Ultraviolet, visible and near-infrared three-wavelength collaborative multi-view observation system and method

Abstract

The invention discloses an ultraviolet, visible and near-infrared three-wavelength coordinated multi-view observation system, which is characterized in that a laser beam is divided into a pumping beam and a detection beam through a beam splitter, the delay of the detection beam is adjusted, and reflectivity information is acquired by using a polarization beam splitter and a CCD (Charge Coupled Device); probe light with different wavelengths is generated through frequency multiplication and frequency combination of the BBO crystal, and a specific wavelength is filtered by using an optical filter; the transmission light enters the imaging objective lens through the sample, a transmission-type image is obtained through the filter and the CCD, and finally the three-dimensional contour of the object is reconstructed on the computer. According to the method, the dynamic change of the material in the laser ablation process is more accurately captured by combining the variable polarization reflection type imaging technology and the variable wavelength transmission type imaging technology, and the imaging precision is improved; and through a multi-view imaging technology, the polarization information of the object can be captured from different angles, and more comprehensive view angle analysis and reconstruction of the three-dimensional structure and dynamic change of the object are provided.

Description

Technical Field

[0001] The present invention belongs to the technical field of femtosecond laser imaging, and specifically relates to a multi-viewing angle observation system and method for coordinated ultraviolet, visible and near-infrared three-wavelength observation. Background Art

[0002] In the process of observing the ultrafast dynamics of femtosecond laser processing, the ultrafast observation system can be divided into reflection type and transmission type imaging according to the incident mode of the probe light. Reflection type imaging can calculate the plasma density during the ablation process of the material surface according to the time domain change of the reflectivity of the probe light, so as to explore the ultrafast dynamic processes such as free electron excitation and material phase change during the interaction between laser and material. Transmission type imaging can not only observe the changes in plasma density induced by laser inside transparent materials, but also study the spatiotemporal evolution of plasma / shock waves by observing laser-induced plasma eruption, reveal the mechanism of laser processing, and intuitively reflect the efficiency and progress of laser processing.

[0003] When light passes through or reflects off different materials, its polarization state changes. This property gives polarized light a unique advantage in detection and analysis. In materials science, different polarized light can reveal the anisotropic properties of materials, detect internal stress and strain, and evaluate structural integrity and mechanical properties. In biomedical imaging, polarized light can penetrate tissues, improve imaging contrast, help distinguish different cells and tissues, provide clearer images, and assist in disease diagnosis and research. In addition, polarized light reduces reflection interference in remote sensing and environmental monitoring, and more accurately detects the composition of water bodies and atmospheric particles. Because different materials or structures respond to different polarized light to different degrees, traditional imaging often only produces relatively vague results, while using polarized light detection will greatly improve imaging accuracy. In addition to the polarization state, the wavelength of light also has an important influence on the detection results. Since the dielectric function of the material is determined by the electron density and the electron relaxation time, measuring the transmittance of the detection light of one wavelength is not enough to simultaneously calculate the two physical quantities of electron density and electron relaxation time, and when the same wavelength as the pump light is used for measurement, there may be plasma interference. Therefore, it is necessary to use multiple wavelengths to detect the ultrafast laser ablation process and inversely solve the free electron density and electron relaxation time.

[0004] The electron relaxation time describes the time required for an electron to return from an excited state to a ground state, and it is closely related to the phase change of the material surface under different polarized light. Under femtosecond laser irradiation, various phase changes often occur on the material surface. During the phase change process, the optical properties of the material (such as the refractive index and absorption coefficient) will change significantly, and the changes in these optical properties are closely related to the electron relaxation time. For example, during the insulator-metal phase transition, the mobility and density of electrons will change suddenly, resulting in a significant change in the electron relaxation time. Since the optical properties of the material will change with the change of the electron relaxation time, the polarization information of the object can be captured from different angles through multi-view imaging technology, providing a more comprehensive perspective to analyze and reconstruct the three-dimensional structure and dynamic changes of the object. This multi-view imaging method not only enhances the three-dimensional characteristics of two-dimensional imaging, but also can analyze in detail the internal details and phase change process of the object during rapid changes. At present, although there are relatively mature three-dimensional imaging methods on the market, most of them are concentrated in the macroscopic field, and there are few studies on three-dimensional observations in the ultrafast (picosecond level)-microscopic field combined with frequency conversion and wavelength conversion. Summary of the invention

[0005] The purpose of the present invention is to address the above-mentioned deficiencies in the prior art and to provide a multi-view observation system and method with coordinated ultraviolet, visible and near-infrared wavelengths, so as to solve the problem of the lack of three-dimensional observation in the ultrafast (picosecond level)-microscopic field and three-dimensional imaging technology combined with the variable frequency and variable wavelength field.

[0006] In order to achieve the above object, the technical solution adopted by the present invention is:

[0007] In the first aspect, a UV-visible-near infrared three-wavelength coordinated multi-viewing observation system comprises:

[0008] An ultrashort pulse laser light source; the ultrashort pulse laser beam emitted by the ultrashort pulse laser light source is divided into a pump beam and a detection beam by the beam splitter-combiner mirror I;

[0009] A pump beam optical path; the pump beam enters the pump beam optical path and is focused on the sample surface for ablation of the sample surface;

[0010] A detection beam optical path; the detection beam optical path includes a reflective detection light path and a transmissive detection light path; the detection beam enters the detection beam optical path, passes through a delay device, and is divided into a reflective detection light and a transmissive detection light by a beam splitter-combiner mirror II; the reflective detection light enters the reflective detection light path, and is used to obtain the reflectivity time domain information when the pump light excites the sample; the transmissive detection light enters the transmissive detection light path, and is used to obtain the information of observing laser-induced plasma eruption at different wavelengths;

[0011] The image receiving device is used to receive the reflectivity time domain information when the pump light excites the sample and observe the laser-induced plasma eruption information at different wavelengths.

[0012] Furthermore, the pump beam optical path includes a polarization beam splitter I and a lens I; the pump beam adjusts the size of the light field through the polarization beam splitter I, and then focuses on the sample surface through the lens I for sample surface ablation.

[0013] Furthermore, the reflective detection light path includes a polarization beam splitter II, an imaging objective lens I and a CCD I; the reflective detection light passes through the polarization beam splitter II, adjusts the s-polarized light and p-polarized light on the reflective detection light path and irradiates the sample surface, and is reflected back to the CCD I through the imaging objective lens I to obtain the reflectivity time domain information when the pump light excites the sample.

[0014] Furthermore, the transmission detection light path includes lens II, BBO crystal I, BBO crystal II, lens II, short-wave pass filter, lens III, imaging objective II, dichroic mirror, 343nm band-pass filter, 515nm band-pass filter, CCD II and CCD III; the BBO crystal I, BBO crystal II, short-wave pass filter and lens III are all arranged on the reflection path of the lens II; the imaging objective II is arranged on the side of the sample; a dichroic mirror is arranged behind the imaging objective II; a 343nm band-pass filter and CCD II are arranged on one splitting light path of the dichroic mirror, and a 515nm band-pass filter and CCD III are arranged on the other splitting light path of the dichroic mirror.

[0015] Furthermore, the positions of the BBO crystal I and the BBO crystal II are both located before the focus of the lens II.

[0016] Furthermore, the wavelength of the reflective detection light is 1030 nm.

[0017] Furthermore, the imaging objective lens I is a 20× or 50× objective lens.

[0018] Furthermore, the image receiving component is a computer.

[0019] In the second aspect, a multi-angle observation method of ultraviolet visible near infrared three-wavelength coordination specifically comprises the following steps:

[0020] S1. The ultrashort pulse laser beam emitted by the ultrashort pulse laser light source passes through the beam splitter-combiner mirror and is divided into a pump beam and a detection beam;

[0021] S2, the pump beam is adjusted to the size of the light field through polarization beam splitter I, and then focused on the sample surface through lens I for ablation of the sample surface;

[0022] S3, after the detection beam passes through the delay device, it is divided into reflected detection light and transmitted detection light by the beam splitter-combiner mirror II;

[0023] S4, the reflected detection light adjusts the s-polarized light and p-polarized light on the reflected light path through the polarization beam splitter II and irradiates the sample surface, and then reflects back to CCDⅠ through the imaging objective lens I to obtain the reflectivity time domain information when the pump light excites the sample;

[0024] S5, the transmission detection light passes through lens II and BBO crystal I to double the frequency and generate photons with a wavelength of 515nm; the photons of 1030nm and 515nm enter BBO crystal II at the same time, and generate photons with a wavelength of 343nm through frequency combination; 1030nm, 515nm and 343nm pass through the short-wave filter to filter out the photons of 1030nm; the photons of 515nm and 343nm are focused by lens III, pass through the side of the sample and enter the imaging objective II; after being split by the dichroic mirror, the light of 343nm and 515nm passes through the 343nm bandpass filter and the 515nm bandpass filter respectively, and enters CCDⅡ and CCDⅢ respectively, and obtains the information of laser-induced plasma eruption observed at different wavelengths;

[0025] S6. The image receiving element receives the reflectivity time domain information when the pump light excites the sample and the laser-induced plasma eruption information observed at different wavelengths, and uses the image three-dimensional contour extraction method to extract and restore the three-dimensional contour of the sample object surface and draw it into a three-dimensional graph.

[0026] The ultraviolet, visible and near-infrared three-wavelength coordinated multi-viewing angle observation system and method provided by the present invention have the following beneficial effects:

[0027] 1. The system of the present invention divides the laser beam into a pump beam and a detection beam through a beam splitter, adjusts the delay of the detection beam, and uses a polarization beam splitter and a CCD to obtain reflectivity information; generates detection lights of different wavelengths through frequency doubling and frequency combination of a BBO crystal, and uses a filter to filter a specific wavelength; the transmitted light enters the imaging objective through the sample, obtains a transmission image through a filter and a CCD, and finally reconstructs the three-dimensional contour of the object on a computer. The present invention realizes high-precision, multi-viewing angle, and multi-wavelength dynamic imaging and analysis.

[0028] 2. Improve imaging accuracy: By combining variable polarization reflective imaging and variable wavelength transmission imaging technology, the dynamic changes of materials during laser ablation can be captured more accurately, thereby improving imaging accuracy.

[0029] 3. Multi-view analysis: Through multi-view imaging technology, the polarization information of objects can be captured from different angles, providing a more comprehensive perspective to analyze and reconstruct the three-dimensional structure and dynamic changes of objects. This multi-view imaging method not only enhances the three-dimensional characteristics of two-dimensional imaging, but also can analyze in detail the internal details and phase change process of objects in rapid changes.

[0030] 4. Multi-wavelength detection: Using multiple wavelengths of detection light to observe the ultrafast laser ablation process can effectively avoid plasma interference and improve the accuracy and reliability of measurement. Through multi-wavelength detection, the free electron density and electron relaxation time can be reversely solved to obtain more comprehensive material information.

[0031] 5. High temporal resolution: The present invention uses a femtosecond laser as a light source, and the pulse duration is in the order of femtoseconds, which enables the system to have high temporal resolution and to observe subtle changes in ultrafast dynamics.

[0032] 6. Dynamic phase change analysis: Under femtosecond laser irradiation, various phase change processes will occur on the surface of the material. This system can monitor the changes in the optical properties of the material in real time through variable polarization detection, and then analyze the dynamic relationship between the electron relaxation time and the phase change process.

[0033] 7. Multifunctional integration: The present invention integrates both reflective and transmissive imaging modes, and combines a multi-frequency and multi-viewing angle observation system to achieve a comprehensive analysis of the dynamic changes on the surface and inside of the material, and is suitable for a variety of materials and application scenarios.

[0034] 8. The observation accuracy and breadth of the present invention are greatly improved, and it can be applied to the fields of physical property control, high-resolution imaging, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is the optical path diagram of the ultraviolet, visible and near-infrared three-wavelength coordinated multi-viewing angle observation system in Example 1 of the present invention.

[0036] Figure 2 is the reflection image of Ti under different polarization light at 40ps in the specific implementation case of the present invention. Figure 2 (a) is the result of vertical polarized light processing. Figure 2 (b) is the processing result of horizontal polarized light.

[0037] Figure 3 The transmission images of Ti under different wavelengths of light at 40ps in the specific implementation case of the present invention are shown in FIG. Figure 3 (a) is the observation result at 515nm wavelength. Figure 3 (b) is the observation result at a wavelength of 343 nm.

[0038] Among them, 1. Ultrashort pulse laser light source; 2. Beam splitter-combiner mirror I; 3. Beam splitter-combiner mirror II; 4. Lens I; 5. Delay device; 6. Polarization beam splitter I; 7. Polarization beam splitter II; 8. CCD I; 9. BBO crystal I; 10. BBO crystal II; 11. Lens II; 12. Lens III; 13. Shortwave pass filter; 14. Imaging objective lens I; 15. Imaging objective lens II; 16. 343nm bandpass filter; 17. 515nm bandpass filter; 18. Dichroic mirror; 19. CCD II; 20. CCD III; 21. Computer. DETAILED DESCRIPTION

[0039] The specific implementation modes of the present invention are described below so that those skilled in the art can understand the present invention. However, it should be clear that the present invention is not limited to the scope of the specific implementation modes. For those of ordinary skill in the art, as long as various changes are within the spirit and scope of the present invention as defined and determined by the attached claims, these changes are obvious, and all inventions and creations utilizing the concept of the present invention are protected.

[0040] Example 1

[0041] This embodiment provides a multi-view observation system with coordinated ultraviolet, visible and near-infrared wavelengths. The system of this embodiment realizes high-precision, multi-view and multi-wavelength dynamic imaging. Figure 1 to Figure 3 , which specifically includes an ultrashort pulse laser light source 1, a pump beam optical path, a detection beam optical path and an image receiving element.

[0042] in;

[0043] An ultrashort pulse laser light source 1 is used to emit an ultrashort pulse laser beam, and the ultrashort pulse laser beam is divided into a pump beam and a detection beam by a beam splitter-combiner mirror I 2;

[0044] Pump beam optical path; the pump beam enters the pump beam optical path and is focused on the sample surface for ablation of the sample surface;

[0045] Detection beam optical path; the detection beam optical path includes a reflection detection light path and a transmission detection light path; the detection beam enters the detection beam optical path, passes through the delay device 5, and is divided into a reflection detection light and a transmission detection light by the beam splitter-combiner mirror II 3; the reflection detection light enters the reflection detection light optical path, and is used to obtain the reflectivity time domain information when the pump light excites the sample; the transmission detection light enters the transmission detection light optical path, and is used to obtain the information of observing laser-induced plasma eruption at different wavelengths;

[0046] The image receiving device is used to receive the reflectivity time domain information when the pump light excites the sample and observe the laser-induced plasma eruption information at different wavelengths.

[0047] Specifically, the ultrashort pulse laser light source 1 of this embodiment generates an ultrashort pulse laser beam of 1030 nm, and the ultrashort pulse laser beam passes through the beam splitter-combiner mirror I 2 and is divided into a pump beam and a detection beam.

[0048] Pump beam optical path;

[0049] The pump beam optical path includes polarization beam splitter Ⅰ6 and lens Ⅰ4. The pump beam adjusts the size of the light field through polarization beam splitter Ⅰ6 and then focuses on the sample surface through lens Ⅰ4 for ablation of the sample surface.

[0050] Detection beam optical path;

[0051] During specific operation, after the detection light beam passes through the delay device 5, it is further divided into reflected detection light and transmitted detection light by the beam splitter-combiner mirror II 3. The reflected detection light enters the reflected detection light path, and the transmitted detection light enters the transmitted detection light path.

[0052] Reflection detection light path;

[0053] The reflective detection light path includes polarization beam splitter II7, imaging objective lens I14 and CCD I8; in specific operation, the wavelength of the reflective detection light is 1030nm, and the reflective detection light passes through polarization beam splitter II7, adjusts the s-polarized light and p-polarized light on the reflective detection light path and irradiates the sample surface, and is reflected back to CCD I through imaging objective lens I14 to obtain the reflectivity time domain information when the pump light excites the sample.

[0054] As a preferred embodiment of this embodiment, for reflective pump detection, the imaging objective lens I14 uses a 20× or 50× objective lens to detect the surface reflectivity evolution information.

[0055] Transmission detection light path;

[0056] The transmission detection light path includes lens II 11, BBO crystal I 9, BBO crystal II 10, lens II 11, short-wave filter 13, lens III 12, imaging objective II 15, dichroic mirror 18, 343 nm band-pass filter 16, 515 nm band-pass filter 17, CCD II 19 and CCD III 20;

[0057] In the specific configuration, BBO crystal I9, BBO crystal II10, shortwave pass filter 13 and lens III12 are all arranged on the reflection path of lens II11; imaging objective lens II15 is arranged on the side of the sample, and a dichroic mirror 18 is arranged behind the imaging objective lens II15, and a 343nm bandpass filter 16 and CCD II19 are arranged on one splitting optical path of the dichroic mirror 18, and a 515nm bandpass filter 17 and CCD III20 are arranged on the other splitting optical path of the dichroic mirror 18.

[0058] As a preferred embodiment of this invention, in order to ensure that they are not located at the focus of the lens and avoid damaging the BBO crystal, the positions of BBO crystal I9 and BBO crystal II10 are both located before the focus of lens II11, and BBO crystal II10 only needs to slightly deviate from the focus of the lens.

[0059] As a preferred embodiment of the present invention, the imaging objective lens II 15 is used to focus the transmitted light after passing through the side of the sample, and is used to detect the processing morphology under different wavelengths of detection light after processing with different polarized light.

[0060] During the specific operation, the transmitted detection light passes through lens II 11 and BBO crystal I 9 to double the frequency and generate photons with a wavelength of 515nm; the photons of 1030nm and 515nm enter BBO crystal II 10 at the same time, and generate photons with a wavelength of 343nm through frequency combination; the photons of 1030nm, 515nm and 343nm pass through the short-wave filter 13 to filter out the photons of 1030nm; the photons of 515nm and 343nm are focused by lens III 12, pass through the side of the sample and enter the imaging objective II 15; after being split by the dichroic mirror 18, the light of 343nm and 515nm passes through the 343nm band-pass filter 16 and the 515nm band-pass filter 17 respectively, and enters CCD II 19 and CCD III 20 respectively, to obtain the information of laser-induced plasma eruption observed at different wavelengths.

[0061] The image receiving component is preferably a computer 21 in this embodiment. The computer 21 is connected to CCDⅠ, CCDⅡ19 and CCDⅢ20 respectively, and is used to receive the reflectivity time domain information when the pump light excites the sample and the laser induced plasma eruption information observed at different wavelengths.

[0062] Example 2

[0063] Based on the system in Example 1, this embodiment provides a multi-view observation method of ultraviolet, visible and near-infrared three-wavelength coordination. The method of this embodiment uses a method combining variable polarization reflection imaging and variable wavelength transmission imaging technology to more accurately capture the dynamic changes of materials during laser ablation and improve imaging accuracy. Through multi-view imaging technology, the polarization information of the object can be captured from different angles, providing a more comprehensive perspective to analyze and reconstruct the three-dimensional structure and dynamic changes of the object, which not only enhances the three-dimensional characteristics of two-dimensional imaging, but also can analyze in detail the internal details and phase change process of the object in the rapid change process. It specifically includes the following steps:

[0064] S1, the ultrashort pulse laser beam emitted by the ultrashort pulse laser light source 1 passes through the beam splitter-combiner mirror and is divided into a pump beam and a detection beam;

[0065] S2, the pump beam is adjusted to the size of the light field through the polarization beam splitter Ⅰ6, and then focused on the sample surface through the lens Ⅰ4 for ablation of the sample surface;

[0066] S3, after the detection light beam passes through the delay device 5, it is divided into the reflection detection light and the transmission detection light by the beam splitter-combiner mirror II3;

[0067] S4, the reflected detection light adjusts the s-polarized light and p-polarized light on the reflected light path through the polarization beam splitter II 7 and irradiates the sample surface, and then is reflected back to CCD I through the imaging objective lens I 14 to obtain the reflectivity time domain information when the pump light excites the sample;

[0068] S5, the transmission detection light passes through lens II 11 and BBO crystal I 9 to double the frequency and generate photons with a wavelength of 515nm; the photons of 1030nm and 515nm enter BBO crystal II 10 at the same time, and generate photons with a wavelength of 343nm through frequency combination; the photons of 1030nm, 515nm and 343nm pass through the short-wave filter 13 to filter out the photons of 1030nm; the photons of 515nm and 343nm are focused by lens III 12, pass through the side of the sample and enter the imaging objective II 15; after being split by the dichroic mirror 18, the light of 343nm and 515nm passes through the 343nm bandpass filter 16 and the 515nm bandpass filter 17 respectively, and enters CCD II 19 and CCD III 20 respectively, and the information of laser-induced plasma eruption observed at different wavelengths is obtained;

[0069] S6. The image receiving element receives the reflectivity time domain information when the pump light excites the sample and the laser-induced plasma eruption information observed at different wavelengths, and uses the image three-dimensional contour extraction method to extract and restore the three-dimensional contour of the sample object surface and draw it into a three-dimensional graph.

[0070] In this embodiment, step S4 and step S5 may be parallel steps.

[0071] Example 3

[0072] Based on the system of Example 1 and the method of Example 2, this embodiment provides a multi-view observation system with coordinated ultraviolet, visible and near-infrared wavelengths, and the specific selection parameters are as follows:

[0073] The central wavelength of the ultrashort pulse laser is 1030nm, the frequency is 40Hz, the single pulse width is 265fs, and the maximum output power is 3.5W; the beam splitter-combiner mirror divides the 1030nm femtosecond laser into two lasers with the same power, which serve as the pump beam and the detection beam respectively;

[0074] BBO crystal Ⅰ9 is a type Ⅰ phase-matched crystal, the frequency doubling mode is o+o→e, and its size is 3×3×30mm 3 , the 1030nm femtosecond laser passing through lens Ⅰ4 (away from the focus) is frequency-doubled to produce an output power of 1W and a central wavelength of λ 1 / 2=515nm frequency-doubled femtosecond laser;

[0075] The doubled 515nm laser and 1030nm laser enter the BBO crystal Ⅱ10 (located in front of the focus of lens Ⅰ4) at the same time. Under high flux, the two combine to produce an output power of 200mW and a central wavelength of λ 1 / 2 =343nm femtosecond laser;

[0076] Then the light beam passes through a short-wave pass filter to filter out the 1030nm light beam; the 515nm and 343nm light beams are focused by the imaging objective lens II 15, and are divided into two observation light paths of 515nm and 343nm by a dichroic mirror 18, a 343nm bandpass filter 16 and a 515nm bandpass filter 17, and enter CCD II 19 and CCD III 20 respectively.

[0077] Polarization beam splitter II 7 separates two mutually perpendicular linear polarized light beams, which are finally focused onto the sample surface through imaging objective lens I 14 to form a clear image. By adjusting polarization beam splitter II 7, reflected observation light with different polarization states is obtained, which finally enters CCD I 8.

[0078] Polarization beam splitter Ⅰ6 is used to adjust the intensity of incident pump light. By adjusting polarization beam splitter Ⅰ6, the pump light flux and size can be adjusted, and finally it is incident on the sample surface at a 45° angle through lens Ⅰ4.

[0079] Finally, the information of CCDⅠ8, Ⅱ, and Ⅲ is integrated on the computer 21, and the three-dimensional contour of the object surface is extracted and restored using the image three-dimensional contour extraction method, and drawn into a three-dimensional graph.

[0080] Although the specific implementation of the invention is described in detail in conjunction with the drawings, it should not be understood as limiting the scope of protection of this patent. Within the scope described in the claims, various modifications and variations that can be made by those skilled in the art without creative work still fall within the scope of protection of this patent.

Claims

1. A UV-visible-near infrared three-wavelength coordinated multi-view observation system, characterized in that: include: An ultrashort pulse laser light source (1); the ultrashort pulse laser beam emitted by the ultrashort pulse laser light source (1) is divided into a pump beam and a detection beam by passing through the beam splitting-combining mirror I (2); A pump beam optical path; the pump beam enters the pump beam optical path and is focused on the sample surface for ablation of the sample surface; A detection beam optical path; the detection beam optical path includes a reflection detection light path and a transmission detection light path; the detection beam enters the detection beam optical path, passes through a delay device (5), and is divided into a reflection detection light and a transmission detection light by a beam splitter-combiner mirror II (3); the reflection detection light enters the reflection detection light optical path and is used to obtain reflectivity time domain information when the pump light excites the sample; the transmission detection light enters the transmission detection light optical path and is used to obtain information on laser-induced plasma eruption at different wavelengths; The image receiving device is used to receive the reflectivity time domain information when the pump light excites the sample and observe the laser-induced plasma eruption information at different wavelengths.

2. The UV-visible-near-infrared three-wavelength coordinated multi-viewing angle observation system according to claim 1, characterized in that: The pump beam optical path includes a polarization beam splitter I (6) and a lens I (4); the pump beam is adjusted to a size of a light field by the polarization beam splitter I (6), and then focused on a sample surface by the lens I (4) for ablation of the sample surface.

3. The UV-visible-near-infrared three-wavelength coordinated multi-viewing angle observation system according to claim 1, characterized in that: The reflective detection light path includes a polarization beam splitter II (7), an imaging objective lens I (14) and a CCD I (8); the reflective detection light passes through the polarization beam splitter II (7), adjusts the s-polarized light and the p-polarized light on the reflective detection light path and irradiates the sample surface, and is reflected back to the CCD I (8) through the imaging objective lens I (14) to obtain the reflectivity time domain information when the pump light excites the sample.

4. The UV-visible-near-infrared three-wavelength coordinated multi-viewing angle observation system according to claim 1, characterized in that: The transmission detection light path comprises lens II (11), BBO crystal I (9), BBO crystal II (10), lens II (11), short-wave pass filter (13), lens III (12), imaging objective lens II (15), dichroic mirror (18), 343 nm band-pass filter (16), 515 nm band-pass filter (17), CCD II (19) and CCD III (20); the BBO crystal I (9), BBO crystal II (10), short-wave pass filter ( 13) and lens III (12) are both arranged on the reflection path of the lens II (11); the imaging objective lens II (15) is arranged on the side of the sample; a dichroic mirror (18) is arranged behind the imaging objective lens II (15); a 343nm bandpass filter (16) and a CCD II (19) are arranged on one splitting optical path of the dichroic mirror (18), and a 515nm bandpass filter (17) and a CCD III (20) are arranged on the other splitting optical path of the dichroic mirror (18).

5. The UV-visible-near-infrared three-wavelength coordinated multi-viewing observation system according to claim 4, characterized in that: The BBO crystal I (9) and the BBO crystal II (10) are both located before the focus of the lens II (11).

6. The UV-visible-near-infrared three-wavelength coordinated multi-viewing angle observation system according to claim 3, characterized in that: The wavelength of the reflective detection light is 1030 nm.

7. The UV-visible-near-infrared three-wavelength coordinated multi-viewing angle observation system according to claim 3, characterized in that: The imaging objective lens I (14) is a 20× or 50× objective lens.

8. The UV-visible-near-infrared three-wavelength coordinated multi-viewing angle observation system according to claim 1, characterized in that: The image receiving component is a computer.

9. A multi-view observation method of ultraviolet, visible and near infrared three-wavelength coordination according to any one of claims 1 to 8, characterized in that: The following steps are involved: S1, an ultrashort pulse laser beam emitted by an ultrashort pulse laser light source (1) passes through the beam splitter-combiner mirror (2) and is divided into a pump beam and a detection beam; S2, the pump beam is adjusted through polarization beam splitter I (6) to adjust the size of the light field, and then focused on the sample surface through lens I (4) for ablation of the sample surface; S3, after the detection light beam passes through the delay device (5), it is divided into reflected detection light and transmitted detection light by the beam splitter-combiner mirror II (3); S4, the reflected detection light adjusts the s-polarized light and p-polarized light on the reflected light path through the polarization beam splitter II (7) and illuminates the sample surface, and then is reflected back to CCD I (8) through the imaging objective lens I (14) to obtain the reflectivity time domain information when the pump light excites the sample; S5, the transmission detection light passes through lens II (11) and BBO crystal I (9) to double the frequency and generate photons with a wavelength of 515nm; the photons of 1030nm and 515nm enter BBO crystal II (10) at the same time, and generate photons with a wavelength of 343nm by frequency combination; the photons of 1030nm, 515nm and 343nm pass through the short-wave filter (13) to filter out the photons of 1030nm; the photons of 515nm and 343nm are focused by lens III (12), pass through the side of the sample and enter the imaging objective lens II (15); after being split by the dichroic mirror (18), the light of 343nm and 515nm passes through the 343nm band-pass filter (16) and the 515nm band-pass filter (17) respectively, and enters CCD II (19) and CCD III (20) respectively, to obtain the information of laser-induced plasma eruption observed at different wavelengths; S6. The image receiving element receives the reflectivity time domain information when the pump light excites the sample and the laser-induced plasma eruption information observed at different wavelengths, and uses the image three-dimensional contour extraction method to extract and restore the three-dimensional contour of the sample object surface and draw it into a three-dimensional graph.

Images