Hydrophilic film vacuum coating equipment and coating method thereof

Abstract

The invention relates to the technical field of vacuum coating equipment, in particular to hydrophilic film vacuum coating equipment and a coating method thereof.The hydrophilic film vacuum coating equipment comprises a bottom plate and a coating box fixedly installed on one side of the upper surface of the bottom plate, a top plate is fixedly installed on one side of the coating box, a plurality of circular grooves are formed in the upper surface of the top plate in a penetrating mode, and sliding grooves are symmetrically formed in the circumferential inner walls of the circular grooves; the two sliding grooves are slidably connected with sliding blocks, springs are arranged between the sliding blocks and the sliding grooves, arc-shaped plates are fixedly connected to the middles of the upper surfaces of the sliding blocks, arc-shaped grooves matched with the arc-shaped plates in shape are formed in the positions, located on the circumferential inner walls of the upper sides of the sliding grooves, of the circular grooves, and rotary electric suction cups are arranged above the top plate. A plurality of circular substrates are placed on the sliding block on the inner side of the circular groove, the sliding block enables the substrates not to fall off, the electric push rod is started to drive the mounting base, the abutting block and the suction cup to be close to the substrates, after the suction cup makes contact with the substrates, the electric pump is started to exhaust air to generate negative pressure to adsorb the substrates, large-scale coating is facilitated, and efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating equipment, in particular to a hydrophilic film vacuum coating equipment and a coating method thereof. Background Art

[0002] Vacuum coating equipment mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. It includes many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and many other types.

[0003] The existing evaporation coating method is to place the substrate and the target material in a vacuum environment, heat the target material, evaporate the surface components in the form of atomic groups or ions, settle on the surface of the substrate, and form a thin film through the film forming process. At present, when coating a circular substrate, in order to make the coating more uniform, the circular substrate is often rotated, and in order to make the rotation more stable, the circular substrate is often clamped by tightening bolts, but this method of clamping the circular substrate is laborious and time-consuming to operate, and has low work efficiency. Summary of the invention

[0004] In order to solve the deficiencies of the prior art, the present invention provides a hydrophilic film vacuum coating equipment and a coating method thereof, thereby solving the problem in the prior art that when coating a circular substrate, in order to make the coating more uniform, the circular substrate is often rotated, and in order to make the rotation more stable, the circular substrate is often clamped by tightening bolts, but this method of clamping the circular substrate is laborious, time-consuming and has low work efficiency.

[0005] The technical solution adopted by the present invention to solve its technical problems is a hydrophilic film vacuum coating equipment, comprising a bottom plate and a coating box fixedly installed on one side of the upper surface of the bottom plate, the coating box having a cavity inside and an opening on the side away from the bottom plate, a top plate fixedly installed on the opening side of the coating box, a plurality of circular grooves are penetrated through the upper surface of the top plate, and slide grooves are symmetrically opened on the circumferential inner walls of the circular grooves, two of the slide grooves are slidably connected with sliders, a spring is arranged between the slider and the slide groove, two ends of the spring are respectively fixedly connected to the side walls of the slider and the side walls of the slide groove, an arc plate is fixedly connected to the middle part of the upper surface of the slider, the circular groove is located on the circumferential inner wall of the upper side of the slide groove, and an arc groove matching the shape of the arc plate is opened, and a rotating electric suction cup is arranged above the top plate; The rotating electric suction cup includes a mounting seat, an abutment block and a suction cup. The mounting seat is provided with a motor for driving the suction cup to rotate and an electric pump for extracting air between the suction cup and the circular substrate. The output shaft of the motor passes through the lower surface of the mounting seat and is fixedly connected to the abutment block. A suction cup is fixedly mounted on the lower surface of the abutment block, and the number and position of the abutment blocks and the suction cup correspond to the number and position of the plurality of circular grooves.

[0006] Preferably, vertical plates are fixedly connected on both sides of the upper surface of the top plate, a horizontal plate is fixedly connected between the two vertical plates, an electric push rod is fixedly installed in the middle of the upper surface of the horizontal plate, and the output end of the electric push rod passes through the horizontal plate and is fixedly connected to the mounting seat.

[0007] Preferably, a guide groove is formed through the middle of the two vertical plates, a guide block is slidably connected to the inner side of the guide groove, and the side wall of the guide block is fixedly connected to the side wall of the mounting seat.

[0008] Preferably, a sealing gasket is fixedly installed on the inner side of the lower surface of the mounting seat along the circumferential direction, and a sealing groove matched with the sealing gasket is opened on the inner side of the upper surface of the top plate along the circumferential direction.

[0009] Preferably, both ends of the abutment block are provided with mounting grooves, a rotating shaft is rotatably connected to the middle of the mounting groove, and a roller is fixedly mounted on the circumferential outer wall of the rotating shaft.

[0010] Preferably, a heater is fixedly installed in the middle of the bottom wall of the inner cavity of the coating box, a groove is provided in the middle of the heater, and a crucible is fixedly installed inside the groove.

[0011] Preferably, a sealing door is rotatably connected to the side wall of the coating box, a handle is fixedly connected to the side wall of the sealing door, and the sealing door is fixed to the coating box by a tongue lock.

[0012] Preferably, a vacuum pump is fixedly installed on the upper surface of the base plate at one side of the coating box, the vacuum pump is connected to the inner side of the coating box through a pipeline, and supporting legs are fixedly installed on the lower surface of the base plate.

[0013] A coating method for a hydrophilic film vacuum coating device, the method comprising the following steps: Step 1: Unlock the sealed door and the coating box by turning the cam lock, pull the handle to open the sealed door, place the target in the crucible on the heater, and close the sealed door after the target is placed; Step 2: Place the circular substrate to be coated on the upper surface of the slider on the inner side of the circular groove between the two arc plates. At this time, the slider contacts the circular substrate so that the circular substrate will not fall down, and then start the electric push rod. The output end of the electric push rod drives the mounting seat, the abutment block and the suction cup to move toward the circular substrate. When the suction cup contacts the circular substrate, the electric pump inside the mounting seat is started. When the electric pump is running, the air between the suction cup and the surface of the circular substrate is sucked away, so that a negative pressure is generated inside the suction cup, so that the suction cup can be tightly adsorbed on the surface of the circular substrate. Then start the motor inside the mounting seat, and the output end of the motor drives the abutment block to rotate 90 degrees. At this time, the two ends of the abutment block respectively push the two arc plates to move outward, and the arc plate drives the slider to move in the slide groove. When the slider moves, the spring is squeezed to deform it. When the slider moves to both sides, it gives way to the circular substrate. At this time, the electric push rod continues to drive the mounting seat, the abutment block and the suction cup to move until the lower surface of the mounting seat abuts against the upper surface of the top plate, and the circular substrate adsorbed on the suction cup is located in the inner cavity of the coating box; Step 3: Start the vacuum pump, which will pass the pipeline to form a vacuum in the coating box cavity, and then drive the abutment block and the suction cup to rotate through the motor inside the mounting seat, and the suction cup drives the circular substrate to rotate; Step 4: Start the heater, which transfers heat to the crucible. The crucible heats and evaporates the target material inside it, and the surface of the circular substrate can be coated.

[0014] Beneficial effects of the present invention: In the present invention, a plurality of circular substrates are placed on the upper surface of the slider inside the circular groove between the two arc-shaped plates. At this time, the slider contacts the circular substrate so that the circular substrate will not fall downward. Then, the electric push rod is started, and the output end of the electric push rod drives the mounting seat, the abutment block and the suction cup to move toward the circular substrate. When the suction cup contacts the circular substrate, the electric pump inside the mounting seat is started. When the electric pump is running, the air between the suction cup and the surface of the circular substrate is sucked away, so that negative pressure is generated inside the suction cup, so that the suction cup can be tightly adsorbed on the surface of the circular substrate, thereby making the operation simpler when coating a large number of circular substrates at one time, thereby greatly improving the work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0016] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the internal structure of the coating box of the present invention; Figure 3 It is a bottom view structural schematic diagram of the present invention; Figure 4 It is a schematic diagram of the top view structure of the present invention; Figure 5It is a partial structural schematic diagram of the present invention; Figure 6 For the present invention Figure 3 A schematic diagram of the enlarged structure at A in the middle; Figure 7 For the present invention Figure 4 Schematic diagram of the enlarged structure at point B in the middle.

[0017] In the figure: 1. Bottom plate; 2. Coating box; 3. Top plate; 4. Round groove; 5. Slide groove; 6. Slider; 7. Spring; 8. Arc plate; 9. Arc groove; 10. Rotating electric suction cup; 11. Mounting seat; 12. Abutment block; 13. Suction cup; 14. Vertical plate; 15. Horizontal plate; 16. Electric push rod; 17. Guide groove; 18. Guide block; 19. Sealing gasket; 20. Sealing groove; 21. Mounting groove; 22. Rotating shaft; 23. Roller; 24. Heater; 25. Groove; 26. Crucible; 27. Sealing door; 28. Handle; 29. ​​Cam lock; 30. Vacuum pump; 31. Pipeline; 32. Support leg. DETAILED DESCRIPTION

[0018] In order to make the technical means, creative features, objectives and effects of the present invention easy to understand, the following is a summary of the present invention. The present invention is further described with reference to specific implementation modes.

[0019] like Figures 1 to 7 As shown, a preferred embodiment of the present invention proposes a hydrophilic film vacuum coating device, including a bottom plate 1 and a coating box 2 fixedly installed on one side of the upper surface of the bottom plate 1, the coating box 2 has a cavity inside and an opening on the side away from the bottom plate 1, a top plate 3 is fixedly installed on the opening side of the coating box 2, a plurality of circular grooves 4 are penetrated on the upper surface of the top plate 3, and slide grooves 5 are symmetrically opened on the inner wall of the circular groove 4, two slide grooves 5 are slidably connected with sliders 6, a spring 7 is arranged between the slider 6 and the slide groove 5, two ends of the spring 7 are fixedly connected to the side walls of the slider 6 and the side walls of the slide groove 5 respectively, an arc plate 8 is fixedly connected to the middle part of the upper surface of the slider 6, the circular groove 4 is located on the upper side of the slide groove 5 The inner wall of the circumference is opened with an arc groove 9 that matches the shape of the arc plate 8, and a rotating electric suction cup 10 is arranged above the top plate 3; The rotating electric suction cup 10 includes a mounting base 11, an abutment block 12 and a suction cup 13. The mounting base 11 is provided with a motor for driving the suction cup 13 to rotate and an electric pump for extracting the air between the suction cup 13 and the circular substrate. The motor output shaft passes through the lower surface of the mounting base 11 and is fixedly connected to the abutment block 12. The suction cup 13 is fixedly installed on the lower surface of the abutment block 12, and the number and position of the abutment blocks 12 and the suction cup 13 correspond to the number and position of the plurality of circular grooves 4.

[0020] Vertical plates 14 are fixedly connected to both sides of the upper surface of the top plate 3, a horizontal plate 15 is fixedly connected between the two vertical plates 14, an electric push rod 16 is fixedly installed in the middle of the upper surface of the horizontal plate 15, and the output end of the electric push rod 16 passes through the horizontal plate 15 and is fixedly connected to the mounting seat 11.

[0021] In the specific implementation process, the circular substrate to be coated is placed on the upper surface of the slider 6 inside the circular groove 4 between the two arc plates 8. At this time, the slider 6 contacts the circular substrate so that the circular substrate will not fall downward. Then, the electric push rod 16 is started. The output end of the electric push rod 16 drives the mounting seat 11, the abutment block 12 and the suction cup 13 to move toward the circular substrate. When the suction cup 13 contacts the circular substrate, the electric pump inside the mounting seat 11 is started. When the electric pump is running, the air between the suction cup 13 and the surface of the circular substrate is sucked away, so that a negative pressure is generated inside the suction cup 13, so that the suction cup 13 can be tightly adsorbed on the surface of the circular substrate. Then, the mounting seat 11 is started. The motor output end drives the abutment block 12 to rotate 90 degrees. At this time, the two ends of the abutment block 12 push the two arc plates 8 to move outward respectively. The arc plate 8 drives the slider 6 to move in the slide groove 5. When the slider 6 moves, the spring 7 is squeezed to deform it. When the slider 6 moves to both sides, it makes way for the circular substrate. At this time, the electric push rod 16 continues to drive the mounting seat 11, the abutment block 12 and the suction cup 13 to move until the lower surface of the mounting seat 11 abuts against the upper surface of the top plate 3. The circular substrate adsorbed on the suction cup 13 is located in the inner cavity of the coating box 2. The target material used for coating is heated and evaporated and adheres to the surface of the circular substrate. The coating is more uniform through the rotation of the circular substrate.

[0022] A guide groove 17 is formed through the middle of the two vertical plates 14 . A guide block 18 is slidably connected to the inner side of the guide groove 17 . The side wall of the guide block 18 is fixedly connected to the side wall of the mounting seat 11 .

[0023] In the above process, the mounting seat 11 drives the guide block 18 to move within the guide groove 11 during the movement, so that the mounting seat 11 is more stable when moving.

[0024] A sealing gasket 19 is fixedly mounted on the inner side of the lower surface of the mounting seat 11 along the circumferential direction, and a sealing groove 20 adapted to the sealing gasket 19 is opened on the inner side of the upper surface of the top plate 3 along the circumferential direction.

[0025] In the above process, when the lower surface of the mounting seat 11 contacts the upper surface of the top plate 3, the sealing gasket 19 and the sealing groove 20 are also engaged with each other, thereby ensuring the sealing inside the coating box.

[0026] Both ends of the abutment block 12 are provided with mounting grooves 21 , a rotating shaft 22 is rotatably connected to the middle of the mounting groove 21 , and a roller 23 is fixedly mounted on the outer circumferential wall of the rotating shaft 22 .

[0027] During the rotation of the abutment block 12 , the roller 23 contacts the inner wall of the circular groove 4 , which reduces the wear of the inner wall of the circular groove 4 and increases the service life.

[0028] A heater 24 is fixedly installed in the middle of the bottom wall of the inner cavity of the coating box 2 . A groove 25 is provided in the middle of the heater 24 . A crucible 26 is fixedly installed inside the groove 25 .

[0029] In a specific implementation process, the heater 24 is started, and the heater 24 transfers heat to the crucible 26. The crucible 26 heats and evaporates the target material inside, and at this time, the surface of the circular substrate can be coated.

[0030] A sealing door 27 is rotatably connected to the side wall of the coating box 2 , a handle 28 is fixedly connected to the side wall of the sealing door 27 , and the sealing door 27 is fixed to the coating box 2 via a tongue lock 29 .

[0031] In the specific implementation process, the sealing door 27 is convenient for loading and unloading the target material, and the sealing door 27 is made of transparent material, which is convenient for observing the target material.

[0032] A vacuum pump 30 is fixedly installed on the upper surface of the bottom plate 1 at one side of the coating box 2 . The vacuum pump 30 is connected to the inner side of the coating box 2 through a pipeline 31 , and a supporting leg 32 is fixedly installed on the lower surface of the bottom plate 1 .

[0033] In the specific implementation process, the vacuum pump 30 will form a vacuum in the inner cavity of the coating box 2 through the pipeline 31, and the support legs 32 can adjust the height according to needs, which is more applicable.

[0034] A coating method for a hydrophilic film vacuum coating device, the method comprising the following steps: Step 1: Unlock the sealed door 27 and the coating box 2 by turning the tongue lock 29, pull the handle 28 to open the sealed door 27, place the target material in the crucible 26 on the heater 24, and close the sealed door 27 after the target material is placed; Step 2: Place the circular substrate to be coated on the upper surface of the slider 6 inside the circular groove 4 between the two arc plates 8. At this time, the slider 6 contacts the circular substrate so that the circular substrate will not fall down. Then start the electric push rod 16. The output end of the electric push rod 16 drives the mounting seat 11, the abutment block 12 and the suction cup 13 to move toward the circular substrate. When the suction cup 13 contacts the circular substrate, start the electric pump inside the mounting seat 11. When the electric pump is running, it will draw away the air between the suction cup 13 and the surface of the circular substrate, so that negative pressure is generated inside the suction cup 13, so that the suction cup 13 can be tightly adsorbed on The surface of the circular substrate is then started, and the motor inside the mounting seat 11 is started. The output end of the motor drives the abutment block 12 to rotate 90 degrees. At this time, the two ends of the abutment block 12 respectively push the two arc plates 8 to move outward, and the arc plate 8 drives the slider 6 to move in the slide groove 5. When the slider 6 moves, the spring 7 is squeezed to deform it. When the slider 6 moves to both sides, it makes way for the circular substrate. At this time, the electric push rod 16 continues to drive the mounting seat 11, the abutment block 12 and the suction cup 13 to move until the lower surface of the mounting seat 11 abuts against the upper surface of the top plate 3, and the circular substrate adsorbed on the suction cup 13 is located in the inner cavity of the coating box 2; Step 3: Start the vacuum pump 30, which will form a vacuum in the inner cavity of the coating box 2 through the pipeline 31, and then drive the abutment block 12 and the suction cup 13 to rotate through the motor inside the mounting seat 11, and the suction cup 13 drives the circular substrate to rotate; Step 4: Start the heater 24, which transfers heat to the crucible 26. The crucible 26 heats and evaporates the target material inside it, and at this time, the surface of the circular substrate can be coated.

[0035] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A hydrophilic film vacuum coating device, characterized in that: It comprises a bottom plate (1) and a coating box (2) fixedly mounted on one side of the upper surface of the bottom plate (1), the coating box (2) having a cavity inside and an opening on the side away from the bottom plate (1), a top plate (3) fixedly mounted on the opening side of the coating box (2), a plurality of circular grooves (4) penetrating the upper surface of the top plate (3), the inner circumferential walls of the circular grooves (4) being symmetrically provided with slide grooves (5), two slide grooves (5) being slidably connected with sliders (6), a spring (7) being arranged between the sliders (6) and the slide grooves (5), the two ends of the spring (7) being respectively fixedly connected with the side walls of the sliders (6) and the side walls of the slide grooves (5), an arc plate (8) being fixedly connected to the middle part of the upper surface of the slider (6), an arc groove (9) matching the shape of the arc plate (8) being arranged on the inner circumferential wall of the upper side of the circular groove (4) and a rotating electric suction cup (10) being arranged above the top plate (3); The rotating electric suction cup (10) comprises a mounting seat (11), an abutment block (12) and a suction cup (13); a motor for driving the suction cup (13) to rotate and an electric pump for extracting air between the suction cup (13) and the circular substrate are arranged in the mounting seat (11); an output shaft of the motor passes through the lower surface of the mounting seat (11) and is fixedly connected to the abutment block (12); a suction cup (13) is fixedly mounted on the lower surface of the abutment block (12); and the number and position of the abutment block (12) and the suction cup (13) correspond to the number and position of the plurality of circular grooves (4).

2. The hydrophilic film vacuum coating equipment according to claim 1, characterized in that: Vertical plates (14) are fixedly connected to both sides of the upper surface of the top plate (3), a horizontal plate (15) is fixedly connected between the two vertical plates (14), an electric push rod (16) is fixedly installed in the middle of the upper surface of the horizontal plate (15), and the output end of the electric push rod (16) passes through the horizontal plate (15) and is fixedly connected to the mounting seat (11).

3. The hydrophilic film vacuum coating equipment according to claim 2, characterized in that: A guide groove (17) is provided through the middle of each of the two vertical plates (14), a guide block (18) is slidably connected to the inner side of the guide groove (17), and a side wall of the guide block (18) is fixedly connected to a side wall of the mounting seat (11).

4. The hydrophilic film vacuum coating equipment according to claim 3, characterized in that: A sealing gasket (19) is fixedly mounted on the inner side of the lower surface of the mounting seat (11) along the circumferential direction, and a sealing groove (20) adapted to the sealing gasket (19) is opened on the inner side of the upper surface of the top plate (3) along the circumferential direction.

5. The hydrophilic film vacuum coating equipment according to claim 3, characterized in that: Both ends of the abutment block (12) are provided with mounting grooves (21), the middle of the mounting groove (21) is rotatably connected to a rotating shaft (22), and a roller (23) is fixedly mounted on the circumferential outer wall of the rotating shaft (22).

6. The hydrophilic film vacuum coating equipment according to claim 4, characterized in that: A heater (24) is fixedly mounted in the middle of the bottom wall of the inner cavity of the coating box (2), a groove (25) is provided in the middle of the heater (24), and a crucible (26) is fixedly mounted inside the groove (25).

7. The hydrophilic film vacuum coating equipment according to claim 5, characterized in that: The side wall of the coating box (2) is rotatably connected to a sealing door (27), the side wall of the sealing door (27) is fixedly connected to a handle (28), and the sealing door (27) is fixed to the coating box (2) via a tongue lock (29).

8. The hydrophilic film vacuum coating equipment according to claim 5, characterized in that: A vacuum pump (30) is fixedly mounted on the upper surface of the bottom plate (1) located on one side of the coating box (2); the vacuum pump (30) is connected to the inner side of the coating box (2) via a pipeline (31), and a support leg (32) is fixedly mounted on the lower surface of the bottom plate (1).

9. A coating method for a hydrophilic film vacuum coating device, characterized in that: A hydrophilic film vacuum coating device comprising any one of claims 1 to 8, the method comprising the following steps: Step 1: unlocking the sealed door (27) and the coating box (2) by turning the tongue lock (29), pulling the handle (28) to open the sealed door (27), placing the target material in the crucible (26) on the heater (24), and closing the sealed door (27) after the target material is placed; Step 2: The circular substrate to be coated is placed on the upper surface of the slider (6) inside the circular groove (4) between the two arc-shaped plates (8). At this time, the slider (6) contacts the circular substrate so that the circular substrate does not fall downward. Then, the electric push rod (16) is started. The output end of the electric push rod (16) drives the mounting seat (11), the abutment block (12) and the suction cup (13) to move toward the circular substrate. When the suction cup (13) contacts the circular substrate, the electric pump inside the mounting seat (11) is started. When the electric pump is running, the air between the suction cup (13) and the surface of the circular substrate is sucked away, so that a negative pressure is generated inside the suction cup (13), so that the suction cup (13) can be tightly adsorbed on the circular substrate. The surface is then started, and the motor inside the mounting seat (11) is driven by the output end of the motor to rotate the abutment block (12) by 90 degrees. At this time, the two ends of the abutment block (12) respectively push the two arc plates (8) to move outward, and the arc plate (8) drives the slider (6) to move in the slide groove (5). When the slider (6) moves, the spring (7) is squeezed to deform. When the slider (6) moves to both sides, the circular substrate is given way. At this time, the electric push rod (16) continues to drive the mounting seat (11), the abutment block (12) and the suction cup (13) to move until the lower surface of the mounting seat (11) abuts against the upper surface of the top plate (3), and the circular substrate adsorbed on the suction cup (13) is located in the inner cavity of the coating box (2); Step 3: Start the vacuum pump (30), the vacuum pump (30) passes through the pipeline (31) to form a vacuum in the inner cavity of the coating box (2), and then drives the abutment block (12) and the suction cup (13) to rotate through the motor inside the mounting seat (11), and the suction cup (13) drives the circular substrate to rotate; Step 4: Start the heater (24), the heater (24) transfers heat to the crucible (26), and the crucible (26) heats and evaporates the target material inside it, and at this time, the surface of the circular substrate can be coated.

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