Crucible shaft calibration device for single crystal furnace

Abstract

The invention belongs to the technical field of single crystal furnaces, and particularly relates to a single crystal furnace crucible shaft calibration device which comprises a machine shell, a pot containing assembly is arranged in the machine shell and used for containing a crucible, a shaft sleeve is fixedly installed in the middle of the inner wall of the bottom of the machine shell, a shaft fixing assembly is arranged in the shaft sleeve and used for containing a crucible shaft, and the crucible shaft is arranged in the shaft sleeve. A bottom box is fixedly installed at the bottom of the machine shell. The rectangular block can rotate at the bottom end of the ball rod through traction of inclined gravity, one end of the rectangular block can rotate out of the groove body, the pressure measurer loses pressure, accordingly, it is detected that the ground on the corresponding side is lower than the ground on the other sides, then the controller controls the corresponding telescopic adjustor to work, and when the telescopic adjustor is adjusted to the horizontal position, the telescopic adjustor can be adjusted to the horizontal position. When the device is horizontally adjusted, the rectangular block can be attached to the inner wall of the groove body again, the pressure measuring devices can detect the pressure borne by the pressure measuring shaft again, and by means of the detection and adjustment mode, when the pressure values detected by the four pressure measuring devices are all consistent, horizontal adjustment of the device is completed.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal furnaces, in particular to a single crystal furnace crucible axis calibration device. Background Art

[0002] The crucible shaft of a single crystal furnace is a moving rod used to support the crucible and the semiconductor material melt inside it to achieve crystal growth. The rotation center of the crucible shaft has an important influence on the quality of the crystal. If the rotation center is not well aligned, it may cause the crystal rod to tilt, deform or misalign. In addition, the crucible shaft also has a cooling passage for cooling and heat exchange.

[0003] In the prior art, when calibrating the level of the crucible shaft, a long horizontal ruler is usually placed on the top of the crucible shaft, and the position of the fixing foot of the crucible shaft is analyzed and judged by manually observing the reading of the horizontal ruler by utilizing the rotation of the crucible shaft, and then adjusted; for the centering calibration of the crucible shaft, a micrometer is fixed on the top of the crucible shaft, and the head of the meter contacts the groove on the center hole of the furnace bottom to adjust the centering of the crucible shaft. Moreover, when adjusting the level and centering of the crucible shaft separately, they are adjusted separately, and one item will affect the accuracy of another item during adjustment, resulting in the adjustment accuracy not meeting the requirements, and the calibration takes too long.

[0004] To this end, the present invention provides a single crystal furnace crucible axis calibration device. Summary of the invention

[0005] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0006] The technical solution adopted by the present invention to solve its technical problems is as follows: a single crystal furnace crucible axis calibration device described in the present invention comprises a casing, a pot placing assembly is arranged inside the casing, the pot placing assembly is used to place the crucible, a shaft sleeve is fixedly installed at the middle position of the bottom inner wall of the casing, a fixed shaft assembly is arranged inside the shaft sleeve, the fixed shaft assembly is used to place the crucible axis, a bottom box is fixedly installed at the bottom of the casing, four groups of leveling units are symmetrically arranged inside the bottom box, the leveling unit comprises a square block, the leveling unit comprises a square block, the leveling unit comprises a square block to level the crucible axis and the crucible, a plurality of motors are fixedly installed at the bottom of the casing, a screw shaft is fixedly installed at the output end of the plurality of motors, a calibration box is rotatably connected to the outer wall of the plurality of screw shafts, a pot calibration unit is symmetrically arranged inside the calibration box, the pot calibration unit comprises a pot pushing arm, the pot calibration unit comprises a pot pushing arm to calibrate the crucible, and the pot calibration unit is arranged outside the fixed shaft assembly and the pot placing assembly; Before calibration, the device is leveled by driving four sets of leveling units, so that when the device calibrates the crucible and the crucible axis, the crucible and the crucible axis always maintain a vertical state, avoiding the two from tilting during calibration. At the same time, there is no need to manually observe the reading of the level ruler to analyze and judge the adjustment angle of the crucible axis fixing foot, so that the crucible axis and the crucible maintain a horizontal state before calibration. Then, the crucible axis is placed in the casing through the opening at the top of the device. When placing, the crucible axis is The bottom end is inserted into the shaft sleeve. When the bottom end of the crucible shaft is completely inserted into the shaft sleeve, the fixed shaft assembly in the shaft sleeve fixes the crucible shaft, thus completing the placement of the crucible shaft. Subsequently, the crucible is placed on the pot-setting assembly from the opening at the top of the casing according to this method. When both are placed, the pot-calibrating unit in the calibration box is started to push the crucible placed on the pot-setting assembly for calibration, so that the crucible is placed at the center of the pot-setting assembly. When the crucible calibration is completed, the crucible shaft and the crucible will be placed on the same horizontal line, that is, The calibration between the crucible shaft and the crucible can be completed, and then the motor is started to drive the screw shaft to rotate. When the screw shaft rotates, it drives the calibration box to move downward. When the calibration box moves downward, it drives the pot placement assembly to move, thereby driving the crucible to move downward. By driving the crucible to move downward, the crucible shaft can be clamped into the inside of the crucible, so that the connection between the two is completed to form a complete working piece. The crucible shaft and the crucible are connected by this method, which can solve the problem of separate adjustment of the level and centering of the crucible shaft in the prior art, and the adjustment of one item will affect the accuracy of another item, resulting in the adjustment accuracy not meeting the requirements, and the calibration time is too long. Through the arrangement of the fixed shaft assembly and the pot placement assembly, the device can be suitable for crucibles and crucible shafts of different sizes when in use. The motor drives the screw shaft to rotate to drive the calibration box to move in the casing, so that the pot calibration unit in the calibration box can always calibrate the middle position of the crucible when calibrating the crucible, so that the device can maintain a certain stability when calibrating crucibles of different sizes.

[0007] Preferably, the leveling unit further comprises a ball rod, which is fixedly mounted on the bottom of the housing, a square block is rotatably connected to one end of the ball rod, a balancing weight block is fixedly mounted on the bottom end of the square block, a limit plate is symmetrically fixedly mounted on the outer wall of the ball rod, the inner sides of the two limit plates are both slidably connected to the outer sides of the square block, a groove body is fixedly mounted on the outer wall of the sleeve, a pressure gauge is fixedly mounted on the top of the groove body, the top of the square block can fit with the bottom of the groove body, and when the ground is uneven, the square block will always maintain a horizontal downward state under the traction of the weight of the balancing weight block. When one side of the ground is lower, the square block will rotate at the bottom of the club through the traction of inclined gravity, and one end of the square block will rotate out of the slot. When the square block rotates out of the slot, the pressure sensor will lose pressure, thereby detecting that the ground on the corresponding side is lower than the other sides, thereby playing a role in detecting whether the device itself is horizontal. The setting of the limit plate is to play a role of limiting the rotation of the square block when it rotates out of the slot, which is convenient for subsequent resetting and prevents the subsequent resetting from affecting the resetting effect due to the uncertain position of the square block.

[0008] Preferably, the inner wall of the pressure gauge is slidably connected to a pressure measuring shaft, a pressure measuring spring is fixedly installed between the top of the pressure measuring shaft and the bottom of the pressure gauge, the outer wall of the pressure measuring shaft is slidably connected to the inner wall of the trough body, and the top of the moment block can push and press the bottom of the pressure measuring shaft. When the moment block is rotated out of the trough body, the pressure measuring shaft placed in one end of the trough body will lose its limiting extrusion and will slide out of the pressure measuring shaft under the action of the elastic force of the pressure measuring spring. At this time, the pressure gauge will detect that the pressure condition of the pressure measuring shaft has changed, thereby determining that the device is tilted and realizing the function of pressure measurement determination. It should be noted here that when the device is horizontal, one end of the moment block should be in contact with the bottom of one end of the trough body, and the pressure measuring shaft is placed inside the trough body under the action of the thrust of the moment block.

[0009] Preferably, a controller is fixedly installed on the top of the pressure gauge, and the controller is fixedly installed on the outer wall of the sleeve, and a telescopic adjuster is fixedly installed on the bottom of the casing, and a pad is fixedly installed on one end of the telescopic adjuster. When the guide rail detects that the pressure measuring shaft is under pressure, the guide rail transmits the detected information to the controller through information transmission, and then the controller controls the corresponding telescopic adjuster to operate, so that the telescopic adjuster drives the pad to perform telescopic adjustment. When the telescopic adjuster drives the pad to adjust to a horizontal position, the square block will re-attach to the inner wall of the trough body when the angle of the device is reset, and the pressure gauge will re-detect that the pressure measuring shaft is under pressure. When the pressure of the pressure gauge detects a certain value, the controller will control the telescopic adjuster to stop operating. Through this detection and adjustment method, when the pressure values ​​detected by the four pressure gauges are consistent, the horizontal adjustment of the device is completed, which plays a role in straightening the crucible shaft and the crucible.

[0010] Preferably, the fixed shaft assembly includes a retaining block, and there are multiple retaining blocks. Multiple sliding shafts are fixedly installed on the inner wall of the sleeve, and the inner walls of the multiple retaining blocks are respectively slidably connected to the outer walls of the multiple sliding shafts. Reset springs are arranged between the outer walls of the multiple retaining blocks and the inner wall of the sleeve, and the multiple reset springs are respectively placed on the outside of the multiple sliding shafts. When the crucible shaft is inserted into the sleeve, the bottom end of the crucible shaft squeezes and pushes the retaining block in the sleeve to move backward. When moving backward, the retaining block squeezes the reset spring to slide on the sliding shaft. When the bottom end of the crucible shaft contacts the bottom of the sleeve, at this time, the multiple retaining blocks push the crucible shaft under the action of the elastic force of the reset springs, thereby fixing the crucible shaft between the multiple retaining blocks, thereby completing the placement of the crucible shaft and playing the role of calibrating the crucible shaft. By resetting and fixing the multiple retaining blocks, the device can be adapted to crucible shafts of different sizes.

[0011] Preferably, the pot placing assembly includes slotted columns, and there are four slotted columns. The four slotted columns are symmetrically fixedly installed on the inner wall of the casing, and ring plates are fixedly installed on the tops of the four slotted columns. The inner walls of the four slotted columns are slidably connected with pot placing brackets, and the four pot placing brackets are slidably connected to the inner wall of the ring plate. The center position of the circle between the four pot placing brackets and the center position of the circle of the shaft sleeve are placed on the same horizontal line, and the tops of the four pot placing brackets are all in the shape of a support seat. When the crucible enters the casing, the crucible is placed between the four pot placing brackets. When the placement is completed, it is calibrated by the pot calibration unit so that the center of the crucible is consistent with the center of the crucible axis, thereby calibrating the two. By setting the shape of the pot placing bracket, different crucibles can be placed on the pot placing bracket, and by cooperating with the fixed shaft assembly, the device can be adapted to crucible axes and crucibles of different sizes.

[0012] Preferably, shaft rods are fixedly installed at the top and bottom of the four pot-holding supports, and the outer walls of the four shaft rods are slidably connected to the inner wall of the ring plate. Pressure springs are arranged between the top and bottom of the four pot-holding supports and the top of the ring plate, and the four pressure springs are respectively arranged on the outside of the four shaft rods. The tops of the four pot-holding supports can fit with the bottom of the calibration box. When the crucible calibration is completed, the screw shaft is driven by the driving motor to rotate, so as to move the calibration box downward in the casing. When the calibration box moves downward, the top ends of the multiple pot-holding supports are pushed to move, and the pot-holding supports will squeeze the pressure springs and move downward on the ring plate, and the bottom ends of the pot-holding supports will slide in the slot columns, thereby driving the crucibles between the multiple slot columns to move downward, and through the continuous downward movement of the crucible, the top end of the crucible shaft will be stuck into the inner wall of the crucible, so that the two are completely clamped, thereby completing the connection between the two, playing the role of assembling and connecting the crucible shaft and the crucible.

[0013] Preferably, the pot calibration unit also includes a co-driving assembly and a driving assembly, there are four pot-pushing arms, four guide rails are symmetrically fixedly installed on the top of the calibration box, the outer walls of the four pot-pushing arms are slidably connected to the inner walls of the four guide rails, four rectangular boxes are symmetrically fixedly installed on the inner wall of the calibration box, the inner walls of the four rectangular boxes are rotatably connected with screws, the outer walls of the four screws are threadedly connected with shift blocks, the tops of the four shift blocks respectively penetrate the inner walls of the four guide rails and are fixedly connected to the bottoms of the four pot-pushing arms, the tops of the four shift blocks are slidably connected to the calibration box and the inner walls of the guide rails, the outer walls of the four shift blocks are slidably connected to the inner walls of the four rectangular boxes, and gears are fixedly installed on one end of the four screws. When the crucible is placed, the driving assembly drives the co-driving assembly to move, and the co-driving assembly When the component moves, it drives four gears to rotate. When the four gears rotate, they drive four screws to rotate, thereby driving four shift blocks to move in four rectangular boxes. When the four rectangular boxes move, they drive four pot-pushing arms to slide in four guide rails, so that the four pot-pushing arms move in a four-way pushing form. Since the four pot-pushing arms operate synchronously, they push the crucible placed on the pot-setting support frame to move. When the four pot-pushing arms are completely in contact with the crucible, the crucible is placed at the center of the four pot-setting support frames, and the center of the crucible will be on the same horizontal line with the center of the crucible shaft placed in the shaft sleeve. At this point, the calibration of the crucible shaft and the crucible is completed. The crucible is calibrated by moving the four pot-pushing arms, so that the device can calibrate crucibles of different sizes.

[0014] Preferably, the driving component includes a ring sleeve, which is fixedly mounted on the inner wall of the positioning box. The inner wall of the positioning box is slidably connected with a gear ring. The four gears are rotatably connected to the inner wall of the positioning box. The teeth on the gear ring can respectively engage with the teeth on the four gears. When the driving component is operating, the driving component drives the gear ring to rotate in the ring sleeve. When the gear ring rotates, the four gears are driven to rotate synchronously through the engagement of the teeth, thereby realizing the synchronous movement of the four pot pushing arms in the guide rail, which plays a role of synchronous driving.

[0015] Preferably, the driving assembly includes an annular groove, which is fixedly installed on the bottom of the inner wall of the calibration box, and a plurality of electric sliders are slidably mounted on the inner wall of the annular groove. A plurality of connecting rods are fixedly installed on the bottom of the gear ring, and the bottom ends of the plurality of connecting rods are respectively fixedly connected to the tops of the plurality of electric sliders. When the crucible needs to be calibrated, the plurality of electric sliders are moved in the annular groove, and when the plurality of electric sliders move, the gear ring is driven to rotate through the connecting rods, thereby driving the four pot-pushing arms to move synchronously on the four guide rails, providing power for the synchronous movement of the four pot-pushing arms.

[0016] The beneficial effects of the present invention are as follows: 1. The present invention relates to a single crystal furnace crucible axis calibration device, in which the square block is always kept in a horizontal downward state under the traction of the weight of the balance weight block. When one side of the ground is lower, the square block will rotate at the bottom end of the ball rod through the traction of the inclined gravity, and one end of the square block will rotate out of the slot body. When the square block rotates out of the slot body, the pressure gauge will lose pressure, thereby detecting that the ground on the corresponding side is lower than that on the other sides. Subsequently, the controller controls the corresponding telescopic adjuster to operate. When the telescopic adjuster drives the pad to adjust to a horizontal position, the square block will fit back to the inner wall of the slot body, and the pressure gauge will re-detect that the pressure measuring axis is under pressure. Through this detection and adjustment method, when the pressure values ​​detected by the four pressure gauges are consistent, the horizontal adjustment of the device is completed, thereby achieving the effect of straightening the crucible axis and the crucible.

[0017] 2. The crucible axis calibration device for a single crystal furnace described in the present invention drives the gear ring to rotate in the ring sleeve through a driving component. When the gear ring rotates, the four gears are driven to rotate synchronously through the meshing of the teeth. When the four gears rotate, they drive the four screws to rotate, thereby driving the four shift blocks to move in the four rectangular boxes. When the four rectangular boxes move, they drive the four pot-pushing arms to slide in the four guide rails, so that the four pot-pushing arms move in a four-way pushing form. Since the four pot-pushing arms operate synchronously, they push the crucible placed on the pot-setting support frame to move. When the four pot-pushing arms are completely attached to the crucible, at this time, the crucible is placed at the center position of the four pot-setting support frames, and the center of the crucible will be on the same horizontal line with the center of the crucible axis placed in the shaft sleeve, thereby completing the calibration of the crucible axis and the crucible. The crucible is calibrated by moving the four pot-pushing arms, so that the device can calibrate crucibles of different sizes.

[0018] 3. The single crystal furnace crucible shaft calibration device described in the present invention pushes the retaining block in the sleeve backward by squeezing the bottom end of the crucible shaft. When moving backward, the retaining block squeezes the reset spring to slide on the sliding shaft. When the bottom end of the crucible shaft contacts the bottom of the sleeve, at this time, multiple retaining blocks push the crucible shaft under the action of the elastic force of the reset spring, so that the crucible shaft is fixed between the multiple retaining blocks, thereby completing the placement of the crucible shaft and playing the role of calibrating the crucible shaft. By resetting and fixing it with multiple retaining blocks, the device can be adapted to crucible shafts of different sizes.

[0019] 4. The present invention discloses a single crystal furnace crucible axis calibration device, which drives the screw shaft to rotate by a driving motor, thereby moving the calibration box downward in the casing. When the calibration box moves downward, it pushes the top ends of multiple pot-supporting frames to move, and the pot-supporting frames will squeeze the pressure springs and move downward on the ring plates, and the bottom ends of the pot-supporting frames will slide in the slot columns, thereby driving the crucibles between the multiple slot columns to move downward. Through the continuous downward movement of the crucible, the top end of the crucible axis will be stuck into the inner wall of the crucible, so that the two are clamped together, thereby completing the connection between the two and playing the role of assembling and connecting the crucible axis and the crucible. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below in conjunction with the accompanying drawings.

[0021] Figure 1 It is the main figure of the present invention; Figure 2 It is an overall diagram of the present invention; Figure 3 It is a structural schematic diagram of the screw shaft in the present invention; Figure 4 It is a structural schematic diagram of the balancing weight block in the present invention; Figure 5 It is a structural schematic diagram of the golf club in the present invention; Figure 6 It is a structural schematic diagram of the tank body in the present invention; Figure 7 It is a structural schematic diagram of the retaining block in the present invention; Figure 8 It is a structural schematic diagram of the pot support frame in the present invention; Fig. 9 It is a structural schematic diagram of the pan pushing arm in the present invention; Fig.10 It is a structural schematic diagram of the gear ring in the present invention; Fig.11 It is a structural schematic diagram of the annular groove in the present invention.

[0022] In the figure: 1, housing; 2, bottom box; 201, balance weight; 202, controller; 203, moment block; 204, ball bar; 205, limit plate; 206, tank; 207, pressure gauge; 208, pressure measuring spring; 209, pressure measuring shaft; 3, calibration box; 301, gear ring; 302, moment box; 303, gear; 304, screw; 305, shift block; 306, Annular groove; 307, electric slider; 308, ring sleeve; 309, connecting rod; 4, motor; 5, slot column; 501, pot support; 502, shaft rod; 503, pressure spring; 504, ring plate; 6, telescopic adjuster; 601, pad; 7, guide rail; 701, pot pushing arm; 8, shaft sleeve; 801, retaining block; 802, reset spring; 803, sliding shaft; 9, screw shaft. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0024] like Figures 1 to 11As shown, a single crystal furnace crucible axis calibration device described in an embodiment of the present invention comprises a casing 1, a pot placing assembly is arranged inside the casing 1, the pot placing assembly is used to place the crucible, a shaft sleeve 8 is fixedly installed at the middle position of the bottom inner wall of the casing 1, a fixed shaft assembly is arranged inside the shaft sleeve 8, the fixed shaft assembly is used to place the crucible axis, a bottom box 2 is fixedly installed at the bottom of the casing 1, four groups of leveling units are symmetrically arranged inside the bottom box 2, the leveling unit comprises a square block 203, the leveling unit is used to drive the square block 203 to level the crucible axis and the crucible, a plurality of motors 4 are fixedly installed at the bottom of the casing 1, a screw shaft 9 is fixedly installed at the output end of the plurality of motors 4, a plurality of screw shafts 9 are rotatably connected to the outer wall of the plurality of screw shafts 9 with a calibration box 3, a pot calibration unit is symmetrically arranged inside the calibration box 3, the pot calibration unit comprises a pot pushing arm 701, the pot calibration unit is used to drive the pot pushing arm 701 to calibrate the crucible, and the pot calibration unit is placed outside the fixed shaft assembly and the pot placing assembly; The crucible axis level and centering are adjusted separately. The adjustment of one item will affect the accuracy of another item, resulting in the adjustment accuracy not meeting the requirements and the calibration taking too long. Since the flatness of most floors is not consistent, before calibration, the device is leveled by driving four sets of leveling units, so that when the device calibrates the crucible and the crucible axis, the crucible and the crucible axis always maintain a vertical state, avoiding the two from tilting when calibrating the two. At the same time, there is no need to manually observe the reading of the level ruler to analyze and judge the adjustment angle of the crucible axis fixing feet, so that the crucible axis and the crucible maintain a horizontal state before calibration. Then, the crucible axis is placed in the casing 1 through the opening at the top of the device. When placing, the bottom end of the crucible axis is inserted into the shaft sleeve 8. When the crucible When the bottom end of the crucible shaft completely enters the shaft sleeve 8, the fixed shaft assembly in the shaft sleeve 8 fixes the crucible shaft, that is, the placement of the crucible shaft is completed. Then, the crucible is placed on the pot-setting assembly from the opening at the top of the casing 1 according to this method. When both are placed, the pot-calibrating unit in the calibration box 3 is started to push the crucible placed on the pot-setting assembly for calibration, so that the crucible is placed at the center of the pot-setting assembly. When the crucible calibration is completed, the crucible shaft and the crucible will be placed on the same horizontal line, and the calibration between the crucible shaft and the crucible can be completed. Then, the motor 4 is started to drive the screw shaft 9 to rotate, and the screw shaft 9 When the crucible is rotated, the calibration box 3 is driven to move downward, and when the calibration box 3 moves downward, the pot-setting assembly is driven to move, thereby driving the crucible downward. By driving the crucible downward, the crucible shaft can be clamped into the inside of the crucible, completing the connection between the two and forming a complete working piece. By connecting the crucible shaft and the crucible in this way, the problem of the prior art that the horizontal and centering of the crucible shaft are adjusted separately, the adjustment of one item will affect the accuracy of another item, resulting in the adjustment accuracy not meeting the requirements, and the calibration takes too long, is solved. By setting the fixed shaft assembly and the pot-setting assembly, the device can be used in When in use, it can be suitable for crucibles and crucible shafts of different sizes. The motor 4 drives the screw shaft 9 to rotate, thereby driving the calibration box 3 to move in the casing 1. The pot calibration unit in the calibration box 3 can always calibrate the middle position of the crucible when calibrating the crucible, so that the device can maintain a certain stability when calibrating crucibles of different sizes. It should be noted here that the centers of the fixed axis assembly and the pot placement assembly are on the same horizontal line, and the outer wall of the casing 1 is provided with a plurality of glass perspective openings for observing the working conditions in the casing 1. Since this is a prior art, it is not shown in this technical solution.

[0025] like Figures 3 to 6 As shown, the leveling unit also includes a ball rod 204, which is fixedly installed at the bottom of the housing 1, and a square block 203 is rotatably connected to one end of the ball rod 204. A balancing weight 201 is fixedly installed at the bottom of the square block 203. Limiting plates 205 are symmetrically fixedly installed on the outer wall of the ball rod 204. The inner sides of the two limiting plates 205 are slidably connected to the outer sides of the square block 203. A groove body 206 is fixedly installed on the outer wall of the shaft sleeve 8, and a pressure measuring device 207 is fixedly installed on the top of the groove body 206. The top of the square block 203 can fit with the bottom of the groove body 206. When the ground is uneven, the square block 203 will always maintain a horizontal downward state under the traction of the weight of the balance weight 201. When one side of the ground is lower, the square block 203 will rotate at the bottom end of the club 204 through the traction of the inclined gravity, and one end of the square block 203 will rotate out of the slot 206. When the square block 203 rotates out of the slot 206, the pressure gauge 207 will lose pressure, thereby detecting that the ground on the corresponding side is lower than the other sides, thereby playing a role in detecting whether the device itself is horizontal. The setting of the limit plate 205 is to play a role of limiting the rotation of the square block 203 when it rotates out of the slot 206, which is convenient for subsequent resetting and prevents the subsequent resetting from affecting the resetting effect due to the uncertain rotation position of the square block 203.

[0026] like Figures 5 and 6 As shown, the inner wall of the pressure measuring device 207 is slidably connected with a pressure measuring shaft 209, a pressure measuring spring 208 is fixedly installed between the top of the pressure measuring shaft 209 and the bottom of the pressure measuring device 207, the outer wall of the pressure measuring shaft 209 is slidably connected with the inner wall of the groove body 206, and the top of the moment block 203 can push and press the bottom of the pressure measuring shaft 209; Since both the moment block 203 and the balance weight block 201 have a certain mass, when the moment block 203 rotates out of the slot body 206, the pressure measuring shaft 209 placed in one end of the slot body 206 will lose its limiting extrusion, and will slide out of the pressure measuring shaft 209 under the action of the elastic force of the pressure measuring spring 208. At this time, the pressure sensor 207 will detect that the pressure condition of the pressure measuring shaft 209 has changed, thereby determining that the device is tilted and realizing the purpose of pressure measurement determination. It should be noted here that when the device is horizontal, one end of the moment block 203 should be in contact with the bottom of one end of the slot body 206, and the pressure measuring shaft 209 is placed inside the slot body 206 under the action of the thrust of the moment block 203.

[0027] like Figures 4 to 5 As shown, a controller 202 is fixedly mounted on the top of the pressure measuring device 207, and the controller 202 is fixedly mounted on the outer wall of the shaft sleeve 8. A telescopic adjuster 6 is fixedly mounted on the bottom of the housing 1, and a pad 601 is fixedly mounted on one end of the telescopic adjuster 6. When the guide rail 7 detects that the pressure measuring shaft 209 loses pressure, the pressure sensor 207 transmits the detected information to the controller 202 through information transmission, and then the controller 202 controls the corresponding telescopic adjuster 6 to operate, so that the telescopic adjuster 6 drives the pad 601 to perform telescopic adjustment. When the telescopic adjuster 6 drives the pad 601 to adjust to a horizontal position, the square block 203 will re-attach to the inner wall of the groove body 206 when the angle of the device is reset, and the pressure sensor 207 will re-detect that the pressure measuring shaft 209 is under pressure. When the pressure of the guide rail 7 detects a certain value, the controller 202 will control the telescopic adjuster 6 to stop operating. Through this detection and adjustment method, when the pressure values ​​detected by the four pressure sensors 207 are all consistent, the horizontal adjustment of the device is completed, thereby playing the role of straightening the crucible shaft and the crucible.

[0028] like Figures 3 to 7 As shown, the fixed shaft assembly includes a retaining block 801, and there are multiple retaining blocks 801. Multiple sliding shafts 803 are fixedly installed on the inner wall of the shaft sleeve 8. The inner walls of the multiple retaining blocks 801 are respectively slidably connected with the outer walls of the multiple sliding shafts 803. Reset springs 802 are arranged between the outer walls of the multiple retaining blocks 801 and the inner wall of the shaft sleeve 8. The multiple reset springs 802 are respectively placed outside the multiple sliding shafts 803. When the crucible shaft is inserted into the sleeve 8, the bottom end of the crucible shaft squeezes and pushes the retaining block 801 in the sleeve 8 to move backward. When moving backward, the retaining block 801 squeezes the reset spring 802 to slide on the sliding shaft 803. When the bottom end of the crucible shaft contacts the bottom of the sleeve 8, at this time, multiple retaining blocks 801 push the crucible shaft under the action of the elastic force of the reset spring 802, so that the crucible shaft is fixed between the multiple retaining blocks 801, thereby completing the placement of the crucible shaft and playing the role of calibrating the crucible shaft. By resetting and fixing the multiple retaining blocks 801, the device can be adapted to crucible shafts of different sizes.

[0029] like Figures 3 to 8 As shown, the pot-setting assembly includes a slot column 5, and there are four slot columns 5. The four slot columns 5 are symmetrically fixedly installed on the inner wall of the casing 1. A ring plate 504 is fixedly installed on the top of the four slot columns 5. The inner walls of the four slot columns 5 are slidably connected with pot-setting brackets 501. The four pot-setting brackets 501 are slidably connected to the inner wall of the ring plate 504. The center positions of the four pot-setting brackets 501 and the center position of the shaft sleeve 8 are placed on the same horizontal line, and the tops of the four pot-setting brackets 501 are all in the shape of a support seat; When the crucible enters the casing 1, the crucible is placed between the four pot-setting supports 501. When the placement is completed, the crucible is calibrated by the pot-calibrating unit so that the center of the crucible is consistent with the center of the crucible axis, thereby calibrating the two. By setting the shape of the pot-setting supports 501, different crucibles can be placed on the pot-setting supports 501. By cooperating with the fixed axis assembly, the device can be adapted to crucible axes and crucibles of different sizes.

[0030] like Figures 7 and 8 As shown, the top and bottom of the four pot-setting supports 501 are fixedly mounted with shafts 502, the outer walls of the four shafts 502 are slidably connected to the inner wall of the ring plate 504, and pressure springs 503 are arranged between the top and bottom of the four pot-setting supports 501 and the top of the ring plate 504, and the four pressure springs 503 are respectively placed outside the four shafts 502, and the tops of the four pot-setting supports 501 can fit with the bottom of the calibration box 3; When the crucible is calibrated, the screw shaft 9 is driven to rotate by the driving motor 4 to move the calibration box 3 downward in the casing 1. When the calibration box 3 moves downward, it pushes the top ends of the multiple pot-setting supports 501 to move. The pot-setting supports 501 will squeeze the pressure springs 503 and move downward on the ring plates 504. The bottom ends of the pot-setting supports 501 will slide in the slot columns 5, thereby driving the crucibles between the multiple slot columns 5 to move downward. Through the continuous downward movement of the crucible, the top end of the crucible shaft will be stuck into the inner wall of the crucible, so that the two are completely stuck together, thereby completing the connection between the two and playing the role of assembling and connecting the crucible shaft and the crucible. It should be noted here that due to the different sizes of the crucible shaft and the crucible, the downward movement distance of the pot-setting support 501 and the distance of the crucible shaft stuck in the crucible need to be calculated by the system.

[0031] like Figures 9 to 11 As shown, the pot calibration unit also includes a driving component and a driving component, there are four pot-pushing arms 701, four guide rails 7 are symmetrically fixedly installed on the top of the calibration box 3, the outer walls of the four pot-pushing arms 701 are slidably connected to the inner walls of the four guide rails 7, four square boxes 302 are symmetrically fixedly installed on the inner wall of the calibration box 3, the inner walls of the four square boxes 302 are rotatably connected to screws 304, the outer walls of the four screws 304 are threadedly connected to shift blocks 305, the top ends of the four shift blocks 305 respectively penetrate the inner walls of the four guide rails 7 and are fixedly connected to the bottoms of the four pot-pushing arms 701, the top ends of the four shift blocks 305 are slidably connected to the calibration box 3 and the inner walls of the guide rails 7, the outer walls of the four shift blocks 305 are slidably connected to the inner walls of the four square boxes 302, and one end of the four screws 304 is fixedly installed with a gear 303; When the crucible is placed, the driving component drives the driving component to move. When the crucible is moved, the driving component drives the four gears 303 to rotate. When the four gears 303 rotate, the four screws 304 are driven to rotate, thereby driving the four shift blocks 305 to move in the four rectangular boxes 302. When the four rectangular boxes 302 move, they drive the four pot-pushing arms 701 to slide in the four guide rails 7, so that the four pot-pushing arms 701 are moved in a four-way pushing form. Since the four pot-pushing arms 701 operate synchronously, the crucible placed on the pot-placing support frame 501 is pushed to move. When the four pot-pushing arms 701 are completely attached to the crucible, at this time, the crucible is placed at the center position of the four pot-placing support frames 501, and the center of the crucible will be on the same horizontal line with the center of the crucible axis placed in the shaft sleeve 8. At this point, the calibration of the crucible axis and the crucible is completed. The crucible is calibrated by moving the four pot-pushing arms 701, so that the device can calibrate crucibles of different sizes.

[0032] like Figure 10 to Figure 11 As shown, the same drive assembly includes a ring sleeve 308, the ring sleeve 308 is fixedly installed on the inner wall of the calibration box 3, the inner wall of the calibration box 3 is slidably connected with a gear ring 301, and the four gears 303 are all rotatably connected to the inner wall of the calibration box 3, and the teeth on the gear ring 301 can mesh with the teeth on the four gears 303 respectively; When the driving assembly is in operation, the driving assembly drives the gear ring 301 to rotate in the ring sleeve 308. When the gear ring 301 rotates, the four gears 303 are driven to rotate synchronously through the meshing of the teeth, thereby realizing the synchronous movement of the four pot pushing arms 701 in the guide rail 7, playing a role of synchronous driving.

[0033] like Figure 10 to Figure 11 As shown, the driving assembly includes an annular groove 306, which is fixedly installed at the bottom of the inner wall of the calibration box 3, and a plurality of electric sliders 307 are slidably arranged on the inner wall of the annular groove 306. A plurality of connecting rods 309 are fixedly installed at the bottom of the gear ring 301, and the bottom ends of the plurality of connecting rods 309 are respectively fixedly connected to the tops of the plurality of electric sliders 307; When the crucible needs to be calibrated, multiple electric sliders 307 move in the annular groove 306. When the multiple electric sliders 307 move, the connecting rod 309 drives the gear ring 301 to rotate, thereby driving the four pot-pushing arms 701 to move synchronously on the four guide rails 7, providing power for the synchronous movement of the four pot-pushing arms 701.

[0034] Working principle: Before calibration, the device is leveled by driving four sets of leveling units, so that when the device calibrates the crucible and the crucible axis, the crucible and the crucible axis always maintain a vertical state, avoiding the two from tilting when calibrating them. At the same time, there is no need to manually observe the reading of the level ruler, analyze and judge the adjustment angle of the crucible axis fixing foot, so that the crucible axis and the crucible maintain a horizontal state before calibration. Then, the crucible axis is placed in the housing 1 from the opening at the top of the device. When placing, the crucible axis is The bottom end is inserted into the shaft sleeve 8. When the bottom end of the crucible shaft is completely inserted into the shaft sleeve 8, the fixed shaft assembly in the shaft sleeve 8 fixes the crucible shaft, and the placement of the crucible shaft is completed. Then, the crucible is placed on the pot-setting assembly from the opening at the top of the casing 1 according to this method. When both are placed, the pot-calibrating unit in the calibration box 3 is started to push the crucible placed on the pot-setting assembly to calibrate the crucible so that the crucible is placed at the center of the pot-setting assembly. When the crucible calibration is completed, the crucible shaft and the crucible will be placed on the same horizontal line. The calibration between the crucible shaft and the crucible can be completed, and then the motor 4 is started to drive the screw shaft 9 to rotate. When the screw shaft 9 rotates, the calibration box 3 is driven to move downward. When the calibration box 3 moves downward, the pot placement assembly is driven to move, thereby driving the crucible to move downward. By driving the crucible to move downward, the crucible shaft can be clamped into the inside of the crucible, and the connection between the two is completed to form a complete working piece. The crucible shaft and the crucible are connected by this method, which can solve the problem of the prior art that the horizontal and centering of the crucible shaft are adjusted separately, and the adjustment of one item will affect the accuracy of another item, resulting in the adjustment accuracy not meeting the requirements, and the calibration time is too long. Through the arrangement of the fixed shaft assembly and the pot placement assembly, the device can be applied to crucibles and crucible shafts of different sizes when in use. The motor 4 drives the screw shaft 9 to rotate to drive the calibration box 3 to move in the casing 1, so that the pot calibration unit in the calibration box 3 can always calibrate the middle position of the crucible when calibrating the crucible, so that the device can maintain a certain stability when calibrating crucibles of different sizes. When the ground is uneven, the square block 203 will always maintain a horizontal downward state under the traction of the weight of the balancing weight 201. When one side of the ground is lower, the square block 203 will rotate at the bottom end of the club 204 through the traction of the inclined gravity, and one end of the square block 203 will rotate out of the slot 206. When the square block 203 rotates out of the slot 206, the pressure gauge 207 will lose pressure, thereby detecting that the ground on the corresponding side is lower than the other sides, which plays a role in detecting whether the device itself is horizontal. The setting of the limit plate 205 is to play a role of limiting the rotation of the square block 203 when it rotates out of the slot 206, which is convenient for subsequent resetting and prevents the subsequent resetting from affecting the resetting effect due to the uncertain rotation position of the square block 203. When the moment block 203 is rotated out of the slot body 206, the pressure measuring shaft 209 placed in one end of the slot body 206 will lose its limiting extrusion, and will slide out of the pressure measuring shaft 209 under the action of the elastic force of the pressure measuring spring 208. At this time, the pressure measuring device 207 will detect that the pressure of the pressure measuring shaft 209 has changed, thereby determining that the device has tilted, and realizing the function of pressure measurement. It should be noted here that when the device is horizontal, one end of the moment block 203 should be attached to the bottom of one end of the slot body 206, and the pressure measuring shaft 209 is placed inside the slot body 206 under the action of the thrust of the moment block 203; When the guide rail 7 detects that the pressure measuring shaft 209 loses pressure, the guide rail 7 transmits the detected information to the controller 202 through information transmission, and then the controller 202 controls the corresponding telescopic adjuster 6 to operate, so that the telescopic adjuster 6 drives the pad 601 to perform telescopic adjustment. When the telescopic adjuster 6 drives the pad 601 to adjust to a horizontal position, the square block 203 will re-attach to the inner wall of the tank body 206 when the angle of the device is reset, and the guide rail 7 will re-detect that the pressure measuring shaft 209 is under pressure. When the pressure of the guide rail 7 detects a certain value, the controller 202 will control the telescopic adjuster 6 to stop operating. Through this detection and adjustment method, when the pressure values ​​detected by the four guide rails 7 are consistent, the horizontal adjustment of the device is completed, which plays a role in straightening the crucible shaft and the crucible. When the crucible shaft is inserted into the sleeve 8, the bottom end of the crucible shaft squeezes and pushes the retaining block 801 in the sleeve 8 to move backward. When moving backward, the retaining block 801 squeezes the reset spring 802 to slide on the sliding shaft 803. When the bottom end of the crucible shaft contacts the bottom of the sleeve 8, the multiple retaining blocks 801 push the crucible shaft under the elastic force of the reset spring 802, so that the crucible shaft is fixed between the multiple retaining blocks 801, thereby completing the placement of the crucible shaft and playing the role of calibrating the crucible shaft. By resetting and fixing the multiple retaining blocks 801, the device can be adapted to crucible shafts of different sizes. When the crucible enters the housing 1, the crucible is placed between the four crucible support racks 501. When the placement is completed, the crucible is calibrated by the pot calibration unit so that the center of the crucible is consistent with the center of the crucible axis, thereby calibrating the two. By setting the shape of the pot support rack 501, different crucibles can be placed on the pot support rack 501. By cooperating with the fixed axis assembly, the device can be adapted to crucible axes and crucibles of different sizes. When the crucible is calibrated, the screw shaft 9 is driven by the driving motor 4 to rotate, thereby moving the calibration box 3 downward in the casing 1. When the calibration box 3 moves downward, it pushes the top ends of the multiple pot-setting supports 501 to move, and the pot-setting supports 501 will squeeze the pressure spring 503 to move downward on the ring plate 504, and the bottom end of the pot-setting supports 501 will slide in the slot column 5, thereby driving the crucibles between the multiple slot columns 5 to move downward. Through the continuous downward movement of the crucible, the top end of the crucible shaft will be stuck into the inner wall of the crucible, so that the two are completely clamped, thereby completing the connection between the two, and playing the role of assembling and connecting the crucible shaft and the crucible; When the crucible is placed, the driving component drives the driving component to move, and the driving component drives the four gears 303 to rotate during the movement. When the four gears 303 rotate, the four screws 304 are driven to rotate, thereby driving the four shift blocks 305 to move in the four rectangular boxes 302. When the four rectangular boxes 302 move, they drive the four pot-pushing arms 701 to slide in the four guide rails 7, so that the four pot-pushing arms 701 are moved in a four-way pushing form. Since the four pot-pushing arms 701 operate synchronously, the crucible placed on the pot-placing support frame 501 is pushed to move. When the four pot-pushing arms 701 are completely attached to the crucible, at this time, the crucible is placed at the center position of the four pot-placing support frames 501, and the center of the crucible will be on the same horizontal line with the center of the crucible axis placed in the shaft sleeve 8. At this point, the calibration of the crucible axis and the crucible is completed. The crucible is calibrated by moving the four pot-pushing arms 701, so that the device can calibrate crucibles of different sizes. When the driving assembly is in operation, the driving assembly drives the gear ring 301 to rotate in the ring sleeve 308. When the gear ring 301 rotates, the four gears 303 are driven to rotate synchronously through the meshing of the teeth, so that the four pot pushing arms 701 can move synchronously in the guide rail 7, playing the role of synchronous driving. When the crucible needs to be calibrated, multiple electric sliders 307 move in the annular groove 306. When the multiple electric sliders 307 move, the connecting rod 309 drives the gear ring 301 to rotate, thereby driving the four pot-pushing arms 701 to move synchronously on the four guide rails 7, providing power for the synchronous movement of the four pot-pushing arms 701.

[0035] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A single crystal furnace crucible axis calibration device, characterized in that: The invention comprises a casing (1), wherein a pot-setting assembly is arranged inside the casing (1), and the pot-setting assembly is used to place a crucible; a shaft sleeve (8) is fixedly installed at a middle position of the inner wall at the bottom of the casing (1), and a shaft fixing assembly is arranged inside the shaft sleeve (8), and the shaft fixing assembly is used to place the crucible shaft; a bottom box (2) is fixedly installed at the bottom of the casing (1), and four groups of leveling units are symmetrically arranged inside the bottom box (2), and the leveling units include a square block (203), and the leveling units are used to drive the square block (203) to level the crucible shaft and the crucible; a plurality of motors (4) are fixedly installed at the bottom of the casing (1), and screw shafts (9) are fixedly installed at the output ends of the plurality of motors (4), and the outer walls of the plurality of screw shafts (9) are rotatably connected to a position calibration box (3); a pot calibration unit is symmetrically arranged inside the position calibration box (3), and the pot calibration unit includes a pot pushing arm (701), and the pot calibration unit is used to drive the pot pushing arm (701) to calibrate the crucible, and the pot calibration unit is arranged outside the shaft fixing assembly and the pot-setting assembly.

2. A single crystal furnace crucible axis calibration device according to claim 1, characterized in that: The leveling unit further comprises a ball rod (204), the ball rod (204) being fixedly mounted on the bottom of the housing (1), a square block (203) being rotatably connected to one end of the ball rod (204), a balancing weight (201) being fixedly mounted on the bottom end of the square block (203), a limit plate (205) being symmetrically fixedly mounted on the outer wall of the ball rod (204), the inner sides of the two limit plates (205) being slidably connected to the outer sides of the square block (203), a groove body (206) being fixedly mounted on the outer wall of the shaft sleeve (8), a pressure measuring device (207) being fixedly mounted on the top of the groove body (206), and the top of the square block (203) being able to fit with the bottom of the groove body (206).

3. A single crystal furnace crucible axis calibration device according to claim 2, characterized in that: The inner wall of the pressure measuring device (207) is slidably connected to a pressure measuring shaft (209), a pressure measuring spring (208) is fixedly installed between the top of the pressure measuring shaft (209) and the bottom of the pressure measuring device (207), the outer wall of the pressure measuring shaft (209) is slidably connected to the inner wall of the groove body (206), and the top of the square block (203) can push and press the bottom of the pressure measuring shaft (209).

4. The single crystal furnace crucible axis calibration device according to claim 3, characterized in that: A controller (202) is fixedly mounted on the top of the pressure gauge (207), and the controller (202) is fixedly mounted on the outer wall of the shaft sleeve (8). A telescopic adjuster (6) is fixedly mounted on the bottom of the housing (1), and a pad (601) is fixedly mounted on one end of the telescopic adjuster (6).

5. The single crystal furnace crucible axis calibration device according to claim 1, characterized in that: The fixed shaft assembly comprises a retaining block (801), the retaining blocks (801) are in plurality, a plurality of sliding shafts (803) are fixedly mounted on the inner wall of the shaft sleeve (8), the inner walls of the plurality of retaining blocks (801) are respectively slidably connected to the outer walls of the plurality of sliding shafts (803), a return spring (802) is arranged between the outer walls of the plurality of retaining blocks (801) and the inner wall of the shaft sleeve (8), and the plurality of return springs (802) are respectively arranged outside the plurality of sliding shafts (803).

6. The single crystal furnace crucible axis calibration device according to claim 1, characterized in that: The pot-setting assembly comprises a groove column (5), wherein the number of the groove columns (5) is four, the four groove columns (5) are symmetrically fixedly mounted on the inner wall of the casing (1), a ring plate (504) is fixedly mounted on the top of the four groove columns (5), the inner walls of the four groove columns (5) are all slidably connected to a pot-setting support frame (501), the four pot-setting support frames (501) are all slidably connected to the inner wall of the ring plate (504), the center position of the four pot-setting support frames (501) and the center position of the shaft sleeve (8) are placed on the same horizontal line, and the tops of the four pot-setting support frames (501) are all in the shape of a support seat.

7. The single crystal furnace crucible axis calibration device according to claim 6, characterized in that: The top and bottom of the four pot-supporting frames (501) are fixedly mounted with shafts (502); the outer walls of the four shafts (502) are slidably connected to the inner wall of the ring plate (504); pressure springs (503) are arranged between the top and bottom of the four pot-supporting frames (501) and the top of the ring plate (504); the four pressure springs (503) are respectively arranged outside the four shafts (502); and the tops of the four pot-supporting frames (501) are able to fit with the bottom of the calibration box (3).

8. The single crystal furnace crucible axis calibration device according to claim 1, characterized in that: The pot calibration unit further comprises a driving assembly and a driving assembly, the number of the pot pushing arms (701) is four, the top of the calibration box (3) is symmetrically fixedly mounted with four guide rails (7), the outer walls of the four pot pushing arms (701) are all slidably connected to the inner walls of the four guide rails (7), the inner wall of the calibration box (3) is symmetrically fixedly mounted with four rectangular boxes (302), the inner walls of the four rectangular boxes (302) are all rotatably connected with screw rods (304), and the outer walls of the four screw rods (304) are all screw rods. The groove is connected with a displacement block (305), the top ends of the four displacement blocks (305) respectively penetrate the inner walls of the four guide rails (7) and are fixedly connected to the bottoms of the four pot-pushing arms (701), the top ends of the four displacement blocks (305) are slidably connected to the inner walls of the calibration box (3) and the guide rails (7), the outer walls of the four displacement blocks (305) are slidably connected to the inner walls of the four rectangular boxes (302), and one end of the four screw rods (304) is fixedly mounted with a gear (303).

9. The single crystal furnace crucible axis calibration device according to claim 8, characterized in that: The co-drive assembly comprises a ring sleeve (308), the ring sleeve (308) is fixedly mounted on the inner wall of the alignment box (3), the inner wall of the alignment box (3) is slidably connected with a gear ring (301), the four gears (303) are all rotatably connected to the inner wall of the alignment box (3), and the teeth on the gear ring (301) can respectively mesh with the teeth on the four gears (303).

10. The single crystal furnace crucible axis calibration device according to claim 9, characterized in that: The driving assembly comprises an annular groove (306), the annular groove (306) is fixedly mounted on the bottom of the inner wall of the calibration box (3), a plurality of electric sliders (307) are slidably mounted on the inner wall of the annular groove (306), a plurality of connecting rods (309) are fixedly mounted on the bottom of the gear ring (301), and the bottom ends of the plurality of connecting rods (309) are respectively fixedly connected to the tops of the plurality of electric sliders (307).

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