Transport device and carrier boat

Abstract

The application provides a carrier boat and a conveying device. The conveying device is used for conveying a plurality of carrier boats and comprises a mounting body, a grabbing mechanism and a driving mechanism. The number of the grabbing mechanisms is two. Both of the grabbing mechanisms are rotatably connected with the mounting body. The two grabbing mechanisms are respectively located on two sides of two opposite sides of the carrier boat. Each grabbing mechanism comprises at least one grabbing part. Each grabbing part is engaged with each loading part on the corresponding side. The driving mechanism is used for driving the two grabbing mechanisms to rotate, so that the grabbing parts of the two grabbing mechanisms are close to or away from each other, so as to grab or place the carrier boat. The conveying device of the application does not need to cooperate with a boat support to grab the carrier boat, so that the boat support will not be sent into a semiconductor heat treatment equipment, thereby avoiding replacement of the boat support and reducing production cost.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing, and more specifically, to a transmission device and a carrier boat. Background Technology

[0002] Horizontal diffusion furnaces are used to dope silicon substrates to create PN junctions and are one of the key pieces of equipment in the production process of crystalline silicon photovoltaic cells. A common wafer-bearing method in diffusion furnaces is as follows: two quartz boat supports, arranged end-to-end along the direction of entry and exit from the reaction chamber, simultaneously support multiple quartz boats. Each quartz boat carries a certain number of silicon wafers, which are placed vertically along the direction of entry and exit from the reaction chamber, while another number of wafers are arranged parallel to each other along the vertical direction. Currently, with the continuous increase in process temperature, the quartz boat supports will deform to varying degrees after a period of use, affecting the automated handling of silicon wafers. Frequent replacement of deformed quartz boat supports significantly increases production costs.

[0003] In recent years, with the rapid development of the photovoltaic industry and increasingly fierce market competition, major photovoltaic companies are actively expanding their production capacity to quickly seize market share. This has placed higher demands on the capacity of diffusion furnaces. One important research direction for improving equipment capacity is how to increase the single-tube wafer loading capacity under the constraints of equipment size and constant temperature zone in the reaction chamber. Before the process, a quartz boat support carries multiple quartz boats. A robotic arm lifts the quartz boat support and transports the multiple quartz boats, which are then fed into the diffusion furnace. With the continuous increase in production capacity, the load on the quartz boat support under the current wafer loading method is greater, making it more prone to deformation. Prolonged use at high temperatures can cause deformation of the quartz boat support. Excessive deformation necessitates replacement, increasing production costs for companies. Summary of the Invention

[0004] This application aims to solve at least one of the technical problems existing in the prior art, and proposes a transmission device and a carrier boat that does not require the carrier boat to be supported by a quartz boat support, thus avoiding the need to replace the quartz boat support and reducing production costs.

[0005] To achieve the purpose of this application, a transmission device is provided for transmitting a carrier boat. The transmission device includes an installation body, a gripping mechanism, and a driving mechanism; wherein,

[0006] The gripping mechanism is rotatably connected to the mounting body and corresponds to two sides of the carrier boat distributed along a first direction. The gripping mechanism includes a gripping part, which overlaps with the mounting part on the corresponding side. The first direction is the width direction of the carrier boat.

[0007] The driving mechanism is used to drive the gripping mechanism to rotate, so that the gripping parts of the gripping mechanism move closer or further apart to grip or place the carrier boat.

[0008] In some embodiments, the drive mechanism includes an output shaft assembly, a driving transmission assembly, a driven transmission assembly, and a driver;

[0009] The output shaft assembly is connected to the mounting body. The number of output shaft assemblies is equal to the number of gripping mechanisms, and they are fixedly connected to each gripping mechanism in a one-to-one correspondence, for driving each gripping mechanism to rotate.

[0010] The active transmission assembly and the driven transmission assembly are in transmission cooperation and are respectively connected to each of the output shaft assemblies;

[0011] The driver is connected to the active transmission component, and drives the two output shaft assemblies to rotate in opposite directions through the active transmission component and the driven transmission component.

[0012] In some embodiments, the gripping mechanism includes a plurality of connecting portions, the connecting portions being fixedly connected to the output shaft assembly, and the gripping portion being connected to the end of the connecting portion away from the output shaft assembly.

[0013] In some embodiments, the gripping part includes at least one bearing link and at least one guide sleeve. The two ends of the bearing link are respectively connected to two adjacent connecting parts. When there are two or more bearing links, each bearing link is coaxially arranged.

[0014] The guide sleeve is fitted around the outer periphery of the bearing connecting rod and is used to support the mounting part of the bearing boat.

[0015] In some embodiments, the outer wall of the guide sleeve is provided with a positioning groove arranged circumferentially thereon, the positioning groove being used to accommodate the mounting part.

[0016] In some embodiments, when there are multiple guide sleeves, all the guide sleeves are distributed at equal intervals so that the gap between two adjacent carrier boats is not greater than a preset value.

[0017] In some embodiments, the mounting body includes a crossbeam and a longitudinal beam, the crossbeam extending along the direction of the bearing boat arrangement, the longitudinal beam being disposed at the end of the crossbeam, and the crossbeam or the longitudinal beam also being provided with a collision detection mechanism for detecting collisions between the mounting body and other components.

[0018] In some embodiments, the longitudinal beam is provided with mounting columns, and the collision detection mechanism includes a rotating block and a micro switch. The mounting columns are rotatably connected to the middle of the rotating block, and the micro switches are located at both ends of the rotating block and are disposed toward the longitudinal beam.

[0019] In some embodiments, the collision detection mechanism further includes an elastic plunger mounted on the side of the rotating block facing the longitudinal beam, the elastic plunger being located between the micro switch and the mounting post, for protecting the micro switch.

[0020] This application also provides a carrier boat, including a first side plate and a second side plate, the first side plate and the second side plate being distributed along the width direction of the carrier boat, and the outer sides of the first side plate and the second side plate being provided with mounting portions for cooperating with the gripping mechanism of the transmission device according to any one of claims 1 to 9.

[0021] In some embodiments, the bottom of the support boat is provided with a foot, which has a hollow structure for weight reduction.

[0022] This application has the following beneficial effects:

[0023] The transmission device provided in this application is used to transmit multiple carrier boats. The transmission device includes an installation body, a gripping mechanism, and a driving mechanism. The number of gripping mechanisms is such that they are rotatably connected to the installation body. The gripping mechanisms correspond to two sides of the carrier boats distributed along a first direction. Each gripping mechanism includes a gripping part, which overlaps and cooperates with the mounting part on the corresponding side. The driving mechanism is used to drive the gripping mechanisms to rotate, so that the gripping parts of the gripping mechanisms move closer or further apart to grip or place the carrier boats.

[0024] The transmission device of this application does not require the boat carrier to grip the carrier boat, thus avoiding the need to send the boat carrier into the semiconductor heat treatment equipment, thereby avoiding the need to replace the boat carrier and reducing production costs.

[0025] This application also provides a carrier boat, the overlapping part of which can cooperate with the gripping part of the transmission device to move, eliminating the need for a boat support during the movement of the carrier boat and saving the cost of replacing the boat support. Attached Figure Description

[0026] Figure 1 A schematic diagram of the structure of a transmission device provided in a specific embodiment of this application;

[0027] Figure 2 for Figure 1 Top view of the transmission device;

[0028] Figure 3 for Figure 1 Side view of the transmission device;

[0029] Figure 4 for Figure 1 A partial view showing the connection between the central drive mechanism and the mounting body;

[0030] Figure 5 for Figure 4 A partial view of the central drive mechanism;

[0031] Figure 6 for Figure 4 A partial top view of the central drive mechanism;

[0032] Figure 7 for Figure 1 A partial view of the grabbing mechanism;

[0033] Figure 8 for Figure 1 The main view of the grabbing mechanism;

[0034] Figure 9 for Figure 7 A schematic diagram of the structure connecting the load-bearing connecting rod and the connecting bend plate;

[0035] Figure 10 An exploded view of the collision detection facility;

[0036] Figure 11 for Figure 10 A schematic diagram of the structure when the collision detection mechanism is not triggered.

[0037] Figure 12 for Figure 10 A schematic diagram of the structure when the collision detection mechanism is triggered;

[0038] Figures 13 to 15 A schematic diagram illustrating the motion process of the transmission device grasping the carrier boat;

[0039] Figure 16 This is a structural diagram of the feeding equipment;

[0040] Figure 17 A schematic diagram of the automatic loading and unloading mechanism and the conveying device working together;

[0041] Figure 18 This is a schematic diagram of the structure supporting the arrangement of boats;

[0042] Figure 19 This is a schematic diagram of the structure supporting the boat;

[0043] Figure 20 This is a schematic diagram of the structure that supports the boat located in the reaction chamber.

[0044] in, Figures 1 to 20 The attached figures are labeled as follows:

[0045] 1. Reaction chamber; 100. Mounting bracket; 110. Crossbeam; 120. Longitudinal beam; 121. Mounting column; 200. Drive mechanism; 210. Fixed base; 220. Driven transmission assembly; 221. Second rotating shaft; 222. Driven gear; 223. Second driving wheel; 224. Second driven wheel; 225. Second synchronous belt; 230. Driven transmission assembly; 231. First rotating shaft; 232. Driving gear; 233. First driving wheel; 234. First driven wheel; 235. First synchronous belt; 240. Driver; 241. Drive motor; 242. Reducer; 250. Output shaft assembly; 251. Output shaft; 252. Transmission shaft; 253. Synchronous rotating shaft; 260. Gear retaining ring; 270. Coupling; 300. Gripping mechanism; 310. Connecting bend plate 320. Bearing connecting rod; 321. Connector; 322. Threaded hole; 330. Guide sleeve; 331. Positioning groove; 400. Collision detection mechanism; 410. Rotating block; 420. Elastic plunger; 430. Micro switch; 440. Rotating pin; 500. Bearing boat; 510. First side plate; 520. Second side plate; 530. Bottom support plate; 540. Mounting part; 550. Quartz rod; 560. Boat foot; 600. Automatic loading and unloading mechanism; 610. Active vertical module; 620. Driven vertical module; 630. First horizontal active extension mechanism; 640. First horizontal driven extension mechanism; 650. Second horizontal active extension mechanism; 660. Second horizontal driven extension mechanism; 700. Push-pull boat; 800. Bearing beam; 900. Horizontal feeding mechanism. Detailed Implementation

[0046] To enable those skilled in the art to better understand the technical solution of this application, the following detailed description of the transmission device and the carrier boat provided in this application is given in conjunction with the accompanying drawings.

[0047] The transfer device provided in this application is used to transfer carrier boats. Multiple carrier boats are typically arranged in a straight line, and the transfer device is capable of grasping the multiple carrier boats and transferring them to a semiconductor heat treatment device.

[0048] The transmission device includes an installation body, a gripping mechanism 300, and a drive mechanism 200. For example... Figure 1 and Figure 2As shown, the gripping mechanism 300 is rotatably connected to the mounting body, and the drive mechanism 200 is used to drive the gripping mechanism to rotate. The gripping mechanism 300 corresponds to two sides of the carrier boat distributed along a first direction. The first direction is the width direction of the carrier boat. The gripping mechanism 300 includes a gripping part, which can engage with the mounting part on the corresponding side of the carrier boat. During the gripping of the carrier boat, driven by the drive mechanism 200, the gripping parts of the two gripping mechanisms 300 corresponding to the two sides of the carrier boat approach each other and engage with the mounting parts on their respective sides, thereby enabling the transmission device to complete the gripping of the carrier boat.

[0049] The number of gripping mechanisms 300 is usually two or more. It should be noted that two cooperating gripping mechanisms 300 can be used to grip multiple carrier boats. Specifically, the carrier boats can be arranged along a second direction, with both sides of each carrier boat flush. The gripping mechanism 300 corresponds to the sides of the multiple carrier boats, and its gripping part overlaps with the mounting part on the corresponding side, thus enabling the transmission device to grip multiple carrier boats at once. The second direction can be the length direction of the carrier boat, which can be perpendicular to the width direction.

[0050] The transmission device can directly grab the carrier boat through the grabbing mechanism 300 without cooperating with the boat support to complete the grabbing operation. This not only avoids the problem of increased equipment costs caused by replacing the boat support, but also allows the space originally occupied by the boat support to be used to arrange the carrier boat. More carrier boats can be transferred in one transmission operation, thus improving transmission efficiency.

[0051] Optional, such as Figure 3 As shown, there can be two gripping mechanisms 300, and the mounting body can include a mounting frame 100 and a transfer device. The mounting frame 100 can be rectangular, with its length side being a crossbeam 110 and its width side being a longitudinal beam 120. Of course, the mounting frame 100 can also adopt other structures, such as an I-beam, which are not limited here. The two gripping mechanisms 300 are rotatably connected to the two length sides of the mounting frame 100, respectively. The two gripping mechanisms 300 correspond to the two sides of the support boat 500 distributed along its width direction. The drive mechanism 200 is connected to the gripping mechanism 300 and drives the gripping mechanism 300 to rotate around the connection point. Figure 3In the specific embodiment shown, while the left gripping mechanism 300 rotates clockwise, the right gripping mechanism 300 rotates counterclockwise, at which point both gripping mechanisms 300 open. Conversely, while the left gripping mechanism 300 rotates counterclockwise, the right gripping mechanism 300 rotates clockwise, at which point both gripping mechanisms 300 close. When the two gripping mechanisms 300 of the transmission device open, their gripping parts correspond to the two sides of the carrier boat 500, respectively. When the two gripping mechanisms 300 close, their gripping parts move to below the overlapping parts on the corresponding sides, engaging with the overlapping parts to grip the carrier boat 500. Subsequently, the moving device can drive the carrier boat 500 to move. After moving into position, the two gripping mechanisms 300 open, disengaging the gripping parts from the overlapping parts, thus placing the carrier boat 500. It should be noted that... Figure 1 In the illustrated embodiment, the transmission device consists of two gripping mechanisms 300 as a group, working in conjunction with the gripping carrier boat 500. The transmission device may employ two or more groups of gripping mechanisms 300; this is merely a simple superposition of the embodiments provided in this application and is also within the scope of protection of this application.

[0052] Optionally, two gripping mechanisms 300 are respectively located on two sides of a plurality of carrier boats 500 arranged in a straight line and distributed along a first direction. Each gripping mechanism 300 includes at least one gripping part. The gripping part extends along the arrangement direction of the plurality of carrier boats 500 and can engage with mounting parts 540 on the carrier boats 500. Mounting parts 540 are provided on two opposite sides of each carrier boat 500, and the gripping parts of the two gripping mechanisms 300 respectively engage with the mounting parts 540 on both sides of the carrier boat 500 to grip the carrier boat 500. The gripping parts of the gripping mechanisms 300 can engage with the mounting parts 540 of the plurality of carrier boats 500 to grip the plurality of carrier boats 500.

[0053] The transfer device engages with the gripping part of the gripping mechanism 300 and the mounting part 540 located on the side of the carrier boat 500. The transfer device can grip multiple carrier boats 500 at once, eliminating the need for a separate boat support. The gripping part does not need to be placed in the semiconductor heat treatment equipment with the carrier boat 500 during the process, avoiding the problem of boat support deformation caused by high temperatures and saving on boat support replacement costs.

[0054] In some embodiments, the drive mechanism 200 may include an output shaft assembly 250, a driving transmission assembly 230, a driven transmission assembly 220, and a driver 240. Two output shaft assemblies 250 are provided, located on opposite sides of the mounting bracket 100. Each output shaft assembly 250 is arranged along the length of the mounting bracket 100 and rotatably connected to a side of the mounting bracket 100 along its length. Each output shaft assembly 250 is fixedly connected to the gripping mechanism 300, thereby driving the gripping mechanism 300 to rotate when the output shaft assembly 250 rotates. Both the driving transmission assembly 230 and the driven transmission assembly 220 are mounted on the mounting bracket 100 and connected to the two output shaft assemblies 250 respectively, for driving the two output shaft assemblies 250 to rotate. The driving transmission assembly 230 and the driven transmission assembly 220 are in a driving engagement, and the driver 240 is mounted on the mounting bracket 100 and is drivingly connected to the driving transmission assembly 230. The driver 240 can drive the two output shaft assemblies 250 to rotate in opposite directions through the active transmission assembly 230 and the driven transmission assembly 220, thereby realizing the opening and closing of the two gripping mechanisms 300. Of course, the drive mechanism 200 can also adopt other structures. For example, the drive mechanism 200 can be equipped with two drivers 240, which respectively drive the two output shaft assemblies 250 to rotate. This is not limited here.

[0055] Optionally, the gripping mechanism 300 may include multiple connecting parts. The first end of the connecting part is fixedly connected to the output shaft assembly 250 and can rotate around the output shaft assembly 250 under its drive. The second end of the connecting part is fixedly connected to the gripping part. The rotation of the connecting part around the output shaft assembly 250 can realize the gripping part and the mounting part 540 of the carrier boat 500 to engage and cooperate.

[0056] Optional, such as Figure 4 and Figure 5 As shown, the active transmission assembly 230 includes a first rotating shaft 231, a first driving pulley 233, a first driven pulley 234, and a first synchronous belt 235. The first rotating shaft 231 and the driver 240 are connected by a coupling 270. The first driving pulley 233 can be fixed to the first rotating shaft 231 by a set screw to prevent axial movement of the first driving pulley 233. The first driven pulley 234 can be connected to the output shaft assembly 250 by a key. The first driving pulley 233 and the first driven pulley 234 are connected by the first synchronous belt 235. When the driver 240 rotates, it transmits power to the first drive shaft through the coupling 270. The first drive shaft drives the first driving pulley 233 to rotate in the same direction. The first driving pulley 233 drives the first driven pulley 234 to rotate in the same direction through the first synchronous belt 235. When the first driven pulley 234 rotates, it drives the output shaft assembly 250 to rotate in the same direction, thereby realizing the transmission of power from the driver 240 to the output shaft assembly 250.

[0057] Optional, such as Figures 4 to 6 As shown, the active transmission assembly 230 also includes an active gear 232, which is disposed on the outer periphery of the first rotating shaft 231, i.e., the active gear 232 and the first active pulley 233 are coaxially arranged. The driven transmission assembly 220 includes a second rotating shaft 221, a driven gear 222, a second active pulley 223, a second driven pulley 224, and a second synchronous belt 225. The driven gear 222 can be connected to the second rotating shaft 221 via a key, and the second active pulley 223 can be fixed to the second rotating shaft 221 via a set screw to prevent axial movement of the second active pulley 223. The second driven pulley 224 can be connected to the output shaft assembly 250 via a key, and the second synchronous belt 225 is arranged around the second active pulley 223 and the second driven pulley 224. The driven gear 222 meshes with the active gear 232, and when the first rotating shaft 231 rotates under the drive of the driver 240, the active gear 232 also rotates accordingly. As the driving gear 232 rotates, it transmits power to the driven gear 222, causing the driven gear 222 to rotate in the opposite direction. The driven gear 222 then drives the second driving wheel 223 to rotate in the same direction via the second rotating shaft 221. The second driving wheel 223 then drives the second driven wheel 224 to rotate in the same direction via the second synchronous belt 225. The second driven wheel 224 then drives the output shaft assembly 250 to rotate in the same direction. Since the rotation directions of the two output shaft assemblies 250 are the same as those of the first rotating shaft 231 and the second rotating shaft 221, respectively, while the rotation directions of the first rotating shaft 231 and the second rotating shaft 221 are opposite, the rotation directions of the two output shaft assemblies 250 are opposite. The two gripping mechanisms 300 open and close under the drive of the two output shaft assemblies 250 with opposite rotation directions. Of course, the driving transmission assembly 230 and the driven transmission assembly 220 can also adopt other structures, which are not limited here.

[0058] Optionally, both ends of the first rotating shaft 231 and the second rotating shaft 221 are mounted on the longitudinal beam 120 of the mounting frame 100 via bearing seats. The first rotating shaft 231 and the second rotating shaft 221 are connected to the bearing seats via bearings, and the bearing seats are connected to the longitudinal beam 120 of the mounting frame 100 via bolts. The driver 240 is fixedly connected to the longitudinal beam 120 via a fixed seat 210. The driver 240 may include a drive motor 241 and a reducer 242. The shaft of the drive motor 241 is connected to the input shaft of the reducer 242, and the output shaft of the reducer 242 is connected to the first rotating shaft 231 via a coupling 270. The reducer can be fixed to the fixed seat 210 with screws, and the fixed seat 210 can be fixed to the longitudinal beam 120 with screws.

[0059] Optionally, a gear retaining ring 260 is mounted on the first rotating shaft 231 by a set screw. The gear retaining ring 260 is located on the side of the driving gear 232 closer to the driver 240 to prevent axial movement of the driving gear 232. A gear retaining ring 260 is also provided on the second rotating shaft 221. This gear retaining ring 260 is located on the side of the driven gear 222 away from the second driving gear 223 to prevent axial movement of the driven gear 222.

[0060] Optional, such as Figures 4 to 6 As shown, the output shaft assembly 250 includes an output shaft 251, a drive shaft 252, a synchronous rotating shaft 253, and bearing housings. Multiple synchronous rotating shafts 253 can be present, with both ends of each shaft connected to the crossbeam 110 of the mounting frame 100 via bearing housings. Connecting parts are connected to the synchronous rotating shafts 253 one-to-one, and can be specifically connected to the shafts via keys, allowing the connecting parts to rotate around the synchronous rotating shafts 253 under their influence. All synchronous rotating shafts 253 are coaxially arranged, and adjacent shafts 253 are connected via the drive shaft 252. The output shaft 251 is located at one end of the output shaft assembly 250 and is connected to the synchronous rotating shaft 253. The output shaft 251 and the synchronous rotating shaft 253, as well as the synchronous rotating shaft 253 and the drive shaft 252, can be connected via couplings 270. The first driven wheel 234 and the second driven wheel 224 are respectively connected to the output shaft 251 of their corresponding output shaft assemblies 250. When the first driven wheel 234 and the second driven wheel 224 drive the output shaft 251 connected to them to rotate, the output shaft 251 drives the synchronous rotating shaft 253 connected to it to rotate, which in turn drives the connecting part to rotate, thereby realizing the opening and closing of the two gripping mechanisms 300.

[0061] Optionally, the gripping part includes at least one load-bearing link 320 and at least one guide sleeve 330. For example... Figure 7 and Figure 8 As shown, there are multiple load-bearing connecting rods 320 and guide sleeves 330. The load-bearing connecting rods 320 are located between two adjacent connecting parts, and all load-bearing connecting rods 320 are coaxially connected. Specifically, as... Figure 9 As shown, the supporting connecting rod 320 has a threaded hole 322 at one end and a connector 321 at the other end, with the connector 321 connected to the threaded hole 322 by threads. Multiple supporting connecting rods 320 are connected to form a supporting rod. The second end of the connecting part has a through hole, through which the supporting rod passes. A guide sleeve 330 is sleeved on the outer periphery of the supporting connecting rod 320, and the guide sleeve 330 can be used to support the mounting part 540 of the supporting boat 500. The guide sleeve 330 can reduce the wear of the mounting part 540 on the supporting rod and extend the service life of the supporting rod.

[0062] Optionally, the connecting part can be a connecting bend 310, and the structure of the connecting bend 310 is as follows: Figure 7As shown. The connecting bend plate 310 can make way for the carrier boat 500, preventing the connecting bend plate 310 from colliding with the carrier boat 500. There are multiple connecting bend plates 310, and more than two guide sleeves 330 can be set between two adjacent connecting bend plates 310. Each connecting bend plate 310 is used to support the carrier boat 500, so the gripping mechanism 300 can provide multi-point support for multiple carrier boats 500, which improves the strength of the gripping mechanism 300 and prevents the carrier rod from being damaged due to overload.

[0063] Optionally, the guide sleeves 330 are evenly distributed along the length of the support rod, and each guide sleeve 330 corresponds to supporting one mounting part 540, so that the gripping part can support the mounting parts 540 of multiple support boats 500.

[0064] Optionally, the outer wall of the guide sleeve 330 is provided with a positioning groove 331 along its circumference, and the mounting part 540 of the carrier boat 500 can be accommodated in the positioning groove 331. When the gripping part carries the carrier boat 500, the mounting part 540 enters the positioning groove 331, and the positioning groove 331 can position the mounting part 540, preventing the carrier boat 500 from moving along the support rod, thus improving the safety when gripping and moving the carrier boat 500.

[0065] Optionally, the positioning groove 331 is a trapezoidal groove, the width of the positioning groove 331 gradually increases in the direction away from the bottom of the groove, and the two side walls of the positioning groove 331 form guide slopes, so that the mounting part 540 of the carrier boat 500 can slide down to the bottom of the positioning groove 331 along the guide slopes.

[0066] In some embodiments, the drive mechanism 200 further includes a fixed base 210, which is fixedly connected to the longitudinal beam 120 of the mounting frame 100. The bearing seats at both ends of the first rotating shaft 231 and the second rotating shaft 221 are fixedly connected to the fixed base 210 by screws. A fixed bracket is provided on one side of the fixed base 210, and the drive 240 is connected to the fixed bracket.

[0067] During the transfer of the carrier boat, the mounting frame 100 may collide with other equipment, often causing damage to the wafer or even the carrier boat 500. Operators need to handle the situation promptly after a collision to prevent further escalation. In some embodiments, a collision detection mechanism 400 is provided on the longitudinal beam 120 of the mounting frame 100. The collision detection mechanism 400 is used to detect whether the transfer device has collided with other equipment. Upon detecting a collision, the collision detection mechanism 400 stops the operation of the transfer device and prompts the operator to handle the incident.

[0068] Optional, such as Figures 10 to 12As shown, the longitudinal beam 120 has an upwardly extending mounting post 121. The collision detection mechanism 400 includes a rotating block 410 and a micro switch 430. The rotating block 410 can be sleeved on the outer periphery of the mounting post 121 and is rotatably connected to the mounting post 121 via a rotating pin 440. The micro switch 430 is located on both sides of the rotating pin 440, specifically at both ends of the rotating block 410, and is positioned towards the longitudinal beam 120. When a collision occurs, one end of the rotating block 410 is subjected to force and rotates around the rotating pin 440. The micro switch 430 on that side comes into contact with the longitudinal beam 120, triggering an alarm.

[0069] Optionally, the collision detection mechanism 400 also includes a resilient plunger 420, which is mounted on the side of the rotating block 410 facing the longitudinal beam 120. The resilient plunger 420 is located between the micro switch 430 and the mounting post 121, and the extension length of the resilient plunger 420 is greater than the extension length of the micro switch 430. When the rotating block 410 rotates around the rotating pin 440, the resilient plunger 420 contacts the longitudinal beam 120 before the micro switch 430. The elastic force of the resilient plunger 420 supports the rotating block 410, preventing it from continuing to rotate, thereby preventing the micro switch 430 from being falsely triggered. Only when the rotating block 410 is subjected to force that can overcome the elastic force of the resilient plunger 420 can the micro switch 430 contact the longitudinal beam 120, thereby triggering an alarm.

[0070] Optionally, the rotating block 410 has four threaded holes 322, which are arranged in a rectangular pattern around the support column. There are also four elastic plungers 420, each corresponding to one of the four threaded holes 322. Of course, the user can set the number and distribution of the elastic plungers 420 as needed; this is not limited here.

[0071] Optionally, the installation unit also includes a transfer device, which can specifically be an automatic loading and unloading mechanism 600. The gripping mechanism 300 needs to cooperate with the automatic loading and unloading mechanism 600 to realize the transport of the carrier boat 500. Figure 17As shown, the automatic loading and unloading mechanism 600 includes an active vertical module 610 and a driven vertical module 620, which are arranged in parallel to drive the gripping mechanism 300 to move vertically. A vertical synchronous shaft is installed between the active vertical module 610 and the driven vertical module 620 to ensure their synchronous movement. A vertical reducer and a vertical motor are installed on one side of the active vertical module 610 to provide power input for its vertical movement. The automatic loading and unloading mechanism 600 also includes a first horizontal active extension mechanism 630 and a first horizontal driven extension mechanism 640, which are arranged in parallel and fixed to the active vertical module 610 and the driven vertical module 620, respectively. A first horizontal synchronous shaft is installed between the first horizontal active extension mechanism 630 and the first horizontal driven extension mechanism 640 to ensure their synchronous movement. The automatic loading and unloading mechanism 600 also includes a second horizontal active extension mechanism 650 and a second horizontal driven extension mechanism 660, which are arranged in parallel and fixed to the first horizontal active extension mechanism 630 and the first horizontal driven extension mechanism 640, respectively. A second horizontal synchronous shaft is installed between the second horizontal active extension mechanism 650 and the second horizontal driven extension mechanism 660 to ensure synchronous movement of the two mechanisms. A first horizontal reducer and a first horizontal motor, as well as a second horizontal reducer and a second horizontal motor, are respectively installed on one side of the first horizontal active extension mechanism 630 and the second horizontal active extension mechanism 650 to provide power input for the horizontal movement of the loading and unloading mechanism. The mounting bracket 100 is mounted on the second horizontal active extension mechanism 650 and the second horizontal driven extension mechanism 660. When the first horizontal motor rotates, the second horizontal active extension mechanism 650, the second horizontal driven extension mechanism 660, and the mounting bracket 100 move horizontally synchronously; when the second horizontal motor rotates, both ends of the mounting bracket 100 move horizontally synchronously.

[0072] The movement process of the transmission device grabbing the carrier boat 500 is as follows:

[0073] Step 1: The automatic loading and unloading mechanism 600 first moves to the set first height position;

[0074] Step 2: Move the transmission device horizontally to directly above the carrier boat 500;

[0075] Step 3: The drive motor 241 of the transmission device rotates, the gripping mechanism 300 rotates in a direction away from the carrier boat 500, and the transmission device opens;

[0076] Step 4: The automatic loading and unloading mechanism 600 drives the conveyor device to move vertically downwards to the second height position;

[0077] Step 5: The drive motor 241 of the transmission device rotates in the opposite direction, the gripping mechanism 300 rotates towards the carrier boat 500, the transmission device closes, and the gripping part of the gripping mechanism 300 and the mounting part 540 of the carrier boat 500 are connected.

[0078] Step 6: The automatic loading and unloading mechanism 600 drives the gripping mechanism 300 to move vertically upward to complete the gripping action.

[0079] This application also provides a feeding device, including a push-pull boat 700, a conveying device, a horizontal feeding mechanism 900, and a supporting beam 800. The conveying device is mounted on an automatic loading and unloading mechanism 600, which is arranged in parallel with the push-pull boat 700. The supporting beam 800 is mounted on the push-pull boat 700, and the horizontal feeding mechanism 900 is mounted below the automatic loading and unloading mechanism 600. The reaction chamber 1 is aligned with the push-pull boat 700.

[0080] The silicon wafer is supported by a carrier boat 500. The horizontal feeding mechanism 900 transports the carrier boat 500 carrying the silicon wafer to the area below the automatic loading and unloading mechanism 600. The automatic loading and unloading mechanism 600 moves vertically and horizontally with the conveying device. The conveying device moves the carrier boat 500 on the horizontal feeding mechanism 900 onto the carrier beam 800 installed on the push-pull boat 700. The push-pull boat 700 moves in a straight line with the carrier beam 800 and the carrier boat 500 on the carrier beam 800 toward the reaction chamber 1. When the carrier beam 800 extends into the reaction chamber 1, the push-pull boat 700 moves vertically, and the carrier boat 500 falls into the reaction chamber 1. The push-pull boat 700 continues to move in a straight line away from the reaction chamber 1, and the carrier beam 800 exits the reaction chamber 1. Through the above process, the silicon wafer moves into the reaction chamber 1.

[0081] This application also provides a support boat 500, including a support boat body. The support boat body includes a first side plate 510 and a second side plate 520, wherein the second side plate 520 and the first side plate 510 are distributed along the width direction of the support boat body. A mounting portion 540 is provided on the outer side of both the first side plate 510 and the second side plate 520. Optionally, the support boat body further includes a bottom support plate 530, which is located between the first side plate 510 and the second side plate 520 and connected to them. Both the support boat body and the mounting portion 540 are made of quartz. The mounting portion 540 is located at the same height on the first side plate 510 and the second side plate 520 and is positioned near the top of the first side plate 510 and the second side plate 520. The mounting portion 540 is used to move in conjunction with the transmission device in any of the above embodiments.

[0082] Optionally, both the first side plate 510 and the second side plate 520 are rectangular, and four quartz rods 550 are provided between them. The two ends of each quartz rod 550 are welded and fixed to the first side plate 510 and the second side plate 520, respectively. The four quartz rods 550 are positioned near the four corners of the first side plate 510 and the second side plate 520. Each quartz rod 550 has multiple wafer slots along its length for placing wafers. The carrier boat 500, through the mounting part 540, cooperates with the transfer device, eliminating the need for a separate boat support. The space originally occupied by the boat support can be used to increase the volume of the carrier boat body, thereby increasing the carrying capacity of the carrier boat 500 and allowing it to hold more wafers.

[0083] In some embodiments, the bottom of the supporting boat body is provided with boat feet 560. Specifically, four boat feet 560 may be provided at the bottom of the supporting boat body, and the boat feet 560 are used to support the supporting boat body. The boat feet 560 have a hollow structure for weight reduction. For example, the hollow structure is a hollow hole. The hollow structure can not only reduce the weight of the boat feet 560, but also improve the structural strength of the boat feet 560 and extend the service life of the boat feet 560.

[0084] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this application, and this application is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and substance of this application, and these modifications and improvements are also considered to be within the scope of protection of this application.

Claims

1. A transmission device for transmitting a carrier boat, characterized in that, The transmission device includes an installation body, a gripping mechanism, and a driving mechanism; wherein... The gripping mechanism is rotatably connected to the mounting body and corresponds to two sides of the carrier boat distributed along a first direction. The gripping mechanism includes a gripping part, which overlaps with the mounting part on the corresponding side. The first direction is the width direction of the carrier boat. The driving mechanism is used to drive the gripping mechanism to rotate, so that the gripping parts of the gripping mechanism move closer or further apart to grip or place the carrier boat; The drive mechanism includes an output shaft assembly, a driving transmission assembly, a driven transmission assembly, and a driver. The output shaft assembly is connected to the mounting body. The number of output shaft assemblies is equal to the number of gripping mechanisms, and they are fixedly connected to each gripping mechanism in a one-to-one correspondence, for driving each gripping mechanism to rotate. The active transmission assembly and the driven transmission assembly are in transmission cooperation and are respectively connected to each of the output shaft assemblies; The driver is connected to the active transmission component, and drives the two output shaft assemblies to rotate in opposite directions through the active transmission component and the driven transmission component.

2. The transmission device according to claim 1, characterized in that, The gripping mechanism includes multiple connecting parts, which are fixedly connected to the output shaft assembly, and the gripping part is connected to the end of the connecting part away from the output shaft assembly.

3. The transmission device according to claim 2, characterized in that, The gripping part includes at least one bearing link and at least one guide sleeve. The two ends of the bearing link are respectively connected to two adjacent connecting parts. When there are two or more bearing links, each bearing link is coaxially arranged. The guide sleeve is fitted around the outer periphery of the bearing connecting rod and is used to support the mounting part of the bearing boat.

4. The transmission device according to claim 3, characterized in that, The outer wall of the guide sleeve is provided with a positioning groove arranged circumferentially thereon, and the positioning groove is used to accommodate the mounting part.

5. The transmission device according to claim 4, characterized in that, When there are multiple guide sleeves, all the guide sleeves are distributed at equal intervals so that the gap between two adjacent carrier boats is not greater than a preset value.

6. The transmission device according to claim 1, characterized in that, The mounting body includes a crossbeam and a longitudinal beam. The crossbeam extends along the direction of the bearing boat, and the longitudinal beam is located at the end of the crossbeam. The crossbeam or the longitudinal beam is also provided with a collision detection mechanism for detecting collisions between the mounting body and other components.

7. The transmission device according to claim 6, characterized in that, The longitudinal beam is provided with a mounting column, and the collision detection mechanism includes a rotating block and a micro switch. The mounting column is rotatably connected to the middle of the rotating block, and the micro switch is located at both ends of the rotating block and is oriented towards the longitudinal beam.

8. The transmission device according to claim 7, characterized in that, The collision detection mechanism also includes an elastic plunger, which is installed on the side of the rotating block facing the longitudinal beam. The elastic plunger is located between the micro switch and the mounting post to protect the micro switch.

9. A carrier boat, characterized in that, It includes a first side plate and a second side plate, which are distributed along the width direction of the carrier boat. The outer sides of the first side plate and the second side plate are provided with mounting parts for cooperating with the gripping mechanism of the transmission device according to any one of claims 1 to 8.

10. The carrier boat according to claim 9, characterized in that, The bottom of the supporting boat is provided with boat feet, which have a hollow structure for weight reduction.

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