A roll-to-roll plasma device

Abstract

This invention proposes a roll-to-roll plasma cleaning device, comprising a hollow frame with openings on the front and rear sides. Feed rollers for feeding and discharge rollers for discharging are rotatably connected to the front and rear ends of the frame, respectively. Several guide rollers located between the feed and discharge rollers are also rotatably connected to the inner cavity of the frame. Several plasma generating components, each corresponding to one of the guide rollers, are provided on the frame. These guide rollers and plasma generating components are arranged alternately. This roll-to-roll plasma cleaning device uses these corresponding plasma generating components to perform plasma cleaning on both sides of the roll material, eliminating the need for repeated entry of the roll material into the frame for cleaning. This reduces the possibility of stretching the roll material and affecting quality. Simultaneously, a stabilizing component provides power, allowing the roll material to be stably adsorbed onto the guide rollers, improving the stability of roll material transportation and reducing the possibility of roll material slippage and wrinkling.

Description

Technical Field

[0001] This invention relates to the field of plasma cleaning, and more specifically to a roll-to-roll plasma cleaning device. Background Technology

[0002] Plasma, also known as the plasma state, is a state in which matter in the plasma state exhibits properties similar to those of the gaseous state, such as good fluidity and diffusivity. However, because the basic constituent particles of plasma are ions and electrons, it also possesses many properties distinct from those of the gaseous state, such as excellent electrical and thermal conductivity. In particular, according to scientific calculations, the specific heat capacity of plasma is directly proportional to temperature, and at high temperatures, the specific heat capacity of plasma is often hundreds of times that of gases. Therefore, plasma has a wide range of applications, from our daily lives to industry, agriculture, environmental protection, military, aerospace, energy, and celestial bodies, where it has significant value.

[0003] To achieve good material adhesion before surface treatment, plasma cleaning is a common method for cleaning workpieces. Plasma is an ionized gaseous substance composed of positive and negative ions generated by the ionization of atomic clusters after some electrons are stripped away. It is mainly applied to the workpiece surface using a plasma treatment device's nozzle to achieve the cleaning purpose. With the development of plasma cleaning technology, the types of materials that can be cleaned by plasma are becoming increasingly diverse. It can not only clean individual objects such as particles and toys, but also perform continuous cleaning of entire rolls of film.

[0004] Membrane material cleaning utilizes a winding and unwinding mechanism within a plasma vacuum cleaner. The unwound membrane material is treated with plasma before being wound back up, resulting in efficient and convenient cleaning. However, during plasma cleaning, the high-frequency electromagnetic field converts gases (such as oxygen, argon, and nitrogen) into plasma, releasing a significant amount of energy. This energy causes the temperature inside the cleaning chamber to rise, consequently raising the temperature of the membrane roll being cleaned. High temperatures can lead to softening, deformation, and even burns, rendering the roll unusable and hindering mass production. Summary of the Invention

[0005] To overcome the shortcomings of existing technologies, this invention proposes a roll-to-roll plasma equipment, comprising a frame with a hollow inner cavity and openings on the front and rear sides. Feed rollers for feeding and discharge rollers for discharging are rotatably connected to the front and rear ends of the frame, respectively. A plurality of guide rollers located between the feed rollers and discharge rollers are also rotatably connected to the inner cavity of the frame. A plurality of plasma generating components corresponding one-to-one with the guide rollers are provided on the frame. The guide rollers and plasma generating components are arranged alternately, with some plasma generating components located above adjacent guide rollers and others located below adjacent guide rollers. Stabilizing components are also provided on the guide rollers to facilitate stable transport of the roll material.

[0006] To achieve the above objectives, the frame supports feed rollers, discharge rollers, guide rollers, and plasma generating components. The roll material to be cleaned passes through the feed rollers and sequentially through several alternately arranged guide rollers, and is then removed from the frame by the discharge rollers. As the roll material passes through the guide rollers, it undergoes plasma cleaning on both sides via several corresponding plasma generating components. This eliminates the need for the roll material to repeatedly enter the frame for cleaning on both sides, reducing the possibility of stretching the roll material and affecting its quality. At the same time, the stabilizing components provide power, allowing the roll material to be stably adhered to the guide rollers, improving the stability of the roll material transportation and reducing the possibility of the roll material slipping and wrinkling.

[0007] Furthermore, the guide roller is a tubular structure with a hollow inner cavity and closed ends. The stabilizing component includes several suction holes evenly distributed on the guide roller. The guide roller is connected to the outside world and the inner cavity of the guide roller through the suction holes. A hollow mounting tube is coaxially arranged at one end of the guide roller. One end of the mounting tube passes through the frame and is fixed to the frame. The other end passes into the guide roller and is rotatably connected to the guide roller. The inner cavity of the mounting tube is connected to the inner cavity of the guide roller. The mounting tube is connected to the air inlet pipe of the vacuum pump through a connecting pipe.

[0008] The above technical solution uses a vacuum pump to provide power, creating a negative pressure state inside the guide roller. This facilitates the stable adsorption of the roll material that bypasses the guide roller, reducing the possibility of the roll material slipping and wrinkling. At the same time, the airflow inside the guide roller is rapid, and the airflow carries away some heat, thereby promoting the heat dissipation process and further reducing the possibility of the roll material deforming due to high temperature.

[0009] Furthermore, a contact mesh sheet covering several suction holes and wrapped around the outer wall of the guide roller is fixed on the circumferential outer wall of the guide roller, and the aperture of the contact mesh sheet is much smaller than the aperture of the suction holes.

[0010] By using the above technical solution, several suction holes are covered by the contact wire sheet, reducing the possibility of the suction holes on the guide roller damaging the roll material.

[0011] Furthermore, a cooling component is also provided in the middle of the inner cavity of the guide roller.

[0012] The above technical solution, by setting up a cooling component, further reduces the temperature of the roll material after plasma cleaning, thereby reducing the possibility of material deformation or damage at high temperatures.

[0013] Furthermore, the cooling assembly includes a cooling pipe disposed in the middle of the inner cavity of the guide roller. A cross-shaped bracket is fixed to one end of the guide roller groove wall near the mounting pipe. One end of the cooling pipe is fixed to the cross-shaped bracket, and the other end extends out of the guide roller and is rotatably connected to the guide roller. One end of the cooling pipe extending out of the guide roller is fixed to the frame. The end of the cooling pipe extending out of the frame is provided with a cooling assembly for further cooling the guide roller.

[0014] The above technical solution uses a cross-shaped bracket and frame to support the cooling pipe located inside the guide roller, provides power through a cooling assembly, and effectively controls the temperature of the material through the cooling pipe, ensuring that it is processed within an appropriate temperature range, thereby improving product quality and production efficiency.

[0015] Furthermore, the cooling assembly includes an exhaust pipe disposed on the side of the frame and fixed to the frame. The inner cavity of the exhaust pipe is integrally formed from bottom to top with an air inlet pipe, a throat pipe, and a diffuser pipe. The inner diameters of the air inlet pipe and the diffuser pipe gradually decrease towards the throat pipe. A suction pipe is integrally formed on the throat pipe. The end of the suction pipe away from the throat pipe is fixed to the end of the cooling pipe that extends out of the frame. The inner cavities of the air inlet pipe, throat pipe, diffuser pipe, suction pipe, and cooling pipe are interconnected. The end of the air inlet pipe away from the throat pipe is connected to the air outlet of the air pump through a pipeline. The end of the diffuser pipe away from the throat pipe is connected to a processing box for collecting and discharging exhaust gas through a pipeline.

[0016] Through the above technical solution, the air inlet of the air pump is connected to the steam source. The air pump provides power so that high-pressure steam enters the air inlet pipe. When the high-pressure steam passes through the throat pipe, the air in the cooling pipe is carried away by the low-pressure suction of the throat pipe and discharged through the diffuser pipe. At this time, the pressure in the cooling pipe decreases, the interaction between gas molecules in the cooling pipe weakens, the mean free path between molecules increases, resulting in a decrease in the number of times molecules collide with a unit area per unit time, a decrease in the average kinetic energy of molecules, that is, a decrease in gas temperature, and further achieving the cooling effect.

[0017] Furthermore, the plasma generating assembly includes several conductive plates fixed to the frame, and several plasma electrodes are fixed to the side of the several conductive plates facing the adjacent guide rollers, and the several plasma electrodes are arranged in an array along the center direction of the guide rollers.

[0018] Through the above technical solution, the output voltage is transmitted to the plasma electrode through the high-voltage cable and conductive plate. The process gas forms plasma gas after passing through the plasma electrode. The plasma gas is evenly sprayed towards the roll material on the guide roller, which improves the high uniformity of plasma processing.

[0019] Furthermore, an air inlet frame and an air outlet frame are fixed on the upper and lower sides of the frame respectively, located between two adjacent guide rollers. One end of the air inlet frame and the air outlet frame are fixed to the frame, and the other end extends out of the frame and is fixed to the frame. The parts of the air inlet frame and the air outlet frame that extend out of the frame are integrated with an air supply pipe and an air extraction pipe respectively. The air inlet frame and the air outlet frame have flow grooves for the flow of process gas on the side facing the guide roller.

[0020] With the above technical solution, the process gas enters the inlet frame through the gas delivery pipe, and then moves out of the gas delivery pipe towards the plasma electrode through the flow channel. After cleaning, the process gas enters the exhaust frame through the flow channel and is discharged through the extraction pipe.

[0021] Furthermore, the frame is composed of an upper frame and a lower frame that cooperate with each other, and a number of guide rollers, air conveying pipes and air extraction pipes are respectively installed on the upper frame and the lower frame. The upper frame and the lower frame are connected by an adjustment assembly.

[0022] The above technical solution provides power by setting an adjustment component to drive the upper frame to move in the vertical direction. The movement of the upper frame allows for adjustment of the gap between two adjacent guide rollers, thereby making the device suitable for roll materials with thicknesses from micrometers to mm.

[0023] Furthermore, the adjusting assembly includes a cylinder fixed on the lower frame, an ear plate fixed to the extended end of the cylinder, the ear plate being fixed to the upper frame, two ear seats fixed on the lower frame, an axial guide rod fixed on the two ear seats, and a movable block sleeved on the guide rod and slidably connected to the guide rod being fixed on the upper frame.

[0024] The above technical solution uses a cylinder to provide power, which drives the ear plate fixed to the extended end of the cylinder to move in the vertical direction. The movement of the ear plate will drive the upper frame fixed to the ear plate to move, and the movement of the upper frame will make the device suitable for roll materials of different thicknesses.

[0025] In summary, this roll-to-roll plasma equipment has the following beneficial effects:

[0026] This roll-to-roll plasma cleaning equipment has a frame supporting feed rollers, discharge rollers, guide rollers, and plasma generating components. The roll material to be cleaned passes through the feed rollers and then sequentially through several alternately arranged guide rollers, before being removed from the frame by the discharge rollers. As the roll material passes through the guide rollers, it undergoes plasma cleaning on both sides via several corresponding plasma generating components. This eliminates the need for the roll material to repeatedly enter the frame for cleaning on both sides, reducing the possibility of stretching the roll material and affecting quality. At the same time, the stabilizing components provide power, allowing the roll material to be stably adhered to the guide rollers, improving the stability of roll material transportation and reducing the possibility of roll material slippage and wrinkles.

[0027] This roll-to-roll plasma equipment uses a vacuum pump to provide power, creating a negative pressure state inside the guide roller. This facilitates the stable adsorption of rolls that bypass the guide roller, reducing the possibility of roll slippage and wrinkling. At the same time, the rapid airflow inside the guide roller carries away some heat, promoting the heat dissipation process and further reducing the possibility of roll deformation due to high temperatures.

[0028] In this roll-to-roll plasma equipment, the pump's air inlet is connected to a steam source. Power is provided by the air pump, allowing high-pressure steam to enter the inlet pipe. When the high-pressure steam passes through the throat, the air in the cooling pipe is carried away by the low-pressure suction of the throat and discharged through the diffuser. At this time, the pressure in the cooling pipe decreases, the interaction between gas molecules in the cooling pipe weakens, and the mean free path between molecules increases. This results in a decrease in the number of times molecules collide with a unit area per unit time, a decrease in the average kinetic energy of the molecules, and a decrease in the gas temperature, thus further achieving the cooling effect.

[0029] This roll-to-roll plasma equipment is powered by a pitch adjustment assembly, which allows the upper frame to move vertically. The movement of the upper frame allows for adjustment of the gap between two adjacent guide rollers, making the device suitable for roll materials with thicknesses from micrometers to millimeters. Attached Figure Description

[0030] The invention will now be further described and explained with reference to the accompanying drawings.

[0031] Figure 1 This is a schematic diagram of the overall structure of the preferred embodiment of the present invention;

[0032] Figure 2 This is a schematic diagram of the overall rear view structure of the present invention;

[0033] Figure 3 This is a schematic diagram illustrating the structure of the plasma electrode of the present invention;

[0034] Figure 4 This is the invention Figure 2 Enlarged structural diagram at point A in the middle;

[0035] Figure 5 This is a partial cross-sectional view of the guide roller structure of the present invention;

[0036] Figure 6 This is a structural schematic diagram illustrating the cross-shaped bracket of the present invention;

[0037] Figure 7 This is a schematic diagram illustrating the structure of the suction tube of the present invention.

[0038] Reference numerals: 1. Frame; 101. Upper frame; 102. Lower frame; 2. Feed roller; 3. Discharge roller; 4. Guide roller; 5. Plasma generator assembly; 501. Conductive plate; 502. Plasma electrode; 503. Air inlet frame; 504. Exhaust frame; 505. Air supply pipe; 506. Suction pipe; 507. Flow channel; 6. Stabilizing assembly; 601. Suction hole; 602. Mounting pipe; 603. Contact wire; 7. Cooling assembly; 701. Cooling pipe; 702. Cross-shaped bracket; 703. Air inlet pipe; 704. Throat pipe; 705. Diffuser pipe; 706. Suction pipe; 8. Adjustment assembly; 801. Cylinder; 802. Ear plate; 803. Ear seat; 804. Guide rod; 805. Moving block. Detailed Implementation

[0039] The technical solution of the present invention will be more clearly and completely explained below with reference to the accompanying drawings and through the description of preferred embodiments of the present invention.

[0040] like Figure 1-7 As shown, a roll-to-roll plasma device according to a preferred embodiment of the present invention includes a frame 1 with a hollow inner cavity and openings on the front and rear sides. The front and rear ends of the frame 1 are respectively rotatably connected to a feed roller 2 for feeding and a discharge roller 3 for discharging. The inner cavity of the frame 1 is also rotatably connected to four guide rollers 4 located between the feed rollers 2 and the discharge rollers 3. The frame 1 is also provided with four plasma generating components 5 corresponding one-to-one with the guide rollers 4. The four guide rollers 4 and the plasma generating components 5 are arranged alternately, wherein two plasma generating components 5 are located above adjacent guide rollers 4, and the other two plasma generating components 5 are located below adjacent guide rollers 4.

[0041] like Figure 1 and Figure 2 and Figure 3 The frame 1 supports the feed roller 2, the discharge roller 3, the guide roller 4 and the plasma generating assembly 5. The roll material to be cleaned passes through the feed roller 2 and sequentially through several alternately arranged guide rollers 4, and is removed from the frame 1 by the discharge roller 3. The roll material removed from the frame 1 is connected to the winding machine, which provides power to drive the roll material to move. The winding machine is existing technology, so it will not be described in detail here.

[0042] like Figure 1 and Figure 2 and Figure 3 When the roll material passes through the four guide rollers 4, it passes through several corresponding plasma generating components 5 to perform plasma cleaning on both the top and bottom surfaces of the roll material. This eliminates the need for the roll material to repeatedly enter the frame 1 for cleaning on both sides, reducing the possibility of stretching the roll material and affecting its quality.

[0043] like Figure 1 and Figure 2 and Figure 3The plasma generating assembly 5 includes several conductive plates 501 fixed to the frame 1. The conductive plates 501 are arranged axially. The frame 1 is provided with a high-energy feed inlet connected to the conductive plates 501. Several conductive plates 501 are fixed with several plasma electrodes 502 close to the guide roller 4 on the side facing the adjacent guide roller 4. The several plasma electrodes 502 are arranged in an array along the center direction of the guide roller 4. The upper and lower sides of the frame 1 are respectively fixed with an air intake frame 503 and an exhaust frame 504 located between two adjacent guide rollers. One end of the air intake frame 503 and the exhaust frame 504 is fixed to the frame 1, and the other end extends out of the frame 1 and is fixed to the frame 1. The parts of the air intake frame 503 and the exhaust frame 504 that extend out of the frame 1 are respectively integrated with a gas supply pipe 505 and a gas extraction pipe 506. The air intake frame 503 and the exhaust frame 504 are provided with flow grooves 507 for process gas flow on the side facing the guide roller 4.

[0044] like Figure 1 and Figure 2 and Figure 3 The process gas enters the inlet frame 503 through the gas supply pipe 505. The process gas entering the inlet frame 503 is sprayed out towards the plasma electrodes 502 on both sides through the flow groove 507. The output voltage is transmitted to the plasma electrodes 502 through the high voltage cable and the conductive plate 501. After the process gas passes through the plasma electrodes 502, it forms plasma gas. The plasma gas is sprayed evenly towards the roll material on the guide roller 4 to clean the roll material located on the guide roller 4, which improves the high uniformity of plasma treatment. This is existing technology, so it will not be described in detail here.

[0045] like Figure 1 and Figure 2 and Figure 3 The high-frequency electromagnetic field converts the process gas into plasma. During this process, a large amount of energy is released, causing the temperature of the roll material on the guide roller 4 to rise. In order to reduce the possibility of the roll material deforming due to high temperature during the plasma cleaning process, the guide roller 4 is also equipped with a stabilizing component 6 to facilitate stable transport of the roll material. The stabilizing component 6 provides power so that the roll material can be stably adsorbed on the guide roller 4, improving the stability of the roll material transport and reducing the possibility of the roll material slipping and wrinkling.

[0046] like Figure 5The guide roller 4 is a hollow tubular structure with closed ends. The diameter of the mounting tube 602 is smaller than the diameter of the guide roller 4. The stabilizing component 6 includes several suction holes 601 evenly opened on the guide roller 4. The guide roller 4 is connected to the outside world and the inner cavity of the guide roller 4 through the suction holes 601. A hollow mounting tube 602 is coaxially arranged at one end of the guide roller 4. One end of the mounting tube 602 passes through the frame 1 and is fixed to the frame 1. The other end passes into the guide roller 4 and is rotatably connected to the guide roller 4. The connection between the mounting tube 602 and the guide roller 4 is sealed. The inner cavity of the mounting tube 602 is connected to the inner cavity of the guide roller 4. The mounting tube 602 is connected to the air inlet pipe 703 of the vacuum pump through the connecting pipe.

[0047] like Figure 5 Powered by a vacuum pump, the inner cavity of the guide roller 4 is under negative pressure, which helps to stably adsorb the roll material that bypasses the guide roller 4 and reduces the possibility of the roll material slipping and wrinkling. The gas in the frame 1 enters the inner cavity of the guide roller 4 through the suction hole 601 and is discharged from the guide roller 4 through the installation pipe 602. The airflow in the guide roller 4 flows rapidly, and the air flow will take away some heat, thereby promoting the heat dissipation process and further reducing the possibility of the roll material deforming due to high temperature.

[0048] like Figure 5 In order to reduce the possibility of the suction holes 601 damaging the roll material, a contact mesh 603 covering several suction holes 601 and wrapped around the guide roller 4 is also fixed on the outer circumference of the guide roller 4. The aperture of the contact mesh 603 is much smaller than the aperture of the suction holes 601.

[0049] like Figure 5 and Figure 6 In order to further reduce the temperature of the roll material on the guide roller 4, a cooling component 7 is also provided in the middle of the inner cavity of the guide roller 4.

[0050] like Figure 5 and Figure 6 The cooling component 7 includes a cooling pipe 701 located in the middle of the inner cavity of the guide roller 4. The centerline of the cooling pipe 701 coincides with the centerline of the guide roller 4. A cross-shaped bracket 702 is fixed to one end of the inner cavity wall of the guide roller 4 near the mounting pipe 602. One end of the cooling pipe 701 is fixed to the cross-shaped bracket 702, and the other end extends out of the guide roller 4 and is rotatably connected to the guide roller 4. The connection between the cooling pipe 701 and the guide roller 4 is sealed. The cross-shaped bracket 702 supports the cooling pipe 701 without affecting the air extraction. A cooling component is provided at one end of the cooling pipe 701 that extends out of the frame 1 to further cool the guide pipe. The cooling component provides power, and the cooling pipe 701 effectively controls the temperature of the material, ensuring that it is processed within an appropriate temperature range, thereby improving product quality and production efficiency.

[0051] like Figure 7The cooling assembly includes an exhaust pipe located beside and fixed to the frame 1. The inner cavity of the exhaust pipe is integrally formed from bottom to top with an air inlet pipe 703, a throat pipe 704, and a diffuser pipe 705. The inner diameters of the air inlet pipe 703 and the diffuser pipe 705 gradually decrease towards the throat pipe 704. A suction pipe 706 is integrally formed on the throat pipe 704. The end of the suction pipe 706 away from the throat pipe 704 is fixed to the end of the cooling pipe 701 that extends out of the frame 1. The inner cavities of the air inlet pipe 703, the throat pipe 704, the diffuser pipe 705, the suction pipe 706, and the cooling pipe 701 are interconnected. The end of the air inlet pipe 703 away from the throat pipe 704 is connected to the air outlet of the air pump through a pipeline. The end of the diffuser pipe 705 away from the throat pipe 704 is connected to a processing box for collecting and discharging exhaust gas through a pipeline.

[0052] like Figure 5 and Figure 6 and Figure 7 The cooling pipe 701 is filled with water. The air inlet of the air pump is connected to the steam source. The air pump provides power, allowing high-pressure steam to enter the air inlet pipe 703. When the high-pressure steam passes through the throat pipe 704, the air inside the cooling pipe 701 is carried away by the low-pressure suction of the throat pipe 704 and discharged through the diffuser pipe 705. At this time, a negative pressure is formed inside the cooling pipe 701, and a large amount of water vapor is generated, releasing a large amount of heat. The released heat is then discharged with the steam. At this time, the water temperature inside the cooling pipe 701 gradually decreases, and the cooling pipe 701 absorbs the surrounding heat. The cooling tube 701 lowers its own temperature, thereby reducing the ambient temperature and further achieving a cooling effect. This effectively reduces the uneven cooling at both ends of the product, which leads to inconsistent shrinkage rates, wrinkling and unevenness of the film after roll formation, and the possibility of unilateral warping of the rigid sheet. In addition, the cooling tube 701 has a uniform cooling effect, solving the problem that the temperature of the roller surface at the water inlet end is often lower than that at the water outlet end of the traditional cooling roller, which leads to uneven cooling at both ends of the product, inconsistent shrinkage rates, wrinkling and unevenness of the film after roll formation, and unilateral warping of the rigid sheet.

[0053] like Figure 1 and Figure 2 and Figure 3 and Figure 4 The frame 1 consists of an upper frame 101 and a lower frame 102 that cooperate with each other. The upper frame 101 and the lower frame 102 are serrated on one side facing each other. Several guide rollers 4, air conveying pipes 505 and air extraction pipes 506 are respectively arranged on the upper frame 101 and the lower frame 102. The upper frame 101 and the lower frame 102 are connected by a gap adjustment assembly 8. The gap adjustment assembly 8 provides power to drive the upper frame 101 to move in the vertical direction. The movement of the upper frame 101 allows for adjustment of the gap between two adjacent guide rollers 4, thereby making the device suitable for roll materials with a thickness of 3 micrometers to 1 mm.

[0054] like Figure 1 and Figure 2 and Figure 3 and Figure 4 The pitch adjustment assembly 8 includes a cylinder 801 fixed on the lower frame 102. An ear plate 802 is fixed to the extended end of the cylinder 801. The ear plate 802 is fixed to the upper frame 101. Two ear seats 803 are fixed on the lower frame 102. An axial guide rod 804 is fixed on the two ear seats 803. A moving block 805 is fixed on the upper frame 101, sleeved outside the guide rod 804 and slidably connected to the guide rod 804. Power is provided by the cylinder 801 to drive the ear plate 802 fixed to the extended end of the cylinder 801 to move in the vertical direction. The movement of the ear plate 802 will drive the upper frame 101 fixed to the ear plate 802 to move. The movement of the upper frame 101 makes the device suitable for roll materials of different thicknesses, and also reduces the possibility of wrinkles when thicker roll materials enter the device due to the inability to adjust the thickness.

[0055] When in use, connect the power supply and turn on the switch. According to the thickness of the roll material to be cleaned, open the cylinder. Power is provided by the cylinder 801, which drives the ear plate 802 fixed to the extended end of the cylinder 801 to move in the vertical direction. The movement of the ear plate 802 will drive the upper frame 101 fixed to the ear plate 802 to move. The movement of the upper frame 101 is guided and limited by the cooperation of the moving block 805 and the guide rod 804 until the upper frame moves to accommodate the roll material of the corresponding thickness between every two adjacent guide rollers 4.

[0056] One end of the roll material to be cleaned passes through the feed roller 2 and sequentially through several alternately arranged guide rollers 4, and is moved out of the frame 1 by the discharge roller 3. The end of the roll material that has been moved out of the frame 1 is fixed to the winding machine. The winding machine provides power to drive the roll material to move. The movement of the roll material will drive the rotation of the feed roller 2, the discharge roller 3 and the guide roller 4.

[0057] The process gas flows along the flow path and enters the inlet frame 503 through the gas delivery pipe 505. The process gas entering the inlet frame 503 is sprayed out towards the plasma electrodes 502 on both sides through the flow groove 507. The output voltage is transmitted to the plasma electrodes 502 through the high voltage cable and the conductive plate 501. After the process gas passes through the plasma electrodes 502, it forms plasma gas. The plasma gas is sprayed evenly towards the roll material on the guide roller 4 to perform plasma treatment on the roll material located on the guide roller 4.

[0058] During this process, a large amount of energy is released, causing the temperature of the roll material on the guide roller 4 to rise. The vacuum pump is turned on, and the vacuum pump provides power to make the inner cavity of the guide roller 4 negative pressure, so as to stably adsorb the roll material that bypasses the guide roller 4 and reduce the possibility of the roll material slipping and wrinkling. At the same time, the airflow inside the guide roller 4 flows rapidly, and the air flow will carry away some heat, thereby promoting the heat dissipation process and further reducing the possibility of the roll material deforming due to high temperature.

[0059] The air pump is turned on, providing power to allow high-pressure steam to enter the inlet pipe 703. As the high-pressure steam passes through the throat pipe 704, the air inside the cooling pipe 701 is carried away by the low-pressure suction of the throat pipe 704 and discharged through the diffuser pipe 705. At this time, a negative pressure is formed inside the cooling pipe 701, causing a large amount of water vapor to be generated and releasing a significant amount of heat. This released heat is then discharged with the steam, gradually lowering the water temperature inside the cooling pipe 701. The cooling pipe 701 absorbs heat from the surrounding environment to reduce its own temperature, thereby lowering the ambient temperature and further achieving a cooling effect. This effectively reduces the possibility of uneven shrinkage caused by different cooling levels at both ends of the product, which can lead to wrinkling and uneven spreading of the film after rolling, and unilateral warping of the rigid sheet.

[0060] The above-described specific embodiments are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Various modifications, substitutions, and improvements made by those skilled in the art to the technical solutions of the present invention based on the provided textual description and drawings, without departing from the design concept and spirit of the present invention, should all fall within the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims.

Claims

1. A roll-to-roll plasma device, characterized in that, The frame (1) includes a hollow inner cavity and openings on the front and rear sides. The front and rear ends of the frame (1) are respectively rotatably connected to a feed roller (2) for feeding and a discharge roller (3) for discharging. The inner cavity of the frame (1) is also rotatably connected to a number of guide rollers (4) located between the feed rollers (2) and the discharge rollers (3). The frame (1) is provided with a number of plasma generating components (5) corresponding one-to-one with the guide rollers (4). The guide rollers (4) and plasma generating components (5) are arranged alternately. Some of the plasma generating components (5) are located above the adjacent guide rollers (4), and other plasma generating components (5) are located below the adjacent guide rollers (4). The guide rollers (4) are also provided with stabilizing components (6) to facilitate the stable transportation of the roll material. The guide roller (4) is a tubular structure with a hollow inner cavity and closed ends. The stabilizing component (6) includes several suction holes (601) evenly opened on the guide roller (4). The guide roller (4) is connected to the outside world and the inner cavity of the guide roller (4) through the suction holes (601). A hollow mounting tube (602) is coaxially arranged at one end of the guide roller (4). One end of the mounting tube (602) passes through the frame (1) and is fixed to the frame (1). The other end passes into the guide roller (4) and is rotatably connected to the guide roller (4). The inner cavity of the mounting tube (602) is connected to the inner cavity of the guide roller (4). The mounting tube (602) is connected to the air inlet pipe (703) of the vacuum pump through the connecting pipe. A cooling component (7) is also provided in the middle of the inner cavity of the guide roller (4); The cooling component (7) includes a cooling tube (701) located in the middle of the inner cavity of the guide roller (4). A cross-shaped bracket (702) is fixed to one end of the groove wall of the guide roller (4) near the mounting tube (602). One end of the cooling tube (701) is fixed to the cross-shaped bracket (702), and the other end extends out of the guide roller (4) and is rotatably connected to the guide roller (4). One end of the cooling tube (701) extending out of the guide roller (4) is fixed to the frame (1). The cooling tube (701) extends out of the frame (1). One end of the cooling tube (701) extending out of the frame (1) is provided with a cooling component for further cooling the guide roller (4).

2. The roll-to-roll plasma apparatus according to claim 1, characterized in that, The outer circumference of the guide roller (4) is also fixed with a contact mesh (603) covering a number of suction holes (601) and wrapped around the guide roller (4). The aperture of the contact mesh (603) is much smaller than the aperture of the suction holes (601).

3. A roll-to-roll plasma apparatus according to claim 1, characterized in that, The cooling assembly includes an exhaust pipe disposed on the side of the frame (1) and fixed to the frame (1). The inner cavity of the exhaust pipe is integrally formed from bottom to top with an air inlet pipe (703), a throat pipe (704), and a diffuser pipe (705). The inner diameters of the air inlet pipe (703) and the diffuser pipe (705) gradually decrease towards the throat pipe (704). A suction pipe (706) is integrally formed on the throat pipe (704), and the suction pipe (706) is located away from the throat pipe (704). One end of the cooling pipe (701) is fixed to the end of the frame (1) through which the cooling pipe (701) passes. The inner cavities of the air inlet pipe (703), throat pipe (704), diffuser pipe (705), suction pipe (706) and cooling pipe (701) are interconnected. The end of the air inlet pipe (703) away from the throat pipe (704) is connected to the air outlet of the air pump through a pipeline. The end of the diffuser pipe (705) away from the throat pipe (704) is connected to the processing box for collecting and discharging gas through a pipeline.

4. A roll-to-roll plasma apparatus according to claim 1, characterized in that, The plasma generating assembly (5) includes a plurality of conductive plates (501) fixed to the frame (1). A plurality of plasma electrodes (502) are fixed on the side of the conductive plates (501) facing the adjacent guide roller (4) and are arranged in an array along the center direction of the guide roller (4).

5. A roll-to-roll plasma apparatus according to claim 4, characterized in that, The frame (1) has an air intake frame (503) and an exhaust frame (504) fixed on its upper and lower sides respectively between two adjacent guide rollers. One end of the air intake frame (503) and the exhaust frame (504) is fixed to the frame (1), and the other end extends out of the frame (1) and is fixed to the frame (1). The parts of the air intake frame (503) and the exhaust frame (504) extending out of the frame (1) are respectively integrated with an air supply pipe (505) and an air extraction pipe (506). The air intake frame (503) and the exhaust frame (504) have flow grooves (507) for process gas flow on the side facing the guide roller (4).

6. A roll-to-roll plasma apparatus according to claim 5, characterized in that, The frame (1) consists of an upper frame (101) and a lower frame (102) that cooperate with each other. Several guide rollers (4), air conveying pipes (505) and air extraction pipes (506) are respectively installed on the upper frame (101) and the lower frame (102). The upper frame (101) and the lower frame (102) are connected by a pitch adjustment assembly (8).

7. A roll-to-roll plasma apparatus according to claim 6, characterized in that, The adjusting assembly (8) includes a cylinder (801) fixed on the lower frame (102), an ear plate (802) fixed to the extended end of the cylinder (801), the ear plate (802) being fixed to the upper frame (101), two ear seats (803) fixed on the lower frame (102), an axial guide rod (804) fixed on the two ear seats (803), and a moving block (805) fixed on the upper frame (101) being sleeved outside the guide rod (804) and slidably connected to the guide rod (804).

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