Transmission device and bearing boat

Abstract

The invention provides a bearing boat and a conveying device, the conveying device is used for conveying a plurality of bearing boats, and the conveying device comprises a mounting main body, a grabbing mechanism and a driving mechanism; wherein the number of the grabbing mechanisms is two, the two grabbing mechanisms are both rotatably connected with the mounting body, the two grabbing mechanisms are located on the two sides of the two opposite side faces of the bearing boat correspondingly, each grabbing mechanism comprises at least one grabbing part, and the grabbing parts are in lap joint fit with the carrying parts on the corresponding side faces; the driving mechanism is used for driving the two grabbing mechanisms to rotate, so that the grabbing parts of the two grabbing mechanisms get close to each other or get away from each other, and the bearing boat is grabbed or placed. The conveying device does not need to be matched with a boat support to grab the bearing boat, the boat support cannot be fed into semiconductor heat treatment equipment, therefore, the boat support is prevented from being replaced, and the production cost is reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing, and in particular, to a transmission device and a carrying boat. Background Art

[0002] The horizontal diffusion furnace is used to prepare PN junctions by doping on the surface of silicon substrates. It is one of the key equipment in the production process of crystalline silicon photovoltaic cells. The common way of carrying silicon wafers in the diffusion furnace is: two quartz boats arranged end to end along the direction of entering and exiting the reaction chamber carry multiple quartz boats at the same time. Each quartz boat is loaded with a certain number of silicon wafers. The silicon wafers are placed vertically along the direction of entering and exiting the reaction chamber, and a certain number of silicon wafers are arranged in parallel along the vertical direction of entering and exiting the reaction chamber. At present, with the continuous increase in process temperature, the quartz boats will deform to varying degrees after a period of use, affecting the automatic taking and placing of silicon wafers. Frequent replacement of deformed quartz boats greatly increases production costs.

[0003] In recent years, with the rapid development of the photovoltaic industry, market competition has become increasingly fierce. Major photovoltaic companies are actively expanding their production capacity to quickly seize the market, and have also put forward higher requirements for the capacity improvement of diffusion furnaces. How to increase the single-tube loading capacity under the condition of certain equipment size and constant temperature zone of the reaction chamber is one of the important research directions for improving equipment capacity. Before the process, the quartz boat support carries multiple quartz boats. The manipulator lifts the quartz boat support and moves multiple quartz boats. The quartz boat support is sent into the diffusion furnace with the quartz boat. With the continuous improvement of production capacity, the load that the quartz boat support has to bear under the existing silicon wafer loading form is larger and more prone to deformation. The quartz boat support will deform when used for a long time at high temperature. If the deformation of the quartz boat support is too large, it needs to be replaced, which increases the production cost of the enterprise. Summary of the invention

[0004] The present application aims to solve at least one of the technical problems existing in the prior art, and proposes a transmission device and a carrying boat, which do not need to support the carrying boat through a quartz boat holder, thereby avoiding the replacement of the quartz boat holder and reducing production costs.

[0005] In order to achieve the purpose of the present application, a transmission device is provided for transmitting a carrying boat, wherein the transmission device comprises a mounting body, a gripping mechanism and a driving mechanism; wherein:

[0006] The grabbing mechanism is rotatably connected to the mounting body and corresponds to two side surfaces of the carrying boat distributed along a first direction. The grabbing mechanism includes a grabbing portion, and the grabbing portion overlaps and cooperates with the corresponding carrying portion on the side surface. The first direction is the width direction of the carrying boat.

[0007] The driving mechanism is used to drive the grabbing mechanism to rotate, so that the grabbing parts of the grabbing mechanism move closer to each other or farther away from each other, so as to grab or place the carrying boat.

[0008] In some embodiments, the driving mechanism includes an output shaft assembly, a driving transmission assembly, a driven transmission assembly, and a driver;

[0009] The output shaft assembly is connected to the mounting body, the number of the output shaft assemblies is equal to the number of the grabbing mechanisms, and the output shaft assemblies are fixedly connected to each of the grabbing mechanisms in a one-to-one correspondence, so as to drive each of the grabbing mechanisms to rotate;

[0010] The active transmission assembly and the driven transmission assembly are in transmission cooperation and are respectively connected to each of the output shaft assemblies;

[0011] The driver is connected to the active transmission assembly and drives the two output shaft assemblies to rotate in opposite directions through the active transmission assembly and the driven transmission assembly.

[0012] In some embodiments, the grabbing mechanism includes a plurality of connecting parts, wherein the connecting parts are fixedly connected to the output shaft assembly, and the grabbing part is connected to an end of the connecting part away from the output shaft assembly.

[0013] In some embodiments, the gripping portion includes at least one load-bearing connecting rod and at least one guide sleeve, and the two ends of the load-bearing connecting rod are respectively connected to two adjacent connecting portions, and when the number of the load-bearing connecting rods is more than two, each of the load-bearing connecting rods is coaxially arranged;

[0014] The guide sleeve is sleeved on the outer periphery of the load-bearing connecting rod and is used for supporting the carrying part of the load-bearing boat.

[0015] In some embodiments, the outer wall of the guide sleeve is provided with a positioning groove arranged along its circumference, and the positioning groove is used to accommodate the carrying portion.

[0016] In some embodiments, when there are multiple guide sleeves, all the guide sleeves are distributed at equal intervals so that the gap between two adjacent support boats is not greater than a preset value.

[0017] In some embodiments, the installation body includes a crossbeam and a longitudinal beam, the crossbeam extends along the direction in which the supporting boats are arranged, the longitudinal beam is arranged at the end of the crossbeam, and the crossbeam or the longitudinal beam is also provided with a collision detection mechanism for detecting the installation body colliding with other components.

[0018] In some embodiments, the longitudinal beam is provided with a mounting column, the collision detection mechanism includes a rotating block and a micro switch, the mounting column is rotatably connected to the middle part of the rotating block, the micro switch is located at both ends of the rotating block and is arranged toward the longitudinal beam.

[0019] In some embodiments, the collision detection mechanism further includes an elastic plunger, which is installed on a side of the rotating block facing the longitudinal beam, and the elastic plunger is located between the micro switch and the mounting column to protect the micro switch.

[0020] The present application also provides a carrying boat, comprising a first side plate and a second side plate, wherein the first side plate and the second side plate are distributed along the width direction of the carrying boat, and the outer sides of the first side plate and the second side plate are provided with a carrying portion for cooperating with the grabbing mechanism of the transmission device described in any one of claims 1 to 9.

[0021] In some embodiments, a boat foot is provided at the bottom of the carrying boat, and the boat foot has a hollow structure for reducing weight.

[0022] This application has the following beneficial effects:

[0023] The transmission device provided in the present application is used to transmit multiple carrying boats, and the transmission device includes an installation body, a grasping mechanism and a driving mechanism; wherein, the number of the grasping mechanisms is rotatably connected to the installation body, and the grasping mechanisms respectively correspond to two side surfaces of the carrying boat distributed along a first direction, and the grasping mechanisms each include a grasping part, and the grasping part overlaps and cooperates with the carrying part on the corresponding side surface; the driving mechanism is used to drive the grasping mechanism to rotate, so that the grasping parts of the grasping mechanism are close to or away from each other, so as to grasp or place the carrying boat.

[0024] The transmission device of the present application does not need to cooperate with the boat support to grab the carrying boat, so the boat support will not be sent into the semiconductor heat treatment equipment, thereby avoiding the replacement of the boat support and reducing production costs.

[0025] The present application also provides a carrying boat, whose overlapping portion can cooperate with the grabbing portion of the transmission device to move, eliminating the boat support during the movement of the carrying boat, saving the cost of replacing the boat support. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram of the structure of a transmission device provided in a specific embodiment of the present application;

[0027] Figure 2 for Figure 1 A top view of the transmission device;

[0028] Figure 3 for Figure 1 A side view of the transmission device;

[0029] Figure 4 for Figure 1 A partial view of the middle drive mechanism connected to the mounting body;

[0030] Figure 5 for Figure 4 A partial view of the middle drive mechanism;

[0031] Figure 6 for Figure 4 A partial top view of the middle drive mechanism;

[0032] Figure 7 for Figure 1 Partial view of the gripping mechanism;

[0033] Figure 8 for Figure 1 The main view of the grabbing mechanism;

[0034] Fig. 9 for Figure 7 A schematic diagram of the structure in which the middle load-bearing connecting rod is connected to the connecting bent plate;

[0035] Fig.10 This is an exploded diagram of the collision detection mechanism;

[0036] Fig.11 for Fig.10 A schematic diagram of the structure when the collision detection mechanism is not triggered;

[0037] Fig.12 for Fig.10 The structural diagram of the collision detection mechanism when it is triggered;

[0038] Figures 13 to 15 A schematic diagram of the movement process of the transmission device grabbing the carrying boat;

[0039] Fig.16 It is a structural schematic diagram of the feeding equipment;

[0040] Fig.17 It is a structural diagram of the automatic loading and unloading mechanism and the transmission device;

[0041] Fig.18 It is a schematic diagram of the structure of the supporting boat arrangement;

[0042] Fig.19 It is a schematic diagram of the structure of the carrying boat;

[0043] Fig. 20 It is a schematic diagram of the structure of the carrier boat located in the reaction chamber.

[0044] in, Figures 1 to 20 The reference numerals in the drawings are:

[0045] 1. Reaction chamber; 100. Mounting frame; 110. Crossbeam; 120. Longitudinal beam; 121. Mounting column; 200. Driving mechanism; 210. Fixing seat; 220. Driven transmission assembly; 221. Second rotating shaft; 222. Driven gear; 223. Second driving wheel; 224. Second driven wheel; 225. Second synchronous belt; 230. Active transmission assembly; 231. First rotating shaft; 232. Driving gear; 233. First driving wheel; 234. First driven wheel; 235. First synchronous belt; 240. Driver; 241. Driving motor; 242. Speed ​​reducer; 250. Output shaft assembly; 251. Output shaft; 252. Transmission shaft; 253. Synchronous rotating shaft; 260. Gear fixing ring; 270. Coupling; 300. Grasping mechanism; 310. Connecting bent plate ; 320, load-bearing connecting rod; 321, connecting head; 322, threaded hole; 330, guide sleeve; 331, positioning groove; 400, collision detection mechanism; 410, rotating block; 420, elastic plunger; 430, micro switch; 440, rotating pin; 500, load-bearing boat; 510, first side plate; 520, second side plate; 530, bottom support plate; 540, carrying part; 550, quartz rod; 560, boat foot; 600, automatic loading and unloading mechanism; 610, active vertical module; 620, driven vertical module; 630, first horizontal active extension mechanism; 640, first horizontal driven extension mechanism; 650, second horizontal active extension mechanism; 660, second horizontal driven extension mechanism; 700, push-pull boat; 800, load-bearing beam; 900, horizontal feeding mechanism. DETAILED DESCRIPTION

[0046] In order to enable those skilled in the art to better understand the technical solution of the present application, the transmission device of the carrier boat and the carrier boat provided by the present application are described in detail below in conjunction with the accompanying drawings.

[0047] The transmission device provided in the present application is used to transfer a carrier boat. A plurality of carrier boats are usually arranged in a straight line, and the transmission device can grab the plurality of carrier boats and transmit the carrier boats to a semiconductor thermal processing device.

[0048] The transmission device includes a mounting body, a gripping mechanism 300 and a driving mechanism 200. Figure 1 and Figure 2As shown, the gripping mechanism 300 is rotatably connected to the installation body, and the driving mechanism 200 is used to drive the gripping mechanism to rotate. The gripping mechanism 300 corresponds to the two side surfaces of the carrying boat distributed along the first direction. The first direction is the width direction of the carrying boat. The gripping mechanism 300 includes a gripping portion, which can overlap and cooperate with the carrying portion on the side surface of the corresponding carrying boat. In the process of gripping the carrying boat, driven by the driving mechanism 200, the gripping portions of the two gripping mechanisms 300 corresponding to the two side surfaces of the carrying boat approach each other, and overlap and cooperate with the carrying portions on the corresponding side surfaces respectively, so that the transmission device completes the gripping of the carrying boat.

[0049] The number of the grabbing mechanisms 300 is usually more than two. It should be noted that two grabbing mechanisms 300 that cooperate with each other can be used to grab multiple carrying boats. Specifically, the carrying boats can be arranged along the second direction, and the two sides of each carrying boat are flush. The grabbing mechanisms 300 correspond to the sides of the multiple carrying boats, and the grabbing parts of the grabbing mechanisms 300 overlap and cooperate with the carrying parts of the corresponding sides, so that the transmission device can complete the grabbing of multiple carrying boats at one time. The second direction can be the length direction of the carrying boat, and the length direction of the carrying boat can be perpendicular to the width direction.

[0050] The transmission device can directly grab the carrier boat through the grabbing mechanism 300, and does not need to cooperate with the boat support to complete the grabbing operation, which not only avoids the problem of increased equipment costs caused by replacing the boat support; but also the space originally occupied by the boat support can be used to arrange the carrier boat, and more carrier boats can be transmitted in one transmission operation, thereby improving the transmission efficiency.

[0051] Optional, such as Figure 3 As shown, the number of the gripping mechanisms 300 may be two, and the installation body may include a mounting frame 100 and a transfer device. The mounting frame 100 may be rectangular, the length side of the mounting frame 100 may be a crossbeam 110, and the width side of the mounting frame 100 may be a longitudinal beam 120. Of course, the mounting frame 100 may also adopt other structures, such as an I-shaped structure, which is not limited here. The two gripping mechanisms 300 are rotatably connected to the two length sides of the mounting frame 100, respectively. The two gripping mechanisms 300 correspond to the two side surfaces of the carrying boat 500 distributed along its width direction. The driving mechanism 200 is connected to the gripping mechanism 300, and drives the gripping mechanism 300 to rotate around the connection. Figure 3In the specific implementation shown, the gripping mechanism 300 on the left rotates clockwise while the gripping mechanism 300 on the right rotates counterclockwise, and at this time the two gripping mechanisms 300 are open. The gripping mechanism 300 on the left rotates counterclockwise while the gripping mechanism 300 on the right rotates clockwise, and at this time the two gripping mechanisms 300 are closed. The two gripping mechanisms 300 of the transmission device are opened so that the gripping parts of the two gripping mechanisms 300 correspond to the two sides of the carrying boat 500 respectively; the two gripping mechanisms 300 are closed, and the gripping parts of the gripping mechanisms 300 move to the bottom of the overlapping parts of the corresponding sides, and overlap with the overlapping parts to achieve the gripping of the carrying boat 500. The moving device can then drive the carrying boat 500 to move. After moving into place, the two gripping mechanisms 300 are opened, and the gripping parts are separated from the overlapping parts to achieve the placement of the carrying boat 500. It should be noted that Figure 1 In the embodiment shown, the transmission device is composed of two gripping mechanisms 300 as a group, which cooperate to grip the carrying boat 500. The transmission device may use more than two groups of gripping mechanisms 300, which is just a simple superposition of the embodiments provided in this application and also falls within the protection scope of this application.

[0052] Optionally, the two grasping mechanisms 300 are respectively located on two side surfaces of a plurality of carrying boats 500 arranged in a straight line and distributed along a first direction. The grasping mechanism 300 includes at least one grasping portion. The grasping portion extends along the arrangement direction of the plurality of carrying boats 500, and the grasping portion can overlap and cooperate with the carrying portion 540 on the carrying boat 500. The carrying boat 500 is provided with a carrying portion 540 on both sides of the carrying boat 500. The grasping portions of the two grasping mechanisms 300 respectively cooperate with the carrying portions 540 on both sides of the carrying boat 500 to complete the grasping of the carrying boat 500. The grasping portion of the grasping mechanism 300 can overlap and cooperate with the carrying portions 540 of the plurality of carrying boats 500, thereby completing the grasping of the plurality of carrying boats 500.

[0053] The transmission device is overlapped and matched with the carrying part 540 arranged on the side of the carrying boat 500 through the grabbing part of the grabbing mechanism 300. The transmission device can complete the grabbing of multiple carrying boats 500, and it is no longer necessary to cooperate with the boat holder to grab the carrying boat 500. The grabbing part does not need to be placed in the semiconductor heat treatment equipment with the carrying boat 500 during the process, avoiding the problem of deformation of the boat holder caused by high temperature and saving the cost of replacing the boat holder.

[0054] In some embodiments, the driving mechanism 200 may include an output shaft assembly 250, an active transmission assembly 230, a passive transmission assembly 220, and a driver 240. There are two output shaft assemblies 250, which are respectively located on both sides of the mounting frame 100. The output shaft assembly 250 may be arranged along the length direction of the mounting frame 100, and rotatably connected to the side of the length direction of the mounting frame 100. The output shaft assembly 250 may be fixedly connected to the gripping mechanism 300, so that the gripping mechanism 300 is driven to rotate when the output shaft assembly 250 rotates. The active transmission assembly 230 and the passive transmission assembly 220 are both arranged on the mounting frame 100, and the active transmission assembly 230 and the passive transmission assembly 220 are respectively connected to the two output shaft assemblies 250, and are used to drive the two output shaft assemblies 250 to rotate. The active transmission assembly 230 and the passive transmission assembly 220 are in transmission cooperation, and the driver 240 is installed on the mounting frame 100 and is transmission-connected to the active transmission assembly 230. The driver 240 can drive the two output shaft assemblies 250 to rotate in opposite directions through the active transmission assembly 230 and the driven transmission assembly 220, thereby realizing the opening and closing of the two grabbing mechanisms 300. Of course, the driving mechanism 200 can also adopt other structures, for example, two drivers 240 can be set in the driving mechanism 200, and the two drivers 240 respectively drive the two output shaft assemblies 250 to rotate, which is not limited here.

[0055] Optionally, the grabbing mechanism 300 may include a plurality of connecting parts, a first end of the connecting part being fixedly connected to the output shaft assembly 250 and being able to rotate around the output shaft assembly 250 under the drive of the output shaft assembly 250. A second end of the connecting part is fixedly connected to the grabbing part, and the connecting part rotates around the output shaft assembly 250 to achieve overlapping cooperation between the grabbing part and the carrying part 540 of the carrying boat 500.

[0056] Optional, such as Figure 4 and Figure 5 As shown, the active transmission assembly 230 includes a first rotating shaft 231, a first driving wheel 233, a first driven wheel 234 and a first synchronous belt 235. The first rotating shaft 231 and the driver 240 are connected by a coupling 270. The first driving wheel 233 can be fixed on the first rotating shaft 231 by a set screw to prevent the first driving wheel 233 from axial movement. The first driven wheel 234 can be connected to the output shaft assembly 250 by a key. The first driving wheel 233 and the first driven wheel 234 are connected by a first synchronous belt 235. When the driver 240 rotates, the power is transmitted to the first driving shaft through the coupling 270. The first driving shaft drives the first driving wheel 233 to rotate in the same direction. The first driving wheel 233 drives the first driven wheel 234 to rotate in the same direction through the first synchronous belt 235. When the first driven wheel 234 rotates, it drives the output shaft assembly 250 to rotate in the same direction, thereby realizing the transmission of power from the driver 240 to the output shaft assembly 250.

[0057] Optional, such as Figures 4 to 6 As shown, the active transmission assembly 230 also includes a driving gear 232, which is arranged on the outer periphery of the first rotating shaft 231, that is, the driving gear 232 and the first driving wheel 233 are coaxially arranged. The driven transmission assembly 220 includes a second rotating shaft 221, a driven gear 222, a second driving wheel 223, a second driven wheel 224 and a second synchronous belt 225. The driven gear 222 can be connected to the second rotating shaft 221 through a key, and the second driving wheel 223 can be fixed on the second rotating shaft 221 through a set screw to prevent the second driving wheel 223 from axial movement. The second driven wheel 224 can be connected to the output shaft assembly 250 through a key, and the second synchronous belt 225 is arranged around the second driving wheel 223 and the second driven wheel 224. The driven gear 222 is meshed with the driving gear 232, and when the first rotating shaft 231 rotates under the drive of the driver 240, the driving gear 232 also rotates accordingly. When the driving gear 232 rotates, it transmits power to the driven gear 222, driving the driven gear 222 to rotate in the opposite direction. The driven gear 222 drives the second driving wheel 223 to rotate in the same direction through the second rotating shaft 221. The second driving wheel 223 then drives the second driven wheel 224 to rotate in the same direction through the second synchronous belt 225. The second driven wheel 224 drives the output shaft assembly 250 to rotate in the same direction. Since the rotation directions of the two output shaft assemblies 250 are the same as the first rotating shaft 231 and the second rotating shaft 221, respectively, and the rotation directions of the first rotating shaft 231 and the second rotating shaft 221 are opposite, the rotation directions of the two output shaft assemblies 250 are opposite, and the two grasping mechanisms 300 are opened and closed under the drive of the two output shaft assemblies 250 with opposite rotation directions. Of course, the active transmission assembly 230 and the driven transmission assembly 220 can also adopt other structures, which are not limited here.

[0058] Optionally, both ends of the first rotating shaft 231 and the second rotating shaft 221 are arranged on the longitudinal beam 120 of the mounting frame 100 through a bearing seat, the first rotating shaft 231 and the second rotating shaft 221 are connected to the bearing seat through a bearing, and the bearing seat can be connected to the longitudinal beam 120 of the mounting frame 100 through a bolt. The driver 240 is fixedly connected to the longitudinal beam 120 through the fixing seat 210. The driver 240 may include a driving motor 241 and a reducer 242, the shaft of the driving motor 241 is connected to the input shaft of the reducer 242, and the output shaft of the reducer 242 is connected to the first rotating shaft 231 through a coupling 270. The reducer can be fixed to the fixing seat 210 by screws, and the fixing seat 210 can be fixed to the longitudinal beam 120 by screws.

[0059] Optionally, a gear fixing ring 260 is mounted on the first rotating shaft 231 by means of a set screw, and the gear fixing ring 260 is located on the side of the driving gear 232 close to the driver 240 to prevent the driving gear 232 from axial movement. A gear fixing ring 260 is also provided on the second rotating shaft 221, and the gear fixing ring 260 is located on the side of the driven gear 222 away from the second driving wheel 223 to prevent the driven gear 222 from axial movement.

[0060] Optional, such as Figures 4 to 6 As shown, the output shaft assembly 250 includes an output shaft 251, a transmission shaft 252, a synchronous shaft 253 and a bearing seat. The number of the synchronous shafts 253 can be multiple, and both ends of each synchronous shaft 253 are connected to the crossbeam 110 of the mounting frame 100 through the bearing seat. The connecting portion is connected to the synchronous shaft 253 in a one-to-one correspondence, and the connecting portion can be specifically connected to the synchronous shaft 253 through a key, so that the connecting portion can rotate around the synchronous shaft 253 under the drive of the synchronous shaft 253. Each synchronous shaft 253 is coaxially arranged, and two adjacent synchronous shafts 253 are connected through the transmission shaft 252. The output shaft 251 is located at one end of the output shaft assembly 250 and is connected to the synchronous shaft 253. The output shaft 251 and the synchronous shaft 253 and the synchronous shaft 253 and the transmission shaft 252 can be connected through a coupling 270. The first driven wheel 234 and the second driven wheel 224 are respectively connected to the output shaft 251 of the corresponding output shaft assembly 250. When the first driven wheel 234 and the second driven wheel 224 drive the output shaft 251 connected thereto to rotate, the output shaft 251 drives the synchronous rotating shaft 253 connected thereto to rotate, thereby driving the connecting part to rotate, thereby realizing the opening and closing of the two grasping mechanisms 300 .

[0061] Optionally, the gripping portion includes at least one bearing link 320 and at least one guide sleeve 330. Figure 7 and Figure 8 As shown, there are multiple load-bearing connecting rods 320 and guide sleeves 330, and the load-bearing connecting rods 320 are located between two adjacent connecting parts, and each load-bearing connecting rod 320 is coaxially connected. Fig. 9 As shown, the load-bearing connecting rod 320 may be provided with a threaded hole 322 at one end and a connector 321 at the other end, and the connector 321 is connected to the threaded hole 322 by threads. A plurality of load-bearing connecting rods 320 are connected to form a load-bearing rod. A through hole is provided at the second end of the connecting portion, and the load-bearing rod is inserted into the through hole. A guide sleeve 330 is sleeved on the outer periphery of the load-bearing connecting rod 320, and the guide sleeve 330 can be used to support the carrying part 540 of the load-bearing boat 500. The guide sleeve 330 can reduce the wear of the carrying part 540 on the load-bearing rod, thereby extending the service life of the load-bearing rod.

[0062] Optionally, the connecting portion may be a connecting bent plate 310. The structure of the connecting bent plate 310 is as follows: Figure 7As shown. The connecting bent plate 310 can make way for the carrying boat 500 to prevent the connecting bent plate 310 from colliding with the carrying boat 500. There are multiple connecting bent plates 310, and more than two guide sleeves 330 can be arranged between two adjacent connecting bent plates 310. Each connecting bent plate 310 is used to carry the carrying boat 500, so the grabbing mechanism 300 can form multi-point support for multiple carrying boats 500, thereby improving the strength of the grabbing mechanism 300 and preventing the carrying rod from being damaged due to overload.

[0063] Optionally, the guide sleeves 330 are evenly spaced in the length direction of the carrying rod, and each guide sleeve 330 correspondingly carries a carrying portion 540 , so that the gripping portion can hold up the carrying portions 540 of multiple carrying boats 500 .

[0064] Optionally, the outer wall of the guide sleeve 330 is provided with a positioning groove 331 along its circumference, and the carrying part 540 of the carrying boat 500 can be accommodated in the positioning groove 331. When the grabbing part carries the carrying boat 500, the carrying part 540 enters the positioning groove 331, and the positioning groove 331 can position the carrying part 540 to prevent the carrying boat 500 from moving along the carrying rod, thereby improving the safety when grabbing and moving the carrying boat 500.

[0065] Optionally, the positioning groove 331 is a trapezoidal groove, and the width of the positioning groove 331 gradually increases in the direction away from the groove bottom. The two side walls of the positioning groove 331 form guiding slopes, and the carrying part 540 of the carrying boat 500 can slide along the guiding slopes to the groove bottom of the positioning groove 331.

[0066] In some embodiments, the driving mechanism 200 further includes a fixing seat 210, the fixing seat 210 is fixedly connected to the longitudinal beam 120 of the mounting frame 100, and the bearing seats at both ends of the first rotating shaft 231 and the second rotating shaft 221 are fixedly connected to the fixing seat 210 by screws. A fixing bracket is provided on one side of the fixing seat 210, and the driver 240 is connected to the fixing bracket.

[0067] During the process of transporting the carrier boat, the mounting frame 100 may collide with other equipment, and the collision often causes damage to the wafer or even the carrier boat 500. The operator needs to handle it in time after the collision occurs to avoid further deterioration of the accident. In some embodiments, a collision detection mechanism 400 is provided on the longitudinal beam 120 of the mounting frame 100, and the collision detection mechanism 400 is used to detect whether the transmission device collides with other equipment. After the collision detection mechanism 400 detects the collision, the operation of the transmission device is stopped, and the operator is prompted to handle the accident.

[0068] Optional, such as Figures 10 to 12As shown, the longitudinal beam 120 is provided with an upwardly extending mounting post 121. The collision detection mechanism 400 includes a rotating block 410 and a micro switch 430. The rotating block 410 can be sleeved on the outer periphery of the mounting post 121 and is rotatably connected to the mounting post 121 through a rotating pin 440. The micro switch 430 is located on both sides of the rotating pin 440, specifically at both ends of the rotating block 410, and is arranged toward the longitudinal beam 120. When a collision occurs, one end of the rotating block 410 is subjected to force and then rotates around the rotating pin 440, and the micro switch 430 on this side contacts the longitudinal beam 120 to trigger an alarm.

[0069] Optionally, the collision detection mechanism 400 further includes an elastic plunger 420, which is mounted on the side of the rotating block 410 facing the longitudinal beam 120. The elastic plunger 420 is located between the micro switch 430 and the mounting column 121, and the length of the elastic plunger 420 is greater than the length of the micro switch 430. When the rotating block 410 rotates around the rotating pin 440, the elastic plunger 420 contacts the longitudinal beam 120 before the micro switch 430, and the elastic force of the elastic plunger 420 supports the rotating block 410 and prevents it from continuing to rotate, thereby preventing the micro switch 430 from being triggered by mistake. Only when the rotating block 410 is subjected to force and can overcome the elastic force of the elastic plunger 420, can the micro switch 430 contact the longitudinal beam 120, thereby triggering an alarm.

[0070] Optionally, the rotating block 410 is provided with four threaded holes 322, and the four threaded holes 322 are distributed in a rectangular shape around the support column. The number of elastic plungers 420 is also four, and the four spring plungers are installed in the four threaded holes 322 one by one. Of course, the user can also set the number and distribution of the elastic plungers 420 as needed, which is not limited here.

[0071] Optionally, the installation body further includes a transfer device, which may be specifically an automatic loading and unloading mechanism 600. The grabbing mechanism 300 needs to cooperate with the automatic loading and unloading mechanism 600 to realize the transportation of the carrying boat 500. Fig.17As shown, the automatic loading and unloading mechanism 600 includes an active vertical module 610 and a driven vertical module 620, which are arranged in parallel and used to drive the grabbing mechanism 300 to move in the vertical direction. A vertical synchronization shaft is installed between the active vertical module 610 and the driven vertical module 620 to ensure the synchronous movement of the two. A vertical reducer and a vertical motor are installed on one side of the active vertical module 610 to provide power input for the vertical movement of the active vertical module 610. The automatic loading and unloading mechanism 600 also includes a first horizontal active stretching mechanism 630 and a first horizontal driven stretching mechanism 640, which are arranged in parallel and fixed on the active vertical module 610 and the driven vertical module 620 respectively. A first horizontal synchronization shaft is installed between the first horizontal active stretching mechanism 630 and the first horizontal driven stretching mechanism 640 to ensure the synchronous movement of the first horizontal active stretching mechanism 630 and the first horizontal driven stretching mechanism 640. The automatic loading and unloading mechanism 600 also includes a second horizontal active stretching mechanism 650 and a second horizontal driven stretching mechanism 660, which are arranged in parallel and fixed on the first horizontal active stretching mechanism 630 and the first horizontal driven stretching mechanism 640 respectively. A second horizontal synchronous shaft is installed between the second horizontal active stretching mechanism 650 and the second horizontal driven stretching mechanism 660 to ensure the synchronous movement of the second horizontal active stretching mechanism 650 and the second horizontal driven stretching mechanism 660. A first horizontal reducer and a first horizontal motor and a second horizontal reducer and a second horizontal motor are installed on one side of the first horizontal active stretching mechanism 630 and the second horizontal active stretching mechanism 650 respectively to provide power input for the horizontal movement of loading and unloading. The mounting frame 100 is installed on the second horizontal active stretching mechanism 650 and the second horizontal driven stretching mechanism 660. When the first horizontal motor rotates, the second horizontal active stretching mechanism 650, the second horizontal driven stretching mechanism 660 and the mounting frame 100 move in the horizontal direction synchronously; when the second horizontal motor rotates, both ends of the mounting frame 100 move in the horizontal direction synchronously.

[0072] The movement process of the transmission device grabbing the carrying boat 500 is as follows:

[0073] Step 1: The automatic loading and unloading mechanism 600 first moves to a set first height position;

[0074] Step 2: Move the transmission device to the top of the carrier boat 500 by horizontal movement;

[0075] Step 3: The driving motor 241 of the transmission device rotates, the grabbing mechanism 300 rotates in a direction away from the carrying boat 500, and the transmission device opens;

[0076] Step 4: The automatic loading and unloading mechanism 600 drives the transmission device to move vertically downward to a second height position;

[0077] Step 5: The driving motor 241 of the transmission device rotates in the opposite direction, the grabbing mechanism 300 rotates toward the carrying boat 500, the transmission device is closed, and the grabbing portion of the grabbing mechanism 300 is overlapped with the carrying portion 540 of the carrying boat 500;

[0078] Step 6: The automatic loading and unloading mechanism 600 drives the grabbing mechanism 300 to move vertically upward to complete the grabbing action.

[0079] The present application also provides a feeding device, including a push-pull boat 700, a transmission device, a horizontal feeding mechanism 900 and a bearing beam 800. The transmission device is installed on the automatic loading and unloading mechanism 600, the automatic loading and unloading mechanism 600 and the push-pull boat 700 are arranged in parallel, the bearing beam 800 is installed on the push-pull boat 700, and the horizontal feeding mechanism 900 is installed below the automatic loading and unloading mechanism 600. The reaction chamber 1 and the push-pull boat 700 are in a straight line.

[0080] The silicon wafer is carried by the carrying boat 500, and the horizontal feeding mechanism 900 transports the carrying boat 500 carrying the silicon wafer to the bottom of the automatic loading and unloading mechanism. The automatic loading and unloading mechanism 600 moves vertically and horizontally with the transmission device. The transmission device moves the carrying boat 500 on the horizontal feeding mechanism 900 to the bearing beam 800 installed on the push-pull boat 700. The push-pull boat 700 carries the bearing beam 800 and the carrying boat 500 on the bearing beam 800 to move linearly in the direction close to the reaction chamber 1. When the bearing beam 800 extends into the reaction chamber 1, the push-pull boat 700 moves vertically, and the carrying boat 500 falls into the reaction chamber 1. The push-pull boat 700 continues to move linearly away from the reaction chamber 1, and the bearing beam 800 exits the reaction chamber 1. Through the above process, the silicon wafer is moved into the reaction chamber 1.

[0081] The present application also provides a carrying boat 500, including a carrying boat body, the carrying boat body including a first side plate 510 and a second side plate 520, wherein the second side plate 520 and the first side plate 510 are distributed along the width direction of the carrying boat body, and the outer sides of the first side plate 510 and the second side plate 520 are provided with a carrying portion 540, and optionally, the carrying boat body also includes a bottom support plate 530, the bottom support plate 530 is located between the first side plate 510 and the second side plate 520, and is connected to the first side plate 510 and the second side plate 520. The carrying boat body and the carrying portion 540 are both made of quartz. The carrying portion 540 is located at the same height on the first side plate 510 and the second side plate 520, and is arranged near the top of the first side plate 510 and the second side plate 520. The carrying portion 540 is used to cooperate with the transmission device in any of the above embodiments to move.

[0082] Optionally, the first side plate 510 and the second side plate 520 are both rectangular, and four quartz rods 550 are arranged between the two. The two ends of the quartz rods 550 are respectively welded and fixed to the first side plate 510 and the second side plate 520, and the four quartz rods 550 are respectively arranged near the four corners of the first side plate 510 and the second side plate 520. The quartz rods 550 are provided with a plurality of wafer grooves along the length direction for placing wafers. The carrying boat 500 cooperates with the transmission device through the carrying part 540, eliminating the original boat support, and the space originally occupied by the boat support can be used to increase the volume of the carrying boat body, thereby increasing the accommodation space of the carrying boat 500, so that the carrying boat 500 can accommodate more wafers.

[0083] In some embodiments, the bottom of the carrying boat body is provided with a boat foot 560. Specifically, four boat feet 560 may be provided at the bottom of the carrying boat body, and the boat feet 560 are used to support the carrying boat body. The boat foot 560 has a hollow structure for reducing weight. Exemplarily, the hollow structure is a hollow hole. After hollowing, the weight of the boat foot 560 can be reduced, and the structural strength of the boat foot 560 can be improved, thereby extending the service life of the boat foot 560.

[0084] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present application, but the present application is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and substance of the present application, and these modifications and improvements are also considered to be within the scope of protection of the present application.

Claims

1. A transmission device for transmitting a carrier boat, characterized in that: The transmission device includes a mounting body, a gripping mechanism and a driving mechanism; wherein, The grabbing mechanism is rotatably connected to the mounting body and corresponds to two side surfaces of the carrying boat distributed along a first direction. The grabbing mechanism includes a grabbing portion, and the grabbing portion overlaps and cooperates with the corresponding carrying portion on the side surface. The first direction is the width direction of the carrying boat. The driving mechanism is used to drive the grabbing mechanism to rotate, so that the grabbing parts of the grabbing mechanism move closer to each other or farther away from each other, so as to grab or place the carrying boat.

2. The transmission device according to claim 1, characterized in that: The driving mechanism includes an output shaft assembly, a driving transmission assembly, a driven transmission assembly and a driver; The output shaft assembly is connected to the mounting body, the number of the output shaft assemblies is equal to the number of the grabbing mechanisms, and the output shaft assemblies are fixedly connected to each of the grabbing mechanisms in a one-to-one correspondence, so as to drive each of the grabbing mechanisms to rotate; The active transmission assembly and the driven transmission assembly are in transmission cooperation and are respectively connected to each of the output shaft assemblies; The driver is connected to the active transmission assembly and drives the two output shaft assemblies to rotate in opposite directions through the active transmission assembly and the driven transmission assembly.

3. The transmission device according to claim 2, characterized in that: The grabbing mechanism comprises a plurality of connecting parts, wherein the connecting parts are fixedly connected to the output shaft assembly, and the grabbing part is connected to an end of the connecting part away from the output shaft assembly.

4. The transmission device according to claim 3, characterized in that: The grabbing portion includes at least one load-bearing connecting rod and at least one guide sleeve, the two ends of the load-bearing connecting rod are respectively connected to two adjacent connecting portions, and when the number of the load-bearing connecting rods is more than two, each of the load-bearing connecting rods is coaxially arranged; The guide sleeve is sleeved on the outer periphery of the load-bearing connecting rod and is used for supporting the carrying part of the load-bearing boat.

5. The transmission device according to claim 4, characterized in that: The outer wall of the guide sleeve is provided with a positioning groove arranged along the circumference thereof, and the positioning groove is used to accommodate the carrying part.

6. The transmission device according to claim 5, characterized in that: When there are multiple guide sleeves, all the guide sleeves are distributed at equal intervals so that the gap between two adjacent carrying boats is not greater than a preset value.

7. The transmission device according to claim 1, characterized in that: The installation body includes a crossbeam and a longitudinal beam, wherein the crossbeam extends along the direction in which the carrying boats are arranged, and the longitudinal beam is arranged at the end of the crossbeam. A collision detection mechanism for detecting collision of the installation body with other components is also provided on the crossbeam or the longitudinal beam.

8. The transmission device according to claim 7, characterized in that: The longitudinal beam is provided with a mounting column, and the collision detection mechanism includes a rotating block and a micro switch, the mounting column is rotatably connected to the middle part of the rotating block, and the micro switch is located at both ends of the rotating block and is arranged toward the longitudinal beam.

9. The transmission device according to claim 8, characterized in that: The collision detection mechanism further comprises an elastic plunger, which is mounted on a side of the rotating block facing the longitudinal beam, and is located between the micro switch and the mounting column, and is used to protect the micro switch.

10. A carrying boat, characterized in that: It includes a first side plate and a second side plate, the first side plate and the second side plate are distributed along the width direction of the carrying boat, and the outer sides of the first side plate and the second side plate are provided with a carrying portion for cooperating with the grabbing mechanism of the transmission device according to any one of claims 1 to 9.

11. The carrying boat according to claim 10, characterized in that: The bottom of the carrying boat is provided with boat feet, and the boat feet have a hollow structure for reducing weight.

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