A metal flat target machining positioning and fixing device

Abstract

The invention relates to the field of planar target material manufacturing, and provides a metal planar target material machining positioning and fixing device. A wedge-shaped lifting mechanism is provided to support the target material to rise. The wedge-shaped lifting mechanism places the target material through a universal ball, so that the position of the target material can be adjusted smoothly and conveniently without causing damage to the surface of the target material. The target material is adjusted to correspond to three positioning mechanisms, so that the position is accurately placed. After the position of the target material is adjusted, it is lowered to a suction cup mechanism, and the target material is sucked by the suction cups of two suction cup mechanisms, so that the target material is fixed. The fixing method of the suction cup ensures the stability of the fixation while avoiding damage to the target material, so that the positioning and fixing of the target material can be achieved.

Description

Technical Field

[0001] The invention relates to the field of planar target material manufacturing, and in particular to a metal planar target material machining positioning and fixing device. Background Art

[0002] Magnetron sputtering is a substrate coating process that uses charged particles to bombard the target material, causing the target atoms to overflow from the surface and evenly deposit on the substrate. Magnetron sputtering has become one of the excellent substrate coating processes due to its advantages such as high sputtering rate, low substrate temperature rise, good film-substrate bonding, excellent metal coating uniformity and strong controllability. Magnetron sputtering is widely used in coating processes in industries such as chip manufacturing, liquid crystal display manufacturing and solar cell manufacturing.

[0003] Sputtering targets are mainly divided into planar targets and rotary targets according to their shapes. Planar targets mainly refer to round or rectangular targets with a certain thickness.

[0004] Metal flat target materials need to be positioned and clamped during the processing. Traditional positioning and clamping are generally performed by a combination of screws and pressure plates. This method is rough in fixing, easy to damage the target material, and the operation is cumbersome and inefficient. Therefore, a new type of metal flat target machining positioning device is needed to improve the efficiency and accuracy of positioning and clamping. Summary of the invention

[0005] In view of this, an object of the present invention is to provide a metal flat target machining positioning and fixing device to solve the problems arising in the background technology.

[0006] Based on the above purpose, the present invention provides a positioning and fixing device for machining a metal flat target, comprising a workbench, wherein two spaced suction cup mechanisms are arranged on the top of the workbench, a wedge-shaped lifting mechanism is arranged on the top of the workbench between the two spaced suction cup mechanisms, and three positioning mechanisms are distributed on the top of the workbench; the middle of the target is placed on the top of the wedge-shaped lifting mechanism, and the two ends of the target are respectively placed on the top of the two suction cup mechanisms, wherein two positioning mechanisms are arranged at intervals on the side of a long side of the target, and the other positioning mechanism is arranged on the side of a short side of the target; universal balls are evenly distributed on the top of the wedge-shaped lifting mechanism, the position of the universal balls is fixed and can be rolled, and the top ends of all the universal balls are on the same plane; the spacing between the two spaced suction cup mechanisms is adjustable, and the positions of the three positioning mechanisms are adjustable.

[0007] Preferably, a plurality of transverse T-shaped grooves are evenly distributed on the top of the workbench, and the bottom of the suction cup mechanism and the positioning mechanism are both slidably arranged in the transverse T-shaped grooves.

[0008] Preferably, the suction cup mechanism includes a mounting seat, and a T-shaped slider matching the transverse T-shaped slot is provided at the bottom of the mounting seat, and the T-shaped slider is located in the transverse T-shaped slot and slides therewith.

[0009] Preferably, a plurality of suction cups are distributed on the top of the mounting seat, and the bottoms of all the suction cups are connected to a vacuum generator, and the vacuum generator is located inside the mounting seat.

[0010] Preferably, a servo motor is arranged at the rear end edge of the top of the workbench, and a bidirectional threaded rod is fixedly connected to the output end of the servo motor, and the end of the bidirectional threaded rod away from the servo motor is rotatably connected to a support block, and the support block is fixed to the top of the workbench; the surface of the bidirectional threaded rod has two sections of threads in opposite directions, and the surface threads of the two sections of threads in opposite directions are both connected to thread blocks, and the two thread blocks are respectively fixed to the rear sides of the mounting seats of the two suction cup mechanisms.

[0011] Preferably, the wedge-shaped lifting mechanism includes a base plate fixed on the top of the workbench, four rectangularly arranged guide columns are distributed on the top of the base plate, the surfaces of the four guide columns are longitudinally slidably sleeved together with a wedge-shaped table with an inclined bottom surface, a universal ball is arranged on the top of the wedge-shaped table, a slide rail is arranged on the top of the base plate, a push-pull motor is arranged on one side of the base plate, a slider is connected to the output end of the push-pull motor, the slider is located on the slide rail and slides with it, a wedge block is arranged on the surface of the slider, and the top surface of the wedge block is inclined to match the bottom surface of the wedge table.

[0012] Preferably, the top of the wedge-shaped platform is a horizontal plane, and a plurality of top blocks are evenly distributed on the top of the wedge-shaped platform. A 3 / 4 ball hole is opened on the top of the top block, and a universal ball is rolledly arranged in the 3 / 4 ball hole, and the top of the universal ball extends above the 3 / 4 ball hole.

[0013] Preferably, the positioning mechanism includes a mounting plate, a stand is provided on the top of the mounting plate, a plurality of T-shaped screws are provided with longitudinal threads running through the mounting plate, the bottom end of the T-shaped screw is T-shaped and slides with one of the transverse T-shaped slots, a fixing nut is provided with a thread above the connection between the T-shaped screw and the mounting plate, and the fixing nut is tightened downward to fix the mounting plate and the workbench together; a cylinder is provided on the top of the stand, a positioning block is fixedly connected to the cylinder output shaft, and a positioning protrusion is provided on the side of the positioning block.

[0014] Preferably, the cylinder is a double-axis cylinder, and each output shaft of the double-axis cylinder is fixedly connected with a positioning block.

[0015] Beneficial effects of the present invention: The present invention supports the target material by setting a wedge-shaped lifting mechanism to rise up. The wedge-shaped lifting mechanism places the target material through a universal ball, so that the target material can adjust its position smoothly and conveniently without causing damage to the surface of the target material. The target material is adjusted to correspond to the three positioning mechanisms, so that the position is accurately placed. After the target material is adjusted, it is lowered to the suction cup mechanism and sucked by the suction cups of the two suction cup mechanisms, so that the target material is fixed. The fixing method of the suction cup ensures the stability of the fixation while avoiding damage to the target material, so that the positioning and fixing of the target material can be achieved. The spacing between the two suction cup mechanisms of the present invention is adjustable, and the bidirectional threaded rod is driven to rotate by a servo motor, thereby driving the threaded blocks of the two mounting seats to move toward or oppositely, thereby driving the T-shaped sliders at the bottom of the two mounting seats to slide in the transverse T-shaped groove, so that the spacing between the two suction cup mechanisms is adjustable, and the suction cup positions of the two suction cup mechanisms are adjustable, so that it is suitable for fixing targets of different lengths and is easy to operate. The present invention limits one of the long sides and one of the short sides of the target material through three positioning mechanisms, so that the three positioning mechanisms can realize the positioning of the target material. The positioning mechanism drives the positioning block and the positioning protrusion to position the edge of the target material through the cylinder. The positioning block contacts the side of the target material, and the positioning protrusion contacts the top of the edge of the target material, so as to realize the positioning. The cylinder is a double-axis cylinder, so that a cylinder has two positioning blocks and two positioning protrusions, so that the positioning is more accurate; and the positioning mechanism slides in the transverse T-slot through the T-screw, so that the position can be adjusted, and the position is locked by the fixing nut after the position is adjusted. The wedge-shaped lifting mechanism of the present invention drives the slider to slide on the slide rail through the push-pull motor, and the wedge-shaped block on the surface of the slider slides to drive the wedge-shaped platform matched with it to rise and fall on the surface of the guide column, so that the universal ball rises and falls, and the universal ball is set in the 3 / 4 ball hole of the top block, so that the universal ball can roll freely and will not fall. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is an overall schematic diagram of the present invention;

[0018] Figure 2 is a side view of the wedge-shaped lift of the present invention;

[0019] Figure 3 is a side view of the positioning mechanism of the present invention;

[0020] Figure 4 It is a top view of the suction cup mechanism of the present invention.

[0021] The markings in the figure are:

[0022] 1-workbench, 2-suction cup mechanism, 3-wedge-shaped lifting mechanism, 4-positioning mechanism, 5-universal ball, 6-lateral T-slot, 7-mounting seat, 8-suction cup, 9-servo motor, 10-bidirectional threaded rod, 11-support block, 12-bottom plate, 13-guide column, 14-wedge-shaped table, 15-slide rail, 16-push-pull motor, 17-slider, 18-wedge block, 19-top block, 20-positioning protrusion, 21-mounting plate, 22-T-screw, 23-fixing nut, 24-cylinder, 25-positioning block, 26-threaded block, 27-stand. DETAILED DESCRIPTION

[0023] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0024] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0025] like Figures 1 to 4As shown, a metal flat target machining positioning and fixing device includes a workbench 1, two spaced suction cup mechanisms 2 are arranged on the top of the workbench 1, a wedge-shaped lifting mechanism 3 is arranged between the two spaced suction cup mechanisms 2 on the top of the workbench 1, and three positioning mechanisms 4 are also distributed on the top of the workbench 1; the middle of the target is placed on the top of the wedge-shaped lifting mechanism 3, and the two ends of the target are placed on the top of the two suction cup mechanisms 2, two of which are spaced apart on the side of the long side of the target, and the other positioning mechanism 4 is arranged on the side of the short side of the target; universal balls 5 are evenly distributed on the top of the wedge-shaped lifting mechanism 3, and the universal balls 5 are fixed and can roll, and the tops of all universal balls 5 are on the same plane; the spacing between the two spaced suction cup mechanisms 2 is adjustable, and the positions of the three positioning mechanisms 4 are adjustable. A plurality of transverse T-shaped slots 6 are evenly distributed on the top of the workbench 1, and the bottoms of the suction cup mechanisms 2 and the positioning mechanisms 4 are all slidably arranged in the transverse T-shaped slots 6. The target material is supported by setting a wedge-shaped lifting mechanism 3 to rise up, and the wedge-shaped lifting mechanism 3 places the target material through the universal ball 5, so that the position of the target material can be adjusted smoothly and conveniently without causing damage to the surface of the target material. The target material is adjusted to correspond to the three positioning mechanisms 4, so that the position is accurately placed. After the target material is adjusted, it is lowered to the suction cup mechanism 2 and the suction cups 8 of the two suction cup mechanisms 2 suck the target material, so that the target material is fixed. The fixing method of the suction cup 8 ensures the stability of the fixation while avoiding damage to the target material, thereby realizing the positioning and fixation of the target material.

[0026] The suction cup mechanism 2 includes a mounting seat 7, and a T-shaped slider matching the transverse T-shaped slot 6 is arranged at the bottom of the mounting seat 7, and the T-shaped slider is located in the transverse T-shaped slot 6 and slides with it. A plurality of suction cups 8 are distributed on the top of the mounting seat 7, and the bottoms of all the suction cups 8 are connected to a vacuum generator, and the vacuum generator is located in the mounting seat 7. A servo motor 9 is arranged at the rear edge of the top of the workbench 1, and a bidirectional threaded rod 10 is fixedly connected to the output end of the servo motor 9, and a support block 11 is rotatably connected to the end of the bidirectional threaded rod 10 away from the servo motor 9, and the support block 11 is fixed to the top of the workbench 1; the surface of the bidirectional threaded rod 10 has two sections of threads in opposite directions, and the surface threads of the two sections of threads in opposite directions are both connected to thread blocks 26, and the two thread blocks 26 are respectively fixed to the rear sides of the mounting seats 7 of the two suction cup mechanisms 2. The distance between the two suction cup mechanisms 2 is adjustable, and the bidirectional threaded rod 10 is driven to rotate by the servo motor 9, thereby driving the threaded blocks 26 of the two mounting seats 7 to move toward or oppositely, thereby driving the T-shaped sliders at the bottom of the two mounting seats 7 to slide in the transverse T-shaped groove 6, so that the distance between the two suction cup mechanisms 2 is adjustable, and the position of the suction cups 8 of the two suction cup mechanisms 2 is adjustable, which can adapt to the fixation of target materials of different lengths and is easy to operate.

[0027] The wedge-shaped lifting mechanism 3 includes a bottom plate 12 fixed on the top of the workbench 1, four rectangularly arranged guide posts 13 are distributed on the top of the bottom plate 12, a wedge-shaped platform 14 with an inclined bottom surface is provided on the surface of the four guide posts 13 for longitudinal sliding sleeve, a universal ball 5 is provided on the top of the wedge-shaped platform 14, a slide rail 15 is provided on the top of the bottom plate 12, a push-pull motor 16 is provided on one side of the bottom plate 12, a slider 17 is connected to the output end of the push-pull motor 16, the slider 17 is located on the slide rail 15 and slides with it, a wedge block 18 is provided on the surface of the slider 17, and the top surface of the wedge block 18 is inclined to match the bottom surface of the wedge-shaped platform 14. The top of the wedge-shaped platform 14 is a horizontal plane, and a plurality of top blocks 19 are evenly distributed on the top of the wedge-shaped platform 14, a 3 / 4 ball hole is opened on the top of the top block 19, and a universal ball 5 is rolled in the 3 / 4 ball hole, and the top of the universal ball 5 extends to the top of the 3 / 4 ball hole. The wedge-shaped lifting mechanism 3 drives the slider 17 to slide on the slide rail 15 through the push-pull motor 16. The wedge-shaped block 18 on the surface of the slider 17 slides to drive the wedge-shaped platform 14 matched therewith to rise and fall on the surface of the guide column 13, thereby making the universal ball 5 rise and fall. The universal ball 5 is arranged in the 3 / 4 ball hole of the top block 19, so that the universal ball 5 can roll freely without falling.

[0028] The positioning mechanism 4 includes a mounting plate 21, a stand 27 is provided on the top of the mounting plate 21, a plurality of T-shaped screws 22 are provided through the mounting plate 21 in the longitudinal direction, the bottom end of the T-shaped screw 22 is T-shaped and slides with one of the transverse T-shaped slots 6, a fixing nut 23 is provided on the thread above the connection between the T-shaped screw 22 and the mounting plate 21, and the fixing nut 23 is tightened downward to fix the mounting plate 21 and the workbench 1 together; a cylinder 24 is provided on the top of the stand 27, a positioning block 25 is fixedly connected to the output shaft of the cylinder 24, and a positioning protrusion 20 is provided on the side of the positioning block 25. The cylinder 24 is a double-axis cylinder, and each output shaft of the double-axis cylinder is fixedly connected to a positioning block 25. The three positioning mechanisms 4 are used to limit one of the long sides and one of the short sides of the target material, so that the three positioning mechanisms 4 can realize the positioning of the target material. The positioning mechanism 4 drives the positioning block 25 and the positioning protrusion 20 to position the edge of the target material through the cylinder 24. The positioning block 25 contacts the side of the target material, and the positioning protrusion 20 contacts the top of the edge of the target material, so as to realize the positioning. The cylinder 24 is a double-axis cylinder, so that a cylinder 24 has two positioning blocks 25 and two positioning protrusions 20, so that the positioning is more accurate; and the positioning mechanism 4 slides in the transverse T-slot 6 through the T-screw 22, so that the position can be adjusted, and after the position is adjusted, it is locked by the fixing nut 23.

[0029] It should be understood by those skilled in the art that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention is limited to these examples; under the concept of the present invention, the technical features in the above embodiments or different embodiments may also be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity. Any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A metal flat target machining positioning and fixing device, comprising a workbench (1), characterized in that: The top of the workbench (1) is provided with two spaced suction cup mechanisms (2); the top of the workbench (1) is provided with a wedge-shaped lifting mechanism (3) located between the two spaced suction cup mechanisms (2); and the top of the workbench (1) is also provided with three positioning mechanisms (4); the middle of the target is placed on the top of the wedge-shaped lifting mechanism (3), and the two ends of the target are placed on the tops of the two suction cup mechanisms (2), respectively; two positioning mechanisms (4) are spaced apart on the side of the long side of the target, and the other positioning mechanism (4) is located on the side of the short side of the target; universal balls (5) are evenly distributed on the top of the wedge-shaped lifting mechanism (3); the positions of the universal balls (5) are fixed and can roll, and the tops of all the universal balls (5) are on the same plane; the spacing between the two spaced suction cup mechanisms (2) is adjustable, and the positions of the three positioning mechanisms (4) are adjustable.

2. A metal flat target machining positioning and fixing device according to claim 1, characterized in that: A plurality of transverse T-shaped grooves (6) are evenly distributed on the top of the workbench (1), and the bottoms of the suction cup mechanism (2) and the positioning mechanism (4) are both slidably arranged in the transverse T-shaped grooves (6).

3. A metal flat target machining positioning and fixing device according to claim 2, characterized in that: The suction cup mechanism (2) comprises a mounting seat (7), a T-shaped slider matching the transverse T-shaped groove (6) is arranged at the bottom of the mounting seat (7), and the T-shaped slider is located in the transverse T-shaped groove (6) and slides therewith.

4. A metal flat target machining positioning and fixing device according to claim 3, characterized in that: A plurality of suction cups (8) are distributed on the top of the mounting seat (7), and the bottoms of all the suction cups (8) are connected to a vacuum generator, which is located inside the mounting seat (7).

5. The metal flat target machining positioning and fixing device according to claim 3, characterized in that: A servo motor (9) is arranged at the rear edge of the top of the workbench (1); a bidirectional threaded rod (10) is fixedly connected to the output end of the servo motor (9); one end of the bidirectional threaded rod (10) away from the servo motor (9) is rotatably connected to a support block (11); the support block (11) is fixed to the top of the workbench (1); the surface of the bidirectional threaded rod (10) has two sections of threads in opposite directions; the surface threads of the two sections of threads in opposite directions are both connected to thread blocks (26); the two thread blocks (26) are respectively fixed to the rear sides of the mounting seats (7) of the two suction cup mechanisms (2).

6. The metal flat target machining positioning and fixing device according to claim 1, characterized in that: The wedge-shaped lifting mechanism (3) comprises a base plate (12) fixed on the top of the workbench (1), four rectangularly arranged guide posts (13) are distributed on the top of the base plate (12), a wedge-shaped platform (14) with an inclined bottom surface is provided on the surface of the four guide posts (13) in a longitudinal sliding sleeve, a universal ball (5) is arranged on the top of the wedge-shaped platform (14), a slide rail (15) is arranged on the top of the base plate (12), a push-pull motor (16) is arranged on one side of the base plate (12), a slider (17) is connected to the output end of the push-pull motor (16), the slider (17) is located on the slider (15) and slides with it, a wedge block (18) is provided on the surface of the slider (17), and the top surface of the wedge block (18) is inclined to match the bottom surface of the wedge-shaped platform (14).

7. A metal flat target machining positioning and fixing device according to claim 6, characterized in that: The top of the wedge-shaped platform (14) is a horizontal plane. A plurality of top blocks (19) are evenly distributed on the top of the wedge-shaped platform (14). A 3 / 4 ball hole is opened on the top of the top block (19). A universal ball (5) is rotatably arranged in the 3 / 4 ball hole. The top of the universal ball (5) extends to above the 3 / 4 ball hole.

8. The metal flat target machining positioning and fixing device according to claim 2, characterized in that: The positioning mechanism (4) comprises a mounting plate (21), a stand (27) is arranged on the top of the mounting plate (21), a plurality of T-shaped screws (22) are arranged through the mounting plate (21) in a longitudinal direction, the bottom end of the T-shaped screw (22) is T-shaped and slides with one of the transverse T-shaped grooves (6), a fixing nut (23) is arranged on the upper thread of the connection between the T-shaped screw (22) and the mounting plate (21), and the fixing nut (23) is tightened downward to fix the mounting plate (21) and the workbench (1) together; a cylinder (24) is arranged on the top of the stand (27), a positioning block (25) is fixedly connected to the output shaft of the cylinder (24), and a positioning protrusion (20) is arranged on the side of the positioning block (25).

9. A metal flat target machining positioning and fixing device according to claim 8, characterized in that: The cylinder (24) is a double-shaft cylinder, and each output shaft of the double-shaft cylinder is fixedly connected to a positioning block (25).

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