Transportation mechanism, using method thereof and deposition device

Abstract

The invention discloses a transportation mechanism, a using method thereof and a deposition device, and relates to the technical field of transportation. The conveying mechanism comprises a base, a translation assembly, a lifting assembly, a supporting plate, a bearing plate and a centering assembly. The translation assembly is installed on the base and connected with the lifting assembly, the lifting assembly is connected with the supporting plate, the centering assembly is installed on the supporting plate and connected with the bearing plate, the bearing plate is used for bearing a material carrier, and the centering assembly is used for adjusting the centering degree of the bearing plate. Compared with the prior art, due to the fact that the centering assembly which is installed on the supporting plate and connected with the bearing plate is adopted in the conveying mechanism, the centering precision of the material carrier and the deposition cavity can be effectively improved, the sealing performance of the deposition cavity in the deposition process is guaranteed, the deposition effect is improved, and the product quality is guaranteed.

Description

Technical Field

[0001] The present invention relates to the field of transportation technology, and in particular to a transportation mechanism and a use method thereof, and a deposition device. Background Art

[0002] At present, during the material deposition process, the material carrier is generally first moved horizontally by a forklift to make the position of the material carrier correspond to the position of the deposition chamber, and then the material carrier is sent into the deposition chamber to facilitate deposition of the material placed on the material carrier. However, the current forklift movement accuracy is low, resulting in low centering accuracy between the material carrier and the deposition chamber, so that a gap is generated between the material carrier and the deposition chamber when the material is sent into the deposition chamber, which directly affects the sealing of the deposition chamber during the deposition process, affects the deposition effect, and has poor product quality.

[0003] In view of this, it is particularly important to design and manufacture a transportation mechanism with high centering accuracy, a method for using the same, and a deposition device, especially in semiconductor production. Summary of the invention

[0004] The object of the present invention is to provide a transport mechanism that can effectively improve the centering accuracy between the material carrier and the deposition chamber, ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality.

[0005] Another object of the present invention is to provide a method for using a transportation mechanism, which can effectively improve the centering accuracy between the material carrier and the deposition chamber, ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality.

[0006] Another object of the present invention is to provide a deposition device that can effectively improve the centering accuracy between the material carrier and the deposition chamber, ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality.

[0007] The present invention is achieved by adopting the following technical solutions.

[0008] A transport mechanism includes a base, a translation component, a lifting component, a pallet, a bearing plate and a centering component. The translation component is installed on the base and connected to the lifting component. The lifting component is connected to the pallet. The centering component is installed on the pallet and connected to the bearing plate. The bearing plate is used to carry a material carrier. The centering component is used to adjust the centering degree of the bearing plate.

[0009] Optionally, the centering assembly includes a first centering unit and a second centering unit, both of which are connected to the supporting plate, the first centering unit is used to adjust the position of the supporting plate in a first direction, and the second centering unit is used to adjust the position of the supporting plate in a second direction, and the first direction and the second direction are set at a preset angle.

[0010] Optionally, the first centering unit includes a first fixed block, a second fixed block, a first adjusting member and a second adjusting member. The first fixed block and the second fixed block are relatively arranged on both sides of the supporting plate in the first direction and are both connected to the support plate. The first adjusting member is movably connected to the first fixed block, and the second adjusting member is movably connected to the second fixed block. The supporting plate is clamped between the first adjusting member and the second adjusting member.

[0011] Optionally, the transport mechanism further comprises a leveling component, which is mounted on the pallet and connected to the load-bearing plate, and is used to adjust the horizontality of the load-bearing plate.

[0012] Optionally, the leveling assembly includes a third adjusting member, which is movably connected to the bearing plate and abuts against the supporting plate.

[0013] Optionally, the transport mechanism further comprises a fastening assembly, the fastening assembly comprises fasteners, and the fasteners are detachably connected to both the load-bearing plate and the pallet to fix the relative positions of the load-bearing plate and the pallet after the centering is completed.

[0014] Optionally, the transport mechanism also includes a buffer assembly, which includes a positioning seat, an elastic member and a supporting block, the supporting block includes a supporting portion and a connecting portion that are connected to each other, the cross-sectional area of ​​the supporting portion is larger than the cross-sectional area of ​​the connecting portion, the positioning seat is connected to the supporting plate, the elastic member is sleeved outside the connecting portion, one end of the elastic member is in contact with the supporting portion, and the other end is in contact with the positioning seat, and the supporting portion is used to support the material carrier.

[0015] Optionally, the positioning seat includes a seat body, a guide sleeve and a stop block, the seat body is connected to the bearing plate, the guide sleeve is installed in the seat body and slidably cooperates with the connecting part, and the stop block is installed in the seat body, and the stop block is used to stop the connecting part.

[0016] Optionally, the translation assembly includes a first driving member and a translation frame, the first driving member is mounted on the base and connected to the translation frame, and the lifting assembly is mounted on the translation frame.

[0017] Optionally, the lifting assembly includes a second driving member and a lifting frame, the second driving member is connected to the lifting frame, and the support plate is connected to the lifting frame.

[0018] A method for using a transport mechanism is applied to the above-mentioned transport mechanism, and the method for using the transport mechanism includes: placing a material carrier loaded with material on a carrying plate; using a translation component to drive the material carrier to translate to the bottom of a deposition chamber; using a centering component to adjust the centering degree of the carrying plate to ensure that the position of the material carrier corresponds to the position of a material port of the deposition chamber; using a lifting component to drive the material carrier to rise, so that the material carrier extends into the deposition chamber through the material port.

[0019] Optionally, before the step of using the lifting assembly to drive the material carrier to rise so that the material carrier passes through the material port and extends into the deposition chamber, the method of using the transport mechanism also includes: using a leveling assembly installed on the pallet to adjust the horizontality of the carrier plate to ensure that the material carrier is in a horizontal state.

[0020] A deposition device comprises the above-mentioned transport mechanism, which comprises a base, a translation component, a lifting component, a pallet, a bearing plate and a centering component. The translation component is installed on the base and connected to the lifting component, the lifting component is connected to the pallet, the centering component is installed on the pallet and connected to the bearing plate, the bearing plate is used to carry a material carrier, and the centering component is used to adjust the centering degree of the bearing plate.

[0021] The transport mechanism and the method of using the transport mechanism and the deposition device provided by the present invention have the following beneficial effects:

[0022] The transport mechanism provided by the present invention has a translation component installed on a base and connected to a lifting component, the lifting component is connected to a support plate, a centering component is installed on the support plate and connected to a bearing plate, the bearing plate is used to carry a material carrier, and the centering component is used to adjust the centering degree of the bearing plate. Compared with the prior art, the transport mechanism provided by the present invention can effectively improve the centering accuracy between the material carrier and the deposition chamber, ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality because it adopts a centering component installed on the support plate and connected to the bearing plate.

[0023] The method for using the transport mechanism provided by the present invention, when applied to the transport mechanism, can effectively improve the centering accuracy between the material carrier and the deposition chamber, ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality.

[0024] The deposition device provided by the present invention includes a transport mechanism, which can effectively improve the centering accuracy between the material carrier and the deposition chamber, ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 A schematic diagram of the structure of a material carrier carried by a transport mechanism provided in an embodiment of the present invention;

[0027] Figure 2A schematic diagram of the structure of a transportation mechanism provided by an embodiment of the present invention from one perspective;

[0028] Figure 3 A schematic structural diagram of a transport mechanism provided by an embodiment of the present invention from another perspective;

[0029] Figure 4 A schematic diagram of the structure of the connection between the pallet and the load-bearing plate in the transport mechanism provided by an embodiment of the present invention;

[0030] Figure 5 An exploded view of the connection between the pallet and the load-bearing plate in the transport mechanism provided by an embodiment of the present invention;

[0031] Figure 6 A cross-sectional view of a buffer assembly in a transport mechanism provided in an embodiment of the present invention.

[0032] Icons: 100-transport mechanism; 110-base; 120-translation assembly; 121-first drive member; 122-translation frame; 123-drive motor; 124-screw; 125-nut seat; 130-lifting assembly; 131-second drive member; 132-lifting frame; 140-support plate; 141-second through hole; 150-carrying plate; 151-third threaded hole; 152-first through hole; 160-centering assembly; 161-first centering unit; 162-second centering unit; 163-first fixed Fixed block; 164-second fixed block; 165-first adjusting member; 166-second adjusting member; 167-first threaded hole; 168-second threaded hole; 170-leveling assembly; 171-third adjusting member; 180-fastening assembly; 181-fastening screw; 182-fastening nut; 190-buffer assembly; 191-positioning seat; 192-elastic member; 193-supporting block; 194-supporting part; 195-connecting part; 196-seat body; 197-guide sleeve; 198-stop block; 200-material carrier. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0034] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0036] In the description of the present invention, it should be noted that the terms "inside", "outside", "upper", "lower", "horizontal", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the product of the invention is usually placed when in use, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0037] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "connect", "install", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the features of the following embodiments can be combined with each other.

[0039] Please refer to Figure 1 The embodiment of the present invention provides a deposition device (not shown) for depositing materials. It can effectively improve the centering accuracy between the material carrier 200 and the deposition chamber, ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality.

[0040] The deposition device includes a transport mechanism 100, a material carrier 200 and a deposition chamber (not shown). The material carrier 200 is used to hold materials, and a multi-layer partition structure (not shown) is provided on the material carrier 200, each of which is used to carry at least one material. The transport mechanism 100 is used to transport the material through the material carrier 200 to send the material into the deposition chamber, and the deposition chamber is used to deposit the material. The transport mechanism 100 is also used to take the deposited material out of the deposition chamber through the material carrier 200.

[0041] It should be noted that the transport mechanism 100 is disposed below the deposition chamber, and a material port (not shown) is disposed at the bottom of the deposition chamber, and the material port is located in the middle of the deposition chamber. When the transport mechanism 100 delivers the material into the deposition chamber, the material is first loaded onto the material carrier 200; then the material carrier 200 is placed on the transport mechanism 100; then the transport mechanism 100 drives the material carrier 200 to extend into the material port until the bottom plate of the material carrier 200 abuts against the bottom of the deposition chamber.

[0042] Please refer to Figures 2 to 6 The transport mechanism 100 includes a base 110, a translation assembly 120, a lifting assembly 130, a pallet 140, a bearing plate 150 and a centering assembly 160. The translation assembly 120 is mounted on the base 110 and connected to the lifting assembly 130. The translation assembly 120 is used to drive the lifting assembly 130 to move on a horizontal plane. The lifting assembly 130 is connected to the pallet 140. The lifting assembly 130 is used to drive the pallet 140 to rise or fall in a vertical direction. The centering assembly 160 is mounted on the pallet 140 and connected to the bearing plate 150. The bearing plate 150 is used to carry the material carrier 200. The centering assembly 160 is used to adjust the centering degree of the bearing plate 150 to ensure that the material carrier 200 is aligned with the deposition chamber, improve the centering accuracy of the material carrier 200 and the deposition chamber, thereby ensuring the sealing of the deposition chamber during the deposition process, improving the deposition effect, and ensuring product quality.

[0043] The centering assembly 160 includes a first centering unit 161 and a second centering unit 162. The first centering unit 161 and the second centering unit 162 are both mounted on the support plate 140 and are both connected to the carrier plate 150. The first centering unit 161 is used to adjust the position of the carrier plate 150 in the first direction, and the second centering unit 162 is used to adjust the position of the carrier plate 150 in the second direction. The first direction and the second direction are set at a preset angle. The first centering unit 161 and the second centering unit 162 work together to adjust the position of the material carrier 200 through the carrier plate 150, improve the centering accuracy of the material carrier 200 and the deposition chamber, and ensure that the material carrier 200 can completely cover the material port, thereby ensuring the sealing of the deposition chamber during the deposition process, improving the deposition effect, and ensuring product quality.

[0044] Furthermore, the preset angle is 90 degrees, that is, the first direction is perpendicular to the second direction, and the first direction, the second direction and the translation direction of the translation assembly 120 are located on the same plane, which is a horizontal plane. Specifically, since the translation assembly 120 drives the lifting assembly 130 to move with low accuracy, it is easy for the lifting assembly 130 to not move in place, resulting in low centering accuracy between the material carrier 200 and the deposition chamber. Therefore, the present invention adjusts the carrier plate 150 through the first centering unit 161 and the second centering unit 162, thereby adjusting the position of the material carrier 200 on the horizontal plane, improving the centering accuracy between the material carrier 200 and the deposition chamber, and ensuring the deposition effect.

[0045] In this embodiment, the translation direction of the translation assembly 120 is a first direction, the first centering unit 161 is used to adjust the position of the carrier plate 150 in the translation direction of the translation assembly 120, and the second centering unit 162 is used to adjust the position of the carrier plate 150 in a direction perpendicular to the translation direction of the translation assembly 120 to ensure that the material carrier 200 placed on the carrier plate 150 can be aligned with the material passing port.

[0046] The first centering unit 161 includes a first fixed block 163, a second fixed block 164, a first adjusting member 165, and a second adjusting member 166. The first fixed block 163 and the second fixed block 164 are relatively arranged on both sides of the carrier plate 150 in the first direction, and are both connected to the support plate 140, and the support plate 140 is used to fix the positions of the first fixed block 163 and the second fixed block 164. The first adjusting member 165 is movably connected to the first fixed block 163, and the second adjusting member 166 is movably connected to the second fixed block 164. The carrier plate 150 is clamped between the first adjusting member 165 and the second adjusting member 166. By adjusting the position of the first adjusting member 165 relative to the first fixed block 163 in the first direction, and adjusting the position of the second adjusting member 166 relative to the second fixed block 164 in the first direction, the position of the carrier plate 150 in the first direction can be reliably adjusted, thereby ensuring the centering accuracy of the material carrier 200.

[0047] In this embodiment, the first adjusting member 165 and the second adjusting member 166 are both screws, the first fixing block 163 is provided with a first threaded hole 167, the second fixing block 164 is provided with a second threaded hole 168, the first adjusting member 165 cooperates with the first threaded hole 167, and the second adjusting member 166 cooperates with the second threaded hole 168. Specifically, the axial directions of the first adjusting member 165 and the second adjusting member 166 are both in the first direction, and the supporting plate 150 is pushed to move in the first direction by manually or mechanically twisting the first adjusting member 165 and the second adjusting member 166, so as to ensure that the material carrier 200 placed on the supporting plate 150 is aligned with the material passing port in the first direction.

[0048] It can be understood that when the first adjusting member 165 is tightened relative to the first threaded hole 167, the first adjusting member 165 moves relative to the first fixing block 163 along its axial direction and gradually approaches the bearing plate 150 to push the bearing plate 150 to move along the first direction. During this process, the second adjusting member 166 needs to be loosened adaptively to ensure that the bearing plate 150 is always clamped between the first adjusting member 165 and the second adjusting member 166. Similarly, when the second adjusting member 166 is tightened relative to the second threaded hole 168, the second adjusting member 166 moves relative to the second fixing block 164 along its axial direction and gradually approaches the bearing plate 150 to push the bearing plate 150 to move along the first direction. During this process, the first adjusting member 165 needs to be loosened adaptively to ensure that the bearing plate 150 is always clamped between the first adjusting member 165 and the second adjusting member 166.

[0049] In this embodiment, the number of the first fixing block 163, the second fixing block 164, the first adjusting member 165, and the second adjusting member 166 are all two, the two first fixing blocks 163 are arranged at intervals, the two second fixing blocks 164 are arranged at intervals, each first adjusting member 165 cooperates with one first fixing block 163, and each second adjusting member 166 cooperates with one second fixing block 164. However, this is not limited to this, in other embodiments, the number of the first fixing block 163, the second fixing block 164, the first adjusting member 165, and the second adjusting member 166 can all be one or three, and the number of the first fixing block 163, the second fixing block 164, the first adjusting member 165, and the second adjusting member 166 is not specifically limited.

[0050] In this embodiment, the specific structure of the second centering unit 162 is the same as the specific structure of the first centering unit 161, except that the second centering unit 162 is used to push the supporting plate 150 to move in the second direction, which will not be described in detail herein.

[0051] Preferably, the transport mechanism 100 further includes a leveling assembly 170. The leveling assembly 170 is mounted on the support plate 140 and connected to the carrier plate 150. The leveling assembly 170 is used to adjust the level of the carrier plate 150 to adjust the level of the material carrier 200 placed on the carrier plate 150, to ensure that the bottom plate of the material carrier 200 can fit tightly with the deposition chamber to avoid a gap, further ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality.

[0052] The leveling assembly 170 includes a third adjusting member 171. The third adjusting member 171 is movably connected to the carrier plate 150 and abuts against the support plate 140. By adjusting the position of the third adjusting member 171 relative to the carrier plate 150 in the vertical direction, the position of the carrier plate 150 in the vertical direction can be reliably adjusted, thereby ensuring the horizontality of the material carrier 200.

[0053] In this embodiment, the third adjusting member 171 is a screw, and there are multiple third adjusting members 171. The bearing plate 150 is provided with multiple third threaded holes 151, and the multiple third threaded holes 151 are arranged at intervals. Each third adjusting member 171 cooperates with one third threaded hole 151 and abuts against the supporting plate 140. Specifically, the axial direction of the third adjusting member 171 is the vertical direction, and the corresponding position of the bearing plate 150 is pushed to move in the vertical direction by manually or mechanically twisting the third adjusting member 171 to ensure the horizontality of the bearing plate 150.

[0054] It can be understood that when the third adjusting member 171 is tightened relative to the third threaded hole 151, the third adjusting member 171 moves along its axial direction relative to the supporting plate 150. During this process, since the end of the third adjusting member 171 is always in contact with the support plate 140, the position of the supporting plate 150 corresponding to the third adjusting member 171 will be lifted upward and away from the support plate 140; when the third adjusting member 171 is loosened relative to the third threaded hole 151, the third adjusting member 171 moves along its axial direction relative to the supporting plate 150. During this process, since the end of the third adjusting member 171 is always in contact with the support plate 140, the position of the supporting plate 150 corresponding to the third adjusting member 171 will sink downward and approach the support plate 140.

[0055] In this embodiment, the carrier plate 150 is in the shape of a hollow rectangular plate, and the number of the third adjustment members 171 and the number of the third threaded holes 151 are both eight, and the eight third threaded holes 151 are divided into four groups, and the two third threaded holes 151 in each group are arranged at intervals and are arranged on a side of the carrier plate 150, and each third adjustment member 171 cooperates with a third threaded hole 151. However, this is not limited to this, and in other embodiments, the number of the third adjustment members 171 and the third threaded holes 151 can be both four, or both twelve, and the number of the third adjustment members 171 and the third threaded holes 151 is not specifically limited.

[0056] Preferably, the transport mechanism 100 further includes a fastening assembly 180. The fastening assembly 180 includes a fastener, which is detachably connected to the carrier plate 150 and the pallet 140 at the same time, so as to fix the relative position of the carrier plate 150 and the pallet 140 after the centering is completed. Further, the fastener includes a fastening screw 181 and a fastening nut 182, the carrier plate 150 is provided with a first through hole 152, and the pallet 140 is provided with a second through hole 141, and the fastening screw 181 passes through the first through hole 152 and the second through hole 141 at the same time, and cooperates with the fastening nut 182 to fix the relative position of the carrier plate 150 and the pallet 140. Specifically, after the centering accuracy and horizontality of the carrier plate 150 are adjusted, it is necessary to fix the position of the carrier plate 150 to prevent it from being misplaced during the subsequent transportation process. In this regard, the carrier plate 150 is stably fixed on the pallet 140 through the cooperation of the fastening screw 181 and the fastening nut 182 to ensure the positioning effect.

[0057] In this embodiment, the number of the fastening screws 181 and the number of the fastening nuts 182 are both eight, and the eight fastening nuts 182 are divided into four groups. The two fastening nuts 182 in each group are arranged at intervals and are arranged on a side of the bearing plate 150, and each fastening screw 181 cooperates with a fastening nut 182. However, this is not limited to this. In other embodiments, the number of the fastening screws 181 and the number of the fastening nuts 182 can be four or twelve, and the number of the fastening screws 181 and the fastening nuts 182 is not specifically limited.

[0058] Preferably, the transport mechanism 100 further includes a buffer assembly 190. The buffer assembly 190 is mounted on the carrier plate 150 and abuts against the material carrier 200. The buffer assembly 190 is used to buffer the material carrier 200 to ensure that the bottom plate of the material carrier 200 can fit tightly with the deposition chamber to avoid gaps, further ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality.

[0059] The buffer assembly 190 includes a positioning seat 191, an elastic member 192 and a supporting block 193. The supporting block 193 includes a supporting portion 194 and a connecting portion 195 connected to each other, and the cross-sectional area of ​​the supporting portion 194 is larger than the cross-sectional area of ​​the connecting portion 195. The positioning seat 191 is connected to the carrier plate 150, and the elastic member 192 is sleeved outside the connecting portion 195. One end of the elastic member 192 is in contact with the supporting portion 194, and the other end is in contact with the positioning seat 191. The supporting portion 194 is used to support the material carrier 200. Specifically, the elastic member 192 is always in a compressed state to apply an upward elastic force to the abutting portion 194, which can overcome the gravity of the material carrier 200; when the material carrier 200 moves upward to abut against the deposition chamber, the deposition chamber applies pressure to the abutting portion 194 through the material carrier 200, so that the elastic member 192 is compressed and deformed, thereby ensuring that the bottom plate of the material carrier 200 is in close fit with the deposition chamber.

[0060] The positioning seat 191 includes a seat body 196, a guide sleeve 197 and a stopper 198. The seat body 196 is connected to the carrier plate 150, and the guide sleeve 197 is installed in the seat body 196 and slidably cooperates with the connecting portion 195. The connecting portion 195 can slide relative to the guide sleeve 197, and the guide sleeve 197 can guide and limit the connecting portion 195 to ensure the stability of the upward and downward sliding of the abutting block 193, prevent the abutting block 193 from tilting or deflecting, and ensure the buffering effect. Specifically, the stopper 198 is installed in the seat body 196, and the stopper 198 is used to stop the connecting portion 195 to limit the extreme position of the downward sliding of the abutting block 193, and prevent the abutting block 193 from slipping out of the seat body 196.

[0061] In this embodiment, the elastic member 192 is a spring, and the number of buffer components 190 is four, and the four buffer components 190 are respectively arranged at the four corners of the carrier plate 150. However, this is not limited to this. In other embodiments, the elastic member 192 can also be an elastic rubber sleeve, and the number of buffer components 190 can be six or eight, and the material of the elastic member 192 and the number of buffer components 190 are not specifically limited. When each elastic member 192 is configured, it is set to have the same compression amount to ensure that in the initial state, the height of each buffer component 190 is the same.

[0062] The translation assembly 120 includes a first driving member 121 and a translation frame 122. The first driving member 121 is mounted on the base 110 and connected to the translation frame 122. The lifting assembly 130 is mounted on the translation frame 122. The first driving member 121 is used to drive the lifting assembly 130 to move along the first direction through the translation frame 122.

[0063] The lifting assembly 130 includes a second driving member 131 and a lifting frame 132. The second driving member 131 is connected to the lifting frame 132, and the support plate 140 is connected to the lifting frame 132. The second driving member 131 is used to drive the support plate 140 to rise or fall through the lifting frame 132. Specifically, the lifting direction of the lifting frame 132 is perpendicular to the plane where the first direction and the second direction are located, that is, the lifting direction of the lifting frame 132 is perpendicular to the horizontal plane, and the lifting direction of the lifting frame 132 is the vertical direction.

[0064] Furthermore, the first driving member 121 is used to drive the supporting plate 150 to move in the horizontal direction through the translation frame 122, the second driving member 131, the lifting frame 132 and the pallet 140 in sequence, and the second driving member 131 is used to drive the supporting plate 150 to move in the vertical direction through the lifting frame 132 and the pallet 140 in sequence. The first driving member 121 and the second driving member 131 work together to drive the material carrier 200 to move in the horizontal direction or the vertical direction through the supporting plate 150 to realize the material transportation function.

[0065] The first driving member 121 includes a driving motor 123, a lead screw 124 and a nut seat 125. The driving motor 123 is mounted on the base 110 and connected to the lead screw 124, the lead screw 124 cooperates with the nut seat 125, the nut seat 125 is connected to the translation frame 122, and the driving motor 123 is used to drive the lead screw 124 to rotate around its axial direction, so that the nut seat 125 moves along the axial direction of the lead screw 124, thereby driving the translation frame 122 to move along the axial direction of the lead screw 124.

[0066] In this embodiment, the specific structure of the second driving member 131 is the same as the specific structure of the first driving member 121 , and will not be described in detail herein.

[0067] The embodiment of the present invention further provides a method for using a transport mechanism, which is applied to the above-mentioned transport mechanism 100. The method for using the transport mechanism includes the following steps:

[0068] Step S110 : placing the material carrier 200 loaded with materials on the carrying plate 150 .

[0069] Step S120 : using the translation assembly 120 to drive the material carrier 200 to translate to the bottom of the deposition chamber.

[0070] Step S130 : using the centering assembly 160 to adjust the centering degree of the carrier plate 150 to ensure that the position of the material carrier 200 corresponds to the position of the material port of the deposition chamber.

[0071] Step S140 : using the leveling assembly 170 installed on the support plate 140 to adjust the level of the carrying plate 150 to ensure that the material carrier 200 is in a horizontal state.

[0072] Step S150 : using the lifting assembly 130 to drive the material carrier 200 to rise, so that the material carrier 200 extends into the deposition chamber through the material port.

[0073] It should be noted that the order of step S130 and step S140 is not specifically limited. After the material carrier 200 is driven to translate to the bottom of the deposition chamber by the translation assembly 120, the centering assembly 160 can be used to adjust the centering degree of the carrier plate 150, and then the leveling assembly 170 installed on the support plate 140 can be used to adjust the horizontality of the carrier plate 150; or the leveling assembly 170 installed on the support plate 140 can be used to adjust the horizontality of the carrier plate 150, and then the centering assembly 160 can be used to adjust the centering degree of the carrier plate 150.

[0074] In an optional embodiment, the distance between the supporting plate 150 and the deposition chamber in the vertical direction is small, and the material carrier 200 can be conveniently and accurately centered when it is translated to the bottom of the deposition chamber. Therefore, the translation assembly 120 is first used to drive the material carrier 200 to translate to the bottom of the deposition chamber, and then the material carrier 200 is centered and leveled. Then, the lifting assembly 130 is used to drive the material carrier 200 to rise, so that the material carrier 200 can extend into the deposition chamber through the material port.

[0075] In another optional embodiment, the distance between the carrier plate 150 and the deposition chamber in the vertical direction is relatively large, and in this case, step S111 is further included between step S110 and step S120: using the lifting assembly 130 to drive the material carrier 200 to rise to a preset height. In this case, in order to ensure the centering accuracy, the lifting assembly 130 is first used to drive the material carrier 200 to rise to a preset height (reducing the distance between the carrier plate 150 and the deposition chamber in the vertical direction), and then the translation assembly 120 is used to drive the material carrier 200 to translate to the bottom of the deposition chamber, and then the material carrier 200 is centered and leveled, and then the lifting assembly 130 is used to drive the material carrier 200 to rise, so that the material carrier 200 extends into the deposition chamber through the material port.

[0076] The transport mechanism 100 provided by the embodiment of the present invention has a translation component 120 installed on a base 110 and connected to a lifting component 130, the lifting component 130 is connected to a pallet 140, a centering component 160 is installed on the pallet 140 and connected to a load-bearing plate 150, the load-bearing plate 150 is used to carry a material carrier 200, and the centering component 160 is used to adjust the centering degree of the load-bearing plate 150. Compared with the prior art, the transport mechanism 100 provided by the present invention adopts a centering component 160 installed on the pallet 140 and connected to the load-bearing plate 150, so that the centering accuracy between the material carrier 200 and the deposition chamber can be effectively improved, the sealing of the deposition chamber during the deposition process can be ensured, the deposition effect can be improved, and the product quality can be ensured. The method for using the transport mechanism is simple and the transport efficiency is high. The deposition device has high deposition efficiency, good deposition effect, and high yield rate.

[0077] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A transport mechanism, characterized in that: It includes a base, a translation component, a lifting component, a pallet, a bearing plate and a centering component. The translation component is installed on the base and connected to the lifting component, the lifting component is connected to the pallet, the centering component is installed on the pallet and connected to the bearing plate, the bearing plate is used to carry a material carrier, and the centering component is used to adjust the centering degree of the bearing plate.

2. The transport mechanism according to claim 1, characterized in that: The centering assembly includes a first centering unit and a second centering unit, both of which are connected to the supporting plate, the first centering unit is used to adjust the position of the supporting plate in a first direction, and the second centering unit is used to adjust the position of the supporting plate in a second direction, and the first direction and the second direction are set at a preset angle.

3. The transport mechanism according to claim 2, characterized in that: The first centering unit includes a first fixed block, a second fixed block, a first adjusting member and a second adjusting member. The first fixed block and the second fixed block are relatively arranged on both sides of the supporting plate in the first direction and are both connected to the supporting plate. The first adjusting member is movably connected to the first fixed block, and the second adjusting member is movably connected to the second fixed block. The supporting plate is clamped between the first adjusting member and the second adjusting member.

4. The transport mechanism according to claim 1, characterized in that: The transport mechanism further comprises a leveling component, which is mounted on the pallet and connected to the bearing plate, and is used for adjusting the horizontality of the bearing plate.

5. The transport mechanism according to claim 4, characterized in that: The leveling assembly includes a third adjusting member, which is movably connected to the bearing plate and abuts against the supporting plate.

6. The transport mechanism according to claim 1, characterized in that: The transport mechanism further comprises a fastening assembly, wherein the fastening assembly comprises fasteners, and the fasteners are detachably connected to both the load-bearing plate and the pallet, so as to fix the relative positions of the load-bearing plate and the pallet after the centering is completed.

7. The transport mechanism according to claim 1, characterized in that: The transport mechanism also includes a buffer assembly, which includes a positioning seat, an elastic member and a supporting block, the supporting block includes a supporting portion and a connecting portion that are connected to each other, the cross-sectional area of ​​the supporting portion is larger than the cross-sectional area of ​​the connecting portion, the positioning seat is connected to the supporting plate, the elastic member is sleeved outside the connecting portion, one end of the elastic member is in contact with the supporting portion, and the other end is in contact with the positioning seat, and the supporting portion is used to support the material carrier.

8. The transport mechanism according to claim 7, characterized in that: The positioning seat includes a seat body, a guide sleeve and a stopper, the seat body is connected to the bearing plate, the guide sleeve is installed in the seat body and slidably cooperates with the connecting part, the stopper is installed in the seat body, and the stopper is used to stop the connecting part.

9. The transport mechanism according to claim 1, characterized in that: The translation assembly includes a first driving member and a translation frame. The first driving member is installed on the base and connected to the translation frame. The lifting assembly is installed on the translation frame.

10. The transport mechanism according to claim 1, characterized in that: The lifting assembly includes a second driving member and a lifting frame, the second driving member is connected to the lifting frame, and the supporting plate is connected to the lifting frame.

11. A method for using a transportation mechanism, characterized in that: Applied to the transport mechanism according to any one of claims 1 to 10, the method for using the transport mechanism comprises: placing the material carrier loaded with material on the carrying plate; Using the translation assembly to drive the material carrier to translate to the bottom of the deposition chamber; Using the centering assembly to adjust the centering degree of the carrier plate to ensure that the position of the material carrier corresponds to the position of the material port of the deposition chamber; The lifting assembly is used to drive the material carrier to rise, so that the material carrier extends into the deposition chamber through the material passage.

12. The method for using the transportation mechanism according to claim 11, characterized in that: Before the step of using the lifting assembly to drive the material carrier to rise so that the material carrier extends into the deposition chamber through the material passage, the method of using the transportation mechanism further includes: The leveling assembly installed on the support plate is used to adjust the level of the support plate to ensure that the material carrier is in a horizontal state.

13. A deposition device, characterized in that: Comprising the transport mechanism as described in any one of claims 1-10.

Images