Method and device for measuring surface shape precision of hydrostatic guideway

Abstract

The invention discloses a method and a device for measuring the surface shape precision of a hydrostatic guideway. The method comprises the following steps: S1, controlling a hydrostatic slide block to move to a first end of a guideway main body; and S2, the static pressure sliding block is controlled to move by a preset distance along the second end close to the guide rail body, and the pressure value of each hydraulic cavity after movement is detected. S3, at the same moment, the pressure values of the opposite hydraulic cavities of the same guide rail face are compared pairwise, and if the pressure difference value between the two opposite hydraulic cavities of the same guide rail face exceeds a preset value, it is judged that the surface shape precision of the guide rail face does not meet the standard; if the pressure difference value between the two opposite hydraulic cavities of the same guide rail face does not exceed the preset value, the step S2 is executed again till the static pressure sliding block moves to the second end of the guide rail body, the surface shape precision of the guide rail face is judged to meet the standard, and the static pressure sliding block is controlled to stop moving. The problem that in the prior art, errors exist in the measured surface shape precision is solved.

Description

Technical Field

[0001] The present application relates to the technical field of precision machine tools, and in particular to a method and a device for measuring the surface accuracy of a hydrostatic guide rail. Background Art

[0002] Liquid hydrostatic guides are usually used in ultra-precision machine tools to improve the movement smoothness, wear resistance and load-bearing capacity of ultra-precision machine tools.

[0003] When using hydrostatic guide rails, it is usually necessary to measure the surface accuracy of the guide rail surface opposite to the slider to avoid the surface accuracy of the guide rail surface being too low, which will cause fluctuations in the oil outlet pressure of the hydraulic chamber on the hydrostatic guide rail, causing the workbench on the guide rail to become unstable during movement. An existing method for measuring the surface accuracy of the guide rail surface is to directly install an oil pressure sensor on the oil outlet of the hydraulic chamber, and judge whether the surface accuracy of the guide rail surface meets the requirements by the pressure of the oil in the hydraulic chamber.

[0004] However, due to the large size of the oil pressure sensor, when the size of the slider is small, when the through-hole oil pressure sensor measures the pressure of the oil in the hydraulic chamber, the oil pressure in the hydraulic chamber can only be tested by continuously removing and connecting the oil pressure sensor on each hydraulic chamber, and due to the influence of environmental factors, this measurement method has a large error. Summary of the invention

[0005] The main purpose of the present application is to provide a method and device for measuring the surface accuracy of a hydrostatic guide rail, so as to at least solve the problem of errors in the surface accuracy measured in the prior art.

[0006] According to one aspect of the present application, a method for measuring the surface accuracy of a hydrostatic guide rail is provided. The hydrostatic guide rail comprises a guide rail body and a hydrostatic slider. The hydrostatic slider is slidably arranged on the guide rail body. A plurality of hydraulic cavities arranged at intervals are provided on a surface of the hydrostatic slider opposite to the guide rail surface of the guide rail body. The method for measuring the surface accuracy of the hydrostatic guide rail comprises:

[0007] Step S1: controlling the static pressure slider to move to the first end of the guide rail body;

[0008] Step S2: controlling the static pressure slider to move a predetermined distance along the second end close to the guide rail body, and detecting the pressure value of each hydraulic chamber after the movement;

[0009] Step S3: At the same time, the pressure values ​​of the hydraulic chambers opposite to the same guide rail surface are compared in pairs. If the pressure difference between the two hydraulic chambers opposite to the same guide rail surface exceeds the preset value, it is judged that the surface accuracy of the guide rail surface does not meet the standard; if the pressure difference between the two hydraulic chambers opposite to the same guide rail surface does not exceed the preset value, step S2 is executed again until the static pressure slider moves to the second end of the guide rail body, and it is judged that the surface accuracy of the guide rail surface meets the standard, and the static pressure slider is controlled to stop moving.

[0010] Further, the step of determining that the surface accuracy of the guide rail surface does not meet the standard includes:

[0011] If the absolute difference in pressure between the two hydraulic chambers opposite to the same guide rail surface exceeds the first predetermined value, and the absolute difference does not exceed the second predetermined value, it is judged that the surface roughness of the guide rail surface meets the standard, and the surface flatness of the guide rail surface does not meet the standard;

[0012] If the absolute difference in pressure between the two hydraulic chambers opposite to the same guide rail surface exceeds a second predetermined value, it is determined that both the surface roughness and the surface flatness of the guide rail surface do not meet the standards.

[0013] Furthermore, the steps after step S2 also include:

[0014] Step S4: before the hydrostatic guide rail moves to the second end of the guide rail body, the pressure value of the same hydraulic chamber when it moves to the predetermined position is P1, and the average pressure value of the same hydraulic chamber after each movement before moving to the predetermined position is P2. If the absolute value of the relative deviation value of P1 and P2 is higher than the third predetermined value, it is judged that the roughness of the guide rail surface relative to the hydraulic chamber does not meet the standard. If the absolute value of the relative deviation value of P1 and P2 is lower than the third predetermined value, step S2 is executed until the hydrostatic slider moves to the second end of the guide rail body, and it is judged that the surface roughness of the guide rail surface meets the standard, and the hydrostatic slider is controlled to stop moving.

[0015] Further, the step of determining that the roughness of the guide rail surface relative to the hydraulic chamber does not meet the requirement includes:

[0016] If the difference between P1 and P2 is positive, it is determined that there is debris blocking the guide rail surface corresponding to the hydraulic chamber or there is a protrusion on the guide rail surface;

[0017] If the difference between P2 and P1 is negative, it is determined that there is a notch or depression on the guide rail surface corresponding to the hydraulic chamber.

[0018] Further, the steps after determining that the surface accuracy or roughness of the guide rail surface does not meet the requirements include:

[0019] The alarm element controlling the static pressure guide rail sends out a warning signal and controls the static pressure guide rail to stop moving.

[0020] On the other hand, the present application provides a device for measuring the surface accuracy of a hydrostatic guide rail, the device for measuring the surface accuracy of a hydrostatic guide rail is used to perform the above-mentioned method for measuring the surface accuracy of a hydrostatic guide rail, and the device for measuring the surface accuracy of a hydrostatic guide rail comprises:

[0021] Device body;

[0022] A pressure sensor, wherein the pressure sensor comprises a plurality of pressure sensors, the plurality of pressure sensors are fixedly arranged on the device body, and the input ports of the plurality of pressure sensors are connected to the hydraulic chambers corresponding to at least the same guide rail surface through a plurality of slender pipes;

[0023] A controller is electrically connected to the plurality of pressure sensors, and the controller is at least used to record and compare the pressure values ​​detected by the pressure sensors.

[0024] Furthermore, the inner diameter D of the elongated pipe satisfies the relationship: 5mm≤D≤7mm.

[0025] Furthermore, the device for measuring the surface accuracy of the hydrostatic guide rail also includes a stop valve, which is provided with a through hole, the through hole passes through the stop valve, the stop valve is installed on the device body, and the through hole is connected to the slender pipe, and the stop valve has a closed position for cutting off the through hole and an open position for opening the through hole.

[0026] Furthermore, the device body comprises:

[0027] Support frame;

[0028] A test bench, the test bench is arranged on the top of the support frame, and the pressure sensor is arranged on the test bench;

[0029] A storage portion, the storage portion is arranged on the support frame, and the storage portion is located at the bottom of the test bench;

[0030] The moving part is arranged at the bottom of the supporting frame, and the moving part can drive the supporting frame to move freely on a predetermined surface.

[0031] Furthermore, the test bench comprises:

[0032] A workbench, the workbench is fixedly connected to the support frame;

[0033] A mounting frame, the mounting frame is arranged on the top of the workbench, and there is an avoidance gap between the mounting frame and the workbench, and the pressure sensor is fixed to the mounting frame;

[0034] Wherein, a first channel is opened on the mounting frame, a first end of the first channel is communicated with an input port of the pressure sensor, and the elongated pipe is detachably connected to a second end of the first channel.

[0035] Furthermore, the test bench is provided with an oil hole, and the oil hole extends in a direction close to the receiving portion;

[0036] The storage portion includes a storage table and an oil collecting box, the storage table is fixedly connected to the support frame, the storage table includes a first groove and a second groove, the first groove is arranged directly below the oil hole, the second groove is arranged on one side of the first groove, and the oil collecting box is detachably arranged in the first groove.

[0037] Furthermore, the elongated pipes are provided with identification parts, and the identification parts include a plurality of different models, and the identification parts of different models are provided on each of the elongated pipes in a one-to-one correspondence.

[0038] Compared with the prior art, the measurement method of the present application is different from the prior art. The present application measures the pressure of each hydraulic cavity relative to a guide surface at the same time. When the surface shape accuracy of the guide surface where the slider is located meets the requirements, the pressure values ​​of each hydraulic cavity corresponding to the same guide surface should be close. If there is a large difference between two hydraulic cavities in the hydraulic cavities corresponding to the same guide surface, it means that the surface shape accuracy of the guide surface at this location does not meet the requirements. Since the measurement method of the present application measures and compares the pressure values ​​of each hydraulic cavity corresponding to the same guide surface at the same time, under the same environmental factors, there will be no errors caused by environmental factors between the comparison values, thereby making the measurement of the surface shape accuracy of the guide surface more accurate. In addition, the measurement method of the present application can also measure the pressure of the oil film in each hydraulic cavity relative to multiple guide surfaces at the same time, so as to judge whether the surface shape accuracy of each guide surface meets the standard at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0040] Figure 1 A logical schematic diagram of the method for measuring the surface accuracy of a hydrostatic guideway disclosed in the present application;

[0041] Figure 2It is a schematic structural diagram of the device for measuring the surface accuracy of a hydrostatic guideway disclosed in the present application at a first viewing angle;

[0042] Figure 3 A partial structural schematic diagram of the device for measuring the surface accuracy of a hydrostatic guideway disclosed in the present application (with the oil receiving box removed);

[0043] Figure 4 It is a schematic structural diagram of the device for measuring the surface accuracy of a hydrostatic guideway disclosed in the present application at a second viewing angle;

[0044] Figure 5 This is a schematic diagram of the structure of the hydrostatic guide rail disclosed in this application;

[0045] Figure 6 This is a schematic diagram of the structure of the static pressure slider disclosed in this application. The above drawings include the following reference numerals: 10. Device body; 11. Support frame; 12. Test bench; 13. Storage part; 14. Moving part; 20. Pressure sensor; 30. Slender pipe; 40. Stop valve; 41. Through hole; 50. Guide rail body; 51. Guide rail surface; 60. Static pressure slider; 61. Hydraulic chamber; 121. Workbench; 122. Mounting frame; 123. Avoidance gap; 131. Storage table; 132. Oil collecting box; 1211. Oil hole; 1221. First channel; 1311. First groove; 1312. Second groove. DETAILED DESCRIPTION

[0046] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0047] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0048] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0049] As mentioned in the background technology, due to the limitation of the size of the oil pressure sensor and the hydrostatic slider 60, it is impossible to install the oil pressure sensor on each hydraulic cavity 61 of the hydrostatic slider 60 relative to the guide surface 51. Therefore, the existing measurement method is to continuously assemble the oil pressure sensor on each hydraulic cavity 61 and test the oil pressure of each hydraulic cavity 61 in turn. One disadvantage of this measurement method is that since external environmental factors may change over time, such as air pressure and temperature, which may be different in each test, the pressure of the oil in the hydraulic cavity 61 may change with the temperature and air pressure. The final result is that there is a large error in the surface accuracy of the guide surface 51, that is, the surface accuracy of the guide surface 51 may not meet the standard, but the measurement results of this test method show that it meets the standard, which ultimately makes the parts processed by the equipment using the hydrostatic guide rail unable to be used normally.

[0050] To solve the above problems, see Figure 1 As shown, according to an embodiment of the present application, a method for measuring the surface accuracy of a hydrostatic guide rail is provided. The hydrostatic guide rail comprises a guide rail body 50 and a hydrostatic slider 60. The hydrostatic slider 60 is slidably arranged on the guide rail body 50. A plurality of hydraulic cavities 61 arranged at intervals are provided on the surface of the hydrostatic slider 60 opposite to the guide rail surface 51 of the guide rail body 50. The method for measuring the surface accuracy of the hydrostatic guide rail comprises:

[0051] Step S1: Control the static pressure slider 60 to move to the first end of the guide rail body 50;

[0052] Step S2: Control the static pressure slider 60 to move a predetermined distance along the second end close to the guide rail body 50, and detect the pressure value of each hydraulic chamber 61 after the movement;

[0053] Step S3: At the same time, the pressure values ​​of the hydraulic chambers 61 opposite to the same guide surface 51 are compared in pairs. If the pressure difference between the two hydraulic chambers 61 opposite to the same guide surface 51 exceeds the preset value, it is judged that the surface accuracy of the guide surface 51 does not meet the standard; if the pressure difference between the two hydraulic chambers 61 opposite to the same guide surface 51 does not exceed the preset value, S2 is executed again until the static pressure slider 60 moves to the second end of the guide rail body 50, and it is judged that the surface accuracy of the guide surface 51 meets the standard, and the static pressure slider 60 is controlled to stop moving.

[0054] It can be understood that the measurement method of this embodiment is different from that of the prior art. This embodiment measures the pressure of each hydraulic chamber 61 relative to a guide surface 51 at the same time. When the surface shape accuracy of the guide surface 51 where the slider is located meets the requirements, the pressure values ​​of each hydraulic chamber 61 corresponding to the same guide surface 51 should be close. If there is a large difference between two hydraulic chambers 61 in each hydraulic chamber 61 corresponding to the same guide surface 51, it means that the surface shape accuracy of the guide surface 51 at this location does not meet the requirements. Since the measurement method of the present application measures and compares the pressure values ​​of each hydraulic chamber 61 corresponding to the same guide surface 51 at the same time, under the same environmental factors, there will be no errors caused by environmental factors between the comparison values, thereby making the surface shape accuracy measurement of the guide surface 51 more accurate. In addition, the measurement method of this embodiment can also measure the pressure of the oil film in each hydraulic chamber 61 relative to multiple guide surfaces 51 at the same time, so as to judge whether the surface shape accuracy of each guide surface 51 meets the standard at the same time.

[0055] Furthermore, the step of judging whether the surface accuracy of the guide rail surface 51 does not meet the standard includes: if the absolute pressure difference between two hydraulic chambers 61 opposite to the same guide rail surface 51 exceeds a first predetermined value, and the absolute difference does not exceed a second predetermined value, then it is judged that the surface roughness of the guide rail surface 51 meets the standard, and the surface flatness of the guide rail surface 51 does not meet the standard; if the absolute pressure difference between two hydraulic chambers 61 opposite to the same guide rail surface 51 exceeds a second predetermined value, then it is judged that both the surface roughness and the surface flatness of the guide rail surface 51 do not meet the standard.

[0056] Specifically, the surface shape accuracy usually needs to consider the surface flatness and surface roughness. If the surface flatness does not meet the requirements, and the surface roughness meets the requirements, there will be a small absolute difference in pressure between the two hydraulic chambers 61 in the same guide surface 51 during measurement, that is, the surface flatness does not meet the requirements, which is manifested as a small inclination angle of the guide surface 51, resulting in an increase or decrease in the gap between some hydraulic chambers 61 and the guide surface 51, so that the pressure of the oil film at this location changes slightly; and if the surface roughness does not meet the requirements, it means that there are protrusions or depressions on the surface of the guide surface 51 or the surface is blocked by debris. At this time, the gap between the hydraulic chamber 61 and the guide surface 51 changes greatly, and then the pressure of the oil film at this location changes greatly, that is, there will be a large pressure difference between the two hydraulic chambers 61 in each hydraulic chamber 61 opposite to the same guide surface 51. In this embodiment, the first predetermined value is usually set to 0.2Mpa or 0.25Mpa, and the second predetermined value can be set to 0.5Mpa or more. During the actual testing process, if the surface roughness or surface flatness of the guide surface 51 does not meet the standards, the guide surface 51 needs to be processed again. Generally speaking, the processing method of surface roughness is different from the processing method of surface flatness. Therefore, in some specific cases, it is necessary to directly determine whether the surface roughness of the guide surface 51 does not meet the requirements or the surface flatness does not meet the requirements, so that the testers can adopt different processing methods for the guide surface 51.

[0057] Furthermore, the steps after step S2 also include: step S4: before the hydrostatic guide rail moves to the second end of the guide rail body 50, the pressure value of the same hydraulic chamber 61 when it moves to the predetermined position is P1, and the average pressure value of the hydraulic chamber 61 after each movement before the same hydraulic chamber 61 moves to the predetermined position is P2; if the absolute value of the relative deviation value of P1 and P2 is higher than a third predetermined value, it is judged that the roughness of the guide rail surface 51 relative to the hydraulic chamber 61 does not meet the standard; if the absolute value of the relative deviation value of P1 and P2 is lower than the third predetermined value, step S2 is executed until the hydrostatic slider 60 moves to the second end of the guide rail body 50, and it is judged that the surface roughness of the guide rail surface 51 meets the standard, and the hydrostatic slider 60 is controlled to stop moving.

[0058] In this embodiment, step S4 can be performed simultaneously with step S3, so as to improve the measurement accuracy of the surface shape accuracy of the guide surface 51, that is, not only the pressure value of the oil film in each hydraulic cavity 61 relative to the same guide surface 51 is used to judge whether the surface roughness of the guide surface 51 meets the standard, but also the change in pressure after each movement of the oil film in the same hydraulic cavity 61 during the continuous movement of the static pressure slider 60 is used to judge whether the surface roughness of the guide surface 51 meets the requirements. In this embodiment, the absolute value of the relative deviation value of P1 and P2 is expressed as |(P1-P2) / P2|, and generally speaking, the third predetermined value is usually set to 30%, that is, if the absolute value of the relative deviation value of P1 and P2 is higher than 30%, it means that the surface roughness of the guide surface 51 at that location does not meet the requirements.

[0059] Furthermore, the step of determining whether the roughness of the guide surface 51 relative to the hydraulic chamber 61 does not meet the requirements includes: if the difference between P1 and P2 is positive, it is determined that there are debris blocking the guide surface 51 corresponding to the hydraulic chamber 61 or there is a protrusion on the guide surface 51; if the difference between P2 and P1 is negative, it is determined that there are notches or depressions on the guide surface 51 corresponding to the hydraulic chamber 61.

[0060] As mentioned above, if the absolute value of the relative deviation between P1 and P2 is greater than the third predetermined value, the surface roughness of the guide surface 51 does not meet the requirements, which is manifested by the presence of protrusions or obstruction by debris on the guide surface 51. At this time, the gap between the hydraulic chamber 61 and the guide surface 51 relative to the protrusion or obstruction by debris on the guide surface 51 is reduced, causing the pressure of the oil film at this location to suddenly increase, that is, the difference between P1 and P2 should be a positive value. When there are notches or depressions on the guide surface 51, the gap between the hydraulic chamber 61 and the guide surface 51 relative to the notch or depression on the guide surface 51 is increased, causing the pressure of the oil film at this location to suddenly decrease, that is, the difference between P1 and P2 should be a negative value. Similarly, it is judged that there are protrusions, or are obstructed by debris, or there are notches or grooves on the guide surface 51, so that the tester can use different processing methods to reprocess the guide surface 51.

[0061] On the other hand, the steps after determining that the surface accuracy or roughness of the guide rail surface 51 does not meet the requirements include: controlling the alarm element (not shown in the figure) of the hydrostatic guide rail to send a warning signal and controlling the hydrostatic guide rail to stop moving.

[0062] It is understandable that when it is detected that the surface accuracy of the guide surface 51 does not meet the requirements, the static pressure slider 60 should be controlled to stop sliding, and the alarm element should send a warning signal, thereby reminding the tester that the surface accuracy of the guide surface 51 does not meet the requirements, so that the tester can adjust the guide surface 51. In addition, some static pressure guides are also provided with multiple positioning elements (not shown in the figure), and multiple positioning elements are arranged on each hydraulic cavity 61. When the surface accuracy or roughness of the guide surface 51 does not meet the requirements, the positioning element on the hydraulic cavity 61 corresponding to the non-compliant part sends a positioning signal, so that the tester can quickly find the place where the surface accuracy of the guide surface 51 does not meet the requirements, thereby facilitating the tester to adjust the guide surface 51.

[0063] In addition, if attached Figure 2 To Attachment Figure 4 As shown, the present application also provides a device for measuring the surface shape accuracy of a hydrostatic guide rail, which is used to perform the above-mentioned method for measuring the surface shape accuracy of a hydrostatic guide rail. The device for measuring the surface shape accuracy of a hydrostatic guide rail includes a device body 10, a pressure sensor 20 and a controller (not shown in the figure).

[0064] The pressure sensor 20 includes a plurality of pressure sensors 20, which are fixedly mounted on the device body 10, and the input ports of the plurality of pressure sensors 20 are connected to at least the hydraulic chambers 61 opposite to the same guide surface 51 in a one-to-one correspondence through a plurality of slender pipes 30. The controller is electrically connected to the plurality of pressure sensors 20, and the controller is at least used to record and compare the pressure values ​​detected by the pressure sensors 20.

[0065] Compared with the existing method of directly installing the oil pressure sensor on the hydrostatic slider 60, the present application connects the pressure sensor 20 with the hydraulic chamber 61 through the slender pipe 30. When the size of the hydrostatic slider 60 is small, due to the small outer diameter of the slender pipe 30, the slender pipe 30 can simultaneously connect the hydraulic chambers 61 relative to the same guide surface 51 and multiple pressure sensors 20, thereby measuring the hydraulic pressure of each hydraulic chamber 61 relative to the same guide surface 51 at the same time. In addition, compared with the existing measurement method, the present application is also provided with a controller, which is electrically connected to the multiple pressure sensors 20 and is used to compare the pressure of each hydraulic chamber 61 relative to each guide surface 51 at the same time, so as to determine whether the surface shape accuracy of the guide surface 51 meets the requirements. On the other hand, a driving member is provided on the hydrostatic guide rail, and the controller is electrically connected to the driving member. When the controller determines that the surface shape accuracy of the guide surface 51 of the hydrostatic guide rail does not meet the requirements, the controller sends a stop signal to the driving member, so that the hydrostatic slider 60 stops moving on the guide rail body 50.

[0066] The working process of the static pressure guide rail measuring device of the present application is as follows: first, each hydraulic chamber 61 of the guide rail surface 51 to be measured is connected to a plurality of pressure sensors 20 through a slender pipe 30, and at this time, the static pressure slider 60 is driven by the driving member to move to the first end of the guide rail body 50, that is, step S1 is executed; then, a signal is sent to the driving member through the controller to make the static pressure slider 60 move in the direction from the first end to the second end of the guide rail body 50, and after each movement, the pressure value of each hydraulic chamber 61 is recorded and compared, that is, step S2 is executed; then, the controller executes step S3 to determine whether the surface shape accuracy of the guide rail surface 51 corresponding to the static pressure slider 60 at the current position meets the requirements. When the static pressure slider 60 can move to the second end of the guide rail body 50, the controller determines that the surface shape accuracy of the guide rail surface 51 meets the requirements, and then sends a stop signal to the driving member to stop the static pressure slider 60 from moving. In this embodiment, the controller can be set on the device body 10 or outside the device body 10.

[0067] Furthermore, the inner diameter D of the slender pipe 30 satisfies the relationship: 5mm≤D≤7mm. When D satisfies the above relationship, the slender pipe 30 will not be too large, and multiple slender pipes 30 can be connected one-to-one to the hydraulic chambers 61 opposite to each other on the same guide surface 51. The slender pipe 30 will not be too small, thereby avoiding the oil pressure in the slender pipe 30 detected by the pressure sensor 20 being different from the oil pressure of the oil in the actual hydraulic chamber 61. The value of D can be 5mm, 5.5mm, 6mm, 6.5mm and 7mm.

[0068] When the input port of the pressure sensor 20 is connected to the hydraulic chamber 61 through the slender pipe 30, the oil reaches the pressure sensor 20 through the slender pipe 30 to detect the oil pressure of the hydraulic chamber 61. However, due to the presence of air in the slender pipe 30, the air will cause an error in the hydraulic value detected by the pressure sensor 20. Therefore, in order to solve the above problem, the measuring device for the surface accuracy of the static pressure guide rail in this embodiment also includes a stop valve 40, and a through hole 41 is provided on the stop valve 40. The through hole 41 passes through the stop valve 40. The stop valve 40 is installed on the device body 10, and the through hole 41 is connected to the slender pipe 30. The stop valve 40 has a closed position for cutting off the through hole 41 and an open position for opening the through hole 41.

[0069] That is, when the stop valve 40 is in the open position, the oil in the elongated pipe 30 can flow out through the through hole 41 on the stop valve 40, thereby discharging the air in the elongated pipe 30. After the air in the elongated pipe 30 is discharged, the stop valve 40 is switched from the open position to the closed position, thereby cutting off the through hole 41 and preventing the liquid in the elongated pipe 30 from flowing out through the through hole 41.

[0070] Furthermore, the device body 10 includes a support frame 11, a test bench 12, a storage portion 13 and a moving portion 14. The test bench 12 is arranged on the top of the support frame 11, the pressure sensor 20 is arranged on the test bench 12, the storage portion 13 is arranged on the support frame 11, and the storage portion 13 is located at the bottom of the test bench 12, and the moving portion 14 is arranged at the bottom of the support frame 11, and the moving portion 14 can drive the support frame 11 to move freely on a predetermined surface.

[0071] In this embodiment, the pressure sensor 20 and the stop valve 40 are both installed on the test bench 12, and the storage portion 13 is used to place the used slender pipe 30 or other sundries. The moving portion 14 can drive the support frame 11 to move, that is, when it is necessary to measure the surface accuracy of the hydrostatic guide rails of different devices, the support frame 11 can be driven by the moving portion 14, so that the support frame 11 reaches the vicinity of the device to be tested, and after the slender pipe 30 is connected to the pressure sensor 20 and the hydraulic chamber 61, the guide surface 51 of the hydrostatic guide rail can be detected, thereby improving the convenience of the device for measuring the surface accuracy of the hydrostatic guide rail. In this embodiment, the moving portion 14 is a roller, and the roller includes a plurality of rollers, and the plurality of rollers are arranged at intervals at the bottom of the support frame 11.

[0072] As attached Figure 2 As shown, the test bench 12 includes a workbench 121 and a mounting frame 122. The workbench 121 is fixedly connected to the support frame 11, the mounting frame 122 is arranged on the top of the workbench 121, and there is an avoidance gap 123 between the mounting frame 122 and the workbench 121, and the pressure sensor 20 is fixed to the mounting frame 122. A first channel 1221 is opened on the mounting frame 122, and a first end of the first channel 1221 is communicated with an input port of the pressure sensor 20, and the elongated pipe 30 is detachably connected to the second end of the first channel 1221.

[0073] Specifically, since the air in the elongated pipe 30 needs to be exhausted before and after the test, that is, the oil needs to be exhausted from the elongated pipe 30 to the workbench 121, in order to prevent the oil from contaminating the pressure sensor 20, the pressure sensor 20 is arranged on the mounting frame 122. At the same time, there is an avoidance gap 123 between the mounting frame 122 and the workbench 121, and the avoidance gap 123 allows the oil flow channel on the workbench 121 to prevent the oil from accumulating on the mounting frame 122, which eventually causes the oil to contaminate the mounting frame 122 and the pressure sensor 20. On the other hand, in this embodiment, the mounting frame 122 is provided with a first channel 1221, and the elongated pipe 30 is connected to the pressure sensor 20 through the first channel 1221. The stop valve 40 is arranged on the mounting frame 122, and the through hole 41 of the stop valve 40 is connected to the elongated pipe 30 through the first channel 1221.

[0074] Furthermore, an oil hole 1211 is provided on the test bench 12, and the oil hole 1211 extends in a direction close to the storage portion 13; the storage portion 13 includes a storage table 131 and an oil collecting box 132, the storage table 131 is fixedly connected to the support frame 11, the storage table 131 includes a first groove 1311 and a second groove 1312, the first groove 1311 is arranged directly below the oil hole 1211, the second groove 1312 is arranged on one side of the first groove 1311, and the oil collecting box 132 is detachably arranged in the first groove 1311.

[0075] In this embodiment, the first groove 1311 of the storage table 131 is used to store the slender pipe 30 or other sundries, and the second groove 1312 is used to install the oil receiving box 132. The oil flowing out of the slender pipe 30 onto the workbench 121 can flow into the oil receiving box 132 through the oil hole 1211, thereby preventing the accumulation of oil on the workbench 121, and finally causing the oil to contaminate the pressure sensor 20, resulting in errors in the detection of the pressure sensor 20. On the other hand, the oil receiving box 132 is detachably arranged in the first groove 1311. When there is a lot of oil in the oil receiving box 132, the oil receiving box 132 can be removed and the oil can be processed. In this embodiment, the workbench 121 is tilted, that is, the oil on the workbench 121 will flow into the oil hole 1211 under the action of gravity, and finally flow into the oil receiving box 132, thereby avoiding the accumulation of oil in some areas of the workbench 121.

[0076] Furthermore, an identification part is provided on the oil pipeline, and the identification part includes a plurality of different models, and the identification parts of different models are provided on each slender pipeline 30 in a one-to-one correspondence.

[0077] In a specific embodiment, the identification portion includes a digital identification, and two identical digital identifications are provided on the same slender pipe 30. The two digital identifications are respectively provided at one end of the slender pipe 30 close to the pressure sensor 20 and at one end of the slender pipe 30 close to the hydraulic chamber 61, so that the tester can clearly observe the connection status between the hydraulic chamber 61 and the pressure sensor 20.

[0078] In addition, the alarm element is electrically connected to the controller. When the controller determines that the surface flatness or surface roughness of the guide surface 51 does not meet the standard, the controller controls the alarm element to send a warning signal, thereby reminding the tester that the surface accuracy of the guide surface 51 does not meet the standard.

[0079] In summary, the present application provides a method and device for measuring the surface accuracy of a hydrostatic guide rail, so that when the size of the hydrostatic slider 60 is small, the hydraulic chamber 61 can be connected to the pressure sensor 20 through the slender pipe 30. Since the slender pipe 30 is smaller than the pressure sensor 20, each hydraulic chamber 61 relative to the guide rail surface 51 to be measured can be connected to multiple pressure sensors 20 through multiple slender pipes 30 in a one-to-one correspondence, so that the pressure values ​​of each hydraulic chamber 61 relative to the same guide rail surface 51 can be measured at the same time, and then the pressure values ​​of each hydraulic chamber 61 can be compared to determine whether the surface accuracy of the guide rail surface 51 at that location meets the requirements. On the other hand, the measurement method of the present application also sets a first predetermined value, a second predetermined value, and a third predetermined value to determine whether the flatness or roughness of the guide rail surface 51 meets the standard. In addition, the measuring method also provides a method for measuring whether the surface roughness of the guide surface 51 of the hydrostatic guide rail meets the standard, and through the measured pressure value, it is judged whether there are protrusions or debris on the guide surface 51 or there are notches or depressions on the guide surface 51 when the surface roughness does not meet the standard. In the present application, the measuring device for the surface accuracy of the hydrostatic guide rail is also provided with a stop valve 40, and a through hole 41 is opened on the stop valve 40. The through hole 41 is connected to the elongated pipe 30, so that the air in the elongated pipe 30 can be discharged through the through hole 41 on the stop valve 40, thereby avoiding the influence of air when the pressure sensor 20 measures the oil pressure, resulting in errors in the measurement results.

[0080] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0081] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of this application.

[0082] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A method for measuring the surface accuracy of a hydrostatic guide rail, wherein the hydrostatic guide rail comprises a guide rail body (50) and a hydrostatic slider (60), wherein the hydrostatic slider (60) is slidably arranged on the guide rail body (50), and a plurality of hydraulic chambers (61) arranged at intervals are provided on the surface of the hydrostatic slider (60) opposite to the guide rail surface (51) of the guide rail body (50), wherein: The method for measuring the surface accuracy of the hydrostatic guide rail comprises: Step S1: controlling the static pressure slider (60) to move to the first end of the guide rail body (50); Step S2: controlling the static pressure slider (60) to move a predetermined distance along the second end close to the guide rail body (50), and detecting the pressure value of each hydraulic chamber (61) after the movement; Step S3: at the same time, the pressure values ​​of the hydraulic chambers (61) relative to the same guide rail surface (51) are compared in pairs. If the pressure difference between the two hydraulic chambers (61) relative to the same guide rail surface (51) exceeds the preset value, it is judged that the surface accuracy of the guide rail surface (51) does not meet the standard; if the pressure difference between the two hydraulic chambers (61) relative to the same guide rail surface (51) does not exceed the preset value, step S2 is executed again until the static pressure slider (60) moves to the second end of the guide rail body (50), and it is judged that the surface accuracy of the guide rail surface (51) meets the standard, and the static pressure slider (60) is controlled to stop moving.

2. The method for measuring the surface accuracy of a hydrostatic guideway according to claim 1, characterized in that: The step of judging whether the surface accuracy of the guide rail surface (51) does not meet the standard comprises: If the absolute difference in pressure between two hydraulic chambers (61) opposite to the same guide rail surface (51) exceeds a first predetermined value, and the absolute difference does not exceed a second predetermined value, it is determined that the surface roughness of the guide rail surface (51) meets the standard, and the surface flatness of the guide rail surface (51) does not meet the standard; If the absolute difference in pressure between two hydraulic chambers (61) opposite to the same guide rail surface (51) exceeds a second predetermined value, it is determined that both the surface roughness and the surface flatness of the guide rail surface (51) do not meet the standards.

3. The method for measuring the surface accuracy of a hydrostatic guideway according to claim 1, characterized in that: The steps after step S2 also include: Step S4: before the hydrostatic guide rail moves to the second end of the guide rail body (50), the pressure value of the same hydraulic chamber (61) when it moves to the predetermined position is P1, and the average pressure value of the same hydraulic chamber (61) after each movement before moving to the predetermined position is P2. If the absolute value of the relative deviation value of P1 and P2 is higher than a third predetermined value, it is determined that the roughness of the guide rail surface (51) relative to the hydraulic chamber (61) does not meet the standard. If the absolute value of the relative deviation value of P1 and P2 is lower than the third predetermined value, step S2 is executed until the hydrostatic slider (60) moves to the second end of the guide rail body (50), and it is determined that the surface roughness of the guide rail surface (51) meets the standard, and the hydrostatic slider (60) is controlled to stop moving.

4. The method for measuring the surface accuracy of a hydrostatic guideway according to claim 3, characterized in that: The step of determining whether the roughness of the guide rail surface (51) opposite to the hydraulic chamber (61) does not meet the requirement comprises: If the difference between P1 and P2 is positive, it is determined that there is debris blocking the guide surface (51) corresponding to the hydraulic chamber (61) or there is a protrusion on the guide surface (51); If the difference between P2 and P1 is negative, it is determined that there is a notch or depression on the guide rail surface (51) corresponding to the hydraulic chamber (61).

5. The method for measuring the surface accuracy of a hydrostatic guideway according to any one of claims 1 to 4, characterized in that: The steps after determining that the surface accuracy or roughness of the guide rail surface (51) does not meet the requirements include: The alarm element controlling the static pressure guide rail sends out a warning signal and controls the static pressure guide rail to stop moving.

6. A device for measuring the surface accuracy of a hydrostatic guideway, characterized in that: The device for measuring the surface accuracy of a hydrostatic guide rail is used to perform the method for measuring the surface accuracy of a hydrostatic guide rail according to any one of claims 1 to 5, and the device for measuring the surface accuracy of a hydrostatic guide rail comprises: Device body (10); A pressure sensor (20), the pressure sensor (20) comprising a plurality of pressure sensors (20), the plurality of pressure sensors (20) being fixedly arranged on the device body (10), the input ports of the plurality of pressure sensors (20) being connected in a one-to-one correspondence with at least the hydraulic chambers (61) opposite to the same guide rail surface (51) through a plurality of slender pipes (30); A controller is electrically connected to the plurality of pressure sensors (20), and the controller is at least used to record and compare the pressure values ​​detected by the pressure sensors (20).

7. The device for measuring the surface accuracy of a hydrostatic guideway according to claim 6, characterized in that: The inner diameter D of the elongated pipe (30) satisfies the relationship: 5 mm ≤ D ≤ 7 mm.

8. The device for measuring the surface accuracy of a hydrostatic guideway according to claim 6, characterized in that: The device for measuring the surface accuracy of a static pressure guide rail further comprises a stop valve (40), the stop valve (40) being provided with a through hole (41), the through hole (41) penetrating the stop valve (40), the stop valve (40) being mounted on the device body (10), and the through hole (41) being communicated with the elongated pipe (30), the stop valve (40) having a closed position for cutting off the through hole (41) and an open position for opening the through hole (41).

9. The device for measuring the surface accuracy of a hydrostatic guideway according to claim 6, characterized in that: The device body (10) comprises: Support frame (11); A test bench (12), the test bench (12) being arranged on the top of the support frame (11), and the pressure sensor (20) being arranged on the test bench (12); A storage portion (13), the storage portion (13) being arranged on the support frame (11), and the storage portion (13) being located at the bottom of the test bench (12); A moving part (14), wherein the moving part (14) is arranged at the bottom of the support frame (11), and the moving part (14) can drive the support frame (11) to move freely on a predetermined surface.

10. The device for measuring the surface accuracy of a hydrostatic guideway according to claim 9, characterized in that: The test bench (12) comprises: A workbench (121), wherein the workbench (121) is fixedly connected to the support frame (11); A mounting frame (122), the mounting frame (122) being arranged on the top of the workbench (121), and an avoidance gap (123) being provided between the mounting frame (122) and the workbench (121), and the pressure sensor (20) being fixed to the mounting frame (122); The mounting frame (122) is provided with a first channel (1221), a first end of the first channel (1221) is connected to an input port of the pressure sensor (20), and the elongated pipe (30) is detachably connected to a second end of the first channel (1221).

11. The device for measuring the surface accuracy of a hydrostatic guideway according to claim 10, characterized in that: The test bench (12) is provided with an oil hole (1211), and the oil hole (1211) extends in a direction close to the storage portion (13); The storage portion (13) comprises a storage table (131) and an oil collecting box (132); the storage table (131) is fixedly connected to the support frame (11); the storage table (131) comprises a first groove (1311) and a second groove (1312); the first groove (1311) is arranged directly below the oil passage hole (1211); the second groove (1312) is arranged on one side of the first groove (1311); and the oil collecting box (132) is detachably arranged in the first groove (1311).

12. The device for measuring the surface accuracy of a hydrostatic guideway according to any one of claims 6 to 11, characterized in that: The elongated pipe (30) is provided with an identification portion, and the identification portion includes a plurality of different models, and the identification portions of different models are arranged on each of the elongated pipes (30) in a one-to-one correspondence.

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