Differential vacuum monitoring and interlocking system

Abstract

The invention discloses a differential vacuum monitoring and interlocking system, which comprises a PLC (Programmable Logic Controller), a digital quantity input module, a digital quantity output module, an interlocking input module and an interlocking output module, the PLC controller is connected with the digital quantity input module and the digital quantity output module, controlled electrical equipment is connected with the PLC controller through the digital quantity input module, and the PLC controller outputs an interlocking signal according to a set interlocking logic and sends the interlocking signal to the controlled electrical equipment through the digital quantity output module for interlocking; the interlocking input module is connected with a controlled optical device through an optical fiber, the interlocking input module transmits a received optical signal to the PLC through the digital input module after photoelectric conversion, and the PLC outputs an interlocking signal according to a set interlocking logic and transmits the interlocking signal to the interlocking output module through the digital output module. And the interlocking output module is connected with the controlled optical equipment through an optical fiber to realize interlocking.

Description

Technical Field

[0001] The invention relates to a differential vacuum monitoring and interlocking system, and relates to the field of accelerator state monitoring and interlocking. Background Art

[0002] The discovery and study of new elements and new nuclides is one of the frontiers of nuclear physics. Since the 1940s, many laboratories around the world have successfully discovered more than 100 superheavy nuclides. The Institute of Modern Physics of the Chinese Academy of Sciences has made a series of achievements in the synthesis of new nuclides and the study of their properties by relying on the gas-filled recoil spectrometer. The part of the gas-filled recoil spectrometer connected to the accelerator is called the differential vacuum system, because the vacuum degree upstream is 1×10 -6 The vacuum degree of the downstream chamber is in the order of Pa, while the vacuum degree of the downstream chamber is in the order of 1 Pa or even higher. The differential vacuum system is designed to ensure smooth operation of the transition between the two parts, and the equipment monitoring and interlocking of this part are important parts to ensure the normal operation of the system.

[0003] To achieve differential vacuum, various vacuum acquisition equipment and vacuum monitoring equipment are required, including various vacuum pumps, valves and vacuum gauges. Figure 1 , Figure 2 As shown, many work-related interlocks and safety-related interlocks are required inside the vacuum equipment. These interlock relationships are relatively complex. Some interlocks require multiple input conditions, and some interlocks require multiple output actions. Some partial interlocks require one condition to interlock multiple actions, and some partial interlocks require one action to be interlocked by multiple conditions. Some interlocks require one interlock action to be linked to the next level of interlock action, etc. These complex interlock functions require specific monitoring equipment and logic programs to implement.

[0004] In addition to the interlocking behavior of vacuum equipment, differential vacuum also needs to be interlocked and restricted with external equipment, such as upstream and downstream vacuum isolation valves, slow signals such as water status, and fast signals of the beam admission system. These functions need to be integrated and implemented. How to realize the monitoring interlock of vacuum equipment in the differential system, the related water status monitoring interlock, and the interlock and restriction with the beam admission equipment is a problem that the existing technology faces and needs to solve. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, in view of the above problems, the purpose of the present invention is to provide a differential vacuum monitoring and interlocking system, which can realize the monitoring and interlocking of related equipment of the accelerator differential system vacuum equipment, and ensure the safety and normal operation of the equipment.

[0006] In order to achieve the above-mentioned invention object, the technical solution adopted by the present invention is: In the first aspect, the present invention provides a differential vacuum monitoring and interlocking system, which includes a PLC controller, a digital quantity input module, a digital quantity output module, an interlocking input module and an interlocking output module; the PLC controller is connected to the digital quantity input module and the digital quantity output module, the controlled electrical equipment is connected to the PLC controller through the digital quantity input module, the PLC controller outputs an interlocking signal according to a set interlocking logic and sends it to the controlled electrical equipment through the digital quantity output module for interlocking; the interlocking input module is connected to the controlled optical equipment through an optical fiber, the interlocking input module sends the received optical signal to the PLC controller through the digital input module through photoelectric conversion, the PLC controller outputs an interlocking signal according to the set interlocking logic and sends it to the interlocking output module through the digital output module, and the interlocking output module is connected to the controlled optical equipment through an optical fiber to achieve interlocking.

[0007] In a preferred embodiment, the system also includes a communication module, which includes an RS232 module and an RS485 module, and is used to enable the PLC controller to connect to various serial communication devices of the accelerator differential system vacuum equipment, and to write a communication program by configuring module parameters, so that the PLC controller can exchange data with each serial communication device within a set period.

[0008] In a preferred embodiment, it further comprises an analog input module, which is connected to the water flow sensor of the beam diagnostic probe and is used to obtain the current signal of the beam diagnostic probe for monitoring the water status, and the analog input module is connected to the PLC controller.

[0009] In a preferred embodiment, the digital input module is used to obtain the valve input status of the pneumatic gate valve, angle valve or dry pump of the accelerator differential system vacuum equipment, and realize the access of dry contact signal or wet contact signal by serially connecting an intermediate relay as required.

[0010] In a preferred embodiment, the digital output module is used to connect the switch signal of the pneumatic gate valve, angle valve or dry pump of the accelerator differential system vacuum equipment, and realize the conversion of 24VDC or 220VAC by connecting an intermediate relay in series as required.

[0011] In a preferred embodiment, the interlock input module and the interlock output module are connected via optical fibers for beam ready signal input and beam permission output, respectively.

[0012] In a preferred embodiment, the implementation process of the PLC controller includes: Obtain information about controlled electrical and optical devices through the functions provided by the system, including valve status, water flow status, vacuum gauge reading, ammeter reading or interlock input; Perform interlock logic design including AND, OR, and NOT combinational logic, masking, and / or analysis of input signals; The judgment is made according to the set interlocking logic, and an interlocking output signal is given according to the judgment result. The corresponding controlled electrical equipment and / or controlled optical equipment is operated by the interlocking output signal to perform the interlocking action.

[0013] In a preferred embodiment, it further comprises a computer, and the computer exchanges data with the PLC controller via a network.

[0014] In a preferred embodiment, the PLC controller synchronizes the clock with the timestamp of the data saved by the NTP service, which facilitates the post-processing analysis of the interlocking.

[0015] In a second aspect, the present invention further provides a method for using a differential vacuum monitoring and interlocking system, comprising: When the system is powered on and in a non-powered state, the PLC controller polls all connected controlled electrical devices to obtain relevant data and determines whether the monitored quantities are normal. When all monitored quantities are normal, the PLC controller continues to poll and monitor. If any monitored quantity is abnormal, the PLC controller sends a signal to give an alarm prompt and performs an interlocking operation on the controlled electrical equipment. When the monitored quantity is in normal state, the system receives the beam ready signal and is in the beam supply state. After adjusting or operating the parameters of the system equipment and related upstream and downstream equipment, the PLC controller continues to maintain the state quantity to monitor all controlled electrical equipment and / or controlled optical equipment. If the monitored quantity is abnormal, the PLC controller sends a signal to give an alarm prompt and performs interlocking operations on the controlled electrical equipment and / or controlled optical equipment.

[0016] The present invention adopts the above technical solution, and has the following characteristics: 1. The monitoring and interlocking system for accelerator differential system equipment proposed in the present invention solves the monitoring and internal working interlocking of vacuum equipment in the differential system, and realizes the interlocking problem between the differential system and upstream and downstream related equipment and beam permission equipment through the PLC controller, including but not limited to the interlocking between the gate valve, water status, ammeter, beam interlock permission and other signals, thereby ensuring the safety and normal operation of the equipment.

[0017] 2. The monitoring and interlocking system signal connection provided by the present invention designs corresponding hardware connections for different types of equipment to ensure normal, safe and reliable monitoring.

[0018] 3. The present invention designs combined logic, shielding, analysis, data preservation and other functions to ensure the reliability, visibility and traceability of system interlocking.

[0019] 4. The working sequence and workflow of the monitoring and interlocking system provided by the present invention enable the experimenters to have a timely and clear understanding of the status of the system and its related interlocking devices, and provide a basis for fault discovery and troubleshooting.

[0020] In summary, the present invention can be widely used in the state monitoring and interlocking of vacuum equipment in accelerator differential systems. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Throughout the accompanying drawings, the same reference numerals are used to represent the same components. In the accompanying drawings: Figure 1 This is a model diagram of the differential vacuum system of a gas-filled spectrometer in the prior art.

[0022] Figure 2 It is a schematic diagram of a single-stage device of a differential vacuum system in the prior art.

[0023] Figure 3 It is a schematic diagram of the differential vacuum monitoring and interlocking system of the gas-filled spectrometer of the present invention.

[0024] Figure 4 This is a functional block diagram of the interlocking function of the differential vacuum system controller of the gas-filled spectrometer of the present invention.

[0025] Figure 5 This is a working diagram of the differential vacuum monitoring and interlocking system of the present invention. DETAILED DESCRIPTION

[0026] It should be understood that the terms used in the text are only for the purpose of describing specific example embodiments, and are not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms "one", "an" and "said" as used in the text may also be meant to include plural forms. The terms "include", "comprise", "contain", and "have" are inclusive, and therefore specify the existence of stated features, steps, operations, elements and / or parts, but do not exclude the existence or addition of one or more other features, steps, operations, elements, parts, and / or combinations thereof. The method steps, processes, and operations described herein are not interpreted as necessarily requiring them to be performed in the specific order described or illustrated, unless the execution order is clearly indicated. It should also be understood that additional or alternative steps may be used.

[0027] Although the terms first, second, third, etc. can be used in the text to describe multiple elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms can only be used to distinguish an element, component, region, layer or section from another region, layer or section. Unless the context clearly indicates, terms such as "first", "second" and other numerical terms do not imply order or sequence when used in the text. Therefore, the first element, component, region, layer or section discussed below can be referred to as the second element, component, region, layer or section without departing from the teaching of the example embodiments.

[0028] For ease of description, spatially relative terms may be used herein to describe the relationship of one element or feature relative to another element or feature as shown in the figures, such as "inside", "outside", "inner side", "outer side", "below", "above", etc. Such spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the figures.

[0029] How to realize the monitoring interlock of vacuum equipment in the differential system, the related water status monitoring interlock, and the interlock and restriction with the beam permission equipment is a problem currently faced and needs to be solved. The differential vacuum monitoring and interlocking system provided by the present invention includes a PLC controller, a digital input module, a digital output module, an interlocking input module and an interlocking output module; the PLC controller is connected to the digital input module and the digital output module, the controlled electrical equipment is connected to the PLC controller through the digital input module, and the PLC controller outputs an interlocking signal according to the set interlocking logic and sends it to the controlled electrical equipment through the digital output module for interlocking; the interlocking input module is connected to the controlled optical equipment through an optical fiber, the interlocking input module sends the received optical signal to the PLC controller through the digital input module through photoelectric conversion, the PLC controller outputs an interlocking signal according to the set interlocking logic and sends it to the interlocking output module through the digital output module, and the interlocking output module is connected to the controlled optical equipment through an optical fiber to realize interlocking. Therefore, the present invention analyzes various types of monitoring objects, designs a monitoring and interlocking solution based on PLC control and related functional modules, combines timing logic and process design, solves the internal monitoring and interlocking of vacuum equipment in the differential system, and realizes the interlocking between the differential vacuum system and upstream and downstream equipment, including gate valves, water status, ammeters, beam interlock permission and other signals, thereby ensuring equipment safety and operating efficiency.

[0030] The exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0031] like Figure 3 As shown, the differential vacuum monitoring and interlocking system based on the PLC controller provided in this embodiment is used to realize the monitoring and interlocking of the differential vacuum system and related equipment, including a PLC controller 1, a digital input module 2, a digital output module 3, an interlocking input module 4, an interlocking output module 5, a communication module 6 and an analog input module 7.

[0032] PLC controller 1, which is based on PC architecture and is a kind of soft PLC. The internal program polling cycle can reach up to 50us, which can meet the timeliness requirements of monitoring the controlled object.

[0033] The digital input module 2 and the digital output module 3 both use industrial 24VDC signals, wherein the digital input module 2 is used to obtain the valve input status of the pneumatic plug-in valve, angle valve, dry pump and other equipment of the accelerator differential system vacuum equipment, and can realize the access of dry contact signal or wet contact signal by connecting the intermediate relay in series according to the demand. The digital output module 3 is used to connect the switch signals of the pneumatic plug-in valve, angle valve, dry pump and other equipment of the accelerator differential system vacuum equipment, and can also realize the conversion of 24VDC or 220VAC by connecting the intermediate relay in series. The digital input module 2 and the digital output module 3 are connected to the PLC controller 1 through the backplane bus. The digital interface provided by the controlled electrical equipment is connected to the digital input module 2 through the signal line, and the digital input module 2 is transmitted to the PLC controller 1 through the backplane bus, and the PLC controller 1 reads the signal; vice versa, the output signal of the PLC controller 1 is transmitted in sequence through the backplane bus, the digital output module 3, the cable and the signal path of the controlled electrical equipment.

[0034] The interlocking input module 4 and the interlocking output module 5 are connected by optical fiber signals for beam ready signal input, beam permission output, etc. The optical signal has a long transmission distance and is not easily interfered with. It is the preferred signal interaction medium for mutual interlocking between different subsystems. The interlocking input module 4 is connected to the controlled optical device and the acquired photoelectric conversion is converted into an electrical signal and sent to the digital input module 2. The digital input module 2 converts the converted electrical signal to the PLC controller 1 through the backplane bus; the PLC controller 1 sends the interlocking output signal according to the set interlocking logic through the backplane bus to the digital output module 3. The digital output module 3 transmits the signal to the interlocking output module 5 after photoelectric conversion to perform interlocking control on the controlled optical device.

[0035] The communication module 6, including the RS232 module and the RS485 module, is used to connect the PLC controller 1 to the molecular pump, vacuum gauge, ammeter and other serial communication devices of the accelerator differential system vacuum equipment. The communication program is written by configuring the module parameters, so that the PLC controller and the equipment use the question-and-answer method to send commands, receive data, and parse and analyze data within the set period. In addition, the TCP / IP communication program block is written through the network interface of the PLC controller 1. In this interlocking design, in addition to the hard signal connection, for devices that cannot provide hardware signal interfaces, such as other controlled devices connected through network protocols, their soft signals are obtained through communication to perform soft interlocking. Compared with hard interlocking, soft interlocking generally has a longer response time (ms level), but it also basically meets the design requirements.

[0036] The analog input module 7 is used to connect the water flow sensor of the beam diagnostic probe to obtain the current signal of the beam diagnostic probe water status monitoring, and the PLC controller 1 obtains the data of the analog input module.

[0037] Furthermore, if Figure 4 As shown, the firmware program and interlocking logic are designed and implemented in the internal program of the PLC controller 1. The main functions of the input and output logic of the PLC controller 1 are AND / OR combination logic, shielding, analysis, data storage, etc.

[0038] Furthermore, the interlocking logic of this embodiment is implemented by programming inside the PLC controller: First, the information of all controlled devices is obtained through the functional functions provided by the system, such as valve status, water flow status, vacuum gauge reading, ammeter reading, interlock input and other input information.

[0039] Then, the PLC controller 1 performs interlocking logic design processing, which includes but is not limited to AND, OR, and NOT combinational logic, shielding, and analysis of each input signal.

[0040] Secondly, the PLC controller 1 gives an interlock output signal according to the processing result, and operates the corresponding equipment according to the situation, such as cutting off the beam flow, closing the valve, stopping the vacuum pump, etc. For example: the system works normally, in the beam supply state, the PLC controller 1 obtains and detects that the vacuum gauge readback data exceeds the threshold, then the interlock logic is sent to the interlock output module 5 through the digital output module 3, and the interlock output module 5 has a preset response action for this, first sending a beam stop instruction to the beam cutter, and then sending a valve closing command to the vacuum valve through the digital output module 3, and at the same time, the relevant data is archived, etc. This is an example, but not limited to this.

[0041] Furthermore, a computer is also included. The computer 8 exchanges data with the PLC controller 1 through a network, and the user interface program can be installed and run on the computer.

[0042] The following describes in detail the method for using the differential vacuum monitoring and interlocking system based on a PLC controller of the present invention through specific embodiments.

[0043] Example 1: Figure 5 As shown in the figure, after the system is powered on, in the no-beam state, the PLC controller 1 polls all connected controlled electrical devices (no-beam does not involve the interlocking of controlled optical devices) to obtain relevant data and determine whether the monitored quantity is normal. Figure 3 If all the connected monitoring quantities are normal, the polling monitoring will continue; if any monitoring quantity is abnormal, the PLC controller 1 will send a signal to the computer 8, and the user interface on the computer 8 will give an alarm prompt message. The maintenance personnel will handle the fault according to the actual situation, such as closing the valve due to vacuum abnormality. The experimenter will adjust the parameters of the system equipment or perform other operations according to the needs, and the PLC controller will continue to maintain state quantity monitoring and wait for the experimental conditions to be met.

[0044] The monitored quantity is in normal state. When the beam ready signal is received and the beam is in the beam supply state (the controlled optical device may be interlocked during beam supply), the experimenter adjusts the parameters or performs other operations on the system equipment and related upstream and downstream equipment according to the needs. The PLC controller 1 continues to monitor the state quantity. If the monitored quantity is abnormal, the PLC controller 1 promptly gives the interlocking information to control the controlled electrical equipment and / or the controlled optical equipment to interlock. At the same time, the user interface gives an alarm message, and the maintenance personnel perform the post-interlocking processing procedure to recover after the fault is handled.

[0045] Example 2: Figure 4 As shown, the input and output signals of the interlocking function are given, wherein the vacuum signal input includes a vacuum acquisition device and a vacuum monitoring device, namely a dry pump, a molecular pump, an angle valve, a plug valve or a vacuum gauge. These signals are analyzed and processed inside the PLC controller 1, and are judged whether they are within the normal range according to the threshold value. If they are abnormal, an interlocking signal is given to perform an interlocking operation on the controlled device. Specifically, when the system is working normally and the beam is in the supply state, the PLC controller 1 detects through the digital input module that the vacuum gauge readback data exceeds the threshold value, and then sends the interlocking signal to the interlocking output module 5 through the digital output module 3. The interlocking output module 5 has a preset response action for this, first sending a stop beam instruction to the beam cutter, and then sending a valve closing command to the vacuum valve through the digital output module 3, and at the same time, the relevant data is archived. Since there are also work-related interlocks and safety-related interlocks inside these vacuum devices, these internal interlocks also need to be analyzed and processed inside the PLC controller 1, and an interlocking signal is given to the digital output module 3 according to the preset, wherein: The cooling water status is collected by the sensor as an analog signal, which is converted into a 4-20mA current signal and sent to the PLC controller 1 through the analog input module. The PLC controller 1 compares it according to the set threshold and gives an interlocking signal according to the preset interlocking logic. The interlocking signal comes from the data and status information of all controlled devices. The PLC controller 1 compares this information with the preset threshold in real time. If it exceeds the set threshold, an interlocking command is issued to interlock the response device through the digital output module 3. When the water flow signal exceeds the threshold, the beam cutter is interlocked through the interlocking output module 5 to perform the beam stop operation.

[0046] The ammeter signal collects digital signals through serial communication. The PLC controller 1 collects and compares it with the threshold and gives an interlocking signal. The current signal corresponds to the beam current signal. If it exceeds the threshold, an interlocking signal is given according to the interlocking logic of the PLC. The interlocking signal is converted into a level signal through the digital output module, and the level signal is converted into an optical signal through photoelectric conversion and transmitted to the interlocking device. After receiving the interlocking optical signal, the interlocking device performs a beam cutting action to complete the interlocking function and perform a beam stop operation.

[0047] Other external interlocking signals include the status of the upstream gate valve of the differential segment, the status of the downstream gate valve, the external interlocking input, the upstream and downstream related vacuum gauge contact signals, and the soft interlocking signals. The above signals are all pure digital quantities. They directly enter the interlocking judgment logic of the PLC controller 1 through the digital input module 2, and the interlocking signal is sent to the digital output module 3. When the gate valve status interlocks the beam cutter, the external interlocking signal interlocks the beam cutter, the vacuum contact signal interlocks the vacuum valve, the ammeter soft interlocks the beam cutter, and the warning light of the soft interlocking interface is turned on.

[0048] Furthermore, the interlocking logic is implemented inside the PLC controller 1, and the main functions of the logic are AND or NOR combination logic, shielding, analysis, data storage, etc. The PLC controller 1 also synchronizes the timestamp of the data saved by the clock through the NTP service to facilitate the post-processing analysis of the interlocking. The accident analysis and processing after the interlocking occurs requires a large amount of data. One of the most basic requirements of these data is to keep synchronization on the time axis, which requires that the control devices involved in the system can keep time synchronization with the NTP time server. For example: the time of adding vacuum data storage is not synchronized with the time of the beam cutter. After the interlocking occurs, by checking the historical data, it is found that the action time of the beam cutter is before the vacuum failure. Then, it is impossible to determine the causal relationship between the beam cutting action and the vacuum failure, and it is difficult to locate the fault.

[0049] Each embodiment in this specification is described in a progressive manner, and the same and similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In the description of this specification, the description of reference terms "a preferred embodiment", "further", "specifically", "in the present embodiment", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of this specification. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples without contradiction.

[0050] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A differential vacuum monitoring and interlocking system, characterized in that: The system includes a PLC controller, a digital quantity input module, a digital quantity output module, an interlocking input module and an interlocking output module; The PLC controller is connected to the digital input module and the digital output module, the controlled electrical equipment is connected to the PLC controller through the digital input module, and the PLC controller outputs an interlocking signal according to the set interlocking logic and sends it to the controlled electrical equipment through the digital output module for interlocking; the interlocking input module is connected to the controlled optical equipment through optical fiber, and the interlocking input module sends the received optical signal to the PLC controller through the digital input module through photoelectric conversion, and the PLC controller outputs an interlocking signal according to the set interlocking logic and sends it to the interlocking output module through the digital output module, and the interlocking output module is connected to the controlled optical equipment through optical fiber to achieve interlocking.

2. The differential vacuum monitoring and interlocking system according to claim 1, characterized in that: The system also includes a communication module, which includes an RS232 module and an RS485 module, and is used to enable the PLC controller to connect to various serial communication devices of the accelerator differential system vacuum equipment, and to write a communication program by configuring module parameters, so that the PLC controller and various serial communication devices can exchange data within a set period.

3. The differential vacuum monitoring and interlocking system according to claim 1, characterized in that: It also includes an analog input module, which is connected to the water flow sensor of the beam diagnostic probe and is used to obtain the current signal of the beam diagnostic probe water status monitoring. The analog input module is connected to the PLC controller.

4. The differential vacuum monitoring and interlocking system according to claim 1, characterized in that: The digital input module is used to obtain the valve input status of the pneumatic plug-in valve, angle valve or dry pump of the accelerator differential system vacuum equipment, and realizes the access of dry contact signal or wet contact signal by serially connecting the intermediate relay as required.

5. The differential vacuum monitoring and interlocking system according to claim 1, characterized in that: The digital output module is used to connect the switch signals of the pneumatic gate valve, angle valve or dry pump of the accelerator differential system vacuum equipment, and realize the conversion of 24VDC or 220VAC by connecting the intermediate relay in series according to the requirements.

6. The differential vacuum monitoring and interlocking system according to claim 1, characterized in that: The interlock input module and the interlock output module are connected to the beam ready signal input and the beam permission output respectively through optical fibers.

7. The differential vacuum monitoring and interlocking system according to claim 1, characterized in that: The implementation process of the PLC controller includes: Obtain information about controlled electrical and optical devices through the functions provided by the system, including valve status, water flow status, vacuum gauge reading, ammeter reading or interlock input; Perform interlock logic design including AND, OR, and NOT combinational logic, masking, and / or analysis of input signals; The judgment is made according to the set interlocking logic, and an interlocking output signal is given according to the judgment result. The corresponding controlled electrical equipment and / or controlled optical equipment is operated by the interlocking output signal to perform the interlocking action.

8. The differential vacuum monitoring and interlocking system according to claim 1, characterized in that: It also includes a computer, which exchanges data with the PLC controller through a network.

9. The differential vacuum monitoring and interlocking system according to claim 1, characterized in that: The PLC controller synchronizes the clock with the NTP service to save the timestamp of the data, providing convenience for post-processing analysis of the interlocking.

10. A method for using the differential vacuum monitoring and interlocking system according to any one of claims 1 to 9, characterized in that: include: When the system is powered on and in a non-powered state, the PLC controller polls all connected controlled electrical devices to obtain relevant data and determines whether the monitored quantities are normal. When all monitored quantities are normal, the PLC controller continues to poll and monitor. If any monitored quantity is abnormal, the PLC controller sends a signal to give an alarm prompt and performs an interlocking operation on the controlled electrical equipment. When the monitored quantity is in normal state, the system receives the beam ready signal and is in the beam supply state. After adjusting or operating the parameters of the system equipment and related upstream and downstream equipment, the PLC controller continues to maintain the state quantity to monitor all controlled electrical equipment and / or controlled optical equipment. If the monitored quantity is abnormal, the PLC controller sends a signal to give an alarm prompt and performs interlocking operations on the controlled electrical equipment and / or controlled optical equipment.

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