A small circular flat target with a simplified structure using the cavity wall as an anode cover

Abstract

The present invention relates to the field of magnetron sputtering coating technology, and specifically to a small circular planar target with a cavity wall as an anode cover and a simplified structure, comprising a coating machine body, a vacuum cavity arranged in the coating machine body, a mounting hole penetrating inside and outside arranged on the cavity wall of the vacuum chamber, and a mounting flange, the mounting flange being mounted on the outer surface of the coating machine body at the position of the mounting hole, a magnetic track seat being mounted on the side of the mounting flange facing the mounting hole, a central column magnet being arranged at the center of the magnetic track seat, a ring magnet being arranged around the central column magnet, an annular cooling groove being arranged between the central column magnet and the ring magnet, a water inlet and a water outlet connected to the annular cooling groove being arranged on the side of the mounting flange away from the mounting hole, and a target being mounted on the side of the magnetic track seat away from the mounting flange. The present invention solves the problem that at present, most planar targets use the ring magnet and the central column magnet to be directly immersed in cooling water for cooling, which accelerates the consumption of magnetic energy.

Description

Technical Field

[0001] The invention relates to the technical field of magnetron sputtering coating, and in particular to a small circular plane target with a simplified structure and a cavity wall as an anode cover. Background Art

[0002] With the rapid development of materials science, electronics industry, optical instruments, aerospace and other related fields, magnetron sputtering coating technology, as an important surface treatment technology, will play an increasingly important role in the future development of science and technology, and has become an important means of depositing wear-resistant, corrosion-resistant, decorative, optical and other functional films. Magnetron sputtering coating technology will continue to incorporate more advanced scientific and technological elements to achieve more complex and high-precision coating requirements. At the same time, the technology will also face more challenges and opportunities, such as further improving coating quality, expanding application areas, reducing energy consumption, reducing consumption, streamlining structure, saving raw materials, reducing processing procedures, simplifying assembly processes for easy installation, simple operation, and operator safety.

[0003] For example, currently, the ring magnets and center column magnets of most planar targets are cooled by directly immersing them in cooling water, which will accelerate the consumption of magnetic energy. For example, the Chinese utility model patent with application number CN202322611248.9, entitled A combined precious metal planar target, uses the cooling method of immersion. Summary of the invention

[0004] The purpose of the present invention is to provide a small circular planar target with a simplified structure and a cavity wall as an anode cover, so as to solve the problem in the prior art that most planar targets use ring magnets and center column magnets that are directly immersed in cooling water for cooling, which will accelerate the consumption of magnetic energy.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] A small circular plane target with a simplified structure and a cavity wall as an anode cover comprises a coating machine body, a vacuum cavity is arranged in the coating machine body, a mounting hole penetrating inside and outside is arranged on the cavity wall of the vacuum cavity, and a mounting flange is also included. The mounting flange is mounted on the outer surface of the coating machine body at the position of the mounting hole, a magnetic track seat is mounted on the side of the mounting flange facing the mounting hole, a center column magnet is arranged at the center of the magnetic track seat, a ring magnet is arranged around the center column magnet, an annular cooling groove is arranged between the center column magnet and the ring magnet on the magnetic track seat, a water inlet and a water outlet connected to the annular cooling groove are arranged on the side of the mounting flange away from the mounting hole, and a target material is mounted on the side of the magnetic track seat away from the mounting flange.

[0007] A further technical solution is that the target material is installed on the surface of the magnetic rail seat through a target pressure cover, a pressure groove is recessed on the side of the target pressure cover facing the magnetic rail seat, a sputtering hole connected to the side of the target pressure cover away from the magnetic rail seat is provided at the bottom of the pressure groove, the edge of the target pressure cover is fixed to the mounting flange by target pressure cover mounting bolts, and the target material is installed in the pressure groove.

[0008] A further technical solution is that a central groove for installing the central column magnet is provided at the central position of one side of the magnetic rail seat that is attached to the mounting flange, and an annular groove for installing the ring magnet is provided around the central groove.

[0009] A further technical solution is that a rear washer is provided between the magnetic rail seat and the mounting flange, and the rear washer covers the notches of the central groove and the annular groove; the magnetic rail seat is fixedly connected to the mounting flange by magnetic rail seat mounting bolts.

[0010] A further technical solution is that an outer insulating cover is provided on a side of the mounting flange away from the magnetic rail seat, and the outer insulating cover is fixedly connected to the outer wall of the mounting flange by insulating bolts.

[0011] A further technical solution is that a flange hole penetrating both sides is provided near the edge of the mounting flange, a bolt insulating sleeve is provided in the flange hole, and mounting bolts for fixing to the surface of the coating machine body are provided in the bolt insulating sleeve.

[0012] A further technical solution is that an insulating mounting flange is provided around the outer wall of the magnetic rail seat, and the insulating mounting flange is placed between the mounting flange and the surface of the coating machine body.

[0013] A further technical solution is that a first vacuum sealing O-ring for sealing with the mounting flange and a second vacuum sealing O-ring for sealing with the surface of the coating machine body are respectively arranged on opposite sides of the mounting insulating flange; the magnetic rail seat is sealably connected to the mounting flange through a cooling water pressure sealing O-ring near the edge.

[0014] A further technical solution is that two quick water connectors are arranged on a side of the mounting flange away from the magnetic rail seat, and the two quick water connectors are respectively connected to the water inlet and the water outlet.

[0015] A further technical solution is that the distance between the center column magnet and the ring magnet and the target material is 2 mm; the gap between the edge of the magnetic track seat and the hole wall of the mounting hole is less than 2.5 mm

[0016] Compared with the prior art, the beneficial effects of the present invention are: by setting an annular cooling groove, a water cooling channel can be formed between the central column magnet and the ring magnet, thereby cooling the central column magnet and the ring magnet, and there is no need for direct contact with the central column magnet and the ring magnet, thereby reducing magnetic energy consumption and avoiding mutual erosion and contamination between the cooling water and the central column magnet and the ring magnet. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic side section of a small circular flat target with a simplified structure and a cavity wall as an anode cover according to the present invention Figure 1 .

[0018] Figure 2 A schematic side section of a small circular flat target with a simplified structure and a cavity wall as an anode cover according to the present invention Figure 2 .

[0019] Icons: 1- chamber wall, 2- insulation bolt, 3- outer insulation cover, 4- mounting bolt, 5- bolt insulation sleeve, 6- mounting flange, 7- mounting insulation flange, 8- first vacuum sealing O-ring, 9- ring magnet, 10- center column magnet, 11- rear washer, 12- magnetic rail seat, 13- cooling water pressure sealing O-ring, 14- magnetic rail seat mounting bolt, 15- target material, 16- target pressure cover, 17- target pressure cover mounting bolt, 18- quick water connector. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0021] Figure 1 to Figure 2 An embodiment of the present invention is shown.

[0022] Example:

[0023] A small circular plane target with a simplified structure and a cavity wall as an anode cover, comprising a coating machine body, a vacuum cavity arranged in the coating machine body, a cavity wall 1 of the vacuum cavity being provided with a mounting hole that passes through the inside and outside, and a mounting flange 6, the mounting flange 6 being mounted on the outer surface of the coating machine body at the position of the mounting hole, a magnetic track seat 12 being mounted on the side of the mounting flange 6 facing the mounting hole, a center column magnet 10 being arranged at the center of the magnetic track seat 12, a ring magnet 9 being arranged around the center column magnet 10, an annular cooling groove being arranged between the center column magnet 10 and the ring magnet 9 on the magnetic track seat 12, a water inlet and a water outlet connected to the annular cooling groove being arranged on the side of the mounting flange 6 away from the mounting hole, and a target material 15 being mounted on the side of the magnetic track seat 12 away from the mounting flange 6. By providing an annular cooling groove, a water cooling channel can be formed between the central column magnet 10 and the ring magnet 9, thereby cooling the central column magnet 10 and the ring magnet 9, and there is no need for direct contact with the central column magnet 10 and the ring magnet 9, thereby reducing magnetic energy consumption and avoiding mutual erosion and contamination between the cooling water and the central column magnet 10 and the ring magnet 9.

[0024] The target material 15 is installed on the surface of the magnetic track seat 12 through the target pressure cover 16. The target pressure cover 16 is recessed on one side facing the magnetic track seat 12 and is provided with a pressure groove. The bottom of the pressure groove is provided with a sputtering hole connected to the side of the target pressure cover 16 away from the magnetic track seat 12. The edge of the target pressure cover 16 is fixed to the mounting flange 6 through the target pressure cover mounting bolts 17, and the target material 15 is installed in the pressure groove. By providing the target pressure cover 16 and the pressure groove on the target pressure cover 16, the target material 15 can be well fixed on the surface of the magnetic track seat 12, thereby fixing the position between the target material 15 and the center column magnet 10 and the ring magnet 9, so that the target material 15 can be sputtered and coated by using the magnetic field.

[0025] A center groove for installing the center column magnet 10 is provided at the center position of the magnetic rail seat 12 which is in contact with one side of the mounting flange 6, and an annular groove for installing the ring magnet 9 is provided around the center groove. By providing the center groove, the center column magnet 10 can be fixed, and during installation, the center column magnet 10 can be quickly placed into the center groove from the notch of the center groove. Similarly, by providing the annular groove, the ring magnet 9 can be well fixed, and during installation, the ring magnet 9 can be quickly placed into the notch of the annular groove, which improves the convenience of installation.

[0026] A rear washer 11 is provided between the magnetic rail seat 12 and the mounting flange 6, and the rear washer 11 covers the notches of the central groove and the annular groove; the magnetic rail seat 12 is fixedly connected to the mounting flange 6 by the magnetic rail seat mounting bolts 14. The mounting flange 6 and the magnetic rail seat 12 are made of copper with good conductivity, which has the effects of good conductivity, reduced energy consumption, and reduced consumption. By providing the rear washer 11, on the one hand, the notches of the annular groove and the central groove can be blocked, and at the same time, it can serve as a cushion between the mounting flange 6 and the central column magnet 10 and the ring magnet 9, which can improve the strength of the surface of the mounting flange 6.

[0027] An outer insulating cover 3 is provided on one side of the mounting flange 6 away from the magnetic rail seat 12, and the outer insulating cover 3 is fixedly connected to the outer wall of the mounting flange 6 by insulating bolts 2. By providing the outer insulating cover 3, the entire planar target can be insulated and protected. The small circular planar target is prevented from leaking out in the atmospheric state, and the operator is prevented from being hit by an electric shock when touching the target during work, thereby ensuring the safety of the operator and playing a role in ensuring the safety of the operator.

[0028] The mounting flange 6 is provided with flange holes passing through both sides near the edge, and a bolt insulating sleeve 5 is provided in the flange hole, and a mounting bolt 4 for fixing to the surface of the coating machine body is provided in the bolt insulating sleeve 5. By providing the bolt insulating sleeve 5 and the mounting bolt 4, the mounting flange 6 can be fixed to the surface of the coating machine body while being insulated from the coating machine body.

[0029] An insulating mounting flange 7 is provided around the outer wall of the magnetic rail seat 12, and the insulating mounting flange 7 is placed between the mounting flange 6 and the surface of the coating machine body. The insulating mounting flange 7 cooperates with the bolt insulating sleeve 5 and the mounting bolt 4, so that the mounting flange 6 can be fixed to the surface of the coating machine body while insulating the mounting flange 6 from the coating machine body.

[0030] The first vacuum sealing O-ring 8 for sealing with the mounting flange 6 and the second vacuum sealing O-ring for sealing with the surface of the coating machine body are respectively provided on the opposite sides of the mounting insulating flange 7; the magnetic rail seat 12 is sealed and connected to the mounting flange 6 through the cooling water pressure sealing O-ring 13 near the edge. By providing the first vacuum sealing O-ring 8 and the second vacuum sealing O-ring, the two sides of the mounting insulating flange 7 can be sealed to prevent air leakage from this position and cause the vacuum chamber to lose vacuum. By providing the cooling water pressure sealing O-ring 13, cooling water leakage can be prevented.

[0031] Two quick water joints 18 are arranged on the side of the mounting flange 6 away from the magnetic rail seat 12, and the two quick water joints 18 are respectively connected to the water inlet and the water outlet. The quick water joint 18 connects the PU pipe directly to the annular cooling groove of the magnetic rail seat 12 without any obstacles, which plays the effect of reducing energy consumption, reducing consumption, and simplifying the assembly process.

[0032] The distance between the center column magnet 10 and the ring magnet 9 and the target material 15 is 2 mm; the gap between the edge of the magnetic track seat 12 and the hole wall of the mounting hole is less than or equal to 2.5 mm. The gap between the target material 15 surface and the magnet surface is 2 mm, which improves the coating quality. The gap between the hole wall of the mounting hole and the magnetic track seat 12 is less than or equal to 2.5 mm, so that the cavity wall 1 can be used as a shielding cover for the small circular plane target, which saves raw materials, reduces processing procedures, streamlines the structure, and simplifies the assembly process. The scheme uses the cavity wall 1 of the coating machine body as a shielding cover for the small circular plane target, which saves raw materials, reduces processing procedures, and reduces the complexity of the small circular plane target. In addition, the structure of this scheme is suitable for several circular target specifications such as 2 inches, 3 inches, and 4 inches, and is highly versatile. Install the ring magnet 9 and the center column magnet 10 in the magnetic track seat 12; assemble the rear washer 11 and the mounting flange 6 holes; the magnetic track seat mounting bolts 14 fix the magnetic track seat 12 on the mounting flange 6 through the cooling water pressure sealing O-ring 13; the mounting flange 6 is fixedly installed on the coating machine body through the mounting insulating flange 7 and the bolt insulating sleeve 5; the quick water joint 18 is installed on the mounting flange 6 with raw tape; the water channel PU pipe is connected to the quick water joint 18; the external power cord is fixedly installed on the mounting flange 6; the outer insulating cover 3 is fixedly installed on the mounting flange 6 by the insulating bolts 2; the target pressure cover 16 fixes the target material 15 on the magnetic track seat 12 through the target pressure cover mounting bolts 17.

[0033] Although the present invention is described herein with reference to a number of illustrative embodiments of the present invention, it will be appreciated that those skilled in the art may devise many other modifications and implementations that fall within the scope and spirit of the principles disclosed herein. More specifically, within the scope of the present disclosure, drawings, and claims, a variety of variations and modifications may be made to the components and / or layout of the subject combination layout. In addition to the variations and modifications made to the components and / or layout, other uses will also be apparent to those skilled in the art.

Claims

1. A small circular planar target with a simplified structure and a cavity wall as an anode cover, comprising a coating machine body, a vacuum cavity is arranged in the coating machine body, and a mounting hole penetrating the cavity wall (1) of the vacuum cavity is arranged, characterized in that: The invention also comprises a mounting flange (6), wherein the mounting flange (6) is mounted on the outer surface of the coating machine body at the position of the mounting hole, a magnetic track seat (12) is mounted on the side of the mounting flange (6) facing the mounting hole, a central column magnet (10) is arranged at the center of the magnetic track seat (12), a ring magnet (9) is arranged around the central column magnet (10) on the magnetic track seat (12), an annular cooling groove is arranged between the central column magnet (10) and the ring magnet (9) on the magnetic track seat (12), a water inlet and a water outlet connected to the annular cooling groove are arranged on the side of the mounting flange (6) away from the mounting hole, and a target is mounted on the side of the magnetic track seat (12) away from the mounting flange (6). The magnetic rail seat (12) is provided with a central groove for installing a central column magnet (10) at a central position of one side of the magnetic rail seat (12) that is in contact with the mounting flange (6), and an annular groove for installing a ring magnet (9) is provided around the central groove; a rear washer (11) is provided between the magnetic rail seat (12) and the mounting flange (6), and the rear washer (11) covers the notches of the central groove and the annular groove; the magnetic rail seat (12) is fixedly connected to the mounting flange (6) by means of magnetic rail seat mounting bolts (14); an insulating mounting flange (7) is provided around the outer wall of the magnetic rail seat (12), and the insulating mounting flange (7) is placed between the mounting flange (6) and the surface of the coating machine body.

2. A small circular planar target with a simplified structure using a cavity wall as an anode cover according to claim 1, characterized in that: The target material (15) is mounted on the surface of the magnetic track seat (12) via a target pressure cover (16); a pressure groove is provided on a side of the target pressure cover (16) facing the magnetic track seat (12); a sputtering hole is provided at the bottom of the pressure groove and is connected to a side of the target pressure cover (16) away from the magnetic track seat (12); an edge of the target pressure cover (16) is fixed to the mounting flange (6) via a target pressure cover mounting bolt (17); and the target material (15) is mounted in the pressure groove.

3. A small circular planar target with a simplified structure using a cavity wall as an anode cover according to claim 1, characterized in that: An outer insulating cover (3) is provided on a side of the mounting flange (6) away from the magnetic rail seat (12); the outer insulating cover (3) is fixedly connected to the outer wall of the mounting flange (6) via insulating bolts (2).

4. A small circular planar target with a simplified structure using a cavity wall as an anode cover according to claim 1, characterized in that: The mounting flange (6) is provided with a flange hole passing through both sides near the edge, a bolt insulating sleeve (5) is provided in the flange hole, and a mounting bolt (4) for fixing to the surface of the coating machine body is provided in the bolt insulating sleeve (5).

5. A small circular planar target with a simplified structure using a cavity wall as an anode cover according to claim 1, characterized in that: A first vacuum sealing O-ring (8) for sealing with the mounting flange (6) and a second vacuum sealing O-ring for sealing with the surface of the coating machine body are respectively arranged on opposite sides of the mounting insulating flange (7); the magnetic rail seat (12) is sealed and connected to the mounting flange (6) at a position close to the edge via a cooling water pressure sealing O-ring (13).

6. A small circular planar target with a simplified structure using a cavity wall as an anode cover according to claim 1, characterized in that: Two quick water connectors (18) are arranged on a side of the mounting flange (6) away from the magnetic rail seat (12), and the two quick water connectors (18) are respectively connected to the water inlet and the water outlet.

7. A small circular planar target with a simplified structure using a cavity wall as an anode cover according to claim 1, characterized in that: The distance between the center column magnet (10) and the ring magnet (9) and the target material (15) is 2 millimeters; and the gap between the edge of the magnetic track seat (12) and the hole wall of the mounting hole is less than or equal to 2.5 millimeters.

Images