Adsorption type waste gas treatment device

Abstract

The invention relates to an adsorption type waste gas treatment device which comprises an adsorption barrel and a spiral plate, the spiral plate is located in the adsorption barrel and fixed to the adsorption barrel in position, a gas outlet and a gas inlet are formed in the upper end and the lower end of the adsorption barrel respectively, and the space between the spiral plate and the adsorption barrel is filled with adsorption particles. The spiral plates are used, so that the adsorption particles are spiral, waste gas rises along the spiral plates to be in contact with the adsorption particles and is absorbed, the length of the whole adsorption particles is increased in a limited adsorption cylinder space, and waste gas adsorption is more sufficient; the adsorption particles continuously slide down along the spiral plate under the action of gravity, the completely saturated adsorption particles which are in contact with the waste gas at the lower part firstly leave the adsorption barrel from the discharge hole, and the unsaturated adsorption particles at the upper part slide to the lower part of the adsorption barrel to be retained, so that the waste gas is continuously adsorbed in later use, the use of the adsorption particles is reduced, and the cost is reduced.

Description

Technical Field

[0001] The invention relates to the field of waste gas treatment, in particular to an adsorption type waste gas treatment device. Background Art

[0002] Semiconductor waste gas treatment equipment refers to special equipment used to treat waste gas generated during the semiconductor manufacturing process. In the semiconductor industry, the manufacturing process involves a variety of chemicals and processes, such as photolithography, etching, deposition, etc. These processes may produce harmful gases, including acidic gases (such as hydrogen chloride HCl), alkaline gases (such as ammonia NH3), volatile organic compounds (VOCs), particulate matter, and some toxic or corrosive gases. In order to protect the environment and ensure workplace safety, these waste gases must be effectively treated so that they meet emission standards before they can be discharged into the atmosphere. Among them, adsorption treatment devices use activated carbon or other adsorbents to capture volatile organic compounds and other adsorbable pollutants.

[0003] Existing adsorption particles are directly installed between the two mesh plates of the adsorption cylinder. The exhaust gas enters from the mesh plate at one end and contacts the activated carbon, and then is discharged from the mesh plate at the other end. In actual use, if the exhaust gas discharged after adsorption does not meet the standard, all the activated carbon in the adsorption cylinder needs to be replaced. At this time, the activated carbon that first contacts the exhaust gas is saturated, but the activated carbon close to the outlet mesh plate is not saturated, resulting in a waste of part of the activated carbon. Summary of the invention

[0004] The present invention aims to solve the above problems and provides an adsorption type exhaust gas treatment device to solve the above problems.

[0005] An adsorption type waste gas treatment device comprises: an adsorption barrel and a spiral plate, wherein the spiral plate is located inside the adsorption barrel and fixed to the position of the adsorption barrel, an air outlet and an air inlet are formed at the upper and lower ends of the adsorption barrel respectively, and adsorption particles are filled between the spiral plate and the adsorption barrel.

[0006] Furthermore, a feed port and a discharge port are formed at the upper and lower ends of the adsorption barrel, respectively, and the feed port and the discharge port are respectively connected to a blocking device for blocking.

[0007] Furthermore, the adsorption barrel includes a barrel body, an upper flange plate and a lower flange plate, the upper and lower ends of the barrel body are respectively fixedly and detachably connected to the upper flange plate and the lower flange plate, and the outer side of the spiral plate is in contact with the barrel body or there is a gap through which the adsorption particles cannot pass.

[0008] Furthermore, it also includes a valve and a sealing plug, the feed port is located on the upper flange plate, the sealing plug is fixedly and detachably connected to the feed port, the discharge port is located on the lower flange plate, the valve is communicated with the discharge port, and the valve is fixedly connected to the lower flange plate.

[0009] Furthermore, it also includes a funnel and a blocking net, the funnel is located below the lower end of the spiral plate, the lower end of the funnel is connected to the discharge port, the blocking net is located above the side of the funnel away from the lower end of the spiral plate, the blocking net is fixedly connected to the lower end of the spiral plate or the funnel, and the blocking net is used to block adsorbed particles.

[0010] Furthermore, it also includes a center rod, the inner side of the spiral plate is fixedly connected to the center rod, and the center rod is fixedly and detachably connected to the adsorption barrel.

[0011] Furthermore, it also includes an inner tube, a hollow rod with an opening above the center rod, the inner tube is located in the center rod, the inner tube is rotatably connected to the center rod, the outer side of the inner tube is in contact with the inner side of the center rod, the center rod is formed with a radial outer through hole, the inner tube is formed with a radial inner through hole, and the outer through hole and the inner through hole correspond to each other one by one; It also includes a sealing cover, which is fixed to the upper end of the center rod and is detachably connected.

[0012] Furthermore, it also includes a transducer and an ultrasonic generator, wherein the transducer is located inside the inner tube and fixedly connected to the inner wall of the inner tube, and the ultrasonic generator is located outside the adsorption barrel and the center rod, and the ultrasonic generator is electrically connected to the transducer.

[0013] Furthermore, it also includes a first three-way valve, a spare barrel, a blower, a first air inlet valve, a first air outlet valve, a second air inlet valve and a second air outlet valve, the air outlet of the first three-way valve is connected to the first air inlet valve and the second air inlet valve through a pipeline, the first air inlet valve is connected to the air inlet of the air collecting barrel, and the air collecting barrel The air outlet is connected to the first air outlet valve, the second air inlet valve is connected to the air inlet of the spare barrel, the air outlet of the spare barrel is connected to the second air outlet valve, the first air outlet valve and the second air outlet valve are respectively connected to the air inlet of the blower through pipes, and the spare barrel is filled with adsorption particles.

[0014] Furthermore, the barrel body is fixedly provided with an observation window, and the observation window is located between two layers of blades of the spiral plate.

[0015] The present invention has the following advantages: 1. The spiral plate is used to make the adsorption particles spiral. The exhaust gas rises along the spiral plates and contacts and is absorbed by the adsorption particles. The length of the overall adsorption particles is increased within the limited adsorption cylinder space, so that the exhaust gas is more fully adsorbed. 2. The adsorbed particles slide down the spiral plate under the force of gravity. The fully saturated adsorbed particles that first contact the exhaust gas at the bottom leave the adsorption cylinder from the discharge port, and the unsaturated adsorbed particles at the top slide to the bottom of the adsorption barrel to be retained, and continue to adsorb exhaust gas in subsequent use, reducing the use of adsorbed particles and reducing costs; 3. The adsorption particles will rub against the inner wall of the adsorption barrel and the spiral plate during the discharge process, thereby scraping off the surface attachments, so that the adsorption barrel can be filled with adsorption particles multiple times before liquid cleaning, which extends the cleaning cycle and reduces manpower and logistics costs; 4. During cleaning, the central rod, which plays a supporting and reinforcing role, sprays high-pressure water outward to remove the attached objects. There is no need to disassemble the adsorption barrel, which improves the cleaning efficiency; 5.Use ultrasonic vibration to enhance the effect of adsorbing particles and liquid stripping attachments, and achieve better cleaning effect with high-pressure water. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the present invention, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0017] Figure 1 : A schematic diagram of the top view of the structure of the present invention; Figure 2 : Figure 1 Schematic diagram of the cross-sectional structure at AA in the middle; Figure 3 : Figure 2 Schematic diagram of the cross-sectional structure at the middle BB; Figure 4 : Figure 2 A partial enlarged view of point C in the middle; Figure 5 : Figure 2 Schematic diagram of the cross-sectional structure at DD in the middle; Figure 6 : A schematic diagram of the three-dimensional structure of the present invention; Figure 7 : The present invention includes a three-dimensional structural schematic diagram of a shell. DETAILED DESCRIPTION

[0018] The present invention will be further described below in conjunction with the accompanying drawings and examples: Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0019] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0020] In the description of the present invention, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention. like Figures 1 to 7 As shown, an adsorption type exhaust gas treatment device includes: an adsorption barrel 3 and a spiral plate 6, wherein the spiral plate 6 is located inside the adsorption barrel 3 and is fixed to the position of the adsorption barrel 3, and an air outlet and an air inlet are formed at the upper and lower ends of the adsorption barrel 3 respectively, and adsorption particles are filled between the spiral plate 6 and the adsorption barrel 3.

[0021] Furthermore, the adsorption barrel 3 is provided with a feed inlet and a discharge port at the upper and lower ends thereof, respectively, and the feed inlet and the discharge port are respectively connected to a blocking device for blocking. The blocking device may be a seal or a valve.

[0022] Furthermore, the adsorption barrel 3 includes a barrel body 13, an upper flange plate 14 and a lower flange plate 15, and the upper and lower ends of the barrel body 13 are respectively fixedly and detachably connected to the upper flange plate 14 and the lower flange plate 15, and the outer side of the spiral plate 6 is in contact with the barrel body 13 or there is a gap through which the adsorption particles cannot pass, such as the diameter of the spiral plate 6 can be slightly smaller than the inner diameter of the barrel body 13.

[0023] Furthermore, it also includes a valve 10 and a sealing plug 16, the feed port is located on the upper flange plate 14, the sealing plug 16 is fixedly and detachably connected to the feed port, the discharge port is located on the lower flange plate 15, the valve 10 is connected to the discharge port, and the valve 10 is fixedly connected to the lower flange plate 15.

[0024] Furthermore, it also includes a funnel 18 and a blocking net 19, the funnel 18 is located below the lower end of the spiral plate 6, the lower end of the funnel 18 is connected to the discharge port, the blocking net 19 is located above the side of the funnel 18 away from the lower end of the spiral plate 6, the blocking net 19 is fixedly connected to the lower end of the spiral plate 6 or the funnel 18, and the blocking net 19 is used to block the adsorbed particles to prevent the adsorbed particles on the spiral plate 6 from sliding out of the lower end of the spiral plate 6.

[0025] Preferably, the funnel 18 is made of a mesh plate.

[0026] Furthermore, it also includes a central rod 7, the inner side of the spiral plate 6 is fixedly connected to the central rod 7, and the central rod 7 is fixedly and detachably connected to the adsorption barrel 3.

[0027] Preferably, a flange portion 71 is formed on the upper portion of the center rod 7, and the flange portion 71 is in contact with the upper flange plate 14, and a sealing measure is adopted between the flange portion 71 and the upper flange plate 14. The lower end of the center rod 7 is inserted into the lower flange plate 15 and contacts the flange plate 15, and the center rod 7 cannot rotate relative to the flange plate 15 (for example, the center rod 7 and the flange plate 15 can be splined), thereby ensuring that the positions of the discharge ports of the spiral plate 6 and the adsorption barrel 3 are fixed and corresponding.

[0028] Furthermore, it also includes an inner tube 8, the center rod 7 is a hollow rod with an opening at the top, the inner tube 8 is located in the center rod 7, the inner tube 8 is rotatably connected to the center rod 7, the outer side of the inner tube 8 is in contact with the inner side of the center rod 7, the center rod 7 is formed with a radial outer through hole 70, the inner tube 8 is formed with a radial inner through hole 80, and the outer through hole 70 corresponds to the inner through hole 80 one by one; Preferably, the outer through hole 70 is tapered with a small inside and a large outside, so as to expand the spray range during cleaning and cover the entire inner wall of the adsorption barrel 3.

[0029] It also includes a sealing cover 72, which is fixed to the upper end of the center rod 7 and is detachably connected.

[0030] Furthermore, it also includes a transducer 81 and an ultrasonic generator 9, wherein the transducer 81 is located inside the inner tube 8 and fixedly connected to the inner wall of the inner tube 8, and the ultrasonic generator 9 is located outside the adsorption barrel 3 and the center rod 7, and the ultrasonic generator 9 is electrically connected to the transducer 81, and the wires of the two pass through the side wall of the center rod 7 and are sealed.

[0031] Preferably, the ultrasonic generator 9 is fixedly and detachably connected to the upper flange plate 14 .

[0032] Furthermore, it also includes a first three-way valve 2, a spare barrel 4, a blower 5, a first air inlet valve 11, a first air outlet valve 12, a second air inlet valve 41 and a second air outlet valve 42, the air outlet of the first three-way valve 2 is connected with the first air inlet valve 11 and the second air inlet valve 41 through pipelines, the first air inlet valve 11 is connected with the air inlet of the air collecting barrel 1, the air outlet of the air collecting barrel 1 is connected with the first air outlet valve 12, the second air inlet valve 41 is connected with the air inlet of the spare barrel 4, the air outlet of the spare barrel 4 is connected with the second air outlet valve 42, the first air outlet valve 12 and the second air outlet valve 42 are connected with the air inlet of the blower 5 through pipelines, and the spare barrel 4 is filled with adsorption particles.

[0033] Preferably, two upper and lower mesh plates 43 are fixedly and detachably provided in the spare barrel 4 , and the adsorption particles are located between the two mesh plates 43 .

[0034] Preferably, the first three-way valve 2 is a T-type three-way pneumatic valve.

[0035] Furthermore, the gas collecting barrel 1 is connected to the first three-way valve 2 through a pipeline.

[0036] Furthermore, the barrel body 13 is fixedly provided with an observation window 17, which is located between two layers of blades of the spiral plate 6. The observation window 17 is convenient for the staff to directly observe the height of the adsorption particles in the adsorption barrel 3. It should be noted that the weight of the adsorption particles flowing into the container can also be measured, and the amount of particles remaining in the adsorption barrel can be calculated by subtracting the remaining weight from the total weight of the adsorption particles.

[0037] Furthermore, the adsorbent particles are activated carbon particles. Preferably, the activated carbon particles are soaked in a solution that can react chemically with the exhaust gas.

[0038] Furthermore, an outer case 100 is included, the adsorption barrel 3 and the spare barrel 4 are located in the outer case 100 and are fixedly and detachably connected to the outer case 100, and universal wheels are provided below the adsorption barrel 3. The outer case 100 plays a role in protecting the internal components, wherein the universal wheels facilitate the movement of the adsorption barrel 3 and raise the lower flange plate 15 to leave enough space for the container or the pipe connecting the container.

[0039] During normal operation, the blower 5 works, the first air inlet valve 11 and the first air outlet valve 12 are opened, the second air inlet valve 41 and the second air outlet valve 42 are closed, and the exhaust gas enters the adsorption barrel 3 from the air collecting barrel 1 through the first three-way valve 2. After the exhaust gas passes through the hole of the barrier net 19, it contacts the adsorption particles filled between the blades of the spiral plate 6. The adsorption particles adsorb the exhaust gas and produce a chemical reaction with the exhaust gas. The exhaust gas after harmless treatment is driven by the blower 5 and discharged from the air outlet of the blower 5.

[0040] When the adsorption particles in the adsorption barrel 3 are saturated, the first air inlet valve 11 and the first air outlet valve 12 are closed, the second air inlet valve 41 and the second air outlet valve 42 are opened, and the adsorption particles in the spare barrel 4 are used to treat the exhaust gas. At this time, the adsorption particles in the adsorption barrel 3 can be replaced.

[0041] When replacing the adsorption particles, place the container under the valve 10 and connect it to the valve 10, and open the valve 10. The adsorption particles slide downward along the spiral plate 6 under gravity, fall into the funnel 18, and then enter the valve 10 from the funnel 18 through the discharge port, and finally fall from the valve 10 into the container. During the sliding of the adsorption particles, multiple vertical observation windows 17 can be observed. When the uppermost adsorption particles reach the designated observation window 17 position, the valve 10 is closed.

[0042] During the process of the adsorption particles sliding down, the moving adsorption particles contact and rub against the spiral plate 6 and the inner wall of the barrel body 13, which can remove the waste gas attachments on the spiral plate 6 and the barrel body 13, and reduce the number of times the adsorption barrel 3 is cleaned. In this process, the ultrasonic generator 9 can be turned on, and the transducer 81 drives the inner tube 8 and the center rod 7 to vibrate, thereby driving the adsorption particles to vibrate, enhancing their friction with the spiral plate 6 and the barrel body 13, and removing more waste gas attachments on the spiral plate 6 and the barrel body 13.

[0043] After that, new adsorption particles are loaded, the sealing plug 16 is opened, and new adsorption particles are loaded through the sealing plug 16. The new adsorption particles slide from top to bottom along the spiral plate 6 until the spiral plate 6 is filled. After that, the sealing plug 16 is closed, and the loading operation of the adsorption cylinder 3 is completed.

[0044] After repeated filling several times, the adsorption barrel 3 needs to be cleaned. At this time, the adsorption barrel 3 is removed, or the spare barrel 4 is not removed and works. First, the sealing plug 16 is opened, and water or a solution that can react with the waste gas attachment is poured in. Then, the ultrasonic generator 9 is turned on, and the transducer 81 drives the inner tube 8, the center rod 7 and the spiral plate 6 to vibrate, generating microbubbles to remove part of the waste gas attachment inside the adsorption barrel 3 and other internal parts. Finally, the valve 10 is opened, and the waste water or solution is discharged from the valve 10 into the designated container.

[0045] Then, close the sealing plug 16. Open the sealing cover 72, and use the workpiece to rotate the inner tube 8 so that the outer through hole 70 and the inner through hole 80 that are not connected during normal operation are connected. The center rod 7 is fixedly connected and connected to the water pipe, and high-pressure water is passed into the water pipe. The high-pressure water field is sprayed outward through the inner tube 8, the inner through hole 80 and the outer through hole 70 to flush the spiral plate 6 and the barrel body 13 to remove stubborn attachments. The waste water after flushing is continuously discharged through the valve 10 to avoid water accumulation in the adsorption barrel 3 to weaken the impact force of the water jet. Preferably, the ultrasonic generator 9 works at this time to add microbubbles to the high-pressure water, and the water impact is combined with the bubble burst to achieve a better cleaning effect.

[0046] During drying, the gas can evaporate naturally, and the water pipe at the top of the central rod 7 is replaced with the outlet pipe of the hot air blower, and the gas adsorption device is connected to the valve 10. After the adsorption cylinder is dried, the valve is closed and new adsorption particles are loaded from the feed port. Finally, the feed port is sealed with a sealing plug 16.

[0047] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications made based on the present invention belong to the scope of protection claimed by the present invention.

Claims

1. An adsorption type exhaust gas treatment device, characterized in that: include: An adsorption barrel (3) and a spiral plate (6), wherein the spiral plate (6) is located inside the adsorption barrel (3) and is fixed to the position of the adsorption barrel (3), an air outlet and an air inlet are formed at the upper and lower ends of the adsorption barrel (3), and adsorption particles are filled between the spiral plate (6) and the adsorption barrel (3).

2. The adsorption type exhaust gas treatment device according to claim 1, characterized in that: The adsorption barrel (3) is provided with a feed inlet and a discharge outlet at the upper and lower ends, respectively, and the feed inlet and the discharge outlet are respectively connected to a blocking device for blocking.

3. The adsorption type exhaust gas treatment device according to claim 2, characterized in that: The adsorption barrel (3) comprises a barrel body (13), an upper flange plate (14) and a lower flange plate (15); the upper and lower ends of the barrel body (13) are respectively fixedly and detachably connected to the upper flange plate (14) and the lower flange plate (15); the outer side of the spiral plate (6) is in contact with the barrel body (13) or there is a gap through which adsorption particles cannot pass.

4. The adsorption type exhaust gas treatment device according to claim 3, characterized in that: It also includes a valve (10) and a sealing plug (16), wherein the feed port is located on the upper flange plate (14), the sealing plug (16) is fixedly and detachably connected to the feed port, the discharge port is located on the lower flange plate (15), the valve (10) is connected to the discharge port, and the valve (10) is fixedly connected to the lower flange plate (15).

5. The adsorption type exhaust gas treatment device according to claim 2, characterized in that: It also includes a funnel (18) and a blocking net (19), wherein the funnel (18) is located below the lower end of the spiral plate (6), the lower end of the funnel (18) is connected to the discharge port, and the blocking net (19) is located above a side of the funnel (18) away from the lower end of the spiral plate (6), the blocking net (19) is fixedly connected to the lower end of the spiral plate (6) or the funnel (18), and the blocking net (19) is used to block adsorbed particles.

6. The adsorption type exhaust gas treatment device according to claim 1, characterized in that: It also comprises a central rod (7), the inner side of the spiral plate (6) being fixedly connected to the central rod (7), and the central rod (7) being fixedly and detachably connected to the adsorption barrel (3).

7. The adsorption type exhaust gas treatment device according to claim 6, characterized in that: It also comprises an inner tube (8), the center rod (7) being a hollow rod with an opening at the top, the inner tube (8) being located in the center rod (7), the inner tube (8) being rotatably connected to the center rod (7), the outer side surface of the inner tube (8) being in contact with the inner side surface of the center rod (7), the center rod (7) being formed with a radial outer through hole (70), the inner tube (8) being formed with a radial inner through hole (80), the outer through hole (70) and the inner through hole (80) being in one-to-one correspondence; It also comprises a sealing cover (72), wherein the sealing cover (72) is fixedly and detachably connected to the upper end of the central rod (7).

8. The adsorption type exhaust gas treatment device according to claim 7, characterized in that: It also includes a transducer (81) and an ultrasonic generator (9), wherein the transducer (81) is located inside the inner tube (8) and is fixedly connected to the inner wall of the inner tube (8), and the ultrasonic generator (9) is located outside the adsorption barrel (3) and the center rod (7), and the ultrasonic generator (9) is electrically connected to the transducer (81).

9. The adsorption type exhaust gas treatment device according to claim 1, characterized in that: The invention also comprises a first three-way valve (2), a standby barrel (4), a blower (5), a first air inlet valve (11), a first air outlet valve (12), a second air inlet valve (41) and a second air outlet valve (42); the air outlet of the first three-way valve (2) is respectively connected to the first air inlet valve (11) and the second air inlet valve (41) through a pipeline; the first air inlet valve (11) is connected to the air inlet of the air collecting barrel (1); the air outlet of the air collecting barrel (1) is connected to the first air outlet valve (12); the second air inlet valve (41) is connected to the air inlet of the standby barrel (4); the air outlet of the standby barrel (4) is connected to the second air outlet valve (42); the first air outlet valve (12) and the second air outlet valve (42) are respectively connected to the air inlet of the blower (5) through a pipeline; and the standby barrel (4) is filled with adsorption particles.

10. The adsorption type exhaust gas treatment device according to claim 3, characterized in that: The barrel body (13) is fixedly provided with an observation window (17), and the observation window (17) is located between two layers of blades of the spiral plate (6).

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