Wafer adsorption rotary carrying table with dust collection function

Abstract

The invention relates to a wafer adsorption rotary carrying table with a dust collection function, which comprises an adsorption upper jig plate, a carrying table adapter plate, a DD motor, a motor bottom plate and an adsorption lower jig plate, and is characterized in that the adsorption upper jig plate and the adsorption lower jig plate are sequentially mounted on the carrying table adapter plate from top to bottom, and the DD motor mounted on the motor bottom plate drives the carrying table adapter plate above to rotate; notches are formed in one side of the adsorption upper jig plate and one side of the adsorption lower jig plate, and a side pushing positioning mechanism matched with the notches is arranged on the left side of the motor bottom plate; a dust collection assembly is arranged at the bottom of the motor bottom plate. Due to the integrated design of adsorption, rotation and dust collection, the occupied volume of the equipment is small. And reliability: mechanical vacuum adsorption provides stable adsorption force, so that the stability of the wafer in the processing process can be ensured. And universality: the method is suitable for wafers of different sizes and types, and the flexibility is high.

Description

Technical Field

[0001] The present invention relates to the technical field related to semiconductor processing, and in particular to a wafer adsorption rotating carrier with dust collection function. Background Art

[0002] Silicon and silicon carbide are raw materials for manufacturing semiconductor silicon devices and can be used to make wafers. They are the pillars of the contemporary information technology industry. They are also green and environmentally friendly, and have very broad prospects in the future, making wafer processing and production a popular industry in the semiconductor industry. With the continuous development and innovation of technology in the semiconductor industry, customers' demands for single machines are also diversified. This patent can be used for adsorption of silicon wafers and silicon carbide to meet micro-processing needs such as special-shaped cutting and drilling.

[0003] Wafer adsorption technology is a seemingly insignificant but crucial link. Whether it is etching, deposition or lithography, the wafer must be stably and accurately fixed in the correct position to ensure efficient chip production. Usually we will choose to install a dust extraction device outside the rotating stage assembly, because the rotating stage itself is relatively complex and there is no space to integrate a dust extraction device.

[0004] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a wafer adsorption rotating carrier with dust collection to make it more valuable for industrial use. Summary of the invention

[0005] In order to solve any of the above technical problems, the purpose of the present invention is to provide a wafer adsorption rotating carrier with dust collection.

[0006] To achieve the above object, the present invention adopts the following technical solution:

[0007] The wafer adsorption rotating stage with dust collection includes an adsorption upper fixture plate, a stage adapter plate, a DD motor, a motor bottom plate and an adsorption lower fixture plate. The adsorption upper fixture plate and the adsorption lower fixture plate are sequentially installed on the stage adapter plate from top to bottom. The DD motor installed on the motor bottom plate drives the upper stage adapter plate to rotate.

[0008] A notch is provided on one side of the upper adsorption jig plate and the lower adsorption jig plate, and a side push positioning mechanism adapted to the notch is provided on the left side of the motor bottom plate;

[0009] A dust collecting assembly is arranged at the bottom of the motor base plate, and the dust collecting assembly includes a first dust collecting pipe, a second dust collecting pipe and a bellows adapter flange. The first dust collecting pipe is installed at the bottom of the motor base plate through the dust collecting adapter plate, and the second dust collecting pipe is installed at the bottom of the motor base plate through the air pipe limit block and the dust collecting reinforcement block. The top of the first dust collecting pipe is connected to the dust collecting port at the bottom of the carrier adapter plate, the bottom of the first dust collecting pipe is connected to the first side of the second dust collecting pipe, and the second side of the second dust collecting pipe is connected to the bellows adapter flange through the universal dust collecting conversion block.

[0010] As a further improvement of the present invention, a sealing block is installed in the carrier adapter plate by means of captive screws.

[0011] As a further improvement of the present invention, a left photoelectric sensor is installed on the left side of the motor base plate through a left sensor mounting block, a right photoelectric sensor is installed on the right side of the motor base plate through a right sensor mounting block, and a photoelectric sensing sheet compatible with the left photoelectric sensor and the right photoelectric sensor is installed on the carrier adapter plate.

[0012] As a further improvement of the present invention, the side push positioning mechanism includes a cylinder mounting plate installed on the motor base plate, and a pneumatic slide is installed on the cylinder mounting plate. The pneumatic slide drives the upper product positioning block to move in the left and right directions.

[0013] As a further improvement of the present invention, the cylinder mounting plate is locked on the motor base plate by a positioning block on one side.

[0014] As a further improvement of the present invention, the bearing fixing plate is mounted on the driving end of the pneumatic slide, and the product positioning block is connected to the bearing on the bearing fixing plate through a plurality of guide columns.

[0015] As a further improvement of the present invention, at least one elastic connecting member is installed between the product positioning block and the bearing fixing plate.

[0016] As a further improvement of the present invention, the elastic connecting member is a spring.

[0017] By means of the above scheme, the present invention has at least the following advantages:

[0018] 1. High integration: integrated design of adsorption, rotation and dust collection, and small equipment footprint.

[0019] 2. Reliability: Mechanical vacuum adsorption provides stable adsorption force to ensure the stability of the wafer during processing.

[0020] 3. Versatility: Suitable for wafers of different sizes and types, with high flexibility.

[0021] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0023] Figure 1 It is a structural schematic diagram of a wafer adsorption rotating carrier with dust collection of the present invention;

[0024] Figure 2 yes Figure 1 Schematic diagram of the structure of the middle belt product;

[0025] Figure 3 yes Figure 1 A schematic diagram of the structure of the middle side push positioning mechanism;

[0026] Figure 4 yes Figure 1 Schematic diagram of the bottom structure.

[0027] The meanings of the various reference numerals in the figures are as follows.

[0028] Sealing block 1, captive screws 2, product 3, upper adsorption fixture plate 4, stage adapter plate 5, DD motor 6, side push positioning mechanism 7, left photoelectric sensor 8, left sensor mounting block 9, motor base plate 10, notch 11, photoelectric sensor sheet 12, lower adsorption fixture plate 13, right sensor mounting block 14, right photoelectric sensor 15, product positioning block 16, elastic connector 17, bearing fixing plate 18, bearing 19, guide column 20, pneumatic slide 21, first air pipe joint 22, cylinder mounting plate 23, positioning block 24, second air pipe joint 25, dust collection adapter plate 26, first dust collection pipe 27, air pipe limit block 28, dust collection reinforcement block 29, second dust collection pipe 30, universal dust collection conversion block 31, bellows adapter flange 32. DETAILED DESCRIPTION

[0029] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0030] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present invention, rather than all the embodiments. The components of the embodiment of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the present invention provided in the drawings is not intended to limit the scope of the invention claimed for protection, but merely represents the selected embodiment of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.

[0031] like Figure 1 to Figure 4 As shown, a wafer adsorption rotating stage with dust collection includes an adsorption upper fixture plate 4, a stage adapter plate 5, a DD motor 6, a motor base plate 10 and an adsorption lower fixture plate 13. The adsorption upper fixture plate 4 and the adsorption lower fixture plate 13 are sequentially installed on the stage adapter plate 5 from top to bottom, and the DD motor 6 installed on the motor base plate 10 drives the upper stage adapter plate 5 to rotate. A sealing block 1 is installed in the stage adapter plate 5 through a captive screw 2.

[0032] A notch 11 is provided on one side of the upper adsorption jig plate 4 and the lower adsorption jig plate 13 , and a side push positioning mechanism 7 adapted to the notch 11 is provided on the left side of the motor bottom plate 10 .

[0033] The side push positioning mechanism 7 includes a cylinder mounting plate 23 mounted on the motor base plate 10, and the cylinder mounting plate 23 is locked on the motor base plate 10 through a positioning block 24 on one side. A pneumatic slide 21 is mounted on the cylinder mounting plate 23, and the pneumatic slide 21 drives the upper product positioning block 16 to move in the left and right directions.

[0034] The bearing fixing plate 18 is mounted on the driving end of the pneumatic slide 21, and the product positioning block 16 is connected to the bearing 19 on the bearing fixing plate 18 through a plurality of guide columns 20. At least one elastic connector 17 is also installed between the product positioning block 16 and the bearing fixing plate 18, and the elastic connector 17 is a spring.

[0035] A dust collecting assembly is provided at the bottom of the motor base plate 10, and the dust collecting assembly includes a first dust collecting pipe 27, a second dust collecting pipe 30 and a bellows adapter flange 32. The first dust collecting pipe 27 is installed at the bottom of the motor base plate 10 through the dust collecting adapter plate 26, and the second dust collecting pipe 30 is installed at the bottom of the motor base plate 10 through the air pipe limit block 28 and the dust collecting reinforcement block 29. The top of the first dust collecting pipe 27 is connected to the dust collecting port at the bottom of the carrier adapter plate 5, the bottom of the first dust collecting pipe 27 is connected to the first side of the second dust collecting pipe 30, and the second side of the second dust collecting pipe 30 is connected to the bellows adapter flange 32 through the universal dust collecting conversion block 31.

[0036] A left photoelectric sensor 8 is installed on the left side of the motor base plate 10 through the left sensor mounting block 9, and a right photoelectric sensor 15 is installed on the right side of the motor base plate 10 through the right sensor mounting block 14. A photoelectric sensing sheet 12 compatible with the left photoelectric sensor 8 and the right photoelectric sensor 15 is installed on the stage adapter plate 5.

[0037] The installation structure of the present invention:

[0038] The sealing block 1 is installed on the stage adapter plate 5 by the captive screws 2, and the upper adsorption fixture plate 4 is assembled on the lower adsorption fixture plate 13 by screws. There is a flatness of 1 thread and a smoothness of 1.6 between the plates, and there will be no air leakage. They are fixed together on the stage adapter plate 5. The stage adapter plate 5 is connected to the DD motor 6 by screws, and the left photoelectric sensor 8 is fixed on the left sensor mounting block 9. Similarly, the right photoelectric sensor 15 is fixed on the right sensor mounting block 14, and they are fixed together on the motor base plate 10. The photoelectric sensor sheet 12 is fixed on the stage adapter plate 5, and the DD motor 6 is fixed on the motor base plate 10.

[0039] The side push positioning mechanism 7 includes the following parts: the product positioning block 16 is connected to the guide column 20, the bearing 19 is fixed to the bearing fixing plate 18 by a top screw, and has a precise guiding effect on the product positioning block 16 and the guide column 20, the bearing fixing plate 18 is connected to the sliding end of the pneumatic slide 21, the first air pipe joint 22 is fixed to the pneumatic slide 21, and the whole is connected to the cylinder mounting plate 23. The elastic connector 17 is installed between the product positioning block 16 and the bearing fixing plate 18. When the signal is given, the cylinder moves in the left and right directions, the bearing has a precise guiding effect on the guide column, and the spring can make the product positioning block 16 flexibly press the product without damaging the product.

[0040] The second air pipe joint 25 is fixed on the stage adapter plate 5, the first dust collecting pipe 27 is fixed on the dust collecting adapter plate 26, the air pipe limit block 28 is fixed on the motor bottom plate 10, the dust collecting reinforcement block 29 holds 30 the second dust collecting pipe 30, the second dust collecting pipe 30 is connected to the dust collecting adapter plate 26, the universal dust collecting conversion block 31 is connected to the second dust collecting pipe 30, and the bellows adapter flange 32 is connected to the universal dust collecting conversion block 31, and is directly connected to the bellows. The dust collecting fan is connected to the bellows here to extract dust.

[0041] The working principle of the present invention is briefly described as follows:

[0042] Click the adsorption command, and the rotating stage assembly creates a negative pressure environment through the vacuum generator. The vacuum generator is used to extract air from the adsorption area to reduce the pressure and create a vacuum area between the wafer (i.e., product 3) and the adsorption fixture. The sealing block can ensure the sealing of the adsorption area to prevent outside air from entering. This can generate enough suction to stably adsorb the wafer. The notch direction of the wafer is determined by the imaging system, and the DD motor rotates to reach the direction required for processing. This fixture adopts a hollow middle method, and the dust and debris generated by the processing will fall below. The synchronous dust collection fan is started and connected to the adapter flange through a bellows to remove the dust and debris generated by the processing. In addition, a dust collection and air release groove is opened on the surface of the fixture to prevent the product from being deformed by suction.

[0043] The invention has high integration, integrated design of adsorption, rotation and dust collection, and small equipment volume. It has good reliability, and mechanical vacuum adsorption provides stable adsorption force to ensure the stability of wafers during processing. It has good versatility and is suitable for wafers of different sizes and types, with high flexibility.

[0044] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implying the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0045] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principles of the present invention, and these improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A wafer adsorption rotating carrier with dust collection, comprising an adsorption upper fixture plate (4), a carrier adapter plate (5), a DD motor (6), a motor base plate (10) and an adsorption lower fixture plate (13), wherein the adsorption upper fixture plate (4) and the adsorption lower fixture plate (13) are sequentially mounted on the carrier adapter plate (5) from top to bottom, and the DD motor (6) mounted on the motor base plate (10) drives the upper carrier adapter plate (5) to rotate; characterized in that: A notch (11) is provided on one side of the upper adsorption jig plate (4) and the lower adsorption jig plate (13), and a side push positioning mechanism (7) adapted to the notch (11) is provided on the left side of the motor base plate (10); a dust collecting assembly is provided at the bottom of the motor base plate (10), and the dust collecting assembly comprises a first dust collecting pipe (27), a second dust collecting pipe (30) and a bellows adapter flange (32); the first dust collecting pipe (27) is installed on the motor base plate (10) through a dust collecting adapter plate (26). The bottom of the base plate (10), the second dust collecting pipe (30) is installed at the bottom of the motor base plate (10) through the air pipe limit block (28) and the dust collecting reinforcement block (29), the top of the first dust collecting pipe (27) is connected to the dust collecting port at the bottom of the carrier adapter plate (5), the bottom of the first dust collecting pipe (27) is connected to the first side of the second dust collecting pipe (30), and the second side of the second dust collecting pipe (30) is connected to the bellows adapter flange (32) through the universal dust collecting conversion block (31).

2. The wafer adsorption rotating stage with dust collection as claimed in claim 1, characterized in that: A sealing block (1) is installed in the carrier adapter plate (5) via captive screws (2).

3. The wafer adsorption rotating stage with dust collection as claimed in claim 1, characterized in that: A left photoelectric sensor (8) is installed on the left side of the motor base plate (10) via a left sensor mounting block (9), a right photoelectric sensor (15) is installed on the right side of the motor base plate (10) via a right sensor mounting block (14), and a photoelectric sensing sheet (12) adapted to the left photoelectric sensor (8) and the right photoelectric sensor (15) is installed on the stage adapter plate (5).

4. The wafer adsorption rotating stage with dust collection as claimed in claim 1, characterized in that: The side push positioning mechanism (7) comprises a cylinder mounting plate (23) mounted on a motor base plate (10), a pneumatic slide (21) being mounted on the cylinder mounting plate (23), and the pneumatic slide (21) driving an upper product positioning block (16) to move in a left-right direction.

5. The wafer adsorption rotating stage with dust collection as claimed in claim 4, characterized in that: The cylinder mounting plate (23) is locked on the motor base plate (10) via a positioning block (24) on one side.

6. The wafer adsorption rotating stage with dust collection as claimed in claim 4, characterized in that: The bearing fixing plate (18) is mounted on the driving end of the pneumatic slide table (21), and the product positioning block (16) is connected to the bearing (19) on the bearing fixing plate (18) through a plurality of guide columns (20).

7. The wafer adsorption rotating stage with dust collection as claimed in claim 6, characterized in that: At least one elastic connecting piece (17) is also installed between the product positioning block (16) and the bearing fixing plate (18).

8. The wafer adsorption rotating stage with dust collection as claimed in claim 7, characterized in that: The elastic connecting member (17) is a spring.

Images