Tensioning device of capacitor film vacuum gauge diaphragm and tensioning force testing method

Abstract

The invention relates to a tensioning device of a capacitor film vacuum gauge diaphragm. The tensioning device comprises a pressing assembly, a clamping assembly, a pre-tightening film and a base. The base is of a sheet-shaped structure; the clamping assembly is arranged on the base and comprises more than two groups of pressing blocks and sliding blocks which are matched for use; the pressing blocks and the sliding blocks clamp a plurality of edges of the pre-tightened film; the pressing assembly is arranged above the clamping assembly, an upper sliding seat is arranged in the pressing assembly, and the upper sliding seat is movably connected with the clamping assembly; the upper sliding seat can move in a reciprocating mode in the axis direction of the base to abut against and push the clamping assembly so that the clamping assembly and the pre-tightening film can expand or contract in the radial direction of the pre-tightening film together. The upper sliding seat moves in the axis direction of the base, so that the pre-tightening film clamped by the clamping assembly can be horizontally stretched, tension control over the pre-tightening film is achieved, particularly the pre-tightening film is applied to low-vacuum (10 <-2 >-10 <-4 > Pa) products, the linearity, the sensitivity, the resolution ratio and the hysteresis effect are obviously improved, and the percent of pass of the products is increased.

Description

Technical Field

[0001] The present application relates to the field of vacuum measurement technology, and in particular to a tensioning device for a capacitance film vacuum gauge diaphragm and a tensioning force testing method. Background Art

[0002] The capacitance film vacuum gauge is the only vacuum instrument that has been internationally recognized as a low vacuum measurement substandard. It is based on a variable-pole-gap parallel plate capacitor. When the pressure-sensitive diaphragm is subjected to a uniform pressure load, the pressure-sensitive diaphragm deflects, resulting in a decrease in the initial spacing between the two plates and an increase in capacitance. When the pressure is withdrawn, the diaphragm returns to its original position, resulting in a decrease in capacitance. Finally, the capacitance detection circuit detects the small capacitance change, and then uses an appropriate measurement conversion circuit to convert the capacitance change into a voltage signal to complete the pressure measurement. It can be seen that the pressure-sensitive diaphragm is the core component of the capacitance film vacuum gauge and the key technology for completing the production of the capacitance film vacuum gauge. Its mechanical properties are directly related to the accuracy of the vacuum gauge measurement. If no or a low value of pre-tension is applied during use, the film will be wrinkled, and it is easy to deform too much after bearing the load, and it is easy to vibrate under external excitation; if the pre-tension is too large, it will increase the difficulty of installation, and the film will cause excessive stress after bearing the load.

[0003] In the prior art, the outer circumference of the diaphragm is pressed to fix it, and then a multi-point ejection mechanism or an integral module ejection mechanism is used in the axial direction. The pre-tension of the film is achieved by adjusting the pre-pushing force of the ejection mechanism and the pre-pressure of the pressing mechanism through a hydraulic telescopic mechanism. First of all, this type of pre-tensioning device, especially the hydraulic drive, has a complex structure, which is not conducive to assembly line production. In addition, due to the low precision of the hydraulic system, the output pre-tensioning force is more discrete, thereby increasing the uncertainty of the product. Secondly, if a multi-point ejection mechanism is used, obvious indentations will be generated at the contact point between the ejector head and the diaphragm, causing damage to the diaphragm, and the tension deformation degree of the diaphragm is the largest at the contact point. The pre-pushing dead zone of each ejector rod leads to uneven pre-tension of the diaphragm, and the fatigue strength is greatly reduced, the product life is low, and the linearity is poor. Thirdly, if an integral module ejection mechanism is used, the flatness of the film can be guaranteed, and the force is relatively uniform, but there is only axial extrusion thrust, and it is impossible to achieve both axial extrusion force and radial tension, and it is impossible to truly achieve the pre-tensioning effect. Summary of the invention

[0004] In view of this, the present application proposes a tensioning device for the diaphragm of a capacitive diaphragm vacuum gauge, comprising a pressing assembly, a clamping assembly, a pre-tensioned film and a base; the base is in a sheet-like structure; the clamping assembly is arranged on the base, and the clamping assembly includes more than two groups of pressure blocks and sliders used in conjunction with each other; the pressure blocks and the sliders cooperate up and down to clamp more than two edges of the pre-tensioned film; the pressing assembly is arranged above the clamping assembly, and the pressing assembly has an upper slide, and the upper slide is movably connected to the clamping assembly; the upper slide can reciprocate along the axial direction of the base to push the clamping assembly so that the clamping assembly and the pre-tensioned film can expand or contract together in the radial direction of the pre-tensioned film.

[0005] In a possible implementation, a positioning portion is extended from the outer edge of the sliding block toward the pressing assembly, the positioning portion is inclined, and the positioning portion gradually inclines outward from the pressing assembly to the base; the upper sliding seat can contact the inner side of the positioning portion.

[0006] In a possible implementation, the pressing assembly also includes a fixed seat; the fixed seat is fixedly connected to the base, an external thread is provided on the outer side of the fixed seat, and an internal thread is provided on the inner side of the upper slide seat, and the upper slide seat reciprocates in the axial direction of the base through the fixed seat.

[0007] In a possible implementation, the side wall of the upper slide seat is an inclined surface, and the inclined surface of the upper slide seat gradually increases at one end close to the base, and the inclined surface of the upper slide seat is in the same direction as the inclined direction of the positioning portion and matches each other.

[0008] In a possible implementation, a spring is further included; the spring is installed between each of the sliders and the base; a spring fixing hole is opened on the outer side of the slider; one end of the spring is fixed to the spring fixing hole, and the other end of the spring is in contact with the inner wall of the base.

[0009] In a possible implementation, the fixing seat is screwed and fixed to the base; wherein, a clearance notch is provided on the upper surface of the fixing seat, a threaded hole is provided in the clearance notch, and a matching threaded hole is provided at a corresponding position of the base; the pressing block is screwed and fixed to the sliding block, the pressing block is a cubic block, and the side projection of the sliding block and the positioning portion on the axis of the base is "L" shaped.

[0010] In a possible implementation, a limiting groove is provided on the upper surface of the base; the slider is a cubic block, and the limiting groove is a square groove, which matches the structure of the slider, and the radial length of the limiting groove in the pre-tensioning film is slightly longer than the radial length of the slider in the pre-tensioning film.

[0011] In a possible implementation, the clamping assembly is evenly arranged in the circumference of the pre-tensioning film, and the number of groups of the pressure block and the slider is 4-10 groups; the pre-tensioning film is in the shape of a disc, with a thickness within 0.01mm-0.3mm and a diameter between 30mm-150mm, and the material of the pre-tensioning film is a constant elastic alloy.

[0012] In one possible implementation, the base is in the form of a circular ring structure; the pressing assembly is in the form of a circular ring structure; one end of the slider extends to the inner side of the circumference of the base; the diameter of the base is larger than the diameter of the pressing assembly, and the base is provided with an abutment barrier extending upward, and the inner wall of the abutment barrier can contact the outer side of the slider.

[0013] On the other hand, the present application discloses a method for testing the tensioning force of a capacitance film vacuum gauge diaphragm, using the tensioning device of the capacitance film vacuum gauge diaphragm described in any of the above-mentioned implementation methods to test the tensioning force of the pre-tensioned diaphragm; using a clamping assembly to clamp multiple edges of the pre-tensioned diaphragm in a normal state; using a corresponding tool to screw the upper slide with a torque wrench, the upper slide moves in the axial direction of the base, and the upper slide contacts the clamping assembly, driving the clamping assembly to move radially of the pre-tensioned diaphragm; the pre-tensioned diaphragm is tensioned as the clamping assembly expands outward, and the reading on the torque wrench is recorded, and the force applied by the torque wrench to the upper slide is canceled, and the pre-tensioned diaphragm returns to normal as the clamping assembly retracts inward; repeating "the pre-tensioned diaphragm is tensioned as the clamping assembly expands outward, and the reading on the torque wrench is recorded, and the force applied by the torque wrench to the upper slide is canceled, and the pre-tensioned diaphragm returns to normal as the clamping assembly retracts inward;" and recording the reading on the torque wrench each time.

[0014] The beneficial effects of the present application are as follows: by rotating the upper slide seat in the pressing assembly, it can move back and forth in the axial direction of the base, and the clamping assembly can be pushed to have a small stroke in the radial direction of the pre-tightened film, so that the pre-tightened film clamped by the clamping assembly can be stretched horizontally, thereby realizing the tension control of the pre-tightened film, especially in the application of low vacuum (10-2—10-4Pa) products, there are obvious improvements in linearity, sensitivity, resolution and hysteresis effect, and greatly improves the product qualification rate.

[0015] Other features and aspects of the present application will become apparent from the following detailed description of exemplary embodiments with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments, features, and aspects of the present application and, together with the description, serve to explain the principles of the present application.

[0017] Figure 1 An exploded view showing a tensioning device for a capacitance film vacuum gauge diaphragm according to an embodiment of the present application; Figure 2 An exploded view showing more component identifications in a tensioning device for a capacitance film vacuum gauge diaphragm according to an embodiment of the present application; Figure 3 A schematic diagram of the assembly of a tensioning device for a capacitance diaphragm vacuum gauge according to an embodiment of the present application is shown. DETAILED DESCRIPTION

[0018] Various exemplary embodiments, features and aspects of the present application will be described in detail below with reference to the accompanying drawings. The same reference numerals in the accompanying drawings represent elements with the same or similar functions. Although various aspects of the embodiments are shown in the accompanying drawings, the drawings are not necessarily drawn to scale unless otherwise specified.

[0019] Among them, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application or simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0020] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0021] The word “exemplary” is used exclusively herein to mean “serving as an example, example, or illustration.” Any embodiment described herein as “exemplary” is not necessarily to be construed as preferred or advantageous over other embodiments.

[0022] In addition, in order to better illustrate the present application, numerous specific details are given in the following specific embodiments. It should be understood by those skilled in the art that the present application can also be implemented without certain specific details. In some examples, methods, means, components and circuits well known to those skilled in the art are not described in detail in order to highlight the subject matter of the present application.

[0023] Figure 1An exploded view of a tensioning device for a capacitance diaphragm vacuum gauge according to an embodiment of the present application is shown.

[0024] like Figure 1 As shown, the tensioning device of the diaphragm of the capacitance film vacuum gauge includes: a pressing component, a clamping component, a pre-tightening film 9 and a base 7; the base 7 is a sheet structure; the clamping component is arranged on the base 7, and the clamping component includes more than two groups of pressing blocks 3 and sliders 6 used in combination; the pressing blocks 3 and the sliders 6 cooperate with each other up and down to clamp more than two edges of the pre-tightening film 9; the pressing component is arranged above the clamping component, and the pressing component has an upper slide 1, and the upper slide 1 is movably connected to the clamping component; the upper slide 1 can reciprocate along the axial direction of the base 7 to push the clamping component so that the clamping component and the pre-tightening film 9 can expand or contract together in the radial direction of the pre-tightening film 9.

[0025] In this embodiment, by rotating the upper slide 1 in the pressing assembly, it can move back and forth in the axial direction of the base 7, pushing the clamping assembly to have a small stroke in the radial direction of the pre-tightening film 9, so that the pre-tightening film 9 clamped by the clamping assembly can be stretched horizontally, thereby realizing the tension control of the pre-tightening film 9, especially in the application of low vacuum (10-2—10-4Pa) products, there are obvious improvements in linearity, sensitivity, resolution and hysteresis effect, greatly improving the product qualification rate.

[0026] Furthermore, there are many ways to rotate the upper slide 1, which are not specifically limited. It is also necessary to explain that, because the base 7 is a sheet-mounted structure, the axial direction of the base 7 is perpendicular to the direction of the sheet-mounted surface of the base 7, and the base 7 is preferably a disc.

[0027] Preferably, the upper slide 1 is rotated by a torque wrench with an accuracy of 0.01 Nm to make it move axially, thereby driving the slider 6 to stretch radially and horizontally to achieve tension control of the pre-tightened film 9.

[0028] In one specific embodiment, a positioning portion 11 is extended from the outer edge of the slider 6 toward the pressing component. The positioning portion 11 is inclined and gradually inclines outward from the pressing component to the base 7. The upper slide 1 can contact the inner side of the positioning portion 11.

[0029] In one specific embodiment, the pressing assembly also includes a fixed seat 2; the fixed seat 2 is fixedly connected to the base 7, an external thread is provided on the outer side of the fixed seat 2, and an internal thread is provided on the inner side of the upper slide 1, and the upper slide 1 reciprocates in the axial direction of the base 7 through the fixed seat 2.

[0030] In one specific embodiment, the side wall of the upper slide 1 is an inclined surface 13, and the inclined surface 13 of the upper slide 1 gradually increases at one end close to the base 7, and the inclined direction of the upper slide 1 is the same as that of the positioning portion 11 and matches.

[0031] More specifically, the upper slide 1 is a circular ring structure, the outer side wall of the upper slide 1 is an inclined surface 13, and the outer diameter of the side close to the base 7 gradually increases, and a positioning portion 11 extends upward from the outer end of the slider 6, and the inclination angle between the positioning portion 11 and the slider 6 matches the inclined surface 13 on the outer side of the upper slide 1. The upper slide 1 is screwed along the thread of the fixed seat 2, and the upper slide 1 moves toward the base 7. The lower end of the outer wall of the upper slide 1 can abut the inner side of the positioning portion 11 at a certain inclination angle, and make the multiple positioning portions 11 expand radially outward along the pre-tensioning film 9 by a preset stroke. The specific preset stroke is not limited in this application, and those skilled in the art can select a slider 6 with positioning portions 11 with different inclination angles according to the tensioning force expanded by the pre-tensioning film 9.

[0032] In one of the specific embodiments, a spring 8 is further included; a spring 8 is installed between each slider 6 and the base 7; a spring 8 fixing hole is opened on the outer side of the slider 6; one end of the spring 8 is fixed to the spring 8 fixing hole, and the other end of the spring 8 contacts the inner wall of the base 7.

[0033] In one of the specific embodiments, the fixing seat 2 is screwed and fixed to the base 7; wherein, a clearance notch 12 is provided on the upper surface of the fixing seat 2, a threaded hole is provided in the clearance notch 12, and a matching threaded hole is provided at a corresponding position of the base 7; the pressing block 3 is screwed and fixed to the sliding block 6, the pressing block 3 is a cubic block, and the side projection of the sliding block 6 and the positioning portion 11 on the axis of the base 7 is "L" shaped.

[0034] In one specific embodiment, a limiting groove 10 is opened on the upper surface of the base 7; the slider 6 is a cubic block, and the limiting groove 10 is a square groove, which matches the structure of the slider 6, and the radial length of the limiting groove 10 in the pre-tensioning film 9 is slightly longer than the radial length of the slider 6 in the pre-tensioning film 9.

[0035] In one specific embodiment, a limiting groove 10 is provided on the upper surface of the base 7, the limiting groove 10 is a square groove, the slider 6 is a square block, the radial length of the limiting groove 10 in the pre-tensioning film 9 is slightly longer than the radial length of the slider 6 in the pre-tensioning film 9, the limiting groove 10 and the slider 6 are placed in the limiting groove 10 together, the base 7 extends upward to have an abutment enclosure, one end of the spring 8 abuts against the outer side of the slider 6, and the other end of the spring 8 abuts against the inner wall of the enclosure.

[0036] In the above embodiment, a spring 8 is added at the position where the base 7 contacts the slider 6, which can ensure that the multiple groups of sliders 6 and pressure blocks 3 that expand or contract radially can always be in a dynamic equilibrium state, and the multi-directional radial forces exerted on the diaphragm are more uniform, thereby increasing the accuracy of the tensioning force tested by the tensioning device of the capacitive diaphragm vacuum gauge of the present application.

[0037] In one of the specific embodiments, the clamping components are evenly arranged in the circumferential direction of the pre-tensioned film 9, and the number of groups of the pressing blocks 3 and the sliding blocks 6 is 4 to 10.

[0038] In one specific embodiment, the pre-tensioning film 9 is in the shape of a disc, has a thickness within a range of 0.01 mm to 0.3 mm, and a diameter between 30 mm and 150 mm, and is made of a constant elastic alloy.

[0039] In one specific embodiment, the base 7 is in a circular ring structure; the pressing assembly is in a circular ring structure; the diameter of the base 7 is larger than the diameter of the pressing assembly, and the base 7 extends upward with an abutment enclosure, the inner wall of which can contact the outer side of the slider 6.

[0040] On the other hand, the present application discloses a method for testing the tensioning force of a capacitance film vacuum gauge diaphragm, using the tensioning device of the capacitance film vacuum gauge diaphragm in any of the above-mentioned embodiments to test the tensioning force of the pre-tensioned diaphragm 9; using a clamping assembly to clamp multiple edges of the pre-tensioned diaphragm 9 in a normal state; using a corresponding tool to screw the upper slide 1 through a torque wrench, the upper slide 1 moves in the axial direction of the base 7, and the upper slide 1 contacts the clamping assembly, driving the clamping assembly to move radially of the pre-tensioned diaphragm 9; the pre-tensioned diaphragm 9 is tensioned as the clamping assembly expands outward, and the reading on the torque wrench is recorded, and the force applied by the torque wrench to the upper slide 1 is canceled, and the pre-tensioned diaphragm 9 returns to normal as the clamping assembly retracts inward; repeating "the pre-tensioned diaphragm 9 is tensioned as the clamping assembly expands outward, and the reading on the torque wrench is recorded, and the force applied by the torque wrench to the upper slide 1 is canceled, and the pre-tensioned diaphragm 9 returns to normal as the clamping assembly retracts inward;" and recording the reading on the torque wrench each time.

[0041] In this embodiment, the accuracy of the torque wrench is preferably 0.01 N·m, so as to ensure that the tension stress on the pre-tightening diaphragm 9 and more related parameters are more accurate in the final test.

[0042] By connecting to the fixing seat 2 and fixing the fixing seat 2 to the base 7 through the M3 hexagon socket screw 5, the pressing block 3 is fixed to the slider 6 through the M5 hexagon socket screw 4, and the pre-tightening diaphragm 9 is pressed; the slider 6 is placed on the base 7, and the slider 6 is limited by the limiting groove 10, and the slider 6 and the base 7 are pre-tightened by the compression spring 8. Further, the upper slide 1 is connected to the fixing seat 2 through a keyway or a thread, and has relative axial movement.

[0043] Further, the fixing seat 2 is fixed to the base 7 by an M3 hexagon socket screw, the pressure block 3 is fixed to the slider 6 by an M5 hexagon socket screw, the pre-tightening diaphragm 9 is compressed and tightened by the pressure block 3 and the slider 6, the pre-tightening film 9 is a film 9 to be pre-tightened, the shape is circular, the thickness is 0.01mm-0.3mm, the diameter is between ∮30-∮150mm, the material is: iron-nickel based alloy, stainless steel or 3J53 and other constant elastic alloys, the slider 6 is evenly distributed, placed on the base 7, and the slider 6 is limited by the limiting groove 10, so that the slider 6 can only move radially along the pre-tightening diaphragm 9, and the slider 6 and the base 7 are pre-tightened in the radial direction by the compression spring 8.

[0044] In order to further analyze the stress of the pre-tensioned diaphragm 9, the tension stress results of the existing tensioning method and the tensioning method of the present invention are further analyzed. The film diameter is ∮50mm, the thickness is 0.03mm, and the material is iron-nickel based alloy. The center is used as the reference to detect the stress values ​​of 100 evenly set reference points within the ∮45mm circle of the diaphragm. Then, the stress values ​​of every 10 reference points are averaged to obtain Table 1:

[0045]

[0046] Table 1 Stress value distribution and dispersion degree of the existing tensioning device and the tensioning mechanism of the embodiment of the present application when tensioning (unit: MPa)

[0047] The embodiments of the present application have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A tensioning device for a capacitance film vacuum gauge diaphragm, characterized in that: It includes a pressing component, a clamping component, a pre-tightening film and a base; The base is in a sheet-like structure; The clamping assembly is arranged on the base, and the clamping assembly includes two or more sets of pressing blocks and sliding blocks used in conjunction with each other; The pressing block cooperates with the sliding block up and down to clamp more than two edges of the pre-tightened film; The pressing assembly is arranged above the clamping assembly, and an upper slide seat is provided in the pressing assembly, and the upper slide seat is movably connected with the clamping assembly; The upper slide seat can reciprocate along the axial direction of the base to push the clamping assembly, so that the clamping assembly and the pre-tensioning film can expand or contract together in the radial direction of the pre-tensioning film.

2. The tensioning device for the diaphragm of a capacitance film vacuum gauge according to claim 1, characterized in that: A positioning portion is extended from the outer edge of the sliding block toward the pressing assembly, the positioning portion is tilted, and the positioning portion gradually tilts outward from the pressing assembly to the base; The upper slide seat can be in contact with the inner side of the positioning portion.

3. The tensioning device for the diaphragm of a capacitance film vacuum gauge according to claim 1, characterized in that: The pressing assembly also includes a fixing seat; The fixing seat is fixedly connected to the base, an outer side of the fixing seat is provided with an external thread, an inner side of the upper slide seat is provided with an internal thread, and the upper slide seat reciprocates in the axial direction of the base through the fixing seat.

4. The tensioning device for the diaphragm of a capacitance film vacuum gauge according to claim 2, characterized in that: The side wall of the upper slide seat is an inclined surface, and the inclined surface of the upper slide seat gradually increases at one end close to the base, and the inclined surface of the upper slide seat is in the same direction as the inclined direction of the positioning portion and matches each other.

5. The tensioning device for the diaphragm of a capacitance film vacuum gauge according to claim 1, characterized in that: Also includes springs; The spring is installed between each of the sliders and the base; A spring fixing hole is provided on the outer side of the sliding block; One end of the spring is fixed in the spring fixing hole, and the other end of the spring is in contact with the inner wall of the base.

6. The tensioning device for the diaphragm of a capacitance film vacuum gauge according to claim 2, characterized in that: The fixing seat is screwed and fixed to the base; Wherein, the upper surface of the fixing seat is provided with a clearance notch, a threaded hole is provided in the clearance notch, and the base is provided with a matching threaded hole at a corresponding position; The pressing block is screwed and fixed to the sliding block. The pressing block is a cubic block. The sliding block and the positioning portion are projected in an "L" shape on the side of the axis of the base.

7. The tensioning device for the diaphragm of a capacitance film vacuum gauge according to any one of claims 1 to 6, characterized in that: A limiting groove is provided on the upper surface of the base; The slider is a cubic block, and the limiting groove is a square groove, which matches the structure of the slider. The radial length of the limiting groove in the pre-tightening film is slightly longer than the radial length of the slider in the pre-tightening film.

8. The tensioning device for the diaphragm of a capacitance film vacuum gauge according to any one of claims 1 to 6, characterized in that: The clamping components are evenly arranged around the pre-tensioning film, and the number of groups of the pressure blocks and the sliders is 4 to 10; the pre-tensioning film is in the shape of a disc, with a thickness within the range of 0.01 mm to 0.3 mm and a diameter between 30 mm and 150 mm, and the material of the pre-tensioning film is a constant elastic alloy.

9. The tensioning device for the diaphragm of a capacitance film vacuum gauge according to any one of claims 1 to 6, characterized in that: The base is in a circular ring structure; The pressing component is in a circular ring structure; One end of the slider extends to the inner side of the circumference of the base; The diameter of the base is greater than the diameter of the pressing assembly, and an abutment enclosure is extended upward from the base, and the inner wall of the abutment enclosure can contact the outer side of the sliding block.

10. A method for testing the tension of a capacitance film vacuum gauge diaphragm, characterized in that: Using the tensioning device for the capacitance film vacuum gauge diaphragm according to any one of claims 1 to 9 to perform a tensioning force test on the pre-tensioned diaphragm; Using a clamping assembly to clamp multiple edges of the preloaded diaphragm in a normal state; The upper slide is screwed with a torque wrench using a corresponding tool, so that the upper slide moves in the axial direction of the base, and the upper slide contacts the clamping assembly, driving the clamping assembly to move in the radial direction of the pre-tightening diaphragm; The pre-tightening diaphragm is tensioned as the clamping assembly expands outward, the reading on the torque wrench is recorded, the force applied by the torque wrench to the upper slide is canceled, and the pre-tightening diaphragm returns to normal as the clamping assembly contracts inward; Repeat "the pre-tightening diaphragm is tightened as the clamping assembly expands outward, and the reading on the torque wrench is recorded. The force applied by the torque wrench to the upper slide is canceled, and the pre-tightening diaphragm returns to normal as the clamping assembly contracts inward;" and record the reading on the torque wrench each time.

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