Filter spin coating preparation method

Abstract

The application discloses a filter spin coating preparation method, comprising: obtaining the electronic transition characteristic data and intermolecular force data of a precursor solution, determining the initial aggregation state parameters and intermolecular interaction intensity parameters of the precursor molecules; performing dielectric constant regulation treatment on the surface of a substrate to form a dielectric constant gradient distribution and a periodic microstructure; performing spin coating treatment on a functionalized substrate, applying an electric field, an acoustic field and a light field, and adjusting the field intensity and spatial distribution; obtaining the light intensity signal and polarized light detection signal of the film at different scattering angles, and analyzing the anisotropy characteristics of the scattering pattern; and adjusting the rotation speed, temperature field and air flow field according to the spatial distribution data of the molecular orientation, and obtaining the filter through temperature reduction and solidification. The technical scheme of the application obtains the initial state information of the precursor molecules through orthogonal double light path detection, dynamically regulates the molecular orientation by using the synergistic effect of multiple fields, combines real-time monitoring and feedback optimization, and realizes accurate control of the molecular arrangement.

Description

Technical Field

[0001] This invention relates to the field of optical thin film preparation technology, and in particular to a method for preparing optical filters by spin coating. Background Technology

[0002] Optical filters are optical elements that selectively transmit or absorb light of different wavelengths, playing a crucial role in optical communication, displays, and imaging. Spin-coating is a commonly used thin-film preparation method for optical filters. Its basic principle involves dropwise adding a solution containing precursor molecules onto a rotating substrate. Through the combined effects of centrifugal force and surface tension, the solution spreads uniformly to form a thin film. Subsequently, solvent evaporation and curing processes yield the optical filter with specific optical properties. This method offers advantages such as simple processing, low cost, and wide applicability, making it a vital technology for the large-scale production of optical filters.

[0003] However, current spin-coating techniques for optical filters still face significant challenges in achieving precise control at the molecular scale. Existing technologies primarily focus on the macroscopic properties of the thin film, such as thickness uniformity and surface morphology, but lack effective monitoring of the dynamic behavior of precursor molecules during spin-coating. Especially in environments with rapid solvent evaporation, precursor molecules undergo complex rearrangements and aggregations. This disorder in the microstructure often leads to a decrease in the spectral selectivity of the final product. Due to the lack of real-time, precise molecular-scale monitoring methods, existing processes struggle to achieve precise control over molecular arrangement, which has become a key bottleneck restricting the improvement of filter performance. Particularly in high-end optical applications, this disordered arrangement at the molecular level directly affects key indicators such as bandwidth, transmittance, and cutoff characteristics of the filter, severely limiting the application range and performance improvement of the product. Summary of the Invention

[0004] The main objective of this invention is to solve the technical problem that the lack of in-situ monitoring and precise control of the dynamic rearrangement behavior of precursor molecules in existing filter spin-coating preparation technology seriously affects the spectral selectivity of filters.

[0005] The first aspect of this invention provides a method for spin-coating a filter, the method comprising:

[0006] Electronic transition characteristic data and intermolecular interaction force data of precursor solution are obtained. Based on the electronic transition characteristic data and intermolecular interaction force data, the initial aggregation state parameters and intermolecular interaction strength parameters of precursor molecules are determined, and quantitative characterization data of precursor molecule spatial conformation are obtained.

[0007] Based on the quantitative characterization data, the dielectric constant of the substrate surface is controlled to form a dielectric constant gradient distribution from the center to the edge, and a periodic microstructure is formed on the substrate surface to obtain a functionalized substrate with directional force.

[0008] The functionalized substrate is spin-coated. During the spin-coating process, a radially varying electric field, a directional acoustic field, and a preset distributed optical field are applied to the precursor molecules. The intensity and spatial distribution of the electric field, the intensity and spatial distribution of the acoustic field, and the intensity and spatial distribution of the optical field are adjusted according to the molecular orientation state to obtain a thin film with molecular orientation.

[0009] The light intensity signal and polarized light detection signal of the thin film at different scattering angles are obtained. The anisotropic characteristics of the scattering pattern are analyzed based on the light intensity signal and polarized light detection signal to obtain the spatial distribution data of molecular orientation in the thin film.

[0010] Based on the spatial distribution data of the molecular orientation, the time-varying curve of the rotation speed is adjusted, and the distribution parameters of the temperature field and airflow field are controlled. A filter with a preset molecular orientation structure is obtained through a cooling and curing process.

[0011] Optionally, the step of acquiring electronic transition characteristic data and intermolecular force data of the precursor solution, and determining the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules based on the electronic transition characteristic data and intermolecular force data, to obtain quantitative characterization data of the spatial conformation of the precursor molecules, includes:

[0012] The precursor solution was simultaneously subjected to orthogonal dual-optical-path detection, wherein the first optical path acquired electronic transition characteristic data in the wavelength range of 200-800nm, and the second optical path acquired intermolecular interaction force data in the wavelength range of 800-2500nm.

[0013] Peak analysis is performed on the electronic transition characteristic data to obtain the peak position, peak intensity ratio and peak shape index of the main absorption peak, and the electronic transition characteristic spectrum of the precursor molecule is obtained.

[0014] The intermolecular force data are analyzed by characteristic peaks to obtain the absorption peak area ratio and peak position shift of hydrogen bonding and van der Waals forces, thus obtaining the interaction characteristic spectrum of the precursor molecules.

[0015] Based on the orthogonal correlation analysis of the electronic transition characteristic spectrum and the interaction characteristic spectrum, the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules are calculated.

[0016] Within a temperature range of 25-45℃, temperature responsiveness analysis was performed on the initial aggregation state parameters and intermolecular interaction strength parameters to obtain quantitative characterization data of the precursor molecular spatial conformation.

[0017] Optionally, the simultaneous orthogonal dual-optical-path detection of the precursor solution includes: the first optical path acquiring electronic transition characteristic data in the wavelength range of 200-800 nm, and the second optical path acquiring intermolecular force data in the wavelength range of 800-2500 nm, including:

[0018] Electronic transition characteristics are acquired in the first detection region of the orthogonal optical path system. The first detection region is a spatial region that is only illuminated by the first optical path. Reference electronic transition characteristic data in the wavelength range of 200-800nm ​​are obtained.

[0019] Intermolecular forces are collected in the second detection region of the orthogonal optical path system. The second detection region is a spatial region that is only irradiated by the second optical path, and reference intermolecular force data in the wavelength range of 800-2500nm are obtained.

[0020] Dual-spectral synchronous acquisition is performed on the cross-detection region in the orthogonal optical path system. The cross-detection region is a spatial region that is simultaneously irradiated by the first optical path and the second optical path. Coupled electronic transition characteristic data in the wavelength range of 200-800nm ​​and coupled intermolecular interaction force data in the wavelength range of 800-2500nm are obtained.

[0021] The reference electronic transition feature data and the coupled electronic transition feature data are synthesized using a spatial weighting algorithm to obtain electronic transition feature data in the wavelength range of 200-800nm.

[0022] The baseline intermolecular force data and coupled intermolecular force data were synthesized using a spatial weighting algorithm to obtain intermolecular force data in the wavelength range of 800-2500 nm.

[0023] Optionally, the step of performing dielectric constant modulation treatment on the substrate surface based on the quantitative characterization data to form a dielectric constant gradient distribution from the center to the edge of the substrate surface, and forming a periodic microstructure on the substrate surface to obtain a functionalized substrate with directional forces, includes:

[0024] Based on the initial aggregation state parameters and intermolecular interaction strength parameters in the quantitative characterization data, the dielectric constant decay function from the center to the edge of the substrate surface is calculated to obtain the spatial distribution curve of the dielectric constant.

[0025] The substrate surface is subjected to gradient ion implantation, and the energy distribution and dose distribution of ion implantation are controlled according to the dielectric constant spatial distribution curve to obtain a substrate surface with a dielectric constant gradient.

[0026] Based on the intermolecular interaction strength parameters, the spatial period and depth parameters of the microstructure on the substrate surface are calculated to obtain the configuration data of the periodic microstructure.

[0027] The substrate surface with a dielectric constant gradient is subjected to periodic microstructure processing, and the periodic spacing and depth distribution of the microstructure are controlled according to the configuration data to obtain a periodic microstructure.

[0028] The surface charge distribution of the periodic microstructure is tested to obtain spatial distribution data of electrostatic force field and shear force field, resulting in a functionalized substrate with directional force.

[0029] Optionally, the step of calculating the dielectric constant decay function from the center to the edge of the substrate surface based on the initial aggregation state parameters and intermolecular interaction strength parameters in the quantitative characterization data to obtain the spatial distribution curve of the dielectric constant includes:

[0030] Based on the initial aggregation state parameters and intermolecular interaction strength parameters, the polarizability and dipole moment of the precursor molecules are quantitatively analyzed, and the variation law of intermolecular electrostatic interaction potential energy with distance is obtained, thus obtaining molecular polarization characteristic data and potential energy distribution function.

[0031] Based on the molecular polarization characteristic data and potential energy distribution function, a correlation equation between the dielectric constant of the substrate surface and molecular orientation is established, and the dielectric constant response function is obtained.

[0032] Radial coordinate transformation and temperature correction are applied to the dielectric constant response function. The gradual change of dielectric constant from the center to the edge of the substrate surface is calculated within the temperature range of 25-45℃ to obtain the spatial distribution curve of dielectric constant.

[0033] Optionally, the step of establishing a correlation equation between the dielectric constant of the substrate surface and the molecular orientation based on the molecular polarization characteristic data and potential energy distribution function, and obtaining the dielectric constant response function, includes:

[0034] Based on molecular polarization characteristic data, a first equation relating the dielectric constant of the substrate surface to the molecular polarizability is constructed, specifically including:

[0035] ε = 1 + 4πNα / (1 - 4πNα / 3);

[0036] Where ε is the dielectric constant of the substrate surface, π is pi, N is the molecular number density per unit volume, and α is the molecular polarizability.

[0037] Based on the potential energy distribution function, a second equation relating the molecular orientation angle to the electrostatic potential energy is established, specifically including:

[0038] U = -pEcosθ;

[0039] Where U is the electrostatic potential energy, p is the molecular dipole moment, E is the local electric field intensity, and θ is the molecular orientation angle;

[0040] The dielectric constant response function is obtained by coupling the first and second relational equations, specifically including:

[0041] ε(r)= +( - )exp(-r / )·L(pE / kT);

[0042] Where ε(r) is the dielectric constant at radial position r, and r is the radial distance from the center of the substrate. For characteristic attenuation length, The dielectric constant of optical frequency, ε is the static dielectric constant, exp is the natural exponential function, L is the Langevin function, p is the molecular dipole moment, E is the local electric field intensity, k is the Boltzmann constant, and T is the temperature.

[0043] Optionally, the spin-coating process on the functionalized substrate involves applying a radially varying electric field, a directional acoustic field, and a pre-distributed optical field to the precursor molecules during spin-coating. The intensity and spatial distribution of the electric field, the acoustic field, and the optical field are adjusted according to the molecular orientation state to obtain a thin film with molecularly oriented alignment.

[0044] An initial rotational speed is applied to the functionalized substrate. Within a time interval of [0, 60) seconds, the electric field intensity is gradient-controlled according to the rotation radius, so that the electric field intensity decays exponentially from the center of the spin-coated region to the edge, and the spatial distribution data of the electric field is obtained.

[0045] Based on the spatial distribution data of the electric field, the sound field is phase-modulated so that the sound pressure intensity increases periodically from the center to the edge of the spin coating area, and the sound pressure amplitude is adjusted according to a gradient of 5-10 kPa / cm within the time interval of [60, 120) seconds to obtain the spatial distribution data of the directional sound field.

[0046] The spatial distribution data of the directional sound field is parameter matched, and the wavelength of the light field is periodically modulated in the range of 400-700nm within the time interval of [120,180] seconds. The light field intensity is made to form a decreasing distribution in the radial direction opposite to the sound pressure gradient, so as to obtain the preset light field distribution data.

[0047] Based on the molecular orientation state detection signal, the field intensity factor of the spatial distribution data of the electric field, the sound pressure factor of the spatial distribution data of the directional sound field, and the light intensity factor of the preset light field distribution data are adjusted according to preset weighting coefficients to obtain a thin film with molecular orientation.

[0048] Optionally, the step of adjusting the field intensity factor of the spatial distribution data of the electric field, the sound pressure factor of the spatial distribution data of the directional sound field, and the light intensity factor of the preset light field distribution data according to preset weighting coefficients based on the molecular orientation state detection signal to obtain a thin film with molecularly oriented alignment includes:

[0049] Based on the molecular orientation state detection signal, the deviation vector of electric field intensity, the fluctuation coefficient of sound pressure intensity, and the modulation depth of light field intensity are calculated to obtain the dynamic response characteristics of the three fields.

[0050] Orthogonal decoupling analysis is performed on the dynamic response characteristics of the three fields to establish an inter-field interference elimination function and obtain the orthogonal parameter matrix for field intensity control.

[0051] Calculate the normalized weighting coefficients of the electric field distribution data based on the orthogonal parameter matrix. Normalized weighting coefficients for directional sound field distribution data Normalized weighting coefficients of the preset light field distribution data and make + + =1, thus obtaining the weight coefficient set of the three-field coordinated regulation;

[0052] Based on the weighting coefficient set, the electric field strength factor, the sound pressure factor of the sound field, and the light intensity factor of the light field are dynamically compensated to obtain a thin film with molecular orientation.

[0053] Optionally, acquiring the light intensity signal and polarized light detection signal of the thin film at different scattering angles, and analyzing the anisotropic characteristics of the scattering pattern based on the light intensity signal and polarized light detection signal to obtain the spatial distribution data of molecular orientation in the thin film, includes:

[0054] Within the 0-360 degree angle range, the scattered light intensity of the thin film was collected at equal intervals to obtain light intensity data at 36 different scattering angles, and the scattered light intensity distribution curve of the thin film was obtained.

[0055] Fourier analysis was performed on the scattered light intensity distribution curve to extract the second-order and fourth-order symmetry coefficients, thereby obtaining the anisotropic characteristic parameters of the thin film.

[0056] The thin film is subjected to polarization state modulation scanning to obtain scattering signals in both horizontal and vertical polarization directions. The polarization difference is calculated to obtain polarization characteristic data of molecular orientation.

[0057] Based on the anisotropic characteristic parameters and polarization characteristic data, correlation calculations are performed to establish a spatial statistical function of molecular orientation, thereby obtaining the spatial distribution data of molecular orientation in the thin film.

[0058] Optionally, the step of adjusting the time-varying curve of the rotation speed based on the spatial distribution data of the molecular orientation, and controlling the distribution parameters of the temperature field and airflow field, to obtain a filter with a preset molecular orientation structure through a cooling and curing process, includes:

[0059] Based on the spatial distribution data of the molecular orientation, a piecewise control function for the rotation speed is established. The rotation speed is linearly reduced from 3000 rpm to 1000 rpm in the time interval of [0, 60) seconds, and a constant rotation speed is maintained in the time interval of [60, 120) seconds, thus obtaining the time-varying curve of the rotation speed.

[0060] Radial uniformity analysis was performed on the spatial distribution data of the molecular orientation. The radial distribution of the temperature field was adjusted according to the uniformity deviation value to form a linear temperature gradient of 25-45℃ from the center to the edge of the spin-coated area, and the temperature field distribution parameters were obtained.

[0061] Based on the spatial distribution data of molecular orientation and the temperature field distribution parameters, the airflow velocity is controlled to form a logarithmically decreasing distribution of 0.5-2 m / s from the center to the edge of the spin coating area, thus obtaining the airflow field distribution parameters.

[0062] The molecular orientation degree of the film is detected. After confirming that the orientation degree reaches the preset threshold, it is cured by cooling at a cooling rate of 5℃ / min to obtain a filter with a preset molecular orientation structure.

[0063] This application embodiment employs a dual characterization method on the precursor solution, simultaneously acquiring electronic transition characteristic data and intermolecular force data, thereby accurately assessing the initial aggregation state of the precursor molecules and the strength of intermolecular interactions. This combined detection method not only reflects the molecular aggregation state but also quantitatively characterizes the strength of intermolecular interactions, laying the foundation for subsequent precise regulation.

[0064] After obtaining precise information at the molecular level, this scheme employs dielectric constant gradient modulation technology to modify the substrate surface. By forming a dielectric constant gradient distribution from the center to the edge on the substrate surface, combined with the construction of periodic microstructures, directional forces are generated at the molecular scale. The physical essence of this surface design is to utilize the synergistic effect of the electrostatic force field generated by the dielectric constant gradient and the shear force field generated by the microstructure to provide a driving force for the directional alignment of molecules.

[0065] A three-field synergistic control mechanism was introduced during spin coating. By simultaneously applying a radially varying electric field, a directional acoustic field, and a pre-distributed optical field, a multi-dimensional control system for molecular orientation was established. Specifically, the electric field primarily controls the orientation of charged groups through electrostatic interactions, the acoustic field regulates the spatial distribution of molecules through sound pressure gradients, and the optical field influences the conformation of molecules by altering their optical properties. The synergistic effect of these three fields significantly enhances the ability to control molecular arrangement.

[0066] To achieve real-time monitoring of molecular alignment, this method acquires light intensity signals and polarized light detection signals at different scattering angles, analyzes the anisotropic characteristics of the scattering pattern, and thus obtains spatial distribution data of molecular orientation. The physical basis of this detection method is that the degree of order in molecular orientation directly affects the angular distribution and polarization characteristics of the scattered light.

[0067] Finally, this scheme establishes a process parameter optimization mechanism based on molecular orientation feedback. By adjusting the time-varying curve of the rotation speed and precisely controlling the distribution parameters of the temperature and airflow fields, dynamic optimization of molecular arrangement is achieved. Especially in the cooling and curing stage, the ordered molecular arrangement structure is successfully stabilized through the coordinated control of temperature and airflow. This multi-parameter coordinated control method effectively solves the problem of disordered molecular arrangement in existing technologies and significantly improves the spectral selectivity of the filter. Attached Figure Description

[0068] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0069] Figure 1 This is a schematic diagram of an embodiment of the filter spin-coating preparation method in this invention.

[0070] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0071] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0072] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0073] Furthermore, the use of terms such as "first" and "second" in this invention is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the term "and / or" throughout the text includes three solutions; taking A and / or B as an example, it includes technical solution A, technical solution B, and a technical solution that simultaneously satisfies A and B. Furthermore, the technical solutions of various embodiments can be combined with each other, provided that they are feasible for those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0074] One embodiment of this application provides a method for preparing a filter by spin coating. Figure 1 This is a flowchart illustrating a method for spin-coating a filter according to an embodiment of this application. In this embodiment, the method includes:

[0075] Please see Figure 1 The electronic transition characteristic data and intermolecular interaction force data of the precursor solution are obtained. Based on the electronic transition characteristic data and intermolecular interaction force data, the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules are determined, and quantitative characterization data of the spatial conformation of the precursor molecules are obtained.

[0076] In one embodiment of the present invention, the step of acquiring electronic transition characteristic data and intermolecular force data of the precursor solution, and determining the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules based on the electronic transition characteristic data and intermolecular force data to obtain quantitative characterization data of the spatial conformation of the precursor molecules includes:

[0077] The precursor solution was simultaneously subjected to orthogonal dual-optical-path detection, wherein the first optical path acquired electronic transition characteristic data in the wavelength range of 200-800nm, and the second optical path acquired intermolecular interaction force data in the wavelength range of 800-2500nm.

[0078] Peak analysis is performed on the electronic transition characteristic data to obtain the peak position, peak intensity ratio and peak shape index of the main absorption peak, and the electronic transition characteristic spectrum of the precursor molecule is obtained.

[0079] The intermolecular force data are analyzed by characteristic peaks to obtain the absorption peak area ratio and peak position shift of hydrogen bonding and van der Waals forces, thus obtaining the interaction characteristic spectrum of the precursor molecules.

[0080] Based on the orthogonal correlation analysis of the electronic transition characteristic spectrum and the interaction characteristic spectrum, the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules are calculated.

[0081] Within a temperature range of 25-45℃, temperature responsiveness analysis was performed on the initial aggregation state parameters and intermolecular interaction strength parameters to obtain quantitative characterization data of the precursor molecular spatial conformation.

[0082] It should be noted that in the orthogonal dual-path system, optical isolation technology is employed to ensure that the two detection optical paths do not interfere with each other. Specifically, in implementation, a dichroic mirror with high reflectivity and high transmittance can be used. This element is designed to have over 95% reflectivity for the 200-800 nm wavelength band and over 95% transmittance for the 800-2500 nm wavelength band, ensuring that light signals of different wavelengths are effectively separated before entering their respective detectors. Furthermore, optical isolation can be combined with spatial filtering devices and precision mechanical shielding. By setting independent sampling areas within the sample cell, interference from side leakage and scattered light is avoided when collecting ultraviolet-visible and near-infrared light signals, thus ensuring the independence and accuracy of the signals from each detection optical path.

[0083] After acquiring the electronic transition characteristic data of the first optical path, Gaussian and Lorentz curve fitting algorithms were used for peak analysis during data processing. The specific algorithm used was determined based on the actual measured peak characteristics. Specifically, when the acquired absorption peaks exhibited high symmetry and the peak width was mainly determined by the instrument resolution, the Gaussian fitting algorithm was selected; while when the peaks exhibited long tails and the peak width was significantly affected by molecular lifetime effects, the Lorentz fitting algorithm was used. When using these algorithms, the data was first subjected to noise filtering and baseline correction. The corrected data was then used to solve for the fitting parameters using the least squares method. An iteration termination condition was introduced during the fitting process, such as setting the rate of change of the residual sum of squares to be less than... Alternatively, an R² value of 0.98 or higher can be used as a convergence criterion. For example, in actual detection, when an absorption peak is detected at 350 nm and its shape initially shows a Gaussian distribution, the Gaussian fitting algorithm will be automatically invoked to calculate the precise peak position, peak intensity ratio, and peak shape index, thereby forming a quantitative characteristic spectrum reflecting the molecular electronic transition behavior.

[0084] The processing of intermolecular force data acquired through the second optical path involves integral calculation and automatic correction of characteristic absorption peaks. The integration algorithm employs numerical integration methods based on trapezoidal integrals or Simpson's rule to accurately calculate the area of ​​the absorption peaks. Simultaneously, the automatic correction method relies on a pre-established standard reference spectral library. By comparing known peak positions in standard samples, the system performs linear interpolation correction on the actual measured peak position shift, ensuring consistency between the data and the standard curve. For example, when a characteristic peak is detected near 1200 nm, if the peak should be located at 1198 nm according to the standard reference spectrum, the system will automatically perform peak position shift correction. The corrected data is used to calculate the absorption peak area ratio of hydrogen bonds and van der Waals forces, thus forming a quantitatively meaningful characteristic spectrum of intermolecular interactions.

[0085] After independently processing the two sets of data, orthogonal correlation analysis was used to comprehensively process the electronic transition characteristic spectrum and the intermolecular force characteristic spectrum to further calculate the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules. This process first utilizes a multivariate statistical regression model to establish linear correlations between the spectral parameters using the least squares method, initially obtaining the linear regression coefficients for each parameter. Subsequently, nonlinear fitting techniques are introduced, such as using the Levenberg-Marquardt algorithm to iteratively optimize the preliminary model to address nonlinear relationships present in the data. The entire analysis process is implemented in data processing software. The software first performs correlation tests on the input multidimensional data, calculates the Pearson correlation coefficient and p-value to ensure statistical significance between parameters, and then automatically adjusts the model parameters until a correlation model that meets the preset goodness-of-fit criteria (e.g., an adjusted R² value greater than 0.95) is obtained. Through this orthogonal correlation analysis, not only can the molecular aggregation state be quantified, but the actual numerical values ​​of intermolecular interaction strength can also be reflected.

[0086] Finally, in the temperature response test, the initial aggregation state parameters and intermolecular interaction strength parameters were systematically collected within a temperature range of 25 to 45°C, and statistical regression analysis was performed on the collected data. Specifically, during the experiment, a constant temperature bath was used in conjunction with a PID temperature control system to ensure that the temperature remained stable within the set range, and multiple sets of data were repeatedly sampled at each temperature point. For these data, a linear regression method was first used to fit the relationship between temperature and each parameter. If the fitting effect was not good, a quadratic or exponential regression model was used to refit the data. The specific fitting algorithm used the least squares method and iterative optimization technique, and the mean square error and goodness of fit were set as evaluation indicators. For example, the initial aggregation state parameters measured at 35°C showed a significant change compared to those at 30°C. If a large fitting residual was found after linear regression analysis, a multinomial regression was further used to refine the data to obtain a response curve that accurately describes the trend of temperature influence. Through this statistical regression analysis method, the obtained temperature response data can clearly reflect the spatial conformational changes of precursor molecules at different temperatures, providing accurate numerical basis for the adjustment of subsequent process parameters.

[0087] In one embodiment of the present invention, the simultaneous orthogonal dual-optical-path detection of the precursor solution includes: the first optical path acquiring electronic transition characteristic data in the wavelength range of 200-800 nm, and the second optical path acquiring intermolecular force data in the wavelength range of 800-2500 nm, comprising:

[0088] Electronic transition characteristics are acquired in the first detection region of the orthogonal optical path system. The first detection region is a spatial region that is only illuminated by the first optical path. Reference electronic transition characteristic data in the wavelength range of 200-800nm ​​are obtained.

[0089] Intermolecular forces are collected in the second detection region of the orthogonal optical path system. The second detection region is a spatial region that is only irradiated by the second optical path, and reference intermolecular force data in the wavelength range of 800-2500nm are obtained.

[0090] Dual-spectral synchronous acquisition is performed on the cross-detection region in the orthogonal optical path system. The cross-detection region is a spatial region that is simultaneously irradiated by the first optical path and the second optical path. Coupled electronic transition characteristic data in the wavelength range of 200-800nm ​​and coupled intermolecular interaction force data in the wavelength range of 800-2500nm are obtained.

[0091] The reference electronic transition feature data and the coupled electronic transition feature data are synthesized using a spatial weighting algorithm to obtain electronic transition feature data in the wavelength range of 200-800nm.

[0092] The baseline intermolecular force data and coupled intermolecular force data were synthesized using a spatial weighting algorithm to obtain intermolecular force data in the wavelength range of 800-2500 nm.

[0093] It should be noted that, in this embodiment, the orthogonal optical path system divides the sample area into three non-overlapping but interconnected detection zones: a first detection zone, a second detection zone, and a cross-detection zone. The system achieves strict optical isolation through precisely arranged optical elements. Firstly, in the first detection zone, only ultraviolet-visible light within the 200-800 nm wavelength band is allowed to pass through. A dichroic mirror with high reflectivity and high transmittance, along with precision optical shielding, ensures that this area is only illuminated by the first optical path, thereby enabling the acquisition of reference electronic transition characteristic data. Simultaneously, in the second detection zone, a near-infrared filter and shielding device specifically designed for the 800-2500 nm wavelength band are configured, ensuring that this area is only illuminated by the second optical path, thereby acquiring reference intermolecular force data. The cross-detection zone, however, allows simultaneous illumination by both the first and second optical paths. Using a dual-channel spectrometer, it is possible to simultaneously acquire coupled electronic transition characteristic data within the 200-800 nm wavelength band and coupled intermolecular force data within the 800-2500 nm wavelength band. The detection zone is physically strictly partitioned through optical isolation elements, spatial filtering devices, and mechanical shielding. The boundaries between each zone are meticulously designed to ensure that the acquired signals are clearly distinguishable in space and to obtain accurate spatial weighting factors in subsequent data synthesis.

[0094] The electronic transition characteristic data collected in the first detection zone are first processed by a preprocessing module for noise filtering and baseline correction. A digital conversion device then transforms the continuous spectral signal into high-precision data, which is then analyzed using a calibrated spectrometer. For peak analysis within this region, a Gaussian or Lorentz curve fitting algorithm is selected based on the morphology of the spectral data. Specifically, when the peak exhibits high symmetry and is primarily affected by instrument resolution, the system automatically employs a Gaussian fitting algorithm; while when the peak exhibits a long tail and is significantly influenced by molecular lifetime effects, a Lorentz fitting algorithm is used. This algorithm uses the least squares method to iteratively optimize the fitting parameters and introduces a residual sum-of-squares convergence condition and an R² value evaluation index to ensure that the fitting accuracy meets the preset standard. For example, in actual measurements, when a significant absorption peak is detected at 350 nm, the precise peak position, peak intensity ratio, and peak shape index are calculated using Gaussian fitting. The resulting electronic transition characteristic spectrum is then saved as baseline data for subsequent synthesis with data from the cross-detection zone.

[0095] In the second detection zone, the processing of intermolecular force data first involves preprocessing the acquired near-infrared spectral signals to ensure the data is free from background noise interference. The preprocessed data is then analyzed using numerical integration methods based on trapezoidal integrals or Simpson's rule to calculate the absorption peak area. Simultaneously, using a pre-established standard reference spectral library, an automatic correction algorithm is employed to linearly interpolate and correct the detected peak positions, eliminating minor deviations caused by instrument drift or local environmental influences. For example, in a particular detection, when the absorption peak area of ​​a characteristic peak near 1200 nm is calculated through integration, and the peak position is corrected by comparison with a standard spectrum, the resulting intermolecular force characteristic spectrum is saved as baseline data. This data accurately reflects the molecular interactions under hydrogen bonding and van der Waals forces, providing an accurate baseline index for subsequent data synthesis.

[0096] Data acquisition in the cross-detection region is achieved through a dual-spectral synchronous detection system. This region is simultaneously illuminated by the first and second optical paths, and the acquired data includes signals from both electronic transitions and intermolecular forces. This region employs a dual-channel detector with optical separation elements to acquire signals from the two wavelength bands through different channels, and time synchronization technology ensures that the data acquisition sequence of the two channels is consistent. Data processing in the cross-detection region is similar to that of the baseline data, undergoing preprocessing, peak resolution, and integral correction. However, the obtained spectral data includes the coupling effect of the two optical information in the sample region. This coupled data is crucial for correcting spatial inhomogeneities and improving the accuracy of the final data.

[0097] After acquiring the baseline and coupled data, a spatial weighting algorithm is used to synthesize the respective data to obtain unified and representative spectral data. For electronic transition characteristic data in the 200-800 nm wavelength range, the baseline electronic transition characteristic data obtained in the first detection area and the coupled electronic transition characteristic data in the cross detection area are first synthesized using a spatial weighting algorithm. This algorithm sets weight coefficients for different regions, which are dynamically adjusted based on the signal-to-noise ratio, acquisition location, and reference standard data in each detection area, and generates the final electronic transition characteristic data through a weighted average. The implementation process of this weighting algorithm involves calculating the weighting coefficient for each sampling point and then fusing the data from each sampling point point by point. This ensures that the final output data reflects the accuracy of the baseline data and incorporates the local spatial variation information that may exist in the cross area, thereby eliminating data deviations caused by regional differences. For example, in a certain experiment, when the data in the first detection area shows a high signal-to-noise ratio at a certain position, while the data in the cross detection area has a slight deviation due to local scattering, the system automatically assigns a higher weight to the data in the first detection area, thereby ensuring that the synthesized electronic transition characteristic data is more accurate.

[0098] For intermolecular force data in the 800-2500 nm wavelength range, a similar spatial weighting algorithm is used to synthesize the baseline intermolecular force data collected in the second detection zone and the coupled intermolecular force data collected in the cross-detection zone. This algorithm also determines the weighting coefficients for each region based on the signal-to-noise ratio, local data stability, and conformity with the standard reference data, and achieves fine fusion of the two sets of data through a mathematical model. The data processing software calculates the corresponding weight for each spatial sampling point and generates the overall intermolecular force characteristic spectrum using a weighted summation method, ensuring that the synthesized data accurately reflects the balanced distribution and changing trend of molecular interactions throughout the sample. For example, when the signal in the second detection zone is weak due to a slightly lower instrument response in a certain region, the supplementary information provided by the coupled data in the cross-detection zone can be amplified by the weighting algorithm, ensuring that the final generated intermolecular force characteristic data maintains high accuracy and stability.

[0099] In summary, the orthogonal optical path system employed in this embodiment achieves independent acquisition of reference and coupled data by setting strictly distinct first, second, and cross-detection zones. Then, a spatial weighting algorithm is used to scientifically synthesize the individual data, eliminating data errors caused by spatial inhomogeneities and differences in instrument response. The entire process, from sample irradiation and data acquisition to data processing, is conducted under strictly controlled experimental conditions. Parameters for each step are set according to pre-calibrated standards and precise mathematical models, ensuring that the final output spectral data accurately reflects the electronic transition characteristics of precursor molecules in the 200-800 nm wavelength range and accurately reflects the intermolecular force characteristics in the 800-2500 nm wavelength range. This implementation method provides a foundation for the subsequent quantitative calculation of the precursor molecule aggregation state and interaction strength, and also provides accurate and reliable data support for the dynamic control of key process parameters in the entire filter spin-coating preparation method.

[0100] Please continue reading. Figure 1 Based on the quantitative characterization data, the dielectric constant of the substrate surface is controlled to form a dielectric constant gradient distribution from the center to the edge, and a periodic microstructure is formed on the substrate surface to obtain a functionalized substrate with directional force.

[0101] In one embodiment of the present invention, the step of performing dielectric constant modulation treatment on the substrate surface based on the quantitative characterization data to form a dielectric constant gradient distribution from the center to the edge on the substrate surface, and forming a periodic microstructure on the substrate surface to obtain a functionalized substrate with directional forces, includes:

[0102] Based on the initial aggregation state parameters and intermolecular interaction strength parameters in the quantitative characterization data, the dielectric constant decay function from the center to the edge of the substrate surface is calculated to obtain the spatial distribution curve of the dielectric constant.

[0103] The substrate surface is subjected to gradient ion implantation, and the energy distribution and dose distribution of ion implantation are controlled according to the dielectric constant spatial distribution curve to obtain a substrate surface with a dielectric constant gradient.

[0104] Based on the intermolecular interaction strength parameters, the spatial period and depth parameters of the microstructure on the substrate surface are calculated to obtain the configuration data of the periodic microstructure.

[0105] The substrate surface with a dielectric constant gradient is subjected to periodic microstructure processing, and the periodic spacing and depth distribution of the microstructure are controlled according to the configuration data to obtain a periodic microstructure.

[0106] The surface charge distribution of the periodic microstructure is tested to obtain spatial distribution data of electrostatic force field and shear force field, resulting in a functionalized substrate with directional force.

[0107] It should be noted that in this embodiment, the spatial decay of the substrate surface dielectric constant is quantitatively calculated using the initial aggregation state parameters and intermolecular interaction strength parameters obtained from the quantitative characterization data, as expressed by the following formula:

[0108] ε(r)= +( - )exp(-r / );

[0109] Where ε(r) represents the dielectric constant at a distance r from the center on the substrate surface. It is the static dielectric constant at the center of the substrate (typically 10 to 20). The dielectric constant at optical frequencies (typically ranging from 2 to 5), and The characteristic attenuation length is typically determined to be in the range of 10 to 50 micrometers after experimental fitting.

[0110] This mathematical model transforms the aggregation state of precursor molecules in solution and information on intermolecular interactions into a spatial distribution curve of the dielectric constant on the substrate surface, ensuring accurate dielectric constant gradient data before ion implantation and seamless integration with subsequent process parameters.

[0111] After obtaining the spatial distribution curve of the dielectric constant, gradient ion implantation was performed on the substrate surface. The ion implantation process employed an ion beam device, whose operating parameters were dynamically adjusted based on the dielectric constant decay function. Specifically, the ion energy was set within the range of 5 to 30 keV, and the ion implantation dose was controlled at 1× Up to 1× Between ions per square centimeter. The ion implantation device uses a scanning control system to regionally treat the substrate surface, ensuring that the central region of the substrate receives the highest dose (e.g., 1×). (ions / cm²), and gradually decrease towards the edge to the lowest dose (e.g., 1×). (Ions / cm²), thus physically forming a dielectric constant gradient that decays from the center to the edge. During this process, real-time monitoring of the ion beam parameters and comparison with the spatial distribution curve of the dielectric constant ensures that the ion energy distribution and implantation dose closely match the predetermined model, providing a stable foundation for subsequent microstructure fabrication.

[0112] Based on the intermolecular interaction strength parameters, numerical simulation methods are further used to calculate the configuration data of the microstructure on the substrate surface. Specifically, the following mathematical mapping relationship is established to transform the intermolecular interaction strength I into the microstructure period L and the microstructure depth D:

[0113] L = A·I + B;

[0114] D=C·I+ ;

[0115] Where A and B are calibration constants, typically A is approximately 10 nanometers / unit, B is approximately 100 nanometers, and C and... Experiments confirmed that the microstructure depth could be controlled between 20 and 100 nanometers. By using numerical simulation software such as COMSOL Multiphysics, the aforementioned intermolecular interaction parameters were input and iteratively solved using actual measurement data to obtain a set of configuration data with clear numerical indices. This data precisely defined the periodic spacing and depth of the periodic microstructures on the substrate surface, providing reliable dimensional parameters for subsequent process implementation.

[0116] After obtaining the configuration data, mature microfabrication techniques such as electron beam etching are used to perform periodic microstructure processing on the substrate surface with a dielectric constant gradient. During the processing, the period of the microstructure on the mask pattern is generally set in the range of 200 to 500 nanometers, and the exposure dose is controlled at 100 to 150 mJ / m². The etching equipment, such as reactive ion etching (RIE) equipment, is set with a power of 80 to 120 watts, and the etching time is controlled within 30 to 120 seconds. The formation of microstructures is monitored in real time by online detection instruments to ensure that the periodic spacing and depth of the microstructures strictly meet the configuration data requirements, thereby forming a periodic microstructure with regular arrangement and precise size control on the substrate surface after processing.

[0117] After the microstructure fabrication is completed, the surface charge distribution is tested to obtain spatial distribution data of the electrostatic and shear force fields. The testing typically employs scanning probe microscopy, such as Kelvin force microscopy (KPFM), with a test area set to 100 μm × 100 μm and a sampling point density of 256 × 256 points, achieving a spatial resolution of 50 nm. The measurement accuracy of surface potential changes can be controlled within ±5 mV. Simultaneously, microfluidic testing equipment can be used to collect surface shear force data, ensuring that the final obtained electrostatic and shear force field data accurately reflect the local physical field changes caused by the periodic microstructure. This data verification provides a direct and reliable physical basis for constructing functionalized substrates with directional forces and ensures the orientation and consistency of molecular arrangement during subsequent filter spin-coating preparation.

[0118] In summary, this embodiment utilizes quantitative characterization data to calculate the dielectric constant decay function, guides gradient ion implantation based on this, and then combines intermolecular interaction parameters to solve for the microstructure configuration data of the substrate surface. Furthermore, through precision microfabrication technology and rigorous surface charge distribution testing, it achieves full-process control over the functional modification and microstructure customization of the substrate surface.

[0119] In one embodiment of the present invention, the step of calculating the dielectric constant decay function from the center to the edge of the substrate surface based on the initial aggregation state parameters and intermolecular interaction strength parameters in the quantitative characterization data to obtain the dielectric constant spatial distribution curve includes:

[0120] Based on the initial aggregation state parameters and intermolecular interaction strength parameters, the polarizability and dipole moment of the precursor molecules are quantitatively analyzed, and the variation law of intermolecular electrostatic interaction potential energy with distance is obtained, thus obtaining molecular polarization characteristic data and potential energy distribution function.

[0121] Based on the molecular polarization characteristic data and potential energy distribution function, a correlation equation between the dielectric constant of the substrate surface and molecular orientation is established, and the dielectric constant response function is obtained.

[0122] Radial coordinate transformation and temperature correction are applied to the dielectric constant response function. The gradual change of dielectric constant from the center to the edge of the substrate surface is calculated within the temperature range of 25-45℃ to obtain the spatial distribution curve of dielectric constant.

[0123] It should be noted that, based on the initial aggregation state parameters and intermolecular interaction strength parameters obtained in the embodiments, the polarizability and dipole moment of the precursor molecules are quantitatively analyzed. The purpose is to obtain molecular polarization characteristic data at the molecular level and further determine the law governing the change of intermolecular electrostatic interaction potential energy with intermolecular distance. To achieve this goal, a combination of high-resolution spectrometry and quantum chemical calculations is first employed. Detailed analysis of the spectral data of the precursor solution is performed to determine the molecular absorption characteristics and their changes related to molecular conformation. Based on this, the molecular polarizability and dipole moment are calculated using a quantum chemical model. By comparing theoretical calculations and experimental data of intermolecular electrostatic interaction potential energy (e.g., using Coulomb potential and a modified potential energy function) at different distances, a potential energy distribution function is formed. This function accurately reflects the trend of intermolecular interaction with distance, thus providing key physical quantities for the subsequent establishment of a dielectric constant response model. This process uses a calibrated spectrometer for data acquisition and numerical fitting of the data using computational software to ensure that the obtained molecular polarization characteristic data and potential energy distribution function have sufficient accuracy and repeatability.

[0124] After obtaining the aforementioned molecular polarization characteristic data and potential energy distribution function, a correlation equation between the substrate surface dielectric constant and molecular orientation is established based on the relationship between the two. Specifically, by incorporating molecular polarizability into classical dielectric theory, the correlation equation can be described in the following form:

[0125] ε = 1 + 4πNα / (1 - 4πNα / 3);

[0126] Where ε is the dielectric constant of the substrate surface, π is pi, N is the molecular number density per unit volume, and α is the molecular polarizability.

[0127] This formula reflects the direct effect of molecular polarization on the dielectric constant. Meanwhile, the potential energy distribution function reflects the relationship between molecular orientation and local electrostatic potential energy, which can be expressed by the formula:

[0128] U = -pEcosθ;

[0129] Where U is the electrostatic potential energy, p is the molecular dipole moment, E is the local electric field intensity, and θ is the molecular orientation angle;

[0130] By coupling the two formulas above, a dielectric constant response function that comprehensively considers molecular polarization and molecular orientation effects can be constructed, which provides a theoretical basis for subsequent processes.

[0131] After establishing the dielectric constant response function, the function is then subjected to radial coordinate transformation and temperature correction to reflect the gradual change in dielectric constant from the center to the edge of the substrate surface in actual processes. Radial coordinate transformation converts the local physical quantities involved in the response function into expressions directly related to the radial distance *r* on the substrate, allowing the dielectric constant response to accurately describe the spatial distribution changes on the substrate surface. Temperature correction is based on experimental data showing the variation of precursor molecular polarizability and interaction strength with temperature within the range of 25℃ to 45℃. A temperature correction factor is used to adjust the response function, thereby compensating for the influence of temperature on molecular polarization and orientation. This temperature correction process employs a high-precision thermostat and a PID temperature control system. While maintaining temperature stability, real-time temperature response data of relevant precursor molecular parameters are collected. Regression analysis is used to determine the quantitative relationship between temperature and dielectric constant response, and this relationship is substituted into the radially transformed response function to ultimately calculate the spatial distribution curve of the dielectric constant on the substrate surface.

[0132] Throughout the process, by quantitatively analyzing the polarizability, dipole moment, and intermolecular electrostatic potential energy of the precursor molecules, detailed molecular polarization characteristic data and potential energy distribution functions can be obtained. This lays a solid foundation for establishing the correlation equation between the dielectric constant of the substrate surface and molecular orientation. Using the dielectric constant response function obtained from this correlation equation, after radial coordinate transformation and temperature correction, the gradual change in dielectric constant from the center to the edge of the substrate surface can be accurately calculated within the actual processing temperature range. This method ensures the consistency of physical quantities between each step and, through specific mathematical models and parameter calibration, ensures the repeatability and implementability of the technical solution in actual operation, thus providing accurate and reliable numerical basis for subsequent control of molecular alignment using dielectric constant gradients.

[0133] In a specific implementation, in one feasible embodiment, the step of establishing a correlation equation between the dielectric constant of the substrate surface and the molecular orientation based on the molecular polarization characteristic data and potential energy distribution function, and obtaining the dielectric constant response function, includes:

[0134] Based on molecular polarization characteristic data, a first equation relating the dielectric constant of the substrate surface to the molecular polarizability is constructed, specifically including:

[0135] ε = 1 + 4πNα / (1 - 4πNα / 3);

[0136] Where ε is the dielectric constant of the substrate surface, π is pi, N is the molecular number density per unit volume, and α is the molecular polarizability.

[0137] Based on the potential energy distribution function, a second equation relating the molecular orientation angle to the electrostatic potential energy is established, specifically including:

[0138] U = -pEcosθ;

[0139] Where U is the electrostatic potential energy, p is the molecular dipole moment, E is the local electric field intensity, and θ is the molecular orientation angle;

[0140] The dielectric constant response function is obtained by coupling the first and second relational equations, specifically including:

[0141] ε(r)= +( - )exp(-r / )·L(pE / kT);

[0142] Where ε(r) is the dielectric constant at radial position r, and r is the radial distance from the center of the substrate. For characteristic attenuation length, The dielectric constant of optical frequency, ε is the static dielectric constant, exp is the natural exponential function, L is the Langevin function, p is the molecular dipole moment, E is the local electric field intensity, k is the Boltzmann constant, and T is the temperature.

[0143] Please continue reading. Figure 1 The functionalized substrate is spin-coated. During the spin-coating process, a radially varying electric field, a directional acoustic field, and a preset distributed optical field are applied to the precursor molecules. The intensity and spatial distribution of the electric field, the intensity and spatial distribution of the acoustic field, and the intensity and spatial distribution of the optical field are adjusted according to the molecular orientation state to obtain a thin film with molecular orientation.

[0144] In one embodiment of the present invention, the spin-coating process on the functionalized substrate involves applying a radially varying electric field, a directional acoustic field, and a pre-distributed optical field to the precursor molecules during the spin-coating process. The intensity and spatial distribution of the electric field, the acoustic field, and the optical field are adjusted according to the molecular orientation state to obtain a thin film with molecularly oriented alignment. This includes:

[0145] An initial rotational speed is applied to the functionalized substrate. Within a time interval of [0, 60) seconds, the electric field intensity is gradient-controlled according to the rotation radius, so that the electric field intensity decays exponentially from the center of the spin-coated region to the edge, and the spatial distribution data of the electric field is obtained.

[0146] Based on the spatial distribution data of the electric field, the sound field is phase-modulated so that the sound pressure intensity increases periodically from the center to the edge of the spin coating area, and the sound pressure amplitude is adjusted according to a gradient of 5-10 kPa / cm within the time interval of [60, 120) seconds to obtain the spatial distribution data of the directional sound field.

[0147] The spatial distribution data of the directional sound field is parameter matched, and the wavelength of the light field is periodically modulated in the range of 400-700nm within the time interval of [120,180] seconds. The light field intensity is made to form a decreasing distribution in the radial direction opposite to the sound pressure gradient, so as to obtain the preset light field distribution data.

[0148] Based on the molecular orientation state detection signal, the field intensity factor of the spatial distribution data of the electric field, the sound pressure factor of the spatial distribution data of the directional sound field, and the light intensity factor of the preset light field distribution data are adjusted according to preset weighting coefficients to obtain a thin film with molecular orientation.

[0149] It should be noted that in this embodiment, by applying an initial rotational velocity to the functionalized substrate, a uniform centrifugal force distribution is first achieved on the substrate, thereby creating a stable physical environment for subsequent field intensity control. Within the time interval [0, 60) seconds, the system uses the rotation radius as a key variable and performs gradient control of the electric field intensity on the substrate through a pre-set electric field control program. Specifically, a standard high-voltage power supply and a precision controller are used, based on a set exponential decay model (e.g., electric field intensity E(r) = ...). exp(-r / ), where r is the radial distance from the center of rotation, The initial electric field strength in the central region, The characteristic attenuation length (its value is determined based on experimental calibration) causes the electric field intensity to exhibit an exponential attenuation distribution from the center to the edge of the spin-coated area. During this process, the system collects electric field distribution data in real time, and stores the electric field intensity information at each location through built-in sensors to form complete spatial distribution data, providing a quantitative basis for subsequent control of the sound and light fields.

[0150] After obtaining the spatial distribution data of the electric field, the system enters a time interval [60, 120) seconds to regulate the sound field. At this time, based on the aforementioned electric field distribution data, phase modulation technology is used to precisely control the sound field, resulting in a periodic increase in sound pressure intensity along the radial direction from the center to the edge of the spin-coated area. Specifically, a high-precision sound wave generator and phase modulator are used. By controlling the phase and frequency of the sound waves, the sound pressure intensity at each point within the spin-coated area increases with distance at a fixed gradient. To ensure the stability of this gradient, the system adjusts the sound pressure amplitude according to a preset gradient of 5 to 10 kPa / cm during this stage and collects sound field data in real time, ultimately forming quantitative data describing the sound field distribution throughout the entire spin-coated area. This data reflects both the local phase information of the sound field on the substrate surface and provides a necessary reference for subsequent optical field parameter matching.

[0151] Subsequently, within a time interval of [120, 180) seconds, the system performs parameter matching based on the aforementioned directional acoustic field distribution data and periodically modulates the light field. This stage uses a standard laser or LED light source with wavelengths periodically varying within the range of 400 to 700 nm, while simultaneously controlling the light field intensity through an optical modulator. The modulation objective is to make the light field intensity exhibit a decreasing distribution along the radial direction opposite to the acoustic pressure gradient; that is, the light intensity is higher in the central region of the substrate, gradually decreasing with increasing radial distance. To achieve this objective, the system matches the acoustic field data with the light field modulation parameters, uses a built-in algorithm to adjust the output mode of the light field, and monitors the light intensity distribution in real time until a preset light field distribution data that meets the preset requirements is formed. This data describes the specific changes in the light field with radial position within the spin-coating region and complements the electric and acoustic field data, providing a spatial control basis for the synergistic effect of multiple physical fields to achieve molecular directional alignment.

[0152] Finally, the system integrates the molecular orientation state detection signals to synergistically regulate the distribution data of the aforementioned three fields. Specifically, high-sensitivity optical and electrical detection equipment is used to acquire the molecular alignment orientation state in real time during spin coating. Based on preset weighting coefficients, the field intensity factor of the electric field distribution data, the sound pressure factor of the directional acoustic field distribution data, and the light intensity factor of the preset optical field distribution data are dynamically compensated and adjusted. This compensation process employs a multi-parameter synergistic control algorithm to ensure that the interaction of the three fields achieves the expected superposition effect in the local region, thereby inducing precursor molecules to align in a specific direction and ultimately forming a molecularly aligned thin film. During this process, the regulation of each parameter is fine-tuned based on real-time detection signal feedback to ensure optimal synergy among the physical fields during thin film formation, thus achieving high-precision molecular alignment control.

[0153] In one embodiment of the present invention, the step of adjusting the field intensity factor of the spatial distribution data of the electric field, the sound pressure factor of the spatial distribution data of the directional sound field, and the light intensity factor of the preset light field distribution data according to preset weighting coefficients based on the molecular orientation state detection signal to obtain a thin film with molecularly oriented alignment includes:

[0154] Based on the molecular orientation state detection signal, the deviation vector of electric field intensity, the fluctuation coefficient of sound pressure intensity, and the modulation depth of light field intensity are calculated to obtain the dynamic response characteristics of the three fields.

[0155] Orthogonal decoupling analysis is performed on the dynamic response characteristics of the three fields to establish an inter-field interference elimination function and obtain the orthogonal parameter matrix for field intensity control.

[0156] Calculate the normalized weighting coefficients of the electric field distribution data based on the orthogonal parameter matrix. Normalized weighting coefficients for directional sound field distribution data Normalized weighting coefficients of the preset light field distribution data and make + + =1, thus obtaining the weight coefficient set of the three-field coordinated regulation;

[0157] Based on the weighting coefficient set, the electric field strength factor, the sound pressure factor of the sound field, and the light intensity factor of the light field are dynamically compensated to obtain a thin film with molecular orientation.

[0158] It should be noted that in this embodiment, the molecular orientation state detection signal acquired in real time is first quantitatively processed, and the dynamic responses of the electric field, acoustic field, and light field are mathematically described. For the electric field intensity deviation vector, the actual measured electric field intensity at several sampling points is assumed to be... (i=1,2,…,N), its ideal design value is The electric field deviation vector can then be defined as:

[0159]

[0160] Its quantitative indicator can be expressed by a combination of standard deviation and mean deviation, that is:

[0161]

[0162] These two indicators together reflect the deviation of the electric field in spatial distribution; for the sound field, the coefficient of variation (CV) is used to describe the fluctuation of sound pressure intensity, denoted as the sound pressure at each sampling point. Its average value is Sum of standard deviation The formula for calculating the volatility coefficient is:

[0163]

[0164] This reflects the relative fluctuation amplitude of sound pressure intensity within the spin-coating region; for the optical field, a modulation depth M is introduced to characterize the change in optical field intensity, defined as:

[0165]

[0166] in and These represent the maximum and minimum light intensity values ​​within the sampling period. These mathematical expressions provide specific quantitative indicators for the dynamic response characteristics of the three fields.

[0167] Next, orthogonal decoupling analysis is performed on the data matrix composed of the dynamic response characteristics of the electric field, sound field, and light field. In this embodiment, principal component analysis (PCA) is used as the orthogonal matrix decomposition tool. Let the original data matrix composed of the dynamic response characteristics of the three fields be... Each row corresponds to the electric field deviation (or its quantized value). ), sound pressure fluctuation coefficient and optical field modulation depth Data at different sampling points. Performing PCA decomposition, we get:

[0168]

[0169] Among them U An orthogonal matrix has its column vectors as principal components. It is a diagonal matrix. This represents the projection of the sampled data onto an orthogonal basis. The orthogonal parameter matrix is... This reflects the independent contribution of each physical field to the overall dynamic response, and its dimension is fixed at 3×3; meanwhile, the inter-field interference cancellation function can be defined as a reconstruction operation on the original data under the U basis, which minimizes the cross-interference term, i.e.:

[0170] ;

[0171] Where Y represents the decoupled independent response data. In this way, the PCA method not only isolates the interference between fields, but also clarifies their independent actions.

[0172] Based on orthogonal parameter matrix For each independent component in the equation, calculate the normalized weighting coefficients for the electric field, sound field, and light field. Let the independent action quantities of the electric field, sound field, and light field be respectively... , and (The variance contribution of the corresponding principal components in their respective directions can be taken), then the formula for calculating the normalized weight coefficient is:

[0173]

[0174]

[0175]

[0176] make sure + + =1. In practice, The value of can be determined based on the squared singular values ​​of the corresponding principal components in the Σ matrix, thereby quantifying the independent contribution of each field to the overall dynamic response.

[0177] Finally, based on the aforementioned normalized weighting coefficient set, dynamic compensation is performed on the electric field intensity factor, the sound pressure factor of the sound field, and the light intensity factor of the light field. A closed-loop control algorithm (such as a PID control algorithm) is employed to achieve real-time adjustment. Specifically, at each sampling time, the error signal between the current output of each field and the design target is calculated. And according to the PID control law:

[0178]

[0179] The electric field, sound field, and light field are adjusted separately, among which... , and For the control parameters of each field, the compensation signal is multiplied by the corresponding weighting coefficient. , and The adjustments are then applied to the outputs of each field to achieve the optimal synergistic state of the physical field outputs. The timescale for compensation updates is determined by the sampling frequency of the control system, typically set around 100Hz. The criterion for determining the optimal synergistic state is that the root mean square value of the molecular orientation state error is lower than a preset threshold. After multiple real-time feedback adjustments, the thin film formed during spin coating ultimately exhibits the expected molecular orientation alignment effect, thus verifying the effectiveness of the three-field synergistic control scheme.

[0180] Please continue reading. Figure 1 The light intensity signal and polarization detection signal of the thin film at different scattering angles are obtained. The anisotropic characteristics of the scattering pattern are analyzed based on the light intensity signal and polarization detection signal to obtain the spatial distribution data of molecular orientation in the thin film.

[0181] In one embodiment of the present invention, the step of acquiring light intensity signals and polarized light detection signals of the thin film at different scattering angles, and analyzing the anisotropic characteristics of the scattering pattern based on the light intensity signals and polarized light detection signals to obtain spatial distribution data of molecular orientation in the thin film includes:

[0182] Within the 0-360 degree angle range, the scattered light intensity of the thin film was collected at equal intervals to obtain light intensity data at 36 different scattering angles, and the scattered light intensity distribution curve of the thin film was obtained.

[0183] Fourier analysis was performed on the scattered light intensity distribution curve to extract the second-order and fourth-order symmetry coefficients, thereby obtaining the anisotropic characteristic parameters of the thin film.

[0184] The thin film is subjected to polarization state modulation scanning to obtain scattering signals in both horizontal and vertical polarization directions. The polarization difference is calculated to obtain polarization characteristic data of molecular orientation.

[0185] Based on the anisotropic characteristic parameters and polarization characteristic data, correlation calculations are performed to establish a spatial statistical function of molecular orientation, thereby obtaining the spatial distribution data of molecular orientation in the thin film.

[0186] It should be noted that, in this embodiment, to achieve quantitative characterization of the spatial distribution of molecular orientation in the thin film, a high-precision optical detection system is first used to collect the scattered light intensity of the thin film at equal intervals within an angle range of 0 to 360 degrees. Specifically, the thin film is fixed on a rotating platform equipped with a precision angle control system, allowing the film to rotate uniformly across the entire 360-degree range. Light intensity data is collected every 10 degrees, ultimately obtaining light intensity data at 36 different scattering angles. After digital signal processing, these data form a distribution curve of the film's scattered light intensity as a function of angle. This curve reflects the overall light scattering characteristics of the thin film and is an important basis for subsequent analysis of anisotropic features.

[0187] After obtaining the scattered light intensity distribution curve, Fourier analysis was used to process the data and extract the anisotropic characteristic parameters of the thin film. Fourier analysis, a mature spectral analysis method, can decompose complex angle-dependent signals into a series of sine and cosine components. In practice, the second and fourth order symmetry components are the focus, as these components typically reflect the specific anisotropic effects caused by molecular orientation. By performing a Fourier transform on the scattered light intensity data, the system automatically extracts the symmetry coefficients of these two orders, thus forming a set of parameters describing the anisotropic characteristics of the thin film. These parameters intuitively reflect the symmetry and variation trend of molecular arrangement in different regions of the thin film, providing a quantitative basis for subsequent spatial statistics of molecular orientation.

[0188] Simultaneously, polarization-state modulation scanning was performed on the thin film. An optical detection device equipped with a high-precision polarization filter was used to acquire scattering signals under both horizontal and vertical polarization states. During the scanning process, the detection system simultaneously recorded the scattered light intensity of the thin film under both polarization states. By comparing and analyzing the intensity difference between horizontal and vertical polarization, a parameter called the polarization difference degree was calculated. This parameter is defined as the ratio of the difference between the two polarization signals to their sum, and its value reflects the influence of molecular orientation in the thin film on the optical polarization response. Through the calculation of this polarization difference degree, polarization characteristic data closely related to molecular orientation were obtained, providing another dimension of information support for subsequent molecular arrangement spatial statistics.

[0189] After obtaining the anisotropic characteristic parameters from Fourier analysis and the polarization characteristic data from polarization state modulation scanning, the next step is to use multivariate statistical methods to correlate these two sets of data and establish a spatial statistical function for molecular orientation. Specifically, by inputting the anisotropic parameters and polarization characteristic data into data processing software, regression analysis or correlation analysis is used to construct a mathematical model describing the orientation distribution of molecules in the thin film. This model can quantitatively describe the uniformity, directionality, and local variation trends of molecular arrangement in different spatial regions, ultimately forming a set of spatial statistical data on molecular orientation. This statistical function not only reveals the overall molecular arrangement state but also details the arrangement differences in local regions, thus providing clear numerical basis for thin film performance evaluation and process parameter optimization.

[0190] Throughout the process, data acquisition, processing, and correlation between each step were achieved with the support of high-precision instruments and a stable control system. The acquisition of scattered light intensity data relied on precise angle control and a high-sensitivity detector, while Fourier analysis and polarization state modulation scanning utilized existing mature optical data processing algorithms for quantitative conversion. The statistical analysis methods employed in the correlation calculation stage were validated by extensive experimental data to ensure that the established molecular orientation spatial statistical function accurately reflects the actual molecular arrangement in the thin film. This multi-level, multi-angle data acquisition and processing method not only provides a quantitative description of the anisotropy and polarization characteristics of the thin film but also organically combines these characteristic data to establish a complete model that reflects the spatial distribution of molecular orientation.

[0191] For example, in one experiment, the scattered light intensity data collected at equal intervals by a rotating platform showed obvious second-order symmetry characteristics after Fourier analysis, indicating a strong bidirectional alignment trend in the film. Simultaneously, the high polarization difference obtained from polarization scanning further verified the orientation of the molecular alignment. Inputting these two sets of data into a statistical model, the established spatial statistical function showed uniform molecular orientation in the central region of the film, with slight deviations at the edges. This result is consistent with the physical structure distribution of the film obtained by ion implantation, indicating a good consistency between molecular alignment and the film's microstructure. This multi-step, multi-parameter collaborative analysis method ensures that the spatial distribution data of molecular orientation is both highly accurate and provides a reliable and quantitative basis for subsequent process optimization.

[0192] Please continue reading. Figure 1 Based on the spatial distribution data of the molecular orientation, the time-varying curve of the rotation speed is adjusted, and the distribution parameters of the temperature field and airflow field are controlled. A filter with a preset molecular orientation structure is obtained through a cooling and curing process.

[0193] In one embodiment of the present invention, the step of adjusting the time-varying curve of the rotation speed according to the spatial distribution data of the molecular orientation, and controlling the distribution parameters of the temperature field and airflow field, to obtain a filter with a preset molecular orientation structure through a cooling and curing process, includes:

[0194] Based on the spatial distribution data of the molecular orientation, a piecewise control function for the rotation speed is established. The rotation speed is linearly reduced from 3000 rpm to 1000 rpm in the time interval of [0, 60) seconds, and a constant rotation speed is maintained in the time interval of [60, 120) seconds, thus obtaining the time-varying curve of the rotation speed.

[0195] Radial uniformity analysis was performed on the spatial distribution data of the molecular orientation. The radial distribution of the temperature field was adjusted according to the uniformity deviation value to form a linear temperature gradient of 25-45℃ from the center to the edge of the spin-coated area, and the temperature field distribution parameters were obtained.

[0196] Based on the spatial distribution data of molecular orientation and the temperature field distribution parameters, the airflow velocity is controlled to form a logarithmically decreasing distribution of 0.5-2 m / s from the center to the edge of the spin coating area, thus obtaining the airflow field distribution parameters.

[0197] The molecular orientation degree of the film is detected. After confirming that the orientation degree reaches the preset threshold, it is cured by cooling at a cooling rate of 5℃ / min to obtain a filter with a preset molecular orientation structure.

[0198] It should be noted that, based on the spatial distribution data of molecular orientation, the local distribution of molecular arrangement within the spin coating area is precisely calculated, and a set of piecewise control functions is used to achieve dynamic adjustment of the rotation speed. The entire process is centered on a digital control system. The principle is to set a program controller on the rotating platform, and in the first 60 seconds, according to a preset linear change formula, the rotation speed is linearly reduced from 3000 rpm to 1000 rpm with a constant slope. The formula can be expressed as v(t) = 3000 - (2000 / 60)t (where t is time in seconds, 0 ≤ t < 60). In the next 60 seconds, a constant rotation speed of 1000 rpm is maintained, thus forming a time-varying rotation speed curve. In this process, by analyzing the spatial distribution of molecular orientation data, the non-uniformity of molecular arrangement in local areas of the film can be determined. This allows for real-time reflection and correction of the liquid film thickness and flow state during rotation speed control. For example, in actual operation, the uniformity of the liquid film on the rotating platform is monitored by high-speed cameras and laser interferometers. When it is found that the molecular arrangement in the central region tends to be consistent while there is a slight deviation in the edge region, the control system outputs an adjustment signal according to a predetermined function to match the rotation speed curve with the molecular arrangement data, thereby achieving the optimal liquid film distribution state.

[0199] Next, radial uniformity analysis was performed on the spatial distribution data of molecular orientation. The spin-coated area was divided into multiple concentric ring regions. By collecting molecular orientation angle data in each region and calculating the standard deviation, a uniformity deviation value was obtained. Based on this value, a temperature control system was used to finely adjust the substrate temperature field. Specifically, a program was set in the temperature control unit to set the substrate center temperature at 25°C, gradually increasing towards the outer diameter until the edge temperature reached 45°C, forming a linear gradient distribution. This process was monitored in real time by temperature sensors distributed at multiple locations on the substrate, and the microprocessor adjusted the output power of the heating or cooling modules based on the measured temperature error to ensure a smooth temperature transition in each region. For example, in one experiment, the calibrated temperature control system precisely controlled the center temperature at 25°C and stabilized the edge temperature at 45°C, ensuring that the solvent evaporation rate formed a uniform physical driving force in the film, which was conducive to the orderly arrangement of molecules.

[0200] Simultaneously, based on molecular orientation data and temperature field distribution parameters, a wind speed control device is used to regulate the airflow field. The regulation process utilizes a pre-set logarithmic function model, ensuring that the airflow velocity exhibits a logarithmically decreasing distribution from the center to the edge of the spin-coating area. The mathematical model can be expressed as follows: (r)= -klog((r / R)+1), where, The airflow velocity was set to 2 m / s, and R was the radius of the spin-coating area. Parameter k was determined experimentally to achieve an edge velocity of 0.5 m / s. Using a miniature fan and flow sensor installed within the air duct, the airflow velocity at each radial position was adjusted in real time, achieving precise distribution control of the airflow velocity throughout the spin-coating area. This ensured that the airflow exerted a uniform shearing effect on the solvent evaporation and liquid film solidification processes on the film surface. For example, in one preparation process, after airflow field control, the airflow velocity in the central region was maintained at 2 m / s, while the airflow velocity in the edge region was stably reduced to 0.5 m / s, ensuring controlled and consistent molecular orientation within the film.

[0201] During thin film preparation, molecular orientation is simultaneously detected using a polarizing microscope and related optical instruments. The molecular orientation of the formed film is statistically analyzed. Once the detected data reaches a preset orientation threshold, a cooling and curing stage is initiated. This stage employs a precision temperature-controlled cooling chamber to lower the film temperature to room temperature at a constant rate of 5°C / min. During curing, a built-in sensor monitors temperature changes in real time to ensure that the cooling rate and temperature curve perfectly match the preset parameters, thus locking the molecular arrangement during curing. For example, after a batch of films detects that the orientation has reached the set standard, it immediately enters the cooling program, with the temperature decreasing from the initial state at 5°C / min until it stabilizes at room temperature. The resulting filter exhibits a uniform and stable molecular orientation structure after curing.

[0202] The above description is merely a preferred embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention's specification and drawings under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A method for preparing a filter by spin coating, characterized in that, include: Electronic transition characteristic data and intermolecular interaction force data of precursor solution are obtained. Based on the electronic transition characteristic data and intermolecular interaction force data, the initial aggregation state parameters and intermolecular interaction strength parameters of precursor molecules are determined, and quantitative characterization data of precursor molecule spatial conformation are obtained. Based on the quantitative characterization data, the dielectric constant of the substrate surface is controlled to form a dielectric constant gradient distribution from the center to the edge, and a periodic microstructure is formed on the substrate surface to obtain a functionalized substrate with directional force. Specifically, this includes: calculating the dielectric constant decay function from the center to the edge of the substrate surface based on the initial aggregation state parameters and intermolecular interaction strength parameters in the quantitative characterization data, obtaining a spatial distribution curve of the dielectric constant; performing gradient ion implantation on the substrate surface, and controlling the energy and dose distribution of ion implantation according to the spatial distribution curve of the dielectric constant to obtain a substrate surface with a dielectric constant gradient; calculating the spatial period and depth parameters of the microstructure on the substrate surface based on the intermolecular interaction strength parameters, obtaining configuration data of the periodic microstructure; performing periodic microstructure processing on the substrate surface with the dielectric constant gradient, and controlling the periodic spacing and depth distribution of the microstructure according to the configuration data to obtain a periodic microstructure; and testing the surface charge distribution of the periodic microstructure to obtain spatial distribution data of the electrostatic force field and shear force field, obtaining a functionalized substrate with directional forces. The functionalized substrate is spin-coated. During the spin-coating process, a radially varying electric field, a directional acoustic field, and a preset distributed optical field are applied to the precursor molecules. The intensity and spatial distribution of the electric field, the intensity and spatial distribution of the acoustic field, and the intensity and spatial distribution of the optical field are adjusted according to the molecular orientation state to obtain a thin film with molecular orientation. The light intensity signal and polarized light detection signal of the thin film at different scattering angles are obtained. The anisotropic characteristics of the scattering pattern are analyzed based on the light intensity signal and polarized light detection signal to obtain the spatial distribution data of molecular orientation in the thin film. Based on the spatial distribution data of the molecular orientation, the time-varying curve of the rotation speed is adjusted, and the distribution parameters of the temperature field and airflow field are controlled. A filter with a preset molecular orientation structure is obtained through a cooling and curing process.

2. The filter spin-coating preparation method according to claim 1, characterized in that, The process involves acquiring electronic transition characteristic data and intermolecular force data of the precursor solution, determining the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules based on the electronic transition characteristic data and intermolecular force data, and obtaining quantitative characterization data of the spatial conformation of the precursor molecules, including: The precursor solution was simultaneously subjected to orthogonal dual-optical-path detection, wherein the first optical path acquired electronic transition characteristic data in the wavelength range of 200-800nm, and the second optical path acquired intermolecular interaction force data in the wavelength range of 800-2500nm. Peak analysis is performed on the electronic transition characteristic data to obtain the peak position, peak intensity ratio and peak shape index of the main absorption peak, and the electronic transition characteristic spectrum of the precursor molecule is obtained. The intermolecular force data are analyzed by characteristic peaks to obtain the absorption peak area ratio and peak position shift of hydrogen bonding and van der Waals forces, thus obtaining the interaction characteristic spectrum of the precursor molecules. Based on the orthogonal correlation analysis of the electronic transition characteristic spectrum and the interaction characteristic spectrum, the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules are calculated. Within a temperature range of 25-45℃, temperature responsiveness analysis was performed on the initial aggregation state parameters and intermolecular interaction strength parameters to obtain quantitative characterization data of the precursor molecular spatial conformation.

3. The method for preparing a filter by spin coating according to claim 2, characterized in that, The simultaneous orthogonal dual-optical-path detection of the precursor solution includes: the first optical path acquiring electronic transition characteristic data in the wavelength range of 200-800 nm, and the second optical path acquiring intermolecular force data in the wavelength range of 800-2500 nm, including: Electronic transition characteristics are acquired in the first detection region of the orthogonal optical path system. The first detection region is a spatial region that is only illuminated by the first optical path. Reference electronic transition characteristic data in the wavelength range of 200-800nm ​​are obtained. Intermolecular forces are collected in the second detection region of the orthogonal optical path system. The second detection region is a spatial region that is only irradiated by the second optical path, and reference intermolecular force data in the wavelength range of 800-2500nm are obtained. Dual-spectral synchronous acquisition is performed on the cross-detection region in the orthogonal optical path system. The cross-detection region is a spatial region that is simultaneously irradiated by the first optical path and the second optical path. Coupled electronic transition characteristic data in the wavelength range of 200-800nm ​​and coupled intermolecular interaction force data in the wavelength range of 800-2500nm are obtained. The reference electronic transition feature data and the coupled electronic transition feature data are synthesized using a spatial weighting algorithm to obtain electronic transition feature data in the wavelength range of 200-800nm. The baseline intermolecular force data and coupled intermolecular force data were synthesized using a spatial weighting algorithm to obtain intermolecular force data in the wavelength range of 800-2500 nm.

4. The method for preparing a filter by spin coating according to claim 1, characterized in that, The step involves calculating the dielectric constant decay function from the center to the edge of the substrate surface based on the initial aggregation state parameters and intermolecular interaction strength parameters in the quantitative characterization data, thereby obtaining the spatial distribution curve of the dielectric constant, including: Based on the initial aggregation state parameters and intermolecular interaction strength parameters, the polarizability and dipole moment of the precursor molecules are quantitatively analyzed, and the variation law of intermolecular electrostatic interaction potential energy with distance is obtained, thus obtaining molecular polarization characteristic data and potential energy distribution function. Based on the molecular polarization characteristic data and potential energy distribution function, a correlation equation between the dielectric constant of the substrate surface and molecular orientation is established, and the dielectric constant response function is obtained. Radial coordinate transformation and temperature correction are applied to the dielectric constant response function. The gradual change of dielectric constant from the center to the edge of the substrate surface is calculated within the temperature range of 25-45℃ to obtain the spatial distribution curve of dielectric constant.

5. The method for preparing a filter by spin coating according to claim 4, characterized in that, The process involves establishing a correlation equation between the dielectric constant of the substrate surface and molecular orientation based on the molecular polarization characteristic data and potential energy distribution function, thereby obtaining the dielectric constant response function, including: Based on molecular polarization characteristic data, a first equation relating the dielectric constant of the substrate surface to the molecular polarizability is constructed, specifically including: ε = 1 + 4πNα / (1 - 4πNα / 3); Where ε is the dielectric constant of the substrate surface, π is pi, N is the molecular number density per unit volume, and α is the molecular polarizability. Based on the potential energy distribution function, a second equation relating the molecular orientation angle to the electrostatic potential energy is established, specifically including: U = -pEcosθ; Where U is the electrostatic potential energy, p is the molecular dipole moment, E is the local electric field intensity, and θ is the molecular orientation angle; The dielectric constant response function is obtained by coupling the first and second relational equations, specifically including: ε(r)= +( - )exp(-r / )·L(pE / kT); Where ε(r) is the dielectric constant at radial position r, and r is the radial distance from the center of the substrate. For characteristic attenuation length, The dielectric constant of optical frequency, ε is the static dielectric constant, exp is the natural exponential function, L is the Langevin function, p is the molecular dipole moment, E is the local electric field intensity, k is the Boltzmann constant, and T is the temperature.

6. The method for preparing a filter by spin coating according to claim 1, characterized in that, The process involves spin-coating the functionalized substrate, during which a radially varying electric field, a directional acoustic field, and a pre-distributed optical field are applied to the precursor molecules. The intensity and spatial distribution of the electric field, the acoustic field, and the optical field are adjusted according to the molecular orientation state to obtain a thin film with molecularly oriented alignment. An initial rotational speed is applied to the functionalized substrate. Within a time interval of [0, 60) seconds, the electric field intensity is gradient-controlled according to the rotation radius, so that the electric field intensity decays exponentially from the center of the spin-coated region to the edge, and the spatial distribution data of the electric field is obtained. Based on the spatial distribution data of the electric field, the sound field is phase-modulated so that the sound pressure intensity increases periodically from the center to the edge of the spin coating area, and the sound pressure amplitude is adjusted according to a gradient of 5-10 kPa / cm within the time interval of [60, 120) seconds to obtain the spatial distribution data of the directional sound field. The spatial distribution data of the directional sound field is parameter matched, and the wavelength of the light field is periodically modulated in the range of 400-700nm within the time interval of [120,180] seconds. The light field intensity is made to form a decreasing distribution in the radial direction opposite to the sound pressure gradient, so as to obtain the preset light field distribution data. Based on the molecular orientation state detection signal, the field intensity factor of the spatial distribution data of the electric field, the sound pressure factor of the spatial distribution data of the directional sound field, and the light intensity factor of the preset light field distribution data are adjusted according to preset weighting coefficients to obtain a thin film with molecular orientation.

7. The method for preparing a filter by spin coating according to claim 6, characterized in that, The step of obtaining a molecularly oriented thin film by adjusting the field intensity factor of the spatial distribution data of the electric field, the sound pressure factor of the spatial distribution data of the directional sound field, and the light intensity factor of the preset light field distribution data according to preset weighting coefficients based on the molecular orientation state detection signal includes: Based on the molecular orientation state detection signal, the deviation vector of electric field intensity, the fluctuation coefficient of sound pressure intensity, and the modulation depth of light field intensity are calculated to obtain the dynamic response characteristics of the three fields. Orthogonal decoupling analysis is performed on the dynamic response characteristics of the three fields to establish an inter-field interference elimination function and obtain the orthogonal parameter matrix for field intensity control. Calculate the normalized weighting coefficients of the electric field distribution data based on the orthogonal parameter matrix. Normalized weighting coefficients for directional sound field distribution data Normalized weighting coefficients of the preset light field distribution data and make + + =1, thus obtaining the weight coefficient set of the three-field coordinated regulation; Based on the weighting coefficient set, the electric field strength factor, the sound pressure factor of the sound field, and the light intensity factor of the light field are dynamically compensated to obtain a thin film with molecular orientation.

8. The method for preparing a filter by spin coating according to claim 1, characterized in that, The process of acquiring light intensity signals and polarized light detection signals of the thin film at different scattering angles, analyzing the anisotropy characteristics of the scattering pattern based on the light intensity signals and polarized light detection signals, and obtaining spatial distribution data of molecular orientation in the thin film includes: Within the 0-360 degree angle range, the scattered light intensity of the thin film was collected at equal intervals to obtain light intensity data at 36 different scattering angles, and the scattered light intensity distribution curve of the thin film was obtained. Fourier analysis was performed on the scattered light intensity distribution curve to extract the second-order and fourth-order symmetry coefficients, thereby obtaining the anisotropic characteristic parameters of the thin film. The thin film is subjected to polarization state modulation scanning to obtain scattering signals in both horizontal and vertical polarization directions. The polarization difference is calculated to obtain polarization characteristic data of molecular orientation. Based on the anisotropic characteristic parameters and polarization characteristic data, correlation calculations are performed to establish a spatial statistical function of molecular orientation, thereby obtaining the spatial distribution data of molecular orientation in the thin film.

9. The method for preparing a filter by spin coating according to claim 1, characterized in that, The process of adjusting the time-varying curve of the rotation speed based on the spatial distribution data of the molecular orientation, controlling the distribution parameters of the temperature field and airflow field, and obtaining a filter with a preset molecular orientation structure through a cooling and curing process includes: Based on the spatial distribution data of the molecular orientation, a piecewise control function for the rotation speed is established. The rotation speed is linearly reduced from 3000 rpm to 1000 rpm in the time interval of [0, 60) seconds, and a constant rotation speed is maintained in the time interval of [60, 120) seconds, thus obtaining the time-varying curve of the rotation speed. Radial uniformity analysis was performed on the spatial distribution data of the molecular orientation. The radial distribution of the temperature field was adjusted according to the uniformity deviation value to form a linear temperature gradient of 25-45℃ from the center to the edge of the spin-coated area, and the temperature field distribution parameters were obtained. Based on the spatial distribution data of molecular orientation and the temperature field distribution parameters, the airflow velocity is controlled to form a logarithmically decreasing distribution of 0.5-2 m / s from the center to the edge of the spin coating area, thus obtaining the airflow field distribution parameters. The molecular orientation degree of the film is detected. After confirming that the orientation degree reaches the preset threshold, it is cured by cooling at a cooling rate of 5℃ / min to obtain a filter with a preset molecular orientation structure.

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