Compact two-dimensional scanning galvanometer, three-dimensional scanning system and additive manufacturing equipment

Abstract

The invention discloses a compact two-dimensional scanning galvanometer, a three-dimensional scanning system and additive manufacturing equipment, the compact two-dimensional scanning galvanometer comprises a galvanometer shell, a lens mounting seat, a lens, a fixed shaft and a swing voice coil motor, and the lens is arranged on the front surface of the lens mounting seat; one end of the fixed shaft is fixedly connected with the galvanometer shell, and the other end is spherically hinged with the back of the lens mounting seat; the swing voice coil motor comprises a motor base, a stator and a rotor, the motor base is connected with the galvanometer shell, the stator and the rotor are both located on the motor base, the rotor can move on the motor base along an arc track, and one end of the rotor is exposed out of the motor base and is in spherical hinge joint with the back face of the lens installation base. Compared with a traditional two-dimensional scanning galvanometer, the two-dimensional scanning galvanometer is small in occupied space, only one lens is arranged, the distortion problem is small, correction is easy, the correction time is saved, the scanning range is enlarged, the problem of two-axis matching does not exist, and the light spot ovality of a target surface can be well controlled.

Description

Technical Field

[0001] The present invention belongs to the technical field of additive manufacturing, and in particular relates to a compact two-dimensional scanning galvanometer, a three-dimensional scanning system and additive manufacturing equipment. Background Art

[0002] With the rapid development of 3D printing, in order to pursue high production efficiency of 3D printing, equipment integrators have integrated more and more galvanometers and lasers in a limited space. Even after integrating multiple galvanometer systems and lasers in this limited space, end customers still require the integration of more galvanometer systems and lasers. The 2D galvanometers on the market now have longer motors and lenses installed on one side of the motor, which makes the motor and lens take up a large space when assembled as a whole. This determines that it is impossible to integrate too many galvanometers and lasers in a limited space.

[0003] The traditional two-dimensional galvanometer uses two motors, which requires more space to integrate into a two-dimensional system. The traditional two-dimensional galvanometer uses the structure of the X and Y motor axes vertically distributed in space. The X and Y motors have a certain spatial distance, which causes the X and Y lenses to also have a distance. Because of this distance, when the target surface to be scanned is required to be a square, when the X and Y motors rotate separately, the target surface is actually scanned into a barrel or pillow-shaped format, which requires nonlinear correction through software later to obtain a square.

[0004] The overall response speed of the traditional two-dimensional galvanometer is determined by the Y-axis. Because the Y-axis lens is larger, the load on the Y-axis is also larger. In addition, the lens rotates around the motor axis, and the required torque is also larger. Therefore, the response speed of the Y-axis lens is slower than that of the X-axis lens. Therefore, when the two axes are linked, the Y-axis lens often cannot keep up with the X-axis lens. In addition, because there are two lenses, the linearity, speed and other characteristics of the two axes need to be matched in order to be well linked and scan high-quality graphics. Summary of the invention

[0005] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a compact two-dimensional scanning galvanometer, all of whose components are integrated under the lens projection, occupying a small space. The present invention has only one lens, and the distortion problem is smaller than that of the traditional two-dimensional galvanometer, which is easy to correct and saves correction time. In addition, the scanning range is increased, there is no problem of two-axis matching, and the ellipticity of the light spot on the target surface can be better controlled.

[0006] In order to achieve the above-mentioned object, the present invention provides a compact two-dimensional scanning galvanometer, comprising a galvanometer housing, a lens mounting seat, a lens, a fixed axis and a swing voice coil motor, wherein the lens is arranged on the front side of the lens mounting seat;

[0007] One end of the fixed shaft is fixedly connected to the galvanometer housing, and the other end is spherically hinged to the back of the lens mounting seat, and the lens mounting seat can rotate around the center of the spherical hinge between the fixed shaft and the lens mounting seat;

[0008] The swing voice coil motor comprises a motor seat, a stator and a mover, the motor seat is connected to the galvanometer housing, the stator and the mover are both located on the motor seat, the mover can move along a circular trajectory on the motor seat, one end of the mover is exposed from the motor seat and is spherically hinged to the back of the lens mounting seat, and the lens mounting seat can rotate around the center of the ball joint between the mover and the lens mounting seat;

[0009] The center of the ball joint between the fixed axis and the lens mounting seat is the center of the central circle, the number of the swing voice coil motors is two, and the distances from the center of the ball joint between the two movers and the lens mounting seat to the center of the central circle are equal; the center of the circle of the two movers moving along the circular trajectory coincides with the center of the central circle, and the two circular trajectories coincide with two meridians on the sphere that form an angle of 90°.

[0010] Furthermore, the stator includes a coil, the mover includes a magnetic axis, the magnetic axis is in an arc structure, the coil surrounds the magnetic axis, the magnetic axis is movably mounted with the motor base through a guide portion, and the magnetic axis can move along a circular trajectory on the motor base;

[0011] The axis center line of the magnetic axis is coaxial with the corresponding circular track, and the length of the magnetic axis is less than 1 / 4 of the circumference of the circular track.

[0012] Further, the guide portion includes an arc track provided on the motor seat and matched with the outer surface of the magnetic shaft;

[0013] Alternatively, the guide portion includes an iron core and balls arranged on the motor base, the magnetic axis is supported by a plurality of the balls, and the iron core attracts the magnetic axis so that the magnetic axis is pressed onto the plurality of the balls.

[0014] Furthermore, the other end of the magnetic shaft is exposed from the motor seat, and both ends of the magnetic shaft are provided with blocks, and the blocks are used to limit the movement of the magnetic shaft along a circular trajectory.

[0015] Furthermore, a grating ruler is arranged at the other end of the magnetic shaft, and a grating reading head is arranged on the motor seat. The grating reading head and the grating ruler are used to obtain the displacement of the magnetic shaft moving along a circular trajectory.

[0016] Furthermore, the compact two-dimensional scanning galvanometer also includes a cooling block and a driving card arranged on the galvanometer housing, and the driving card is connected to the coil and the grating reading head; and a water cooling channel is provided on the cooling block.

[0017] Furthermore, the lens is square or round. When the lens is square, the lens mounting seat includes a square frame and a cross frame mounted on the frame opening of the square frame; the lens mounting seat is made of titanium alloy or aluminum metal.

[0018] Further, the other end of the fixed shaft is spherically hinged to the lens mounting seat through a first hinge, and one end of the mover is spherically hinged to the lens mounting seat through a second hinge; the first hinge comprises a first ball head rod and a first ball head surface cover plate, the first ball head rod is connected to the fixed shaft, the first ball head surface cover plate is detachably connected to the lens mounting seat, a first spherical groove is provided on the lens mounting seat and the first ball head surface cover plate, and the ball head end of the first ball head rod is rotatably mounted in the first spherical groove;

[0019] The second hinged member includes a second ball head rod and a second ball head surface cover plate, the second ball head rod is connected to the mover, the second ball head surface cover plate is detachably connected to the lens mounting seat, a second spherical groove is provided on the lens mounting seat and the second ball head surface cover plate, and the ball head end of the second ball head rod is rotatably mounted in the second spherical groove.

[0020] A three-dimensional scanning system comprises an optical fiber head, a collimating mirror, a dynamic focusing module and the compact two-dimensional scanning galvanometer arranged in sequence according to the direction of the optical path;

[0021] Or it includes an optical fiber head, a collimating mirror, the compact two-dimensional scanning galvanometer, and a field mirror arranged in sequence according to the direction of the optical path;

[0022] Or it includes an optical fiber head, a collimator, a dynamic focusing module, a reflector and the compact two-dimensional scanning galvanometer arranged in sequence according to the direction of the optical path;

[0023] Or it includes an optical fiber head, a collimating mirror, a reflecting mirror, the compact two-dimensional scanning galvanometer, and a field mirror which are arranged in sequence according to the direction of the light path.

[0024] Preferably, the lens in the compact two-dimensional scanning galvanometer is at an angle of 45° relative to the target surface.

[0025] An additive manufacturing device comprises the three-dimensional scanning system, wherein the number of the three-dimensional scanning systems is multiple, and the multiple three-dimensional scanning systems are arranged in a matrix in the form of m×n in horizontal and vertical directions, where m and n are natural numbers greater than 1.

[0026] The beneficial effects of the present invention are as follows:

[0027] 1. Traditional two-dimensional galvanometers take up a lot of space, so it is impossible to integrate too many galvanometers in a limited space. All parts of the compact two-dimensional scanning galvanometer of the present invention are integrated under the lens projection, occupying a small space. The space occupied by the traditional two-dimensional galvanometer is more than 3-4 times that of the present invention. Therefore, the present invention can install the most two-dimensional scanning galvanometers in a limited space.

[0028] 2. The traditional two-dimensional galvanometer has serious pillow-shaped or barrel-shaped distortion, which requires multiple corrections. However, since the present invention has only one lens, the distortion problem is smaller than that of the traditional two-dimensional galvanometer, and it is easy to correct, saving correction time.

[0029] 3. The traditional two-dimensional galvanometer laser beam first reaches the X-axis lens and then the Y-axis lens. Because the X-axis lens can rotate at a certain angle, the size of the Y-axis lens must be considered when designing the size of the Y-axis lens: within the angle range a of the X-axis lens rotation, the light reflected by the X-axis lens is reflected at an angle range of 2a, and the range is enlarged after the light beam is transmitted through the distance between the XY-axis lenses. The size design of the Y-axis lens must consider the ability to fully receive the laser in the above range, so the Y-axis lens is designed to be larger than the X-axis lens. Therefore, when the Y-axis lens cannot be designed to be very large, the rotation range of the XY-axis lens is relatively small, such as plus or minus 10 degrees. Since the present invention has only one lens and is not limited by the second lens, the rotation range of the lens can be made larger, so the scanning range will also become larger.

[0030] 4. When the traditional two-dimensional galvanometer is in high speed, the Y-axis lens is heavier than the X-axis lens, so the Y-axis lens responds slower than the X-axis lens. Therefore, when the two axes are linked, the Y-axis lens often cannot keep up with the X-axis lens. In addition, because there are two lenses, the linearity, speed and other characteristics of the two axes need to be matched in order to work well together and scan high-quality graphics. However, since the present invention has only one lens, there is no problem of matching the two axes.

[0031] 5. The traditional two-dimensional galvanometer lens rotates around the motor axis, and the required torque is also relatively large. However, the direction of the force in the present invention is almost perpendicular to the lens and acts on the edge of the lens, which results in a very large torque. Under the same lens weight, a certain dynamic response is achieved, and the required motor output force is relatively small.

[0032] 6. The traditional two-dimensional galvanometer lens uses two lenses. Since the flatness of the lenses cannot be perfect, each lens has more or less unevenness, resulting in poor ellipticity of the light spot on the target surface. The present invention has only one lens, which can better control the ellipticity of the light spot on the target surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0034] Figure 1 is a schematic diagram of a compact two-dimensional scanning galvanometer of the present invention;

[0035] Figure 2 for Figure 1 A partial schematic diagram of the right part;

[0036] Figure 3 It is a partial stereoscopic diagram of the compact two-dimensional scanning galvanometer of the present invention, which is used to show the spatial layout of the swing voice coil motor;

[0037] Figure 4 for Figure 1 A in the enlarged view;

[0038] Figure 5 A schematic diagram of a first embodiment of a plurality of three-dimensional scanning systems of the present invention;

[0039] Figure 6 It is a schematic diagram of a second embodiment of a plurality of three-dimensional scanning systems of the present invention;

[0040] Figure 7 It is a schematic diagram of a third embodiment of a plurality of three-dimensional scanning systems of the present invention;

[0041] Figure 8 It is a schematic diagram of a fourth embodiment of a plurality of three-dimensional scanning systems of the present invention;

[0042] Fig. 9 It is a schematic diagram of the compact two-dimensional scanning galvanometers of the present invention arranged in a matrix.

[0043] The above reference numerals:

[0044] 1. galvanometer housing; 2. fixed axis; 3. lens mounting seat; 4. lens; 50. motor seat; 51. coil; 52. magnetic axis; 53. iron core; 54. ball; 55. positioning block; 60. first hinge; 61. second hinge; 601. first ball head rod; 602. first ball head surface cover; 7. stopper; 8. grating reading head; 9. grating ruler; 10. cooling block; 11. drive card; 12. water cooling interface; 13. power supply and signal input interface; 14. fiber head; 15. collimator; 16. dynamic focusing module; 17. field lens; 18. reflector; 20. cross-shaped hole; 30. square frame; 31. cross-shaped frame; 60. ball head rod; 61. ball head surface cover; 100. circular trajectory; 110. compact two-dimensional scanning galvanometer; 200. target surface. DETAILED DESCRIPTION

[0045] To facilitate understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings.

[0046] like Figure 1-Figure 4 As shown, a compact two-dimensional scanning galvanometer 110 provided in this embodiment includes a galvanometer housing 1, a lens mounting seat 3, a lens 4, a fixed axis 2 and a swing voice coil motor, wherein the lens 4 is arranged on the front of the lens mounting seat 3; one end of the fixed axis 2 is fixedly connected to the galvanometer housing 1, and the other end is spherically hinged to the back of the lens mounting seat 3, and the lens mounting seat 3 can rotate around the center of the spherical hinge between the fixed axis 2 and the lens mounting seat 3. In this embodiment, one end of the fixed axis 2 is fixedly connected to the galvanometer housing 1 by a positioning pin and a screw (not marked in the figure), wherein the positioning pin is used for positioning, and the screw is used for fastening.

[0047] The swing voice coil motor includes a motor base 50, a stator and a mover. The motor base 50 is connected to the galvanometer housing 1. The stator and the mover are both located on the motor base 50. The mover can move along a circular trajectory 100 on the motor base 50. One end of the mover is exposed from the motor base 50 and is spherically hinged to the back of the lens mount 3. The lens mount 3 can rotate around the center of the spherical hinge between the mover and the lens mount 3. In this embodiment, the motor base 50 is fixedly connected to the galvanometer housing 1 by a locating pin and a screw (not marked in the figure), wherein the locating pin is used for positioning and the screw is used for fastening. In this embodiment, the galvanometer housing 1 has a cavity and an opening at the proximal end of the lens 4. The swing voice coil motor is located in the galvanometer housing 1, and one end of the fixed shaft 2 is located in the galvanometer housing 1.

[0048] The center of the ball joint between the fixed axis 2 and the lens mounting seat 3 is the center of the central circle, the number of the swing voice coil motors is two, and the distances from the center of the ball joint between the two movers and the lens mounting seat 3 to the center of the central circle are equal; the center of the circle of the two movers moving along the circular trajectory 100 coincides with the center of the central circle, and the two circular trajectories 100 coincide with the two meridians on the sphere that form an angle of 90°.

[0049] In this embodiment, the fixed axis 2 and the back of the lens mounting seat 3 are spherically hinged, so that the lens mounting seat 3 can rotate around the center of the ball of the fixed axis 2 and the lens mounting seat 3, so the lens 4 can rotate around the center of the ball of the fixed axis 2 and the lens mounting seat 3 with a certain degree of freedom. In this embodiment, the mover and the back of the lens mounting seat 3 are spherically hinged, and the lens mounting seat 3 can rotate around the center of the ball of the mover and the lens mounting seat 3, and the mover can move along a circular trajectory 100 on the motor seat 50, and the two circular trajectories 100 coincide with the two meridians on the sphere that form an angle of 90°, so the lens 4 can rotate around the center of the ball of the mover and the lens mounting seat 3 with a certain degree of freedom, and can also move along the circular trajectory 100 within a certain range, thereby increasing the rotation range of the lens 4. Compared with the traditional two-dimensional scanning galvanometer with two XY lenses, since this embodiment has only one lens 4 and is not limited by the second lens 4, the rotation range of the lens 4 can be made larger, so the scanning range will also become larger.

[0050] All components of the compact two-dimensional scanning galvanometer 110 of this embodiment are integrated under the projection of the lens 4, occupying a small space. The space occupied by a traditional two-dimensional galvanometer is more than 3-4 times that of the compact two-dimensional scanning galvanometer 110 of this embodiment, so the most two-dimensional scanning galvanometers can be installed in a limited space.

[0051] The compact two-dimensional scanning galvanometer 110 of this embodiment has only one lens 4, so the distortion problem is smaller than that of the traditional two-dimensional galvanometer, and it is easier to correct, saving correction time. Moreover, there is no problem of two-axis matching, and the spot ellipticity of the target surface 200 can be better controlled.

[0052] The direction of the force exerted by the motor shaft (motor) of the compact two-dimensional scanning galvanometer 110 on the lens mount 3 and the lens 4 forms an acute angle with the normal direction of the lens 4 in order to ensure that the force decomposed in the normal direction of the lens 4 accounts for a larger proportion. The traditional two-dimensional galvanometer lens 4 rotates around the motor axis, and the required torque is also relatively large. However, the direction of the force in this embodiment is almost perpendicular to the lens 4 and acts on the edge of the lens 4, which results in a very large torque. Under the same weight of the lens 4, a certain dynamic response is achieved, and the force required to be output by the motor is relatively small, so as to achieve a higher acceleration and deceleration movement of the lens 4.

[0053] Preferably, in this embodiment, the stator includes a coil 51, and the mover includes a magnetic axis 52. The magnetic axis 52 is in an arc structure. The coil 51 surrounds the magnetic axis 52. The magnetic axis 52 is movably mounted on the motor base 50 through a guide portion. The magnetic axis 52 can move along a circular trajectory 100 on the motor base 50. The centerline of the magnetic axis 52 is coaxial with the corresponding circular trajectory 100, and the length of the magnetic axis 52 is less than 1 / 4 of the circumference of the circular trajectory 100.

[0054] The coil 51 is connected to a power supply through an electric wire. When the coil 51 is energized, an alternating magnetic field is generated in the magnetic axis 52. The magnetic axis 52 is magnetized into an S level and an N level with its center as the boundary. Thus, under the action of the electromagnetic force, the magnetic axis 52 is guided by the guide part to move along the circular track 100. Under the action of the guide part, the magnetic axis 52 is ensured to move on the circular track 100.

[0055] In this embodiment, the guide portion preferably has the following two structures:

[0056] First, the guide portion includes an arc track provided on the motor base 50 and matched with the outer surface of the magnetic shaft 52 , that is, the magnetic shaft 52 and the arc track form a hole-shaft sliding fit to ensure that the magnetic shaft 52 moves on a circular track 100 .

[0057] The second one, see Figure 1 and 2 As shown, the guide portion includes an iron core 53 and a ball 54 disposed on the motor base 50, the magnetic shaft 52 is supported by a plurality of the ball 54, and the iron core 53 attracts the magnetic shaft 52, so that the magnetic shaft 52 is pressed on the plurality of the ball 54. The magnetic shaft 52 is supported by the plurality of ball 54 in a rolling manner, and the iron core 53 attracts the magnetic shaft 52, so that the magnetic shaft 52 is always supported on the plurality of ball 54 and will not be separated from the plurality of ball 54, thereby ensuring that the magnetic shaft 52 moves on the circular track 100.

[0058] See also Figure 1 and 2 As shown, in this embodiment, the motor base 50 is specifically provided with a positioning block 55, and the positioning block 55 is provided with ball grooves having the same number and corresponding positions as the balls 54, and the balls 54 are rotatably installed in the ball grooves and will not leave the ball grooves.

[0059] See also Figure 1 As shown, a cross-shaped hole 20 is provided at one end of the fixed shaft 2 for avoiding the magnetic shaft 52 to prevent the magnetic shaft 52 from colliding with the fixed shaft 2 when the magnetic shaft 52 moves.

[0060] See also Figure 1 and 2As shown, in this embodiment, the other end of the magnetic shaft 52 is exposed from the motor base 50 , and both ends of the magnetic shaft 52 are provided with a stopper 7 , and the stopper 7 is used to limit the movement of the magnetic shaft 52 along the circular trajectory 100 .

[0061] See also Figure 1 and 2 As shown, in this embodiment, positioning blocks 55 and balls 54 are correspondingly provided at both ends of the magnetic shaft 52, and the number of balls 54 at each end of the magnetic shaft 52 is preferably two, that is, the magnetic shaft 52 can be supported.

[0062] See also Figure 1 and 2 As shown, in this embodiment, a grating scale 9 is provided at the other end of the magnetic axis 52, and the grating reading head 8 is provided on the motor base 50. The grating reading head 8 and the grating scale 9 are used to obtain the displacement of the magnetic axis 52 along the circular trajectory 100, so as to achieve the purpose of accurately controlling the movement of the magnetic axis 52.

[0063] The compact two-dimensional scanning galvanometer 110 described in this embodiment also includes a cooling block 10 and a driving card 11 arranged on the galvanometer housing 1, and the driving card 11 is connected to the coil 51 and the grating reading head 8; a water cooling channel is provided on the cooling block 10. The grating reading head 8 reads the data of the grating scale 9 and sends it to the driving card 11. The driving card 11 compares and calculates the above data with the instructions of the control card and converts it into an appropriate current to the coil 51, and then the coil 51 generates magnetic force to drive the magnetic axis 52. The driving card 11 and the control card are conventional configurations of additive manufacturing equipment. The control card is used to send instructions to the galvanometer and the laser, which will not be elaborated in detail.

[0064] In this embodiment, the cooling block 10 is externally connected to a cooling water circulation system, wherein the cooling water circulation system is a conventional configuration of additive manufacturing equipment, which will not be elaborated in detail, to provide cooling water to the cooling block 10. The cooling block 1019 can cool the entire compact two-dimensional scanning galvanometer 110, and the drive card 11 dissipates heat through the low temperature transmitted by the cooling block 10.

[0065] In this embodiment, the outer surface of the galvanometer housing 1 is also provided with a water cooling interface 12 for connecting to the cooling block 10 and the cooling water circulation system, and a power supply and signal input interface 13 for connecting to the power supply and the drive card 11.

[0066] In this embodiment, the lens 4 is square or round, preferably square. When the lens 4 is square, see Figure 3As shown, the lens mounting seat 3 includes a square frame 30 and a cross frame 31 mounted on the frame opening of the square frame 30, and the lens mounting seat 3 is made of titanium alloy or aluminum metal, of course, not limited to the above two materials. The lens 421 is fixed in the lens mounting seat 320 by gluing, and the lens mounting seat 3 adopts this structure to ensure that the lens 4 can be glued stably and minimize the load of the swing voice coil motor, thereby obtaining a higher response speed of the lens 4.

[0067] See also Figure 3 As shown, when the lens 4 is a square, the point where the fixed axis 2 and the lens mounting seat 3 are ball-jointed is located at the center of the square, and the point where the magnetic axis 2 and the lens mounting seat 3 are ball-jointed is located at the central area of ​​the square side.

[0068] In this embodiment, the other end of the fixed shaft 2 is ball-jointed with the lens mounting seat 3 through a first hinge 60, and one end of the mover is ball-jointed with the lens mounting seat 3 through a second hinge 61. Figure 4 As shown, the first hinged member 60 includes a first ball head rod 601 and a first ball head surface cover plate 602, wherein the first ball head rod 601 is connected to the fixed axis 2, the first ball head surface cover plate 602 is detachably connected to the lens mounting seat 3, the lens mounting seat 3 and the first ball head surface cover plate 602 are provided with a first spherical groove, and the ball head end of the first ball head rod 601 is rotatably mounted in the first spherical groove. In this embodiment, the first ball head rod 601 is limited to rotate in the first spherical groove, wherein the first ball head surface cover plate 602 is detachably connected to the lens mounting seat 3, specifically detachably connected by screws, so as to facilitate the assembly and disassembly of the first ball head rod 601, the second ball head surface cover plate 602 and the lens mounting seat 3.

[0069] In this embodiment, the second hinged member 61 includes a second ball head rod and a second ball head surface cover plate, the second ball head rod is connected to the mover, specifically, the second ball head rod is connected to one end of the magnetic shaft 52, the second ball head surface cover plate is detachably connected to the lens mounting seat 3, the lens mounting seat 3 and the second ball head surface cover plate are provided with a second spherical groove, and the ball head end of the second ball head rod is rotatably installed in the second spherical groove. In this embodiment, the second hinged member 61 has the same structure and working principle as the first hinged member 60, so it can be referred to Figure 4 As shown and described in detail with respect to the first hinge 60 .

[0070] This embodiment also provides a three-dimensional scanning system, which has the following structural forms:

[0071] Implementation 1

[0072] See also Figure 5As shown, the three-dimensional scanning system includes an optical fiber head 14, a collimator 15, a dynamic focusing module 16 and the compact two-dimensional scanning galvanometer 110 arranged in sequence according to the optical path direction. The optical fiber head 14 outputs a laser beam, enters the collimator 15, and outputs parallel light to enter the dynamic focusing module 16, which is then reflected by the compact two-dimensional scanning galvanometer 110 to the target surface 200.

[0073] Example 2

[0074] See also Figure 6 As shown, the three-dimensional scanning system includes an optical fiber head 14, a collimating mirror 15, the compact two-dimensional scanning galvanometer 110, and a field lens 17, which are sequentially arranged in the direction of the optical path. The optical fiber head 14 outputs a laser beam, which enters the collimating mirror 15 and outputs parallel light, which is reflected by the compact two-dimensional scanning galvanometer 110 and then focused to the target surface 200 by the field lens 17.

[0075] Example 3

[0076] See also Figure 7 As shown, the three-dimensional scanning system includes an optical fiber head 14, a collimator 15, a dynamic focusing module 16, a reflector 18 and the compact two-dimensional scanning galvanometer 110 arranged in sequence according to the direction of the optical path. The optical fiber head 14 outputs a laser beam, enters the collimator 15 and outputs parallel light to enter the dynamic focusing module 16, which is then reflected by the reflector 18 to the compact two-dimensional scanning galvanometer 110 and then reflected to the target surface 200.

[0077] Example 4

[0078] See also Figure 8 As shown, the three-dimensional scanning system includes an optical fiber head 14, a collimator 15, a reflector 18, the compact two-dimensional scanning galvanometer 110, and a field lens 17, which are arranged in sequence according to the direction of the optical path. The optical fiber head 14 outputs a laser beam, enters the collimator 15, and the output parallel light is reflected by the reflector 18 to the compact two-dimensional scanning galvanometer 110, and then reflected to the field lens 17 and focused to the target surface 200.

[0079] In the above-mentioned embodiments 1 and 4, preferably, the lens 4 in the compact two-dimensional scanning galvanometer 110 is at an angle of 45° relative to the target surface 200 .

[0080] This embodiment also provides an additive manufacturing device, including the three-dimensional scanning system, wherein the number of the three-dimensional scanning systems is multiple, and the multiple three-dimensional scanning systems are arranged in a matrix in the form of m×n in horizontal and vertical directions, where m and n are natural numbers greater than 1. Figure 5-Figure 9 , different layouts of multiple compact two-dimensional scanning galvanometers 110 are shown, corresponding to different layouts of multiple three-dimensional scanning systems. Figure 5 and Figure 6 Multiple compact two-dimensional scanning galvanometers 110 are installed at different heights with an angle of 45°. Figure 7 and Figure 8 As shown, a plurality of compact two-dimensional scanning galvanometer mirrors 110 are installed at the same height and at an angle of 45 degrees. Fig. 9 A plurality of compact two-dimensional scanning galvanometers 110 are closely arranged on an inclined plane at a 45-degree angle to the target surface 200. In an upper space corresponding to a certain size of the target surface 200, this arrangement can install the most compact two-dimensional scanning galvanometers 110.

[0081] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A compact two-dimensional scanning galvanometer, characterized in that: It comprises a galvanometer housing (1), a lens mounting seat (3), a lens (4), a fixed axis (2) and a swing voice coil motor, wherein the lens (4) is arranged on the front side of the lens mounting seat (3); One end of the fixed shaft (2) is fixedly connected to the galvanometer housing (1), and the other end is spherically hinged to the back of the lens mounting seat (3); the lens mounting seat (3) can rotate around the center of the spherical hinge between the fixed shaft (2) and the lens mounting seat (3); The swing voice coil motor comprises a motor base (50), a stator and a mover, the motor base (50) being connected to the galvanometer housing (1), the stator and the mover both being located on the motor base (50), the mover being able to move along a circular trajectory (100) on the motor base (50), one end of the mover being exposed from the motor base (50) and being spherically hinged to the back of the lens mounting seat (3), the lens mounting seat (3) being able to rotate around the center of the spherical hinge between the mover and the lens mounting seat (3); The center of the ball joint between the fixed axis (2) and the lens mounting seat (3) is the center of the central circle, the number of the swing voice coil motors is two, and the distances from the centers of the balls of the two movers and the lens mounting seat (3) to the center of the central circle are equal; the centers of the two movers moving along the circular trajectory (100) coincide with the center of the central circle, and the two circular trajectories (100) coincide with two meridians on the sphere that form an angle of 90 degrees.

2. The compact two-dimensional scanning galvanometer according to claim 1, characterized in that: The stator comprises a coil (51), the mover comprises a magnetic axis (52), the magnetic axis (52) is in an arc structure, the coil (51) surrounds the magnetic axis (52), the magnetic axis (52) is movably mounted with the motor base (50) via a guide portion, and the magnetic axis (52) can move along a circular trajectory (100) on the motor base (50); the axis centerline of the magnetic axis (52) is coaxial with the corresponding circular trajectory (100), and the length of the magnetic axis (52) is less than 1 / 4 of the circumference of the circular trajectory (100).

3. The compact two-dimensional scanning galvanometer according to claim 2, characterized in that: The guide portion comprises an arc track which is arranged on the motor seat (50) and matches the outer surface of the magnetic shaft (52); Alternatively, the guide portion includes an iron core (53) and a ball bearing (54) disposed on the motor base (50); the magnetic axis (52) is supported by a plurality of the ball bearings (54); the iron core (53) attracts the magnetic axis (52) so that the magnetic axis (52) is pressed onto the plurality of ball bearings (54).

4. The compact two-dimensional scanning galvanometer according to claim 2, characterized in that: The other end of the magnetic shaft (52) is exposed from the motor base (50), and both ends of the magnetic shaft (52) are provided with a stopper (7), and the stopper (7) is used to limit the movement of the magnetic shaft (52) along a circular trajectory (100); A grating ruler (9) is provided at the other end of the magnetic axis (52), and a grating reading head (8) is provided on the motor base (50). The grating reading head (8) and the grating ruler (9) are used to obtain the displacement of the magnetic axis (52) moving along a circular trajectory (100).

5. The compact two-dimensional scanning galvanometer according to claim 4, characterized in that: The compact two-dimensional scanning galvanometer (110) further comprises a cooling block (10) and a driving card (11) arranged on the galvanometer housing (1); the driving card (11) is connected to the coil (51) and the grating reading head (8); and a water cooling channel is provided on the cooling block (10).

6. The compact two-dimensional scanning galvanometer according to claim 1, characterized in that: The lens (4) is square or circular. When the lens (4) is square, the lens mounting seat (3) comprises a square frame (30) and a cross frame (31) mounted on the frame opening of the square frame (30); the lens mounting seat (3) is made of titanium alloy or aluminum metal.

7. The compact two-dimensional scanning galvanometer according to claim 1, characterized in that: The other end of the fixed shaft (2) is ball-jointed to the lens mounting seat (3) via a first hinge (60), and one end of the mover is ball-jointed to the lens mounting seat (3) via a second hinge (61); The first hinged member (60) comprises a first ball head rod (601) and a first ball head surface cover plate (602), the first ball head rod (601) being connected to the fixed axis (2), the first ball head surface cover plate (602) being detachably connected to the lens mounting seat (3), the lens mounting seat (3) and the first ball head surface cover plate (602) being provided with a first spherical groove, the ball head end of the first ball head rod (601) being rotatably mounted in the first spherical groove; The second hinged member (61) comprises a second ball head rod and a second ball head surface cover plate, the second ball head rod is connected to the mover, the second ball head surface cover plate is detachably connected to the lens mounting seat (3), the lens mounting seat (3) and the second ball head surface cover plate are provided with a second spherical groove, and the ball head end of the second ball head rod is rotatably mounted in the second spherical groove.

8. A three-dimensional scanning system, characterized in that: It comprises an optical fiber head (14), a collimating lens (15), a dynamic focusing module (16) and a compact two-dimensional scanning galvanometer (110) as claimed in any one of claims 1 to 7, which are arranged in sequence according to the direction of the optical path; Or it includes an optical fiber head (14), a collimating lens (15), a compact two-dimensional scanning galvanometer (110) as claimed in any one of claims 1 to 7, and a field lens (17) which are arranged in sequence according to the direction of the optical path; Or comprising an optical fiber head (14), a collimating mirror (15), a dynamic focusing module (16), a reflecting mirror (18), and a compact two-dimensional scanning galvanometer (110) according to any one of claims 1 to 7, which are arranged in sequence according to the direction of the optical path; Or it includes an optical fiber head (14), a collimating mirror (15), a reflecting mirror (18), a compact two-dimensional scanning galvanometer (110) as claimed in any one of claims 1 to 7, and a field mirror (17) which are arranged in sequence according to the direction of the optical path.

9. According to the three-dimensional scanning system of claim 8, the lens (4) in the compact two-dimensional scanning galvanometer (110) is at an angle of 45° relative to the target surface (200).

10. An additive manufacturing device, characterized in that: It includes the three-dimensional scanning system according to claim 8 or 9, wherein the number of the three-dimensional scanning systems is multiple, and the multiple three-dimensional scanning systems are arranged in a matrix in the form of m×n in horizontal and vertical directions, and m and n are natural numbers greater than 1.

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