Molecular pump identification circuit and molecular pump

Abstract

The invention relates to the technical field of molecular pumps, and discloses a molecular pump identification circuit and a molecular pump, the molecular pump identification circuit is connected with a control module, the molecular pump identification circuit comprises a pulse output device and an energy storage device, and the pulse output device is connected with a preset reference voltage, the control module and the energy storage device; the pulse output device is used for sending the electric energy of the preset reference voltage to the energy storage device for storage and discharging the electric energy of the energy storage device; the energy storage device is used for charging and discharging and sending an energy storage voltage signal to the pulse output device; and the pulse output device is further used for receiving the energy storage voltage signal, comparing the energy storage voltage signal with a preset voltage signal, and outputting pulse signals with different frequencies according to a comparison result, so that the control module identifies the model of the molecular pump according to the frequencies. The problem that limited recognition types exist when a divider resistor is used for recognizing the magnetic suspension molecular pump is solved.

Description

Technical Field

[0001] The invention relates to the technical field of molecular pumps, and in particular to a molecular pump identification circuit and a molecular pump. Background Art

[0002] The resistor voltage-dividing model identification technology currently used in the magnetic levitation molecular pump control board has the advantages of simple operation, low cost and high reliability, but its limitations are becoming more and more prominent in the face of increasingly complex market demands. This technology is based on the preset specific resistance resistors in different pump models, and distinguishes the models by measuring their voltage-dividing values ​​at 3.3V voltage. However, in the context of pursuing high precision (such as the 0.1V resolution initially envisioned), the types of models that can be identified are strictly limited to only 33. More importantly, when we take into account realistic factors such as small errors in the resistor manufacturing process, small fluctuations in the power supply voltage, and the accuracy limitations of the measuring equipment, in order to ensure the accuracy of identification, the resolution has to be relaxed to 0.15V. This adjustment directly leads to a significant reduction in the number of models that can be accurately identified to 21. Obviously, this number is far from meeting the diversified and refined model requirements that may emerge in the future in the magnetic levitation molecular pump market.

[0003] With the advancement of technology and changes in market demand, magnetic levitation molecular pumps are developing in a more diversified direction, not only covering products of different specifications (such as caliber, pumping speed, rotation speed, vacuum degree), but also requiring functional customization according to the special needs of different industries and manufacturers. In this context, the current model identification scheme based on resistance voltage division is obviously inadequate and difficult to meet the dual high standards of breadth and accuracy in actual application scenarios. In order to meet this challenge, we urgently need to explore and develop more efficient, flexible and accurate model identification technology to ensure that magnetic levitation molecular pumps can adapt to the rapid development and diversified needs of the future market. Summary of the invention

[0004] In view of this, the present invention provides a molecular pump identification circuit and a molecular pump to solve the problem of limited identification types in the prior art of identifying a magnetic suspension molecular pump through a voltage divider resistor.

[0005] In a first aspect, the present invention provides a molecular pump identification circuit, the molecular pump identification circuit is connected to a control module, the molecular pump identification circuit comprises: a pulse output device and an energy storage device, the pulse output device is respectively connected to a preset reference voltage, the control module and the energy storage device;

[0006] The pulse output device is used to send the electric energy of the preset reference voltage to the energy storage device for storage, and discharge the electric energy of the energy storage device;

[0007] The energy storage device is used for charging and discharging, and sends the energy storage voltage signal to the pulse output device;

[0008] The pulse output device is also used to receive the energy storage voltage signal, and compare the energy storage voltage signal with a preset voltage signal, and output pulse signals of different frequencies according to the comparison result, so that the control module can identify the model of the molecular pump according to the frequency.

[0009] The molecular pump identification circuit provided by the present invention has a pulse output device for controlling the charging of the energy storage device and controlling the discharging of the energy storage device. The energy storage device performs charging and discharging operations. At the same time, the pulse output device obtains the energy storage voltage signal of the energy storage device, and compares the energy storage voltage signal with the preset voltage signal, and switches the output frequency of the high level and the low level according to the comparison result to output pulse signals of different frequencies. The pulse output device and the energy storage device can constitute a multivibrator, thereby generating self-excited oscillations during the charging and discharging process of the energy storage device and outputting periodic rectangular pulse signals. The control module identifies the model of the molecular pump according to the frequency of the pulse signal.

[0010] In an optional implementation, the preset voltage signal includes: a first preset voltage signal and a second preset voltage signal, and the pulse output device includes:

[0011] a pulse output module, the pulse output module being connected to the control module, and being used to output a charging signal and a high-level pulse signal to the control module when detecting that the energy storage voltage signal is lower than the first preset voltage signal, and to output a discharging signal and a low-level pulse signal to the control module when detecting that the energy storage voltage signal is higher than the second preset voltage signal;

[0012] A charge and discharge control module, wherein the charge and discharge control module is respectively connected to the pulse output module, the preset reference voltage and the energy storage device, and the charge and discharge control module is used to receive the charging signal and charge the energy storage device based on the preset reference voltage, and to receive the discharging signal and discharge the electric energy of the energy storage device.

[0013] In an optional implementation, the pulse output module includes:

[0014] a first comparison unit, the first comparison unit being connected to the energy storage device, and being used for receiving the energy storage voltage signal, comparing the energy storage voltage signal with a first preset voltage signal, and outputting a first comparison result;

[0015] a second comparison unit, the second comparison unit being connected to the energy storage device, and configured to receive the energy storage voltage signal, compare the energy storage voltage signal with a second preset voltage signal, and output a second comparison result;

[0016] An RS trigger, wherein the RS trigger is connected to the first comparison unit, the second comparison unit and the control module respectively, and is used to receive the first comparison result and the second comparison result, and switch to output a high-level pulse signal and a low-level pulse signal according to the first comparison result and the second comparison result, so as to output a high-level pulse signal when the energy storage voltage signal is lower than the first preset voltage signal, and output a low-level pulse signal when the energy storage voltage signal is higher than the second preset voltage signal;

[0017] A discharge unit, wherein the discharge unit is connected to the energy storage device and the RS trigger respectively, and is used to output a discharge signal and a charge signal to a charge and discharge control module.

[0018] In an optional implementation, the charge and discharge control module includes:

[0019] a first resistor, wherein a first end of the first resistor is connected to a preset reference voltage, and a second end of the first resistor is connected to the pulse output module;

[0020] A second resistor, wherein a first end of the second resistor is connected to a second end of the first resistor, and a second end of the second resistor is connected to the pulse output module.

[0021] In an optional implementation, the energy storage device is a first capacitor, wherein the first capacitor is a chip capacitor.

[0022] In an optional implementation, the energy storage device further includes:

[0023] A temperature compensation module is connected to the first capacitor and is used to stabilize the frequency of the pulse output by the pulse output device.

[0024] In an optional implementation, the temperature compensation module includes:

[0025] A thermistor is connected in parallel with the first capacitor.

[0026] In an optional implementation, the pulse output device further includes:

[0027] a second capacitor, wherein a first end of the second capacitor is connected to the preset reference voltage, and a second end of the second capacitor is grounded;

[0028] A third resistor, wherein a first end of the third resistor is connected to the preset reference voltage, and a second end of the third resistor is connected to the pulse output module.

[0029] In a second aspect, the present invention provides a molecular pump, which includes the molecular pump identification circuit as above, the molecular pump includes a pump body and a control board, the pulse output device is arranged on the control board, and the energy storage device is arranged on the pump body, and the energy storage device and the pulse output device are connected by a wire.

[0030] In an optional implementation, a shielding cover is provided outside the pulse output device, and the conducting wire is a shielded wire. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 is a structural diagram of a molecular pump identification circuit according to an embodiment of the present invention;

[0033] Figure 2 is a structural diagram of a pulse output device in a molecular pump identification circuit according to an embodiment of the present invention;

[0034] Figure 3 is a structural diagram of another molecular pump identification circuit according to an embodiment of the present invention;

[0035] Figure 4 is a structural diagram of another molecular pump identification circuit according to an embodiment of the present invention;

[0036] Figure 5 4 is a structural diagram of yet another molecular pump identification circuit according to an embodiment of the present invention.

[0037] Description of Figure Numbers: DETAILED DESCRIPTION

[0038] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0040] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, it can also be the internal connection of two components, it can be a wireless connection, or it can be a wired connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0042] The resistor voltage-dividing model identification technology currently used in the magnetic levitation molecular pump control board has the advantages of simple operation, low cost and high reliability, but its limitations are becoming more and more prominent in the face of increasingly complex market demands. This technology is based on the preset specific resistance resistors in different pump models, and distinguishes the models by measuring their voltage-dividing values ​​at 3.3V voltage. However, in the context of pursuing high precision (such as the 0.1V resolution initially envisioned), the types of models that can be identified are strictly limited to only 33. More importantly, when we take into account realistic factors such as small errors in the resistor manufacturing process, small fluctuations in the power supply voltage, and the accuracy limitations of the measuring equipment, in order to ensure the accuracy of identification, the resolution has to be relaxed to 0.15V. This adjustment directly leads to a significant reduction in the number of models that can be accurately identified to 21. Obviously, this number is far from meeting the diversified and refined model requirements that may emerge in the future in the magnetic levitation molecular pump market.

[0043] With the advancement of technology and changes in market demand, magnetic levitation molecular pumps are developing in a more diversified direction, not only covering products of different specifications (such as caliber, pumping speed, rotation speed, vacuum degree), but also requiring functional customization according to the special needs of different industries and manufacturers. In this context, the current model identification scheme based on resistance voltage division is obviously inadequate and difficult to meet the dual high standards of breadth and accuracy in actual application scenarios. In order to meet this challenge, we urgently need to explore and develop more efficient, flexible and accurate model identification technology to ensure that magnetic levitation molecular pumps can adapt to the rapid development and diversified needs of the future market.

[0044] In this regard, a molecular pump identification circuit is provided in this embodiment, such as Figure 1 As shown, the molecular pump identification circuit includes:

[0045] The molecular pump identification circuit is connected to the control module, and the molecular pump identification circuit includes: a pulse output device 10 and an energy storage device 20, wherein the pulse output device 10 is connected to a preset reference voltage VDD, the control module and the energy storage device 20 respectively;

[0046] The pulse output device 10 is used to send the electric energy of the preset reference voltage VDD to the energy storage device 20 for storage, and discharge the electric energy of the energy storage device 20;

[0047] The energy storage device 20 is used for charging and discharging, and sends the energy storage voltage signal to the pulse output device 10;

[0048] The pulse output device 10 is also used to receive the energy storage voltage signal, and compare the energy storage voltage signal with a preset voltage signal, and output pulse signals of different frequencies according to the comparison result, so that the control module can identify the model of the molecular pump according to the frequency.

[0049] Specifically, the control module can be a molecular pump motherboard. The pulse output device 10 is used to control the charging of the energy storage device 20 and the discharge of the energy storage device 20. The energy storage device 20 performs charging and discharging operations. At the same time, the pulse output device 10 obtains the energy storage voltage signal of the energy storage device 20, and compares the energy storage voltage signal with the preset voltage signal, and switches the output frequency of the high level and the low level according to the comparison result to output pulse signals of different frequencies. The pulse output device 10 and the energy storage device 20 can constitute a multivibrator, thereby generating self-excited oscillations during the charging and discharging process of the energy storage device 20, and outputting periodic rectangular pulse signals. The control module identifies the model of the molecular pump according to the frequency of the pulse signal.

[0050] Optionally, the pulse output device 10 may be self-oscillating, without the need for an external input signal, or may be powered by an external input signal.

[0051] In some optional embodiments, Figure 2 As shown, the pulse output device 10 includes:

[0052] A pulse output module 11, the pulse output module 11 is connected to the control module, and the pulse output module is used to output a charging signal and a high-level pulse signal to the control module when it detects that the energy storage voltage signal is lower than the first preset voltage signal, and to output a discharging signal and a low-level pulse signal to the control module when it detects that the energy storage voltage signal is higher than the second preset voltage signal;

[0053] A charge and discharge control module 12, wherein the charge and discharge control module 12 is respectively connected to the pulse output module 11, the preset reference voltage VDD and the energy storage device 20, and the charge and discharge control module 12 is used to receive a charging signal, and charge the energy storage device 20 based on the preset reference voltage VDD, and receive the discharge signal, and discharge the electrical energy of the energy storage device.

[0054] Specifically, if the pulse output module 11 detects that the energy storage voltage signal is lower than the first preset voltage signal, it outputs a high-level pulse signal to the control module, and at the same time outputs a charging signal to the charge and discharge control module 12. The charge and discharge control module 12 charges the energy storage device 20 based on the preset reference voltage VDD. During the charging process, if the pulse output module 11 detects that the energy storage voltage signal is higher than the second preset voltage signal, it outputs a low-level pulse signal to the control module, and at the same time outputs a discharge signal to the charge and discharge control module 12. After receiving the discharge signal, the charge and discharge control module 12 discharges the electric energy of the energy storage device 20. In this way, charging and discharging are cyclically performed and high-level pulse signals and low-level pulse signals are output.

[0055] In some optional embodiments, Figure 4 As shown, the pulse output module 11 includes:

[0056] A first comparison unit A1, which is connected to the energy storage device 20, and is used to receive the energy storage voltage signal, compare the energy storage voltage signal with a first preset voltage signal, and output a first comparison result;

[0057] A second comparison unit A2, the second comparison unit A2 is connected to the energy storage device 20, and is used to receive the energy storage voltage signal, compare the energy storage voltage signal with a second preset voltage signal, and output a second comparison result;

[0058] An RS trigger U1, the RS trigger U1 is connected to the first comparison unit A1, the second comparison unit A2 and the control module respectively, and is used to receive the first comparison result and the second comparison result, and switch to output a high-level pulse signal and a low-level pulse signal according to the first comparison result and the second comparison result, so as to output a high-level pulse signal when the energy storage voltage signal is lower than the first preset voltage signal, and output a low-level pulse signal when the energy storage voltage signal is higher than the second preset voltage signal;

[0059] The discharge unit Q1 is connected to the energy storage device 20 and the RS trigger respectively, and is used to output a discharge signal and a charge signal to the charge and discharge control module.

[0060] Specifically, the first comparison unit A1 and the second comparison unit A2 can be both comparators, the first input end of the first comparison unit A1 is connected to the energy storage device 20 and the charge and discharge control module 12 respectively, and the second input end of the first comparison unit A1 is connected to the first preset voltage signal. The first input end of the second comparison unit A2 is connected to the energy storage device 20 and the charge and discharge control module 12 respectively, and the second input end of the second comparison unit A2 is connected to the second preset voltage signal.

[0061] refer to Figure 3 , the first end of the fourth resistor R4 is connected to the preset reference voltage VDD, the second end of the fourth resistor R4 is respectively connected to the second input end of the first comparison unit A1 and the first end of the fifth resistor R5, the second end of the fifth resistor R5 is respectively connected to the second input end of the second comparison unit A2 and the first end of the sixth resistor R6, and the second end of the sixth resistor R6 is grounded. Thus, the first preset voltage signal is provided to the second input end of the first comparison unit A1, and the second preset voltage signal is provided to the second input end of the second comparison unit A2.

[0062] Specifically, when the first comparison unit A1 detects that the energy storage voltage signal is lower than the first preset voltage signal, the first comparison unit A1 outputs a high level to the RS trigger U1. At this time, the second comparison unit A2 detects that the energy storage voltage signal is not higher than the second preset voltage signal, and the second comparison unit A2 outputs a low level to the RS trigger U1. At this time, the RS trigger U1 outputs a high level pulse signal to the control module.

[0063] Specifically, the second comparison unit A2 detects that the energy storage voltage signal is higher than the second preset voltage signal, and the second comparison unit A2 outputs a high level to the RS trigger U1. At this time, the first comparison unit A1 detects that the energy storage voltage signal is not lower than the first preset voltage signal, and the first comparison unit A1 outputs a low level to the RS trigger U1. At this time, the RS trigger U1 outputs a low level pulse signal to the control module. In other words, the high level pulse signal and the low level pulse signal are alternately output through the RS trigger U1.

[0064] In addition, the pulse output module 11 also includes an inverter NOT, which converts the high-level pulse signal output by the RS trigger U1 into a low-level pulse signal and outputs it to the control module, and converts the low-level pulse signal output by the RS trigger U1 into a high-level pulse signal and outputs it to the control module.

[0065] Specifically, the discharge unit Q1 can be a discharge tube, such as a triode, etc. When the RS trigger U1 outputs a high-level pulse signal, the discharge unit Q1 is turned off, thereby outputting a charging signal to the charge and discharge control module 12; when the RS trigger U1 outputs a low-level pulse signal, the discharge unit Q1 is turned on, thereby outputting a discharge signal to the charge and discharge control module 12.

[0066] In some optional embodiments, Figure 3 As shown, the charge and discharge control module 12 includes:

[0067] A first resistor R1, wherein a first end of the first resistor R1 is connected to a preset reference voltage VDD, and a second end of the first resistor R1 is connected to the pulse output module 11;

[0068] A second resistor R2 , wherein a first end of the second resistor R2 is connected to a second end of the first resistor R1 , and a second end of the second resistor R2 is connected to the pulse output module 11 .

[0069] Specifically, refer to Figure 3 When the discharge unit Q1 is turned off, a charging signal is output to the charge and discharge control module 12. At this time, the voltage of the preset reference voltage VDD charges the energy storage device 20 through the first resistor R1 and the second resistor R2. When the discharge unit Q1 is turned on, a discharge signal is output to the charge and discharge control module 12. At this time, the voltage of the preset reference voltage VDD is grounded through the first resistor R1, so that the energy storage device 20 discharges.

[0070] In some optional embodiments, Figure 3 As shown, the energy storage device 20 is a first capacitor C1, wherein the first capacitor C1 is a chip capacitor.

[0071] Specifically, the first capacitor C1 can be a separately arranged device. The first capacitor C1 is a chip capacitor. The chip capacitor is based on the characteristics of small size and light weight, thereby reducing the size of the molecular pump identification circuit. In addition, it has good high-frequency characteristics and has good electrical performance at high frequencies; it has high precision and high stability, and can meet the needs of precision instruments and equipment; it is easy to automate production, which greatly improves production efficiency and reduces production costs; it has strong environmental adaptability, has good temperature resistance, moisture resistance and corrosion resistance, and meets the needs of various application scenarios; low cost, one of the most cost-effective components in electronic design, has been widely used in the electronics industry. At the same time, more importantly, there are many kinds of capacitor values, which are divided into picofarad (pF) level, nanofarad (nF), microfarad (μF) level, millifarad (mF), and farad (F) level. The conversion relationship is: 1 Farad (F) = 1000 millifarad (mF), 1 millifarad (mF) = 1000 microfarad (μF), 1 microfarad (μF) = 1000 nanofarad (nF), 1 nanofarad (nF) = 1000 picofarad (pF). There are a wide range of capacitors with various capacitance values ​​on the market, such as 1pF, 10pF, 100pF, 220pF, 470pF, 1nF, 10nF, 100nF, 220nF, 470nF, 1μF, 2.2μF, 4.7μF, 10μF, 22μF, 47μF, 100μF, etc. Therefore, in the circuit, different capacitance values ​​can be matched externally to obtain the corresponding output frequency, thereby determining the identified pump model, and ultimately achieving the recognition of hundreds or thousands of models, greatly expanding the type recognition of molecular pumps and achieving a breakthrough in magnitude.

[0072] refer to Figure 4 The pulse output module 11 may be an integrated chip, which includes a first comparison unit A1, a second comparison unit A2, an RS trigger U1, a discharge unit Q1 and an inverter NOT. The pulse output module 11 may be a SE555DR chip. Figure 4 OUT in the figure is the pulse signal output terminal.

[0073] It should be noted that the first preset voltage signal is a voltage of one-third of the capacity of the first capacitor C1, and the second preset voltage signal is a voltage of two-thirds of the capacity of the first capacitor C1. The pulse frequency output by the pulse output device can be adjusted by changing the combination of the first resistor R1 and / or the second resistor R2 and the first capacitor C1. The specific frequency value can be calculated by the formula f=1.44 / ((R1+2*R2)*C1).

[0074] In some optional embodiments, Figure 5 As shown, the energy storage device 20 also includes:

[0075] The temperature compensation module 21 is connected to the first capacitor C1 , and is used to stabilize the frequency of the pulse output device 10 outputting the pulse.

[0076] Specifically, in order to compensate for the influence of temperature on the capacitance value of the capacitor, a temperature compensation module 21 is added to the circuit, thereby eliminating the influence of temperature on the capacitance value of the capacitor and improving the stability of the identification molecular pump.

[0077] In some optional embodiments, Figure 5 As shown, the temperature compensation module 21 includes:

[0078] Thermistor R0 is connected in parallel with the first capacitor C1.

[0079] Specifically, the thermistor R0 can adopt a negative temperature coefficient (NTC) thermistor. By connecting the thermistor R0 in parallel with the capacitor, when the temperature rises, the resistance of the thermistor R0 decreases, and the equivalent capacitance formed with the capacitor changes, thereby offsetting the effect of temperature on the capacitance of the capacitor to a certain extent and stabilizing the pulse frequency.

[0080] In some optional embodiments, Figure 4 As shown, the pulse output device 10 further includes:

[0081] A second capacitor C2, wherein a first end of the second capacitor C2 is connected to the preset reference voltage VDD, and a second end of the second capacitor C2 is grounded;

[0082] A third resistor R3, wherein a first end of the third resistor R3 is connected to the preset reference voltage VDD, and a second end of the third resistor R3 is connected to the pulse output device.

[0083] Specifically, the second capacitor C2 is used to filter out high frequencies, and the third resistor R3 is used as a pull-up resistor to stabilize the output of high-level pulse signals and low-level pulse signals.

[0084] In this embodiment, a molecular pump is also proposed, which includes a pump body and a control board. The pulse output device is arranged on the control board, and the energy storage device is arranged on the pump body. The energy storage device and the pulse output device are connected by a wire.

[0085] Specifically, when the energy storage device is a chip capacitor, the chip capacitor is directly attached to the molecular pump, thereby eliminating the need to increase the structure of the molecular pump, thereby greatly improving convenience.

[0086] In some optional implementations, the shielding cover is disposed outside the pulse output device 10, and the conducting wire is a shielded wire.

[0087] Specifically, a metal shield is used to partially surround the pulse output device 10 to reduce the impact of external electromagnetic interference on the circuit. The metal shield should be well grounded to direct the interference signal into the ground. At the same time, shielded wires are used for the external wires of the pulse output device 10 connecting the energy storage device 20, and the shielding layer is also grounded to prevent the interference signal from coupling to the wire during the signal transmission process, thereby reducing the interference caused by the large current during driving. As a result, self-excited oscillations are generated during the charging and discharging process of the energy storage device 20, and a periodic rectangular pulse signal is output. The control module identifies the model of the molecular pump based on the frequency of the pulse signal.

[0088] In addition, in order to improve the stability of recognition, a filtering circuit can also be provided, the pulse output device 10 and the control module are integrated into a control board, and a filtering circuit is added to the power input end of the control board, such as a π-type filter composed of a capacitor and an inductor (not shown in the figure), to filter out the high-frequency clutter in the power supply, stabilize the power supply voltage, and reduce the impact of power supply fluctuations on the multivibrator. At the same time, a low-pass filtering circuit is added to the pulse signal output end to filter out high-frequency noise that may be generated by interference, and ensure the purity of the pulse signal transmitted to the management board. For example, a small-capacity capacitor and a resistor can be used to form a simple low-pass filter, and a suitable cut-off frequency can be selected as needed, and only pulse signals below the cut-off frequency are allowed to pass.

[0089] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A molecular pump identification circuit, characterized in that: The molecular pump identification circuit is connected to the control module, and the molecular pump identification circuit includes: a pulse output device and an energy storage device, and the pulse output device is respectively connected to a preset reference voltage, the control module and the energy storage device; The pulse output device is used to send the electric energy of the preset reference voltage to the energy storage device for storage, and discharge the electric energy of the energy storage device; The energy storage device is used for charging and discharging, and sends the energy storage voltage signal to the pulse output device; The pulse output device is also used to receive the energy storage voltage signal, and compare the energy storage voltage signal with a preset voltage signal, and output pulse signals of different frequencies according to the comparison result, so that the control module can identify the model of the molecular pump according to the frequency.

2. The molecular pump identification circuit according to claim 1, characterized in that: The preset voltage signal includes: a first preset voltage signal and a second preset voltage signal, and the pulse output device includes: a pulse output module, the pulse output module being connected to the control module, and being used to output a charging signal and a high-level pulse signal to the control module when detecting that the energy storage voltage signal is lower than the first preset voltage signal, and to output a discharging signal and a low-level pulse signal to the control module when detecting that the energy storage voltage signal is higher than the second preset voltage signal; A charge and discharge control module, wherein the charge and discharge control module is respectively connected to the pulse output module, the preset reference voltage and the energy storage device, and the charge and discharge control module is used to receive the charging signal and charge the energy storage device based on the preset reference voltage, and to receive the discharging signal and discharge the electric energy of the energy storage device.

3. The molecular pump identification circuit according to claim 2, characterized in that: The pulse output module comprises: a first comparison unit, the first comparison unit being connected to the energy storage device, and being used for receiving the energy storage voltage signal, comparing the energy storage voltage signal with a first preset voltage signal, and outputting a first comparison result; a second comparison unit, the second comparison unit being connected to the energy storage device, and configured to receive the energy storage voltage signal, compare the energy storage voltage signal with a second preset voltage signal, and output a second comparison result; An RS trigger, wherein the RS trigger is connected to the first comparison unit, the second comparison unit and the control module respectively, and is used to receive the first comparison result and the second comparison result, and switch to output a high-level pulse signal and a low-level pulse signal according to the first comparison result and the second comparison result, so as to output a high-level pulse signal when the energy storage voltage signal is lower than the first preset voltage signal, and output a low-level pulse signal when the energy storage voltage signal is higher than the second preset voltage signal; A discharge unit, wherein the discharge unit is connected to the energy storage device and the RS trigger respectively, and is used to output a discharge signal and a charge signal to a charge and discharge control module.

4. The molecular pump identification circuit according to claim 2, characterized in that: The charge and discharge control module comprises: a first resistor, wherein a first end of the first resistor is connected to a preset reference voltage, and a second end of the first resistor is connected to the pulse output module; A second resistor, wherein a first end of the second resistor is connected to a second end of the first resistor, and a second end of the second resistor is connected to the pulse output module.

5. The molecular pump identification circuit according to claim 1, characterized in that: The energy storage device is a first capacitor, wherein the first capacitor is a chip capacitor.

6. The molecular pump identification circuit according to claim 5, characterized in that: The energy storage device also includes: A temperature compensation module is connected to the first capacitor and is used to stabilize the frequency of the pulse output by the pulse output device.

7. The molecular pump identification circuit according to claim 6, characterized in that: The temperature compensation module comprises: A thermistor is connected in parallel with the first capacitor.

8. The molecular pump identification circuit according to claim 3, characterized in that: The pulse output device also includes: a second capacitor, wherein a first end of the second capacitor is connected to the preset reference voltage, and a second end of the second capacitor is grounded; A third resistor, wherein a first end of the third resistor is connected to the preset reference voltage, and a second end of the third resistor is connected to the pulse output module.

9. A molecular pump, comprising the molecular pump identification circuit according to any one of claims 1 to 8, characterized in that: The molecular pump comprises a pump body and a control board. The pulse output device is arranged on the control board, and the energy storage device is arranged on the pump body. The energy storage device and the pulse output device are connected via a wire.

10. The molecular pump according to claim 9, characterized in that: The shielding cover is arranged outside the pulse output device, and the conducting wire is a shielding wire.

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