Safety management method for semiconductor process formula parameters and related products

Abstract

The embodiment of the invention relates to the field of data management, and discloses a semiconductor process formula parameter safety management method and related products, and the method comprises the steps: obtaining semiconductor process formula parameters on target production equipment, and storing the semiconductor process formula parameters in a cloud database, deleting the technological formula parameters on the target production equipment; configuring a data security area in the cloud database to perform authority control including data access, data transmission and / or data editing on the stored process formula parameters; and before the semiconductor is processed by the production equipment, downloading the corresponding process formula parameters in the cloud database to the production equipment, and deleting the process formula parameters on the production equipment after the processing is completed. According to the scheme, the key process formula can be prevented from falling to the ground, and core process leakage is prevented.

Description

Technical Field

[0001] The present application relates to the field of data management, and in particular to a method for safely managing semiconductor process recipe parameters and related products. Background Art

[0002] In the field of semiconductor manufacturing, recipes, as carriers of key process parameters, play a vital role in the entire manufacturing process. Traditionally, recipes are usually stored in the form of files or database records on the server of semiconductor manufacturing equipment (hereinafter referred to as "machine"). Although this storage method has improved production efficiency to a certain extent, with the continuous advancement and complexity of semiconductor manufacturing processes, the technical content and commercial value carried by recipes are increasing, and their security and reliability issues are also highlighted. Specifically, when wafer processing is required, the machine will read the corresponding recipe file or parameters from the local storage medium (such as a hard disk) or the built-in database, and load it into the corresponding control unit (Controller).

[0003] Although this localized recipe management model has certain advantages in terms of operational convenience, it also has many potential risks and limitations. First, the recipe resides on the machine for a long time and is easily interfered by human factors, such as parameter modification or deletion caused by misoperation. Secondly, since the recipe is stored directly on the machine, there is a security risk of being accessed or stolen by unauthorized personnel, which may lead to the leakage of core process parameters. In addition, with the rapid iteration of manufacturing processes and the increase in product types, the number and complexity of recipes continue to increase, and the difficulty of managing recipes stored in various machines has also increased, which is not conducive to unified version control and update maintenance.

[0004] Therefore, a technical solution is urgently needed to ensure that key process formulas are not dropped and to prevent the leakage of core processes. Summary of the invention

[0005] One purpose of the present application is to provide a method for safely managing semiconductor process recipe parameters and related products, at least to solve the technical problems of the prior art that recipe parameters are stored in a scattered manner and are easily modified by mistake.

[0006] To achieve the above objectives, some embodiments of the present application provide the following aspects:

[0007] In a first aspect, some embodiments of the present application provide a method for secure management of semiconductor process recipe parameters, including: obtaining the semiconductor process recipe parameters on a target production device to store the semiconductor process recipe parameters in a cloud database, and deleting the process recipe parameters on the target production device; configuring a data security area in the cloud database to perform permission management on the stored process recipe parameters, including data access, data transmission and / or data editing; before the production equipment processes the semiconductor, downloading the corresponding process recipe parameters in the cloud database to the production equipment, and deleting the process recipe parameters on the production equipment after the processing is completed.

[0008] Furthermore, the stored process recipe parameters are subject to permission control including data access, data transmission and / or data editing, including: based on configured access rights, allowing access to the stored process recipe parameters through the target application in the security area, and rejecting non-preset external access methods in the network layer; configuring the data security area to allow external data to be transmitted into the storage area, and prohibiting data from being directly transmitted out of the storage area; configuring the data security area to only allow operations on data in the storage area through predefined security processing procedures, and only outputting result data that has been desensitized or processed.

[0009] Furthermore, the data in the storage area is operated through a predefined security processing program, including: calculating the data in the security area; and / or comparing multiple versions of process recipe parameters.

[0010] Furthermore, it also includes: configuring the production equipment of the same model to be in a state where the corresponding process recipe parameters can be downloaded and called synchronously.

[0011] On the second aspect, some embodiments of the present application also provide a semiconductor cloud storage device that applies the security management method as described in any of the above embodiments, including: collecting semiconductor process recipe parameters on one or more production equipment, and configuring a data security area to store the stored process recipe parameters and / or perform permission management including data access, data transmission and / or data editing; remotely delete the process recipe parameters on the collected production equipment; in response to the request of the production equipment to process the semiconductor, synchronously download the stored process recipe parameters to all corresponding production equipment, and remotely delete the process recipe parameters on the production equipment after the processing is completed.

[0012] In the third aspect, some embodiments of the present application also provide a semiconductor processing equipment that applies the security management method as described in any of the above embodiments, including: uploading the configured process recipe parameters to a cloud storage device and deleting them locally; sending a data request to the cloud storage device before processing the semiconductor to download the corresponding process recipe parameters, and deleting the process recipe parameters locally after the processing is completed.

[0013] In a fourth aspect, some embodiments of the present application also provide a management system for semiconductor process recipe parameters that applies the security management method as described in any of the above embodiments, characterized in that it includes: one or more cloud units and one or more machine-end units; wherein the cloud unit is used to configure a data security area to store the stored process recipe parameters and / or perform permission management including data access, data transmission and / or data editing, and in response to the request of the production equipment to process semiconductors, the stored process recipe parameters are synchronously distributed to all corresponding production equipment; the machine-end unit is used to upload the configured process recipe parameters to a cloud storage device and delete them locally; before processing the semiconductor, a data request is sent to the cloud storage device to download the corresponding process recipe parameters, and the process recipe parameters are locally deleted after the processing is completed.

[0014] In the fifth aspect, some embodiments of the present application also provide the third aspect, and some embodiments of the present application also provide an electronic device, comprising: one or more processors; and a memory storing computer program instructions, wherein the computer program instructions, when executed, cause the processor to perform the steps of the method described above.

[0015] Compared with the related art, in the solution provided in the embodiment of the present application, by building a cloud platform to centrally manage the process recipe parameters distributed on various semiconductor production equipment, and configuring a data security area on the cloud, it is possible to ensure that key process recipes are not released and prevent the leakage of core processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] One or more embodiments are exemplarily described by pictures in the corresponding drawings, and these exemplified descriptions do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0017] Figure 1 A schematic flow chart of a method for safely managing semiconductor process recipe parameters provided in an embodiment of the present application;

[0018] Figure 2 A schematic diagram of a flow chart of a method for securely managing semiconductor process recipe data in the cloud provided in an embodiment of the present application;

[0019] Figure 3 A schematic diagram of remote collection and allocation of parameters provided in an embodiment of the present application;

[0020] Figure 4 A schematic block diagram of a management system for semiconductor process recipe parameters in a cloud security environment provided by an embodiment of the present application;

[0021] Figure 5 An exemplary structural diagram of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0022] Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present disclosure unless otherwise specifically stated.

[0023] Those skilled in the art can understand that the terms "first", "second" and the like in the embodiments of the present disclosure are only used to distinguish different steps, devices or modules, etc., and neither represent any specific technical meaning nor represent the necessary logical order between them. It should also be understood that in the embodiments of the present disclosure, "multiple" can refer to two or more, and "at least one" can refer to one, two or more. It should also be understood that for any component, data or structure mentioned in the embodiments of the present disclosure, in the absence of explicit limitation or contrary revelation given in the context, it can generally be understood as one or more. In addition, the term "and / or" in the present disclosure is only a description of the association relationship of the associated objects, indicating that there can be three relationships, for example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in the present disclosure generally indicates that the associated objects before and after are an "or" relationship. It should also be understood that the description of each embodiment in the present disclosure emphasizes the differences between the embodiments, and the same or similar parts can refer to each other. For the sake of brevity, they will not be repeated one by one.

[0024] At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present disclosure and its application or use. The techniques, methods and devices known to ordinary technicians in the relevant fields may not be discussed in detail, but where appropriate, the techniques, methods and devices should be considered part of the specification. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0025] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] First embodiment

[0027] Figure 1 A flowchart of a method for safely managing semiconductor process recipe parameters provided in an embodiment of the present application.

[0028] It should be understood that the semiconductor process recipe parameters refer to a series of parameter settings used to control and optimize various process steps in the semiconductor manufacturing process. These parameters include but are not limited to physical quantities such as temperature, pressure, gas flow, voltage, current, time, and specific operating instructions for various process equipment. Precise control of these parameters is critical to ensuring the quality, yield and consistency of semiconductor products. Traditionally, these recipe parameters are usually stored in the local memory of each production equipment, which poses a risk of data leakage, loss and inconsistency.

[0029] The embodiment of the present application builds a cloud platform, the main function of which is to centrally manage the process recipe parameters (Recipe) distributed on various semiconductor production equipment. The cloud platform refers to a service model that provides computing and storage resources through the Internet, which is highly scalable, flexible and cost-effective. In the field of semiconductor manufacturing, the cloud platform can provide powerful data processing capabilities and storage capacity, which helps to achieve centralized management and optimization of process parameters.

[0030] The method of the embodiment of the present application first collects the recipe from the machine end and saves it in the cloud server. Here, "machine end" refers to the local control system of the semiconductor production equipment, and "cloud server" refers to the high-performance computer system located in the remote data center. The collection process involves steps such as data extraction, format conversion and transmission to ensure the integrity and accuracy of the recipe.

[0031] During the production process, the embodiment of the present application downloads the recipe to the machine side through EAP (Equipment Automatic Program). EAP is an automated program used to control and coordinate the operation of semiconductor production equipment. It can automatically download, load and run recipes, thereby improving production efficiency and reducing human errors. After production is completed, the embodiment of the present application will delete the recipe on the machine side. This step helps protect sensitive process parameters and prevent unauthorized access or modification.

[0032] The embodiment of the present application also provides a process for remotely creating and verifying recipes, which can significantly improve the efficiency of recipe creation. Remote creation allows process engineers to develop and adjust recipes without having to visit the production site, while the verification process ensures that the newly created or modified recipes meet production requirements and quality standards. This remote operation not only saves time and resources, but also provides flexibility for cross-regional collaboration.

[0033] In order to further ensure the privacy and security of the recipe, the embodiment of the present application adopts an independent storage environment for the recipe saved in the cloud. This independent environment includes a physically isolated server, a dedicated storage area or a virtualized isolation technology. In addition, the embodiment of the present application also adopts technologies such as desensitized display and encrypted storage. Desensitized display refers to partially hiding or replacing sensitive information when displaying the recipe content to prevent unauthorized personnel from obtaining complete process parameters. Encrypted storage uses advanced encryption algorithms to encrypt recipe data. Even if the data is illegally obtained, its content cannot be read without the decryption key.

[0034] Specifically, if Figure 1 As shown, at step S101, the semiconductor process recipe parameters on the target production equipment are obtained to store the semiconductor process recipe parameters in a cloud database, and the process recipe parameters on the target production equipment are deleted.

[0035] This step involves a variety of technical means, such as direct reading through the data interface of the equipment, using dedicated data acquisition software, or remote acquisition through network protocols. The purpose of acquisition is to store these process recipe parameters in a cloud database. The cloud database can be a distributed database system with high availability, high reliability and powerful data processing capabilities. During the storage process, issues such as data format unification, version control, and association with other related data need to be considered. After storage is completed, delete the process recipe parameters on the target production equipment. This deletion operation is to ensure that sensitive process parameters are not stored on local devices for a long time, thereby reducing the risk of data leakage.

[0036] At step S102, a data security area is configured in the cloud database to perform permission control on the stored process recipe parameters, including data access, data transmission and / or data editing (such as Figure 2 shown).

[0037] This secure area is a comprehensive permission management and control for stored process recipe parameters, including but not limited to data access, data transmission and data editing. Data access control involves mechanisms such as user authentication, role assignment, and access log recording to ensure that only authorized personnel can view or use process recipe parameters. Data transmission control includes measures such as the use of secure network protocols (such as HTTPS), encrypted data transmission, and transmission process monitoring to prevent data from being stolen or tampered with during transmission. Data editing control includes version management, modification review, operation logs and other functions to ensure that any modifications to process recipe parameters are authorized and traceable.

[0038] In step S103, before the production equipment processes the semiconductor, the corresponding process recipe parameters in the cloud database are downloaded to the production equipment, and the process recipe parameters on the production equipment are deleted after the processing is completed.

[0039] The download process needs to consider factors such as network bandwidth, data integrity verification, and compatibility with the equipment control system. After the download is complete, the production equipment can use these parameters for semiconductor processing. It is worth noting that after the processing is completed, the method will delete the process recipe parameters on the production equipment. This "use and delete" strategy further enhances data security and prevents the risks caused by the long-term retention of process parameters on local equipment.

[0040] In addition, the embodiment of the present application also includes: configuring the same model of production equipment to be able to synchronously download and call the corresponding process recipe parameters (such as Figure 3 ). The implementation of this function involves technologies such as equipment grouping management, parameter synchronization mechanism, and equipment status monitoring. This configuration ensures that multiple devices of the same model can use consistent process parameters, thereby improving product consistency and production efficiency. At the same time, this synchronization mechanism also facilitates batch update and management of process parameters. Once the recipe parameters in the cloud are updated, all devices of the same model will automatically synchronize to obtain the latest version to ensure production consistency and traceability. This synchronization mechanism not only improves production efficiency, but also reduces the risk of human operation errors.

[0041] Figure 2A flowchart of a method for securely managing semiconductor process recipe data in the cloud provided in an embodiment of the present application. It should be noted that a dedicated recipe data security area is opened in the cloud in an embodiment of the present application. This security area can be understood as a logically or physically isolated storage space for storing various versions of semiconductor process recipe data. The design of this security area follows the principle of "only in and no out", that is, external data is allowed to be transferred into the storage area, but data is prohibited from being directly transferred out of the storage area. This design effectively prevents unauthorized data leakage and ensures the security of recipe data.

[0042] In order to further enhance security, the embodiments of the present application strictly restrict access to the secure area from the network layer. Specifically, external access to the data in the secure area can only be done through designated applications in the secure area. The "designated applications" here can be understood as specially designed and security-certified software programs that are authorized to run and process data in the secure area. Any external access methods other than these, including but not limited to direct network access, unauthorized application access, etc., will be rejected at the network layer. This multi-level access control mechanism effectively reduces the risk of data being illegally accessed or stolen.

[0043] The embodiment of the present application also introduces a permission-based access control mechanism. By configuring access rights, the system can accurately control which users or roles can access which specific recipe data. This fine-grained permission management ensures that only authorized personnel can access the corresponding data, thereby minimizing the risk of internal leaks. In specific implementations, these access rights can be managed and executed through a permission management system. Users' access rights to different recipe data can be dynamically controlled according to preset rules and policies, including permissions for operations such as reading, modifying, and deleting.

[0044] In terms of data processing, the embodiment of the present application adopts an innovative security strategy. If some calculations need to be performed on the data in the secure area, or different versions of recipes need to be compared, these operations can only be performed in the application in the secure area. The "application in the secure area" here can be understood as a series of predefined security processing programs, which are designed to perform specific data processing tasks in a secure environment. These programs include but are not limited to data analysis tools, version comparison tools, parameter optimization algorithms, etc. By limiting data processing to these controlled environments, the risk of data being leaked or tampered with during processing is greatly reduced.

[0045] Furthermore, the embodiment of the present application has also taken data desensitization measures. External users or systems can only obtain the results of calculation or comparison, and these results are desensitized. Data desensitization refers to the conversion of sensitive data into insensitive forms by technical means such as data transformation and data replacement, while retaining the usefulness of data. In the embodiment of the present application, desensitization includes but is not limited to the following methods: data shielding (such as partially hiding sensitive parameters), data replacement (such as replacing sensitive data with random values ​​or fixed values), data range (such as replacing specific numerical values ​​with range intervals), data normalization (such as mapping data to between 0-1), etc. In this way, even if the processing result is obtained externally, the original sensitive Recipe data cannot be inferred, thereby achieving safe sharing and utilization of data.

[0046] Specifically, Figure 2 As shown, at step S201, based on the configured access rights, the target application in the security area is allowed to access the stored process recipe parameters, and non-preset external access methods in the network layer are rejected. The "target application" can be understood as a specific software program that has been security authenticated and authorized, which is allowed to access and process Recipe data in a strictly controlled environment. "Non-preset external access methods" may include but are not limited to unauthorized network requests, illegal API calls, unauthenticated client access, etc. In this way, the system ensures that only legal and authorized access is allowed, effectively preventing unauthorized data access and potential security threats.

[0047] At step S202, the data security area is configured to allow external data to be transferred into the storage area, and to prohibit data from being directly transferred out of the storage area. The system configures the data security area to allow external data to be transferred into the storage area, but prohibits data from being directly transferred out of the storage area. This "one-way data flow" design concept greatly enhances data security. "Allowing external data to be transferred in" may include but is not limited to operations such as uploading new recipe data, updating existing recipe data, and synchronizing data with external systems. "Prohibiting data from being directly transferred out" means that all data access and extraction must go through predefined security channels and processing procedures, eliminating direct outflow of data. This mechanism effectively prevents data leakage, and also facilitates version control and tracking of data.

[0048] At step S203, the data security area is configured to allow only predefined security processing programs to operate on the data in the storage area, and only output the result data after desensitization or processing. The "predefined security processing program" can be understood as a series of software modules or algorithms that have been security audited and certified, which are designed to perform specific data processing tasks in a secure environment. These programs may include but are not limited to data analysis tools, parameter optimization algorithms, version comparison tools, etc. By limiting only these trusted programs to directly operate on the original data, the system greatly reduces the risk of data abuse or leakage.

[0049] Specifically, the data in the storage area are operated through a predefined security processing program, including: calculating the data in the security area; and / or comparing multiple versions of process recipe parameters. In the specific implementation, the data in the storage area are operated through a predefined security processing program, mainly including two aspects: one is to calculate the data in the security area, and the other is to compare multiple versions of process recipe parameters. Data calculation may involve but is not limited to operations such as parameter optimization, statistical analysis, and performance prediction. These calculation processes are carried out entirely in the security area, and external systems or users cannot directly access the original data. Version comparison may include but is not limited to parameter difference analysis, performance change trend analysis, process improvement effect evaluation, etc. In this way, the system not only ensures the security of the data, but also can make full use of the value of the data to provide strong support for process optimization and decision support.

[0050] Second embodiment

[0051] Figure 3 A schematic diagram of remote collection and distribution of parameters provided in an embodiment of the present application. Recipe parameters refer to a set of parameters and instructions used to control and guide production equipment to perform a specific process. These parameters may include but are not limited to temperature settings, pressure settings, flow settings, time settings, step sequence, etc., which are used to accurately control each link in the production process. Process engineers adjust and optimize these parameters according to actual production needs and process requirements to ensure that products that meet quality standards are produced.

[0052] After the adjustment is completed, the process engineer uploads the parameters through the RMS (Recipe Management System) system and stores them in the database. The RMS system is a software system specifically used to manage and distribute recipe parameters. It provides centralized storage, version control, and permission management functions to ensure the security and traceability of the parameters. After uploading the parameters to the RMS system, the process engineer also deletes the equipment recipe to prevent the parameters from being accidentally modified or abused.

[0053] Next, configure the same model of production equipment to be able to download and call the corresponding process recipe parameters synchronously. The purpose of this step is to achieve remote distribution and sharing of parameters. The so-called same model of production equipment refers to equipment with the same or highly similar hardware configuration and functional characteristics, which can perform the same or similar process. By configuring these devices to be able to download and call synchronously, they can obtain the optimized Recipe parameters from the RMS system without repeated parameter adjustments, thereby improving production efficiency and consistency.

[0054] Create recipes remotely on RMS and download them to the required machines with one click. Remote recipe creation means that process engineers can create new recipe parameter sets in the RMS system through a graphical interface or programming interface without having to go to the site in person. Through the remote distribution function of the RMS system, the created recipe parameters can be downloaded to the specified production equipment at one time to achieve rapid deployment. This remote creation and one-click downloading method greatly simplifies the parameter distribution process and improves work efficiency.

[0055] Finally, the recipe is set to a state that can be shared with other similar equipment. The so-called shareable state means that the recipe parameter set can not only be applied to the current production equipment, but also can be shared with other similar equipment. Other similar equipment can directly run the product without adjusting the recipe again, which means that they can directly use the optimized recipe parameters for production without repeating the parameter adjustment work, thereby further improving production efficiency and product consistency.

[0056] In general, the embodiments of the present application provide a method and system for remotely collecting and distributing parameters, the scope of which includes but is not limited to: adjusting recipe parameters on production equipment; uploading parameters to the RMS system and storing them; configuring devices of the same model to be synchronized for download and call; remotely creating recipes on the RMS and downloading them to a specified device with one click; setting a recipe to be shareable to other devices of the same model. The method and system realize centralized management, remote distribution, and cross-device sharing of recipe parameters, improving production efficiency and product consistency.

[0057] Third embodiment

[0058] Figure 4A schematic block diagram of a management system for semiconductor process recipe parameters provided in an embodiment of the present application. It should be understood that the system shown in the figure is exemplary and non-restrictive. This means that the system architecture involved is not limited to a specific form or design, but is presented as an example. In other words, the architecture shown in the figure can be regarded as a way of expression to clearly describe related concepts and relationships, and does not exclude other forms of architecture. Therefore, when interpreting the architecture in the picture, it should be understood that the model is flexible and diverse, and its purpose is to provide an exemplary description rather than a restrictive provision on a specific form.

[0059] An embodiment of the present application discloses a management system for semiconductor process recipe parameters, including: one or more cloud units 401 and one or more machine-side units 402, wherein the cloud unit 401 is used to configure a data security area to store stored process recipe parameters and / or perform permission management including data access, data transmission and / or data editing, and in response to a request from a production equipment to process a semiconductor, synchronously distribute the stored process recipe parameters to all corresponding production equipment; the machine-side unit 402 is used to upload the configured process recipe parameters to a cloud storage device and delete them locally; send a data request to the cloud storage device before processing the semiconductor to download the corresponding process recipe parameters, and locally delete the process recipe parameters after the processing is completed.

[0060] It is not difficult to find that this embodiment is a system embodiment corresponding to the first embodiment, and this embodiment can be implemented in conjunction with the first embodiment. The relevant technical details mentioned in the first embodiment are still valid in this embodiment, and in order to reduce repetition, they are not repeated here. Accordingly, the relevant technical details mentioned in this embodiment can also be applied in the first embodiment.

[0061] It is worth mentioning that all modules involved in this embodiment are logic modules. In practical applications, a logic unit can be a physical unit, a part of a physical unit, or a combination of multiple physical units. In addition, in order to highlight the innovative part of this application, this embodiment does not introduce units that are not closely related to solving the technical problems proposed by this application, but this does not mean that there are no other units in this embodiment.

[0062] Fourth embodiment

[0063] Furthermore, an embodiment of the present application also provides a semiconductor cloud storage device, including: collecting semiconductor process recipe parameters on one or more production equipment, and configuring a data security area to store the stored process recipe parameters and / or perform permission management including data access, data transmission and / or data editing; remotely deleting the process recipe parameters on the collected production equipment; in response to a request from the production equipment to process semiconductors, synchronously downloading the stored process recipe parameters to all corresponding production equipment, and remotely deleting the process recipe parameters on the production equipment after processing is completed.

[0064] Furthermore, an embodiment of the present application also provides a semiconductor processing equipment, including: uploading the configured process recipe parameters to a cloud storage device and deleting them locally; sending a data request to the cloud storage device before processing the semiconductor to download the corresponding process recipe parameters, and deleting the process recipe parameters locally after the processing is completed.

[0065] In addition, some embodiments of the present application also provide an electronic device. The electronic device may be a digital computer in various forms, such as a laptop computer, a desktop computer, a workbench, a personal digital assistant, a server, a blade server, a mainframe computer, etc. The electronic device may also be a mobile device in various forms, such as a personal digital processing, a cellular phone, a smart phone, a wearable device, and other similar computing devices.

[0066] The electronic device includes: one or more processors; and a memory storing computer program instructions, wherein when the computer program instructions are executed, the processor executes the steps of the method provided in any one or more of the above embodiments. Figure 5 An exemplary structural diagram of the electronic device is disclosed. Figure 5 As shown, the electronic device includes: one or more processors 1101, memory 1102, and interfaces for connecting various components, including high-speed interfaces and low-speed interfaces. The various components are connected to each other using different buses, and can be installed on a common mainboard or installed in other ways as needed. The processor can process instructions executed in the electronic device, including instructions stored in or on the memory to display the graphical information of the GUI on an external input / output device (such as a display device coupled to the interface). In some other embodiments, if necessary, multiple processors and / or multiple buses can be used together with multiple memories and multiple memories. Similarly, multiple electronic devices can be connected, and each device provides some necessary operations (for example, as a server array, a group of blade servers, or a multi-processor system). Among them, the components shown in this article, their connections and relationships, and their functions are only used as examples, and are not intended to limit the implementation of the present application described and / or required herein.

[0067] The electronic device may further include: an input device 1103 and an output device 1104. The processor 1101, the memory 1102, the input device 1103 and the output device 1104 may be connected via a bus or other means. Figure 2 The example of connecting through bus is taken in the following.

[0068] The input device 1103 can receive input digital or character information, and generate key signal input related to the user settings and function control of the electronic device, such as a touch screen, a keypad, a mouse, a track pad, a touch pad, an indicator bar, one or more mouse buttons, a trackball, a joystick and other input devices. The output device 1104 may include a display device, an auxiliary lighting device (e.g., an LED) and a tactile feedback device (e.g., a vibration motor), etc. The display device may include, but is not limited to, a liquid crystal display (LCD), a light emitting diode (LED) display and a plasma display. In some embodiments, the display device may be a touch screen.

[0069] To provide interaction with a user, the electronic device may be a computer. The computer has: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and a pointing device (e.g., a mouse or a trackball), through which the user can provide input to the computer. Other types of devices may also be used to provide interaction with the user; for example, the feedback provided to the user may be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user may be received in any form (including acoustic input, voice input, or tactile input).

[0070] In the embodiments of the present application, a computer program / instruction is stored on a computer-readable medium, and when the computer program / instruction is executed by a processor, the steps of the method provided by any one or more of the above embodiments are implemented. The computer-readable medium may be included in the electronic device described in the above embodiments; or it may exist independently without being assembled into the device. The above computer-readable medium carries one or more computer-readable instructions.

[0071] The memory 1102 can be used as a non-transient computer-readable storage medium, which can be used to store non-transient software programs, non-transient computer executable programs and modules. The processor 1101 executes various functional applications and data processing of the server by running the non-transient software programs, instructions and modules stored in the memory 1102, so as to implement the program instructions / modules corresponding to the method provided by any one or more embodiments in the embodiments of the present application.

[0072] The memory 1102 may include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required for at least one function; the data storage area may store data created according to the use of the electronic device, etc. In addition, the memory 1102 may include a high-speed random access memory, and may also include a non-transient memory, such as at least one disk storage device, a flash memory device, or other non-transient solid-state storage device. In some embodiments, the memory 1102 may optionally include a memory remotely arranged relative to the processor 1101, and these remote memories may be connected to the electronic device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0073] It should be noted that the computer-readable medium described in the present application may be a computer-readable signal medium or a computer-readable storage medium or any combination of the above two. The computer-readable medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared or semiconductor system, device or device, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present application, a computer-readable medium may be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, device or device.

[0074] Computer readable media include permanent and non-permanent, removable and non-removable media, and can be implemented by any method or technology to store information. Information can be computer readable instructions, data structures, modules of programs or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, read-only compact disk (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic tape disk storage or other magnetic storage devices or any other non-transmission medium that can be used to store information that can be accessed by a computing device.

[0075] Computer program code for performing the operations of the present application may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages, such as Java, Smalltalk, C++, and conventional procedural programming languages, such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In cases involving a remote computer, the remote computer may be connected to the user's computer via any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0076] In the above-described embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. For example, it can be implemented by using an application specific integrated circuit (ASIC), a general-purpose computer or any other similar hardware device. In certain embodiments, the software program of the present application can be executed by a processor to implement the above steps or functions. Similarly, the software program of the present application (including relevant data structures) can be stored in a computer-readable recording medium, for example, a RAM memory, a magnetic or optical drive or a floppy disk and similar devices. In addition, some steps or functions of the present application can be implemented by hardware, for example, as a circuit that cooperates with a processor to perform each step or function.

[0077] The computer program product provided in the embodiment of the present application includes one or more computer programs / instructions, and when the computer program / instructions are executed by the processor, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions may be stored in a computer-readable storage medium, or transmitted from a computer-readable storage medium to another computer-readable storage medium, for example, the computer instructions may be transmitted from a website site, a computer, a server or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode to another website site, computer, server or data center. The computer-readable storage medium may be any available medium that a computer can access or a data storage device such as a server or a data center that includes one or more available media integrations. The available medium may be a magnetic medium, (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid state disk (SSD)), etc.

[0078] The flow chart or block diagram in the accompanying drawings shows the possible architecture, function and operation of the equipment, method and computer program product according to various embodiments of the present application. In this regard, each box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flow chart, and the combination of the boxes in the block diagram and / or flow chart can be implemented with a dedicated system for hardware that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0079] The scope of the present application is defined by the appended claims rather than the above description, and it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the present application. Any figure mark in the claims should not be regarded as limiting the claims involved. In addition, it is clear that the word "comprising" does not exclude other units or steps, and the singular does not exclude the plural. Multiple units or devices stated in the device claim may also be implemented by one unit or device through software or hardware. The words "first", "second", etc. are only used to distinguish the description, and do not indicate any particular order, nor can they be understood as indicating or implying relative importance.

[0080] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily mention changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims, and the above embodiments should be regarded as exemplary and non-restrictive.

Claims

1. A method for safely managing semiconductor process recipe parameters, characterized in that: include: Acquire semiconductor process recipe parameters on target production equipment, store the semiconductor process recipe parameters in a cloud database, and delete the process recipe parameters on the target production equipment; Configure a data security area in the cloud database to manage permissions for stored process recipe parameters, including data access, data transmission and / or data editing; Before the production equipment processes the semiconductor, the corresponding process recipe parameters in the cloud database are downloaded to the production equipment, and the process recipe parameters on the production equipment are deleted after the processing is completed.

2. The safety management method according to claim 1, characterized in that: in, The stored process recipe parameters are managed and controlled including data access, data transmission and / or data editing permissions, including: Based on the configured access rights, the target application in the secure area is allowed to access the stored process recipe parameters, and non-preset external access methods in the network layer are denied; The data security area is configured to allow external data to be transferred into the storage area and to prohibit data from being directly transferred out of the storage area; The data security area is configured to allow operations on data in the storage area only through predefined security processing procedures, and only output the result data after desensitization or processing.

3. The safety management method according to claim 2, characterized in that: in, The data in the storage area is operated through predefined security processing procedures, including: Perform calculations on data in the secure area; and / or, Compare multiple versions of process recipe parameters.

4. The safety management method according to claim 1, characterized in that: Among them, it also includes: The production equipment of the same model is configured to be in a state where the corresponding process recipe parameters can be downloaded and called synchronously.

5. A semiconductor cloud storage device using the security management method according to any one of claims 1 to 4, characterized in that: include: Collect semiconductor process recipe parameters on one or more production equipment, and configure a data security area to store the stored process recipe parameters and / or perform permission control including data access, data transmission and / or data editing; Remotely delete the process recipe parameters collected on the production equipment; In response to a request from a production device to process a semiconductor, the stored process recipe parameters are synchronously downloaded to all corresponding production devices, and the process recipe parameters on the production devices are remotely deleted after the processing is completed.

6. A semiconductor processing equipment using the safety management method according to any one of claims 1 to 4, characterized in that: include: Upload the configured process recipe parameters to the cloud storage device and delete them locally; Before processing the semiconductor, a data request is sent to the cloud storage device to download the corresponding process recipe parameters, and the process recipe parameters are deleted locally after the processing is completed.

7. A management system for semiconductor process recipe parameters using the safety management method according to any one of claims 1 to 4, characterized in that: include: One or more cloud units and one or more machine-side units; wherein, The cloud unit is used to configure a data security area to store the stored process recipe parameters and / or perform permission management including data access, data transmission and / or data editing, and in response to a request from a production device to process a semiconductor, synchronously distribute the stored process recipe parameters to all corresponding production devices; The machine end unit is used to upload the configured process recipe parameters to the cloud storage device and delete them locally; before processing the semiconductor, a data request is sent to the cloud storage device to download the corresponding process recipe parameters, and the process recipe parameters are deleted locally after the processing is completed.

8. An electronic device, comprising: one or more processors; and a memory storing computer program instructions, which, when executed, cause the processor to perform the method according to any one of claims 1 to 4.

Images