Drawing apparatus

Abstract

The present invention provides a drawing apparatus that draws a pattern on a substrate by irradiation of light, the drawing apparatus comprising: a holding unit that holds the substrate; a light irradiation unit that draws a pattern on the substrate; a cover (6) covering the holding part and the light irradiation part; and an air supply unit for supplying the first air, the temperature of which is adjusted, into the cover (6). The air supply unit is provided with: a temperature adjustment unit (71a) that introduces air to the outside of the cover (6) and generates second air having an adjusted temperature; an air suction part (72) for introducing air from the outside of the cover (6); and a duct (734) that functions as a mixing unit that mixes the second air introduced from the temperature adjustment unit (71a) and the third air introduced from the air suction unit (72) to generate the first air.

Description

[0001] [Reference to related applications]

[0002] This application claims the benefit of priority of Japanese patent application JP2023-157474 filed on September 22, 2023, and incorporates the entire disclosed contents of that application into this application. Technical Field

[0003] The present invention relates to a drawing device for drawing a pattern on a substrate by irradiating light. Background Art

[0004] Conventionally, when drawing a pattern on a printed circuit board, a semiconductor substrate, etc. (hereinafter referred to as a "substrate"), a drawing device is used that draws a pattern on a photosensitive material formed on the substrate by irradiating light. In such a drawing device, in order to keep the gas environment around the substrate constant, the main parts such as a holding part that holds the substrate and a light irradiation part that irradiates light to the substrate are housed in a cover.

[0005] For example, in the direct drawing type drawing device, i.e., exposure device, disclosed in Japanese Patent Application Laid-Open No. 2006-235378 (Document 1), a chamber covering an exposure unit and a camera unit is provided, and the chamber is connected to an air conditioning device through a pipe. An indoor thermometer is arranged in the chamber, and an outdoor thermometer is arranged outside the chamber. The air conditioning device is controlled so as to maintain the temperature in the chamber at a temperature lower than the central value of the setting environment temperature of the exposure device by a predetermined offset value.

[0006] However, generally, the difference between the temperature of the clean room where the drawing device is installed and the temperature obtained in the drawing device is not large. On the other hand, in order to keep the temperature inside the drawing device constant, a large amount of air with a controlled temperature is required, and a large and expensive temperature control device is required to generate a large amount of air. Summary of the invention

[0007] An object of the present invention is to adjust the temperature in a cover with an inexpensive structure, thereby reducing the manufacturing cost of a drawing device.

[0008] Mode 1 of the present invention is a drawing device that draws a pattern on a substrate by irradiation of light, wherein the device comprises: a holding portion that holds the substrate; a light irradiation portion that draws a pattern on the substrate by emitting light to the substrate held by the holding portion; a cover that covers the holding portion and the light irradiation portion; and an air supply portion that supplies first air with adjusted temperature into the cover; the air supply portion comprises: a temperature control portion that draws air from the outside of the cover and generates second air with adjusted temperature; an air intake portion that draws air from the outside of the cover; and a mixing portion that mixes the second air introduced from the temperature control portion and the third air introduced from the air intake portion to generate the first air.

[0009] According to the first aspect of the present invention, the temperature inside the cover can be adjusted with an inexpensive structure, and the manufacturing cost of the drawing device can be reduced.

[0010] According to a second aspect of the present invention, in the drawing device of the first aspect, the air supply unit further includes: a thermometer for acquiring a temperature of the first air; and a temperature control unit for controlling a temperature of the second air based on the temperature of the first air acquired by the thermometer.

[0011] According to mode 3 of the present invention, in the drawing device of mode 1 (or mode 1 or 2), the air supply unit further includes a flow control unit, which controls the flow rate of at least one of the second air and the third air according to the target flow rate of the first air.

[0012] According to a fourth aspect of the present invention, in the drawing device according to the third aspect, the cover has a door that is opened when the substrate held by the holding portion is replaced, and the flow rate control portion increases the flow rate of the first air while the door is open.

[0013] According to mode 5 of the present invention, in the drawing device of mode 1 (or any one of modes 1 to 4), the drawing device further comprises another temperature regulating unit of the same model as the temperature regulating unit, and the other temperature regulating unit supplies fourth air with adjusted temperature into the light irradiation unit.

[0014] According to mode 6 of the present invention, in the drawing device of any one of modes 1 to 5, the drawing device further comprises a moving mechanism, wherein the moving mechanism moves the holding portion relative to the light irradiation portion by moving at least one of the holding portion and the light irradiation portion in a direction parallel to the substrate held by the holding portion, the light irradiation portion comprises a drawing head, and the drawing head emits modulated light toward the substrate held by the holding portion, and while the drawing head emits the modulated light, the moving mechanism moves the substrate held by the holding portion relative to the light irradiation portion, thereby drawing a pattern on the substrate.

[0015] The above-mentioned objects and other objects, features, aspects and advantages will become more apparent from the following detailed description of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a perspective view showing a drawing device.

[0017] Figure 2 It is a figure which shows the structure which supplies air into a hood.

[0018] Figure 3 It is a block diagram showing a structure for adjusting the temperature of the first air.

[0019] Figure 4 This is a diagram showing another example of a pipeline.

[0020] Description of reference numerals:

[0021] 1 Drawing device

[0022] 4 Light irradiation part

[0023] 6 Hood

[0024] 7 Air supply unit

[0025] 9 substrate

[0026] 22 Stage moving mechanism (moving mechanism)

[0027] 25. Maintaining part

[0028] 41 Drawing Head

[0029] 63 doors

[0030] 71a, 71b Temperature control unit

[0031] 72 Inhalation

[0032] 733a Mixing Section

[0033] 734 Pipeline (mixing section)

[0034] 741 First Thermometer

[0035] 751 Temperature Control Department

[0036] 752 Flow Control Department DETAILED DESCRIPTION

[0037] Figure 1 1 is a perspective view showing a drawing device 1 according to an embodiment of the present invention. The drawing device 1 irradiates a photosensitive material forming the upper surface of a substrate 9 with a substantially light beam after spatial modulation. Then, the pattern is drawn by scanning the irradiation area of ​​the light on the substrate 9. The drawing device 1 is a so-called direct drawing device. Figure 1 In FIG. 1 , arrows are used to indicate three mutually orthogonal directions as the X direction, the Y direction, and the Z direction. Figure 1 In the example, the X direction and the Y direction are horizontal directions perpendicular to each other, and the Z direction is a vertical direction (ie, an up-and-down direction).

[0038] The substrate 9 is, for example, a substrate for manufacturing a printed circuit board in a substantially rectangular flat plate shape. On the main surface (hereinafter, also referred to as "upper surface 91") on the (+Z) side of the substrate 9, a resist film formed of a photosensitive material is provided on the copper layer. In the drawing device 1, a circuit pattern is drawn on the resist film of the substrate 9 (that is, an image of the circuit pattern is formed). In addition, the type and shape of the substrate 9 can be changed in various ways.

[0039] The drawing device 1 includes a stage 21, a stage moving mechanism 22, an alignment unit 3, a light irradiation unit 4, a base 5, a cover 6, and an air supply unit 7. Figure 1 In the figure, the outer shape of the cover 6 and ducts 73 and 74 described later are indicated by two-dot chain lines, and each structure accommodated in the cover 6 is indicated by solid lines.

[0040] The cover 6 is a frame that accommodates the stage 21, the stage moving mechanism 22, the alignment unit 3, the light irradiation unit 4, the base 5, etc. in an internal space 60. The internal space 60 of the cover 6 is isolated from the external space of the cover 6. Figure 1 In the example shown, the cover 6 is a substantially rectangular parallelepiped whose length in the Y direction is greater than that in the X direction. In addition, a step is provided on the upper surface (i.e., the surface on the (+Z) side) of the cover 6, and the portion on the (+Y) side of the upper surface is closer to the (+Z) side than the portion on the (-Y) side.

[0041] The stage 21 is a roughly rectangular flat plate-shaped member arranged on the lower side (i.e., (-Z) side) than the alignment section 3 and the light irradiation section 4. The stage 21 has a holding section 25 for holding the substrate 9 in a horizontal state. The holding section 25 is, for example, a vacuum chuck that adsorbs the lower surface of the substrate 9 and holds it. The holding section 25 may be a structure other than a vacuum chuck, for example, a mechanical chuck. The upper surface 91 of the substrate 9 placed on the holding section 25 is perpendicular to the Z direction and parallel to the X direction and the Y direction.

[0042] The stage moving mechanism 22 is a moving mechanism that moves the stage 21 relative to the alignment section 3 and the light irradiation section 4 in a horizontal direction (i.e., a direction roughly parallel to the upper surface 91 of the substrate 9). The stage moving mechanism 22 has a first moving mechanism 23 and a second moving mechanism 24. The second moving mechanism 24 supports the stage 21 from the lower side, and moves the stage 21 linearly in the X direction along the guide rail. The first moving mechanism 23 supports the second moving mechanism 24 from the lower side, and moves the stage 21 linearly in the Y direction along the guide rail together with the second moving mechanism 24. The driving source of the first moving mechanism 23 and the second moving mechanism 24 is, for example, a linear servo motor, or a driving source of a motor mounted on a ball screw. The structures of the first moving mechanism 23 and the second moving mechanism 24 can be modified in various ways.

[0043] In the drawing device 1, a stage rotating mechanism that rotates the stage 21 around a rotation axis extending in the Z direction may be provided. In addition, a stage lifting mechanism that moves the stage 21 in the Z direction may be provided in the drawing device 1. As the stage rotating mechanism, for example, a servo motor may be used. As the stage lifting mechanism, for example, a linear servo motor may be used. The structures of the stage rotating mechanism and the stage lifting mechanism may also be modified in various ways.

[0044] The stage moving mechanism 22 is mounted on the upper surface of the base 5 and is supported from below by the base 5. The base 5 is, for example, in a substantially rectangular parallelepiped shape in which the length in the Y direction is greater than the length in the X direction. Figure 1 The illustrated base 5 includes an upper plate portion 51, a base portion 52, and a plurality of legs 53. The upper plate portion 51 is a substantially flat plate-shaped member extending substantially perpendicularly to the Z direction. The shape of the upper plate portion 51 when viewed from above (i.e., the shape viewed from the (+Z) side) is, for example, a substantially rectangular shape in which the length in the Y direction is greater than the length in the X direction. The upper surface of the upper plate portion 51 (i.e., the upper surface of the base 5) is a substantially flat surface perpendicular to the Z direction.

[0045] The base portion 52 is connected to the lower surface of the upper plate portion 51 and supports the upper plate portion 51 from the bottom. The base portion 52 is, for example, a roughly rectangular parallelepiped member whose length in the Y direction is greater than the length in the X direction. The plurality of legs 53 are roughly columnar members that are separated from each other and connected to the lower surface of the base portion 52. The plurality of legs 53 extend downward from the lower surface of the base portion 52, contact the floor of the clean room, and support the base portion 52 and the upper plate portion 51 of the base 5 and the various structures arranged on the base 5 from the bottom.

[0046] The alignment part 3 has a plurality of (in Figure 1 In the example shown, there are two) alignment cameras 31. Each alignment camera 31 is supported above the stage 21 and the stage moving mechanism 22 by a support portion 40 provided across the stage 21 and the stage moving mechanism 22. The support portion 40 is a door-shaped member (so-called gantry) that spans the stage 21 and the stage moving mechanism 22, and is provided to stand upright from the upper surface of the base 5.

[0047] The two alignment cameras 31 are mounted on the side surface of the (+Y) side of the support portion 40. For example, one of the two alignment cameras 31 is fixed to the support portion 40, and the other alignment camera 31 can be moved in the X direction on the support portion 40. Thus, the distance in the X direction between the two alignment cameras 31 can be changed. In addition, the number of alignment cameras 31 of the alignment portion 3 may be one, or may be three or more.

[0048] Each alignment camera 31 captures an alignment mark (not shown) pre-set on the upper surface 91 of the substrate 9. In the drawing device 1, the substrate 9 is aligned (i.e., the relative position of the substrate 9 with respect to the drawing head 41 is corrected) based on the image of the alignment mark acquired by the alignment camera 31.

[0049] The drawing unit 4 has a plurality of ( Figure 1 The example shown includes six drawing heads 41 and a housing 42 for accommodating the drawing heads 41. The plurality of drawing heads 41 have substantially the same structure. Each drawing head 41 has a spatial light modulator, and modulated (i.e., spatially modulated) light is irradiated downward from an opening of the housing 42. Spatial modulation can be two-dimensional modulation or one-dimensional modulation. Each drawing head 41 is supported by the support portion 40 above the stage 21 and the stage moving mechanism 22. The six drawing heads 41 are mounted on the side surface of the support portion 40 on the (-Y) side.

[0050] The six drawing heads 41 are arranged in a substantially straight line substantially parallel to the X direction. The positions of the six drawing heads 41 in the Y direction and the Z direction are substantially the same. In addition, the plurality of drawing heads 41 are not necessarily arranged in a straight line, and may be arranged in a staggered manner, for example. In addition, in the light irradiation unit 4, the number of the drawing heads 41 may be one or more than two.

[0051] In the drawing device 1, the pattern drawing on the substrate 9 is performed in a so-called multi-path method. Specifically, modulated light is irradiated from the plurality of drawing heads 41 of the light irradiation unit 4 to the upper surface 91 of the substrate 9, and the substrate 9 is moved in the Y direction by the first moving mechanism 23 of the stage moving mechanism 22 to pass under the drawing heads 41. As a result, the irradiation area of ​​the light from the plurality of drawing heads 41 is scanned in the Y direction on the substrate 9, and the drawing of the substrate 9 is performed. In this way, while each drawing head 41 emits modulated light to the substrate 9 held by the holding unit 25, the substrate 9 moves relative to the light irradiation unit 4, so that a pattern is drawn on the substrate 9.

[0052] Next, the substrate 9 is moved in steps along the X direction by a predetermined distance by the second moving mechanism 24. Then, the substrate 9 is moved in the Y direction by the first moving mechanism 23 again, and the substrate 9 is irradiated with light from the drawing head 41 in parallel with the movement, so that the substrate 9 is drawn. In the drawing device 1, the pattern is drawn on the substrate 9 by alternately irradiating the substrate 9 moving in the Y direction with light and stepping the substrate 9 in the X direction. In the following description, the Y direction is referred to as the "main scanning direction" or simply the "scanning direction", and the X direction is referred to as the "sub-scanning direction". The main scanning direction and the sub-scanning direction are directions substantially parallel to the upper surface 91 of the substrate 9. In the stage moving mechanism 22, the first moving mechanism 23 is a main scanning mechanism that moves the stage 21 relative to the drawing head 41 in the main scanning direction. The second moving mechanism 24 is a sub-scanning mechanism that moves the stage 21 relative to the drawing head 41 in the sub-scanning direction.

[0053] In addition, in the drawing device 1, the substrate 9 may be drawn using a single path method (also referred to as a single stroke method) in which the drawing of the pattern on the substrate 9 is completed by moving the substrate 9 only once relative to the drawing head 41 in the Y direction. In this case, when drawing the pattern, the sub-scanning (i.e., the stepping movement in the X direction) of the substrate 9 by the second moving mechanism 24 is not performed. That is, the stage moving mechanism 22 is a scanning mechanism that moves the stage 21 at least in the scanning direction relative to the drawing head 41.

[0054] In the drawing device 1, a door 63 for carrying in and out the substrate 9 is provided at the end of the (-Y) side of the cover 6 (i.e., the end of one side in the scanning direction). The door 63 is used when the substrate 9 is carried into the internal space 60 of the cover 6 and when the substrate 9 is carried out from the internal space 60. Specifically, when the stage 21 moves to the (-Y) side of the alignment part 3 and the light irradiation part 4 and is located near the end of the (-Y) side of the internal space 60, the door 63 is opened, the substrate 9 is taken out from the holding part 25 of the stage 21 through the door 63, and the substrate 9 is placed on the holding part 25. The taking out and putting in of the substrate 9 can be performed by an operator or automatically by a conveying device. The door 63 is provided on the upper surface of the cover 6 and the side surface of the (-X) side. The configuration and shape of the door 63 can be changed in various ways. In the following description, unless otherwise specified, the door 63 is in a closed state.

[0055] An air supply port 64 is provided at the end portion on the (+Y) side of the cover 6 (that is, the end portion on the other side in the scanning direction). Figure 1In the example shown, the air supply port 64 is provided on the (+Y) side of the cover 6. The air supply port 64 is arranged on the (+Y) side of the cover 6 above the upper plate 51. The number of the air supply ports 64 may be two or more.

[0056] The air supply unit 7 has two temperature regulating units 71a and 71b, an air intake unit 72, and two ducts 73 and 74. The air supply port 64 is connected to the temperature regulating unit 71a and the air intake unit 72 via the duct 73. The temperature regulating unit 71a draws in air from the outside of the cover 6, generates air with a regulated temperature, and introduces the air into the duct 73. "Introducing air from the outside of the cover 6" means introducing air from the clean room where the drawing device 1 is installed. The air intake unit 72 also draws in air from the outside of the cover 6, and introduces the air into the duct 73. The air sent out from the temperature regulating unit 71a and the air sent out from the air intake unit 72 are mixed in the duct 73 and guided to the air supply port 64.

[0057] As the temperature control unit 71a, a known temperature control device such as a heat pump type or a Peltier type can be used (the same applies to the temperature control unit 71b). The air supplied from the air supply port 64 to the internal space 60 of the cover 6 flows in the (-Y) direction. The air mainly passes above the substrate 9 held by the stage 21 and is discharged from the opening omitted in the figure on the (-Y) side of the cover 6, and is recovered as needed. The air supply port 64 can also be provided on the side of the end of the (-Y) side of the cover 6, and can also be provided on the upper surface of the cover 6.

[0058] The temperature control unit 71b is connected to the housing 42 of the light irradiation unit 4 via a duct 74. Specifically, the duct 74 is branched and connected to the ends on the (+X) side and the (-X) side of the housing 42. The temperature control unit 71b supplies temperature-controlled air into the light irradiation unit 4. Thus, the temperature of the optical components in each drawing head 41 can be kept constant.

[0059] Figure 2 7 is a diagram showing a structure for supplying air to the hood 6 in the air supply unit 7. As described above, the temperature of the air in the clean room is adjusted while being supplied to the hood 6 by using the temperature control unit 71a, the air intake unit 72 and the duct 73. The duct 73 includes: a duct 731 connected to the temperature control unit 71a; a duct 732 connected to the air intake unit 72; a connecting portion 733 connecting the duct 731 and the duct 732; and a duct 734 connecting the connecting portion 733 and the hood 6. The temperature control unit 71a includes, for example, a heat pump using a refrigerant and a fan. The temperature control unit 71a adjusts the temperature of the air in the clean room introduced by the fan by using the heat pump and guides it to the duct 731. The temperature control unit 71a sometimes lowers the temperature of the air to be inhaled, and sometimes raises the temperature of the air to be inhaled. The air intake unit 72 includes a fan, and guides the air in the clean room introduced by the fan directly to the duct 732.

[0060] The air introduced from the temperature regulating section 71a and the air introduced from the air intake section 72 merge at the connection section 733, and these air are mixed in the duct 734 and guided into the hood 6. That is, the duct 734 functions as a mixing section for mixing the air introduced from the temperature regulating section 71a and the air introduced from the air intake section 72. Hereinafter, the air supplied from the duct 734 into the hood 6 is referred to as "first air", the air introduced from the temperature regulating section 71a into the duct 731 is referred to as "second air", and the air introduced from the air intake section 72 into the duct 732 is referred to as "third air".

[0061] The temperature regulating part 71a and the air intake part 72 have filters for removing particles, thereby delivering clean second air and clean third air. In this way, clean first air is obtained. The filter can also be set at a position downstream of the connection part 733. The filter can be set at any position that can make the first air clean. The filter can be set between the air intake port of the temperature regulating part 71a and the connection part 733, between the air intake port of the air intake part 72 and the connection part 733, and between the connection part 733 and the position near the air supply port 64 in the cover 6.

[0062] A first thermometer 741 is provided at a position of the duct 734 near the cover 6, and the first thermometer 741 obtains the temperature of the first air flowing in the duct 734. The first thermometer 741 may also be provided near the air supply port 64. A second thermometer 742 is provided on the duct 732, and the second thermometer 742 obtains the temperature of the third air flowing in the duct 732. The second thermometer 742 may also be provided on the air intake side of the air intake unit 72.

[0063] As described above, in the drawing device 1, the first air mixed with the second air sent from the temperature regulating section 71a and the third air sent from the air intake section 72 is supplied to the hood 6. Usually, there is no big difference between the temperature in the clean room and the temperature in the hood 6. On the other hand, in order to adjust the temperature in the hood 6 and suppress the entry of particles into the hood 6, it is necessary to supply air to the hood 6 at a certain flow rate (i.e., the amount of air flowing per unit time). However, if a commercially available temperature regulating device that can ensure a sufficient flow rate is used as the temperature regulating section 71a, the temperature regulating capacity will be excessive. In particular, a large temperature regulating device is required to obtain a sufficient amount of clean air after passing through a filter for removing particles.

[0064] In the drawing device 1, an inexpensive temperature control device that cannot ensure a sufficient flow rate when used alone is used as the temperature control section 71a. In addition, by mixing the second air sent from the temperature control section 71a with the third air sent from the air intake section 72 (typically an air intake fan with a simple structure) that does not have a temperature control function, the temperature inside the cover 6 can be adjusted with an inexpensive structure. As a result, the manufacturing cost of the drawing device 1 can be reduced.

[0065] In the drawing device 1, another temperature regulating unit 71b is further provided for cooling the light irradiation unit 4. The temperature regulating unit 71b supplies the fourth air whose temperature is adjusted into the light irradiation unit 4. The temperature regulating unit 71a and the temperature regulating unit 71b are of the same model. The so-called "same model" means that they can be ordered without distinction when purchased (except for minor selections that do not affect performance), which can reduce the purchase price. The temperature regulating unit 71a and the temperature regulating unit 71b are of the same model, so that the manufacturing cost of the drawing device 1 can be further reduced.

[0066] Figure 3 71a and the air intake unit 72. Figure 3 The structural members used to control them are shown. Figure 3 All structural components for reference in the multiple action examples described below are recorded in the table, and structural components not referred to in each action example and electrical connections between structural components can be omitted as appropriate. Figure 3 The structural components shown are all included in the air supply unit 7 .

[0067] The functions of the temperature control unit 751 and the flow control unit 752 are realized by a dedicated circuit having a computing circuit or a general computing unit (i.e., a computer), or a combination of a dedicated circuit and a computer. The signal output from the temperature control unit 751 is input to the temperature adjustment unit 71a, and the temperature of the second air sent from the temperature adjustment unit 71a is controlled.

[0068] The signal output from the flow control unit 752 is input to the temperature control unit 71a and / or the air intake unit 72, and the flow rate of the second air and / or the third air is controlled. The signal indicating the temperature of the first air obtained by the first thermometer 741 is input to the temperature control unit 751. The signal indicating the temperature of the first air can also be input to the flow control unit 752. The signal indicating the temperature of the third air obtained by the second thermometer 742 is input to the temperature control unit 751 as needed. The signal indicating the temperature of the third air can also be input to the flow control unit 752. The third thermometer 743 is set in the cover 6 to obtain the temperature of the air near the retaining portion 25 of the cover 6. The signal indicating the temperature obtained by the third thermometer 743 is input to the temperature control unit 751. The signal output from the third thermometer 743 can also be input to the flow control unit 752.

[0069] When the substrate 9 held by the holding portion 25 is replaced, the door sensor 76 outputs a signal indicating that the door 63 of the cover 6 is open, and the signal is input to the flow control portion 752. When the door 63 is automatically opened and closed, the signal from the door sensor 76 can be replaced and a control signal indicating that the door 63 is open can be input to the flow control portion 752. The temperature control portion 751 is connected to the flow control portion 752 to adjust the temperature of the second air and the flow rate of the first air. Figure 3 Although the temperature control unit 751 and the flow control unit 752 are shown separately from a functional perspective, the two can be highly linked to each other and do not need to be clearly distinguished as circuits (or programs).

[0070] Next, a first operation example of supplying the first air into the hood 6 of the drawing device 1 is described. In the first operation example, the target temperature and target flow rate (i.e., target air volume) of the first air are set in advance. In addition, the temperature of the second air sent from the temperature adjustment unit 71a can be adjusted, but the flow rate is constant. The flow rate of the third air sent from the air intake unit 72 is fixed to the amount obtained by subtracting the flow rate of the second air from the target flow rate of the first air.

[0071] Under the above conditions, in the first operation example, based on the temperature of the third air obtained by the second thermometer 742, that is, the temperature of the air in the clean room, and the temperature of the first air obtained by the first thermometer 741, the temperature control unit 751 adjusts the temperature of the second air to reduce the difference between the temperature of the first air and the target temperature. In addition, various known controls can be used as feedback control. In the above control, the temperature in the clean room is used, so even if the temperature of the air near the air intake unit 72 changes greatly, the temperature of the first air can be quickly adjusted to the target temperature.

[0072] In the second operation example, under the premise of the first operation example, the temperature of the third air is not measured, and feedback control is performed in which the temperature control unit 751 adjusts the temperature of the second air to reduce the difference between the temperature of the first air and the target temperature based only on the temperature of the first air acquired by the first thermometer 741. That is, the second thermometer 742 is not used. In the second operation example, the required structural components are simplified, and the operation is also simplified.

[0073] In the third operation example, the target temperature of the first air is preset. On the other hand, although the target flow rate of the first air is set to the minimum value, it is not fixed to a constant value. The temperature of the second air sent from the temperature adjustment unit 71a can be adjusted, and the flow rate can also be adjusted. The flow rate of the third air sent from the air intake unit 72 is fixed.

[0074] Under the above conditions, in the third operation example, the temperature control unit 751 adjusts the temperature of the second air sent from the temperature adjustment unit 71a to reduce the difference between the temperature of the first air and the target temperature, and the flow control unit 752 adjusts the flow rate of the second air based on the temperature of the third air obtained by the second thermometer 742 and the temperature of the first air obtained by the first thermometer 741. Feedback control is performed in which the temperature control unit 751 adjusts the temperature of the second air sent from the temperature adjustment unit 71a to reduce the difference between the temperature of the first air and the target temperature, and the flow control unit 752 adjusts the flow rate of the second air. At this time, the temperature and flow rate of the second air are determined in a manner that the power consumption in the temperature adjustment unit 71a becomes minimum, based on the constraint condition that the flow rate of the first air does not fall below the minimum value.

[0075] In any of the above-mentioned operation examples, the temperature obtained by the third thermometer may be used instead of the first thermometer. Since the third thermometer obtains the temperature of the air near the holding portion 25, even if there is a temperature difference between the first air and the air near the holding portion 25, the third thermometer can be used to achieve the preferred control of the temperature and / or flow rate of the first air.

[0076] In the fourth operation example, the temperature adjustment of the first air in the above-mentioned various operation examples is performed, and the flow rate of the first air is increased by the flow control unit 752 while the door 63 of the cover 6 is opened when the substrate 9 is replaced. That is, while the door 63 is open, a signal is input from the door sensor 76 to the flow control unit 752, and the flow rate of the second air sent from the temperature adjustment unit 71a is increased by the flow control unit 752. The flow control unit 752 can also increase the flow rate of the third air sent from the air intake unit 72. Thus, the flow rate of the first air can be increased, and while the door 63 is open, it is possible to suppress the entry of particles from the door 63 and maintain the temperature inside the cover 6.

[0077] The signal from the door sensor 76 may be input to the temperature control unit 751, or the flow rate determined by the flow rate control unit 752 may be input to the temperature control unit 751. The temperature control unit 751 controls the temperature of the temperature adjustment unit 71a while referring to the change in the flow rate, thereby increasing the flow rate of the first air and making the first air reach an appropriate temperature more quickly.

[0078] The operation of adjusting the temperature in the cover 6 can be changed in various ways. For example, if the flow rate of the air intake section 72 is fixed and the temperature and flow rate of the temperature adjustment section 71a have been adjusted in advance, the operation of adjusting the temperature in the cover 6 can be omitted. Figure 3The following components are all included in the temperature control unit 751: the first thermometer 741, the second thermometer 742, the third thermometer 743, the door sensor 76, the temperature control unit 751, and the flow control unit 752. If the temperature of the first air is feedback-controlled to improve the temperature accuracy of the first air, at least the first thermometer 741 for acquiring the temperature of the first air and the temperature control unit 751 for controlling the temperature of the second air based on the temperature of the first air are required. In addition, the third thermometer 743 for acquiring the temperature of the air near the holding unit 25 may be used instead of the first thermometer 741. The temperature acquired by the first thermometer 741 and the third thermometer 743 may be used in the temperature control unit 751. Furthermore, if the temperature in the clean room is also used, the temperature acquired by the second thermometer 742 is input to the temperature adjustment unit 71a.

[0079] In addition, when the flow rate is controlled in addition to the temperature control of the temperature adjustment unit 71a, the temperature information input to the temperature adjustment unit 71a is also input to the flow rate control unit 752, or information is sent from the temperature adjustment unit 71a to the flow rate control unit 752. However, the temperature control unit 751 and the flow rate control unit 752 do not need to be strictly distinguished in terms of physical properties and functions.

[0080] The flow control unit 752 controls the flow of at least one of the temperature control unit 71a and the air intake unit 72 according to a target flow of the first air that is predetermined or calculated. In this way, the flow of the first air can be set to a preferred flow as needed. This control does not have to be feedback control, and advanced control such as feedback control can also be used. In order to reduce the manufacturing cost of the drawing device 1, it is preferred that only the flow of one of the temperature control unit 71a and the air intake unit 72 is variable, while the flow of the other is fixed. In addition, "the flow is fixed" means that the flow is constant when the resistance to the delivery of air is constant.

[0081] The control of increasing the flow rate of the first air by the flow control unit 752 while the door 63 is open by receiving a signal from the door sensor 76 can be applied to any of the above-mentioned controls, and further, can be applied to a case where the temperature of the first air is not feedback-controlled. That is, in the drawing apparatus 1, the flow rate of the first air can be increased regardless of the temperature adjustment of the first air while the door 63 is opened only by using the door sensor 76 and the flow control unit 752.

[0082] Figure 4 FIG. 7 is a diagram showing another example of the duct 73. Figure 2 compared to, Figure 4 The connection part 733a of the duct 73 functions as a mixing part for mixing the second air and the third air. Hereinafter, the connection part 733a is referred to as "mixing part 733a". The mixing part 733a is box-shaped, and the ducts 731, 732, and 734 are connected to the mixing part 733a.

[0083] The second air introduced from the temperature regulating part 71a flows into the mixing part 733a from the duct 731, and the third air introduced from the air intake part 72 flows into the mixing part 733a from the duct 732. These airs are mixed to generate the first air, and the first air is led out to the duct 734. The mixing part 733a may be a pure cavity, or may be equipped with a fan for stirring the air, or may be fixed with a plate for changing the flow direction of the air and mixing the air. In this way, the duct 73 may have various forms of the mixing part 733a.

[0084] In addition, from the viewpoint of reducing the air supplied to the hood 6, a structure can be adopted that reduces the space for air flow in the hood 6. Figure 1 The outer peripheral edge of the upper surface of the upper plate portion 51 is in contact with the inner side surface of the cover 6 substantially throughout the entire circumference, and the first air supplied to the cover 6 flows only above the upper plate portion 51 in the internal space 60. Thus, the flow rate of the first air supplied into the cover 6 can be reduced. As a result, the temperature control capacity required by the temperature control portion 71a can be further reduced, thereby further reducing the manufacturing cost of the drawing device 1. In addition, in order to make the flow of air in the internal space 60 uniform, it is preferable to provide an air diffuser (for example, a plate having a plurality of holes and perpendicular to the flow of the first air) near the air supply port 64.

[0085] In the drawing device 1, the position of the holding portion 25 can be fixed, and the light irradiation portion 4 can be moved relative to the holding portion 25 to perform drawing on the substrate 9. That is, a moving mechanism is provided in the drawing device 1, and the moving mechanism moves at least one of the holding portion 25 and the light irradiation portion 4 in a direction parallel to the substrate 9 held by the holding portion 25 (that is, in a direction parallel to the upper surface 91), thereby causing the holding portion 25 to move relative to the light irradiation portion 4. Of course, both the holding portion 25 and the light irradiation portion 4 may be moved in a direction parallel to the substrate 9. In addition, the drawing device 1 may be a device without the stage moving mechanism 22.

[0086] The drawing device 1 is not limited to a so-called direct drawing device. The air supply unit 7 can be used in various devices that draw a pattern on the substrate 9 by irradiating light. For example, the air supply unit 7 can be used in a device that draws a pattern on the substrate 9 by irradiating light to a mask formed with a pattern and irradiating the light that has passed through the mask to the substrate. In this way, as the light irradiation unit 4 in the drawing device 1, various structures can be adopted to draw a pattern on the substrate 9 by emitting light to the substrate 9 held by the holding unit 25.

[0087] The substrate 9 is not limited to a substrate for a printed wiring board, and may be a glass substrate for a mask substrate or a substrate for other purposes.

[0088] The cover to which the first air is supplied only needs to be configured to cover at least the holding portion 25 and the light irradiation portion 4. Figure 1 An inner cover covering the holding portion 25 and the light irradiation portion 4 is provided inside the cover 6, and the first air is supplied to the inner cover. "Covering the holding portion 25 and the light irradiation portion 4" does not mean that the outside of the cover is completely isolated from the inside, but means covering the holding portion 25 and the light irradiation portion 4 so that (substantially) all the air in the cover can become the first air.

[0089] The air supply unit 7 that supplies the first air whose temperature is adjusted into the hood 6 can also be modified in various ways. For example, when it is not necessary to always make the flow rate of the first air higher than the flow rate of the second air sent from the temperature regulating unit 71a, it is not necessary for the air intake unit 72 to always operate. For example, the air intake unit 72 may operate only when the door 63 is open. When the upper and lower relationship between the temperature of the air in the hood 6 and the temperature of the air in the clean room is constant, the temperature regulating unit 71a may have only a cooling function or only a heating function.

[0090] The configurations in the above-described embodiment and various modifications may be combined as appropriate as long as they do not contradict each other.

[0091] Although the invention has been described in detail, the above description is illustrative and not restrictive, and therefore, it can be understood that many modifications and aspects can be made without departing from the scope of the invention.

Claims

1. A drawing device for drawing a pattern on a substrate by irradiating light, wherein: have: A holding portion for holding a substrate; a light irradiation unit for drawing a pattern on the substrate by irradiating light to the substrate held by the holding unit; a cover covering the holding portion and the light irradiation portion; as well as an air supply unit for supplying first air with adjusted temperature into the cover; The air supply unit comprises: a temperature adjustment unit that introduces air from the outside of the cover and generates second air with adjusted temperature; an air intake portion for introducing air from outside the cover; as well as The mixing unit generates the first air by mixing the second air introduced from the temperature regulating unit and the third air introduced from the air intake unit.

2. The drawing device according to claim 1, wherein: The air supply unit further comprises: a thermometer, for obtaining the temperature of the first air; and The temperature control unit controls the temperature of the second air based on the temperature of the first air acquired by the thermometer.

3. The drawing device according to claim 1, wherein: The air supply unit further includes a flow rate control unit configured to control a flow rate of at least one of the second air and the third air according to a target flow rate of the first air.

4. The drawing device according to claim 3, wherein: The cover has a door that is opened when the substrate held by the holding portion is replaced. The flow rate control unit increases the flow rate of the first air while the door is open.

5. The drawing device according to claim 1, wherein: The drawing device further includes another temperature regulating unit of the same model as the temperature regulating unit. The other temperature adjustment unit supplies fourth air of adjusted temperature into the light irradiation unit.

6. The drawing device according to any one of claims 1 to 5, wherein: The drawing device further includes a moving mechanism that moves at least one of the holding portion and the light irradiation portion in a direction parallel to the substrate held by the holding portion, thereby moving the holding portion relative to the light irradiation portion. The light irradiation unit includes a drawing head, and the drawing head emits modulated light toward the substrate held by the holding unit. The moving mechanism moves the substrate held by the holding unit relative to the light irradiation unit while the drawing head emits the modulated light, thereby drawing a pattern on the substrate.

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