Dust removal method, device, equipment and medium

By dividing dust area division and dividing dust area division of semiconductor precision devices, the problems of poor dust removal effect and secondary pollution in the prior art are solved, and a more efficient and cleaner dust removal effect is achieved.

CN119702600AActive Publication Date: 2025-03-28JIANWEI SEMICONDUCTOR (SHENZHEN) CO LTD

Patent Information

Application Number
CN202510214597.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-26
Publication Date
2025-03-28
Estimated Expiration
2045-02-26

AI Technical Summary

Technical Problem

When cleaning semiconductor precision devices, existing dust removal devices may easily lead to contamination of the surface of the device that originally does not have dust, and the cleaning effect is not ideal, resulting in poor dust removal effect.

Method used

By obtaining the dust area on the product to be cleaned, determining the number and area of ​​dust, obtaining the specifications of the dust stick, determining the mapping relationship between the contact area of ​​the dust stick and the product and the down pressure, dividing the dust area, and selecting the dust area that is not stuck for each dust for down pressure removal.

Benefits of technology

It improves the dust removal effect of cleaning products, avoids secondary contamination caused by repeated contact with the product in areas where the stick head is used, and ensures higher cleaning quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to the technical field of dust removal, in particular to a dust removal method, device and equipment and a medium. The method comprises the following steps: determining a mapping relation between an actual contact area of a dust-sticking rod and a to-be-cleaned product and a downward pressure according to the specification of the dust-sticking rod, determining the number of dust-sticking regions of the dust-sticking rod and a corresponding downward pressure value according to the number of dust, the dust area of each dust and the mapping relation, and dividing the dust-sticking regions of the dust-sticking rod according to the number of the dust-sticking regions, and any dust sticking area without dust sticking is selected as a target area, the geometric center of the target area is controlled to be aligned with the geometric center of target dust, and the pressure value is used for pressing down the dust sticking rod for dust removal. According to the dust removing device, the dust sticking rod is divided into the dust sticking areas, the geometric center of the dust sticking areas and the geometric center of dust coincide and make contact for dust removal, secondary pollution caused by the fact that the used areas of the dust sticking rod head make contact with products repeatedly is avoided, and the dust removing effect on the to-be-cleaned products is improved.
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Description

Technical Field

[0001] The present invention relates to the technical field of dust removal, and in particular to a dust removal method, device, equipment and medium. Background Art

[0002] Semiconductor precision devices have always been affected by dust and have a low yield rate. In order to solve the problem of dust pollution, many solutions have been adopted. Existing dust removal devices usually use wet cleaning methods or air blowing cleaning methods to clean the surfaces of electronic components and optical components. During the cleaning process, the wet cleaning method and the air blowing cleaning method will clean electronic components with dust and electronic components without dust together, or clean optical components with dust and optical components without dust together, which can easily cause the surfaces of electronic components that originally did not have dust to be contaminated and the surfaces of optical components that did not have dust to be contaminated. In addition to causing secondary pollution, the cleaning effect is not very ideal. Therefore, in the process of dust removal for semiconductor precision devices, how to improve the dust removal effect has become an urgent problem to be solved. Summary of the invention

[0003] In view of this, the embodiments of the present invention provide a dust removal method, device, equipment and medium to solve the problem that the dust removal effect is not very ideal during the dust removal process of semiconductor precision devices.

[0004] In a first aspect, an embodiment of the present invention provides a dust removal method, the dust removal method comprising: Obtain a dust area on the product to be cleaned, and determine the number of dust particles in the dust area and the dust area of ​​each dust particle; Obtaining the specifications of the sticky stick, and determining the mapping relationship between the actual contact area between the sticky stick and the product to be cleaned and the downward pressure according to the specifications of the sticky stick; According to the number of dust particles, the dust area of ​​each dust particle and the mapping relationship, determine the number of dust sticking areas of the dust sticking stick and the corresponding downward pressure value, and divide the dust sticking stick into dust sticking areas according to the number of dust sticking areas to obtain at least one dust sticking area; For any target dust, any dust-free sticky area is selected as the target area, the geometric center of the target area is controlled to be aligned with the geometric center of the target dust, and the dust-sticking rod is pressed down to remove dust using the pressure value.

[0005] In a second aspect, an embodiment of the present invention provides a dust removal device, the dust removal device comprising: An acquisition module is used to acquire a dust area on the product to be cleaned, and determine the number of dust particles in the dust area and the dust area of ​​each dust particle; A first determination module is used to obtain the specifications of the sticky stick and determine the mapping relationship between the actual contact area between the sticky stick and the product to be cleaned and the downward force according to the specifications of the sticky stick; a division module, for determining the number of dust sticking areas of the dust sticking stick and the corresponding downward pressure value according to the number of dust particles, the dust area of ​​each dust particle and the mapping relationship, and dividing the dust sticking area of ​​the dust sticking stick according to the number of dust sticking areas to obtain at least one dust sticking area; The dust removal module is used to select any undusted dust sticking area as the target area for any target dust, control the geometric center of the target area to align with the geometric center of the target dust, and use the pressure value to press down the dust stick to remove dust.

[0006] In a third aspect, an embodiment of the present invention provides a computer device, comprising a processor, a memory, and a computer program stored in the memory and executable on the processor, wherein the processor executes a dust removal method.

[0007] In a fourth aspect, an embodiment of the present invention provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the dust removal method as described in the first aspect is implemented.

[0008] Compared with the prior art, the present invention has the following beneficial effects: Obtain the dust area on the product to be cleaned, determine the number of dust particles in the dust area and the dust area of ​​each dust particle, obtain the specifications of the dust sticking stick, determine the mapping relationship between the actual contact area of ​​the dust sticking stick and the product to be cleaned and the downward pressure according to the specifications of the dust sticking stick, determine the number of dust sticking areas of the dust sticking stick and the corresponding downward pressure value according to the number of dust particles, the dust area of ​​each dust particle and the mapping relationship, divide the dust sticking area according to the number of dust sticking areas to obtain at least one dust sticking area, and for any target dust, select any un-dust sticking area as the target area, control the geometric center of the target area to align with the geometric center of the target dust, and use the pressure value to press down the dust sticking stick to remove dust. In the present application, the dust sticking stick is divided into several dust sticking areas, so that the geometric center of the dust sticking area coincides with the geometric center of the dust for contacting to remove dust, so as to avoid repeated contact of the area used by the sticking stick head with the product to cause secondary contamination, thereby improving the dust removal effect of the product to be cleaned. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative labor.

[0010] Figure 1 It is a schematic flow chart of a dust removal method provided by an embodiment of the present invention; Figure 2 is a schematic diagram of a corresponding relationship between an actual contact area and a compression amount provided by an embodiment of the present invention; Figure 3 is a schematic diagram of a corresponding relationship between downforce and compression provided by an embodiment of the present invention; Figure 4 is a structural schematic diagram of a dust removal device provided by an embodiment of the present invention; Figure 5 It is a structural schematic diagram of a computer device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0011] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0012] In the following description, specific details such as specific system structures, technologies, etc. are provided for the purpose of illustration rather than limitation, so as to provide a thorough understanding of the embodiments of the present invention. However, it should be clear to those skilled in the art that the present invention may be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, circuits, and methods are omitted to prevent unnecessary details from obstructing the description of the present invention.

[0013] It should be understood that when used in the present specification and the appended claims, the term "comprising" indicates the presence of described features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0014] It should also be understood that the term "and / or" used in the present description and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.

[0015] As used in the present specification and the appended claims, the term "if" may be interpreted as "when" or "upon" or "in response to determining" or "in response to detecting", depending on the context. Similarly, the phrase "if it is determined" or "if [described condition or event] is detected" may be interpreted as meaning "upon determination" or "in response to determining" or "upon detection of [described condition or event]" or "in response to detecting [described condition or event]", depending on the context.

[0016] In addition, in the description of the present specification and the appended claims, the terms "first", "second", "third", etc. are only used to distinguish the descriptions and cannot be understood as indicating or implying relative importance.

[0017] References to "one embodiment" or "some embodiments" etc. described in the present specification mean that one or more embodiments of the present invention include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the statements "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. that appear in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0018] It should be understood that the order of execution of the steps in the following embodiments does not imply a precedence of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0019] In order to illustrate the technical solution of the present invention, specific embodiments are provided below for illustration.

[0020] See also Figure 1 , is a schematic diagram of a dust removal method provided in Example 1 of the present invention, such as Figure 1 As shown, the dust removal method may include the following steps.

[0021] S101: Obtain a dust area on the product to be cleaned, and determine the number of dust particles in the dust area and the dust area of ​​each dust particle.

[0022] In step S101, a dust area on the product to be cleaned is obtained, and the number of dust particles and the dust area of ​​each dust particle in the dust area are determined, wherein the dust area is an area containing at least one dust particle, and the number of dust particles and the dust area of ​​each dust particle are determined in the dust area.

[0023] In this embodiment, the surface image of the product to be cleaned is collected, and the surface image is grayed and binarized to obtain a gray image. Binarization is a process of resetting the pixel values ​​of the gray image to 0 or 255 according to a certain rule so that there are only two colors, black and white, in the surface image. Binarization greatly reduces the amount of data while retaining a certain amount of information, which is conducive to shortening the subsequent image processing process.

[0024] To obtain the dust area on the product to be cleaned, the grayscale image can be compared with a standard grayscale image of a standard surface image of the product to be cleaned that is obtained in advance, and the pixel values ​​at the same position in the grayscale image and the standard grayscale image can be compared. If the difference between the pixel values ​​at the same position is greater than a preset threshold, the pixel position is considered to be the corresponding dust, and the corresponding dust area is obtained.

[0025] It should be noted that the standard surface image and the surface image are dust-free product surface images collected by the same device at the same location and in the same environment.

[0026] After obtaining the dust area on the cleaning product, determine the number of dust particles in the dust area and the dust area of ​​each dust particle, wherein the number of dust particles can be determined based on the connected area of ​​the dust, that is, the dust in a connected area is determined as one dust particle, and the dust area of ​​each dust particle can be determined based on the number of pixels of the dust, and the number of pixels where the dust is located is multiplied by the area of ​​each pixel to obtain the corresponding dust area of ​​each dust particle.

[0027] Optionally, obtaining a dust area on the product to be cleaned includes: acquiring an image of a surface of a product to be cleaned; Based on the pixel values ​​of the surface image, the dust area of ​​the product to be cleaned is determined.

[0028] In this embodiment, a surface image of the product to be cleaned is obtained, and the dust area of ​​the product to be cleaned is determined based on the pixel value of the surface image, that is, it is determined based on the pixel value difference between the pixel points in the surface image and the normal pixel points. When the pixel value difference is greater than a preset threshold, it is considered that corresponding dust exists.

[0029] It should be noted that when determining the pixel value difference between pixels, the pixel value of the normal pixel in the surface image is first determined, and the pixel value of the normal pixel is calculated and subtracted from the pixel value of each pixel to obtain the pixel value difference between the pixels. The pixel whose pixel value difference is greater than a preset threshold is determined as the dust area of ​​the product to be cleaned.

[0030] S102: Obtain the specifications of the sticky stick, and determine the mapping relationship between the actual contact area between the sticky stick and the product to be cleaned and the downward pressure according to the specifications of the sticky stick.

[0031] In step S102, the specification of the sticky stick, i.e., the size of the sticky stick, is used to determine the mapping relationship between the actual contact area between the sticky stick and the product to be cleaned and the downward force, wherein the mapping relationship represents the one-to-one correspondence between the downward force and the surface area of ​​contact with the product to be cleaned when the size of the sticky stick is constant.

[0032] In this embodiment, the sticky stick is a semi-solidified body in the shape of a water drop. The sticky stick will continue to dry in the air, release energy during the drying process, and the internal molecular movement will generate adsorption force, so that when it comes into contact with dust, the dust can be sucked away by the adsorption force. The specifications of the sticky stick are different, and the mapping relationship between the actual contact area and the downward pressure of the sticky stick and the product to be cleaned is different. After obtaining the specifications of the sticky stick, the mapping relationship between the actual contact area and the downward pressure of the sticky stick and the product to be cleaned is determined according to the specifications of the sticky stick, that is, when the area that the sticky stick needs to cover is determined, the downward pressure of the dust removal stick can be determined according to the mapping relationship, so that the actual contact area between the sticky stick and the product to be cleaned can meet the corresponding requirements under the corresponding downward pressure.

[0033] In this embodiment, when determining the mapping relationship between the actual contact area between the sticky stick and the product to be cleaned and the downward pressure, the relationship between the compression amount and the actual contact area is first determined, wherein the compression amount is the deformation amount of the sticky stick under the downward pressure when the sticky stick contacts the product to be cleaned, and the actual contact area increases with the continuous increase of the compression amount and finally tends to be constant. Figure 2 , Figure 2 is a schematic diagram of the corresponding relationship between the actual contact area and the compression amount provided by an embodiment of the present invention, wherein the horizontal axis is the compression amount in millimeters, and the vertical axis is the actual contact area between the dust stick and the product to be cleaned in square millimeters. Then, determine the corresponding relationship between the compression amount and the downward force, see Figure 3 , Figure 3 It is a schematic diagram of the corresponding relationship between a downward force and a compression amount provided by an embodiment of the present invention, wherein the horizontal axis is the compression amount, the unit is millimeter, and the vertical axis is the downward force of the dust stick, the unit is gauge pressure.

[0034] according to Figure 2 and Figure 3 , determine the mapping relationship between the actual contact area between the sticky stick and the product to be cleaned and the downward pressure, that is, when the actual contact area between the sticky stick and the product to be cleaned is determined, according to Figure 2 Determine the compression amount of the dust stick, according to Figure 3 , determine the downforce required for the corresponding amount of compression.

[0035] In this embodiment, according to the specifications of the sticky stick, the mapping relationship between the actual contact area between the sticky stick and the product to be cleaned and the downward pressure is determined to facilitate determining the corresponding downward pressure, so that the dust removal device can be controlled to apply a corresponding pressure to the sticky stick according to the downward pressure, so as to better remove the corresponding dust.

[0036] S103: Determine the number of dust sticking areas of the dust sticking rod and the corresponding downward pressure value according to the number of dust particles, the dust area of ​​each dust particle and the mapping relationship, and divide the dust sticking rod into dust sticking areas according to the number of dust sticking areas to obtain at least one dust sticking area.

[0037] In step S103, the number of dust sticking areas of the dust sticking rod and the corresponding downward pressure value are determined according to the number of dust particles, the dust area of ​​each dust particle and the mapping relationship, wherein the number of dust sticking areas is not less than the number of dust particles. According to the number of dust sticking areas, the dust sticking rod is divided into dust sticking areas to obtain at least one dust sticking area, wherein one dust sticking area is used to remove dust from one of the dust particles.

[0038] In this embodiment, the total area of ​​the dust is calculated based on the number of dust particles and the dust area of ​​each dust particle, and the actual contact area between the dust sticking rod and the product to be cleaned is determined based on the total area of ​​the dust, wherein the actual contact area is greater than or equal to the total area of ​​the dust, so that the dust corresponding to the dust area can be completely removed when the dust sticking rod contacts the product to be cleaned. The number of dust sticking areas of the dust sticking rod is determined based on the number of dust particles, and the number of dust sticking areas is not less than the number of dust particles.

[0039] According to the corresponding mapping relationship and the actual contact surface, the pressure value of the dust removal rod pressing down is determined so that the dust removal rod can reach the corresponding actual contact area under the corresponding pressure value.

[0040] According to the number of dust sticking areas, the dust sticking rod is divided into dust sticking areas equal to the number of dust sticking areas, so as to ensure that when only one dust is removed from each dust sticking area, the divided dust sticking areas can remove all dust.

[0041] It should be noted that when the dust sticking rod is divided into dust sticking areas according to the number of dust sticking areas, the dust sticking rod can be divided into dust sticking areas of equal area, that is, the dust sticking rod is divided into equal areas regardless of the size of the dust area. The number of divided dust sticking areas is not less than the number of dust particles.

[0042] In this embodiment, the number of dust sticking areas of the sticky stick is determined based on the number of dust particles, and the number of dust sticking areas is not less than the number of dust particles to ensure that during dust removal, a dust sticking area that has not been in contact with the dust can be used to contact the corresponding dust, thereby removing the corresponding dust, and preventing the dust sticking area that is in contact with the dust from contacting the corresponding dust, causing secondary contamination to the cleaning product.

[0043] In another embodiment, when determining the number of dust sticking areas of the sticky rod, it can also be determined based on a preset number of dust sticking areas, that is, the number of dust sticking areas is independent of the number of dust particles, and the number of dust sticking areas is determined as a fixed value. According to the corresponding fixed value, the sticky rod is divided into dust sticking areas to obtain at least one dust sticking area.

[0044] It should be noted that after the dust sticking bar is divided into dust sticking areas according to the corresponding fixed value, one dust sticking area is still used to remove dust from one of the dusts.

[0045] Optionally, the dust sticking rod is divided into dust sticking areas according to the number of dust sticking areas to obtain at least one dust sticking area, including: Processing the area corresponding to the actual contact area to obtain the processed area to be divided; According to the number of dust sticking areas, the dust sticking areas are divided in the area to be divided to obtain at least one dust sticking area.

[0046] In this embodiment, the area corresponding to the actual contact area is processed to obtain the processed area to be divided. When processing the area corresponding to the actual contact area, the actual contact area can be processed as an inscribed square to obtain the inscribed square of the actual contact area, and the inscribed square is determined as the processed area to be divided.

[0047] According to the number of dust sticky areas, the dust sticky areas are divided in the area to be divided, and the number of divided dust sticky areas is equal to the number of dust sticky areas.

[0048] S104: For any target dust, any dust-free sticky area is selected as the target area, the geometric center of the target area is controlled to be aligned with the geometric center of the target dust, and the dust sticking stick is pressed down to remove dust using a pressure value.

[0049] In step S104, for any target dust, any unsticky dust-adherent area is selected as the target area, the geometric center of the target area is controlled to be aligned with the geometric center of the target dust, and the sticky stick is pressed down using a pressure value to remove dust, wherein when the geometric center of the target area is controlled to be aligned with the geometric center of the target dust and the sticky stick is pressed down using a pressure value to remove dust, the target area is controlled to be in contact with the dust for dust removal.

[0050] In this embodiment, in order to prevent secondary contamination of the product to be cleaned, a dust-free sticky area is used for dust removal, and any dust-free sticky area is used as a target area. When the target area is used for dust removal, the geometric center of the target area is controlled to be aligned with the geometric center of the target dust, and the dust-free sticky rod is pressed down to remove dust using a pressure value. The geometric center of the target area is controlled to be aligned with the geometric center of the target dust so that the target area and the target dust can contact with the maximum area, so that the target area can remove the corresponding dust.

[0051] The pressure value is used to press down the sticky stick to remove dust, so that the contact area between the stick and the product to be cleaned meets the actual contact area requirement, thereby ensuring that the area of ​​the target area is divided based on the actual contact area.

[0052] It should be noted that when dust is removed sequentially for each dust particle, the dust removal sequence may be arbitrary, and may be determined according to the dust particle coordinates, or may be determined according to the dust particle size. This embodiment does not limit this.

[0053] It should be noted that when removing dust, the dust sticking areas can be determined as corresponding target areas in sequence according to the arrangement order of the dust sticking areas. If there are four dust sticking areas, and the four dust sticking areas are arranged in the order of two rows and two columns, the dust sticking area in the first row and the first column can be used as the target area first, and then the dust sticking area in the first row and the second column can be used as the next target area, or the dust sticking area in the second row and the first column can be used as the next target area. In other embodiments, the corresponding target areas can also be selected out of sequence, which is not limited in this embodiment.

[0054] Optionally, before controlling the geometric center of the target area to align with the geometric center of the target dust and using the pressure value to press down the dust stick to remove dust, the method further includes: Sort each dust according to its dust area to obtain the corresponding dust removal order; According to the dust removal sequence, the target dust to be removed is determined.

[0055] In this embodiment, each dust is sorted from large to small according to the dust area of ​​each dust to obtain a corresponding dust removal order, and the target dust to be removed is determined according to the dust removal order, and the target dust is removed using the target area.

[0056] In this embodiment, the corresponding dust removal order is determined according to the size of the dust area. When the dust area is larger than the area of ​​the target area, multiple dust sticking areas can be used as target areas to remove dust. When multiple dust sticking areas are used to remove dust, the geometric centers of the multiple dust sticking areas are aligned with the geometric center of the dust, and the pressure value is used to press the dust stick down to remove dust.

[0057] It should be noted that after using multiple sticky dust areas to remove dust from a dust, if the remaining number of dust is less than or equal to the number of sticky dust areas that are not sticky, then continue to determine the corresponding target area and target dust, control the geometric center of the target area to align with the geometric center of the target dust, and use the pressure value to press the sticky dust bar down to remove dust. If after using multiple sticky dust areas to remove dust from a dust, if the remaining number of dust is greater than the number of sticky dust areas that are not sticky, then continue to determine the corresponding target area and target dust, control the geometric center of the target area to align with the geometric center of the target dust, and use the pressure value to press the sticky dust bar down to remove dust, there is dust that has not been removed. In order to prevent the sticky dust area that has been used to remove dust again, a new sticky dust bar can be used for dust removal.

[0058] In another embodiment, the dust can also be sorted according to the coordinates of the geometric center of the dust, that is, the dust is removed according to the order of the coordinates of the geometric center of the dust. When sorting according to the coordinates of the geometric center of the dust, the sorting can be based on the size of the horizontal coordinate or the size of the vertical coordinate. When the horizontal coordinates are equal, the sorting is performed according to the size of the vertical coordinate, or when the vertical coordinates are equal, the sorting is performed according to the size of the horizontal coordinate. For example, when the geometric centers of the dust are in the same row or column, the corresponding horizontal coordinates or the total vertical coordinates are equal, and the sorting is performed according to the size of the vertical coordinate or the size of the horizontal coordinate. After sorting, dust is removed in sequence according to the corresponding sorting order.

[0059] Obtain the dust area on the product to be cleaned, determine the number of dust particles in the dust area and the dust area of ​​each dust particle, obtain the specifications of the dust sticking stick, determine the mapping relationship between the actual contact area of ​​the dust sticking stick and the product to be cleaned and the downward pressure according to the specifications of the dust sticking stick, determine the number of dust sticking areas of the dust sticking stick and the corresponding downward pressure value according to the number of dust particles, the dust area of ​​each dust particle and the mapping relationship, divide the dust sticking area according to the number of dust sticking areas to obtain at least one dust sticking area, and for any target dust, select any un-dust sticking area as the target area, control the geometric center of the target area to align with the geometric center of the target dust, and use the pressure value to press down the dust sticking stick to remove dust. In the present application, the dust sticking stick is divided into several dust sticking areas, so that the geometric center of the dust sticking area coincides with the geometric center of the dust for contacting to remove dust, so as to avoid repeated contact of the area used by the sticking stick head with the product to cause secondary contamination, thereby improving the dust removal effect of the product to be cleaned.

[0060] See also Figure 4 , is a schematic diagram of the structure of a dust removal device provided by an embodiment of the present invention. For the sake of convenience, only the parts related to the embodiment of the present invention are shown. Figure 4 The dust removal device 40 includes: an acquisition module 41, a first determination module 42, a division module 43, and a dust removal module 44.

[0061] The acquisition module 41 is used to acquire the dust area on the product to be cleaned, and determine the number of dust particles in the dust area and the dust area of ​​each dust particle.

[0062] The first determination module 42 is used to obtain the specifications of the sticky stick and determine the mapping relationship between the actual contact area between the sticky stick and the product to be cleaned and the downward force according to the specifications of the sticky stick.

[0063] The division module 43 is used to determine the number of dust sticking areas of the dust sticking rod and the corresponding downward pressure value according to the number of dust particles, the dust area of ​​each dust particle and the mapping relationship, and divide the dust sticking rod into dust sticking areas according to the number of dust sticking areas to obtain at least one dust sticking area.

[0064] The dust removal module 44 is used for selecting any dust-free dust-adhering area as the target area for any target dust, controlling the geometric center of the target area to align with the geometric center of the target dust, and using a pressure value to press down the dust-adhering rod to remove dust.

[0065] Optionally, the division module 43 includes: The processing unit is used to process the area corresponding to the actual contact area to obtain the processed area to be divided.

[0066] The obtaining unit is used to divide the dust sticking area in the area to be divided according to the number of dust sticking areas, so as to obtain at least one dust sticking area.

[0067] Optionally, the dust removal device 40 further includes: The sorting module is used to sort each dust according to the dust area of ​​each dust to obtain a corresponding dust removal order.

[0068] The second determining module is used to determine the target dust to be removed according to the dust removal sequence.

[0069] Optionally, the acquisition module 41 includes: The acquisition unit is used to acquire the surface image of the product to be cleaned.

[0070] The determination unit is used to determine the dust area of ​​the product to be cleaned according to the pixel value of the surface image.

[0071] It should be noted that the information interaction, execution process and other contents between the above modules are based on the same concept as the embodiment of the method of the present invention. Their specific functions and technical effects can be found in the method embodiment part and will not be repeated here.

[0072] Figure 5 FIG. 1 is a schematic diagram of the structure of a computer device provided by an embodiment of the present invention. Figure 5As shown, the computer device of this embodiment includes: at least one processor ( Figure 5 Only one is shown in the figure), a memory, and a computer program stored in the memory and executable on at least one processor, wherein when the processor executes the computer program, the steps in any of the above-mentioned dust removal method embodiments are implemented.

[0073] The computer device may include, but is not limited to, a processor and a memory. Those skilled in the art will appreciate that Figure 5 This is merely an example of a computer device and does not constitute a limitation on the computer device. The computer device may include more or fewer components than those shown in the figure, or a combination of certain components, or different components, for example, it may also include a network interface, etc.

[0074] The processor may be a CPU, or other general-purpose processors, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor may be a microprocessor or any conventional processor, etc.

[0075] The memory includes a readable storage medium, an internal memory, etc., wherein the internal memory may be the memory of a computer device, and the internal memory provides an environment for the operation of the operating system and computer-readable instructions in the readable storage medium. The readable storage medium may be a hard disk of a computer device, and in other embodiments, it may also be an external storage device of the computer device, for example, a plug-in hard disk, a smart memory card (Smart Media Card, SMC), a secure digital (Secure Digital, SD) card, a flash card (Flash Card), etc. equipped on the computer device. Further, the memory may also include both an internal storage unit of the computer device and an external storage device. The memory is used to store an operating system, an application program, a boot loader (BootLoader), data, and other programs, such as the program code of a computer program, etc. The memory may also be used to temporarily store data that has been output or is to be output.

[0076] The technicians in the relevant field can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional units and modules is used as an example. In practical applications, the above-mentioned function allocation can be completed by different functional units and modules as needed, that is, the internal structure of the device is divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiment can be integrated into a processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The above-mentioned integrated unit can be implemented in the form of hardware or in the form of software functional units. In addition, the specific names of the functional units and modules are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of the present invention. The specific working process of the units and modules in the above-mentioned device can refer to the corresponding process in the above-mentioned method embodiment, which will not be repeated here. If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on such understanding, the present invention implements all or part of the processes in the above-mentioned embodiment method, which can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a computer-readable storage medium. When the computer program is executed by the processor, the steps of the above-mentioned method embodiment can be implemented. Among them, the computer program includes computer program code, and the computer program code can be in source code form, object code form, executable file or some intermediate form. The computer-readable medium may at least include: any entity or device capable of carrying computer program code, recording medium, computer memory, read-only memory (ROM), random access memory (RAM), electric carrier signal, telecommunication signal and software distribution medium. For example, a USB flash drive, a mobile hard disk, a magnetic disk or an optical disk. In some jurisdictions, according to legislation and patent practice, computer-readable media cannot be electric carrier signals and telecommunication signals.

[0077] The present invention implements all or part of the processes in the above-mentioned embodiment method, and can also be completed by a computer program product. When the computer program product runs on a computer device, the computer device can implement the steps in the above-mentioned method embodiment when executing.

[0078] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0079] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of the present invention.

[0080] In the embodiments provided by the present invention, it should be understood that the disclosed devices / computer equipment and methods can be implemented in other ways. For example, the device / computer equipment embodiments described above are only schematic, for example, the division of modules or units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0081] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0082] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be included in the protection scope of the present invention.

Claims

1. A dust removal method, characterized in that: The dust removal method comprises: Obtain a dust area on the product to be cleaned, and determine the number of dust particles in the dust area and the dust area of ​​each dust particle; Obtaining the specifications of the sticky stick, and determining the mapping relationship between the actual contact area between the sticky stick and the product to be cleaned and the downward pressure according to the specifications of the sticky stick; According to the number of dust particles, the dust area of ​​each dust particle and the mapping relationship, determine the number of dust sticking areas of the dust sticking stick and the corresponding downward pressure value, and divide the dust sticking stick into dust sticking areas according to the number of dust sticking areas to obtain at least one dust sticking area; For any target dust, any dust-free sticky area is selected as the target area, the geometric center of the target area is controlled to be aligned with the geometric center of the target dust, and the dust-sticking rod is pressed down to remove dust using the pressure value.

2. The dust removal method according to claim 1, characterized in that: The step of dividing the dust sticking rod into dust sticking areas according to the number of dust sticking areas to obtain at least one dust sticking area includes: Processing the area corresponding to the actual contact area to obtain a processed area to be divided; According to the number of dust sticking areas, the dust sticking areas are divided in the area to be divided to obtain at least one dust sticking area.

3. The dust removal method according to claim 1, characterized in that: Before controlling the geometric center of the target area to align with the geometric center of the target dust and using the pressure value to press down the dust sticking stick to remove dust, the method further includes: Sort each dust according to its dust area to obtain the corresponding dust removal order; According to the dust removal sequence, target dust to be removed is determined.

4. The dust removal method according to claim 1, characterized in that: The step of obtaining the dust area on the product to be cleaned comprises: acquiring an image of a surface of a product to be cleaned; The dust area of ​​the product to be cleaned is determined according to the pixel values ​​of the surface image.

5. A dust removal device, characterized in that: The dust removal device comprises: An acquisition module is used to acquire a dust area on the product to be cleaned, and determine the number of dust particles in the dust area and the dust area of ​​each dust particle; A first determination module is used to obtain the specifications of the sticky stick and determine the mapping relationship between the actual contact area between the sticky stick and the product to be cleaned and the downward force according to the specifications of the sticky stick; a division module, for determining the number of dust sticking areas of the dust sticking stick and the corresponding downward pressure value according to the number of dust particles, the dust area of ​​each dust particle and the mapping relationship, and dividing the dust sticking area of ​​the dust sticking stick according to the number of dust sticking areas to obtain at least one dust sticking area; The dust removal module is used to select any undusted dust sticking area as the target area for any target dust, control the geometric center of the target area to align with the geometric center of the target dust, and use the pressure value to press down the dust stick to remove dust.

6. The dust removal device according to claim 5, characterized in that: The division module comprises: A processing unit, used for processing the area corresponding to the actual contact area to obtain a processed area to be divided; The obtaining unit is used to divide the dust sticking areas in the area to be divided according to the number of the dust sticking areas to obtain at least one dust sticking area.

7. The dust removal device according to claim 5, characterized in that: The dust removal device also includes: A sorting module is used to sort each dust according to the dust area of ​​each dust to obtain a corresponding dust removal order; The second determining module is used to determine the target dust to be removed according to the dust removal sequence.

8. The dust removal device according to claim 5, characterized in that: The acquisition module comprises: An acquisition unit, used for acquiring a surface image of the product to be cleaned; A determination unit is used to determine the dust area of ​​the product to be cleaned according to the pixel values ​​of the surface image.

9. A computer device, characterized in that: The computer device includes a processor, a memory, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, the dust removal method according to any one of claims 1 to 4 is implemented.

10. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, the dust removal method according to any one of claims 1 to 4 is implemented.

Citation Information

Patent Citations

  • Dust removal method, device and equipment and storage medium

    CN111940419A

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