all examples shown and discussed herein, any specific values should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.
[0044] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.
[0045] Reference Figure 4As shown, according to one embodiment of the present application, an optical measuring device is provided, the measuring device is used to measure the eccentricity of a product to be measured, the product to be measured comprises at least a first lens 01 and a second lens 02, the first lens 01 has a first surface 011, the second lens 02 has a second surface 021, the first surface 011 and the second surface 021 are arranged adjacent to each other and have the same curvature; the first surface 011 is provided with a linear polarization film 03;
[0046] The optical measuring device includes a supporting bracket 11, a light emitting and receiving mechanism 12 and a polarizing device 13. The supporting bracket 11 is used to support the product to be measured to ensure the stability of the product to be measured during the measurement process; the light emitting and receiving mechanism 12 is arranged above the supporting bracket 11; the polarizing device 13 is arranged between the supporting bracket 11 and the light emitting and receiving mechanism 12; the polarization direction of the polarizing device 13 is perpendicular to the polarization direction of the linear polarization film 03.
[0047] The optical measuring device provided in the embodiment of the present application can realize the eccentricity measurement of the product to be measured with a folded optical path; Figure 2 , Figure 3 The structure of a typical product to be tested with a folded optical path is shown, which includes a first lens 01 and a second lens 02, wherein the first lens 01 has a first surface 011 and a third surface 012, and the second lens 02 has a second surface 021 and a fourth surface 022; the curvature of the first surface 011 is the same as that of the second surface 021 and the two are arranged adjacent to each other; the fourth surface 022 is provided with a semi-transparent and semi-reflective film 04, the second surface 021 is provided with a quarter glass 05, and the first surface 011 is provided with a linear polarization film 03 and a reflective polarization film 06 in a stacked manner. When light is incident from above the second lens 02, the light passes through the semi-transparent and semi-reflective film 04, the fourth surface 022, the second lens 02, the second surface 021, the quarter glass 05, the reflective polarization film 06, the linear polarization film 03, the first surface 011, the first lens 01 and the third surface 012 in sequence before being emitted. Due to the presence of multiple functional films, the light will be folded once in the product to be tested. When measuring eccentricity, it is necessary to measure the reflected image of the sphere center of each surface. When measuring the first surface 011 of the first lens 01 and the second surface 021 of the second lens 02, since the two are arranged adjacently and have the same surface curvature, the sphere centers of the two surfaces will be imaged at the same time during measurement. Since there is a certain angle deviation between the two surfaces, the following will appear: Figure 1 Double cross ghosting problem shown.
[0048] When the optical measuring device provided in the embodiment of the present application is used for measurement, since the polarization direction of the polarizer 13 included in the measuring device is perpendicular to the polarization direction of the linear polarization film 03, when the light is emitted from the light emitting and receiving mechanism 12 and then received by the product to be measured after passing through the polarizer 13, the light can no longer continue to propagate after passing through the first lens 01, so the reflected light generated by the reflection of the product to be measured only includes the reflection image of the first surface 011. Therefore, when the optical measuring device provided in the embodiment of the present application is used for measurement, at least when the eccentricity measurement is performed on the first surface 011 of the first lens 01, the influence of the second surface 021 of the second lens 02 which is arranged adjacent to it and has the same curvature as the first surface 011 can be eliminated, thereby improving the accuracy of the measurement result and the measurement precision.
[0049] During measurement, it should be noted that when the product to be measured is placed on the supporting bracket 11 , the first lens 01 should be placed closer to the light emitting and receiving mechanism 12 than the second lens 02 .
[0050] Reference Figure 4 As shown, in one embodiment, the optical measuring device further includes a rotating platform 14, the supporting bracket 11 and the polarizing device 13 are both mounted on the rotating platform 14, and the rotating platform 14 can rotate around a first direction.
[0051] In this specific example, the rotating table 14 drives the product to be tested and the polarizing device 13 to rotate synchronously around the first direction, thereby ensuring that the linear polarizer 13 is always perpendicular to the vibration direction of the linear polarizing film 03 at any time, further improving the measurement precision and accuracy.
[0052] Reference Figure 4 As shown, in one embodiment, the optical measuring device further includes a four-position adjustment platform 15, the four-position adjustment platform 15 is mounted on the rotating platform 14, the supporting bracket 11 and the polarizing device 13 are mounted on the four-position adjustment platform 15; the four-position adjustment platform 15 can translate along the second direction and the third direction, and the four-position adjustment platform 15 can rotate around the second direction and the third direction; the first direction, the second direction and the third direction are perpendicular to each other.
[0053] In this specific example, through the action of the four-position adjustment table 15, the translation position of the product to be tested and the polarization device 13 can be adjusted along the second direction and the third direction as well as the rotation position, so as to adjust the optical axis of the product to be tested and the optical axis of the light emitting and receiving mechanism 12 to be consistent, thereby improving the measurement precision and accuracy.
[0054] Reference Figure 4 As shown, the first direction is Figure 4 The a direction in the second direction is Figure 4 The b direction in the figure is Figure 4 The c direction in .
[0055] Reference Figure 4 As shown, in one embodiment, the optical measuring device also includes a first switching mechanism 16, the polarizer 13 is installed on the first switching mechanism 16, and the first switching mechanism 16 is provided with a first light-through hole; the polarizer 13 and the first light-through hole can be moved in the first switching mechanism 16 to switch the positions of the polarizer 13 and the first light-through hole, so that the polarizer 13 or the first light-through hole corresponds to the light emitting and receiving mechanism 12.
[0056] In this specific example, the positions of the polarizer 13 and the first light hole can be switched by the first switching mechanism 16, so that the polarizer 13 or the first light hole is located in the measurement system; when the first light hole is located in the measurement system, the eccentricity measurement of the second surface 021 of the second lens 02 can be performed.
[0057] Reference Figure 4 As shown, in one embodiment, the optical measuring device further includes a second switching mechanism 17, and the second switching mechanism 17 is connected to the light emitting and receiving mechanism 12;
[0058] The second switching mechanism 17 is provided with a second light-through hole 170 and at least one lens 171. The second light-through hole 170 and any one of the lenses 171 can be moved in the second switching mechanism 17 to switch the positions of the second light-through hole 170 and the lens 171 so that the second light-through hole 170 or any one of the lenses 171 corresponds to the light emitting and receiving mechanism 12.
[0059] In this specific example, the positions of the second light hole 170 and the lens 171 can be switched by the second switching mechanism 17, so that the second light hole 170 or any lens 171 is located in the measurement system to adapt to products to be measured with different parameters.
[0060] Reference Figure 4 As shown, in one embodiment, the optical measuring device further includes a motion axis 18, and the light emitting and receiving mechanism 12 is installed on the motion axis 18, and the motion axis 18 can drive the light emitting and receiving mechanism 12 to translate along a first direction.
[0061] In this specific example, according to measurement requirements, the light emitting and receiving mechanism 12 can be translated along the first direction through the motion axis 18; for example, when measuring the first surface 011 of the first lens 01, the light emitting and receiving mechanism 12 is located at one position on the motion axis 18; when measuring the second surface 021 of the second lens 02, the light emitting and receiving mechanism 12 is located at another position on the motion axis 18.
[0062] Reference Figure 4 As shown, in one embodiment, the light emitting and receiving mechanism 12 is an autocollimator.
[0063] In this specific example, the light emitting and receiving mechanism 12 is not only responsible for emitting the outgoing light, but also responsible for receiving the reflected light; the light emitting and receiving mechanism 12 may be, for example, an autocollimator, which has high-precision light emitting and receiving capabilities.
[0064] In addition, the polarization device 13 may be, for example, a linear polarizer, or a micro-nano optical device or a diffractive optical device.
[0065] According to another embodiment of the present application, an optical measurement method is provided, which uses the optical measurement device as described above, and is characterized in that the optical measurement method includes:
[0066] S101, carrying the product to be tested on the carrying bracket 11, and placing the first lens 01 closer to the light emitting and receiving mechanism 12 than the second lens 02;
[0067] S102, controlling the light emitting and receiving mechanism 12 to emit an outgoing light, wherein the outgoing light is reflected by the product to be tested after passing through the polarizing device 13 and generates a reflected light, and the reflected light is received by the light emitting and receiving mechanism 12;
[0068] S103 . Acquire a first reflected image of the first surface 011 according to the reflected light, and obtain a first eccentricity of the first surface 011 according to the first reflected image.
[0069] In the optical measurement method provided in the embodiment of the present application, in step S101, the product to be measured is placed on the supporting bracket 11 with the first lens 01 being closer to the light emitting and receiving mechanism 12;
[0070] In step S102 and step S103, the light source of the light emitting and receiving mechanism 12 is turned on to emit outgoing light, and the outgoing light first passes through the polarizer 13 and then is received by the product to be tested; since the polarization direction of the polarizer 13 is perpendicular to the polarization direction of the linear polarization film 03 set on the first surface 011 of the first lens 01 in the product to be tested, the outgoing light cannot continue to propagate after passing through the first lens 01, so the reflected light generated by the reflection of the product to be tested only includes the first reflected image of the first surface 011, and the first eccentricity of the first surface 011 can be obtained according to the first reflected image. Therefore, when the optical measurement method provided in the embodiment of the present application is used for measurement, at least when the eccentricity of the first surface 011 of the first lens 01 is measured, the influence of the second surface 021 of the second lens 02 which is adjacent to it and has the same curvature can be eliminated, thereby improving the accuracy of the measurement result and the measurement precision.
[0071] The light emitting and receiving mechanism 12 is not only responsible for emitting the outgoing light, but also responsible for receiving the reflected light. The light emitting and receiving mechanism 12 can be, for example, an autocollimator.
[0072] Reference Figure 4 As shown, in one embodiment, the optical measuring device further includes a first switching mechanism 16, the polarizing device 13 is installed on the first switching mechanism 16, and the first switching mechanism 16 is provided with a first light-transmitting hole;
[0073] The optical measurement method further comprises:
[0074] Switching the positions of the polarizing element 13 and the first light-through hole in the first switching mechanism 16 so that the first light-through hole corresponds to the light emitting and receiving mechanism 12;
[0075] Control the light emitting and receiving mechanism 12 to emit an outgoing light, the outgoing light is reflected by the product to be tested and generates a reflected light, and the reflected light is received by the light emitting and receiving mechanism 12;
[0076] Acquire a total reflection image of the first surface 011 and the second surface 021 according to the reflected light;
[0077] A second reflection image of the second surface 021 is acquired according to the total reflection image and the first reflection image, and a second eccentricity of the second surface 021 is obtained according to the second reflection image.
[0078] In this specific example, the measurement purpose is to measure the eccentricity of the second surface 021 of the second lens 02, so that the outgoing light must not only pass through the first lens 01 but also enter the second lens 02; therefore, by adjusting the first switching mechanism 16, the first light hole and the polarizer 13 are exchanged, and the first light hole is made to correspond to the light emitting and receiving mechanism 12, so that the outgoing light emitted by the light emitting and receiving mechanism 12 will not pass through the polarizer 13, but directly enter the product to be tested through the first light hole, and the outgoing light is not only reflected by the first surface 011, but also reflected by the second surface 021, so the reflected light obtained is the total reflection image of the first surface 011 and the second surface 021; combined with the first reflection image of the first surface 011 alone, the second reflection image of the second surface 021 alone can be obtained, and the second eccentricity of the second surface 021 can be obtained according to the second reflection image.
[0079] Further, acquiring a second reflected image of the second surface 021 according to the total reflected image and the first reflected image includes:
[0080] The second reflected image is obtained by removing the first reflected image from the total reflected image.
[0081] In this specific example, the second reflected image is acquired by image processing; for example, the first reflected image is subjected to region recognition so as to obtain the position of the first reflected image; the first reflected image is determined in the total reflected image according to the position of the first reflected image, and then the grayscale of the first reflected image is removed from the total reflected image so as to obtain a separate second reflected image.
[0082] Although some specific embodiments of the present application have been described in detail by way of example, it should be understood by those skilled in the art that the above examples are only for illustration, not for limiting the scope of the present application. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present application. The scope of the present application is defined by the appended claims.
Claims
1. An optical measuring device, characterized in that: The optical measuring device is used to measure the eccentricity of the product to be measured; the optical measuring device comprises: A load-bearing bracket (11), the load-bearing bracket (11) being used to bear the product to be tested; A light emitting and receiving mechanism (12), wherein the light emitting and receiving mechanism (12) is arranged above the supporting bracket (11); A polarizing device (13), wherein the polarizing device (13) is arranged between the supporting bracket (11) and the light emitting and receiving mechanism (12); the polarization direction of the polarizing device (13) is perpendicular to the polarization direction of the linear polarizing film in the product to be tested.
2. The optical measuring device according to claim 1, characterized in that The optical measuring device further comprises a rotating platform (14), the bearing bracket (11) and the polarizing device (13) are both mounted on the rotating platform (14), and the rotating platform (14) is capable of rotating around a first direction.
3. The optical measuring device according to claim 2, characterized in that The optical measuring device further comprises a four-position adjustment platform (15), the four-position adjustment platform (15) being mounted on the rotating platform (14), the supporting bracket (11) and the polarizing device (13) being mounted on the four-position adjustment platform (15); the four-position adjustment platform (15) is capable of translational movement along a second direction and a third direction, and the four-position adjustment platform (15) is capable of rotation around the second direction and the third direction; the first direction, the second direction and the third direction are perpendicular to each other.
4. The optical measuring device according to claim 1 or 3, characterized in that: The optical measuring device further comprises a first switching mechanism (16), the polarizing element (13) is mounted on the first switching mechanism (16), and the first switching mechanism (16) is provided with a first light-through hole; the polarizing element (13) and the first light-through hole can be moved in the first switching mechanism (16) to switch the positions of the polarizing element (13) and the first light-through hole, so that the polarizing element (13) or the first light-through hole corresponds to the light emitting and receiving mechanism (12).
5. The optical measuring device according to claim 1, characterized in that The optical measuring device further comprises a second switching mechanism (17), wherein the second switching mechanism (17) is connected to the light emitting and receiving mechanism (12); The second switching mechanism (17) is provided with a second light-through hole (170) and at least one lens (171); the second light-through hole (170) and any one of the lenses (171) are capable of moving in the second switching mechanism (17) to switch the positions of the second light-through hole (170) and the lens (171) so that the second light-through hole (170) or any one of the lenses (171) corresponds to the light emitting and receiving mechanism (12).
6. The optical measuring device according to claim 1 or 5, characterized in that: The optical measuring device also includes a moving shaft (18), the light emitting and receiving mechanism (12) is mounted on the moving shaft (18), and the moving shaft (18) can drive the light emitting and receiving mechanism (12) to move in a translational manner along a first direction.
7. The optical measuring device according to claim 1, characterized in that The light emitting and receiving mechanism (12) is an autocollimator.
8. An optical measurement method, characterized in that: An optical measuring device as claimed in any one of claims 1 to 7 is used, wherein the product to be measured comprises at least a first lens (01) and a second lens (02), the first lens (01) has a first surface (011), the second lens (02) has a second surface (021), the first surface (011) and the second surface (021) are arranged adjacent to each other and have the same curvature; and the first surface (011) is provided with a linear polarization film (03); The optical measurement method comprises: The product to be tested is carried on the carrying bracket (11), and the first lens (01) is arranged closer to the light emitting and receiving mechanism (12) than the second lens (02); Controlling the light emitting and receiving mechanism (12) to emit outgoing light, wherein the outgoing light passes through the polarizing device (13) and is then reflected by the product to be tested to generate reflected light, and the reflected light is received by the light emitting and receiving mechanism (12); A first reflected image of the first surface (011) is acquired according to the reflected light, and a first eccentricity of the first surface (011) is obtained according to the first reflected image.
9. The optical measurement method according to claim 8, characterized in that: The optical measuring device further comprises a first switching mechanism (16), the polarization device (13) is mounted on the first switching mechanism (16), and the first switching mechanism (16) is provided with a first light-through hole; The optical measurement method further comprises: Switching the positions of the polarization device (13) and the first light-through hole in the first switching mechanism (16) so that the first light-through hole corresponds to the light emitting and receiving mechanism (12); Controlling the light emitting and receiving mechanism (12) to emit an outgoing light, the outgoing light being reflected by the product to be tested and generating a reflected light, and the reflected light being received by the light emitting and receiving mechanism (12); Acquire a total reflection image of the first surface (011) and the second surface (021) according to the reflected light; A second reflection image of the second surface (021) is acquired based on the total reflection image and the first reflection image, and a second eccentricity of the second surface (021) is obtained based on the second reflection image.
10. The optical measurement method according to claim 9, characterized in that: The step of acquiring a second reflected image of the second surface (021) according to the total reflected image and the first reflected image comprises: The second reflected image is obtained by removing the first reflected image from the total reflected image.
Citation Information
Patent Citations
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CN117491317A
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