A flexible temperature sensor suitable for extreme high temperature environments and a method of making the same
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- XI AN JIAOTONG UNIV
- Filing Date
- 2024-12-25
- Publication Date
- 2026-06-02
Smart Images
Figure CN119714579B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of temperature sensor technology, specifically relating to a flexible temperature sensor suitable for extreme high-temperature environments and its fabrication method. Background Technology
[0002] Temperature is a crucial parameter for object characterization and environmental perception. With the rapid development of artificial intelligence and the Internet of Things (IoT), traditional temperature sensors, characterized by their large size and poor flexibility, are no longer suitable for today's diverse applications. Flexible temperature sensors, based on the bendability, stretchability, and wearability of flexible materials and fabricated using micro-nano processing technology, have a wider range of applications and significant value in fields such as medical and health monitoring, environmental monitoring, wearable devices, and aerospace.
[0003] The key to flexible temperature sensors lies in the fabrication of the temperature-sensitive layer and the flexible substrate. For material selection, the sensitive layer of flexible temperature sensors is typically made of metal thin films, while the flexible substrate is often made of polymer composites such as polyimide. Due to limitations in manufacturing processes and materials, current contact-type flexible temperature sensors have an upper limit for measuring temperatures below 800℃, and the melting point of the flexible substrate is generally below 400℃, making them difficult to use at high temperatures and limiting their application in extreme high-temperature environments such as metallurgy, geophysical exploration, and aerospace. Summary of the Invention
[0004] The purpose of this invention is to provide a flexible temperature sensor suitable for extreme high-temperature environments and its preparation method, in order to solve the technical defects of existing contact flexible temperature sensors, which are limited by the preparation process and materials. The upper limit of the measurement temperature is below 800°C, and the melting point of the flexible substrate is generally below 400°C, making it difficult to use at high temperatures and limiting its application in extreme high-temperature environments such as metallurgy, geocentric exploration, and aerospace.
[0005] To achieve the above objectives, the present invention employs the following technical solution:
[0006] In a first aspect, a flexible temperature sensor suitable for extreme high-temperature environments is provided, characterized in that it comprises:
[0007] The high-temperature resistant flexible substrate is made of flexible thermal insulation composite material, which includes pre-oxidized fiber film, aerogel felt or transparent mica.
[0008] A thermocouple temperature-sensitive layer is disposed on the surface of the high-temperature resistant flexible substrate, and the material used to prepare the thermocouple sensitive layer includes indium oxide, indium tin oxide, or indium zinc oxide.
[0009] The thickness of the high-temperature resistant flexible substrate is 1-3 mm, and the thickness of the thermocouple temperature-sensitive layer is 10-30 μm.
[0010] Furthermore, the materials used to prepare the thermocouple sensitive layer also include cellulose, epoxy resin, terpineol, or polyetheramine.
[0011] Furthermore, the thermocouple temperature-sensitive layer includes a heating end and a cooling end, with the heating end in direct contact with the cooling end.
[0012] Furthermore, the heating end and the cooling end are connected by a honeycomb tenon and mortise structure.
[0013] Furthermore, the heating end and the cooling end are made of different materials.
[0014] Furthermore, the sensitivity of the thermocouple temperature-sensitive layer is not lower than -200μV / C.
[0015] Furthermore, the cross-section of the high-temperature resistant flexible substrate is rectangular.
[0016] Furthermore, the thermocouple temperature-sensitive layer has a structure with one end open and the other end sealed.
[0017] Secondly, a method for fabricating a flexible temperature sensor suitable for extreme high-temperature environments, as described above, is provided, comprising:
[0018] Preparation of high-temperature resistant flexible substrates;
[0019] A paste is prepared, and a sensitive layer film is printed on the prepared high-temperature resistant flexible substrate using a screen printing process to obtain a flexible temperature sensor.
[0020] The obtained flexible temperature sensor is subjected to high-temperature treatment for 120 minutes to thermally activate the electrode material of the sensitive layer in the flexible temperature sensor.
[0021] Furthermore, after thermally activating the sensitive layer electrode material in the flexible temperature sensor, the process also includes:
[0022] The flexible substrate was heat-treated at 700 degrees Celsius for 20 hours, and its macroscopic morphology and microstructure were observed in comparison with the same flexible substrate at room temperature.
[0023] The flexible temperature sensor was heated at 700 to 800 degrees Celsius using an alcohol lamp, and the flexible temperature sensor was also heated by the airflow of a butane spray gun.
[0024] High and low temperature chambers and muffle furnaces were used as heat sources to calibrate and test the flexible temperature sensor.
[0025] Compared with the prior art, the present invention has the following beneficial effects:
[0026] 1. Flexible thermal insulation composite materials possess excellent high-temperature resistance, maintaining structural stability and integrity even in extreme high-temperature environments. High-temperature resistant flexible substrates made from these composites exhibit extremely strong heat resistance, showing no significant change in physical properties even at temperatures above 1000℃, while maintaining good flexibility and stability. Secondly, the thermocouple temperature-sensitive layer is prepared using ceramic powders such as indium oxide, indium tin oxide, or indium zinc oxide as the main materials, enabling temperature detection within an ultra-wide temperature range of -196℃ to 1300℃, with repeatability error within ±1.72% and sensitivity not lower than -200μV / C. By using screen printing technology to prepare a thin film of the sensitive layer on the surface of the high-temperature resistant flexible substrate, an ultra-flexible, ultra-thin, and ultra-light flexible temperature sensor is fabricated, filling the gap in high-temperature detection for flexible temperature sensors. Furthermore, the sensor structure is simple, enabling low-cost, large-scale mass production.
[0027] 2. Cellulose, epoxy resin, terpineol, or polyetheramine can help improve the sensitivity, stability, durability, and measurement accuracy of thermocouple sensitive layers.
[0028] 3. The heating end and the cooling end are in direct contact, which allows heat to be quickly conducted from the heating end to the cooling end, thereby accelerating the response speed of the thermocouple.
[0029] 4. The honeycomb tenon and mortise structure connects the heating end and the cooling end, enabling direct contact between the two and providing a more direct and efficient heat conduction path, which helps to improve the response speed and measurement accuracy of the thermocouple.
[0030] 5. The selection of different materials can achieve complementary performance. The high thermal conductivity of the heating end can ensure a rapid temperature response, while the high heat dissipation of the cooling end can maintain the long-term stability of the thermocouple.
[0031] 6. High sensitivity helps reduce errors in the measurement process. When the temperature changes, the thermocouple can respond more quickly and output the corresponding electrical signal, thereby improving the accuracy of the measurement.
[0032] 7. The rectangular cross-section design can be optimized for specific heat conduction requirements. At the same time, by adjusting the size and proportion of the cross-section, more efficient heat conduction or insulation effects can be achieved. Attached Figure Description
[0033] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0034] Figure 1 A schematic diagram of the overall structure of the flexible temperature sensor suitable for extreme high-temperature environments provided by the present invention;
[0035] Figure 2 A schematic diagram of the planar structure of the flexible temperature sensor suitable for extreme high-temperature environments provided by the present invention;
[0036] Figure 3 Fitting curve of the temperature-sensitive characteristics of the flexible temperature sensor suitable for extreme high-temperature environments provided by the present invention;
[0037] Figure 4 A flowchart illustrating the fabrication method of a flexible temperature sensor suitable for extreme high-temperature environments provided by this invention;
[0038] Among them: 1. High-temperature resistant flexible substrate; 2. Thermocouple temperature sensitive layer. Detailed Implementation
[0039] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0040] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.
[0041] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0042] In the description of the embodiments of the present invention, it should be noted that if terms such as "upper," "lower," "horizontal," or "inner" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, terms such as "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0043] Furthermore, the use of the term "horizontal" does not imply that the component must be absolutely horizontal, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0044] Temperature is a crucial parameter for object characterization and environmental perception. With the rapid development of artificial intelligence and the Internet of Things (IoT), traditional temperature sensors, characterized by their large size and poor flexibility, are no longer suitable for today's diverse applications. Flexible temperature sensors, based on the bendability, stretchability, and wearability of flexible materials and fabricated using micro-nano processing technology, have a wider range of applications and significant value in fields such as medical and health monitoring, environmental monitoring, wearable devices, and aerospace.
[0045] The key to flexible temperature sensors lies in the fabrication of the temperature-sensitive layer and the flexible substrate. For material selection, the sensitive layer of flexible temperature sensors is typically made of metal thin films, while the flexible substrate is often made of polymer composites such as polyimide. Due to limitations in manufacturing processes and materials, current contact-type flexible temperature sensors have an upper limit for measuring temperatures below 800℃, and the melting point of the flexible substrate is generally below 400℃, making them difficult to use at high temperatures and limiting their application in extreme high-temperature environments such as metallurgy, geophysical exploration, and aerospace.
[0046] To address the aforementioned technical deficiencies, the inventors have provided a flexible temperature sensor suitable for extreme high-temperature environments and its fabrication method.
[0047] The present invention will now be described in further detail with reference to the accompanying drawings:
[0048] like Figures 1-3As shown in the embodiment of the present invention, the first aspect provides a flexible temperature sensor suitable for extreme high-temperature environments, including a high-temperature resistant flexible substrate 1, which is made of a flexible thermal insulation composite material, including a pre-oxidized filament film, aerogel felt, or transparent mica. The thickness of the high-temperature resistant flexible substrate 1 is 1~3mm. The high-temperature resistant flexible substrate 1 has good bending and stability, and its properties do not change significantly at a high temperature of 1000℃, and it can withstand a high temperature of up to 1300℃. A thermocouple temperature sensitive layer 2 is disposed on the surface of the high-temperature resistant flexible substrate 1. The thermocouple temperature sensitive layer 2 is prepared by materials including ceramic powders such as indium oxide, indium tin oxide, or indium zinc oxide. The thickness of the thermocouple temperature sensitive layer 2 is 10~30um. In the above structural design, the flexible thermal insulation composite material itself has excellent high-temperature resistance, which can maintain structural stability and integrity under extreme high-temperature environments. The high-temperature resistant flexible substrate 1, made of the flexible thermal insulation composite material, has extremely strong heat resistance. Its physical properties do not change significantly under high-temperature environments above 1000℃, and it still has good flexibility and stability. Secondly, the thermocouple temperature sensitive layer 2 is made of ceramic powders such as indium oxide, indium tin oxide, or indium zinc oxide as the main materials. It can detect temperature in an ultra-wide temperature range of -196℃ to 1300℃, with a repeatability error within ±1.72% and a sensitivity of not less than -200μV / C. The sensitive layer film is prepared on the surface of the high-temperature resistant flexible substrate 1 by screen printing technology, thus preparing an ultra-flexible, ultra-thin, and ultra-light flexible temperature sensor, which fills the gap in high-temperature detection of flexible temperature sensors. Moreover, the sensor structure is simple and can achieve low-cost mass production. Materials used in the fabrication of thermocouple sensitive layer 2 include cellulose, epoxy resin, terpineol, or polyetheramine. The application of these materials helps improve the sensitivity, stability, durability, and measurement accuracy of thermocouple sensitive layer 2. Figure 1 and Figure 2As shown, the thermocouple temperature-sensitive layer 2 includes a heating end and a cooling end, which are in direct contact. This direct contact allows heat to be rapidly conducted from the heating end to the cooling end, thus accelerating the response speed of the thermocouple temperature-sensitive layer 2. This design enables the thermocouple temperature-sensitive layer 2 to sense temperature changes more quickly, improving the real-time performance of the measurement. Simultaneously, the direct contact design reduces heat loss during conduction, ensuring that the thermocouple temperature-sensitive layer 2 can measure temperature more accurately, contributing to improved measurement precision and reliability. Secondly, the direct contact between the heating and cooling ends of the thermocouple temperature-sensitive layer 2 eliminates the need for additional heat transfer media or structures, making its structure more compact and simpler, reducing material usage and manufacturing costs. Finally, the direct contact design reduces thermal stress caused by temperature gradients, contributing to improved long-term stability and reliability of the thermocouple temperature-sensitive layer 2. This allows the thermocouple temperature-sensitive layer 2 to better adapt to temperature measurement requirements in extreme environments (such as high temperature, high pressure, and strong magnetic fields), improving the sensor's environmental adaptability. Furthermore, the heating and cooling ends are in direct contact via a honeycomb mortise and tenon structure. This unique geometry effectively disperses stress at the connection point. When either the heating or cooling end is subjected to external pressure or tension, this structure distributes the stress evenly throughout the connection area, thus improving overall strength and stability. The direct contact between the heating and cooling ends via the honeycomb mortise and tenon structure helps reduce thermal resistance during heat conduction, allowing heat to be transferred more quickly from the heating end to the cooling end, improving heat transfer efficiency. Moreover, the geometry of the honeycomb mortise and tenon structure helps optimize the heat conduction path, allowing heat to flow along a more efficient path during conduction, further improving heat transfer efficiency. Additionally, the honeycomb mortise and tenon structure is not dependent on a specific material combination, thus adapting to heating and cooling ends made of different materials, allowing the thermocouple temperature-sensitive layer 2 to be applied more flexibly in various environments and occasions. The honeycomb mortise and tenon structure is easy to assemble and maintain. During assembly, the heating and cooling ends can be fixed using simple mortise and tenon connections; during maintenance, the mortise and tenon structure can be disassembled for easy replacement or repair. Finally, the honeycomb mortise and tenon structure can reduce the impact of thermal stress on the connection to a certain extent. Because this structure can effectively disperse stress and adapt to the expansion and contraction of materials caused by temperature changes, it can reduce the risk of damage to the connection caused by thermal stress. The tight connection achieved by the honeycomb mortise and tenon structure helps to improve the sealing of the thermocouple temperature sensitive layer 2, preventing external contaminants from entering the thermocouple temperature sensitive layer 2 and affecting the measurement accuracy or causing damage.
[0049] In this embodiment, each heating end of the thermocouple temperature-sensitive layer 2 undergoes a heating stage at 160°C for nearly 20 minutes to ensure complete solidification in a vacuum drying oven. The heating and cooling ends of the thermocouple temperature-sensitive layer 2 are made of different materials. Different materials have different thermoelectric effects; that is, when a temperature difference exists at the junction of two different materials, an electromotive force is generated. Utilizing this difference in thermoelectric effect, the thermocouple temperature-sensitive layer 2 can more accurately measure temperature differences. Furthermore, different materials have different temperature response characteristics; the electromotive force of one material may increase linearly with temperature, while another may exhibit a non-linear curve. By appropriately selecting different materials, the thermocouple temperature-sensitive layer 2 can have more accurate measurement values within different temperature ranges. In this embodiment, by combining materials with different applicable temperature ranges, a thermocouple temperature-sensitive layer 2 suitable for various extreme temperature environments can be manufactured. Finally, thermocouple temperature-sensitive layers 2 made of different materials have different characteristics and applicable ranges, which enables thermocouple temperature-sensitive layers 2 to be applied to more diverse fields and scenarios. For example, some thermocouples are particularly suitable for high-temperature and high-pressure environments such as aerospace and petrochemical industries; while other thermocouples are more suitable for low-temperature or special atmosphere environments such as medical and electronic industries.
[0050] In this embodiment, the thermocouple temperature-sensitive layer 2 has a structure with one end open and the other end sealed. The sensitivity of the thermocouple temperature-sensitive layer 2 is not lower than -200μV / C, making it highly sensitive to temperature changes. This helps improve the accuracy of temperature measurement, allowing the thermocouple temperature-sensitive layer 2 to more accurately reflect the temperature changes of the measured object. Secondly, the high sensitivity allows the thermocouple temperature-sensitive layer 2 to measure smaller temperature changes, thereby widening its measurement range. In some applications requiring precise temperature control, such as scientific research experiments and medical equipment, this high-sensitivity thermocouple temperature-sensitive layer 2 can provide more reliable temperature data. Finally, the higher the sensitivity, the faster the thermocouple temperature-sensitive layer 2 responds to temperature changes, which helps to capture temperature information in a timely manner in rapidly changing temperature environments, providing strong support for real-time temperature monitoring and control. The structure of the thermocouple temperature-sensitive layer 2, with one end open and the other sealed, helps to enhance the structural stability of the thermocouple temperature-sensitive layer 2. The sealed end can protect the interior of the thermocouple temperature-sensitive layer 2 from interference and damage from the external environment, thereby improving the durability and reliability of the thermocouple temperature-sensitive layer 2. The sealed structural design helps to optimize the heat conduction path and improve the measurement efficiency and accuracy of the thermocouple temperature-sensitive layer 2.
[0051] In this embodiment, the high-temperature resistant flexible substrate 1 has a rectangular cross-section. This rectangular design allows for a more uniform distribution of external pressure or stress, enhancing the substrate's stability. This stability is particularly important for flexible temperature sensors operating in extreme high-temperature environments, as high temperatures can cause thermal expansion and contraction of materials, increasing the risk of stress concentration. Secondly, a rectangular cross-section typically provides higher strength than a circular or other irregular shape. With the same material thickness, the high-temperature resistant flexible substrate 1 can withstand greater tensile, compressive, or bending forces, thus improving the overall durability and reliability of the flexible temperature sensor. Furthermore, the rectangular cross-section design helps optimize the heat conduction path, allowing heat to be transferred more efficiently to the outside of the high-temperature resistant flexible substrate 1 or dissipated through other heat dissipation mechanisms. This effectively reduces the temperature of the high-temperature resistant flexible substrate 1 and the entire flexible temperature sensor, thereby extending the sensor's lifespan.
[0052] In this embodiment, in one implementation, the thickness of the high-temperature resistant flexible substrate 1 is 1~3mm; in another implementation, the thickness of the high-temperature resistant flexible substrate 1 is 1.5~2.5mm.
[0053] In this embodiment, the flexible temperature sensor is a sensor with linear temperature-sensitive characteristics. In one embodiment, the thickness of the thermocouple temperature-sensitive layer 2 is 10~30um; in another embodiment, the thickness of the thermocouple temperature-sensitive layer 2 is 13~25um; and in yet another embodiment, the thickness of the thermocouple temperature-sensitive layer 2 is 15~20um.
[0054] Secondly, embodiments of the present invention provide a method for fabricating the aforementioned flexible temperature sensor suitable for extreme high-temperature environments, such as... Figure 4 As shown, it includes:
[0055] S101. Prepare a flexible thermal insulation composite material substrate; for example, a flexible thermal insulation composite material is selected to prepare a high-temperature resistant flexible substrate 1, wherein the flexible thermal insulation composite material includes pre-oxidized fiber film, aerogel felt and transparent mica, but is not limited to these three materials; after the high-temperature resistant flexible substrate 1 is prepared, the prepared high-temperature resistant flexible substrate 1 is cut to meet the size requirements; at the same time, since the high-temperature resistant flexible substrate 1 is prepared using the above-mentioned materials, the properties of the high-temperature resistant flexible substrate 1 do not change significantly at high temperatures above 1000℃, and it has good flexibility and stability, and can still recover its original shape after repeated bending.
[0056] S102. Prepare a slurry and print a sensitive layer film on the prepared flexible thermal insulation composite substrate using a screen printing process to obtain a flexible temperature sensor. For example, ceramic powders such as indium oxide (In2O3), indium tin oxide (ITO), or indium zinc oxide (IZO) are selected as the main materials, and binders and curing agents (including but not limited to epoxy resin, cellulose, and polyetheramine) are added and mixed to obtain a slurry. Then, based on the screen printing process, a thermocouple sensitive layer film is prepared on the rough surface of the high-temperature resistant flexible substrate 1 prepared with the thermal insulation composite material, and printed 1-2 times to ensure that the thermocouple temperature sensitive layer 2 is tightly adhered to the high-temperature resistant flexible substrate 1. After each coating, a heat treatment at 160°C for 20 minutes is performed to ensure complete solidification in a vacuum drying oven, thereby obtaining the flexible temperature sensor.
[0057] S103. The obtained flexible temperature sensor is subjected to a high-temperature treatment for 120 minutes to thermally activate the electrode material of the sensitive layer in the flexible temperature sensor. For example, the obtained flexible temperature sensor is heat-treated at 700°C for 120 minutes to thermally activate the electrode material of the thermocouple temperature sensitive layer 2; then, the high-temperature resistant flexible substrate 1 is heat-treated at 700°C for 20 hours, and its macroscopic morphology and microstructure are observed compared with the same flexible substrate at room temperature to ensure that its properties have not changed significantly; next, the flexible temperature sensor is heated at 700~800°C using an alcohol lamp, and then heated at 1050°C~1250°C using a butane spray gun. After heating, the flexible temperature sensor is repeatedly bent with tweezers. The flexible temperature sensor remains intact and exhibits good flexibility under high-temperature conditions. Finally, the flexible temperature sensor is calibrated and tested using a high-low temperature chamber and a muffle furnace as heat sources, such as... Figure 3 As shown, the relationship curve between the temperature and voltage output value of the flexible temperature sensor is obtained, ensuring the accuracy of temperature measurement in an ultra-wide temperature range of -196~1300℃.
[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit its scope of protection. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that after reading the present invention, they can still make various changes, modifications or equivalent substitutions to the specific implementation of the invention, but these changes, modifications or equivalent substitutions are all within the scope of protection of the pending claims of the invention.
Claims
1. A flexible temperature sensor suitable for extreme high-temperature environments, characterized in that, include: High-temperature resistant flexible substrate (1) is made of flexible thermal insulation composite material, which includes pre-oxidized fiber film, aerogel felt and transparent mica; A thermocouple temperature-sensitive layer (2) is disposed on the surface of the high-temperature resistant flexible substrate (1), and the materials used to prepare the thermocouple temperature-sensitive layer (2) include indium oxide, indium tin oxide or indium zinc oxide; The thickness of the high-temperature resistant flexible substrate (1) is 1~3mm, and the thickness of the thermocouple temperature sensitive layer (2) is 10~30um. The materials used to prepare the thermocouple temperature-sensitive layer (2) also include cellulose, epoxy resin, terpineol or polyetheramine; The thermocouple temperature-sensitive layer (2) includes a heating end and a cooling end, wherein the heating end and the cooling end are in direct contact; The heating end and the cooling end are connected by a honeycomb tenon and mortise structure; The sensitivity of the thermocouple temperature-sensitive layer (2) is not lower than -200μV / C; The thermocouple temperature-sensitive layer (2) has a structure with one end open and the other end sealed.
2. The flexible temperature sensor suitable for extreme high-temperature environments according to claim 1, characterized in that, The heating end and the cooling end are made of different materials.
3. The flexible temperature sensor suitable for extreme high-temperature environments according to claim 1, characterized in that, The cross-section of the high-temperature resistant flexible substrate (1) is rectangular.
4. A method for fabricating a flexible temperature sensor suitable for extreme high-temperature environments as described in any one of claims 1-3, characterized in that, include: Preparation of high-temperature resistant flexible substrates; A paste is prepared, and a sensitive layer film is printed on the high-temperature resistant flexible substrate using a screen printing process to obtain a flexible temperature sensor. The obtained flexible temperature sensor is subjected to high-temperature treatment for 120 minutes to thermally activate the electrode material of the sensitive layer in the flexible temperature sensor.
5. The method for fabricating a flexible temperature sensor suitable for extreme high-temperature environments according to claim 4, characterized in that, After thermally activating the electrode material of the sensitive layer in the flexible temperature sensor, the process also includes: The flexible substrate was heat-treated at 700 degrees Celsius for 20 hours, and its macroscopic morphology and microstructure were observed in comparison with the same flexible substrate at room temperature. The flexible temperature sensor was heated at 700 to 800 degrees Celsius using an alcohol lamp, and the flexible temperature sensor was also heated by the airflow of a butane spray gun. High and low temperature chambers and muffle furnaces were used as heat sources to calibrate and test the flexible temperature sensor.