A single crystal furnace crucible shaft calibration device

Abstract

The application belongs to the technical field of single crystal furnaces, in particular to a single crystal furnace crucible shaft calibration device, which comprises a machine shell, a pot placing assembly is arranged in the machine shell, the pot placing assembly is used for placing a crucible, a shaft sleeve is fixedly installed at the middle position of the bottom inner wall of the machine shell, a shaft fixing assembly is arranged in the shaft sleeve, the shaft fixing assembly is used for placing a crucible shaft, and a bottom box is fixedly installed at the bottom of the machine shell; through the traction of inclined gravity, the cuboid block will rotate at the bottom end of the ball rod, one end of the cuboid block will be turned out of the groove body, the pressure detector will lose pressure, so that it is detected that the corresponding side ground is lower than the other sides, then the controller controls the corresponding telescopic adjuster to work, when the telescopic adjuster is adjusted to the horizontal position, the cuboid block will be reattached to the inner wall of the groove body, the pressure detector will detect that the pressure shaft is subjected to pressure again, through this detection and adjustment mode, when the pressure values detected by the four pressure detectors are consistent, the horizontal adjustment of the device is completed.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of single crystal furnace, in particular to a single crystal furnace crucible shaft calibration device. BACKGROUND

[0002] The single crystal furnace crucible shaft is a moving rod for supporting the crucible and the semiconductor material melt in the crucible to realize crystal growth. The rotation center of the crucible shaft has an important influence on the quality of the crystal. If the rotation center is not well centered, it may cause the crystal bar to be tilted, deformed or misaligned. In addition, the crucible shaft also has a cooling passage for cooling and heat exchange.

[0003] In the prior art, when calibrating the level of the crucible shaft, a long level is usually placed at the top end of the crucible shaft, and the position of the fixing foot of the crucible shaft is adjusted by observing the level reading and analyzing and judging the position of the fixing foot of the crucible shaft through rotation of the crucible shaft. For the centering calibration of the crucible shaft, a dial gauge is fixed at the top end of the crucible shaft, and the head of the dial gauge is in contact with the recess at the center hole of the furnace bottom, so as to adjust the centering of the crucible shaft. When adjusting the level and centering of the crucible shaft separately, the accuracy of one project will be affected when adjusting the other project, resulting in that the adjustment accuracy cannot meet the requirements, and the calibration consumes too much time.

[0004] Therefore, the application provides a single crystal furnace crucible shaft calibration device. SUMMARY

[0005] In order to make up for the deficiencies of the prior art and solve at least one technical problem proposed in the background art.

[0006] The technical scheme adopted by the application to solve the technical problem is: the single crystal furnace crucible shaft calibration device comprises a machine shell, a pot placing assembly is arranged in the machine shell, the pot placing assembly is used for placing a crucible, a shaft sleeve is fixedly installed at the middle position of the inner wall of the bottom of the machine shell, a shaft fixing assembly is arranged in the shaft sleeve, the shaft fixing assembly is used for placing a crucible shaft, a bottom box is fixedly installed at the bottom of the machine shell, four groups of leveling units are symmetrically arranged in the bottom box, the leveling unit comprises a square block, the leveling unit is used for driving the square block to level the position of the crucible shaft and the crucible, a plurality of motors are fixedly installed at the bottom of the machine shell, a screw shaft is fixedly installed at the output end of each motor, a position calibration box is rotatably connected to the outer wall of the plurality of screw shafts, a pot calibration unit is symmetrically arranged in the position calibration box, the pot calibration unit comprises a pot pushing arm, the pot calibration unit is used for driving the pot pushing arm to calibrate the position of the crucible, and the pot calibration unit is arranged outside the shaft fixing assembly and the pot placing assembly.

[0007] Before calibration, the device is leveled by driving four sets of leveling units. This ensures that the crucible and crucible shaft remain vertical during calibration, preventing tilting. It also eliminates the need for manual observation of the spirit level reading and analysis of the crucible shaft's fixing feet, ensuring the crucible and shaft are level before calibration. The crucible shaft is then placed into the housing through the opening at the top of the device. During placement, the crucible shaft... The bottom end of the crucible shaft is inserted into the bushing. Once the bottom end of the crucible shaft is fully inserted into the bushing, the shaft fixing assembly inside the bushing secures the crucible shaft, thus completing the placement of the crucible shaft. Then, following this method, the crucible is placed onto the pot-placement assembly from the opening at the top of the housing. When both are in place, the pot-placement unit inside the alignment box is activated to push and align the crucible placed on the pot-placement assembly, centering it on the assembly. Once the crucible alignment is complete, the crucible shaft and the crucible will be on the same horizontal line. This device can calibrate the crucible shaft and the crucible. Then, the motor drives the screw shaft to rotate, which in turn moves the alignment box downwards. This downward movement of the alignment box moves the pot-holding assembly, thus moving the crucible downwards. By moving the crucible downwards, the crucible shaft can be engaged into the crucible, completing the connection and forming a complete working unit. This method of connecting the crucible shaft and the crucible solves the problems of existing technologies where adjusting the crucible shaft horizontally and center separately affects the accuracy of the other, leading to insufficient adjustment accuracy and excessive calibration time. The design of the shaft fixing assembly and pot-holding assembly allows the device to be used with crucibles and crucible shafts of different sizes. The motor-driven screw shaft rotation moves the alignment box within the housing, ensuring that the calibration unit inside the alignment box always calibrates the center position of the crucible, maintaining stability when calibrating crucibles of different sizes.

[0008] Preferably, the leveling unit further includes a ball rod, which is fixedly installed at the bottom of the housing. A rectangular block is rotatably connected to one end of the ball rod. A counterweight is fixedly installed at the bottom of the rectangular block. Limiting plates are symmetrically fixedly installed on the outer wall of the ball rod. The inner sides of the two limiting plates are slidably connected to the outer side of the rectangular block. A groove is fixedly installed on the outer wall of the bushing. A pressure gauge is fixedly installed on the top of the groove. The top of the rectangular block can fit against the bottom of the groove. When the ground is uneven, the rectangular block will always remain in a horizontal downward state under the weight traction of the counterweight. When one side of the ground is lower, the rectangular block will rotate at the bottom of the ball rod due to the traction of gravity. One end of the rectangular block will then rotate out of the groove. When the rectangular block rotates out of the groove, the pressure sensor will lose pressure, thus detecting that the corresponding side of the ground is lower than the other sides. This serves to detect whether the device itself is level. The limit plate is set to limit the rotation of the rectangular block when it rotates out of the groove, which facilitates subsequent reset and prevents the reset effect from being affected by the uncertain position of the rectangular block during subsequent reset.

[0009] Preferably, a pressure measuring shaft is slidably connected to the inner wall of the pressure measuring device, and a pressure measuring spring is fixedly installed between the top of the pressure measuring shaft and the bottom of the pressure measuring device. The outer wall of the pressure measuring shaft is slidably connected to the inner wall of the tank. The top of the rectangular block can push against the bottom of the pressure measuring shaft. When the rectangular block rotates out of the tank, the pressure measuring shaft placed at one end of the tank will lose its limiting compression and will slide out of the pressure measuring shaft under the action of the elastic force of the pressure measuring spring. At this time, the pressure measuring device will detect the change in the pressure condition of the pressure measuring shaft, thereby determining that the device has tilted and realizing the function of pressure measurement judgment. It should be noted that when the device is in a horizontal state, one end of the rectangular block should be attached to the bottom of one end of the tank, and the pressure measuring shaft is placed inside the tank under the action of the pushing force of the rectangular block.

[0010] Preferably, a controller is fixedly installed on the top of the pressure sensor, and the controller is fixedly installed on the outer wall of the bushing. A telescopic adjuster is fixedly installed on the bottom of the housing, and a pad is fixedly installed on one end of the telescopic adjuster. When the guide rail detects that the pressure measuring shaft is under pressure, the guide rail transmits the detected information to the controller through information transmission. Subsequently, the controller controls the corresponding telescopic adjuster to operate, thereby causing the telescopic adjuster to move the pad to extend and retract. When the telescopic adjuster moves the pad to a horizontal position, the rectangular block will re-adhere to the inner wall of the tank when the angle of the device is reset, and the pressure sensor will detect pressure on the pressure measuring shaft again. When the pressure sensor detects a certain pressure value, the controller will control the telescopic adjuster to stop operating. Through this detection and adjustment method, when the pressure values ​​detected by the four pressure sensors are all consistent, the horizontal adjustment of the device is completed, which serves to straighten the crucible shaft and the crucible.

[0011] Preferably, the shaft fixing assembly includes multiple fixing blocks. Multiple sliding shafts are fixedly installed on the inner wall of the bushing. The inner walls of the multiple fixing blocks are slidably connected to the outer walls of the multiple sliding shafts. Return springs are provided between the outer walls of the multiple fixing blocks and the inner wall of the bushing. These return springs are positioned outside the multiple sliding shafts. When the crucible shaft is inserted into the bushing, the bottom end of the crucible shaft pushes the fixing blocks within the bushing backward. As the fixing blocks move backward, they compress the return springs, causing them to slide on the sliding shafts. When the bottom end of the crucible shaft contacts the bottom of the bushing, the multiple fixing blocks, under the elastic force of the return springs, push the crucible shaft, thereby fixing it between the multiple fixing blocks. This completes the placement of the crucible shaft and serves to align it. By fixing it with multiple fixing blocks, the device can be adapted to crucible shafts of different sizes.

[0012] Preferably, the pot placement assembly includes four slotted columns, which are symmetrically fixed to the inner wall of the housing. A ring plate is fixedly installed on the top of each of the four slotted columns. Pot placement supports are slidably connected to the inner walls of the four slotted columns and to the inner walls of the ring plates. The center of each of the four pot placement supports is aligned with the center of the bushing. The tops of the four pot placement supports are shaped like support seats. When the crucible enters the housing, it is placed between the four pot placement supports. After placement, the pot is aligned by a pot alignment unit to ensure the center of the crucible aligns with the center of the crucible shaft, thus calibrating both. The shape of the pot placement supports allows for the placement of different crucibles. Through its interaction with the shaft fixing assembly, the device can be adapted to crucible shafts and crucibles of different sizes.

[0013] Preferably, each of the four pot support brackets has a fixed shaft installed at its top and bottom. The outer walls of the four shafts are slidably connected to the inner wall of the ring plate. A pressure spring is provided between the top and bottom of each of the four pot support brackets and the top of the ring plate. The four pressure springs are respectively placed outside the four shafts. The tops of the four pot support brackets can fit against the bottom of the calibration box. When the crucible calibration is completed, the drive motor drives the screw shaft to rotate, thereby moving the calibration box downwards inside the machine housing. When the calibration box moves downwards, it pushes the tops of the multiple pot support brackets to move. The pot support brackets will then squeeze the pressure springs on the ring plate and move downwards. The bottom of the pot support brackets will slide in the slot column, thereby driving the crucible between the multiple slot columns to move downwards. Through the continuous downward movement of the crucible, the top of the crucible shaft will be engaged with the inner wall of the crucible, thus completing the connection between the two and playing the role of assembling and connecting the crucible shaft and the crucible.

[0014] Preferably, the calibration unit further includes a co-drive assembly and a driving assembly. There are four pusher arms. Four guide rails are symmetrically fixedly installed on the top of the calibration box. The outer walls of the four pusher arms are slidably connected to the inner walls of the four guide rails. Four rectangular boxes are symmetrically fixedly installed on the inner wall of the calibration box. Screws are rotatably connected to the inner walls of the four rectangular boxes. Displacement blocks are threadedly connected to the outer walls of the four screws. The tops of the four displacement blocks penetrate the inner walls of the four guide rails and are fixedly connected to the bottoms of the four pusher arms. The tops of the four displacement blocks are slidably connected to the inner walls of the calibration box and the guide rails. The outer walls of the four displacement blocks are slidably connected to the inner walls of the four rectangular boxes. Gears are fixedly installed at one end of each of the four screws. When the crucible is placed, the driving assembly drives the co-drive assembly to move. When the component moves, it drives four gears to rotate. The rotation of the four gears drives four screws to rotate, which in turn moves four displacement blocks within four rectangular boxes. As the four rectangular boxes move, they drive four pusher arms to slide within four guide rails, thus causing the four pusher arms to move in a four-way pushing motion. Since the four pusher arms operate synchronously, they push the crucible placed on the crucible support to move. When all four pusher arms are fully in contact with the crucible, the crucible is positioned at the center of the four crucible support frames. The center of the crucible is then aligned with the center of the crucible shaft placed within the bushing. This completes the calibration of the crucible shaft and the crucible. By calibrating the crucible through the movement of the four pusher arms, this device can calibrate crucibles of different sizes.

[0015] Preferably, the co-drive assembly includes a ring sleeve, which is fixedly installed on the inner wall of the calibration box. A gear ring is slidably connected to the inner wall of the calibration box, and four gears are rotatably connected to the inner wall of the calibration box. The teeth on the gear ring can mesh with the teeth on the four gears respectively. When the drive assembly is in operation, the drive assembly drives the gear ring to rotate inside the ring sleeve. When the gear ring rotates, it drives the four gears to rotate synchronously through the meshing of the teeth, thereby realizing the synchronous movement of the four pusher arms in the guide rail, which plays the role of synchronous drive.

[0016] Preferably, the driving assembly includes an annular groove, which is fixedly installed on the bottom of the inner wall of the calibration box. Multiple electric sliders slide on the inner wall of the annular groove, and multiple connecting rods are fixedly installed on the bottom of the toothed ring. The bottom ends of the multiple connecting rods are respectively fixedly connected to the tops of the multiple electric sliders. When the crucible needs to be calibrated, the multiple electric sliders move in the annular groove. When the multiple electric sliders move, they drive the toothed ring to rotate through the connecting rods, thereby driving the four pusher arms to move synchronously on the four guide rails, providing power for the synchronous movement of the four pusher arms.

[0017] The beneficial effects of this invention are as follows:

[0018] 1. The single crystal furnace crucible shaft calibration device of the present invention uses a rectangular block that is always kept horizontally downward under the weight of a counterweight. When one side of the ground is lower, the rectangular block rotates at the bottom of the ball rod due to the traction of gravity, and one end of the rectangular block rotates out of the tank. When the rectangular block rotates out of the tank, the pressure sensor loses pressure, thus detecting that the ground on the corresponding side is lower than the other sides. Subsequently, the controller controls the corresponding telescopic adjuster to operate. When the telescopic adjuster moves the pad to a horizontal position, the rectangular block will re-fit against the inner wall of the tank, and the pressure sensor will detect pressure on the pressure measuring shaft again. Through this detection and adjustment method, when the pressure values ​​detected by the four pressure sensors are consistent, the horizontal adjustment of the device is completed, which plays a role in straightening the crucible shaft and the crucible.

[0019] 2. The single crystal furnace crucible shaft calibration device of the present invention drives a gear ring to rotate within a sleeve via a drive assembly. When the gear ring rotates, it drives four gears to rotate synchronously through tooth meshing. The rotation of the four gears drives four screws to rotate, thereby driving four displacement blocks to move within four rectangular boxes. When the four rectangular boxes move, they drive four pusher arms to slide within four guide rails, thus causing the four pusher arms to move in a four-way pushing manner. Since the four pusher arms operate synchronously, they push the crucible placed on the crucible support to move. When all four pusher arms are fully in contact with the crucible, the crucible is placed at the center of the four crucible support, and the center of the crucible will be on the same horizontal line as the center of the crucible shaft placed within the sleeve, thus completing the calibration of the crucible shaft and the crucible. By moving the four pusher arms to calibrate the crucible, this device can calibrate crucibles of different sizes.

[0020] 3. The single crystal furnace crucible shaft calibration device of the present invention uses the bottom end of the crucible shaft to push the retaining block inside the bushing to move backward. When the retaining block moves backward, it pushes the reset spring to slide on the sliding shaft. When the bottom end of the crucible shaft contacts the bottom of the bushing, multiple retaining blocks push the crucible shaft under the elastic force of the reset spring, thereby fixing the crucible shaft between multiple retaining blocks, thus completing the placement of the crucible shaft and playing the role of calibrating the crucible shaft. By fixing it by resetting multiple retaining blocks, this device can be adapted to crucible shafts of different sizes.

[0021] 4. The single crystal furnace crucible shaft calibration device of the present invention uses a drive motor to rotate a screw shaft, thereby moving the calibration box downward within the machine housing. When the calibration box moves downward, it pushes the tops of multiple crucible support frames to move, which in turn compresses the bearing springs on the ring plate and moves downward. The bottom end of the crucible support frame slides within the slot column, thereby causing the crucibles between the multiple slot columns to move downward. Through the continuous downward movement of the crucibles, the top end of the crucible shaft will engage with the inner wall of the crucible, thus completing the connection between the two and serving the purpose of assembling and connecting the crucible shaft and the crucible. Attached Figure Description

[0022] The invention will now be further described with reference to the accompanying drawings.

[0023] Figure 1 This is a main body diagram of the present invention;

[0024] Figure 2 This is an overall diagram of the invention;

[0025] Figure 3 This is a schematic diagram of the structure at the screw shaft in this invention;

[0026] Figure 4 This is a schematic diagram of the structure of the counterweight in this invention;

[0027] Figure 5 This is a schematic diagram of the structure of the cue in this invention;

[0028] Figure 6 This is a schematic diagram of the structure of the tank in this invention;

[0029] Figure 7 This is a schematic diagram of the structure at the retaining block in this invention;

[0030] Figure 8 This is a schematic diagram of the structure of the pot support frame in this invention;

[0031] Figure 9 This is a schematic diagram of the structure of the pusher arm in this invention;

[0032] Figure 10 This is a schematic diagram of the toothed ring structure in this invention;

[0033] Figure 11 This is a schematic diagram of the structure of the annular groove in this invention.

[0034] In the diagram: 1. Housing; 2. Base box; 201. Counterweight; 202. Controller; 203. Rectangular block; 204. Ball rod; 205. Limiting plate; 206. Tank; 207. Pressure sensor; 208. Pressure measuring spring; 209. Pressure measuring shaft; 3. Calibration box; 301. Gear ring; 302. Rectangular box; 303. Gear; 304. Screw; 305. Shifting block; 306. 307. Circular groove; 308. Electric slider; 309. Ring sleeve; 3000. Connecting rod; 4. Motor; 5. Groove column; 501. Pot support frame; 502. Shaft; 503. Pressure spring; 504. Ring plate; 6. Telescopic adjuster; 601. Pad plate; 7. Guide rail; 701. Pot pusher arm; 8. Bushing; 801. Retaining block; 802. Return spring; 803. Sliding shaft; 9. Screw shaft. Detailed Implementation

[0035] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0036] like Figures 1 to 11 As shown in the embodiment of the present invention, a single crystal furnace crucible shaft calibration device includes a housing 1. A crucible placement assembly is provided inside the housing 1 for placing the crucible. A bushing 8 is fixedly installed at the middle position of the bottom inner wall of the housing 1. A shaft fixing assembly is provided inside the bushing 8 for placing the crucible shaft. A bottom box 2 is fixedly installed at the bottom of the housing 1. Four sets of leveling units are symmetrically arranged inside the bottom box 2. The leveling unit includes a rectangular block 203. The leveling unit is used to drive the rectangular block 203 to level the position of the crucible shaft and the crucible. Multiple motors 4 are fixedly installed at the bottom of the housing 1. Each output end of the multiple motors 4 is fixedly installed with a screw shaft 9. The outer wall of the multiple screw shafts 9 is rotatably connected to a calibration box 3. A crucible calibration unit is symmetrically arranged inside the calibration box 3. The crucible calibration unit includes a pusher arm 701. The crucible calibration unit is used to drive the pusher arm 701 to calibrate the position of the crucible. The crucible calibration unit is located outside the shaft fixing assembly and the crucible placement assembly.

[0037] The horizontal and centered adjustments of the crucible shaft are made separately. Adjusting one item will affect the accuracy of the other item, resulting in the adjustment accuracy not meeting the requirements and the calibration taking too long.

[0038] Since the flatness of most ground surfaces is inconsistent, the device is leveled before calibration by driving four sets of leveling units. This ensures that the crucible and crucible shaft remain vertical during calibration, preventing tilting. It also eliminates the need for manual observation of the spirit level reading and analysis of the crucible shaft's fixing angle, ensuring the crucible and shaft are level before calibration. The crucible shaft is then placed into the housing 1 through the opening at the top of the device, with the bottom end inserted into the bushing 8. When the bottom end of the crucible shaft is fully inserted into the bushing 8, the shaft fixing assembly inside the bushing 8 secures the crucible shaft, thus completing the placement of the crucible shaft. Then, following this method, the crucible is placed onto the pot-placement assembly from the opening at the top of the housing 1. Once both are in place, the pot-placement unit in the alignment box 3 is activated to push and align the crucible placed on the pot-placement assembly, centering it at the center of the assembly. When the crucible alignment is complete, the crucible shaft and the crucible will be on the same horizontal line, thus completing the calibration between the crucible shaft and the crucible. Then, the motor 4 is activated to drive the screw shaft 9 to rotate. When rotated, the alignment box 3 moves downwards, causing the pot-holding assembly to move, which in turn moves the crucible downwards. By moving the crucible downwards, the crucible shaft can be engaged and inserted into the crucible, thus completing the connection between the two and forming a complete working component. This method of connecting the crucible shaft and the crucible solves the problem in existing technologies where the horizontal and centering adjustments of the crucible shaft are performed separately, affecting the accuracy of one adjustment and resulting in insufficient adjustment accuracy and excessive calibration time. Through the setting of the shaft fixing assembly and the pot-holding assembly, this device achieves [the following benefits]. This device is applicable to crucibles and crucible shafts of different sizes. The motor 4 drives the screw shaft 9 to rotate, thereby driving the alignment box 3 to move within the housing 1. This ensures that the alignment unit inside the alignment box 3 always aligns the crucible to its center position when aligning it, thus maintaining a certain level of stability when aligning crucibles of different sizes. It should be noted that the centers of the fixed shaft assembly and the placement assembly are on the same horizontal line. The outer wall of the housing 1 has multiple glass viewing openings for easy observation of the operation inside the housing 1. Since this is prior art, it is not shown in this technical solution.

[0039] like Figures 3 to 6 As shown, the leveling unit also includes a ball rod 204, which is fixedly installed at the bottom of the housing 1. A rectangular block 203 is rotatably connected to one end of the ball rod 204. A counterweight 201 is fixedly installed at the bottom of the rectangular block 203. Limiting plates 205 are symmetrically fixedly installed on the outer wall of the ball rod 204. The inner sides of the two limiting plates 205 are slidably connected to the outer side of the rectangular block 203. A groove 206 is fixedly installed on the outer wall of the bushing 8. A pressure gauge 207 is fixedly installed on the top of the groove 206. The top of the rectangular block 203 can fit against the bottom of the groove 206.

[0040] When the ground is uneven, the rectangular block 203 will always remain horizontal and downward under the weight of the counterweight 201. When one side of the ground is lower, the rectangular block 203 will rotate at the bottom of the cue stick 204 due to the traction of the tilting gravity, and one end of the rectangular block 203 will rotate out of the groove 206. When the rectangular block 203 rotates out of the groove 206, the pressure sensor 207 will lose pressure, thereby detecting that the ground on the corresponding side is lower than the other sides, which serves to detect whether the device itself is horizontal. The limit plate 205 is set to limit the rotation of the rectangular block 203 when it rotates out of the groove 206, which facilitates subsequent reset and prevents the reset effect from being affected by the uncertain rotation position of the rectangular block 203 during subsequent reset.

[0041] like Figures 5 to 6 As shown, a pressure measuring shaft 209 is slidably connected to the inner wall of the pressure measuring device 207. A pressure measuring spring 208 is fixedly installed between the top of the pressure measuring shaft 209 and the bottom of the pressure measuring device 207. The outer wall of the pressure measuring shaft 209 is slidably connected to the inner wall of the groove 206. The top of the rectangular block 203 can push against the bottom of the pressure measuring shaft 209.

[0042] Since both the rectangular block 203 and the counterweight 201 have a certain mass, when the rectangular block 203 rotates out of the groove 206, the pressure measuring shaft 209 placed at one end of the groove 206 will lose its limiting compression. Under the action of the elastic force of the pressure measuring spring 208, it will slide out of the pressure measuring shaft 209. At this time, the pressure measuring device 207 will detect the change in the pressure condition of the pressure measuring shaft 209, thereby determining that the device has tilted and realizing the function of pressure measurement. It should be noted that when the device is in a horizontal state, one end of the rectangular block 203 should be attached to the bottom of one end of the groove 206, and the pressure measuring shaft 209 is placed inside the groove 206 under the action of the thrust of the rectangular block 203.

[0043] like Figures 4 to 5 As shown, a controller 202 is fixedly installed on the top of the pressure sensor 207. The controller 202 is fixedly installed on the outer wall of the bushing 8. A telescopic adjuster 6 is fixedly installed on the bottom of the housing 1. A pad 601 is fixedly installed on one end of the telescopic adjuster 6.

[0044] When the guide rail 7 detects that the pressure measuring shaft 209 is depressurized, the pressure sensor 207 transmits the detected information to the controller 202 via information transmission. Subsequently, the controller 202 controls the corresponding telescopic adjuster 6 to operate, thereby causing the telescopic adjuster 6 to drive the pad 601 to telescopically adjust. When the telescopic adjuster 6 drives the pad 601 to adjust to the horizontal position, the rectangular block 203 will re-fit against the inner wall of the tank 206 when the angle of the device is reset. The pressure sensor 207 will then detect that the pressure measuring shaft 209 is under pressure again. When the pressure detected by the guide rail 7 reaches a certain value, the controller 202 will control the telescopic adjuster 6 to stop operating. Through this detection and adjustment method, when the pressure values ​​detected by the four pressure sensors 207 are all consistent, the horizontal adjustment of the device is completed, which serves to straighten the crucible shaft and the crucible.

[0045] like Figures 3 to 7 As shown, the fixed shaft assembly includes a retaining block 801, and there are multiple retaining blocks 801. Multiple sliding shafts 803 are fixedly installed on the inner wall of the bushing 8. The inner walls of the multiple retaining blocks 801 are slidably connected to the outer walls of the multiple sliding shafts 803 respectively. A return spring 802 is provided between the outer walls of the multiple retaining blocks 801 and the inner wall of the bushing 8. The multiple return springs 802 are respectively placed outside the multiple sliding shafts 803.

[0046] When the crucible shaft is inserted into the bushing 8, the bottom end of the crucible shaft pushes the retaining block 801 inside the bushing 8 to move backward. When the retaining block 801 moves backward, it presses the reset spring 802 to slide on the sliding shaft 803. When the bottom end of the crucible shaft contacts the bottom of the bushing 8, the multiple retaining blocks 801 push the crucible shaft under the elastic force of the reset spring 802, thereby fixing the crucible shaft between the multiple retaining blocks 801, thus completing the placement of the crucible shaft and playing the role of aligning the crucible shaft. By resetting and fixing it with multiple retaining blocks 801, this device can be adapted to crucible shafts of different sizes.

[0047] like Figures 3 to 8 As shown, the pot placement assembly includes four slot columns 5. The four slot columns 5 are symmetrically fixedly installed on the inner wall of the housing 1. A ring plate 504 is fixedly installed on the top of the four slot columns 5. Pot placement supports 501 are slidably connected to the inner walls of the four slot columns 5. The four pot placement supports 501 are slidably connected to the inner walls of the ring plate 504. The center position of the four pot placement supports 501 is on the same horizontal line as the center position of the bushing 8. The top of the four pot placement supports 501 is in the shape of a support seat.

[0048] When the crucible enters the housing 1, it is placed between the four crucible support frames 501. After placement, the crucible is aligned by the crucible alignment unit to ensure that the center of the crucible is consistent with the center of the crucible shaft. The shape of the crucible support frame 501 allows different crucibles to be placed on it. Through its cooperation with the shaft fixing assembly, the device can be adapted to crucible shafts and crucibles of different sizes.

[0049] like Figures 7 to 8 As shown, shafts 502 are fixedly installed at the top and bottom of the four pot support frames 501. The outer walls of the four shafts 502 are slidably connected to the inner wall of the ring plate 504. A pressure spring 503 is provided between the top and bottom of the four pot support frames 501 and the top of the ring plate 504. The four pressure springs 503 are respectively placed outside the four shafts 502. The top of the four pot support frames 501 can fit against the bottom of the positioning box 3.

[0050] When the crucible alignment is completed, the drive motor 4 drives the screw shaft 9 to rotate, thereby moving the alignment box 3 downward within the housing 1. As the alignment box 3 moves downward, it pushes the tops of multiple pot support frames 501 to move. The pot support frames 501 then compress the bearing spring 503 and move downward on the ring plate 504. The bottom end of the pot support frame 501 slides within the slot column 5, thereby causing the crucibles between the multiple slot columns 5 to move downward. Through the continuous downward movement of the crucibles, the top end of the crucible shaft will engage with the inner wall of the crucible, thus completing the connection between the two and serving the purpose of assembling and connecting the crucible shaft and the crucible. It should be noted that since the dimensions of the crucible shaft and the crucible are different, the downward movement distance of the pot support frame 501 and the engagement distance of the crucible shaft within the crucible need to be calculated by the system.

[0051] like Figures 9 to 11 As shown, the pot calibration unit also includes a co-drive assembly and a drive assembly. There are four pot pushing arms 701. Four guide rails 7 are symmetrically fixedly installed on the top of the calibration box 3. The outer walls of the four pot pushing arms 701 are slidably connected to the inner walls of the four guide rails 7. Four rectangular boxes 302 are symmetrically fixedly installed on the inner walls of the calibration box 3. Screws 304 are rotatably connected to the inner walls of the four rectangular boxes 302. Shifting blocks 305 are threadedly connected to the outer walls of the four screws 304. The tops of the four shifting blocks 305 pass through the inner walls of the four guide rails 7 and are fixedly connected to the bottoms of the four pot pushing arms 701. The tops of the four shifting blocks 305 are slidably connected to the inner walls of the calibration box 3 and the guide rails 7. The outer walls of the four shifting blocks 305 are slidably connected to the inner walls of the four rectangular boxes 302. Gears 303 are fixedly installed on one end of each of the four screws 304.

[0052] When the crucible is placed, the drive assembly drives the co-drive assembly to move. When the co-drive assembly moves, it drives the four gears 303 to rotate. When the four gears 303 rotate, they drive the four screws 304 to rotate, thereby driving the four shifting blocks 305 to move within the four rectangular boxes 302. When the four rectangular boxes 302 move, they drive the four pusher arms 701 to slide within the four guide rails 7, thereby causing the four pusher arms 701 to move in a four-way pushing manner. Since the four pusher arms 701 operate synchronously, they push the crucible placed on the crucible support 501 to move. When all four pusher arms 701 are fully in contact with the crucible, the crucible is placed at the center of the four crucible support 501. The center of the crucible will then be on the same horizontal line as the center of the crucible shaft placed in the bushing 8. Thus, the calibration of the crucible shaft and the crucible is completed. By moving the four pusher arms 701 to calibrate the crucible, this device can calibrate crucibles of different sizes.

[0053] like Figures 10 to 11 As shown, the co-drive assembly includes a ring sleeve 308, which is fixedly installed on the inner wall of the calibration box 3. A toothed ring 301 is slidably connected to the inner wall of the calibration box 3. Four gears 303 are rotatably connected to the inner wall of the calibration box 3. The teeth on the toothed ring 301 can mesh with the teeth on the four gears 303 respectively.

[0054] When the drive assembly is in operation, the drive assembly drives the gear ring 301 to rotate within the ring sleeve 308. When the gear ring 301 rotates, it drives the four gears 303 to rotate synchronously through tooth meshing, thereby realizing the synchronous movement of the four pusher arms 701 within the guide rail 7, which plays the role of synchronous drive.

[0055] like Figures 10 to 11 As shown, the drive assembly includes an annular groove 306, which is fixedly installed on the bottom of the inner wall of the positioning box 3. Multiple electric sliders 307 slide on the inner wall of the annular groove 306. Multiple connecting rods 309 are fixedly installed on the bottom of the toothed ring 301, and the bottom ends of the multiple connecting rods 309 are respectively fixedly connected to the top of the multiple electric sliders 307.

[0056] When the crucible needs to be aligned, multiple electric sliders 307 move within the annular groove 306. As the multiple electric sliders 307 move, they drive the toothed ring 301 to rotate via the connecting rod 309, thereby driving the four pusher arms 701 to move synchronously on the four guide rails 7, providing power for the synchronous movement of the four pusher arms 701.

[0057] Working Principle: Before calibration, the device is leveled by driving four sets of leveling units, ensuring that the crucible and crucible shaft remain vertical during calibration. This prevents tilting during calibration and eliminates the need for manual observation of the spirit level reading to determine the adjustment angle of the crucible shaft's fixing feet. The crucible shaft and crucible are then leveled before calibration. The crucible shaft is then placed into the housing 1 through the opening at the top of the device. During placement, the crucible shaft... The bottom end of the crucible shaft is inserted into the bushing 8. When the bottom end of the crucible shaft is fully inserted into the bushing 8, the shaft fixing assembly inside the bushing 8 fixes the crucible shaft, thus completing the placement of the crucible shaft. Then, following this method, the crucible is placed onto the pot placement assembly from the opening at the top of the housing 1. When both are in place, the pot alignment unit inside the alignment box 3 is activated to push and align the crucible placed on the pot placement assembly, so that the crucible is placed in the center of the pot placement assembly. When the crucible alignment is complete, the crucible shaft and the crucible will be on the same horizontal line. The calibration between the crucible shaft and the crucible can be completed. Then, the motor 4 is started to drive the screw shaft 9 to rotate. When the screw shaft 9 rotates, it drives the alignment box 3 to move downward. When the alignment box 3 moves downward, it drives the pot placement assembly to move, thereby driving the crucible to move downward. By driving the crucible downward, the crucible shaft can be snapped into the inside of the crucible, thus completing the connection between the two and forming a complete working part. By connecting the crucible shaft and the crucible in this way, the problem of separate adjustment of the horizontal and centering of the crucible shaft in the existing technology can be solved. The adjustment of one item will affect the accuracy of the other item, resulting in the adjustment accuracy not meeting the requirements and the calibration time being too long. With the setting of the shaft fixing assembly and the pot placement assembly, this device can be used for crucibles and crucible shafts of different sizes. The motor 4 drives the screw shaft 9 to rotate, thereby driving the alignment box 3 to move in the housing 1. This allows the pot calibration unit in the alignment box 3 to always calibrate the center position of the crucible when calibrating the crucible, so that this device can maintain a certain stability when calibrating crucibles of different sizes.

[0058] When the ground is uneven, the rectangular block 203 will always remain horizontal and downward under the weight of the counterweight 201. When one side of the ground is lower, the rectangular block 203 will rotate at the bottom of the ball rod 204 due to the traction of the tilting gravity. One end of the rectangular block 203 will then rotate out of the groove 206. When the rectangular block 203 rotates out of the groove 206, the pressure sensor 207 will lose pressure, thereby detecting that the ground on the corresponding side is lower than the other sides, which serves to detect whether the device itself is horizontal. The limit plate 205 is set to limit the rotation of the rectangular block 203 when it rotates out of the groove 206, which facilitates subsequent reset and prevents the reset effect from being affected by the uncertain rotation position of the rectangular block 203 during subsequent reset.

[0059] When the rectangular block 203 rotates out of the groove 206, the pressure measuring shaft 209 placed in one end of the groove 206 will lose its limiting compression. Under the action of the elastic force of the pressure measuring spring 208, it will slide out of the pressure measuring shaft 209. At this time, the pressure measuring device 207 will detect the change in the pressure condition of the pressure measuring shaft 209, thereby determining that the device has tilted and realizing the function of pressure measurement. It should be noted that when the device is in a horizontal state, one end of the rectangular block 203 should be attached to the bottom of one end of the groove 206, and the pressure measuring shaft 209 is placed inside the groove 206 under the action of the thrust of the rectangular block 203.

[0060] When the guide rail 7 detects that the pressure measuring shaft 209 is depressurized, the guide rail 7 transmits the detected information to the controller 202 through information transmission. Subsequently, the controller 202 controls the corresponding telescopic adjuster 6 to operate, thereby causing the telescopic adjuster 6 to drive the pad 601 to telescopically adjust. When the telescopic adjuster 6 drives the pad 601 to adjust to the horizontal position, the rectangular block 203 will re-fit against the inner wall of the tank 206 when the angle of the device is reset. The guide rail 7 will then detect that the pressure measuring shaft 209 is under pressure again. When the pressure detected by the guide rail 7 reaches a certain value, the controller 202 will control the telescopic adjuster 6 to stop operating. Through this detection and adjustment method, when the pressure values ​​detected by the four guide rails 7 are all consistent, the horizontal adjustment of the device is completed, which plays the role of straightening the crucible shaft and the crucible.

[0061] When the crucible shaft is inserted into the bushing 8, the bottom end of the crucible shaft pushes the retaining block 801 inside the bushing 8 to move backward. When the retaining block 801 moves backward, it presses the reset spring 802 to slide on the sliding shaft 803. When the bottom end of the crucible shaft contacts the bottom of the bushing 8, the multiple retaining blocks 801 push the crucible shaft under the elastic force of the reset spring 802, thereby fixing the crucible shaft between the multiple retaining blocks 801, thus completing the placement of the crucible shaft and playing the role of calibrating the crucible shaft. By resetting and fixing it with multiple retaining blocks 801, this device can be adapted to crucible shafts of different sizes.

[0062] When the crucible enters the housing 1, it is placed between the four pot support frames 501. After placement, the pot alignment unit aligns the crucible so that the center of the crucible is consistent with the center of the crucible shaft, thereby calibrating the two. The shape of the pot support frame 501 allows different crucibles to be placed on it. Through its cooperation with the shaft fixing assembly, the device can be adapted to crucible shafts and crucibles of different sizes.

[0063] When the crucible alignment is completed, the drive motor 4 drives the screw shaft 9 to rotate, thereby moving the alignment box 3 downward inside the housing 1. When the alignment box 3 moves downward, it pushes the top of multiple pot support frames 501 to move. The pot support frames 501 will then squeeze the pressure spring 503 and move downward on the ring plate 504. The bottom end of the pot support frame 501 will slide in the slot column 5, thereby driving the crucible between the multiple slot columns 5 to move downward. Through the continuous downward movement of the crucible, the top of the crucible shaft will be inserted into the inner wall of the crucible, so that the two are engaged, thereby completing the connection between the two and playing the role of assembling and connecting the crucible shaft and the crucible.

[0064] When the crucible is placed, the drive assembly drives the co-drive assembly to move. When the co-drive assembly moves, it drives the four gears 303 to rotate. When the four gears 303 rotate, they drive the four screws 304 to rotate, thereby driving the four shifting blocks 305 to move within the four rectangular boxes 302. When the four rectangular boxes 302 move, they drive the four pusher arms 701 to slide within the four guide rails 7, thereby causing the four pusher arms 701 to move in a four-way pushing manner. Since the four pusher arms 701 operate synchronously, they push the crucible placed on the crucible support 501 to move. When all four pusher arms 701 are fully in contact with the crucible, the crucible is placed at the center of the four crucible support 501. The center of the crucible will be on the same horizontal line as the center of the crucible shaft placed in the bushing 8. Thus, the calibration of the crucible shaft and the crucible is completed. By moving the four pusher arms 701 to calibrate the crucible, this device can calibrate crucibles of different sizes.

[0065] When the drive assembly is in operation, the drive assembly drives the gear ring 301 to rotate within the ring sleeve 308. When the gear ring 301 rotates, it drives the four gears 303 to rotate synchronously through tooth meshing, thereby realizing that the four pusher arms 701 move synchronously within the guide rail 7, playing the role of synchronous drive.

[0066] When the crucible needs to be aligned, multiple electric sliders 307 move within the annular groove 306. As the multiple electric sliders 307 move, they drive the toothed ring 301 to rotate via the connecting rod 309, thereby driving the four pusher arms 701 to move synchronously on the four guide rails 7, providing power for the synchronous movement of the four pusher arms 701.

[0067] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal furnace crucible shaft alignment device, characterized by: The utility model relates to a kind of positioning device for crucible, including shell (1), the inside of shell (1) is provided with pot assembly, pot assembly is used to place crucible, the middle position of the inner wall of the bottom of shell (1) is fixedly installed with shaft sleeve (8), the inside of shaft sleeve (8) is provided with fixed shaft component, fixed shaft component is used to place crucible shaft, the bottom of shell (1) is fixedly installed with bottom box (2), the inside of bottom box (2) is symmetrically provided with four groups of leveling units, leveling unit includes square block (203), leveling unit is used to drive square block (203) to position leveling of crucible shaft and crucible, the bottom of shell (1) is fixedly installed with multiple motors (4), the output of multiple motors (4) is fixedly installed with screw shaft (9), the outer wall of multiple screw shafts (9) is rotatably connected with position correction box (3), the inside of position correction box (3) is symmetrically provided with pot calibration unit, pot calibration unit includes push pot arm (701), pot calibration unit is used to drive push pot arm (701) to carry out position calibration to crucible, pot calibration unit is placed outside fixed shaft component and pot assembly; Leveling unit further includes ball rod (204), ball rod (204) is fixedly installed on the bottom of shell (1), square block (203) is rotatably connected to one end of ball rod (204), the bottom of square block (203) is fixedly installed with balance counterweight (201), the outer wall of ball rod (204) is symmetrically fixedly installed with limit board (205), the inner side of two limit boards (205) is slidably connected with the outer side of square block (203), the outer wall of shaft sleeve (8) is fixedly installed with groove (206), the top of groove (206) is fixedly installed with pressure gauge (207), the top of square block (203) can be attached to the bottom of groove (206); The inner wall of pressure gauge (207) is slidably connected with pressure measuring shaft (209), pressure measuring spring (208) is fixedly installed between the top of pressure measuring shaft (209) and the bottom of pressure gauge (207), the outer wall of pressure measuring shaft (209) is slidably connected with the inner wall of groove (206), the top of square block (203) can carry out push movement with the bottom of pressure measuring shaft (209); The top of pressure gauge (207) is fixedly installed with controller (202), controller (202) is fixedly installed on the outer wall of shaft sleeve (8), the bottom of shell (1) is fixedly installed with telescopic adjuster (6), one end of telescopic adjuster (6) is fixedly installed with backing plate (601).

2. A single crystal furnace crucible shaft alignment device as defined in claim 1, wherein: Fixed shaft component includes retaining block (801), the number of retaining block (801) is multiple, the inner wall of shaft sleeve (8) is fixedly installed with multiple sliding shafts (803), the inner wall of multiple retaining blocks (801) is slidably connected with the outer wall of multiple sliding shafts (803), reset spring (802) is arranged between the outer wall of multiple retaining blocks (801) and the inner wall of shaft sleeve (8), multiple reset springs (802) are respectively placed outside multiple sliding shafts (803).

3. A single crystal furnace crucible shaft alignment device as defined in claim 2 wherein: The pot placing assembly comprises four slot columns (5) symmetrically fixed to the inner wall of the casing (1), the top of each slot column (5) is fixed with a ring plate (504), the inner wall of each slot column (5) is slidably connected with a pot supporting frame (501), the inner wall of each ring plate (504) is slidably connected with the pot supporting frame (501), the center of the four pot supporting frames (501) is located on the same horizontal line as the center of the shaft sleeve (8), and the top of each pot supporting frame (501) is in the shape of a support.

4. A single crystal furnace crucible shaft alignment device as defined in claim 3 wherein: The bottom of the top end of each pot supporting frame (501) is fixed with a shaft rod (502), the outer wall of each shaft rod (502) is slidably connected with the inner wall of the ring plate (504), a pressure spring (503) is arranged between the top end of each pot supporting frame (501) and the top of the ring plate (504), the four pressure springs (503) are arranged outside the four shaft rods (502), and the top of each pot supporting frame (501) can be attached to the bottom of the position correcting box (3).

5. A single crystal furnace crucible shaft alignment device as defined in claim 4 wherein: The pot correcting unit further comprises a same driving assembly and a driving running assembly, the number of the pot pushing arms (701) is four, the top of the position correcting box (3) is symmetrically fixed with four guide rails (7), the outer wall of each pot pushing arm (701) is slidably connected with the inner wall of each guide rail (7), the inner wall of the position correcting box (3) is symmetrically fixed with four square boxes (302), the inner wall of each square box (302) is rotatably connected with a screw rod (304), the outer wall of each screw rod (304) is threadedly connected with a displacement block (305), the top end of each displacement block (305) penetrates the inner wall of each guide rail (7) and is fixedly connected with the bottom of each pot pushing arm (701), the top end of each displacement block (305) is slidably connected with the inner wall of the position correcting box (3) and the guide rail (7), the outer wall of each displacement block (305) is slidably connected with the inner wall of each square box (302), and one end of each screw rod (304) is fixedly connected with a gear (303).

6. A single crystal furnace crucible shaft alignment device as defined in claim 5 wherein: The same driving assembly comprises a ring sleeve (308) fixed to the inner wall of the position correcting box (3), the inner wall of the position correcting box (3) is slidably connected with a gear ring (301), each gear (303) is rotatably connected with the inner wall of the position correcting box (3), and the teeth on the gear ring (301) can be engaged with the teeth on each gear (303).

7. A single crystal furnace crucible shaft alignment device as defined in claim 6 wherein: The driving running assembly comprises a ring groove (306) fixed to the bottom of the inner wall of the position correcting box (3), a plurality of electric sliding blocks (307) are slidably arranged on the inner wall of the ring groove (306), a plurality of connecting rods (309) are fixed to the bottom of the gear ring (301), and the bottom end of each connecting rod (309) is fixedly connected with the top of each electric sliding block (307).

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