Long-stroke six-axis precision motion platform using double-H structure

Abstract

The invention relates to the technical field of precision motion tables of semiconductor equipment or measuring equipment, and discloses a long-stroke six-axis precision motion table using a double-H structure, the long-stroke six-axis precision motion table comprises a base, a guide rail, frames and a single-stroke driving part, the frames are formed by encircling and splicing a plurality of I-shaped beams, and the frames are in magnetic sliding connection; the single-stroke driving part is in magnetic sliding connection with the frame through an internal structure, and a plurality of discs sequentially stacked in the vertical direction, a plurality of magnetic loop parts arranged for planar motion of the single-stroke driving part and a plurality of coil parts used for adjusting levelness and focusing of the single-stroke driving part are installed on the internal structure; a sample clamp is mounted on the uppermost disc; air bearings are mounted between the frame and the base and between the internal structure and the base; a complex control device is not needed, and the short-stroke driving part and the long-stroke driving part are not mechanically connected, so that the movement of the short-stroke driving part and the movement of the long-stroke driving part do not influence each other, and accurate movement control is realized.

Description

Technical Field

[0001] The present invention relates to the technical field of precision motion stages for semiconductor equipment or measuring equipment, and in particular to a long-stroke six-axis precision motion stage utilizing a double-H structure. Background Art

[0002] Existing long-stroke ultra-precision drive systems cover the entire process from large-range motion to ultra-precision position control by using only long-stroke drivers; this approach makes the control device complex due to the need to handle the wide motion range of the entire system; as a result, not only does it require additional electronic equipment support, but it may also cause motion time delays due to process complexity and increase the risk of failure.

[0003] In addition, due to the need to accurately perform stable driving over long strokes, the difficulty of system design and manufacturing gradually increases as the accuracy requirements increase, which also leads to a significant increase in costs. Moreover, when moving over long strokes, the system's response characteristics are slow and performance is poor.

[0004] Some traditional motion stages involve a dual servo structure with short stroke and long stroke, but their short stroke drive unit is still mechanically connected to the long stroke drive unit; this mechanical coupling causes the movement of the long stroke drive to be directly transmitted and affect the movement of the short stroke drive, thus limiting ultra-precision motion.

[0005] When the system only performs planar motion, the following problems exist: the need to minimize errors during assembly increases the difficulty of manufacturing; in addition, since the Z-axis, pitch, and roll motion positions of the motion table cannot be controlled, the final error accumulation becomes a key issue; When using a linear motor and an air bearing to guide axial motion, such as U.S. Pat. No. 5,760,564A, the system disclosed in the patent requires external fixation of the bearing guide to achieve planar motion; for systems with long strokes, this requires the use of a long and bulky bearing fixture, which complicates the system and increases weight.

[0006] In addition, in a conventional common motion stage, in order to realize two-dimensional planar motion, a single-axis motion system is usually constructed by stacking and combining; this design leads to an increase in the size of the motion stage; at the same time, in a motion stage system for long-stroke motion, in order to improve the rigidity of the system, thicker materials are usually used, thereby increasing the weight of the overall system; Therefore, there is an urgent need for a long-stroke six-axis precision motion table using a double H structure to solve the above problems. Summary of the invention

[0007] The purpose of the present invention is to provide a long-stroke six-axis precision motion table using a double H structure, which can effectively solve the problems existing in the above-mentioned prior art.

[0008] In order to solve the above technical problems, the present invention adopts the following technical solution: a long-stroke six-axis precision motion table using a double H structure, comprising: Pedestal; Two guide rails are symmetrically mounted above the base and are used to provide a path in a first direction; A frame is formed by enclosing and splicing a plurality of I-beams, the frame is located between the two guide rails, and is magnetically slidably connected to the two guide rails in a first direction provided by the two guide rails; the frame also provides a path in a second direction perpendicular to the first direction; A single-stroke driving part is located in the middle of the frame and is magnetically slidably connected to the frame in a second direction provided by the frame; the single-stroke driving part includes an internal structure, the internal structure is magnetically slidably connected to the frame in the second direction provided by the frame, and the internal structure is equipped with a plurality of disks stacked in sequence in a vertical direction, a plurality of magnetic circuit parts provided for the planar movement of the single-stroke driving part, and a plurality of coil parts for adjusting the level and focus of the single-stroke driving part; The sample fixture part is installed on the uppermost disc; Air bearings are installed between the frame and the internal structure and the base.

[0009] Preferably, the magnetic sliding connection structure between the frame and the guide rail comprises: a first linear motor coil unit, wherein the first linear motor coil unit is L-shaped, and a horizontal portion of the L-shaped first linear motor coil unit is coupled to a corresponding side of the frame, and a driving coil is installed inside a vertical portion of the L-shaped first linear motor coil unit; A plurality of first linear motor magnets are arranged on the guide rail along a first direction; A magnetic force is generated between the driving coil and the first linear motor magnet, thereby generating a driving force required for movement in a first direction; The single-stroke driving part and the frame magnetic sliding connection structure include a second linear motor coil portion and a plurality of second linear motor magnets, wherein the second linear motor coil portion and the plurality of second linear motor magnets are identical in structure and installation to the first linear motor coil portion and the first linear motor magnet.

[0010] Further preferably, a heat dissipation device is added to the first linear motor coil portion and the second linear motor coil portion, and the heat dissipation device includes an embedded cooling water pipe, and both ends of the embedded cooling water pipe are connected by a rubber tube so that the rubber tube can bend when the first linear motor coil portion and the second linear motor coil move.

[0011] Preferably, a first pre-loaded air bearing and a first free air bearing are installed between the frame and the two guide rails, and a second pre-loaded air bearing and a second free air bearing are installed between the internal structure and the frame.

[0012] Preferably, the first free air bearings are equipped with multi-degree-of-freedom hinges, which include a sphere and a ball support portion, the sphere being movably connected to the ball support portion, that is, the sphere can move within a plane with multiple degrees of freedom relative to the ball support portion.

[0013] Preferably, the frame and the corresponding surfaces of the two guide rails are respectively provided with matching first and second guide surfaces, and the two sides of the internal structure and the corresponding surfaces of the frame are respectively provided with matching third and fourth guide surfaces; the first guide surface, the second guide surface, the third guide surface and the fourth guide surface are all made of synthetic resin material.

[0014] Preferably, the first linear motor magnet and / or the second linear motor magnet are arranged using a Halbach magnet.

[0015] Preferably, the plurality of magnetic circuit parts are arranged at equal intervals in the circumferential direction with the center of the lowest disk as a reference, and the coil part is arranged in the space between adjacent magnetic circuit parts; the internal structure is provided with a plurality of coil part insertion holes for fitting the coil part and a plurality of magnetic circuit part insertion holes for fitting the magnetic circuit part, and a coil slot is also arranged around each magnetic circuit part insertion hole for inserting a first coil that generates electromagnetic effect with the magnetic circuit part.

[0016] Preferably, the magnetic circuit portion is mainly composed of two magnetic circuits, and the two magnetic circuits are mainly composed of a magnet and two first core portions distributed on both sides of the magnet, which are superimposed and symmetrically connected by a first connecting bar.

[0017] Preferably, the coil portion is used to connect and support the disks, and the disks are, from top to bottom, the first disk, the second disk, and the third disk. The coil portion includes a second connecting bar, a cylindrical internal iron core surrounding the center of the second connecting bar, a permanent magnet and a second coil surrounding the internal iron core, an external iron core surrounding the permanent magnet and the second coil, and two second iron core portions arranged at both ends of the external iron core, an upper plate and a lower plate are respectively attached to the two second iron core portions, the upper plate and the lower plate are respectively connected to the second disk and the third disk, and fixing components are respectively installed at both ends of the second connecting bar through disc springs.

[0018] Preferably, each of the coil parts is equipped with an air bearing in contact with the base, and an air flow channel is provided in the central portion below the first disk, and the air flow channel is used to supply air to the air bearing.

[0019] Beneficial effects: The present invention adopts a long-stroke six-axis motion table with a double H structure, and is provided with a single-stroke driving part, a long-stroke part driven by a guide rail, and a short-stroke part driven by a frame. No complicated control device is required, and there is no mechanical connection between the short-stroke and long-stroke driving parts, so their respective movements will not affect each other, thereby achieving precise motion control. Among them, a linear motor with a Halbach magnet array, a VCM with a dual magnetic circuit structure for short stroke, and a driving structure using an electromagnet can provide fast response characteristics and strong driving force.

[0020] In addition, in the present invention, the design of the frame structure enables the guide rail and the magnet array of the linear motor to be implemented on the same plane. Therefore, the structure of the motion platform can be implemented as a single plane structure rather than a stacked structure, thereby reducing the height of the entire structure, simplifying the shape of the motion platform, increasing the rigidity and improving the resonance frequency. The use of I-beams reduces the weight of the system and improves the resonance frequency, thereby achieving stable movement even during high-speed operation.

[0021] In the present invention, by using a preloaded air bearing and a free air bearing combined with a multi-degree-of-freedom hinge, even if there is an error in the parallelism of the guide rail, linear motion can be achieved through self-correction, thereby reducing the requirements for the manufacturing accuracy of the guide rail. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings are used to provide further understanding of the present invention and constitute a part of the specification. They are used to explain the present invention together with the embodiments of the present invention and do not constitute a limitation of the present invention.

[0023] In the attached picture: Figure 1 Schematic diagram of the structure of the long-stroke six-axis precision motion table with double H structure of the present invention; Figure 2 It is a plan view of a long-stroke six-axis precision motion table with a double H structure of the present invention; Figure 3 is a schematic structural diagram of a first linear motor magnet of the present invention; Figure 4 It is a structural schematic diagram of the multi-degree-of-freedom hinge of the present invention; Figure 5 It is a structural schematic diagram of the single-stroke driving part of the present invention; Figure 6 It is a plan view of the single-stroke driving portion of the present invention; Figure 7 It is a structural schematic diagram of the internal structure of the present invention; Figure 8 It is a structural schematic diagram of the magnetic circuit part of the present invention; Fig. 9is a cross-sectional view of the magnetic circuit portion of the present invention; Fig.10 is a cross-sectional view of the coil portion of the present invention; Fig.11 is a side view of the single-stroke drive portion of the present invention; Fig.12 It is a schematic structural diagram of the heat dissipation device of the present invention; Fig.13 It is a structural schematic diagram of a long-stroke six-axis precision motion stage with a double H structure and a grating plate installed in the present invention; Fig.14 It is a schematic diagram of the structure of a long-stroke six-axis precision motion table with a double H structure and a guide surface.

[0024] Numbers in the figure: 100, single-stroke driving part; 10, internal structure; 105, guide hole; 101, first disc; 102, second disc; 103, third disc; 110, magnetic circuit part; 111, first coil; 112, first upper iron core part; 113, first lower iron core part; 114, magnet; 115, first connecting bar; 120, coil part; 121, second connecting bar; 122, internal iron core; 123, permanent magnet; 124, second coil; 125, external iron core; 126, second upper iron core portion; 127, second lower iron core portion; 128, upper plate; 129, lower plate; 130, internal magnetic circuit component; 11, sample fixture portion; 12, second linear motor; 13, second linear motor coil portion; 14, second linear motor magnet; 140, coil portion insertion hole; 141, magnetic circuit portion insertion hole; 142, coil slot; 15, second preload air bearing; 150, disc spring; 151, fixing member; 16, second free air bearing; 17, second air bearing; 18, measuring mirror; 160, grating plate; 20, frame; 21, I-beam; 22a, outer groove; 22b, inner groove; 23, first linear motor; 24, first linear motor coil; 25, first linear motor magnet; 25a, first direction magnet; 25b, second direction magnet; 25c, third direction magnet; 29, first preload air bearing; 30. First free air bearing; 31. First air bearing; 35. Third guide surface; 36. Fourth guide surface; 37. First guide surface; 38. Second guide surface; 40a. First guide rail; 40b. Second guide rail; 42. Stopper; 50. Base; 5. Air bearing; 60. Sphere; 61. Ball support; 62. Multi-degree-of-freedom hinge; 63. Drive coil; 64. Heat dissipation device; 65. Cooling water pipe; 66. Rubber tube; 7. Air flow channel. DETAILED DESCRIPTION

[0025] The embodiments of the present invention are described below in conjunction with the drawings in the embodiments of the present invention. The terms used in the implementation mode of the present invention are only used to explain the specific embodiments of the present invention, and are not intended to limit the present invention. The embodiments of the present application are described below in conjunction with the drawings.

[0026] Embodiment: A long-stroke six-axis precision motion stage using a double H structure includes a base 50, and a single-stroke driving part 100 mounted on the base 50 for planar short-stroke motion and for pitch, roll, and up and down short-stroke motion, and a short-stroke driving part and a long-stroke driving part composed of a guide rail and a frame; the details are as follows: refer to Figure 1 As shown, guide rails are installed on both sides of the base 50, which are defined as the first guide rail 40a and the second guide rail 40b. A frame 20 is arranged between the first guide rail 40a and the second guide rail 40b, and an internal structure 10 is placed in the internal space of the frame 20; a plurality of disks are installed on the upper and lower parts of the internal structure 10, which are defined as the first disk 101, the second disk 102 and the third disk 103 from top to bottom, forming a single-stroke driving part 100, and a sample clamp part 11 is installed on the upper part of the single-stroke driving part 100. In a specific example, the size of the entire assembly is about .

[0027] The sample fixture part 11 is a part where the sample (not shown) is fixed, located on the upper part of the single-stroke driving part 100, and is a rectangular I-shaped plate. Two measuring mirrors 18 are installed on one side of the sample fixture part 11, which are vertically attached to the sample fixture part 11 through a light sensor (not shown) for measuring the position of the fixture part; refer to Figure 1-Figure 2 As shown, for the guide rail driving part, a path in a first direction is provided by the first guide rail 40a and the second guide rail 40b, that is, Figure 1 The first guide rail 40a and the second guide rail 40b are used to guide the movement of the frame 20 in the x-axis direction; the frame 20 and the first guide rail 40a and the second guide rail 40b are connected by a magnetic sliding connection, refer to Figure 1-Figure 2 As shown, a first linear motor coil portion 24 is provided on both I-shaped beams 21 of the frame 20 corresponding to the first guide rail 40a and the second guide rail 40b. The first linear motor coil portion 24 is L-shaped, and its plane portion first extends along the upper surface of the I-shaped beam 21 for a fixed length, and then bends to extend in a vertical direction, surrounding the first guide rail 40a and the second guide rail 40b; a driving coil 63 is provided inside the vertical extension portion; first linear motor magnets 25 are arranged on the side surfaces of the first guide rail 40a and the second guide rail 40b corresponding to the vertical extension portion, and stoppers 42 are installed at both ends of the first guide rail 40a and the second guide rail 40b to prevent the frame 20 from deviating within the range of motion in the x-axis direction; refer to Figure 3 As shown, the first linear motor 23 includes a first linear motor magnet 25, a driving coil 63 and the first linear motor magnet 25, wherein the magnetic lines of force of the first linear motor magnet 25 are shown; In this embodiment, the first linear motor magnet 25 adopts a Halbach magnet arrangement that can obtain a higher magnetic flux density. Figure 4 As shown, the first directional magnet 25a, the second directional magnet 25b and the third directional magnet 25c are included. The characteristic of the Halbach magnet arrangement is that the yoke used for smooth magnetic flux flow in the conventional linear motor is replaced by the third directional magnet 25c placed between the first directional magnet 25a and the second directional magnet 25b with upper and lower magnetic flux distributions, thereby obtaining a high magnetic flux density while reducing the weight; Based on the above-mentioned movement in the X-axis direction, the first linear motor coil portion 24 is combined with the frame 20 having the driving coil 63, and the first linear motor coil portion 24 generates relative linear movement relative to the first linear motor magnet 25 fixed on the first guide rail 40a and the second guide rail 40b; since the first linear motor 23 composed of the first linear motor coil portion 24 and the first linear motor magnet 25 is arranged on both sides of the frame 20, it can generate a greater driving force.

[0028] The first preloaded air bearing 29 and the first free air bearing 30 are also used to guide the movement in the X-axis direction. The means for guiding the movement in the X-axis direction are composed of a precision-machined surface, a first guide rail 40a that becomes a reference surface, and two first preloaded air bearings 29 that move along the surface. In order to prevent the first guide rail 40a from deviating from the reference surface and to prevent the swaying in the Y-axis direction when moving in the X-axis direction, a multi-degree-of-freedom hinge 62 is used in combination with the first free air bearing 30 and the second guide rail 40b. The first guide rail 40a as the reference surface uses the first preloaded air bearing 29 to reduce vibration while ensuring movement along the reference first guide rail 40a; and the first free air bearing 30 located at the opposite position uses a multi-degree-of-freedom hinge 62 to reduce position errors during movement, so that the motion table can move stably; refer to Figure 5 As shown, the multi-degree-of-freedom hinge 62 is composed of a sphere 60 and a ball support portion 61, and the sphere 60 can move in a plane with multiple degrees of freedom relative to the ball support portion 61; refer to Figure 2 As shown, first air bearings 31 are installed at the four corners of the frame 20 to reduce the friction force transmitted from the base 50 during planar movement; at this time, the first air bearings 31 use preload bearings to control the floating of the frame 20 up and down.

[0029] refer to Figure 1-Figure 2 As shown, for the driving part of the frame 20, the frame 20 is composed of four I-beams 21 connected vertically to form a four-corner window structure; the inner side and the outer side of each I-beam 21 are respectively connected to the groove part of the I-beam 21, which is defined as the outer groove 22a and the inner groove 22b in this embodiment; Among the four I-beams 21, a pair of I-beams 21 perpendicular to the above two I-beams 21 is used as a second direction path, that is, the y-axis direction in this embodiment. The internal structure 10 is magnetically slidably connected with the frame 20 in the second direction provided by the frame 20, referring to Figure 1-Figure 2 As shown, a second linear motor coil portion 13 is provided in the direction of the internal structure 10 perpendicular to the first guide rail 40a and the second guide rail 40b. The structure and layout of the second linear motor coil portion 13 are the same as those of the first linear motor coil portion 24. The plane portion thereof first extends a fixed length along the upper surface of the internal structure 10, and then bends to extend in a vertical direction, wrapping around the corresponding I-beam 21. A driving coil 63 is provided inside the vertically extending portion. Second linear motor magnets 14 are arranged on the side surfaces corresponding to the above-mentioned I-beam 21 and the vertically extending portion. The second linear motor magnets 14 may also be arranged in the same Halbach magnet arrangement as described above. Based on the above-mentioned motion in the Y-axis direction, the second linear motor coil portion 13 is combined with the internal structure 10 having the driving coil 63, and the second linear motor coil portion 13 generates a relative linear motion relative to the second linear motor magnet 14 fixed on the I-beam 21; the second linear motor 12 composed of the second linear motor coil portion 13 and the second linear motor magnet 14 is arranged on both sides of the internal structure 10; Among them, the means for guiding the movement in the Y-axis direction also include a second pre-stressed air bearing 15 and a second free air bearing 16; the two pairs of relative I-beams 21 have the second linear motor magnets 14 required for the Y-axis movement of the internal structure 10 arranged in sequence in their respective outer grooves 22a, and the second pre-stressed air bearing 15 and the second free air bearing 16 combined with the internal structure 10 are inserted into the inner groove 22b to guide the Y-axis movement of the internal structure 10; wherein, the structure and layout of the second pre-stressed air bearing 15 and the second free air bearing 16 are similar to the above-mentioned first pre-stressed air bearing 29 and the first free air bearing 30, the second pre-stressed air bearing 15 and the second free air bearing 16 are used to guide the movement of the internal structure 10 in the frame 20, and on one side of the internal structure 10, two second pre-stressed air bearings 15 that cannot move relative to each other are fixed; on the other side, the second free air bearing 16 is connected to the internal structure 10 through a multi-degree-of-freedom hinge 62 so that it can move relative to each other.

[0030] Likewise, second air bearings 17 are installed at the four corners of the internal structure 10 , so that the internal structure 10 can move on the base 50 without friction.

[0031] Based on the above, in the present embodiment, the X-axis movement of the internal structure 10 is achieved by the X-axis movement of the frame 20; the internal structure 10 maintains a gap of approximately 50 microns with the frame 20 through the second preloaded air bearing 15 and the second free air bearing 16, and is aligned in the X-axis direction, so unless an external force acts in the Y-axis direction, the movement of the frame 20 in the X-axis direction will cause the internal structure 10 and the frame 20 to move together.

[0032] When the internal structure 10 needs to be moved along the Y-axis direction, the frame 20 remains stationary and only the internal structure 10 moves along the Y-axis direction; the internal structure 10 moves along the path between two I-beams 21 where the first linear motor 23 is located among the four I-beams 21 constituting the frame 20; the inner grooves 22b of the above-mentioned two I-beams 21 are precisely machined, and on this surface, the second preloaded air bearing 15 and the second free air bearing 16 installed on the internal structure 10 will follow along their paths, thereby realizing movement in the Y-axis direction.

[0033] refer to Figure 5-Figure 6 As shown, for the single-stroke driving part 100, the single-stroke driving part 100 is mainly composed of a stacked first disk 101, a second disk 102 and a third disk 103, and a plurality of magnetic circuit parts 110 provided for the planar movement of the single-stroke driving part 100, and a plurality of coil parts 120 for adjusting the horizontal and focusing of the single-stroke driving part 100. The horizontal adjustment refers to the movement of the single-stroke driving part 100 along the z-axis direction (i.e., the vertical direction), and ensuring that the position of the sample clamp part 11 remains unchanged; the focusing is similar to the horizontal adjustment, but its purpose is to adjust the focal length of the light sensor (not shown); The first disc 101, the second disc 102 and the third disc 103 are located on both sides of the internal structure 10, with two on the top and one on the bottom; Regarding the arrangement of the magnetic circuit portion 110 and the coil portion 120: In this embodiment, three magnetic circuit portions 110 and three coil portions 120 are arranged, and more may be arranged as required, see Figure 5-Figure 6 As shown, the magnetic circuit portion 110 is based on the center of the third disk 103. The coils 120 are arranged in a triangular layout in the space between the magnetic circuits 110. The intervals form a triangular layout; In this embodiment, reference Figure 7As shown, in the internal structure 10, in order to accommodate the magnetic circuit part 110 and the coil part 120, three coil part insertion holes 140 and three magnetic circuit part insertion holes 141 are formed; around each magnetic circuit part insertion hole 141, a coil slot 142 is also formed to insert the first coil 111 that generates electromagnetic action with the magnetic circuit part 110; refer to Figure 8-Figure 9 As shown, the magnetic circuit portion 110 is mainly composed of two magnetic circuits, which are composed of a magnet 114 and two core portions, which in this embodiment are defined as a first upper core portion 112 and a first lower core portion 113 superimposed and symmetrically connected by a first connecting bar 115; refer to Fig.10 As shown, the coil portion 120 is used to connect and support the first disk 101, the second disk 102 and the third disk 103. The coil portion 120 includes an internal magnetic circuit component 130. The internal magnetic circuit component 130 includes a second connecting bar 121, a cylindrical internal iron core 122 surrounding the center of the second connecting bar 121, a permanent magnet 123 and a second coil 124 surrounding the internal iron core 122, an external iron core 125 surrounding the permanent magnet 123 and the second coil 124, and a second iron core portion located at both ends of the internal magnetic circuit component 130, including a cylindrical internal iron core 122 disposed on the external iron core 125. The second core parts at both ends of 125, the second core parts are respectively a second upper core part 126 and a second lower core part 127, the second upper core part 126 and the second lower core part 127 are distributed and attached with an upper plate 128 and a lower plate 129, the upper plate 128 and the lower plate 129 are respectively connected to the second disc 102 and the third disc 103, the two ends of the second connecting strip 121 are respectively installed with a fixing component 151 through a disc spring 150, and are connected to the first disc 101 through the second connecting strip 121 and the fixing component 151, for supporting the first disc 101.

[0034] refer to Fig.11 As shown, the first lower core portion 113 of the magnetic circuit portion 110 is fixed on the third disk 103, and the first connecting strip 115 connected to the first lower core portion 113 passes through the magnetic circuit portion insertion hole 141 of the first coil 111 located in the internal structure 10, and is connected to the first upper core portion 112, and the first upper core portion 112 is fixed on the second disk 102.

[0035] The coil portion 120 is inserted into the coil portion insertion hole 140 formed in the internal structure 10, and the upper plate 128 and the lower plate 129 of the coil portion 120 are fixed on the second disk 102 and the third disk 103; the second connecting bar 121 located at the center of the coil portion 120 extends to the first disk 101 through the guide hole 105 of the second disk 102; the fixing part 151 fixed on the second connecting bar 121 is fixed to the first disk 101 by bolts (not shown), thereby supporting the first disk 101.

[0036] Each coil part 120 is installed with an air bearing 5 in contact with the base 50, and an air flow channel 7 is set in the central part below the first disk 101 for supplying air to multiple air bearings 5; at the lower part of the third disk 103, the air bearing 5 ensures that the driving part can move without friction on the base 50.

[0037] When the first coil 111 is energized, the first coil 111 starts to move in the magnetic flux generated by the magnetic circuit portion 110. The first coil 111 is located in the xy plane, so the direction of the current can be any direction on the xy plane, and the magnetic flux direction of the magnetic circuit portion 110 is the z-axis direction. Therefore, according to Fleming's left-hand rule, the first coil 111 is acted upon by a force on the xy plane and performs a rotational motion in the xy plane. Horizontal adjustment and focusing are achieved by: the magnetic flux density generated by the permanent magnet 123 changes, and the size of the magnetic flux density is changed through the second coil 124, thereby causing an imbalance in the magnetic flux density, and the attraction generated at this time is used to achieve the pulling movement in the up and down directions; The driving force generated by the second coil 124 and the permanent magnet 123 acts on the internal magnetic circuit component 130, so that the second connecting bar 121 connected to the internal magnetic circuit component 130 moves up and down, and the movement of the second connecting bar 121 is transmitted to the sample clamping part 11 through the guidance of the disc spring 150; Based on the above, in another embodiment, a heat dissipation device 64 is added to both the second linear motor coil portion 13 and the first linear motor coil portion 24. Figure 1 and Fig.12 As shown, in order to absorb the heat generated by the second linear motor coil portion 13 and the first linear motor coil portion 24, a heat dissipation device 64 with an embedded cooling water pipe 65 is installed on its vertical extension surface; the two ends of the cooling water pipe 65 are connected by a rubber tube 66 so that the rubber tube 66 can bend when the second linear motor coil portion 13 and the first linear motor coil portion 24 move.

[0038] Based on the above, in another embodiment, a grating plate 160 is installed in the sample holder 11 to replace the measuring mirror 18 in the sample holder 11 for position control; Fig.13 As shown, a grating plate 160 is installed on one side of the sample holder 11 so that the position information of the sample holder 11 can be measured by a light sensor (not shown).

[0039] Based on the above, in another embodiment, a synthetic resin guide surface is used instead of an air bearing, or an air bearing and a synthetic resin guide surface can be used in combination to avoid the slight friction generated by the air bearing; refer to Fig.14As shown, the corresponding surfaces of the frame 20 and the first guide rail 40a and the second guide rail 40b are respectively provided with matching first guide surfaces 37 and second guide surfaces 38; the corresponding surfaces of the internal structure 10 and the frame 20 are respectively provided with matching third guide surfaces 35 and fourth guide surfaces 36; the above guide surfaces are all made of synthetic resin materials.

[0040] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments. For ordinary technicians in this technical field, after knowing the contents recorded in the present invention, they can make several equivalent changes and substitutions without departing from the principle of the present invention. These equivalent changes and substitutions should also be regarded as belonging to the protection scope of the present invention.

Claims

1. A long-stroke six-axis precision motion table using a double H structure, characterized in that: include: Pedestal; Two guide rails are symmetrically mounted above the base and are used to provide a path in a first direction; A frame is formed by enclosing and splicing a plurality of I-beams, the frame is located between the two guide rails, and is magnetically slidably connected to the two guide rails in a first direction provided by the two guide rails; the frame also provides a path in a second direction perpendicular to the first direction; A single-stroke driving part is located in the middle of the frame and is magnetically slidably connected to the frame in a second direction provided by the frame; the single-stroke driving part includes an internal structure, the internal structure is magnetically slidably connected to the frame in the second direction provided by the frame, and the internal structure is equipped with a plurality of disks stacked in sequence in a vertical direction, a plurality of magnetic circuit parts provided for the planar movement of the single-stroke driving part, and a plurality of coil parts for adjusting the level and focus of the single-stroke driving part; The sample fixture part is installed on the uppermost disc; Air bearings are installed between the frame and the internal structure and the base.

2. The long-stroke six-axis precision motion stage using a double H structure according to claim 1, characterized in that: The magnetic sliding connection structure between the frame and the guide rail comprises: a first linear motor coil unit, wherein the first linear motor coil unit is L-shaped, and a horizontal portion of the L-shaped first linear motor coil unit is coupled to a corresponding side of the frame, and a driving coil is installed inside a vertical portion of the L-shaped first linear motor coil unit; A plurality of first linear motor magnets are arranged on the guide rail along a first direction; A magnetic force is generated between the driving coil and the first linear motor magnet, thereby generating a driving force required for movement in a first direction; The single-stroke driving part and the frame magnetic sliding connection structure include a second linear motor coil portion and a plurality of second linear motor magnets, wherein the second linear motor coil portion and the plurality of second linear motor magnets are identical in structure and installation to the first linear motor coil portion and the first linear motor magnet.

3. The long-stroke six-axis precision motion stage using a double H structure according to claim 2, characterized in that: A first pre-loaded air bearing and a first free air bearing are installed between the frame and the two guide rails, and a second pre-loaded air bearing and a second free air bearing are installed between the internal structure and the frame.

4. The long-stroke six-axis precision motion stage using a double H structure according to claim 3, characterized in that: The first free air bearings are all equipped with a multi-degree-of-freedom hinge, which includes a sphere and a ball support portion, and the sphere is movably connected to the ball support portion.

5. The long-stroke six-axis precision motion stage using a double H structure according to claim 2 or 3, characterized in that: The frame and the corresponding surfaces of the two guide rails are respectively provided with matching first and second guide surfaces, and the two sides of the internal structure and the corresponding surfaces of the frame are respectively provided with matching third and fourth guide surfaces; the first guide surface, the second guide surface, the third guide surface and the fourth guide surface are all made of synthetic resin material.

6. The long-stroke six-axis precision motion stage using a double H structure according to claim 2, characterized in that: The first linear motor magnet and / or the second linear motor magnet are arranged using a Halbach magnet.

7. The long-stroke six-axis precision motion stage using a double H structure according to claim 1, characterized in that: The multiple magnetic circuit parts are arranged at equal intervals in the circumferential direction with the center of the lowest disk as a reference, and the coil part is arranged in the space between adjacent magnetic circuit parts; the internal structure is provided with a plurality of coil part insertion holes for fitting the coil part and a plurality of magnetic circuit part insertion holes for fitting the magnetic circuit part, and a coil slot is also arranged around each magnetic circuit part insertion hole for inserting a first coil that generates electromagnetic effect with the magnetic circuit part.

8. The long-stroke six-axis precision motion stage using a double H structure according to claim 7, characterized in that: The magnetic circuit part is mainly composed of two magnetic circuits, and the two magnetic circuits are mainly composed of a magnet and two first iron core parts distributed on both sides of the magnet, which are superimposed and symmetrically connected by a first connecting bar.

9. The long-stroke six-axis precision motion stage using a double H structure according to claim 7, characterized in that: The coil part is used to connect and support the disks, and the disks are the first disk, the second disk, and the third disk from top to bottom. The coil part includes a second connecting bar, a cylindrical internal iron core surrounding the center of the second connecting bar, a permanent magnet and a second coil surrounding the internal iron core, an external iron core surrounding the permanent magnet and the second coil, and two second iron core parts arranged at both ends of the external iron core. An upper plate and a lower plate are respectively attached to the two second iron core parts, and the upper plate and the lower plate are respectively connected to the second disk and the third disk, and the two ends of the second connecting bar are respectively installed with fixing components through disc springs.

10. The long-stroke six-axis precision motion stage using a double H structure according to claim 9, characterized in that: Each of the coil parts is equipped with an air bearing in contact with the base, and an air flow channel is arranged at the central portion below the first disk, and the air flow channel is used to supply air to the air bearing.

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