A device for controlling the acidity of etching liquid during etching of RFID antenna

Abstract

The invention relates to the technical field of acidity control, and more specifically discloses an acidity control device for etching liquid in an RFID antenna etching process, comprising a control shell, wherein the control shell comprises a shell body, an etching groove is provided on the top of the shell body, a filter press chamber is provided on the side of the bottom of the etching groove, a filter press guide component is installed inside the filter press chamber, an oblique flow groove and a displacement groove are provided on the top of the filter press chamber, a displacement component is installed inside the displacement groove, the filter press chamber is connected with the etching groove through the oblique flow groove, and the side of the filter press chamber is connected with the crushing groove through an arc-shaped pipe groove; the invention is advantageous in that when the acidity of the reflux acid changes, the first control information controls the rotation speed of the transmission motor to change, the moving distance of the centrifugal pressing plate on the sliding rod to change, and then controls the moving distance of the mixing component in the unit rotation frequency to be different, realizes the automatic adjustment of the mixing concentration, and has a higher ratio mixing stability.

Description

Technical Field

[0001] The invention relates to the technical field of acidity control, and more specifically to an etching liquid acidity control device during the etching process of an RFID antenna. Background Art

[0002] Wet etching is the core process of TFT manufacturing, which uses acidic etching liquid to pattern the metal film layer to form the gate (Gate Mol Al), source-drain (Source-Drain Cr) and pixel (ITO) electrodes. Among them, aluminum and molybdenum are often used as conductive materials to form the gate and source-drain. The etching liquid can use a variety of different acids, and the dissolution and oxidation-reduction process using a strong acid mixture (nitric acid, phosphoric acid and glacial acetic acid) has been widely used.

[0003] As the number of etchings increases and the life of the solution increases, nitric acid and acetic acid will be continuously consumed, the acid concentration will gradually decrease, and the absorbance deviation between the increasing etching product in the etching tank and the unchanged pure water in the reference tank will become larger and larger, resulting in a larger and larger acid concentration deviation. The system will mistakenly believe that the acid concentration has reached the standard and reduce the amount of single acid replenishment; and the control of the mixed acid concentration of the etching solution for the source and drain, too high acid concentration will cause over-etching, resulting in insufficient drive current and poor display; too low acid concentration will cause insufficient etching, resulting in a decrease in the aperture ratio and then a decrease in brightness and contrast; therefore, it will seriously affect the etching quality.

[0004] It can be seen that the stability of the acid value of the acid solution in the etching process is very important. However, for the existing acid value adjustment device, it is usually adjusted by combining a sensor and an acid solution adding mechanism. Although this method can effectively adjust the acid value within a small range, due to the different changes in different places, this adjustment method is prone to the situation where the acid value is high in one place and low in another, and the stability is poor. At the same time, impurities generated by multiple etchings will also affect the high stability of subsequent etching, and additional impurity treatment mechanisms need to be added for treatment, which increases the complexity of the structure and affects the continuous use effect. Summary of the invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides an etching liquid acidity control device during the etching process of an RFID antenna to solve the problems existing in the above-mentioned background technology.

[0006] The present invention provides the following technical solution: an etching liquid acidity control device during RFID antenna etching, comprising a control shell, the control shell comprising a shell body, an etching groove is provided on the top of the shell body, a filter press cavity is provided on the side of the bottom of the etching groove, a filter press guide component is installed inside the filter press cavity, an oblique flow groove and a displacement groove are provided on the top of the filter press cavity, a displacement component is installed inside the displacement groove, the filter press cavity is connected with the etching groove through the oblique flow groove, the side of the filter press cavity is connected with the crushing groove through the arc-shaped pipe groove, a grinding component is installed inside the crushing groove, a rotating cavity is provided inside the shell body, and a rotating component is installed inside the rotating cavity A rotating assembly, a transmission motor is installed at the bottom of the rotating assembly, a one-way cavity and a mixing tube groove are opened on the side of the bottom of the rotating cavity, a liquid pipette is installed on the top of the mixing tube groove, the other end of the liquid pipette is installed at the bottom of the strong acid cavity, a mixing assembly is installed inside the one-way cavity, a strong acid cavity and a low acid cavity are opened at the bottom of the shell body, a high-concentration acid solution is filled inside the strong acid cavity, a water inlet is installed on the front of the strong acid cavity, a standard acid solution for process is filled inside the low acid cavity, a reflux pipe is installed on the front of the low acid cavity, the other end of the reflux pipe is connected to the etching tank, a sewage cavity is opened on the side of the shell body, and a sewage box is installed inside the sewage cavity;

[0007] Furthermore, the rotating assembly includes a rotating body, a plurality of cams are fixedly connected to the outer surface of the rotating body, a detection cavity is opened at the top of the rotating body, the detection cavity is connected to the acid outlet at the bottom, a centrifugal cavity is opened at the bottom of the rotating body, a sliding rod is fixedly connected to the inside of the centrifugal cavity, a centrifugal pressure plate and a centrifugal spring are sleeved on the sliding rod, the centrifugal pressure plate is composed of a sliding block and a sphere, and the horizontal installation height of the sphere is the same as that of the inclined arc plate.

[0008] Furthermore, an acidity detection sensor is installed inside the detection cavity. The acidity detection sensor uses a double magnetic ring coil as a detection probe installed inside the detection cavity. When the acid flows through, the detection probe generates a corresponding conductivity signal according to the acidity of the hydrochloric acid in the etching solution flowing through, and then calculates the acidity of the hydrochloric acid in the etching solution through the conductivity signal. The decrease in the acidity is used as the first control information, and the first control information controls the rotation rate of the transmission motor.

[0009] Furthermore, the filter press guide assembly includes a cam rod, the top of the cam rod is fixedly connected to a filter press rod, a through hole is provided inside the filter press rod, a filter press plate is fixedly connected to the side of the filter press rod, a filter press plate has filter holes on its surface, a double-branch tooth plate is fixedly connected to the side of the cam rod, a tooth groove is provided on the double-branch tooth plate, the tooth groove is meshed with a one-way gear, and a first spring is sleeved on the outer side of the filter press rod.

[0010] Furthermore, the grinding assembly includes a grinding ball rod, both ends of the grinding ball rod are sleeved with one-way gears, one-way teeth are installed between the grinding ball rod and the one-way gear, and grinding balls are installed on the surface of the grinding ball rod.

[0011] Furthermore, the displacement assembly includes a square inclined plate, the top of the square inclined plate is fixedly connected to a displacement round rod, the side of the square inclined plate is fixedly connected to a positioning side rod, and a displacement sensor is installed on the side of the positioning side rod inside the displacement groove. The displacement sensor is used to detect the height information of the positioning side rod, and the height information controls the opening and closing of the bottom arc plate.

[0012] Furthermore, the mixing assembly includes a pushing rod, both ends of which are fixedly connected with an oblique arc plate and a pushing plate, the pushing plate is installed inside the one-way cavity, and a second spring is installed outside the pushing rod.

[0013] Furthermore, a control unit and a pressure sensor are installed inside the slider of the centrifugal pressure plate, and the control unit is composed of a controller and a clamp.

[0014] Furthermore, a bottom arc plate is installed at the bottom of the filter press chamber, and a one-way valve is installed at the bottom of the one-way chamber.

[0015] Technical effects and advantages of the present invention:

[0016] 1. The present invention is provided with a rotating component and a mixing component, so that when the acidity of the reflux acid solution changes, the first control information controls the rotation rate of the transmission motor to change, the moving distance of the centrifugal pressing plate on the sliding rod changes, and then controls the moving distance of the mixing component in the unit rotation frequency to be different, thereby realizing automatic adjustment of the mixing concentration and having a higher ratio mixing stability.

[0017] 2. The present invention is provided with a filter press guide assembly and a displacement assembly, which is conducive to the filter press plate to filter the liquid inside the filter press chamber and remove impurities in the reflux liquid when the filter press guide assembly moves outward, and at the same time, the filter residue inside the filter press chamber is automatically cleaned by the rise and fall of the displacement assembly.

[0018] 3. The present invention is provided with a grinding assembly, which is conducive to the double-branch tooth plate driving the one-way gear to rotate forward when the filter press guide assembly moves outward for filter pressing, and the grinding balls on the surface of the grinding ball rod contact and crush the filter residue, and then enter the interior of the sewage discharge chamber after being crushed. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0020] Figure 2 It is a cross-sectional view of the overall structure of the present invention.

[0021] Figure 3 For the present invention Figure 2 Schematic diagram of the structure of A.

[0022] Figure 4For the present invention Figure 2 Schematic diagram of the structure of B.

[0023] Figure 5 It is a schematic diagram of the control housing structure of the present invention.

[0024] Figure 6 It is a schematic diagram of the structure of the rotating assembly of the present invention.

[0025] Figure 7 It is a schematic diagram of the structure of the filter press guide assembly of the present invention.

[0026] Figure 8 It is a schematic diagram of the structure of the grinding assembly of the present invention.

[0027] Fig. 9 It is a schematic diagram of the displacement assembly structure of the present invention.

[0028] Fig.10 It is a schematic diagram of the structure of the mixing assembly of the present invention.

[0029] The accompanying drawings are marked as follows: 1. regulating housing; 101. housing body; 102. etching slot; 103. oblique flow slot; 104. filter press chamber; 105. displacement slot; 106. rotating chamber; 107. crushing slot; 108. one-way chamber; 109. mixing tube slot; 110. sewage chamber; 111. strong acid chamber; 112. low acid chamber; 2. transmission motor; 3. rotating assembly; 301. rotating body; 302. detection chamber; 303. centrifugal chamber; 304. centrifugal pressure plate; 305. centrifugal spring; 306. acid outlet; 4. pressure Filter guide assembly; 401, cam rod; 402, filter press rod; 403, filter press plate; 404, double-branch tooth plate; 5, grinding assembly; 501, grinding ball rod; 502, one-way gear; 6, displacement assembly; 601, square inclined plate; 602, positioning side rod; 603, displacement round rod; 604, third spring; 7, mixing assembly; 701, inclined arc plate; 702, pushing rod; 703, pushing plate; 8, suction tube; 9, first spring; 10, second spring; 11, sewage box; 12, reflux pipe; 13, water inlet. DETAILED DESCRIPTION

[0030] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the present invention. In addition, the forms of the various structures recorded in the following embodiments are only examples. The device for controlling the acidity of the etching liquid in the RFID antenna etching process involved in the present invention is not limited to the various structures recorded in the following embodiments. All other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention.

[0031] Reference Figure 1-5The present invention provides an acidity control device for etching liquid during etching of an RFID antenna, comprising a control shell 1, the control shell 1 comprising a shell body 101, an etching groove 102 is provided on the top of the shell body 101, a filter press chamber 104 is provided on the side of the bottom of the etching groove 102, a filter press guide component 4 is installed inside the filter press chamber 104, an oblique flow groove 103 and a displacement groove 105 are provided on the top of the filter press chamber 104, a displacement component 6 is installed inside the displacement groove 105, the filter press chamber 104 is connected with the etching groove 102 through the oblique flow groove 103, the side of the filter press chamber 104 is connected with the crushing groove 107 through an arc-shaped pipe groove, a grinding component 5 is installed inside the crushing groove 107, a rotating chamber 106 is provided inside the shell body 101, and a rotating component is installed inside the rotating chamber 106 3, a transmission motor 2 is installed at the bottom of the rotating component 3, a one-way cavity 108 and a mixing tube groove 109 are provided on the side of the bottom of the rotating cavity 106, a liquid pipette 8 is installed on the top of the mixing tube groove 109, the other end of the liquid pipette 8 is installed at the bottom of the strong acid cavity 111, a mixing component 7 is installed inside the one-way cavity 108, a strong acid cavity 111 and a low acid cavity 112 are provided at the bottom of the shell body 101, a high-concentration acid solution is installed inside the strong acid cavity 111, a water inlet 13 is installed on the front of the strong acid cavity 111, a standard acid solution for process is installed inside the low acid cavity 112, a reflux pipe 12 is installed on the front of the low acid cavity 112, the other end of the reflux pipe 12 is connected to the etching tank 102, a sewage cavity 110 is provided on the side of the shell body 101, and a sewage box 11 is installed inside the sewage cavity 110;

[0032] In this embodiment, it should be specifically explained that a bottom arc plate is installed at the bottom of the filter press chamber 104, and a one-way valve is installed at the bottom of the one-way chamber 108. The one-way valve allows high-concentration liquid to flow from the first spring 9 into the interior of the mixing tube groove 109 for mixing, while avoiding the reverse flow of the liquid.

[0033] The main difference between this embodiment and the prior art is that in this embodiment, the electric signal generated during acidity detection is used to control the rotation rate of the transmission motor 2 and convert it into centrifugal force to control the rate at which the high-concentration acid solution is mixed with it, so as to achieve a constant ratio, so that the etching process always maintains a stable acidity value, specifically in the rotating component 3 and the mixing component 7;

[0034] The above structure is the main structure of this embodiment, which solves the problem that the acidity value in the current etching process keeps changing but cannot be effectively and accurately processed. The controller is an existing structure, and the specific structure and connection method of the controller are not described in detail in this embodiment.

[0035] Reference Figure 6The rotating assembly 3 includes a rotating body 301, and a plurality of cams are fixedly connected to the outer surface of the rotating body 301. A detection chamber 302 is provided at the top of the rotating body 301, and the detection chamber 302 is communicated with the acid outlet 306 at the bottom. A centrifugal chamber 303 is provided at the bottom of the rotating body 301. A sliding rod is fixedly connected to the inside of the centrifugal chamber 303, and a centrifugal pressure plate 304 and a centrifugal spring 305 are sleeved on the sliding rod. The centrifugal pressure plate 304 is composed of a slider and a sphere. The horizontal installation height of the sphere is the same as that of the inclined arc plate 701. When the acidity value in the detection chamber 302 decreases, the first control information increases the rotation rate of the transmission motor 2, and the rotating body 301 increases the centrifugal force of the centrifugal pressure plate 304. The increase in the diameter of the centrifugal pressure plate 304 increases the moving distance of the mixing assembly 7.

[0036] In this embodiment, it is necessary to specifically explain that: a control unit and a pressure sensor are installed inside the slider of the centrifugal pressure plate 304, and the control unit is composed of a controller and a clamp. At each moment when the ball contacts the inclined arc plate 701, the controller controls the clamp to clamp the sliding rod to keep the position of the centrifugal pressure plate 304 fixed, thereby preventing the position of the centrifugal pressure plate 304 from changing due to the reverse force of the second spring 10, thereby preventing the mixing assembly 7 from moving a specified length.

[0037] An acidity detection sensor is installed inside the detection chamber 302. The acidity detection sensor uses a double magnetic ring coil as a detection probe installed inside the detection chamber 302. When the acid flows through, the detection probe generates a corresponding conductivity signal according to the acidity of the hydrochloric acid in the etching solution flowing through, and then calculates the acidity of the hydrochloric acid in the etching solution through the conductivity signal. The decrease in the acidity is used as the first control information, and the first control information controls the rotation rate of the transmission motor 2.

[0038] Reference Figure 7 The filter press guide assembly 4 includes a cam rod 401, a filter press rod 402 is fixedly connected to the top of the cam rod 401, a through hole is provided inside the filter press rod 402, a filter press plate 403 is fixedly connected to the side of the filter press rod 402, a filter press plate 403 is provided on the surface of the filter press plate 403, and a filter hole is provided. A double-branch tooth plate 404 is fixedly connected to the side of the cam rod 401, and a tooth groove is provided on the double-branch tooth plate 404, which is meshed with the one-way gear 502. When the transmission motor 2 is started, the transmission motor 2 drives the rotating assembly 3 to rotate. Since the outer edge of the rotating assembly 3 is equipped with a cam structure and contacts with the cam rod 401, the cam rod 401 moves outward under the action of the rotating assembly 3, so that the filter press plate 403 filters the acid liquid inside the filter press chamber 104, and the filtered liquid passes through the middle through hole of the filter press rod 402 and enters the top of the detection chamber 302.

[0039] In this embodiment, it should be specifically explained that: a first spring 9 is sleeved on the outer side of the filter press rod 402, and when the filter press guide assembly 4 loses the function of the rotating assembly 3, the first spring 9 applies pressure to the filter press guide assembly 4 in the reverse direction to make it move.

[0040] Reference Figure 8 The grinding assembly 5 includes a grinding ball rod 501, both ends of which are sleeved with one-way gears 502, one-way teeth are installed between the grinding ball rod 501 and the one-way gear 502, and grinding balls are installed on the surface of the grinding ball rod 501. When the filter press guide assembly 4 moves outward for filtration, the double-branch tooth plate 404 drives the one-way gear 502 to rotate forward, and the grinding balls on the surface of the grinding ball rod 501 contact and crush the filter residue, and then enter the interior of the sewage discharge chamber 110 after being crushed.

[0041] In this embodiment, it should be specifically explained that: when the filter press guide assembly 4 moves in the reverse direction, due to the one-way teeth between the grinding ball rod 501 and the one-way gear 502, the double-branch tooth plate 404 drives the rotation of the one-way gear 502 and cannot drive the grinding ball rod 501 to crush the filter residue again, thereby preventing the filter residue from reversely entering the interior of the arc pipe and forming accumulation, which affects the subsequent discharge problem. The crushed filter residue enters the sewage box 11 and waits for subsequent cleaning.

[0042] Reference Fig. 9 The displacement assembly 6 includes a square inclined plate 601, the top of the square inclined plate 601 is fixedly connected to a displacement round rod 603, and the side of the square inclined plate 601 is fixedly connected to a positioning side rod 602. A displacement sensor is installed on the side of the positioning side rod 602 inside the displacement groove 105. The displacement sensor is used to detect the height information of the positioning side rod 602, and the height information controls the opening and closing of the bottom arc plate. When the filter plate 403 moves to the outermost side, the displacement assembly 6 reaches the top of the displacement groove 105. At this time, the displacement sensor determines that the filtration inside the filter press chamber 104 is completed and opens the bottom arc plate. When the filter press guide assembly 4 moves in the opposite direction to the middle position, the square inclined plate 601 moves to the lowest point under the action of the third spring 604, and the square inclined plate 601 pushes the filter residue inside the filter press chamber 104 into the arc-shaped pipe on the side of the crushing groove 107. At this time, the displacement sensor determines that the discharge is completed and closes the bottom arc plate.

[0043] In this embodiment, it should be specifically explained that the opening and closing of the bottom arc plate is related to the internal conditions of the filter press chamber 104. Since the oblique flow slot 103 is opened at the left side of the top of the filter press chamber 104, during the filter press process, the filter press plate 403 gradually blocks the channel of the oblique flow slot 103 in the first half of its outward movement, and completes the filter press process in the second half. At the same time, after the filter press is completed, the inclined surface at the bottom of the square oblique plate 601 is used to push the displacement assembly 6 up, and the bottom arc plate is controlled to open and close while cleaning the filter residue accumulated inside. At the end, correspondingly, in order to avoid direct connection between the oblique flow slot 103 and the bottom arc-shaped pipe, the square oblique plate 601 controls the bottom arc plate to be closed when the cleaning is completed and reaches the lowest point and the filter press plate 403 reaches the middle position.

[0044] Reference Fig.10 The mixing assembly 7 includes a pushing rod 702, and both ends of the pushing rod 702 are fixedly connected with an inclined arc plate 701 and a pushing plate 703. The pushing plate 703 is installed inside the one-way chamber 108. A second spring 10 is installed on the outside of the pushing rod 702. When the inclined arc plate 701 is pushed by the ball of the centrifugal pressure plate 304, the inclined arc plate 701 moves outward, and the pushing plate 703 compresses the internal liquid of the one-way chamber 108 so that the internal liquid of the one-way chamber 108 enters the mixing tube groove 109 through the bottom one-way valve. At this time, the two liquids inside the mixing tube groove 109 are mixed. When the ball is separated from the inclined arc plate 701, the second spring 10 sleeved on the pushing rod 702 drives the pushing plate 703 to move to generate negative pressure inside the one-way chamber 108. Since a one-way valve is installed at the bottom of the one-way chamber 108, the negative pressure absorbs the high-concentration acid solution in the strong acid chamber 111 through the liquid suction tube 8.

[0045] In this embodiment, it is necessary to specifically explain that: the arc structure of the inclined arc plate 701 enables the ball of the centrifugal pressure plate 304 to contact the arc surface within the moving range and push the mixing component 7, and the pushing distance is related to the contact point of the ball. When the transmission motor 2 is in the low speed state, the moving distance of the mixing component 7 pushed by the ball is shorter, so that for each rotation of the rotating component 3, less high-concentration acid liquid is added to the mixing tube groove 109 in a single frequency, and the acidity increase is lower. Correspondingly, when the transmission motor 2 is in the high speed state, the centrifugal force of the rotating component 3 is increased, and the moving distance of the mixing component 7 pushed by the ball is longer, thereby achieving a larger addition amount of high-concentration acid liquid to the mixing tube groove 109 in a single frequency.

[0046] Working principle of the present invention:

[0047] The main problem solved by this embodiment is: using the size of the electrical signal generated during acidity detection to control the rotation rate of the transmission motor 2 and convert it into centrifugal force to control the rate of mixing with the high-concentration acid liquid, so as to achieve a constant ratio, so that the etching process always maintains a stable acidity value, and at the same time controls the mixing amount each time so that the mixed liquid always maintains a high acidity standard, thereby solving the problem that the acidity value in the current etching process is constantly changing but cannot be effectively and accurately processed.

[0048] The specific steps are as follows:

[0049] The regulating device is installed at the bottom of the etching tank 102 or the etching process is directly performed inside the etching tank 102. After etching, the acidity of the acid solution is reduced and there is etching inside. As the debris enters the filter press chamber 104 along with the acid solution, the transmission motor 2 is started, and the transmission motor 2 drives the rotating component 3 to rotate. Since the outer edge of the rotating component 3 is equipped with a cam structure and contacts with the cam rod 401, the cam rod 401 moves outward under the action of the rotating component 3, so that the filter press plate 403 filters the acid solution inside the filter press chamber 104, and the filtered liquid passes through the filter press. The middle through hole of the rod 402 enters the top of the detection chamber 302. Since a double magnetic ring coil is installed inside the detection chamber 302 as a detection probe, when the acid flows through, the detection probe generates a corresponding conductivity signal according to the acidity of the hydrochloric acid in the etching solution flowing through, and then calculates the acidity of the hydrochloric acid in the etching solution through the conductivity signal. At this time, the decrease value of the acidity is the first control information. The detected acid enters the low-acid chamber 112 through the acid outlet 306 and the mixing tube tank 109. The acid in the low-acid chamber 112 flows back to the etching tank 102 through the pump body installed on the reflux pipe 12 to wait for reuse;

[0050] The first control information is transmitted to the transmission motor 2 to control the increase of the rotation speed of the transmission motor 2. When the rotation speed of the rotating body 301 increases, the rotational centrifugal force of the centrifugal pressure plate 304 at the bottom of the rotating body 301 increases, so that the centrifugal pressure plate 304 gradually moves outward and maintains the diameter position balance. Since the inclined arc plate 701 is installed on the outside of the sphere at the bottom of the centrifugal pressure plate 304, the outward movement of the centrifugal pressure plate 304 makes the sphere contact with the inclined arc plate 701 and pushes the inclined arc plate 701 to move outward. At this time, the push plate 703 compresses the internal liquid of the one-way cavity 108 so that the internal liquid of the one-way cavity 108 enters the mixing tube groove 109 through the bottom one-way valve. When the sphere is separated from the inclined arc plate 701, The second spring 10 sleeved on the pushing rod 702 drives the pushing plate 703 to move to generate negative pressure inside the one-way chamber 108. Since a one-way valve is installed at the bottom of the one-way chamber 108, the negative pressure absorbs the high-concentration acid liquid in the strong acid chamber 111 through the suction tube 8 and enters the one-way chamber 108. When the acidity value in the detection chamber 302 decreases again, the rotating body 301 increases the centrifugal force of the centrifugal pressure plate 304, and the increase in its diameter increases the moving distance of the mixing component 7. Therefore, in a unit frequency, the amount of high-concentration acid liquid inside the one-way chamber 108 that enters the mixing tube groove 109 and mixes with it increases, and the acidity rises faster, so that the acidity value of the acid liquid entering the low-acid chamber 112 is constant.

[0051] Secondly, it also solves the problem of impurity particles in the acid being difficult to clean;

[0052] After the acid liquid is filtered inside the filter press chamber 104, the filter press plate 403 moves to the outermost side, pushing the displacement assembly 6 to rise. Since a displacement sensor is installed on the side of the positioning side rod 602, the filter press is judged to be completed when the displacement assembly 6 reaches the top, and the bottom arc plate is opened to connect the filter press chamber 104 with the crushing tank 107. At this time, the filter press guide assembly 4 starts to move in the opposite direction. The displacement assembly 6 starts to descend after losing the effect of the filter press plate 403, pushing the filter residue adhered to the surface of the filter press chamber 104 into the crushing tank 107. When the filter press guide assembly 4 reaches the middle position, the displacement assembly 6 descends to the lowest point under the action of the third spring 604, and the displacement sensor controls the bottom arc plate to close, so as to prevent the liquid from directly entering the crushing tank 107 when the oblique flow slot 103 is opened in the second half of the movement of the filter press guide assembly 4;

[0053] The filter residue entering the crushing groove 107 contacts with the grinding ball rod 501. When the filter press guide assembly 4 moves, the tooth grooves on the double-branch tooth plate 404 drive the one-way gear 502 to rotate. When the filter press guide assembly 4 moves outward, the one-way gear 502 rotates forward, and the grinding ball rod 501 contacts and crushes the filter residue, and after crushing it, it enters the sewage discharge chamber 110. When the filter press guide assembly 4 moves in the opposite direction, due to the one-way teeth between the grinding ball rod 501 and the one-way gear 502, the rotation of the one-way gear 502 cannot drive the grinding ball rod 501 to crush the filter residue, thereby preventing it from accumulating in large quantities in the arc-shaped pipe on the side of the crushing groove 107. The crushed filter residue enters the sewage discharge box 11 and waits for subsequent cleaning.

[0054] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A device for controlling the acidity of etching liquid during etching of an RFID antenna, comprising a control housing (1), characterized in that: The control housing (1) comprises a housing body (101); an etching groove (102) is provided on the top of the housing body (101); a filter press chamber (104) is provided on the side of the bottom of the etching groove (102); a filter press guide assembly (4) is installed inside the filter press chamber (104); an oblique flow groove (103) and a displacement groove (105) are provided on the top of the filter press chamber (104); a displacement assembly (6) is installed inside the displacement groove (105); the filter press chamber (104) is connected to the etching groove (102) via the oblique flow groove (103); the side of the filter press chamber (104) is connected to the crushing groove (107) via an arc-shaped pipe groove; a grinding assembly (5) is installed inside the crushing groove (107); a rotating chamber (106) is provided inside the housing body (101); a rotating assembly (3) is installed inside the rotating chamber (106); a transmission motor (2) is installed at the bottom of the rotating assembly (3). The side of the bottom of the rotating chamber (106) is provided with a one-way chamber (108) and a mixing tube groove (109); a liquid suction tube (8) is installed on the top of the mixing tube groove (109); the other end of the liquid suction tube (8) is installed at the bottom of the strong acid chamber (111); a mixing assembly (7) is installed inside the one-way chamber (108); the bottom of the shell body (101) is provided with a strong acid chamber (111) and a low acid chamber (112); the strong acid chamber (111) is filled with high-concentration acid solution; the front of the strong acid chamber (111) is provided with a water inlet (13); the low acid chamber (112) is filled with process standard acid solution; the front of the low acid chamber (112) is provided with a reflux pipe (12); the other end of the reflux pipe (12) is connected to the etching groove (102); the side of the shell body (101) is provided with a sewage chamber (110); the sewage chamber (110) is provided with a sewage box (111); The rotating assembly (3) comprises a rotating body (301), the outer surface of the rotating body (301) is fixedly connected to a plurality of cams, the top of the rotating body (301) is provided with a detection cavity (302), the detection cavity (302) is communicated with an acid outlet (306) at the bottom, the bottom of the rotating body (301) is provided with a centrifugal cavity (303), the interior of the centrifugal cavity (303) is fixedly connected to a sliding rod, the sliding rod is sleeved with a centrifugal pressure plate (304) and a centrifugal spring (305), the centrifugal pressure plate (304) is composed of a slider and a sphere, and the horizontal installation height of the sphere is the same as that of the inclined arc plate (701).

2. The device for controlling the acidity of etching liquid during etching of an RFID antenna according to claim 1, characterized in that: An acidity detection sensor is installed inside the detection chamber (302). The acidity detection sensor uses a double magnetic ring coil as a detection probe installed inside the detection chamber (302). When acid flows through, the detection probe generates a corresponding conductivity signal according to the acidity of the hydrochloric acid in the etching solution flowing through. The acidity of the hydrochloric acid in the etching solution is then calculated using the conductivity signal. The decrease in the acidity is used as first control information. The first control information controls the rotation rate of the transmission motor (2).

3. The device for controlling the acidity of etching liquid during etching of an RFID antenna according to claim 1, characterized in that: The filter press guide assembly (4) comprises a cam rod (401), the top of the cam rod (401) is fixedly connected to a filter press rod (402), a through hole is provided inside the filter press rod (402), a filter press plate (403) is fixedly connected to the side of the filter press rod (402), a filter press plate (403) is provided on the surface of the filter press plate (403), a double-branch tooth plate (404) is fixedly connected to the side of the cam rod (401), a tooth groove is provided on the double-branch tooth plate (404), the tooth groove is meshed with the one-way gear (502), and a first spring (9) is sleeved on the outer side of the filter press rod (402).

4. The device for controlling the acidity of etching liquid during etching of an RFID antenna according to claim 1, characterized in that: The grinding assembly (5) comprises a grinding ball rod (501), one-way gears (502) are sleeved at both ends of the grinding ball rod (501), one-way teeth are installed between the grinding ball rod (501) and the one-way gear (502), and grinding balls are installed on the surface of the grinding ball rod (501).

5. The device for controlling the acidity of etching liquid during etching of an RFID antenna according to claim 1, characterized in that: The displacement assembly (6) comprises a square inclined plate (601), the top of the square inclined plate (601) is fixedly connected to a displacement round rod (603), the side of the square inclined plate (601) is fixedly connected to a positioning side rod (602), and a displacement sensor is installed inside the displacement groove (105) on the side of the positioning side rod (602), and the displacement sensor is used to detect height information of the positioning side rod (602), and the height information controls the opening and closing of the bottom arc plate.

6. The device for controlling the acidity of etching liquid during etching of an RFID antenna according to claim 1, characterized in that: The mixing assembly (7) comprises a pushing rod (702), with an inclined arc plate (701) and a pushing plate (703) fixedly connected at both ends of the pushing rod (702), the pushing plate (703) being installed inside the one-way cavity (108), and a second spring (10) being installed outside the pushing rod (702).

7. The device for controlling the acidity of etching liquid during etching of an RFID antenna according to claim 1, characterized in that: A control unit and a pressure sensor are installed inside the slider of the centrifugal pressure plate (304), and the control unit is composed of a controller and a clamping claw.

8. The device for controlling the acidity of etching liquid during etching of an RFID antenna according to claim 1, characterized in that: A bottom arc plate is installed at the bottom of the filter press chamber (104), and a one-way valve is installed at the bottom of the one-way chamber (108).

Images