Quick actuator

Abstract

The invention provides a quick actuator. According to the quick actuator, the two-way shape memory alloy and the electrostatic adsorption technology are coupled, the advantages of the two-way shape memory alloy and the electrostatic adsorption technology are integrated, and the novel actuator which is quick in response, high in control precision and large in output force is developed. During working, the phase change force and the electrostatic adsorption force of the two-way shape memory alloy layer alternately act synergistically by accurately controlling temperature and electric field parameters, quick response of driving and restoring of the actuator is realized, and the two-way shape memory alloy layer and the electrostatic adsorption film with different configurations can provide different output forces and displacements, so that the performance of the actuator is improved. And the energy conversion efficiency is optimized. The high-performance actuator can be widely applied to the fields of biomedical treatment, aerospace, micro electro mechanical systems and the like, meets the requirements of various fields for high-performance actuators, and has wide application prospects and important practical value.

Description

Technical Field

[0001] The present invention relates to the technical field of actuators, and in particular to a fast actuator. Background Art

[0002] With the continuous development of modern science and technology, actuators have a wide range of application needs in many fields such as aerospace, biomedicine, micro-electromechanical systems, etc. Traditional shape memory alloy actuators have certain limitations in response speed, precise control of output force and displacement, and energy conversion efficiency, and are difficult to meet the requirements of the growing high-performance application scenarios.

[0003] Shape memory alloys have shown certain potential in the field of actuators due to their unique shape memory effect, but actuators that rely solely on shape memory alloys have relatively slow response speeds and their performance is limited by the characteristics of the alloy itself.

[0004] Based on the defects of the current shape memory alloy actuators, it is necessary to improve them. Summary of the invention

[0005] The purpose of the present invention is to provide a fast actuator to solve the deficiencies of existing shape memory alloy actuators in terms of response speed, output force and displacement control accuracy, and energy conversion efficiency, so as to meet the needs of various fields for high-performance actuators.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] The present invention provides a fast actuator, comprising:

[0008] Electrostatic adsorption film;

[0009] A two-way shape memory alloy layer, which is located on the surface of the electrostatic adsorption film, and one end of the two-way shape memory alloy layer can rotate relative to the electrostatic adsorption film;

[0010] A temperature control unit, used for heating the two-way shape memory alloy layer and controlling its temperature;

[0011] The electric field control unit is used to apply voltage between the electrostatic adsorption film and the two-way shape memory alloy layer so as to form an electrostatic adsorption force between the electrostatic adsorption film and the two-way shape memory alloy layer.

[0012] Preferably, the electrostatic adsorption film comprises:

[0013] Conductor layer;

[0014] A first insulating layer, located on the surface of the conductor layer;

[0015] a second insulating layer, located on a surface of the conductor layer away from the first insulating layer;

[0016] The two-way shape memory alloy layer is located on the surface of the first insulating layer, and one end of the two-way shape memory alloy layer can rotate relative to the first insulating layer.

[0017] Preferably, the temperature control unit comprises:

[0018] A heating film layer is located on the two-way shape memory alloy layer;

[0019] A first power source, whose positive and negative electrodes are respectively connected to two ends of the heating film layer, is used to apply voltage to the heating film layer.

[0020] Preferably, the electric field control unit comprises:

[0021] The second power supply has a positive and negative electrode connected to the conductor layer and the two-way shape memory alloy layer respectively, and is used to apply a voltage between the conductor layer and the two-way shape memory alloy layer.

[0022] Preferably, the temperature control unit further comprises:

[0023] A temperature sensor is located on the two-way shape memory alloy layer and is used to monitor the temperature of the two-way shape memory alloy layer.

[0024] Preferably, the temperature control unit further comprises:

[0025] A temperature controller is electrically connected to the temperature sensor and the first power supply, and is used to control the two-way shape memory alloy layer to be heated to a set temperature.

[0026] Preferably, the electric field control unit further includes:

[0027] The capacitance measuring unit is used to monitor the capacitance strength between the conductor layer and the two-way shape memory alloy layer.

[0028] Preferably, it also includes:

[0029] Pedestal;

[0030] The second insulating layer is attached to the base.

[0031] Preferably, the material of the conductor layer includes at least one of a metal material, a carbon-based material, and a conductive polymer material.

[0032] Preferably, the material of the first insulating layer and the second insulating layer includes at least one of polyimide, ceramic, polyethylene and polytetrafluoroethylene.

[0033] The fast actuator of the present invention has the following beneficial effects compared with the prior art:

[0034] 1. The fast actuator of the present invention couples the two-way shape memory alloy with the electrostatic adsorption technology, combines the advantages of the two, and develops a new type of actuator with fast response, high-precision control and large output force; the working principle of the fast actuator of the present invention is: when the actuator is working, the temperature control unit first heats or cools the two-way shape memory alloy layer according to a preset program to make it undergo a phase change, generate a phase change force, and cause the shape of the alloy component to change. This process can achieve a displacement output with a large stroke; after the two-way shape memory alloy layer stops heating, the electric field control unit applies a voltage between the electrostatic adsorption film and the two-way shape memory alloy layer to generate an electrostatic adsorption force. The electrostatic adsorption force can respond quickly in a short time, so that the two-way shape memory alloy layer can quickly recover and lock, so that the actuator can meet the requirements of response speed and displacement accuracy under different working conditions; by accurately adjusting the temperature and voltage parameters, the synergistic effect of the phase change force and the electrostatic adsorption force of the two-way shape memory alloy layer can be achieved, so that the actuator can output precise and controllable force and displacement while responding quickly, and complete various complex actuation tasks;

[0035] 2. The fast actuator of the present invention has the advantage of fast response: since the electrostatic adsorption force can be generated and acted on the actuator structure in an instant, combined with the cooling recovery process of the two-way shape memory alloy layer, the response speed of the actuator is significantly improved, and the actuation and recovery can be completed in a short time, meeting the application scenarios with high requirements for response speed;

[0036] 3. The fast actuator of the present invention can be precisely controlled: by precisely adjusting the temperature and electric field parameters, the phase change degree of the two-way shape memory alloy layer and the magnitude of the electrostatic adsorption force can be precisely controlled, thereby achieving the demand for rapid actuation and recovery of the actuator, and accurately controlling the output force and displacement to meet the needs of precision operation, such as minimally invasive surgical instrument control in the biomedical field;

[0037] 4. The fast actuator of the present invention has a large output force: the two-way shape memory alloy layer can generate a large force during the phase change process, which works in conjunction with the electrostatic adsorption force, so that the actuator can output sufficient force to drive a heavier load, expanding its application range, for example, it has potential application value in the deformation control of aircraft wings in the aerospace field;

[0038] 5. The fast actuator of the present invention, by rationally designing the structure and control strategy of the actuator, fully utilizes the phase change energy and electrostatic adsorption energy of the two-way shape memory alloy layer, reduces energy loss, improves energy conversion efficiency, reduces operating costs, and makes it more competitive in practical applications;

[0039] 6. The fast actuator of the present invention has many advantages and can be widely used in medical devices, robots, aerospace, micro-electromechanical systems and other fields, meeting the needs of various fields for high-performance actuators, and has broad application prospects and important practical value. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the prior art descriptions. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0041] Figure 1 It is a structural schematic diagram of the fast actuator of the present invention;

[0042] Figure 2 A diagram showing the shape change of the two-way shape memory alloy layer when the first power source of the present invention is working and the second power source is not working;

[0043] Figure 3 This is a diagram showing the shape change of the two-way shape memory alloy layer when the first power source of the present invention is not working and the second power source is working;

[0044] Figures 4-5 It is a schematic diagram of the working principle of the two-way shape memory alloy layer of the present invention;

[0045] Figures 6-7 It is a schematic diagram of the working principle of the electrostatic adsorption film of the present invention. DETAILED DESCRIPTION

[0046] The following will be combined with the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0048] Those skilled in the art will appreciate that, unless expressly stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present application refers to the presence of the features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups thereof. It should be understood that when we refer to an element as being "connected" to another element, it may be directly connected to the other element, or there may be intermediate elements. In addition, the "connection" used here may include wireless connections. The term "and / or" used here includes all or any unit and all combinations of one or more associated listed items.

[0049] In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0050] It should be understood that although the terms first, second, etc. may be used in the present disclosure to describe various information, such information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other.

[0051] The present invention provides a fast actuator, such as Figures 1 to 7 As shown, including:

[0052] Electrostatic adsorption film 1;

[0053] A two-way shape memory alloy layer 2 is located on the surface of the electrostatic adsorption film 1, and one end of the two-way shape memory alloy layer 2 can rotate relative to the electrostatic adsorption film 1;

[0054] A temperature control unit, used for heating the two-way shape memory alloy layer 2 and controlling its temperature;

[0055] The electric field control unit is used to apply voltage between the electrostatic adsorption film 1 and the two-way shape memory alloy layer 2 so as to form an electrostatic adsorption force between the electrostatic adsorption film and the two-way shape memory alloy layer.

[0056] The rapid actuator of the present invention comprises: an electrostatic adsorption film 1, a two-way shape memory alloy layer 2, a temperature control unit, and an electric field control unit; wherein the two-way shape memory alloy layer 2 is made of an alloy material that has been specially trained and treated, has a stable two-way shape memory effect, and can produce a reversible shape change when the temperature changes, thereby outputting a phase change force; its shape and size are designed according to specific application requirements, such as being made into a complete sheet, a slit sheet, or an origami sheet and other structural forms to adapt to different force transmission and deformation requirements; the two-way shape memory alloy layer 2 can reversibly transform between two different shapes during heating and cooling; the material of the two-way shape memory alloy layer 2 includes alloy systems such as nickel-titanium (Ni-Ti) alloy, copper-zinc-aluminum (Cu-Zn-Al), and iron-manganese-silicon (Fe-Mn-Si). The electrostatic adsorption film 1 is composed of an electrode (i.e., a conductor layer) and a dielectric material (i.e., an insulating layer); the electrode is made of a highly conductive material, such as a metal or a carbon-based material, and is prepared into a specific shape, such as a parallel plate, a comb tooth or an interlaced finger structure, through processes such as photolithography and coating to generate a uniform and controllable electric field; the dielectric material is selected from a material with a high dielectric constant and a low loss, such as polyimide, ceramic, etc., and is placed between the electrodes. When a voltage is applied, an electrostatic adsorption force is generated between the electrode and the dielectric material; the rapid actuator of the present invention, the temperature control unit can heat or cool the two-way shape memory alloy layer 2 and quickly and accurately adjust the temperature of the two-way shape memory alloy layer 2, so that it works within a set phase change temperature range, and realizes a rapid shape change for actuation; the electric field control unit applies a voltage between the electrostatic adsorption film 1 and the two-way shape memory alloy layer 2, and the electric field control unit can provide a stable DC or AC voltage to accurately control the electric field strength between the electrostatic adsorption film 1 and the two-way shape memory alloy layer 2, thereby adjusting the magnitude of the electrostatic adsorption force, and thereby adjusting the recovery speed of the shape memory alloy.

[0057] The fast actuator of the present invention couples the two-way shape memory alloy with the electrostatic adsorption technology, combines the advantages of the two, and develops a new type of actuator with fast response, high-precision control and large output force, so as to promote the development of existing actuation technology; specifically, the working principle of the fast actuator of the present invention is as follows: when the actuator is working, the temperature control unit first heats or cools the two-way shape memory alloy layer 2 according to a preset program, so that it undergoes a phase change, generates a phase change force, and causes the shape of the alloy component to change. This process can achieve a displacement output with a large stroke; after the two-way shape memory alloy layer 2 stops heating, the electric field control unit applies a voltage between the electrostatic adsorption film 1 and the two-way shape memory alloy layer 2 to generate an electrostatic adsorption force. The electrostatic adsorption force can respond quickly in a short time, so that the two-way shape memory alloy layer 2 quickly recovers and locks, so that the actuator can meet the requirements of response speed and displacement accuracy under different working conditions; by accurately adjusting the temperature and voltage parameters, the synergistic effect of the phase change force and the electrostatic adsorption force of the two-way shape memory alloy layer 2 can be achieved, so that the actuator can output precise and controllable force and displacement while responding quickly, and complete various complex actuation tasks. During operation, by precisely controlling the temperature and electric field parameters, the phase change force of the two-way shape memory alloy layer and the electrostatic adsorption force work alternately and synergistically to achieve rapid response of the actuator drive and recovery. Two-way shape memory alloy layers and electrostatic adsorption films of different configurations can provide different output forces and displacements, and have optimized energy conversion efficiency.

[0058] In some embodiments, the electrostatic adsorption film 1 includes:

[0059] Conductor layer 11;

[0060] A first insulating layer 12, located on the surface of the conductor layer 11;

[0061] The second insulating layer 13 is located on the surface of the conductor layer 11 away from the first insulating layer 12;

[0062] The two-way shape memory alloy layer 2 is located on the surface of the first insulating layer 12 , and one end of the two-way shape memory alloy layer 2 can rotate relative to the first insulating layer 13 .

[0063] In the above embodiment, the electrostatic adsorption film 1 includes a conductor layer 11, a first insulating layer 12, and a second insulating layer 13; the first insulating layer 12, the conductor layer 11, and the second insulating layer 13 are stacked in sequence from top to bottom, and the two-way shape memory alloy layer 2 is located on the surface of the first insulating layer 12, and one end of the two-way shape memory alloy layer 2 can rotate relative to the first insulating layer 12; specifically, a rotating shaft is provided on the surface of the first insulating layer 12, and the two-way shape memory alloy layer 2 is sleeved outside the rotating shaft, and the two-way shape memory alloy layer 2 can rotate around the rotating shaft, so that one end of the two-way shape memory alloy layer 2 can rotate relative to the first insulating layer 13.

[0064] In some embodiments, the temperature control unit comprises:

[0065] A heating film layer 3 is located on the two-way shape memory alloy layer 2;

[0066] The first power source 4 has a positive and negative pole connected to two ends of the heating film layer 3 respectively, and is used to apply voltage to the heating film layer 3 .

[0067] The heating film layer 3 is a thin film material that can convert electrical energy into thermal energy; it is usually composed of a conductive material and a base material. When current passes through the conductive material, heat is generated due to the resistance of the material, thereby realizing the heating function; the heating film layer 3 is located on the surface of the two-way shape memory alloy layer 2, and the positive and negative electrodes of the first power supply 4 are respectively connected to the two ends of the heating film layer 3. The heating of the heating film layer 3 is achieved by controlling the voltage of the first power supply 4, and the heating film layer 3 is bonded to the two-way shape memory alloy layer 2, thereby realizing the heating of the two-way shape memory alloy layer 2.

[0068] In some embodiments, the electric field control unit comprises:

[0069] The second power source 5 has a positive and negative pole connected to the conductor layer 11 and the two-way shape memory alloy layer 2 respectively, and is used to apply a voltage between the conductor layer 11 and the two-way shape memory alloy layer 2 .

[0070] Specifically, the positive pole of the second power supply 5 is electrically connected to the conductor layer 11, and the negative pole is electrically connected to the two-way shape memory alloy layer 2. The voltage between the conductor layer 11 and the two-way shape memory alloy layer 2 is controlled by the second power supply 5, thereby adjusting the electrostatic adsorption force between the conductor layer 11 and the two-way shape memory alloy layer 2.

[0071] In some embodiments, the temperature control unit further comprises:

[0072] The temperature sensor is located on the two-way shape memory alloy layer 2 and is used to monitor the temperature of the two-way shape memory alloy layer.

[0073] In some embodiments, the temperature control unit further comprises:

[0074] The temperature controller is electrically connected to the temperature sensor and the first power supply 4 , and is used to control the two-way shape memory alloy layer 2 to be heated to a set temperature.

[0075] Specifically, the temperature control unit includes a first power supply 4, a temperature sensor, and a temperature controller; the temperature controller is a PID temperature controller; the temperature sensor monitors the temperature of the two-way shape memory alloy layer 2 in real time, and feeds back the signal to the PID temperature controller to control the two-way shape memory alloy layer 2 to be heated to the set temperature, thereby realizing closed-loop temperature control, and the temperature control accuracy can reach ±0.1°C.

[0076] In some embodiments, the voltage range provided by the first power supply 4 is 0 to 1500 V. By adjusting the voltage range of the first power supply 4, the two-way shape memory alloy layer 2 is controlled to be heated to a set temperature, such as controlling the heating temperature of the two-way shape memory alloy layer 2 to be 10 to 200°C.

[0077] In some embodiments, the electric field control unit further comprises:

[0078] The capacitance measuring unit is used to monitor the capacitance strength between the conductor layer 11 and the two-way shape memory alloy layer 2 .

[0079] In some embodiments, the electric field control unit also includes: a voltage amplifier; a second power supply 5 capable of outputting a DC or AC voltage of 0V to ±10000V, the voltage amplifier is used to amplify the voltage signal to meet the electric field strength requirements of the electrostatic adsorption component, and the capacitance meter is used to monitor the capacitance strength changes between the conductor layer 11 and the two-way shape memory alloy layer 2 in real time, indirectly reflecting the magnitude of the electrostatic adsorption force, thereby achieving precise control of the electric field strength and closed-loop feedback regulation.

[0080] In some embodiments, controlling the output voltage of the second power supply 5 can change the capacitance between the conductor layer 11 and the two-way shape memory alloy layer 2 within a range of 10 to 100 pF.

[0081] In some embodiments, the output voltage of the second power supply 5 is controlled so that the electrostatic adsorption force between the conductor layer 11 and the two-way shape memory alloy layer 2 is 1 mN to 500N.

[0082] In some embodiments, it also includes:

[0083] Base 6;

[0084] The second insulating layer 13 is attached to the base 6 .

[0085] The base 6 is made of a lightweight and high-strength aluminum alloy material, has good thermal conductivity and mechanical stability, and provides support and protection for the actuator.

[0086] In some embodiments, the material of the conductor layer 11 includes at least one of a metal material, a carbon-based material, and a conductive polymer material.

[0087] In some embodiments, the material of the first insulating layer 12 and the second insulating layer 13 includes at least one of polyimide, ceramic, polyethylene, and polytetrafluoroethylene.

[0088] Specifically, the material of the conductor layer 11 includes at least one of a metal material, a carbon-based material, and a conductive polymer material; the metal material includes a metal foil such as an aluminum foil, a copper foil, etc.; the aluminum foil has good conductivity and can effectively conduct electric charges. It can be very thin while ensuring the rapid movement of electric charges; in an electrostatic adsorption film, the aluminum foil can be used as a conductive layer to help establish a uniform electric field on the entire surface of the film; in addition, some conductive polymers can also be used as conductive materials; conductive polymers such as poly(3,4-ethylenedioxythiophene)-poly(styrene sulfonate) (PEDOT:PSS) have good flexibility and processability, and can better adapt to the adsorption requirements of different shapes compared to metal materials; polyethylene (PE), polytetrafluoroethylene (PTFE), polyimide, ceramics, etc. have good insulation properties and can effectively prevent charge leakage.

[0089] Preferably, in some embodiments, the conductor layer 11 is made of a conductive material film such as copper foil, and is made into a sheet or other optimized shape through a photolithography process. The first insulating layer 12 and the second insulating layer 13 are made of polyimide film. The conductor layer 11 is assembled with the first insulating layer 12 and the second insulating layer 13 through a bonding process to form an electrostatic adsorption film, and is respectively connected to the positive and negative electrodes of the second power supply with the two-way shape memory alloy layer 2.

[0090] In some embodiments, the heating film layer 3 is a flexible heating ink coating, which is a coating material that can generate heat after applying electrical energy; it has good flexibility and can be attached to various flexible substrates, such as plastic films, textiles, etc., so as to achieve the heating function; the flexible heating ink coating includes conductive materials, adhesive materials, dispersants and additives, etc. The conductive materials include carbon nanotubes, graphene, metal nanoparticles (such as silver nanoparticles), etc., and high molecular polymers such as polyurethane (PU) and polyimide (PI) are often used as adhesive materials. The flexible heating ink coating is bonded to the two-way shape memory alloy layer 2, and the two ends of the flexible heating ink coating are connected to the positive and negative electrodes of the first power supply 4 with wires; in addition, the two-way shape memory alloy layer 2 is connected to the negative electrode of the second power supply 5, and the conductor layer 11 is connected to the positive electrode of the second power supply 5. The movable part is the two-way shape memory alloy layer 2, and the electrostatic adsorption film is fixed; then the entire assembly is mounted on the base to finally obtain the actuator.

[0091] In some embodiments, the two-way shape memory alloy layer 2 has a thickness of 0.1-0.2 mm, for example, 0.1 mm, 0.15 mm, or 0.2 mm, and the thickness is selected according to actual conditions.

[0092] In some embodiments, the thickness of the conductor layer 11 is 10-15 μm. For example, the thickness of the conductor layer 11 may be 10 μm, 11 μm, 12 μm, 13 μm, 14 μm, 15 μm, etc. The thickness is selected according to actual conditions.

[0093] In some embodiments, the thickness of the first insulating layer 12 and the second insulating layer 13 are independently 10 to 15 μm. For example, the thickness of the first insulating layer 12 and the second insulating layer 13 are independently 10 μm, 11 μm, 12 μm, 12.5 μm, 13 μm, 14 μm, 15 μm, etc. The thickness is selected according to actual conditions.

[0094] In some embodiments, the thickness of the heating coating 10 is 8 to 12 μm. For example, the thickness of the heating coating 10 is 8 μm, 9 μm, 10 μm, 11 μm, 12 μm, etc. The thickness is selected according to actual conditions.

[0095] In some embodiments, the two-way shape memory alloy layer 2 is made of nickel-titanium-based two-way shape memory alloy, which is processed into a sheet structure by wire cutting and has a stable two-way shape memory effect after multiple thermomechanical training.

[0096] For further reference, Figure 2 As shown, the first power source 4 is working (the switch corresponding to the first power source 4 is turned off), while the second power source 5 is not working (the switch corresponding to the second power source 5 is turned on), and the two-way shape memory alloy layer 2 changes shape due to heating. Figure 3 When the first power source 4 is not working (the switch corresponding to the first power source 4 is turned on) and the second power source 5 is working (the switch corresponding to the second power source 5 is turned off), the two-way shape memory alloy layer 2 recovers and locks due to the electrostatic adsorption force.

[0097] Furthermore, Figures 4-5 It is a schematic diagram of the working principle of the two-way shape memory alloy layer 2; Figure 4 A schematic diagram of the state of the two-way shape memory alloy layer 2 when the first power source 4 is not working (the switch corresponding to the first power source 4 is turned on); Figure 5 Schematic diagram of the state of the two-way shape memory alloy layer 2 when the first power source 4 is working (the switch corresponding to the first power source 4 is closed).

[0098] Figures 6-7 This is a schematic diagram of the working principle of the electrostatic adsorption film; Figure 6 Schematic diagram of the state of the two-way shape memory alloy layer 2 when the second power source 5 is working (the switch corresponding to the second power source 5 is closed). When working, the two-way shape memory alloy layer 2 is negatively charged and the conductor layer 11 is positively charged; Figure 7 Schematic diagram of the state of the two-way shape memory alloy layer 2 when the second power source 5 is not working (the switch corresponding to the second power source 5 is turned on).

[0099] When the fast actuator of the present invention is used, a laser displacement sensor and a high-precision force sensor are used to measure the displacement and output force of the actuator; by changing the set temperature of the temperature control unit and the voltage value of the electric field control unit, the displacement-time curve and force-displacement curve of the actuator under different working conditions are recorded to test its performance indicators such as response speed, output force range, displacement accuracy and energy conversion efficiency. The fast actuator of the present invention, which is coupled with a two-way shape memory alloy layer and electrostatic adsorption, can be optimized and customized according to different application requirements by adjusting materials, structures and control parameters, so as to meet the diverse requirements of various fields for high-performance actuators.

[0100] The fast actuator of the present invention has the following advantages:

[0101] Fast response: Since the electrostatic adsorption force can be generated and acted on the actuator structure in an instant, combined with the cooling recovery process of the two-way shape memory alloy layer, the response speed of the actuator is significantly improved, and actuation and recovery can be completed in a short time, meeting the application scenarios with high requirements for response speed;

[0102] Precise control: By precisely regulating temperature and electric field parameters, the phase change degree and electrostatic adsorption force of the two-way shape memory alloy layer can be precisely controlled, thereby achieving the needs of rapid actuation and recovery of the actuator, and accurately controlling the output force and displacement to meet the needs of precision operation, such as minimally invasive surgical instrument control in the biomedical field;

[0103] Large output force: The two-way shape memory alloy layer can generate a large force during the phase change process, which works together with the electrostatic adsorption force to enable the actuator to output enough force to drive heavier loads, expanding its application range. For example, it has potential application value in the deformation control of aircraft wings in the aerospace field.

[0104] Energy conversion efficiency optimization: By rationally designing the structure and control strategy of the actuator, the phase change energy and electrostatic adsorption energy of the two-way shape memory alloy layer are fully utilized to reduce energy loss, improve energy conversion efficiency, and reduce operating costs, making it more competitive in practical applications.

[0105] In summary, the rapid actuator of the dual-range shape memory alloy coupled with electrostatic adsorption of the present invention has many advantages. The rapid actuator of the present invention can be widely used in medical devices, robots, aerospace, micro-electromechanical systems and other fields to meet the needs of various fields for high-performance actuators, and has broad application prospects and important practical value.

[0106] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A fast actuator, characterized in that: include: Electrostatic adsorption film; A two-way shape memory alloy layer, which is located on the surface of the electrostatic adsorption film, and one end of the two-way shape memory alloy layer can rotate relative to the electrostatic adsorption film; A temperature control unit, used for heating the two-way shape memory alloy layer and controlling its temperature; The electric field control unit is used to apply voltage between the electrostatic adsorption film and the two-way shape memory alloy layer so as to form an electrostatic adsorption force between the electrostatic adsorption film and the two-way shape memory alloy layer.

2. The fast actuator according to claim 1, characterized in that The electrostatic adsorption film comprises: Conductor layer; A first insulating layer, located on the surface of the conductor layer; a second insulating layer, located on a surface of the conductor layer away from the first insulating layer; The two-way shape memory alloy layer is located on the surface of the first insulating layer, and one end of the two-way shape memory alloy layer can rotate relative to the first insulating layer.

3. The fast actuator according to claim 1, characterized in that: The temperature control unit comprises: A heating film layer is located on the two-way shape memory alloy layer; The first power supply has a positive and negative electrode connected to two ends of the heating film layer respectively, and is used to apply voltage to the heating film layer.

4. The fast actuator according to claim 2, characterized in that: The electric field control unit comprises: The second power supply has a positive and negative electrode connected to the conductor layer and the two-way shape memory alloy layer respectively, and is used to apply a voltage between the conductor layer and the two-way shape memory alloy layer.

5. The fast actuator according to claim 3, characterized in that: The temperature control unit also includes: A temperature sensor is located on the two-way shape memory alloy layer and is used to monitor the temperature of the two-way shape memory alloy layer.

6. The fast actuator according to claim 5, characterized in that The temperature control unit also includes: A temperature controller is electrically connected to the temperature sensor and the first power supply, and is used to control the two-way shape memory alloy layer to be heated to a set temperature.

7. The fast actuator according to claim 4, characterized in that: The electric field control unit also includes: The capacitance measuring unit is used to monitor the capacitance strength between the conductor layer and the two-way shape memory alloy layer.

8. The fast actuator according to claim 2, characterized in that: Also includes: Pedestal; The second insulating layer is attached to the base.

9. The fast actuator according to claim 2, characterized in that: The material of the conductor layer includes at least one of a metal material, a carbon-based material, and a conductive polymer material.

10. The fast actuator according to claim 2, characterized in that: The material of the first insulating layer and the second insulating layer includes at least one of polyimide, ceramic, polyethylene, and polytetrafluoroethylene.

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