A combined coating capillary X-ray monochromatic focusing lens analysis system and focal spot size adjusting method

Abstract

The application discloses a kind of combination coating capillary X-ray monochromatic focusing lens analysis system and focal spot size adjusting method, solve the technical problem that the method for changing optical path to adjust focal spot of traditional is easy to introduce error. Including X-ray source, ray beam blocker, coated parabolic single capillary lens, multilayer film cone type single capillary lens and adjusting frame are formed, the X-ray emitted from X-ray source is emitted on the inner wall of multilayer film cone type single capillary lens after parallelization by coated parabolic single capillary lens, the multilayer film of the inner wall of cone type single capillary lens monochromatizes and focuses X-ray to focal spot, and the size of focal spot can be adjusted by moving the relative position of ray blocker. The X-ray monochromatic focusing optical path of the application has high energy utilization rate to X-ray source, and the monochromatic X-ray generated can improve the detection sensitivity and detection efficiency of system.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of X-ray analysis technology, in particular to an analysis system of a combination of a coated capillary X-ray monochromatic focusing lens and a focal spot size adjusting method. BACKGROUND

[0002] Monochromatic focusing X-rays have unique advantages in the fields of XRF, XRD, XAFS and X-ray imaging, for example, in XRF analysis, monochromatic focusing X-rays can reduce the background signal in the analysis process to improve the analysis accuracy. Monochromatic focusing X-rays can be obtained by a single element of a bent crystal or a multilayer film lens with a special surface, but the manufacture of these two optical elements involves complex processes, which is difficult and costly. Therefore, a combination of optical elements such as capillary lenses, multilayer films, and Fresnel zone plates is often used to obtain monochromatic focusing X-rays.

[0003] Capillary X-ray lenses, as an optical element based on total reflection principle, can realize focusing or parallel of hard X-rays. Compared with optical elements such as zone plates and refractive lenses, capillary X-ray lenses have the advantages of simple preparation and flexible application. In recent years, researchers have developed different optical systems based on multi-capillary lenses and single-capillary lenses. Through the combination of multi-capillary optical elements, the performance limitations of single elements can be broken through to obtain better X-ray modulation effect. Further, by coating the inner wall of the glass, the modulation capacity of the capillary X-ray element can be further improved. For example, coating a metal film can increase the acceptance angle while improving the transmission efficiency of high-energy X-rays (Energy>20keV), and coating a multilayer film can achieve X-ray monochromatization. Further, in different application scenarios of monochromatic focusing X-rays, the focal spot size is often affected by the size of the X-ray source and the parameters of the device and cannot be freely adjusted, which limits its application and expansion in related fields.

[0004] In view of the above problems, the present application provides a combination of a coated capillary X-ray monochromatic focusing lens analysis system and a focal spot size adjusting method. SUMMARY

[0005] The present application provides a combination of a coated capillary X-ray monochromatic focusing lens analysis system and a focal spot size adjusting method.

[0006] In order to achieve the above purpose, the present application adopts the following technical solutions:

[0007] The purpose of this invention is to provide an analytical system combining a coated capillary X-ray monochromatic focusing lens, comprising an X-ray source, a beam blocker, a coated parabolic single capillary lens, a multilayer conical single capillary lens, and an adjustment frame; wherein, the X-ray source is positioned at the focal point of the coated parabolic single capillary lens, the beam blocker is positioned between the X-ray source and the coated parabolic single capillary lens, and the multilayer conical single capillary lens is positioned after the coated parabolic single capillary lens; the beam blocker, the coated parabolic single capillary lens, and the multilayer conical single capillary lens are all integrated into the system. The collimation of the conical single capillary lens is adjusted using an adjustment frame. The X-ray source, beam blocker, coated parabolic single capillary lens, and multilayer conical single capillary lens are coaxial. The beam blocker is positioned between the focal point and the entrance of the parabolic surface where the coated parabolic single capillary lens is located. X-rays emitted from the X-ray source are limited by the beam blocker and reflected by the coated parabolic single capillary lens to obtain a parallel annular X-ray beam. The parallel annular primary X-rays are reflected by the multilayer conical single capillary lens to obtain monochromatic X-rays and focused at the focal point.

[0008] Furthermore, the X-ray source adopts a copper-molybdenum target X-ray source, and the focal spot shape of the source is dot-shaped.

[0009] Furthermore, the beam blocker is made of a high-Z material.

[0010] Furthermore, the distance f1 from the X-ray source to the inlet end of the coated parabolic single capillary lens is 10mm-500mm, and the diameter D of the inlet end of the coated parabolic single capillary lens is... in The exit end diameter d of the multilayer film conical single capillary lens out Equal, outlet diameter D out The inlet diameter d of the multilayer film conical single capillary lens in The back focal length f2 is equal to the length l of the multilayer conical single capillary lens. c .

[0011] Furthermore, the coated parabolic single capillary lens is made of silicate glass or lead glass, the inner wall is coated with a high Z element, and the cross-sectional shape curve along its length is a parabola.

[0012] Furthermore, the multilayer film conical single capillary lens is made of silicate glass or lead glass.

[0013] Furthermore, the inlet diameter d of the multilayer film conical single capillary lens in Larger than its outlet diameter d out The taper α of the multilayer film conical single capillary lens is the angle between the lens inner diameter curve and its central axis, and its value is calculated according to the following formula:

[0014]

[0015] Further, the inner wall coating material of the multilayer film cone type single capillary lens is a multilayer film, the multilayer film material is Al2O3 / HfO2, and the high reflectivity angle of the multilayer film to the target X-ray is equal to the taper α of the multilayer film cone type single capillary lens, and the inner wall coating method of the multilayer film cone type single capillary lens adopts an atomic layer deposition method.

[0016] Further, the method comprises the following specific steps:

[0017] Step one, vertically place the ray beam blocker between the X-ray light source and the coated parabolic single capillary lens, and make the center of the circle on the optical axis;

[0018] Step two, move the ray beam blocker forward and backward along the optical axis direction after starting the X-ray light source, and the beam spot size at the focal point changes;

[0019] Step three, when the ray beam blocker is closer to the X-ray light source, the focal spot at the focal point is smaller, and the focal spot diameter can be calculated according to the following formula:

[0020]

[0021] Wherein, d spot is the focal spot diameter, D out_using is the projection outer diameter of the light spot irradiated from the X-ray light source to the inner wall of the coated parabolic single capillary lens after moving the ray beam blocker.

[0022] The present application has the following advantages: the focal spot size adjusting method provided by the present application includes the geometric structure of the optical path, the acceptance area matching of the parabolic single capillary X-ray lens and the multilayer film cone type single capillary lens, the taper α of the cone type single capillary lens and the design angle α of the multilayer film, and moving the ray beam blocker to obtain different size focal spots.

[0023] The present application can realize the rapid adjustment of the focal spot size, provide a reliable means for different analysis requirements of researchers, and help promote the development and progress of related fields. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is an analysis system schematic diagram of the embodiment of the present application combined with the coated capillary X-ray monochromatic focusing lens;

[0025] Figure 2 It is a schematic diagram of the coated parabolic single capillary lens in the embodiment of the present application;

[0026] Figure 3A schematic diagram of a multilayer film cone type single capillary lens in an embodiment of the present application;

[0027] Figure 4 A schematic diagram of the principle of adjusting the focal spot size of an analysis system of a combined coated capillary X-ray monochromatic focusing lens in an embodiment of the present application.

[0028] In the figure: 1, X-ray source; 2, divergent primary X-rays; 3, beam stopper; 4, coated parabolic single capillary lens; 5, multilayer film cone type single capillary lens; 6, focal spot; 7, adjusting frame. DETAILED DESCRIPTION

[0029] To make the objectives, technical solutions and advantages of the present application clearer, the technical solutions in the present application are described below in a clear and complete manner. Obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative effort belong to the scope of protection of the present application.

[0030] Monochromatic focusing X-rays are widely used in X-ray fluorescence, X-ray diffraction and other analysis scenarios. However, it is not easy to popularize the common optical elements with monochromatic focusing function because of high preparation cost and great difficulty. Combining different single elements with simple preparation can reduce the cost of obtaining monochromatic focusing X-rays, and has important significance for the practical application of X-ray spectral analysis technology.

[0031] Embodiment one

[0032] As shown in Figure 1 , an analysis system of a combined coated capillary X-ray monochromatic focusing lens,

[0033] The system comprises an X-ray source 1, a beam stopper 3, a coated parabolic single capillary lens 4, a multilayer film cone type single capillary lens 5 and an adjusting frame 7. The X-ray source 1 is located at the focal point of the coated parabolic single capillary lens 4, the beam stopper 3 is located between the X-ray source 1 and the coated parabolic single capillary lens 4, and the multilayer film cone type single capillary lens 5 is located after the coated parabolic single capillary lens 4. The focal spot of the X-ray source 1, the axis of the beam stopper 3, the axis of the coated parabolic single capillary lens 4 and the axis of the multilayer film cone type single capillary lens 5 are on the same straight line. The collimation of the beam stopper 3 and the two lenses is adjusted by the adjusting frame 7.

[0034] The divergent primary X-rays 2 emitted by X-ray source 1 are filtered by beam blocker 3 and then received by parabolic single capillary lens 4. The received primary divergent X-rays are modulated into a parallel annular beam. The annular beam is received by multilayer conical single capillary lens 5 and converted into monochromatic focused X-rays, which are then transmitted to the focal spot 6.

[0035] In this embodiment, the X-ray source 1 is a copper-molybdenum target X-ray source, and the focal spot of the source is dot-shaped.

[0036] In this embodiment, the beam blocker 3 is made of a high-Z material.

[0037] In this embodiment, the distance f1 from the X-ray source 1 to the inlet end of the coated parabolic single capillary lens 4 is 10mm-500mm, and the diameter D of the inlet end of the coated parabolic single capillary lens 4 is... in The exit end diameter d of the multilayer film conical single capillary lens 5 out Equal, outlet diameter D out The inlet diameter d of the multilayer film conical single capillary lens 5 in The back focal length f2 is equal to that of the multilayer conical single capillary lens with a length l. c .

[0038] In this embodiment, the coated parabolic single capillary lens 4 is made of silicate glass or lead glass, the inner wall is coated with a high Z element, and the cross-sectional shape curve along its length is a parabola.

[0039] In this embodiment, the multilayer film conical single capillary lens 5 is made of silicate glass or lead glass.

[0040] like Figure 1 As shown, the inlet and outlet of the coated parabolic single capillary lens 4 and the multilayer conical single capillary lens 5 are matched, and the taper α of the conical single capillary lens is consistent with the high reflectivity angle α of its multilayer film design for the target monoenergetic X-rays. Therefore, the combined coated capillary X-ray monochromatic focusing lens analysis system proposed in this embodiment can be widely used in different analysis scenarios.

[0041] Reference Figure 2 This illustrates the structure of the coated parabolic single capillary lens in the above embodiments.

[0042] Reference Figure 3 It shows the outline curve of the multilayer film conical single capillary lens in the above embodiment.

[0043] like Figure 3 As shown, in this embodiment, the inlet diameter d of the multilayer film conical single capillary lens 5 is... in Larger than its outlet diameter dout The taper α of the multilayer film conical single capillary lens 5 is the angle between the lens inner diameter curve and its central axis, and its size is calculated according to the following formula:

[0044]

[0045] The following is an example of a combined coated capillary X-ray monochromatic focusing lens analysis system: the distance f1 from the X-ray source to the inlet end of the front coated parabolic single capillary lens is 52 mm, and the length l of the coated parabolic single capillary lens is... p It is 152mm, and the inlet diameter D is... in It is 2mm, and the outlet diameter is D. out The inlet diameter d of the multilayer film conical single capillary lens is 4mm. in The diameter is 4mm, and the outlet diameter is d. out The thickness is 2mm, the multilayer film material is Al2O3 / HfO2, and the length is l. c The diameter is 46.2 mm, the overall length of the combined lens system is 198.2 mm, the light source acceptance angle is 12 mrad, and the beam divergence angle is 60 mrad.

[0046] Example 2

[0047] like Figure 4 As shown, a method for adjusting the focal spot size of a combined coated capillary X-ray monochromatic focusing lens analysis system includes the following steps:

[0048] Step 1: Place the X-ray beam blocker 3 vertically between the X-ray source 1 and the coated parabolic single capillary lens 4, and ensure that its center is located on the optical path axis.

[0049] Step 2: After turning on the X-ray source 1, move the beam blocker 3 back and forth along the optical path axis, and the size of the beam spot at the focal point will change.

[0050] Step 3: The closer the beam blocker 3 is to the X-ray source 1, the smaller the focal spot at the focal point. The diameter of the focal spot can be calculated using the following formula:

[0051]

[0052] Among them, D out_using It is the projected outer diameter of the light spot that shines from the X-ray source onto the inner wall of the coated parabolic single capillary lens after the beam blocker is moved.

[0053] Although specific embodiments of the present invention have been described in detail with reference to the accompanying drawings, this should not be construed as limiting the scope of protection of the present invention. Various modifications and variations that can be made by those skilled in the art without inventive effort within the scope described in the claims are still within the scope of protection of the present invention.

Claims

1. A method for adjusting the focal spot size of an analytical system combined with a coated capillary X-ray monochromatic focusing lens, the method for adjusting the focal spot size being implemented using an analytical system, characterized in that, The analysis system comprises an X-ray light source (1), a ray beam blocker (3), a coated parabolic single capillary lens (4), a multilayer film cone single capillary lens (5) and an adjusting frame (7); wherein the X-ray light source (1) is arranged at the focal point of the coated parabolic single capillary lens (4), the ray beam blocker (3) is arranged between the X-ray light source (1) and the coated parabolic single capillary lens (4), and the multilayer film cone single capillary lens (5) is arranged after the coated parabolic single capillary lens (4); the collimations of the ray beam blocker (3) and the coated parabolic single capillary lens (4) and the multilayer film cone single capillary lens (5) are all adjusted by the adjusting frame (7). The X-ray light source (1), the ray beam blocker (3), the coated parabolic single capillary lens (4) and the multilayer film cone single capillary lens (5) are coaxial, the ray beam blocker (3) is arranged between the focal point of the parabolic surface of the coated parabolic single capillary lens (4) and the entrance, the X-rays emitted from the X-ray light source (1) are limited by the ray beam blocker (3), then reflected by the coated parabolic single capillary lens (4) to obtain parallel X-ray ring-shaped light beams, then reflected by the multilayer film cone single capillary lens (5) to obtain monochromatic X-rays and focus at the focal point. The inner wall of the multilayer film cone single capillary lens (5) is coated with a multilayer film, and the high reflectivity angle of the multilayer film to the target X-rays is equal to the taper α of the multilayer film cone single capillary lens (5), and the inner wall of the multilayer film cone single capillary lens (5) is coated by using an atomic layer deposition method. The specific steps of the focal spot size adjusting method are as follows: Step one, vertically place the ray beam blocker between the X-ray light source and the coated parabolic single capillary lens, and make the center of the ray beam blocker located on the optical axis; Step two, move the ray beam blocker along the optical axis direction after starting the X-ray light source, and the beam spot size at the focal point changes; Step three, when the ray beam blocker is closer to the X-ray light source, the focal spot at the focal point is smaller, and the focal spot diameter is calculated according to the following formula: ; wherein, is the focal spot diameter, is the projected outer diameter of the light spot on the inner wall of the coated parabolic single capillary lens from the X-ray source after the movement of the beam stop.

2. The method for adjusting the focal spot size of the analytical system using a combined coated capillary X-ray monochromatic focusing lens as described in claim 1, characterized in that: The X-ray light source (1) adopts a copper or molybdenum target X-ray source, and the focal spot shape of the light source is point-shaped.

3. The method for adjusting the focal spot size of the analytical system using a combined coated capillary X-ray monochromatic focusing lens as described in claim 1, characterized in that: The material of the ray beam blocker (3) is a high-Z material.

4. The method for adjusting the focal spot size of the analytical system using a combined coated capillary X-ray monochromatic focusing lens as described in claim 1, characterized in that: The distance f1 from the X-ray source (1) to the inlet end of the coated parabolic single capillary lens (4) is 10mm-500mm, and the diameter D of the inlet end of the coated parabolic single capillary lens (4) is... in The outlet diameter d of the multilayer film conical single capillary lens (5) out Equal, outlet diameter D out The inlet diameter d of the multilayer film conical single capillary lens (5) in Equal, the back focal length f2 is greater than the length l of the multilayer conical single capillary lens (5). c .

5. The method for adjusting the focal spot size of the analytical system using a combined coated capillary X-ray monochromatic focusing lens as described in claim 4, characterized in that: The coated parabolic single capillary lens (4) is made of silicate glass or lead glass, the inner wall is coated with a high-Z element metal film, and the cross-sectional profile curve along the length direction is a parabola.

6. The method for adjusting the focal spot size of the analytical system using a combined coated capillary X-ray monochromatic focusing lens as described in claim 4, characterized in that: The multilayer film cone single capillary lens (5) is made of silicate glass or lead glass, and the inner wall is coated with a multilayer film by using an atomic layer deposition technology.

7. The method for adjusting the focal spot size of the analytical system using a combined coated capillary X-ray monochromatic focusing lens as described in claim 6, characterized in that: The multi-layer film conical single capillary lens (5) has an inlet end diameter d in greater than its outlet end diameter d out The multi-layer film conical single capillary lens (5) has a taper α, which is the angle between the inner diameter curve of the lens and the central axis, and is calculated according to the following formula: 。

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