Secondary feeding device, secondary feeding system and secondary feeding method

Abstract

The invention relates to a secondary feeding device, a secondary feeding system and a secondary feeding method, and the secondary feeding device comprises a feeding cylinder which is provided with a first end and a second end which are oppositely arranged in the length direction of the feeding cylinder; the lifting rod is arranged in the feeding cylinder in a penetrating manner and can move in the axial direction of the feeding cylinder; the quartz cone is connected to one end of the lifting rod and can be driven by the lifting rod to block or open the second end; the feeding cylinder is sleeved with a protective sleeve, the protective sleeve is located at the second end, and the area of the opening, close to the first end, of the protective sleeve is larger than that of the opening, away from the first end, of the protective sleeve. And by arranging the protective sleeve, the silicon melt is effectively prevented from splashing to damage the charging barrel, and the service life of the charging barrel is prolonged.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor product manufacturing, and in particular to a secondary feeding device, a secondary feeding system and a secondary feeding method. Background Art

[0002] In the current industrialized monocrystalline silicon production field, the most important thing is the amount of raw materials in the production process, which is related to how much can be produced. The most important step of raw materials is to melt the raw materials into silicon liquid at high temperature, but due to the gaps between the silicon materials, the loading amount can never be maximized, so the secondary feeding technology is born. The tool for secondary feeding: the secondary feeding tube is also born.

[0003] However, during the secondary feeding process, since the feeding tube needs to go deep into the crucible to feed, it is inevitable that the melted silicon material will splash on the outside of the secondary feeding tube and onto the feeding tube. As time goes by, the silicon material cools and condenses on the feeding tube, and continues to increase until solid splashes are formed and part of the feeding tube falls off, which not only greatly damages the life of the secondary feeding tube, but also brings a large amount of impurities to the production of single crystal silicon, affecting the production of single crystal silicon. Moreover, as the strength of the molybdenum rod is reduced, once the molybdenum rod breaks, the quartz cone and the molybdenum rod will fall into the crucible, causing silicon liquid leakage in the crucible, leading to serious production accidents.

[0004] The feeding tube currently in use is composed of a vertical feeding tube, a load-bearing molybdenum rod and a bottom quartz cone. The rise and fall of the feeding and feeding tube are controlled by raising and lowering the molybdenum rod and connecting the quartz cone through the molybdenum rod.

[0005] However, the current feeding tubes are completely unable to prevent splashing silicon materials, resulting in a short service life of the current feeding tubes and introducing a large amount of impurities into the production, which is particularly detrimental to the production of single crystal silicon. Summary of the invention

[0006] In order to solve the above technical problems, the present invention provides a secondary feeding device, a secondary feeding system and a secondary feeding method to solve the problem that the silicon material splashed during the feeding process affects the life of the feeding tube.

[0007] In order to achieve the above object, the technical solution adopted in the embodiment of the present invention is: a secondary feeding device, comprising:

[0008] A feeding cylinder, the feeding cylinder having a first end and a second end oppositely disposed along a length direction thereof;

[0009] A lifting rod, which is inserted into the feeding barrel and is movable along the axial direction of the feeding barrel;

[0010] A quartz cone, the quartz cone is connected to one end of the lifting rod and can block or open the second end under the drive of the lifting rod;

[0011] The outer sleeve of the feeding cylinder is provided with a protective sleeve, the protective sleeve is located at the second end, and the area of ​​the opening of the protective sleeve close to the first end is larger than the area of ​​the opening of the protective sleeve away from the first end.

[0012] Optionally, the protective sleeve and the feeding barrel are tightly connected by interference fit.

[0013] Optionally, a first stopper is provided on the inner wall of the feeding cylinder;

[0014] The lifting rod comprises a sleeved inner rod and an outer rod;

[0015] One end of the outer rod is connected to the quartz cone, and a clamping block is provided on the outer wall of the outer rod, and the clamping block is configured to cooperate with the first stopper to stop the outer rod and the quartz cone from moving;

[0016] A shielding member is disposed at one end of the inner rod, and the shielding member can be received in the quartz cone or at least partially moved out of the quartz cone under the drive of the inner rod.

[0017] Optionally, the shielding member includes a plurality of shielding strips arranged around the end of one end of the inner rod, one end of the shielding strip is pivotally connected to the inner rod, and the other end of the shielding strip is slidably connected to the quartz cone.

[0018] Optionally, a slider arranged one-to-one corresponding to the plurality of shielding strips is provided on the inner wall of the quartz cone, and each shielding strip is provided with a slide groove cooperating with the corresponding slider, and an extension direction of the slide groove is parallel to an extension direction of the corresponding shielding strip.

[0019] Optionally, the length of the slide groove is smaller than the length of the shielding strip in the extension direction.

[0020] Optionally, a convex ring is provided on the outer wall of the feeding cylinder.

[0021] Optionally, the secondary feeding device further comprises a lifting structure, and the lifting structure is used to be connected to the inner rod to control the movement of the inner rod.

[0022] An embodiment of the present invention also provides a secondary feeding system, including a single crystal furnace and the above-mentioned secondary feeding device, wherein the single crystal furnace includes a furnace body, the furnace body includes a main furnace chamber and an auxiliary furnace chamber, and the inner wall of the auxiliary furnace chamber is provided with a second stopper that cooperates with the convex ring on the outer wall of the feeding barrel.

[0023] The embodiment of the present invention further provides a secondary feeding method, which is applied to the above-mentioned secondary feeding system, comprising:

[0024] Controlling the feeding cylinder loaded with silicon material to enter the single crystal furnace until the convex ring on the feeding cylinder contacts the second stopper in the auxiliary furnace chamber;

[0025] The quartz cone is controlled to separate from the feeding cylinder so that the silicon material falls.

[0026] The beneficial effect of the present invention is that by providing the protective sleeve, the silicon melt is effectively prevented from splashing to damage the feeding barrel, thereby extending the service life of the feeding barrel. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A schematic diagram showing a charging cylinder in an embodiment of the present invention;

[0028] Figure 2 A schematic diagram showing a lifting rod in an embodiment of the present invention;

[0029] Figure 3 A schematic diagram showing a secondary feeding device in an embodiment of the present invention;

[0030] Figure 4 A schematic diagram showing a secondary feeding device in an embodiment of the present invention;

[0031] Figure 5 A schematic diagram showing a secondary feeding device in an embodiment of the present invention;

[0032] Figure 6 A schematic diagram showing a shielding member in an embodiment of the present invention. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0034] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0035] The features such as "parallel", "perpendicular", and "same" used in the embodiments of the present disclosure include the features such as "parallel", "perpendicular", and "same" in a strict sense, as well as the cases where "approximately parallel", "approximately perpendicular", "approximately the same", etc. include certain tolerances, taking into account the tolerances associated with the measurement of specific quantities (e.g., the limitations of the measurement system), and represent the acceptable deviation range for a specific value determined by ordinary technicians in the field. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0036] In addition, in this document, unless otherwise defined, the terms "substantially", "substantially", "approximately" and "about" are used to describe and explain small changes. When used with an event or situation, these terms can cover situations where the event or situation occurs exactly, and can also cover situations where the event or situation occurs approximately. For example, when used with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being arranged along the same plane in the micrometer range, for example, arranged along the same plane within 40μm, 30μm, 20μm, 10μm or 1μm.

[0037] In the semiconductor field, during the process of pulling silicon single crystal rods, initial loading is required, and large and small silicon materials are loaded into the quartz crucible. The weight of the initial loading is not enough to pull the required length of the silicon rod, so the initial silicon material needs to be melted to reduce the space and then secondary loading is performed to reach the weight corresponding to the required length of the crystal rod for crystal pulling. During the secondary loading, the secondary feeding tube loaded with silicon material is hoisted into the auxiliary furnace chamber as a whole by the traction device. After the hoisting is completed, the block is pushed out, the auxiliary furnace chamber is closed and the isolation valve is opened. During the secondary loading, the secondary feeding tube is lowered as a whole. When it drops to a certain height, the block of the auxiliary furnace chamber will jam the feeding tube baffle ring to separate the quartz cone from the secondary feeding tube, and then the silicon material slides from around the quartz cone into the silicon solution.

[0038] However, the current feeding tube is easy to break. Factors that cause the feeding tube to break include high temperature, silicone liquid splashing and scalding. Practice shows that after a certain number of uses, the bottom of the feeding tube is stained with a lot of silicone material. The high-temperature silicone material will burn the surface and leave many pits. These pits will form stress concentration points. When the external pressure is less than the material pressure limit, it is easy to burst and cause serious accidents. Silicon liquid splashing will inevitably reduce the service life of the feeding tube. At that time, the entire tube needs to be replaced, which is not conducive to reducing costs.

[0039] refer to Figure 1-Figure 6 In view of the above problems, this embodiment provides a secondary feeding device, including:

[0040] A feeding cylinder 1, wherein the feeding cylinder 1 has a first end and a second end disposed opposite to each other along a length direction thereof;

[0041] A lifting rod 3, wherein the lifting rod 3 is inserted into the feeding barrel 1 and is movable along the axial direction of the feeding barrel 1;

[0042] A quartz cone 4, which is connected to one end of the lifting rod 3 and can block or open the second end driven by the lifting rod 3;

[0043] The outer sleeve of the feeding cylinder 1 is provided with a protective sleeve 2, the protective sleeve 2 is located at the second end, and the opening area of ​​the protective sleeve 2 close to the first end is larger than the opening area of ​​the protective sleeve 2 away from the first end.

[0044] The protection sleeve 2 protects the feeding barrel 1, preventing the silicon melt from splashing onto the feeding barrel 1, thereby extending the service life of the feeding barrel 1. Furthermore, the feeding barrel 1 is prevented from breaking and falling into the silicon melt, thereby reducing impurities in the silicon melt and ensuring product quality.

[0045] The area of ​​the opening of the protective sleeve 2 close to the first end is larger than the area of ​​the opening of the protective sleeve 2 away from the first end. That is, the protective sleeve 2 adopts a structure of being larger at the top and smaller at the bottom, which effectively protects the feeding barrel 1.

[0046] In an exemplary embodiment, the protective sleeve 2 is tightly connected to the feeding cylinder 1 by means of interference fit.

[0047] In an exemplary embodiment, the shape of the opening of the protective sleeve 2 away from the first end matches the shape of the second end of the feeding barrel 1. For example, the feeding barrel 1 is cylindrical, and the opening of the protective sleeve 2 away from the first end is circular.

[0048] In some embodiments, the diameter of the opening of the protective sleeve 2 away from the first end can be the same as the outer diameter of the feeding barrel 1 (the feeding barrel 1 is a straight cylindrical structure, and the diameter (including the outer diameter and the inner diameter) of the feeding barrel 1 remains unchanged from the first end to the second end). In this way, during assembly, the first end of the feeding barrel 1 can be inserted into the protective sleeve 2, and then the protective sleeve 2 can be moved from the first end to the second end.

[0049] The above method is adopted to facilitate the disassembly of the protective sleeve 2. It should be noted that the protective sleeve 2 and the charging barrel 1 can be connected in other detachable ways, for example, the protective sleeve 2 and the charging barrel 1 can be connected in a snap-fit ​​manner:

[0050] In some embodiments, a protrusion is provided on the inner wall of the protective sleeve 2, and a groove matching the protrusion is provided on the outer wall of the feeding barrel 1. Of course, a groove may be provided on the inner wall of the protective sleeve 2, and a protrusion matching the groove may be provided on the outer wall of the feeding barrel 1.

[0051] Exemplarily, the protrusion may be formed by partially concavely forming a side wall of the protective sleeve 2 .

[0052] Exemplarily, in the axial direction of the feeding barrel 1, the opposite sides of the protrusion have a first side surface and a second side surface, and at least one of the first side surface and the second side surface is inclined to form a guide surface to facilitate assembly and disassembly between the protective sleeve 2 and the feeding barrel 1.

[0053] In some embodiments, an elastic connecting arm is provided on the inner wall of the protective sleeve 2, the opening of the protective sleeve 2 close to the first end is the first opening, the elastic connecting arm is a strip structure, and the extension direction of the elastic connecting arm is parallel to the axial direction of the feeding barrel 1, one end of the elastic connecting arm close to the first opening is fixed to the protective sleeve 2, and the other end of the elastic connecting arm is a free end, and a snap-in groove matching with the elastic connecting arm is provided on the outer wall of the feeding barrel 1. During assembly, the protective sleeve 2 can be inserted into the feeding barrel 1 from the second end, and as the protective sleeve 2 moves, the elastic connecting arm is elastically deformed under pressure until the free end of the elastic connecting arm is snapped into the snap-in groove, thereby achieving the connection between the protective sleeve 2 and the feeding barrel 1 and preventing the protective sleeve 2 from falling. When disassembly is required, the protective sleeve 2 only needs to be moved in the direction close to the first end to make the protective sleeve 2 detach from the feeding barrel 1 from the first end.

[0054] In an exemplary embodiment, the feeding cylinder 1 is made of quartz material, and the protective sleeve 2 is made of quartz material.

[0055] In an exemplary embodiment, the protective sleeve 2 is in the shape of an inverted cone, and the area of ​​the opening of the protective sleeve 2 close to the first end can be set according to actual needs. For example, the area of ​​the opening of the protective sleeve 2 close to the first end can be twice the radial cross-sectional area of ​​the feeding barrel 1, but it is not limited to this.

[0056] In an exemplary embodiment, in the axial direction of the feeding barrel 1, the length of the protective sleeve 2 can be set according to actual needs. For example, in the axial direction of the feeding barrel 1, the length of the protective sleeve 2 is greater than 1 / 4 of the length of the feeding barrel 1, but it is not limited to this.

[0057] In an exemplary embodiment, the protective sleeve 2 includes a plurality of protective tubes 21, each of which can be removed separately. In this way, there is no need to replace the protective sleeve 2 as a whole, and only the outermost protective tube 21 in the protective sleeve 2 needs to be removed, which is convenient and quick. Figure 1 In some embodiments, the protective sleeve 2 includes two protective tubes 21 that are sleeved together, but this is not limited to this. The number of protective tubes 21 included in the protective sleeve 2 can be set according to actual needs.

[0058] It should be noted that there can be various connection methods between the multiple protective tubes 21. For example, the protective sleeve 2 includes a first protective tube and a second protective tube that are adjacently arranged, and a protrusion is provided on the inner wall of the first protective tube, and a groove matching the protrusion is provided on the outer wall of the second protective tube, or a groove is provided on the inner wall of the first protective tube, and a protrusion matching the groove is provided on the outer wall of the second protective tube.

[0059] In an exemplary embodiment, a first stopper 11 is provided on the inner wall of the feeding cylinder 1;

[0060] The lifting rod 3 includes an inner rod 32 and an outer rod 31 which are sleeved;

[0061] One end of the outer rod 31 is connected to the quartz cone 4, and a clamping block 311 is provided on the outer wall of the outer rod 31, and the clamping block 311 is configured to cooperate with the first stopper 11 to stop the outer rod 31 and the quartz cone 4 from moving;

[0062] A shielding member 5 is disposed at one end of the inner rod 32 . Driven by the inner rod 32 , the shielding member 5 can be received in the quartz cone 4 or at least partially moved out of the quartz cone 4 .

[0063] Figure 3 Schematic diagram showing that the quartz cone is not separated from the feeding cylinder. Figure 4 Schematic diagram showing the separation of the quartz cone from the charging barrel. Figure 5 Schematic diagram showing that part of the shielding member is moved out of the quartz cone.

[0064] The secondary feeding system includes the secondary feeding device described in this embodiment, and also includes a single crystal furnace, the single crystal furnace includes a furnace body, the furnace body includes a main furnace chamber and an auxiliary furnace chamber, a second stopper is provided on the outer wall of the feeding tube 1, and a convex ring 12 that matches the second stopper is provided on the inner wall of the auxiliary furnace chamber. When performing secondary feeding, the feeding tube 1 loaded with silicon material enters the furnace chamber of the single crystal furnace, and the feeding tube 1 is controlled to descend (move in the direction close to the crucible) until the second stopper contacts the convex ring 12, and the feeding tube 1 stops moving, and then the lifting rod 3 is controlled to continue to descend until the first stopper 11 contacts the clamping block 311, at which time the outer rod 31 of the lifting rod 3 stops moving, and the quartz cone 4 extends out of the feeding tube 1, and the second end of the feeding tube 1 is opened, so that the silicon material in the feeding tube 1 falls into the crucible in the furnace body. Then, the inner rod 32 is controlled to continue to descend, so that at least a portion of the shielding member 5 connected to one end of the inner rod 32 is exposed outside the quartz cone 4, thereby protecting the quartz cone 4 and the feeding tube 1 and shielding splashing silicon material or silicon melt.

[0065] It should be noted that at least a portion of the shielding member 5 extends out of the quartz cone 4 as the inner rod 32 moves, and the area of ​​the positive projection of the quartz cone 4 on the shielding member 5 is located inside the shielding member 5, that is, the shielding member 5 can completely shield the quartz cone 4, effectively shielding the splashing silicon material or silicon melt, so as to protect the quartz cone 4 and the feeding barrel 1.

[0066] refer to Figure 6 In an exemplary embodiment, the shielding member 5 includes a plurality of shielding strips 51 arranged around the end of one end of the inner rod 32, one end of the shielding strip 51 is pivotally connected to the inner rod 32, and the other end of the shielding strip 51 is slidably connected to the quartz cone 4.

[0067] It should be noted that the end of the inner rod 32 connected to the shielding strip 51 is the connecting end, and one end of the shielding strip 51 is pivotally connected to the inner rod 32, so that the shielding strip 51 can rotate around the end of the connecting end of the inner rod 32, so that the shielding strip 51 can be stored in the quartz cone 4 as the inner rod 32 moves up and down, or at least partially extend out of the quartz cone 4.

[0068] In an exemplary embodiment, a slider 6 is provided on the inner wall of the quartz cone 4 and is arranged one-to-one corresponding to the multiple shielding strips 51. Each shielding strip 51 is provided with a slide groove that cooperates with the corresponding slider 6, and the extension direction of the slide groove is parallel to the extension direction of the corresponding shielding strip 51.

[0069] The arrangement of the slide groove and the slider 6 allows the shielding strip 51 to partially slide outside the quartz cone 4, and when the slider 6 moves to one end of the slide groove close to the inner rod 32, the inner rod 32 continues to move, and the shielding strip 51 rotates around the connecting end of the inner rod 32, thereby increasing the angle between the shielding strip 51 and the inner rod 32 and increasing the overall shielding area of ​​the shielding member 5.

[0070] In an exemplary embodiment, the length of the slide groove is smaller than the length of the shielding strip 51 in the extension direction.

[0071] Exemplarily, the inner rod 32 is located at the center of the quartz cone 4 . To facilitate the movement of the shielding strip 51 , the slider 6 is disposed at an end of the quartz cone 4 away from the feeding barrel 1 .

[0072] In an exemplary embodiment, the number of the shielding strips 51 can be set according to actual needs. The more the shielding strips 51, the larger the shielding area of ​​the shielding member 5. In some embodiments, in order to increase the setting space of the shielding strips 51, in the direction of the outer peripheral surface of the inner rod 32, at least one side surface of the end of the shielding strip 51 connected to the inner rod 32 is wedge-shaped to reduce the space occupied by the end of the shielding strip 51 connected to the inner rod 32, thereby increasing the number of shielding strips 51 connected to the inner rod 32.

[0073] In an exemplary embodiment, the width of the shielding strip 51 (i.e., the width in a direction perpendicular to the extension direction of the shielding strip 51, which can also be considered as the width in the direction of the outer peripheral surface of the inner rod 32) gradually increases along the direction away from the inner rod 32.

[0074] In an exemplary embodiment, in order to facilitate the connection between the outer rod 31 and the charging barrel 1 , at least one of the clamping block 311 and the first stopper 11 is an annular structure.

[0075] In an exemplary embodiment, a convex ring 12 is provided on the outer wall of the feeding barrel 1. A second stopper matched with the convex ring 12 is provided on the inner wall of the furnace chamber of the single crystal furnace. When feeding, the feeding barrel 1 is controlled to move until the second stopper contacts the convex ring 12, the feeding barrel 1 stops moving, and then the lifting rod 3 is controlled to continue moving, so that the quartz cone 4 connected to the lifting rod 3 can be separated from the feeding barrel 1, and then the silicon material loaded in the feeding barrel 1 falls into the crucible in the furnace chamber of the single crystal furnace, so as to realize secondary feeding.

[0076] In an exemplary embodiment, the secondary feeding device also includes a lifting structure, which is connected to the lifting rod 3. Under the control of the lifting structure, the feeding barrel 1 can be driven to enter the furnace chamber of the single crystal furnace. After the convex ring 12 of the feeding barrel 1 contacts the second stopper in the furnace chamber, the lifting rod 3 is controlled to continue to move downward so that the quartz cone 4 connected to the lifting rod 3 is separated from the feeding barrel 1, so that the silicon material loaded in the feeding barrel 1 falls into the crucible below the feeding barrel 1 for secondary feeding.

[0077] In the embodiment where the lifting rod 3 includes an inner rod 32 and an outer rod 31 , the secondary feeding device further includes a lifting structure, and the lifting structure is used to be connected to the inner rod 32 to control the movement of the inner rod 32 .

[0078] When the above scheme is adopted for secondary feeding, under the control of the lifting structure, the feeding barrel 1 and the outer rod 31 can be driven together to enter the furnace chamber of the single crystal furnace. After the convex ring 12 of the feeding barrel 1 contacts the second stopper in the furnace chamber, the feeding barrel 1 stops moving, and the lifting rod 3 is controlled to continue to move downward as a whole, so that the quartz cone 4 connected to the outer rod 31 is separated from the feeding barrel 1, so that the silicon material loaded in the feeding barrel 1 falls into the crucible below the feeding barrel 1 for secondary feeding. Then, under the control of the lifting structure, the inner rod 32 is continued to be controlled to move downward, so that the shielding member 5 connected to the inner rod 32 can be extended to the outside of the quartz cone 4 to shield the splashing silicon material or silicon melt, thereby protecting the quartz cone 4 and the feeding barrel 1.

[0079] Furthermore, under the dual protective effects of the shielding member 5 and the protective sleeve 2 , the damage to the feeding barrel 1 by the silicon material or silicon melt can be effectively prevented, thereby extending the service life of the feeding barrel 1 .

[0080] An embodiment of the present invention also provides a secondary feeding system, including a single crystal furnace and the above-mentioned secondary feeding device, wherein the single crystal furnace includes a furnace body, the furnace body includes a main furnace chamber and an auxiliary furnace chamber, and the inner wall of the auxiliary furnace chamber is provided with a second stopper that cooperates with the convex ring 12 on the outer wall of the feeding barrel 1.

[0081] Under the action of the convex ring 12 and the second stopper, the feeding barrel 1 stops moving, and the lifting rod 3 continues to move downward, so that the quartz cone 4 connected to the lifting rod 3 can move downward accordingly to separate from the feeding barrel 1, so that the silicon material loaded in the feeding barrel 1 can fall into the crucible below the feeding barrel 1 to achieve secondary feeding.

[0082] The embodiment of the present invention further provides a secondary feeding method, which is applied to the above-mentioned secondary feeding system, comprising:

[0083] Controlling the feeding cylinder loaded with silicon material to enter the single crystal furnace until the convex ring on the feeding cylinder contacts the second stopper in the auxiliary furnace chamber;

[0084] The quartz cone is controlled to separate from the feeding cylinder so that the silicon material falls.

[0085] In some specific embodiments: a first stopper is provided on the inner wall of the feeding cylinder;

[0086] The lifting rod comprises a sleeved inner rod and an outer rod;

[0087] One end of the outer rod is connected to the quartz cone, and a clamping block is provided on the outer wall of the outer rod, and the clamping block is configured to cooperate with the first stopper to stop the outer rod and the quartz cone from moving;

[0088] A shielding member is provided at one end of the inner rod, and the shielding member can be received in the quartz cone or at least partially moved out of the quartz cone under the drive of the inner rod;

[0089] The secondary feeding method also includes:

[0090] The inner rod is controlled to continue to move so that at least a portion of the shielding member moves out of the quartz cone.

[0091] There are a few points to note:

[0092] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0093] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0094] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0095] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A secondary feeding device, characterized in that: include: A feeding cylinder, the feeding cylinder having a first end and a second end oppositely disposed along a length direction thereof; A lifting rod, which is inserted into the feeding barrel and is movable along the axial direction of the feeding barrel; A quartz cone, the quartz cone is connected to one end of the lifting rod and can block or open the second end under the drive of the lifting rod; The outer sleeve of the feeding cylinder is provided with a protective sleeve, the protective sleeve is located at the second end, and the area of ​​the opening of the protective sleeve close to the first end is larger than the area of ​​the opening of the protective sleeve away from the first end.

2. The secondary feeding device according to claim 1, characterized in that: The protective sleeve and the feeding cylinder are tightly connected by interference fit.

3. The secondary feeding device according to claim 1, characterized in that: A first stopper is provided on the inner wall of the feeding cylinder; The lifting rod comprises a sleeved inner rod and an outer rod; One end of the outer rod is connected to the quartz cone, and a clamping block is provided on the outer wall of the outer rod, and the clamping block is configured to cooperate with the first stopper to stop the outer rod and the quartz cone from moving; A shielding member is disposed at one end of the inner rod, and the shielding member can be received in the quartz cone or at least partially moved out of the quartz cone under the drive of the inner rod.

4. The secondary feeding device according to claim 3, characterized in that: The shielding member includes a plurality of shielding strips arranged around the end of one end of the inner rod, one end of the shielding strip is pivotally connected to the inner rod, and the other end of the shielding strip is slidably connected to the quartz cone.

5. The secondary feeding device according to claim 4, characterized in that: The inner wall of the quartz cone is provided with sliders corresponding to the plurality of shielding strips one by one, each shielding strip is provided with a slide groove matching the corresponding slider, and the extension direction of the slide groove is parallel to the extension direction of the corresponding shielding strip.

6. The secondary feeding device according to claim 5, characterized in that: The length of the slide groove is smaller than the length of the shielding strip in the extension direction.

7. The secondary feeding device according to claim 1, characterized in that: A convex ring is arranged on the outer wall of the feeding cylinder.

8. The secondary feeding device according to claim 3, characterized in that: It also includes a lifting structure, which is used to be connected with the inner rod to control the movement of the inner rod.

9. A secondary feeding system, characterized in that: It comprises a single crystal furnace and a secondary feeding device as described in any one of claims 1 to 8, wherein the single crystal furnace comprises a furnace body, the furnace body comprises a main furnace chamber and an auxiliary furnace chamber, and a second stopper is provided on the inner wall of the auxiliary furnace chamber to cooperate with the convex ring on the outer wall of the feeding barrel.

10. A secondary feeding method, characterized in that: The secondary feeding system as claimed in claim 9 comprises: Controlling the feeding cylinder loaded with silicon material to enter the single crystal furnace until the convex ring on the feeding cylinder contacts the second stopper in the auxiliary furnace chamber; The quartz cone is controlled to separate from the feeding cylinder so that the silicon material falls.

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