A vacuum coating processing mode

Abstract

This invention proposes a vacuum coating process that sequentially follows steps one through four to ensure that coating is performed only after the corresponding vacuum level is met. This reduces the impact of previous vacuum coating processes on the vacuum level, guarantees the vacuum level requirements during coating, and improves coating quality. By monitoring the coating rate, the equipment stops when the rate reaches its upper limit or cannot be detected. Simultaneously, the upper limit of single-layer coating time is monitored, ensuring crucible safety and facilitating rate monitoring.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and more specifically, to a vacuum coating process. Background Technology

[0002] Vacuum evaporation coating is a method in which the raw material to be deposited into a thin film is heated in a vacuum chamber and then vaporized in an evaporation vessel, causing its atoms or molecules to escape from the surface and form a vapor stream. This vapor stream then condenses on the solid surface to form a solid thin film. Because the main physical process of vacuum evaporation or vacuum deposition is generated by heating the evaporating material, it is also called thermal evaporation. Its equipment is relatively simple, easy to operate, and produces thin films with high purity and quality, allowing for precise thickness control. It also features a fast film formation rate, high efficiency, and a relatively simple film growth mechanism.

[0003] The coating method closest to this application in the prior art is disclosed in Publication No. CN108385077A, which discloses a coating device and coating method that can indirectly monitor the film thickness in real time. It discloses that multiple evaporation sources can be monitored and controlled simultaneously during multi-source co-evaporation, and the thickness and ratio of different film materials can be controlled in this way when multiple film materials are coated at the same time. It can achieve precise control effect for coating layers with multiple film materials.

[0004] Existing coating methods only monitor coating thickness, without monitoring other parameters, which still cannot adequately guarantee coating quality and efficiency.

[0005] In view of this, the present invention proposes a vacuum coating process that provides precise monitoring and high-efficiency coating. Summary of the Invention

[0006] The purpose of this invention is to propose a vacuum coating process that provides precise monitoring and high-efficiency coating.

[0007] A vacuum coating process, characterized by comprising the following steps:

[0008] Step 1: Select the coating program for the coating material; in the equipment operation software, select the pre-stored process program;

[0009] Step 2: Match the environment of the processing chamber to the corresponding coating material and pre-treat the environment of the processing chamber accordingly; the pre-treatment includes vacuuming before the coating process and adjusting the processing temperature;

[0010] Step 3: During each coating process for a different material, real-time data parameters of the coating layer for that material are monitored. These real-time data parameters include: rate, coating time, thickness, vacuum level, power, and crystal oscillator frequency. The real-time data parameters of the coating layer are compared with the corresponding set reference value ranges. If the parameters meet the reference value ranges, coating continues until the coating layer is completed. After selecting the next coating material, the process proceeds to Step 2 for environmental pretreatment. If the conditions are not met, the system stops, an alarm sounds, and the process proceeds to Step 4.

[0011] Step 4: Analyze and process the corresponding parameters that do not conform to the settings so that they conform to the reference value range of the corresponding parameters, and then return to Step 2.

[0012] In some implementations, in step three, the rate is the material thickness displayed per unit time during the evaporation process, the single-layer time is the cumulative time used from the start of coating to reaching the target thickness, the vacuum degree is the vacuum degree during the evaporation process, the power range is the power displayed in real time during material evaporation, and the crystal oscillator frequency is a parameter for controlling the magnetron sputtering of the coating equipment.

[0013] Furthermore, when no rate is detected in step three or when the rate limit is reached, the coating equipment will stop and trigger an alarm in step four.

[0014] When the actual coating time is compared with the set upper limit coating time in step three, if the actual evaporation time exceeds the set upper limit coating time, the equipment stops coating and the coating equipment will stop alarm in step four.

[0015] If, in step three, it is detected that the coating thickness does not accumulate steadily at the set rate or that there is a sudden change in the detected coating thickness, the coating equipment will stop and alarm in step four.

[0016] If, during the coating process in step three, the power continuously reaches the set power limit and the alarm time is reached, the coating equipment will stop and alarm in step four.

[0017] Furthermore, the rate includes an initial rate, a second-stage rate, and a third-stage rate, which are set according to process requirements.

[0018] Furthermore, the coating thickness includes the thickness of a first layer, a second layer, and a third layer, and the range of the thickness of the first, second, and third layers is set according to process requirements.

[0019] In some implementations, before step three, the coating material needs to be pre-melted. Pre-melting is used to pre-melt the material so that it is fully melted, reducing particles and preventing unmelted material from remaining at the edges of the crucible or failing to meet the evaporation coating rate when there is an excess of material.

[0020] Furthermore, in step two, the material pre-melting is carried out by regional scanning preheating with an electron beam spot. The power and time parameters for pre-melting different materials are based on the ability to quickly reach the set evaporation rate after the baffle is opened.

[0021] Furthermore, the electron beam regional scanning method can be one of single-point, multi-point, or ring-shaped.

[0022] Furthermore, the single-point scanning includes the X position of the electron beam spot, the Y position of the electron beam spot, the scanning radius, and the scanning speed. When performing single-point scanning, the X position and the Y position of the electron beam spot constitute the center position of the single-point scan. When performing multi-point scanning, such as two-point scanning, the midpoint between the X position and the Y position of the electron beam spot is the center position of the single-point scan. When performing ring scanning, the X position and the Y position of the electron beam spot constitute the center position, and scanning is performed according to the scanning radius.

[0023] The beneficial effects of this invention are as follows: This invention proposes a vacuum coating process, which sequentially follows steps one through four to ensure that coating is performed only after the corresponding vacuum level is met. This reduces the impact of the previous vacuum coating process on the vacuum level, ensures the vacuum level requirements during coating, and improves coating quality. By monitoring the coating rate, the equipment stops when the rate reaches the upper limit or cannot be detected. At the same time, the upper limit of the single-layer coating time is monitored, ensuring crucible safety and making rate monitoring easier. Attached Figure Description

[0024] Figure 1 This is a flowchart illustrating a vacuum coating process according to this application.

[0025] The following detailed description, in conjunction with the accompanying drawings, will further illustrate the present invention. Detailed Implementation

[0026] The following embodiments are described to aid in understanding this application. These embodiments are not, and should not be, construed in any way as limiting the scope of protection of this application.

[0027] In the following description, those skilled in the art will recognize that throughout this discussion, components may be described as individual functional units (which may include subunits), but those skilled in the art will recognize that various components or portions thereof may be divided into individual components or may be integrated together (including integrated within a single system or component).

[0028] Furthermore, the connection between components or systems is not intended to be limited to a direct connection; on the contrary, data between these components may be modified, reformatted, or otherwise altered by intermediate components. Additionally, other or fewer connections may be used. It should also be noted that the terms "connection," "link," or "input" should be understood to include direct connections, indirect connections via one or more intermediate devices, and wireless connections.

[0029] Example 1:

[0030] like Figure 1 The diagram shown is a flowchart of a vacuum coating process according to this application. A vacuum coating process is characterized by comprising the following steps:

[0031] Step 1: Select the coating program for the coating material; in the equipment operation software, select the pre-stored process program;

[0032] Step 2: Match the environment of the processing chamber to the corresponding coating material and pre-treat the environment of the processing chamber accordingly; the pre-treatment includes vacuuming before the coating process and adjusting the processing temperature;

[0033] Step 3: During each coating process for a different material, real-time data parameters of the coating layer for that material are monitored. These real-time data parameters include: rate, coating time, thickness, vacuum level, power, and crystal oscillator frequency. The real-time data parameters of the coating layer are compared with the corresponding set reference value ranges. If the parameters meet the reference value ranges, coating continues until the coating layer is completed. After selecting the next coating material, the process proceeds to Step 2 for environmental pretreatment. If the conditions are not met, the system stops, an alarm sounds, and the process proceeds to Step 4.

[0034] Step 4: Analyze and process the corresponding parameters that do not conform to the settings so that they conform to the reference value range of the corresponding parameters, and then return to Step 2.

[0035] In step three, the rate is the material thickness displayed per unit time during the evaporation process, the single-layer time is the cumulative time used from the start of coating to reaching the target thickness, the vacuum degree is the vacuum degree during the evaporation process, the power range is the power displayed in real time during material evaporation, and the crystal oscillator frequency is the parameter for controlling the magnetron sputtering of the coating equipment.

[0036] When no rate is detected in step three or the rate limit is reached, the coating equipment will stop and alarm in step four.

[0037] When the actual coating time is compared with the set upper limit coating time in step three, if the actual evaporation time exceeds the set upper limit coating time, the equipment stops coating and the coating equipment will stop alarm in step four.

[0038] If, in step three, it is detected that the coating thickness does not accumulate steadily at the set rate or that there is a sudden change in the detected coating thickness, the coating equipment will stop and alarm in step four.

[0039] If, during the coating process in step three, the power continuously reaches the set power limit and the alarm time is reached, the coating equipment will stop and alarm in step four.

[0040] The rates include an initial rate, a second-stage rate, and a third-stage rate, which are set according to process requirements.

[0041] The coating thickness includes the thickness of a first layer, a second layer, and a third layer. The range of the thickness of the first, second, and third layers is set according to the process requirements.

[0042] Before step three, the coating material needs to be pre-melted. Pre-melting is used to pre-melt the material so that it can be fully melted, reducing particles and preventing unmelted material from remaining at the edges of the crucible or failing to meet the evaporation coating rate when there is too much material.

[0043] In step two, the material pre-melting is performed using regional scanning preheating with an electron beam spot. The power and time parameters for pre-melting different materials are determined based on the ability to quickly reach the set evaporation rate after the baffle is opened. The parameters are not unique for each evaporation material. Taking titanium metal with a process rate of 5A / sec as an example, the required preheating power is 1-15%, the rise time is 30 seconds, and the holding time is 1 min 30 seconds. The required preheating power is 2-25%, the rise time is 30 seconds, and the holding time is 2 min. When set according to this preheating procedure, a coating rate of 5A / sec can be achieved after the baffle is opened.

[0044] The electron beam regional scanning method can be one of single-point, multi-point, or ring-shaped.

[0045] The single-point scanning includes the X position of the electron beam spot, the Y position of the electron beam spot, the scanning radius, and the scanning speed. In single-point scanning, the X position and Y position of the electron beam spot constitute the center position of the single-point scan. In multi-point scanning, such as two-point scanning, the midpoint between the X position and Y position of the electron beam spot is the center position of the single-point scan. In ring scanning, the X position and Y position of the electron beam spot constitute the center position, and scanning is performed according to the scanning radius.

[0046] The beneficial effects of this invention are as follows: This invention proposes a vacuum coating process, which sequentially follows steps one through four to ensure that coating is performed only after the corresponding vacuum level is met. This reduces the impact of the previous vacuum coating process on the vacuum level, ensures the vacuum level requirements during coating, and improves coating quality. By monitoring the coating rate, the equipment stops when the rate reaches the upper limit or cannot be detected. At the same time, the upper limit of the single-layer coating time is monitored, ensuring crucible safety and making rate monitoring easier.

[0047] Although this application discloses several aspects and embodiments, other aspects and embodiments will be obvious to those skilled in the art. Various modifications and improvements can be made without departing from the concept of this application, and these all fall within the scope of protection of this application. The various aspects and embodiments disclosed in this application are for illustrative purposes only and are not intended to limit this application. The actual scope of protection of this application is determined by the claims.

Claims

1. A vacuum coating process, characterized in that, Includes the following steps, Step 1: Select the coating program for the coating material; in the equipment operation software, select the pre-stored process program; Step 2: Match the environment of the processing chamber to the corresponding coating material and perform corresponding pretreatment on the environment of the processing chamber; the pretreatment includes vacuuming before the coating process and adjusting the processing temperature; Step 3: During each coating process for a different material, real-time data monitoring of the coating layer for that material is performed. This real-time data includes parameters such as: coating rate, coating time, thickness, vacuum level, power, and crystal oscillator frequency. The real-time data parameters of the coating layer are compared with their set reference value ranges. If the reference value ranges are met, coating continues until the coating layer is complete. The next coating material is then selected, and the process proceeds to Step 2 for environmental pretreatment. If the requirements are not met, the system stops, an alarm sounds, and the process proceeds to Step 4. If the coating rate is not detected in Step 3 or reaches... When the maximum rate is reached, the coating equipment will stop and alarm, proceeding to step four. If the actual coating time in step three is compared with the set maximum coating time, and the actual evaporation time exceeds the set maximum coating time, the equipment will stop coating, triggering a shutdown alarm and proceeding to step four. If, in step three, it is detected that the coating thickness does not accumulate stably according to the set rate or that there is a sudden change in the detected coating thickness, the coating equipment will stop and alarm, proceeding to step four. If, in step three, the power continuously reaches the set maximum power and the alarm time is reached during the coating process, the coating equipment will stop and alarm, proceeding to step four. Step 4: Analyze and process any parameters that do not meet the set parameters to bring them within the reference range. Then return to Step 2. Before Step 3, the coating material needs to be pre-melted. Pre-melting is used to pre-melt the material, ensuring it is fully melted, reducing particles, and preventing unmelted material from remaining at the crucible edges or insufficient evaporation coating rate due to excessive material. In Step 2, the material pre-melting uses electron beam spot scanning for regional preheating. The power and time parameters for pre-melting different materials are adjusted to ensure rapid achievement of the set values ​​after the baffle is opened. Based on the evaporation rate, the electron beam regional scanning method can be one of single-point, multi-point, or ring-shaped. The single-point scanning includes the X position of the electron beam spot, the Y position of the electron beam spot, the scanning radius, and the scanning speed. When performing single-point scanning, the X position and Y position of the electron beam spot constitute the center position of the single-point scan. When performing two-point scanning, the midpoint between the X position and Y position of the electron beam spot is the center position of the single-point scan. When performing ring-shaped scanning, the X position and Y position of the electron beam spot constitute the center position, and scanning is performed according to the scanning radius.

2. The vacuum coating process as described in claim 1, characterized in that: In step three, the rate is the material thickness displayed per unit time during the evaporation process, the single-layer time is the cumulative time used from the start of coating to reaching the target thickness, the vacuum degree is the vacuum degree during the evaporation process, the power range is the power displayed in real time during material evaporation, and the crystal oscillator frequency is the parameter for controlling the magnetron sputtering of the coating equipment.

3. The vacuum coating process as described in claim 1, characterized in that: The rates include an initial rate, a second-stage rate, and a third-stage rate, which are set according to process requirements.

4. The vacuum coating process as described in claim 1, characterized in that: The coating thickness includes the thickness of a first layer, a second layer, and a third layer. The range of the thickness of the first, second, and third layers is set according to the process requirements.

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