Glass substrate cleaning equipment and cleaning method

Abstract

The invention belongs to the technical field of cleaning, and particularly provides glass substrate cleaning equipment and a cleaning method.The glass substrate cleaning equipment comprises an ultrasonic cleaning tank; a cleaning frame; a sequential pushing mechanism; and cleaning the detection mechanism. The sequential pushing mechanism is arranged on the cleaning frame, when the glass substrates are cleaned, the glass substrates are primarily cleaned through the ultrasonic cleaning tank, then the glass substrates on all the bearing stations are sequentially moved in the horizontal direction through the sequential pushing mechanism, and the glass substrates are secondarily cleaned through the ultrasonic cleaning tank; and therefore, the part, covered by the bearing station, of the glass substrate is pushed out for cleaning, and the cleaning quality of the glass substrate is improved. Meanwhile, by arranging the cleaning and detecting mechanism, batch detection is directly carried out on the cleaned glass substrates in the ultrasonic cleaning tank, so that the transfer procedure of the glass substrates is reduced, the detection efficiency is improved, and the probability that the glass substrates are scratched during circulation is reduced.

Description

Technical Field

[0001] The present invention belongs to the field of cleaning technology, and specifically relates to ultrasonic cleaning equipment, and in particular to a glass substrate cleaning equipment and a cleaning method. Background Art

[0002] Glass substrate cleaning is a complex and critical step, especially in the fields of optoelectronic display and semiconductor manufacturing. The cleaning quality directly affects the performance and yield of the product.

[0003] In the related art, ultrasonic cleaning is used to clean glass substrates in batches. In order to improve the transfer efficiency of glass substrates, the glass substrates are inserted into the supporting station in the cleaning rack. However, since the supporting station will cover part of the glass substrate, it is impossible to clean all positions of the glass substrate, which affects the cleaning quality of the glass substrate. At the same time, since some stubborn stains on the glass substrate cannot be removed under ultrasonic cleaning, after cleaning, the cleaning rack needs to be transferred to the detection device to detect the stains on the glass substrate, and the glass substrate with stains is subsequently cleaned. During the transfer process, the probability of scratching the glass substrate is increased.

[0004] Therefore, how to reduce the transfer process during glass substrate inspection while solving the problem that the glass substrate cannot be thoroughly cleaned due to the partial covering of the glass substrate by the supporting station in the cleaning rack is a technical problem that needs to be solved urgently.

[0005] It should be noted that the above information disclosed in this background technology section is only used to understand the background technology of the present application concept, and therefore, the above description is not considered to constitute information of the prior art. Summary of the invention

[0006] The embodiments of the present disclosure at least provide a glass substrate cleaning device and a cleaning method.

[0007] In a first aspect, an embodiment of the present disclosure provides a glass substrate cleaning device, comprising:

[0008] Ultrasonic cleaning tank;

[0009] A cleaning rack, which is arranged in the ultrasonic cleaning tank, and a plurality of supporting stations are arranged at intervals on the cleaning rack, and the supporting stations are suitable for carrying the glass substrate to be cleaned;

[0010] A sequential pushing mechanism, which is arranged on the cleaning rack and is suitable for sequentially moving the glass substrates on all the supporting stations in a horizontal direction;

[0011] A cleaning detection mechanism, which is disposed in the ultrasonic cleaning tank and is suitable for detecting the cleaned glass substrate;

[0012] During cleaning, the glass substrates in the cleaning rack are preliminarily cleaned by the ultrasonic cleaning tank. After the preliminarily cleaning is completed, the glass substrates on all the supporting stations are sequentially pushed by the sequential pushing mechanism to expose the shielding parts of the supporting stations, and the glass substrates are secondary cleaned by the ultrasonic cleaning tank.

[0013] After cleaning is completed, the cleaned glass substrate is inspected by the cleaning inspection mechanism, and the glass substrate with stains is marked for subsequent cleaning.

[0014] In an optional embodiment,

[0015] The cleaning detection mechanism comprises:

[0016] Planar light source, grayscale camera and control module;

[0017] The planar light source and the grayscale camera are respectively arranged on two opposite sides of the ultrasonic cleaning tank;

[0018] The planar light source sends a parallel light beam toward the glass substrate, and the parallel light beam passes through all the glass substrates and then irradiates the grayscale camera;

[0019] The grayscale camera is suitable for acquiring grayscale image information and sending it to the control module;

[0020] The control module is configured to detect stains on the glass substrate according to the received grayscale image information.

[0021] In an optional embodiment, the control module is electrically connected to the sequential pushing mechanism;

[0022] After the glass substrates are cleaned, the control module is further configured to control the sequential pushing mechanism to sequentially move the glass substrates on all the supporting stations in a horizontal direction; and

[0023] After each glass substrate on a supporting station is pushed, the control module is further configured to control the grayscale camera to reacquire grayscale image information and send it to the control module;

[0024] The control module detects stains on the glass substrate according to the received grayscale image information, that is, detects the glass substrate on each supporting station according to all the received grayscale image information.

[0025] In an optional implementation, the step of detecting the glass substrate on each supporting station according to all the received grayscale image information includes:

[0026] Sort all the acquired grayscale image information by acquisition time to obtain a grayscale image information set (a1 , a 2 …a n ), where a 1 Represents the first grayscale image information, a n Represents the nth grayscale image information;

[0027] Get the preset grayscale image information a 预设 , wherein the preset grayscale image information is grayscale image information of the stacked glass substrates obtained by the grayscale camera after the stain-free glass substrates are placed in all the supporting stations;

[0028] Respectively 1 , a 2 …a n The gray value of each pixel in a 预设 Compare and obtain the comparison result k of each grayscale image information 1 …k n ;

[0029] According to the comparison result of two adjacent grayscale image information, it is judged whether there is stain on the glass substrate pushed when the latter grayscale image information is taken.

[0030] In an optional implementation, the step of judging whether there is stain on the glass substrate pushed when the latter grayscale image information is captured based on the comparison result of two adjacent grayscale image information is as follows:

[0031] If the comparison results of two adjacent grayscale image information are the same, it indicates that there is no stain on the glass substrate pushed when the latter grayscale image information is taken;

[0032] If the comparison results of two adjacent grayscale image information are different, it indicates that there are stains on the glass substrate that was pushed when the latter grayscale image information was taken.

[0033] In an optional embodiment, a first supporting rod and a second supporting rod are provided at the bottom of the cleaning rack;

[0034] The first supporting rod and the second supporting rod are arranged opposite to each other, and the height of the second supporting rod is higher than the height of the first supporting rod;

[0035] The supporting station includes two U-shaped limiting plates;

[0036] The two U-shaped limiting plates are respectively arranged on the first supporting rod and the second supporting rod.

[0037] In an optional embodiment,

[0038] The sequential pushing mechanism comprises a sleeve, a driving block and a driving part;

[0039] A driving groove is formed at a position of the sleeve opposite to each of the supporting stations;

[0040] A push block is arranged in the driving groove;

[0041] The driving part is suitable for driving the driving block to extend into the sleeve, thereby sequentially pushing the pushing block to extend from the corresponding driving slot, and then sequentially moving the glass substrate on the corresponding supporting station along the horizontal direction.

[0042] In a second aspect, this embodiment further provides a glass substrate cleaning method, comprising:

[0043] Inserting the glass substrate to be cleaned into each supporting station of the cleaning rack;

[0044] Place the cleaning rack into the ultrasonic cleaning tank;

[0045] The glass substrate is initially cleaned by an ultrasonic cleaning tank;

[0046] Controlling the sequential pushing mechanism to sequentially move the glass substrates on all the supporting stations in a horizontal direction, and controlling the ultrasonic cleaning tank to perform secondary cleaning on the glass substrates;

[0047] After cleaning is completed, the cleaned glass substrate is inspected by a cleaning inspection mechanism, and the glass substrate with stains is marked for subsequent cleaning.

[0048] In an optional embodiment, after the cleaning is completed, the step of inspecting the cleaned glass substrate by a cleaning inspection mechanism includes:

[0049] Controlling the planar light source to send a parallel light beam toward the glass substrate;

[0050] Obtain grayscale image information through a grayscale camera;

[0051] The sequential pushing mechanism is driven to sequentially move the glass substrates on all the supporting stations in a horizontal direction, and the grayscale camera is controlled to reacquire grayscale image information after each glass substrate on the supporting station is pushed;

[0052] Sort all the acquired grayscale image information by acquisition time to obtain a grayscale image information set (a 1 , a 2 …a n );

[0053] Get the preset grayscale image information a 预设 ;

[0054] Respectively 1 , a 2 …a nThe gray value of each pixel in a 预设 Compare and obtain the comparison result k of each grayscale image information 1 …k n ;

[0055] According to the comparison result of two adjacent grayscale image information, it is judged whether there is stain on the glass substrate pushed when the latter grayscale image information is taken.

[0056] In an optional implementation, the step of judging whether there is stain on the glass substrate pushed when the latter grayscale image information is captured based on the comparison result of two adjacent grayscale image information is as follows:

[0057] If the comparison results of two adjacent grayscale image information are the same, it indicates that there is no stain on the glass substrate pushed when the latter grayscale image information is taken;

[0058] If the comparison results of two adjacent grayscale image information are different, it indicates that there are stains on the glass substrate that was pushed when the latter grayscale image information was taken.

[0059] The beneficial effect of the present invention is that the glass substrate cleaning equipment and cleaning method are provided with a sequential pushing mechanism on the cleaning rack. When cleaning the glass substrate, the glass substrate is first preliminarily cleaned by the ultrasonic cleaning tank, and then the glass substrates on all the supporting stations are sequentially moved in the horizontal direction by the sequential pushing mechanism, and the glass substrates are secondarily cleaned by the ultrasonic cleaning tank, so that the part of the glass substrate covered by the supporting station is pushed out for cleaning, thereby improving the cleaning quality of the glass substrate. At the same time, by providing a cleaning detection mechanism, the cleaned glass substrates are directly batch-tested in the ultrasonic cleaning tank, which reduces the transportation process of the glass substrate, improves the detection efficiency, and reduces the probability of the glass substrate being scratched during circulation.

[0060] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description, claims and drawings.

[0061] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, this article specifically cites preferred embodiments and provides detailed descriptions as follows in conjunction with the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0062] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0063] Figure 1 A schematic diagram of the structure of a glass substrate cleaning device provided in an embodiment of the present disclosure;

[0064] Figure 2 A schematic diagram of the structure of the cleaning rack and the sequential pushing mechanism provided in the embodiment of the present disclosure;

[0065] Figure 3 An electrical control schematic diagram of a glass substrate cleaning device provided in an embodiment of the present disclosure;

[0066] Figure 4 An electrical control principle diagram of a glass substrate cleaning device provided by an embodiment of the present disclosure after a sequential pushing mechanism pushes a glass substrate;

[0067] Figure 5 A schematic diagram of two adjacent grayscale image information with different comparison results provided by an embodiment of the present disclosure;

[0068] Figure 6 A cross-sectional view of a cleaning rack and a sequential pushing mechanism provided in an embodiment of the present disclosure;

[0069] Figure 7 The present invention provides a flow chart of a glass substrate cleaning method according to an embodiment of the present invention.

[0070] In the figure: 100, ultrasonic cleaning tank; 200, cleaning rack; 210, supporting station; 220, first supporting rod; 230, second supporting rod; 240, U-shaped limiting plate; 300, sequential pushing mechanism; 310, driving block; 320, driving part; 330, sleeve; 331, pushing block; 332, driving tank; 400, cleaning detection mechanism; 410, plane light source; 430, grayscale camera; 440, control module; 500, glass substrate; 600, stains. DETAILED DESCRIPTION

[0071] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0072] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In addition, in the drawings, the thickness of the components may be exaggerated or reduced in order to effectively describe the technical content.

[0073] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0074] See also Figure 1 and Figure 2 At least one embodiment provides a glass substrate 500 cleaning device, comprising: an ultrasonic cleaning tank 100; a cleaning rack 200, which is arranged in the ultrasonic cleaning tank 100, and a plurality of supporting stations 210 are arranged on the cleaning rack 200 at intervals, and the supporting stations 210 are suitable for carrying the glass substrate 500 to be cleaned; a sequential pushing mechanism 300, which is arranged on the cleaning rack 200 and is suitable for sequentially moving the glass substrates 500 on all the supporting stations 210 in a horizontal direction; a cleaning detection mechanism 400, which is arranged in the ultrasonic cleaning tank 100 and is suitable for detecting the glass substrate 500 after cleaning. During cleaning, the glass substrate 500 in the cleaning rack 200 is preliminarily cleaned by the ultrasonic cleaning tank 100. After the preliminarily cleaning is completed, the glass substrates 500 on all the supporting stations 210 are sequentially pushed by the sequential pushing mechanism 300 to expose the shielding parts of the supporting stations 210, and the glass substrates 500 are secondarily cleaned by the ultrasonic cleaning tank 100. After cleaning, the cleaned glass substrates 500 are inspected by the cleaning inspection mechanism 400, and the glass substrates 500 with stains 600 are marked for subsequent cleaning. By arranging the sequential pushing mechanism 300 on the cleaning rack 200, when cleaning the glass substrate 500, the glass substrate 500 is firstly cleaned by the ultrasonic cleaning tank 100, and then the glass substrates 500 on all the supporting stations 210 are sequentially moved in the horizontal direction by the sequential pushing mechanism 300, and the glass substrates 500 are secondarily cleaned by the ultrasonic cleaning tank 100, so that the part of the glass substrate 500 covered by the supporting station 210 is cleaned, thereby improving the cleaning quality of the glass substrate 500. At the same time, by arranging the cleaning detection mechanism 400, the cleaned glass substrates 500 are directly batch-tested in the ultrasonic cleaning tank 100, which reduces the transportation process of the glass substrate 500, improves the detection efficiency, and reduces the probability of the glass substrate 500 being scratched during circulation.

[0075] It should be noted that the direction in which the glass substrate 500 is pushed is Figure 2 Direction shown in F.

[0076] See also Figure 3 The cleaning detection mechanism 400 includes: a plane light source 410, a grayscale camera 430 and a control module 440; the plane light source 410 and the grayscale camera 430 are respectively arranged on two opposite sides of the ultrasonic cleaning tank 100; the plane light source 410 sends a parallel light beam toward the glass substrate 500, and the parallel light beam passes through all the glass substrates 500 and then irradiates the grayscale camera 430; the grayscale camera 430 is suitable for acquiring grayscale image information and sending it to the control module 440; the control module 440 is configured to detect the stain 600 on the glass substrate 500 according to the received grayscale image information. After the parallel light beam sent by the plane light source 410 passes through the glass substrate 500, it irradiates in front of the grayscale camera 430, and the stain 600 on the glass substrate 500 is detected by judging the grayscale image information.

[0077] Specifically, after the parallel light beam passes through the glass substrate 500, if there is a stain 600 on the glass substrate 500, the parallel light beam will be blocked. At this time, the light intensity of the parallel light beam passing through the glass substrate will change. The image is photographed by the grayscale camera 430 to obtain grayscale image information. The grayscale image information is analyzed by the control module 440 to complete the detection of the stain 600 on the glass substrate 500.

[0078] Since the plurality of supporting stations 210 are arranged at intervals, after the plurality of glass substrates 500 are inserted into the corresponding supporting stations 210 , the grayscale image information acquired by the grayscale camera 430 will overlap. At this time, the control module 440 cannot determine which glass substrate 500 has the stain 600 .

[0079] See also Figure 3 and Figure 4Therefore, in a preferred embodiment, the control module 440 is electrically connected to the sequential pushing mechanism 300; after the glass substrate 500 is cleaned, the control module 440 is also configured to control the sequential pushing mechanism 300 to sequentially move the glass substrates 500 on all the supporting stations 210 in the horizontal direction; and after each glass substrate 500 on a supporting station 210 is pushed, the control module 440 is also configured to control the grayscale camera 430 to reacquire grayscale image information and send it to the control module 440; the control module 440 detects the stains 600 on the glass substrate 500 based on the received grayscale image information, that is, detects the glass substrate 500 on each supporting station 210 based on all the received grayscale image information. The glass substrates 500 are pushed in sequence by the sequential pushing mechanism 300, so that the image of the pushed glass substrate 500 moves, thereby facilitating the control module 440 to detect each glass substrate 500. It should be noted that Figure 3 as well as Figure 4 The glass substrate 500 in FIG. 1 is a top view. Figure 3 as well as Figure 4 The arrow in the figure indicates the irradiation direction of the parallel light beam.

[0080] Specifically, the step of detecting the glass substrate 500 on each supporting station 210 according to all the received grayscale image information includes:

[0081] S1: Sort all the acquired grayscale image information by acquisition time to obtain a grayscale image information set (a 1 , a 2 …a n ), where a 1 Represents the first grayscale image information, a n Represents the nth grayscale image information.

[0082] S2: Get the preset grayscale image information a 预设 , wherein the preset grayscale image information is the grayscale image information of the stacked glass substrates acquired by the grayscale camera 430 after the glass substrates 500 without stains 600 are placed in all the supporting stations 210 .

[0083] S3: respectively 1 , a 2 …a n The gray value of each pixel in a 预设 Compare and obtain the comparison result k of each grayscale image information 1 …k n , where k 1 Represents grayscale image information a 1 The comparison result, kn Represents grayscale image information a n The comparison results.

[0084] Specifically, the pixel points of each grayscale image information are compared with the preset grayscale image information a 预设 The grayscale values ​​of the corresponding pixels are compared. If the difference is within the preset range, it indicates that the pixel has no stain 600, which is recorded as 0. If the difference exceeds the preset range, it indicates that the pixel has stain 600, which is recorded as 1. The comparison results of all pixels of each grayscale image information are stored.

[0085] S4: judging whether there is a stain 600 on the glass substrate 500 pushed when the latter grayscale image information is captured based on the comparison result of two adjacent grayscale image information.

[0086] Wherein, step S4 is:

[0087] S41: If the comparison results of two adjacent grayscale image information are the same, it indicates that there is no stain 600 on the glass substrate 500 pushed when the latter grayscale image information is captured;

[0088] S42: If the comparison results of two adjacent grayscale image information are different, it indicates that there is a stain 600 on the glass substrate 500 that was pushed when the latter grayscale image information was captured.

[0089] Specifically, Figure 5 A schematic diagram of two adjacent grayscale image information with different comparison results is shown. It can be seen from the figure that after the corresponding glass substrate 500 is pushed, the number of stains 600 increases, indicating that the glass substrate 500 pushed when the latter grayscale image information was taken has stains 600.

[0090] See also Figure 6 The bottom of the cleaning rack 200 is provided with a first supporting rod 220 and a second supporting rod 230; the first supporting rod 220 and the second supporting rod 230 are arranged opposite to each other, and the height of the second supporting rod 230 is higher than that of the first supporting rod 220; the supporting station 210 includes two U-shaped limiting plates 240; the two U-shaped limiting plates 240 are respectively arranged on the first supporting rod 220 and the second supporting rod 230. Since the height of the second supporting rod 230 is higher than that of the first supporting rod 220, after the sequential pushing mechanism 300 releases the restriction on the glass substrate 500, the glass substrate 500 returns to the initial position under the action of its own weight, so that the sequential pushing mechanism 300 can push the glass substrate 500 again when the subsequent cleaning and detecting mechanism 400 detects.

[0091] Please continue reading Figure 6In some embodiments, the sequential pushing mechanism 300 includes a sleeve 330, a driving block 310 and a driving part 320; the sleeve 330 is provided with a driving slot 332 at a position opposite to each of the supporting stations 210; a pushing block 331 is arranged in the driving slot 332; the driving part 320 is adapted to drive the driving block 310 to extend into the sleeve 330, thereby sequentially pushing the pushing block 331 to extend from the corresponding driving slot 332, thereby sequentially moving the glass substrate 500 on the corresponding supporting station 210 in the horizontal direction. The driving part 320 may be, but is not limited to, a push rod motor, and its push rod is a telescopic or rigid chain telescopic structure.

[0092] It should be noted that the push block 331 is elastically connected to the outer wall of the sleeve 330 via the return spring 333 . When the driving block 310 withdraws from the sleeve 330 , the push block 331 returns to its initial position under the elastic force of the return spring 333 .

[0093] See also Figure 7 This embodiment also provides a glass substrate 500 cleaning method, comprising:

[0094] S110: inserting the glass substrate 500 to be cleaned into each supporting station 210 of the cleaning rack 200;

[0095] S120: placing the cleaning rack 200 into the ultrasonic cleaning tank 100;

[0096] S130: Preliminary cleaning of the glass substrate 500 by the ultrasonic cleaning tank 100;

[0097] S140: Control the sequential pushing mechanism 300 to sequentially move the glass substrates 500 on all the supporting stations 210 in a horizontal direction, and control the ultrasonic cleaning tank 100 to perform secondary cleaning on the glass substrates 500;

[0098] S150: After cleaning is completed, the cleaned glass substrate 500 is inspected by the cleaning inspection mechanism 400, and the glass substrate with stains is marked for subsequent cleaning.

[0099] By arranging the sequential pushing mechanism 300 on the cleaning rack 200, when cleaning the glass substrate 500, the glass substrate 500 is firstly cleaned by the ultrasonic cleaning tank 100, and then the glass substrates 500 on all the supporting stations 210 are sequentially moved in the horizontal direction by the sequential pushing mechanism 300, and the glass substrates 500 are secondarily cleaned by the ultrasonic cleaning tank 100, so that the part of the glass substrate 500 covered by the supporting station 210 is cleaned, thereby improving the cleaning quality of the glass substrate 500. At the same time, by arranging the cleaning detection mechanism 400, the cleaned glass substrates 500 are directly batch-tested in the ultrasonic cleaning tank 100, which reduces the transportation process of the glass substrate 500, improves the detection efficiency, and reduces the probability of the glass substrate 500 being scratched during circulation.

[0100] Wherein, step S150 includes the following steps: S151: Control the planar light source 410 to send a parallel light beam toward the glass substrate 500

[0101] S152 : Acquire grayscale image information through the grayscale camera 430 .

[0102] S153: driving the sequential pushing mechanism 300 to sequentially move the glass substrates 500 on all the supporting stations 210 in the horizontal direction, and controlling the grayscale camera 430 to reacquire grayscale image information after each glass substrate 500 on the supporting station 210 is pushed.

[0103] S154: Sort all the acquired grayscale image information by acquisition time to obtain a grayscale image information set (a 1 , a 2 …a n ), where a 1 Represents the first grayscale image information, a n Represents the nth grayscale image information.

[0104] S155: Obtaining preset grayscale image information a 预设 .

[0105] S156: respectively 1 , a 2 …a n The gray value of each pixel in a 预设 Compare and obtain the comparison result k of each grayscale image information 1 …k n .

[0106] Among them, k 1 Represents grayscale image information a 1 The comparison result, k n Represents grayscale image information a n The comparison results.

[0107] Specifically, the pixel points of each grayscale image information are compared with the preset grayscale image information a 预设 The grayscale values ​​of the corresponding pixels are compared. If the difference is within the preset range, it indicates that the pixel has no stain 600, which is recorded as 0. If the difference exceeds the preset range, it indicates that the pixel has stain 600, which is recorded as 1. The comparison results of all pixels of each grayscale image information are stored.

[0108] S156: Determine whether there is a stain 600 on the glass substrate 500 that is pushed when the latter grayscale image information is captured based on the comparison result of two adjacent grayscale image information.

[0109] It should be noted that the step of judging whether there is a stain 600 on the glass substrate 500 pushed when the latter grayscale image information is captured based on the comparison result of the two adjacent grayscale image information in step S156 is:

[0110] S1561: If the comparison results of the two adjacent grayscale image information are the same, it indicates that there is no stain 600 on the glass substrate 500 pushed when the latter grayscale image information is captured;

[0111] S1562: If the comparison results of two adjacent grayscale image information are different, it indicates that there is a stain 600 on the glass substrate 500 that was pushed when the latter grayscale image information was captured.

[0112] In summary, the present invention provides a glass substrate 500 cleaning device and a cleaning method, wherein the glass substrate 500 cleaning device comprises: an ultrasonic cleaning tank 100; a cleaning rack 200, which is arranged in the ultrasonic cleaning tank 100, and a plurality of supporting stations 210 are arranged on the cleaning rack 200 at intervals, and the supporting stations 210 are suitable for carrying the glass substrate 500 to be cleaned; a sequential pushing mechanism 300, which is arranged on the cleaning rack 200 and is suitable for sequentially moving the glass substrates 500 on all the supporting stations 210 in a horizontal direction; a cleaning detection mechanism 400; , which is arranged in the ultrasonic cleaning tank 100 and is suitable for detecting the cleaned glass substrate 500; during cleaning, the glass substrate 500 in the cleaning rack 200 is preliminarily cleaned by the ultrasonic cleaning tank 100. After the preliminarily cleaning is completed, the glass substrates 500 on all the supporting stations 210 are sequentially moved in the horizontal direction by the sequential pushing mechanism 300, and the glass substrates 500 are secondary cleaned by the ultrasonic cleaning tank 100; after the cleaning is completed, the cleaned glass substrate 500 is detected by the cleaning detection mechanism 400. By arranging the sequential pushing mechanism 300 on the cleaning rack 200, when cleaning the glass substrate 500, the glass substrate 500 is firstly cleaned by the ultrasonic cleaning tank 100, and then the glass substrates 500 on all the supporting stations 210 are sequentially moved in the horizontal direction by the sequential pushing mechanism 300, and the glass substrates 500 are secondarily cleaned by the ultrasonic cleaning tank 100, so that the part of the glass substrate 500 covered by the supporting station 210 is cleaned, thereby improving the cleaning quality of the glass substrate 500. At the same time, by arranging the cleaning detection mechanism 400, the cleaned glass substrates 500 are directly batch-tested in the ultrasonic cleaning tank 100, which reduces the transportation process of the glass substrate 500, improves the detection efficiency, and reduces the probability of the glass substrate 500 being scratched during circulation.

[0113] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A glass substrate cleaning device, characterized in that: include: Ultrasonic cleaning tank (100); A cleaning rack (200) disposed in the ultrasonic cleaning tank (100), wherein a plurality of supporting stations (210) are arranged at intervals on the cleaning rack (200), and wherein the supporting stations (210) are suitable for supporting glass substrates (500) to be cleaned; A sequential pushing mechanism (300) is arranged on the cleaning rack (200) and is suitable for sequentially moving the glass substrates (500) on all the supporting stations (210) in a horizontal direction; A cleaning detection mechanism (400), which is arranged in the ultrasonic cleaning tank (100) and is suitable for detecting the cleaned glass substrate (500); During cleaning, the glass substrates (500) in the cleaning rack (200) are initially cleaned by an ultrasonic cleaning tank (100); after the initial cleaning is completed, the glass substrates (500) on all the supporting stations (210) are sequentially pushed by a sequential pushing mechanism (300) to expose the shielding areas of the supporting stations (210); and the glass substrates (500) are secondary cleaned by the ultrasonic cleaning tank (100); After cleaning is completed, the cleaned glass substrate (500) is inspected by the cleaning inspection mechanism (400), and the glass substrate (500) with stains (600) is marked for subsequent cleaning.

2. The glass substrate cleaning device according to claim 1, characterized in that: The cleaning detection mechanism (400) comprises: A planar light source (410), a grayscale camera (430), and a control module (440); The planar light source (410) and the grayscale camera (430) are respectively arranged on two opposite sides of the ultrasonic cleaning tank (100); The planar light source (410) sends a parallel light beam toward the glass substrate (500), and the parallel light beam passes through all the glass substrates (500) and then irradiates the grayscale camera (430); The grayscale camera (430) is adapted to acquire grayscale image information and send it to the control module (440); The control module (440) is configured to detect stains (600) on the glass substrate (500) based on the received grayscale image information.

3. The glass substrate cleaning device according to claim 2, characterized in that: The control module (440) is electrically connected to the sequential pushing mechanism (300); After the glass substrate (500) is cleaned, the control module (440) is further configured to control the sequential pushing mechanism (300) to sequentially move the glass substrates (500) on all the supporting stations (210) in a horizontal direction; and After each time a glass substrate (500) on a supporting station (210) is pushed, the control module (440) is further configured to control the grayscale camera (430) to reacquire grayscale image information and send the grayscale image information to the control module (440); The control module (440) detects stains (600) on the glass substrate (500) based on the received grayscale image information, that is, detects the glass substrate (500) on each supporting station (210) based on all the received grayscale image information.

4. The glass substrate cleaning device according to claim 3, characterized in that: The step of detecting the glass substrate (500) on each supporting station (210) based on all received grayscale image information comprises: Sort all the grayscale image information acquired by the acquisition time to obtain the grayscale image information set (a1, a2…a n ), where a1 represents the first grayscale image information, a n Represents the nth grayscale image information; Get the preset grayscale image information a 预设 , wherein the preset grayscale image information is grayscale image information of the stacked glass substrates acquired by the grayscale camera (430) after the glass substrates (500) without stains (600) are placed in all the supporting stations (210); Respectively a1, a2…a n The gray value of each pixel in a 预设 Perform comparison and obtain the comparison results k1…k of each grayscale image information n , where k1 represents the comparison result of grayscale image information a1, k n Represents grayscale image information a n The comparison results; It is determined based on the comparison result of two adjacent grayscale image information whether there is stain (600) on the glass substrate (500) that is pushed when the latter grayscale image information is captured.

5. The glass substrate cleaning device according to claim 4, characterized in that: The step of judging whether there is a stain (600) on the glass substrate (500) pushed when the latter grayscale image information is captured based on the comparison result of two adjacent grayscale image information is as follows: If the comparison results of two adjacent grayscale image information are the same, it indicates that there is no stain (600) on the glass substrate (500) that was pushed when the latter grayscale image information was taken; If the comparison results of two adjacent grayscale image information are different, it indicates that there is stain (600) on the glass substrate (500) that was pushed when the latter grayscale image information was taken.

6. The glass substrate cleaning device according to claim 1, wherein: The bottom of the cleaning rack (200) is provided with a first supporting rod (220) and a second supporting rod (230); The first supporting rod (220) and the second supporting rod (230) are arranged opposite to each other, and the height of the second supporting rod (230) is higher than the height of the first supporting rod (220); The supporting station (210) comprises two U-shaped limiting plates (240); The two U-shaped limiting plates (240) are respectively arranged on the first supporting rod (220) and the second supporting rod (230).

7. The glass substrate cleaning device according to claim 6, wherein: The sequential pushing mechanism (300) comprises a sleeve (330), a driving block (310) and a driving part (320); The sleeve (330) is provided with a driving groove (332) at a position opposite to each of the supporting stations (210); A push block (331) is disposed in the driving groove (332); The driving portion (320) is suitable for driving the driving block (310) to extend into the sleeve (330), thereby sequentially pushing the pushing blocks (331) to extend from the corresponding driving slots (332), thereby sequentially moving the glass substrates (500) on the corresponding supporting stations (210) in a horizontal direction.

8. A glass substrate cleaning method, characterized in that: include: Inserting a glass substrate (500) to be cleaned into each supporting station (210) of the cleaning rack (200); Place the cleaning rack (200) into the ultrasonic cleaning tank (100); Preliminary cleaning of the glass substrate (500) is performed using an ultrasonic cleaning tank (100); Controlling the sequential pushing mechanism (300) to sequentially move the glass substrates (500) on all the supporting stations (210) in a horizontal direction, and controlling the ultrasonic cleaning tank (100) to perform secondary cleaning on the glass substrates (500); After cleaning is completed, the cleaned glass substrate (500) is inspected by a cleaning inspection mechanism (400), and the glass substrate with stains is marked for subsequent cleaning.

9. The glass substrate cleaning method according to claim 8, wherein: After the cleaning is completed, the step of inspecting the cleaned glass substrate (500) by means of the cleaning inspection mechanism (400) comprises: Controlling the planar light source (410) to send a parallel light beam toward the glass substrate (500); Acquiring grayscale image information through a grayscale camera (430); driving the sequential pushing mechanism (300) to sequentially move the glass substrates (500) on all the supporting stations (210) in a horizontal direction, and controlling the grayscale camera (430) to reacquire grayscale image information after each glass substrate (500) on a supporting station (210) is pushed; Sort all the grayscale image information acquired by the acquisition time to obtain the grayscale image information set (a1, a2…a n ), where a1 represents the first grayscale image information, a n Represents the nth grayscale image information; Get the preset grayscale image information a 预设 ; Respectively a1, a2…a n The gray value of each pixel in a 预设 Perform comparison and obtain the comparison results k1…k of each grayscale image information n , where k1 represents the comparison result of grayscale image information a1, k n Represents grayscale image information a n The comparison results; It is determined based on the comparison result of two adjacent grayscale image information whether there is stain (600) on the glass substrate (500) that is pushed when the latter grayscale image information is captured.

10. The glass substrate cleaning method according to claim 9, characterized in that: The step of judging whether there is stain (600) on the glass substrate (500) pushed when the latter grayscale image information is captured based on the comparison result of two adjacent grayscale image information, namely: If the comparison results of two adjacent grayscale image information are the same, it indicates that there is no stain (600) on the glass substrate (500) that was pushed when the latter grayscale image information was taken; If the comparison results of two adjacent grayscale image information are different, it indicates that there is stain (600) on the glass substrate (500) that was pushed when the latter grayscale image information was taken.

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